JP7483114B2 - Ozone generating device and ozone generating method - Google Patents
Ozone generating device and ozone generating method Download PDFInfo
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- JP7483114B2 JP7483114B2 JP2023175564A JP2023175564A JP7483114B2 JP 7483114 B2 JP7483114 B2 JP 7483114B2 JP 2023175564 A JP2023175564 A JP 2023175564A JP 2023175564 A JP2023175564 A JP 2023175564A JP 7483114 B2 JP7483114 B2 JP 7483114B2
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- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims description 153
- 238000000034 method Methods 0.000 title claims description 15
- 239000012530 fluid Substances 0.000 claims description 34
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 25
- 239000001301 oxygen Substances 0.000 claims description 25
- 229910052760 oxygen Inorganic materials 0.000 claims description 25
- 230000007423 decrease Effects 0.000 claims description 20
- 230000008033 biological extinction Effects 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 230000004397 blinking Effects 0.000 description 15
- 238000005286 illumination Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 13
- 238000000354 decomposition reaction Methods 0.000 description 8
- 239000002994 raw material Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 3
- -1 air Chemical compound 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 238000004332 deodorization Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
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- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Description
本発明は、エキシマランプを用いたオゾン生成装置に関し、特に、オゾン濃度の調整に関する。 The present invention relates to an ozone generator using an excimer lamp, and in particular to adjusting the ozone concentration.
酸化力の強いオゾンを生成する方法として、大気など酸素を含む原料ガスに紫外線を照射することによってオゾンを生成させることができる。このように生成するオゾンの濃度を調整する方法としては、オゾン生成装置がオゾンを生成する時間を調整する方法と、オゾン生成装置に印加する電圧を変化させ、単位時間当たりのオゾン生成量を調整する方法と、オゾン生成装置が生成する単位時間当たりのオゾン生成量に対して、酸素を含む原料ガスの供給量を調整する方法とがある（特許文献１参照）。 Ozone, which has strong oxidizing power, can be generated by irradiating a raw material gas containing oxygen, such as air, with ultraviolet light. Methods for adjusting the concentration of the ozone generated in this way include adjusting the time that the ozone generator generates ozone, changing the voltage applied to the ozone generator to adjust the amount of ozone generated per unit time, and adjusting the supply amount of raw material gas containing oxygen relative to the amount of ozone generated per unit time by the ozone generator (see Patent Document 1).
オゾンを生成させる紫外線を照射する光源としては、例えば、エキシマランプが用いられる。エキシマランプから放射される波長２００ｎｍ以下の紫外線はオゾン生成効率がよく、オゾンを高濃度に含むガスを生成できる。しかし、高温や低流量で原料ガスが流れる領域にエキシマランプを配置した使用環境において、エキシマランプの表面温度が７０℃以上となると、紫外線照度が低下する（特許文献２参照）。さらに、過熱状態となったエキシマランプによってオゾンを含むガスが４０℃以上になると、オゾン分解が始まる（特許文献３参照）。 For example, an excimer lamp is used as a light source for irradiating ultraviolet light that generates ozone. Ultraviolet light with a wavelength of 200 nm or less emitted from an excimer lamp is efficient at generating ozone, and can generate a gas containing a high concentration of ozone. However, in an operating environment in which an excimer lamp is placed in an area where raw material gas flows at high temperatures and low flow rates, if the surface temperature of the excimer lamp reaches 70°C or higher, the ultraviolet illuminance decreases (see Patent Document 2). Furthermore, if an overheated excimer lamp causes the gas containing ozone to reach 40°C or higher, ozone decomposition begins (see Patent Document 3).
このように、使用環境に応じてエキシマランプの過熱やオゾン分解による影響を受けるため、オゾン生成量が異なる複数のエキシマランプを使用環境に応じて使い分けることによって、オゾン生成量を調整していた（特許文献４参照）。 As such, because the excimer lamp is affected by overheating and ozone decomposition depending on the usage environment, the amount of ozone generated is adjusted by using multiple excimer lamps with different ozone generation amounts depending on the usage environment (see Patent Document 4).
オゾン濃度は、エキシマランプから放射される紫外線照度に応じたオゾン生成だけでなく、原料ガスの温度や流量等の使用環境に応じて、紫外線照度の低下やオゾン分解に影響を受ける。そのため、紫外線照射効率やオゾン生成効率の低下を抑制して、オゾン濃度を調整することが難しい。 Ozone concentration is affected not only by ozone generation according to the UV irradiance emitted from the excimer lamp, but also by a decrease in UV irradiance and ozone decomposition according to the operating environment, such as the temperature and flow rate of the raw material gas. For this reason, it is difficult to adjust the ozone concentration while suppressing the decrease in UV irradiation efficiency and ozone generation efficiency.
したがって、様々な使用環境でも紫外線照射効率やオゾン生成効率の低下を防ぐことのできるオゾン生成装置が求められる。 Therefore, there is a demand for an ozone generator that can prevent a decrease in UV irradiation efficiency and ozone generation efficiency in a variety of usage environments.
本発明の一態様であるオゾン生成装置は、酸素を含む流体が流れる流路に配置され、オゾンを生成可能な波長を有する紫外線を照射するエキシマランプと、エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行う点灯制御部とを備え、点灯制御部が、高周波点灯の開始から紫外線照度が最大に達した後、紫外線照度が低下して一定となる時間よりも前に、高周波点灯から消灯へ切り替える。 The ozone generating device according to one aspect of the present invention is disposed in a flow path through which an oxygen-containing fluid flows, and includes an excimer lamp that irradiates ultraviolet light having a wavelength capable of generating ozone, and an illumination control unit that controls the illumination of the excimer lamp by repeatedly turning the lamp on and off at high frequency. The illumination control unit switches the lamp from high frequency illumination to off before the time when the ultraviolet illuminance decreases and becomes constant after the ultraviolet illuminance reaches a maximum from the start of high frequency illumination.
例えば、点灯制御部は、紫外線照度が最大に達した後、その９０％まで低下する時間より前に、高周波点灯から消灯へ切り替える。 For example, the lighting control unit switches from high-frequency lighting to off before the UV illuminance drops to 90% after it reaches its maximum.
本発明の他の一態様であるオゾン生成装置は、酸素を含む流体が流れる流路に配置され、オゾンを生成可能な波長を有する紫外線を照射するエキシマランプと、エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行う点灯制御部とを備え、点灯制御部が、高周波点灯の開始からランプ表面温度が最大となる時間よりも前に、高周波点灯から消灯へ切り替える。 An ozone generator according to another aspect of the present invention is provided with an excimer lamp that is placed in a flow path through which an oxygen-containing fluid flows and that irradiates ultraviolet light having a wavelength capable of generating ozone, and an illumination control unit that controls the illumination of the excimer lamp by repeatedly turning it on and off at high frequency, and the illumination control unit switches from high frequency illumination to extinguishing before the time from the start of high frequency illumination when the lamp surface temperature reaches its maximum.
例えば、点灯制御部は、高周波点灯の開始からランプ表面温度が８０℃に達する時間よりも前に、高周波点灯から消灯へ切り替える。 For example, the lighting control unit switches from high-frequency lighting to extinguishing before the lamp surface temperature reaches 80°C from the start of high-frequency lighting.
本発明の他の一態様であるオゾン生成装置は、酸素を含む流体が流れる流路に配置され、オゾンを生成可能な波長を有する紫外線を照射するエキシマランプと、エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行う点灯制御部とを備え、点灯制御部が、高周波点灯の開始から流体の温度が６０℃に達する時間よりも前に、高周波点灯から消灯へ切り替える。 An ozone generator according to another aspect of the present invention is provided with an excimer lamp that is placed in a flow path through which an oxygen-containing fluid flows and that irradiates ultraviolet light having a wavelength capable of generating ozone, and an illumination control unit that controls the illumination of the excimer lamp by repeatedly turning the lamp on and off at high frequency, and the illumination control unit switches the lamp from high frequency illumination to off before the temperature of the fluid reaches 60°C from the start of high frequency illumination.
例えば、点灯制御部は、高周波点灯期間を１秒以下の範囲で一定とし、消灯期間を変更する。例えば、エキシマランプは、高周波点灯を維持し続けたときのオゾン生成量が３ｍｇ/ｈ以上となるエキシマランプとして構成される。例えば流体は、１ｍ3／ｍｉｎ以下で流路を流れる。 For example, the lighting control unit keeps the high frequency lighting period constant within a range of 1 second or less and changes the extinction period. For example, the excimer lamp is configured as an excimer lamp that generates ozone at 3 mg/h or more when high frequency lighting is continued. For example, the fluid flows through the flow path at 1 m3/min or less.
本発明の他の一態様であるオゾン生成方法は、オゾンを生成可能な波長を有する紫外線を照射するエキシマランプを、酸素を含む流体が流れる流路に配置し、エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行うオゾン生成方法であって、高周波点灯の開始から紫外線照度が最大に達した後、紫外線照度が低下して一定となる時間よりも前に、高周波点灯から消灯へ切り替える。 Another aspect of the present invention is an ozone generation method in which an excimer lamp that irradiates ultraviolet light having a wavelength capable of generating ozone is placed in a flow path through which an oxygen-containing fluid flows, and the excimer lamp is controlled to be repeatedly turned on and off at a high frequency, and the high frequency light is switched from on to off before the time when the ultraviolet light illuminance decreases and becomes constant after the ultraviolet light illuminance reaches a maximum after the start of the high frequency light.
本発明の他の一態様であるオゾン生成方法は、オゾンを生成可能な波長を有する紫外線を照射するエキシマランプを、酸素を含む流体が流れる流路に配置し、エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行うオゾン生成方法であって、高周波点灯の開始からランプ表面温度が最大となる時間よりも前に、高周波点灯から消灯へ切り替える。 Another aspect of the present invention is an ozone generation method in which an excimer lamp that irradiates ultraviolet light having a wavelength capable of generating ozone is placed in a flow path through which a fluid containing oxygen flows, and the excimer lamp is controlled to be repeatedly turned on and off at high frequency, and the high frequency lighting is switched from on to off before the time from the start of high frequency lighting when the lamp surface temperature reaches its maximum.
本発明の他の一態様であるオゾン生成方法は、オゾンを生成可能な波長を有する紫外線を照射するエキシマランプを、酸素を含む流体が流れる流路に配置し、エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行うオゾン生成方法であって、高周波点灯の開始から流体の温度が６０℃に達する時間よりも前に、高周波点灯から消灯へ切り替える。 Another aspect of the present invention is an ozone generation method in which an excimer lamp that irradiates ultraviolet light having a wavelength capable of generating ozone is placed in a flow path through which a fluid containing oxygen flows, and the excimer lamp is controlled to be repeatedly turned on and off at high frequency, and the high frequency lighting is switched from on to off before the temperature of the fluid reaches 60°C from the start of high frequency lighting.
例えば本発明の一態様であるオゾン生成装置は、酸素を含む流体が流れ、エキシマランプの紫外線が照射されてオゾンを生成し、エキシマランプの点滅の開始と停止を繰り返すことでオゾン濃度を調整するオゾン生成装置であって、エキシマランプの点滅を開始してから表面温度の上昇により放射される紫外線の照度が低下して一定となるまでの時間より前に、エキシマランプの点滅を停止する。 For example, one aspect of the present invention is an ozone generator in which an oxygen-containing fluid flows, ozone is generated by irradiation with ultraviolet light from an excimer lamp, and the ozone concentration is adjusted by repeatedly starting and stopping the blinking of the excimer lamp, and the blinking of the excimer lamp is stopped before the time from when the blinking of the excimer lamp starts until the illuminance of the ultraviolet light emitted by the surface temperature increases and decreases to a constant level.
例えば本発明の一態様であるオゾン生成装置は、酸素を含む流体が流れ、エキシマランプの紫外線が照射されてオゾンを生成し、エキシマランプの点滅の開始と停止を繰り返すことでオゾン濃度を調整するオゾン生成装置であって、エキシマランプの点滅を開始してから放射される紫外線の照度が最大となった後に表面温度の上昇により紫外線の照度が９０％まで低下するまでの時間より前に、エキシマランプの点滅を停止する。 For example, one aspect of the present invention is an ozone generator in which an oxygen-containing fluid flows, ozone is generated by irradiation with ultraviolet light from an excimer lamp, and the ozone concentration is adjusted by repeatedly starting and stopping the blinking of the excimer lamp, and the blinking of the excimer lamp is stopped before the time when the illuminance of the ultraviolet light emitted from the excimer lamp starts to decrease to 90% due to a rise in the surface temperature after the illuminance of the ultraviolet light reaches a maximum after the blinking of the excimer lamp starts.
例えば本発明の一態様であるオゾン生成装置は、流体が流量１ｍ3／ｍｉｎ以下で流れる領域にエキシマランプが配置され、エキシマランプの点滅を持続したときのオゾン生成量が３ｍｇ／ｈ以上であり、エキシマランプの点滅を開始してから表面温度が７０℃となるまでの時間より前に、エキシマランプの点滅を停止する。 For example, in one embodiment of the ozone generator of the present invention, an excimer lamp is placed in an area where a fluid flows at a flow rate of 1 m3 /min or less, the amount of ozone generated when the excimer lamp is kept on and off is 3 mg/h or more, and the on-off of the excimer lamp is stopped before the surface temperature reaches 70°C after the on-off of the excimer lamp begins.
例えば本発明の一態様であるオゾン生成装置は、エキシマランプから紫外線が照射される酸素を含む流体の流量が１ｍ3／ｍｉｎ以下で流れ、エキシマランプの点滅の開始と停止を繰り返すことでオゾン濃度を調整するオゾン生成装置であって、エキシマランプの点滅を開始してから放射される紫外線の照度が最大となった後に表面温度が最大となるまでの時間より前に、エキシマランプの点滅を停止する。 For example, one aspect of the present invention is an ozone generator in which the flow rate of an oxygen-containing fluid irradiated with ultraviolet light from an excimer lamp is 1 m3 /min or less, and the ozone concentration is adjusted by repeatedly starting and stopping the blinking of the excimer lamp, and the blinking of the excimer lamp is stopped before the time it takes for the surface temperature to reach its maximum after the illuminance of the ultraviolet light emitted from the excimer lamp has reached its maximum since the start of the blinking of the excimer lamp.
例えば本発明の一態様であるオゾン生成装置は、酸素を含む流体が流れ、エキシマランプの点滅を持続したときのオゾン生成量が３ｍｇ／ｈ以上で、エキシマランプの点滅の開始と停止を繰り返すことでオゾン濃度を調整するオゾン生成装置であって、エキシマランプの点滅を開始してから放射される紫外線の照度が最大となった後に表面温度が７０℃となるまでの時間より前に、エキシマランプの点滅を停止する。 For example, one aspect of the present invention is an ozone generator that generates ozone at a rate of 3 mg/h or more when an oxygen-containing fluid flows and the excimer lamp is continuously turned on and off, and adjusts the ozone concentration by repeatedly starting and stopping the on-off of the excimer lamp, and stops the on-off of the excimer lamp before the time when the surface temperature reaches 70°C after the illuminance of the ultraviolet light emitted from the start of the on-off of the excimer lamp reaches a maximum.
例えば本発明の一態様であるオゾン生成方法は、点滅を持続したときのオゾン生成量が３ｍｇ／ｈ以上のエキシマランプから紫外線が照射される酸素を含む流体を流量１ｍ3／ｍｉｎ以下で流し、エキシマランプの点滅の開始と停止とを繰り返すことでオゾン濃度を調整するオゾン生成方法であって、エキシマランプの点滅を開始してから表面温度が７０℃となるまでの時間より前に、エキシマランプの点滅を停止する。 For example, one aspect of the present invention is an ozone generation method in which an oxygen-containing fluid irradiated with ultraviolet light from an excimer lamp that generates ozone at 3 mg/h or more when continuously blinking is flowed at a flow rate of 1 m3 /min or less, and the ozone concentration is adjusted by repeatedly starting and stopping the blinking of the excimer lamp, and the blinking of the excimer lamp is stopped before the surface temperature reaches 70°C after the start of the blinking of the excimer lamp.
例えば本発明の一態様であるオゾン生成方法は、オゾン生成手段が配置されたオゾン生成部を酸素が含まれる流体を流量１ｍ3／ｍｉｎ以下で流し、オゾン生成手段によるオゾン生成の開始と停止を繰り返すことでオゾン濃度を調整するオゾン生成方法であって、オゾン生成手段によるオゾン生成を開始してからオゾン生成部の温度が上昇してオゾン生成手段により生成されたオゾンを含む流体の温度が４０℃となるまでの時間より前に、オゾン生成手段によるオゾン生成を停止して、停止の時間を変更することでオゾン濃度を調整する。 For example, one aspect of the present invention is an ozone generation method in which an oxygen-containing fluid is passed through an ozone generation unit in which an ozone generation means is disposed at a flow rate of 1 m3 /min or less, and ozone generation by the ozone generation means is repeatedly started and stopped to adjust the ozone concentration.Ozone generation by the ozone generation means is stopped before the time from when ozone generation by the ozone generation means starts until the temperature of the ozone generation unit rises and the temperature of the fluid containing ozone generated by the ozone generation means reaches 40°C, and the ozone concentration is adjusted by changing the time of stoppage.
本発明によれば、紫外線照射効率やオゾン生成効率の低下を防いだオゾン生成装置を提供することができる。 The present invention provides an ozone generator that prevents a decrease in ultraviolet irradiation efficiency and ozone generation efficiency.
図１は、本発明によるオゾン生成装置の概略的構成図である。オゾン生成装置１は、管状流路２、軸流ファン３、エキシマランプ４とを備える。 Figure 1 is a schematic diagram of an ozone generator according to the present invention. The ozone generator 1 includes a tubular flow path 2, an axial fan 3, and an excimer lamp 4.
オゾン生成部を有する管状流路２は、原料ガス（被照射体）の流れる流路を形成する。原料ガスは、酸素を含むガスであり、ここでは空気が管状流路２内に流れ込むようになっている。 The tubular flow path 2 having the ozone generating section forms a flow path through which the raw material gas (irradiated object) flows. The raw material gas is a gas containing oxygen, and in this case, air flows into the tubular flow path 2.
軸流ファン３は、管状流路２の流入口２Ａに対して同軸的に配置され、管状流路２（オゾン生成部）に沿った方向に移動する流体を供給する流体供給部である。軸流ファン３の運転を開始すると、周囲の空気が管状流路２に流れ込み、管状流路２に沿った方向に、原料ガスが流入口２Ａから排出口２Ｂに向けて流れる。 The axial fan 3 is arranged coaxially with the inlet 2A of the tubular flow path 2, and is a fluid supply unit that supplies a fluid moving in a direction along the tubular flow path 2 (ozone generation unit). When the axial fan 3 starts operating, the surrounding air flows into the tubular flow path 2, and the raw material gas flows from the inlet 2A to the outlet 2B in a direction along the tubular flow path 2.
オゾン生成手段であるエキシマランプ４は、放電ガスが封入された管状の放電容器を有し、図示しない支持部材によって、放電容器の軸（ランプ軸）が管状流路２の軸と垂直となる向きで支持される。図示しない電源部による制御によって点灯し、紫外線（例えば１７２ｎｍ）を放射する。流入口２Ａ側から流入した酸素を含む原料ガスに紫外線が照射されるとオゾンが生じ、生成されたオゾンは排出口２Ｂ側へ排出して、脱臭、殺菌処理などに用いられる。 The excimer lamp 4, which is an ozone generating means, has a tubular discharge vessel in which a discharge gas is sealed, and is supported by a support member (not shown) so that the axis of the discharge vessel (lamp axis) is perpendicular to the axis of the tubular flow path 2. It is turned on by control of a power supply unit (not shown), and emits ultraviolet rays (e.g., 172 nm). When ultraviolet rays are irradiated onto the raw gas containing oxygen that flows in from the inlet 2A side, ozone is generated, and the generated ozone is discharged to the outlet 2B side and used for deodorization, sterilization, etc.
一般的に、エキシマランプの表面温度が約７０℃以上では、紫外線照度低下の影響が大きく表れる。そのため、高温や低流量で原料ガスが流れる領域に、オゾン生成量が大きくて発熱が大きいエキシマランプを配置した使用環境では、エキシマランプの点灯開始後に紫外線照度が最大（１００％）になった後に、エキシマランプの冷却が不十分となって過熱状態になると、紫外線照度が低下する。例えば、使用環境に応じた発熱と冷却のバランスによって、表面温度が８０℃に上昇して一定になると、波長１７２ｎｍの紫外線照度は９０％に低下して一定となる。 In general, when the surface temperature of the excimer lamp is approximately 70°C or higher, the effect of a decrease in UV irradiance is significant. Therefore, in an operating environment in which an excimer lamp that generates a large amount of ozone and generates a lot of heat is placed in an area where raw material gas flows at a high temperature and low flow rate, the UV irradiance will decrease after the UV irradiance reaches its maximum (100%) after the excimer lamp starts to turn on, if the excimer lamp is not cooled sufficiently and overheats. For example, when the surface temperature rises to and remains constant at 80°C due to the balance between heat generation and cooling according to the operating environment, the UV irradiance of 172 nm wavelength will decrease to 90% and remain constant.
そのため、点灯を開始してから過熱状態となって照度低下が始まるまでの時間より前に、エキシマランプを消灯してオゾン濃度を調整することで、紫外線照射効率やオゾン生成効率の低下を防ぐとよい。更に好ましくは、過熱状態にならないとしても、点灯を開始してからエキシマランプの表面温度が最大となるまでの時間よりも前に、エキシマランプを消灯するとよい。 Therefore, it is advisable to prevent a decrease in UV irradiation efficiency and ozone generation efficiency by turning off the excimer lamp and adjusting the ozone concentration before the lamp overheats and the illuminance starts to decrease after it is turned on. Even more preferably, the excimer lamp should be turned off before the surface temperature of the excimer lamp reaches its maximum after it is turned on, even if it does not overheat.
例えば、エキシマランプの点灯開始後に紫外線照度が最大（１００％）になった２分後に、点灯開始時に比べて９０％の紫外線照度に低下して安定点灯するエキシマランプにおいては、５分間の点灯と５分間の消灯を繰り返すよりも、１分間の点灯と１分間の消灯を繰り返す点滅サイクルとするとよい。また、このような点滅サイクルで、複数のランプを交代で点滅させるようにしてもよい。 For example, in an excimer lamp that has a stable UV illuminance that drops to 90% of the UV illuminance at the start of lighting and remains stable after 2 minutes from when the UV illuminance reaches its maximum (100%) after the excimer lamp is turned on, it is better to use a blinking cycle that alternates between 1 minute on and 1 minute off, rather than 5 minutes on and 5 minutes off. Also, multiple lamps may be alternately blinked in this type of blinking cycle.
エキシマランプから紫外線が照射される酸素を含む流体の流量が１ｍ３／ｍｉｎ以下となる低流量での使用環境であっても、点灯を開始してからエキシマランプの表面温度が最大となるまでの時間より前に、エキシマランプを消灯してオゾン濃度を調整することにより、紫外線照射効率やオゾン生成効率の低下を防ぐことができる。 Even in an operating environment where the flow rate of the oxygen-containing fluid irradiated with ultraviolet light from the excimer lamp is 1 m3/min or less, it is possible to prevent a decrease in ultraviolet light irradiation efficiency and ozone generation efficiency by turning off the excimer lamp and adjusting the ozone concentration before the time from when the light is turned on until the surface temperature of the excimer lamp reaches its maximum.
一般的に、紫外線照射によって生じたオゾンは、温度、相対湿度、流速が高くなると分解が促進され半減期は短くなる。温度によるオゾン分解は約４０℃に達すると始まり、約６０℃になると活発になる。 In general, the decomposition of ozone generated by ultraviolet light is accelerated and its half-life shortened as the temperature, relative humidity, and flow rate increase. Ozone decomposition due to temperature begins when the temperature reaches approximately 40°C, and becomes active at approximately 60°C.
特に、常時点灯としたときのオゾン生成量が３ｍｇ／ｈ以上の高濃度オゾンを生成できるエキシマランプは、紫外線照度が高く、それに伴う発熱も大きい。このような使用環境において、点灯して過熱状態となってオゾン分解が活性となる前に、エキシマランプを消灯してオゾン濃度を調整することにより、オゾン生成効率の低下を防ぐことができる。 In particular, excimer lamps that can generate high-concentration ozone with an ozone generation rate of 3 mg/h or more when constantly turned on have high UV illuminance and generate a lot of heat. In such an environment, a decrease in ozone generation efficiency can be prevented by turning off the excimer lamp and adjusting the ozone concentration before it becomes overheated and ozone decomposition becomes active.
エキシマランプを高周波で点灯開始すると、放射する紫外線の照度は瞬間的に最大となる。また、高周波点灯は、厳密には高周波で点滅している。このような短周期の点滅では、紫外線照射効率やオゾン生成効率の低下への影響が小さい。そのため、エキシマランプの点灯時間（点灯を開始してから消灯するまでの時間）は、点灯を開始してからエキシマランプが放射する紫外線照度が最大となる時間よりも長くするとよい。すなわち、エキシマランプの点灯を開始してから紫外線照度が最大となった一定時間の後に、エキシマランプを消灯することで、オゾン濃度を調整する。 When an excimer lamp starts to light at a high frequency, the illuminance of the emitted ultraviolet light momentarily reaches a maximum. Strictly speaking, high frequency lighting is flashing at a high frequency. Flashing at such a short period has little effect on reducing the efficiency of ultraviolet light irradiation and ozone generation efficiency. Therefore, it is advisable to set the lighting time of the excimer lamp (the time from when it starts to light until it is turned off) longer than the time when the illuminance of ultraviolet light emitted by the excimer lamp reaches its maximum after the excimer lamp starts to light. In other words, the ozone concentration is adjusted by turning off the excimer lamp a certain time after the ultraviolet light illuminance reaches its maximum after the excimer lamp starts to light.
上記のように、エキシマランプの点灯時間によって、オゾン濃度を調整できる。しかしながら、高濃度のオゾンを生成できるエキシマランプを用いたオゾン生成装置において、オゾン濃度を環境基準値０．１ｐｐｍ以下に調整するために、１ｓ（秒）以下の範囲でエキシマランプの点灯時間を調節することは、エキシマランプの点滅や、オゾン生成量の調整が不安定となる。 As mentioned above, the ozone concentration can be adjusted by the lighting time of the excimer lamp. However, in an ozone generator using an excimer lamp capable of generating high concentrations of ozone, adjusting the lighting time of the excimer lamp within a range of 1 s (seconds) or less to adjust the ozone concentration to the environmental standard value of 0.1 ppm or less can cause the excimer lamp to flicker and the adjustment of the amount of ozone generated to become unstable.
そこで、エキシマランプの点灯と消灯を繰り返すことで、生成されるオゾン濃度を調整するオゾン生成装置において、点灯の時間（点灯を持続する時間）は１秒以下で一定として、消灯の時間（消灯を持続する時間）を変更してオゾン濃度を調整することにより、低濃度のオゾン生成するときでも、オゾン濃度が安定した信頼性の高いオゾン生成装置とすることができる。 In an ozone generator that adjusts the concentration of ozone generated by repeatedly turning the excimer lamp on and off, the time the lamp is on (the time it remains on) is kept constant at 1 second or less, and the time it is off (the time it remains off) is changed to adjust the ozone concentration, making it possible to provide a highly reliable ozone generator with a stable ozone concentration even when generating low concentrations of ozone.
エキシマランプの点灯と消灯とを繰り返すことでオゾン濃度を調整するオゾン生成方法において、酸素を含む流体が１ｍ３／ｍｉｎ以下となる低流量で流れる領域に、常時点灯としたときのオゾン生成量が３ｍｇ／ｈ以上となるエキシマランプを配置したときには、エキシマランプによるオゾン生成の効率低下が開始する前に、エキシマランプを消灯してオゾン濃度を調整することで、エキシマランプの冷却が不十分となって過熱状態となって、紫外線照射効率やオゾン生成効率の低下を防いだオゾン生成方法とすることができる。 In an ozone generation method in which the ozone concentration is adjusted by repeatedly turning an excimer lamp on and off, when an excimer lamp that generates ozone at 3 mg/h or more when constantly turned on is placed in an area where an oxygen-containing fluid flows at a low flow rate of 1 m3/min or less, the excimer lamp can be turned off and the ozone concentration adjusted before the efficiency of ozone generation by the excimer lamp begins to decrease, thereby preventing the excimer lamp from being insufficiently cooled and becoming overheated, thereby preventing a decrease in ultraviolet irradiation efficiency and ozone generation efficiency.
また、オゾン生成手段によるオゾン生成の開始と停止を繰り返すことでオゾン濃度を調整するオゾン生成方法であって、オゾン生成手段が配置されたオゾン生成部を酸素が含まれる流体を流量１ｍ３／ｍｉｎ以下で流した状態で、オゾン生成部の温度が上昇してオゾン分解が活性となる前に、オゾン生成手段によるオゾン生成を停止して、その停止の時間を変更してオゾン濃度を調整するオゾン生成方法とすることで、オゾン生成効率の低下を防いだオゾン生成方法とすることができる。 In addition, the ozone generation method adjusts the ozone concentration by repeatedly starting and stopping ozone generation by the ozone generation means, and while an oxygen-containing fluid is flowing through an ozone generation unit in which the ozone generation means is disposed at a flow rate of 1 m3/min or less, ozone generation by the ozone generation means is stopped before the temperature of the ozone generation unit rises and ozone decomposition becomes active, and the time of the stop is changed to adjust the ozone concentration, thereby preventing a decrease in ozone generation efficiency.
軸流ファンは、管状流路２の流出口２Ｂに対して同軸的に配置して、管状流路（オゾン生成部）に沿った方向に移動する流体を排出する流体排出部としてもよい。管状流路２には、複数のエキシマランプを配置しても良い。また、放電容器の軸（ランプ軸）が管状流路２の軸と平行となる向きで支持してもよい。 The axial fan may be arranged coaxially with the outlet 2B of the tubular flow path 2, and may serve as a fluid discharge section that discharges fluid moving in a direction along the tubular flow path (ozone generation section). Multiple excimer lamps may be arranged in the tubular flow path 2. Also, the axis of the discharge vessel (lamp axis) may be supported in an orientation parallel to the axis of the tubular flow path 2.
このように高濃度のオゾンが生成できる波長２００ｎｍ以下の紫外線を放射するエキシマランプ（紫外線照射手段）を比較的低流量で使用するときであっても、点灯時間を紫外線照度やオゾン分解の影響が顕著となる時間より短くすることで、紫外線照射効率やオゾン生成効率が低下することを抑制できる。また、点灯時間を一定とすることで、オゾン濃度の調整が安定し、信頼性の高いオゾン生成装置を提供できる。 Even when using an excimer lamp (ultraviolet ray irradiation means) that emits ultraviolet rays with wavelengths of 200 nm or less, which can generate high concentrations of ozone, at a relatively low flow rate, the efficiency of ultraviolet ray irradiation and ozone generation can be prevented from decreasing by shortening the lighting time beyond the time when the effects of ultraviolet ray illuminance and ozone decomposition become noticeable. In addition, by keeping the lighting time constant, the adjustment of ozone concentration is stable, and a highly reliable ozone generation device can be provided.
１ オゾン生成装置
２ 管状流路（オゾン生成部）
３ 軸流ファン（流体供給部）
４ エキシマランプ（オゾン生成手段）
1 Ozone generator 2 Tubular flow path (ozone generator)
3 Axial fan (fluid supply section)
4. Excimer lamp (ozone generating means)
Claims (11)
前記エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行う点灯制御部とを備え、
前記点灯制御部が、高周波点灯の開始から紫外線照度が最大に達した後、紫外線照度が低下して一定となる時間よりも前に、高周波点灯から消灯へ切り替えることを特徴とするオゾン生成装置。 an excimer lamp that is disposed in a flow path through which a fluid containing oxygen flows and that irradiates ultraviolet light having a wavelength capable of generating ozone;
a lighting control unit that performs lighting control for repeating high-frequency lighting and extinction on the excimer lamp,
An ozone generating device characterized in that the lighting control unit switches from high-frequency lighting to extinguishing before the time when the ultraviolet illuminance has decreased and become constant after the ultraviolet illuminance has reached its maximum since the start of high-frequency lighting.
前記エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行う点灯制御部とを備え、
前記点灯制御部が、高周波点灯の開始からランプ表面温度が最大となる時間よりも前に、高周波点灯から消灯へ切り替えることを特徴とするオゾン生成装置。 an excimer lamp that is disposed in a flow path through which a fluid containing oxygen flows and that irradiates ultraviolet light having a wavelength capable of generating ozone;
a lighting control unit that performs lighting control for repeating high-frequency lighting and extinction on the excimer lamp,
The ozone generating device, wherein the lighting control unit switches from high frequency lighting to extinguishing before the time from the start of high frequency lighting until the lamp surface temperature reaches a maximum.
前記エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行う点灯制御部とを備え、
前記点灯制御部が、高周波点灯の開始から前記流体の温度が６０℃に達する時間よりも前に、高周波点灯から消灯へ切り替えることを特徴とするオゾン生成装置。 an excimer lamp that is disposed in a flow path through which a fluid containing oxygen flows and that irradiates ultraviolet light having a wavelength capable of generating ozone;
a lighting control unit that performs lighting control for repeating high-frequency lighting and extinction on the excimer lamp,
The ozone generating device, wherein the lighting control unit switches from high frequency lighting to extinguishing before the temperature of the fluid reaches 60°C from the start of high frequency lighting.
前記エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行うオゾン生成方法であって、
高周波点灯の開始から紫外線照度が最大に達した後、紫外線照度が低下して一定となる時間よりも前に、高周波点灯から消灯へ切り替えることを特徴とするオゾン生成方法。 An excimer lamp that irradiates ultraviolet light having a wavelength capable of generating ozone is disposed in a flow path through which a fluid containing oxygen flows;
An ozone generating method in which the excimer lamp is subjected to high-frequency on/off control,
An ozone generating method characterized in that after the ultraviolet irradiance reaches a maximum after the start of high frequency lighting, high frequency lighting is switched off before the ultraviolet irradiance decreases and becomes constant.
前記エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行うオゾン生成方法であって、
高周波点灯の開始からランプ表面温度が最大となる時間よりも前に、高周波点灯から消灯へ切り替えることを特徴とするオゾン生成方法。 An excimer lamp that irradiates ultraviolet light having a wavelength capable of generating ozone is disposed in a flow path through which a fluid containing oxygen flows;
An ozone generating method in which the excimer lamp is subjected to high-frequency on/off control,
An ozone generating method comprising switching from high frequency lighting to extinguishing before the time from the start of high frequency lighting until the lamp surface temperature reaches its maximum.
前記エキシマランプに対し、高周波点灯と消灯とを繰り返す点灯制御を行うオゾン生成方法であって、
高周波点灯の開始から前記流体の温度が６０℃に達する時間よりも前に、高周波点灯から消灯へ切り替えることを特徴とするオゾン生成方法。 An excimer lamp that irradiates ultraviolet light having a wavelength capable of generating ozone is disposed in a flow path through which a fluid containing oxygen flows;
An ozone generating method in which the excimer lamp is subjected to high-frequency on/off control,
A method for generating ozone, comprising switching from high frequency lighting to extinguishing before the temperature of the fluid reaches 60°C from the start of high frequency lighting.
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Also Published As
| Publication number | Publication date |
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| CN112125280A (en) | 2020-12-25 |
| CN112125280B (en) | 2024-05-10 |
| JP2021001099A (en) | 2021-01-07 |
| JP2023171537A (en) | 2023-12-01 |
| JP7370037B2 (en) | 2023-10-27 |
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