JP7470012B2 - Flow Control Device - Google Patents

Description

The present invention relates to a flow control device.

Flow control devices are used in various fields to control the flow rate of fluids. A known example of such a flow control device is a mass flow controller. Due to the miniaturization of devices such as oxygen concentrators, mass flow controllers are sometimes required to have a compact configuration. Such mass flow controllers are configured so that the openings at both ends of the flow path that connects the flow control valve and the flow sensor in series are facing each other in the shortest distance (see, for example, Patent Document 1).

Japanese Patent Application Laid-Open No. 11-194833

However, in conventional mass flow controllers such as those described above, the valves and sensors are arranged in a straight line, and the flow path piping opens back-to-back at both ends of the mass flow controller, so it must be placed in a location that allows this type of structure. For this reason, even if the mass flow controller is small, it can be difficult to place it in the desired location in a device that requires control of the flow rate of a fluid.

One aspect of the present invention aims to realize a flow control device that can be made smaller and has greater design freedom.

In order to solve the above problems, a flow control device according to one aspect of the present invention is a flow control device having a device for controlling a flow rate and a flow path for connecting the devices and circulating a fluid through the devices, the device includes a flow control valve for adjusting the flow rate of the fluid flowing through the flow path and a flow sensor for detecting the flow rate of the fluid flowing through the flow path, and both ends of the flow path are open in directions that are not facing away from each other.

In order to solve the above problems, a flow control device according to one aspect of the present invention is a flow control device having a device for controlling a flow rate and a flow path for connecting the devices and circulating a fluid through the devices, the device includes a flow control valve for adjusting the flow rate of the fluid flowing through the flow path and a flow sensor for detecting the flow rate of the fluid flowing through the flow path, and the flow path includes a bendable connecting tube.

According to one aspect of the present invention, it is possible to realize a flow control device that can be made smaller and has greater freedom in design.

1 is a diagram illustrating a first example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 2 is a diagram illustrating a second example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 10 is a diagram illustrating a third example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 11 is a diagram illustrating a fourth example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 10 is a diagram illustrating a fifth example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 10 is a diagram illustrating a sixth example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 13 is a diagram illustrating a seventh example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 13 is a diagram illustrating an eighth example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 13 is a diagram illustrating a schematic diagram of a ninth example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 11 is a diagram illustrating a schematic diagram of a tenth example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 13 is a diagram illustrating an eleventh example of the configuration of a flow control device according to an embodiment of the present invention. FIG. 23 is a diagram illustrating a schematic diagram of a twelfth example of the configuration of a flow control device according to an embodiment of the present invention. 1 is a diagram showing a schematic configuration of a flow control device according to an embodiment of the present invention; 14 is a partial cross-sectional view showing the flow control device of FIG. 13 taken along line AA. FIG. 2 is a diagram showing a schematic configuration of a connection unit in one embodiment of the present invention. 5A and 5B are diagrams for explaining the structure of a flow path in a connection unit in one embodiment of the present invention. FIG. 2 is a diagram showing a schematic configuration of a connecting screw in one embodiment of the present invention. FIG. 11 is a partial cross-sectional view showing a schematic configuration of a flow rate control device according to another embodiment of the present invention.

One embodiment of the present invention will be described in detail below. The flow control device of this embodiment has a device for controlling the flow rate and a flow path that connects the device and allows a fluid to flow through the device.

The above device includes a flow control valve for adjusting the flow rate of the fluid flowing through the flow path, and a flow sensor for detecting the flow rate of the fluid flowing through the flow path. The flow control valve can be appropriately selected from known valves capable of adjusting the flow rate of the fluid, depending on the accuracy required in controlling the flow rate. For example, the flow control valve may be a proportional control valve from the viewpoint of controlling the flow rate of the fluid with sufficient precision.

The flow sensor can be appropriately selected from known sensors capable of detecting the flow rate of a fluid depending on the accuracy and type of the flow rate to be controlled. For example, the flow sensor may be a mass flow sensor that detects the mass flow rate of the fluid, or a volume flow sensor that detects the volumetric flow rate of the fluid.

The above device may further have other configurations in addition to those described above, as long as the effects of this embodiment can be obtained. Examples of such other configurations include a pressure regulating valve for adjusting the pressure of the fluid flowing through the flow path.

If the pressure regulating valve is located upstream of the flow rate regulating valve and the flow rate sensor, it is possible to adjust the fluid pressure to a pressure suitable for the operation of these devices. In this way, the pressure regulating valve is preferable from the viewpoint of realizing a fluid pressure that corresponds to the situation further downstream and increasing the accuracy and stability of the operation of the device. In addition, the pressure regulating valve is capable of adjusting the fluid pressure to a pressure suitable for the use of the fluid whose flow rate is controlled by the flow rate control device.

In the following embodiment, a form including a pressure regulating valve will be described, but the flow control device according to one aspect of the present invention does not have to include a pressure regulating valve. A fluid whose pressure has been adjusted by a separately prepared pressure regulating valve may be allowed to flow into the fluid control device.

The order in which the above devices are connected can be determined as appropriate within the range in which the desired flow rate can be detected. For example, if the flow sensor is a mass flow sensor, the order in which the devices are connected is not limited as long as the conditions for using the devices are met. From the viewpoint of improving the accuracy of flow rate detection and control, the order in which the above devices are connected is preferably, from the upstream side, a pressure regulating valve, a flow regulating valve, and a flow sensor. Also, if the flow sensor is a volumetric flow sensor, from the viewpoint of improving the accuracy of flow rate detection, it is preferable that the flow sensor be connected downstream of the pressure regulating valve.

Furthermore, examples of other configurations that the flow control device may have include a control board for controlling the opening of the flow adjustment valve in response to the detection value of the flow sensor, a cover that covers the aforementioned equipment and flow path, and a base for placing the aforementioned equipment and flow path.

The above flow path may be formed appropriately according to the fluid to be passed through the flow path, and may be formed from tubes, holes, or other voids available in the flow control device. In this embodiment, the fluid may be a liquid or a gas. In this embodiment, both ends of the flow path are open in directions that are not back-to-back with each other. Here, "both ends of the flow path" means the open ends of the flow path specific to the flow control device.

The flow path may include a bent portion between both ends of the flow path that bends the flow path so that the fluid flows at one end of the flow path in a direction different from the direction of fluid flow at the other end of the flow path. The flow path including the bent portion has a bent shape such that at a position between the openings at both ends, the inflow direction at the inlet of the flow path and the outflow direction at the outlet of the flow path are different. Thus, the above flow path is formed in which the openings at both ends are open in directions that are not back to back with each other.

Here, a "bent portion" refers to a portion that is bent at an angle different from the bend for introducing fluid into the device described above, or in a direction different from the bend. There may be one or more bent portions in the flow path. In addition, the direction in which the flow path is bent by the bent portion is not limited.

For example, the bend may be a portion where the flow path bends horizontally, vertically, or diagonally upwards. The bend may also be a portion where the flow path bends at a right angle, an acute angle, or an obtuse angle. Furthermore, the flow path may be composed of a bend. For example, the flow path may be arc-shaped, in which case the entire flow path can be considered a bend.

The bend may be located between at least any two of the above devices. Such a bend bends the flow path so as to bend the connection direction of the two devices located upstream and downstream of it. Therefore, it is suitable for placing the above devices in desired positions in the flow control device.

The bend may be introduced into the flow control device by a part in which a flow path including the bend is formed. That is, the flow control device may further have a connection unit that is interposed in the flow path and forms part of the flow path, and the connection unit may include the bend. The connection unit will be described in more detail later.

[Configuration with a curved flow path]
Specific examples of the device configuration of the flow control device of this embodiment are shown in Figures 1 to 9. Figures 1 to 3 are schematic diagrams showing first to third examples of the configuration of the flow control device of this embodiment, respectively. In all of the first to third examples, the flow path has a substantially U-shaped shape including two bends B, and both ends of the flow path open in the same direction. All of the first to third examples have a bend B between the devices.

As shown in FIG. 1, the flow control device of the first example has a flow path 10, a flow adjustment unit 20, and a flow sensor unit 30. The flow adjustment unit 20 is a unit including a flow adjustment valve, and the flow sensor unit 30 is a unit including a flow sensor. In this specification, "unit" means a unit configuration that constitutes a flow control device. For example, the flow adjustment unit 20 includes a flow adjustment valve, a flow path that circulates a fluid therethrough, and a structure for connecting the flow adjustment valve to other components. If the flow adjustment valve can be connected to other components by itself, the flow adjustment unit 20 can be composed of only the flow adjustment valve. The flow adjustment unit 20 is arranged upstream of the bend B in the flow path 10, and the flow sensor unit 30 is arranged downstream of the bend B.

As shown in FIG. 2, the flow control device of the second example has a flow path 10, a pressure adjustment unit 40, a flow adjustment unit 20, and a flow sensor unit 30. The pressure adjustment unit 40 is a unit that includes a pressure adjustment valve. The pressure adjustment unit 40 and the flow adjustment unit 20 are arranged upstream of the bend B in the flow path 10, and the flow sensor unit 30 is arranged downstream of the bend B.

As shown in FIG. 3, the flow control device of the third example has a flow path 10, a pressure adjustment unit 40, a flow sensor unit 30, and a flow adjustment unit 20. The pressure adjustment unit 40 and the flow sensor unit 30 are arranged upstream of the bend B in the flow path 10, and the flow adjustment unit 20 is arranged downstream of the bend B.

In the first to third examples, both ends of the flow path open in the same direction, making them suitable for use as a flow control device that is placed in a rectangular space with a small difference between its length and width, for example.

Figures 4 to 6 are schematic diagrams showing fourth to sixth examples of the configuration of the flow control device of this embodiment, respectively. In all of the fourth to sixth examples, the flow path has a generally L-shaped configuration including one bent portion B, and both ends of the flow path open in a direction in which the flow directions of the fluid passing through the two ends intersect. All of the fourth to sixth examples have a bent portion B in the flow sensor unit 30.

The fourth example of the flow control device has a flow path 10, a flow adjustment unit 20, and a flow sensor unit 30, as shown in FIG. 4. The flow adjustment unit 20 and the flow sensor unit 30 are connected by the flow path 10 in this order from the upstream side. The flow sensor unit 30 is arranged so that the fluid flow directions intersect with each other relative to the flow adjustment unit 20. The flow path 10 connects to the flow sensor unit 30 from the side of the flow sensor unit 30, and extends downstream from the end of the flow sensor unit 30. The part where the fluid flow directions intersect in the flow path inside the flow sensor unit 30 is the bent portion B.

As shown in FIG. 5, the flow control device of the fifth example has a flow path 10, a pressure adjustment unit 40, a flow adjustment unit 20, and a flow sensor unit 30. The pressure adjustment unit 40, the flow adjustment unit 20, and the flow sensor unit 30 are connected by the flow path 10 in this order from the upstream side. The flow sensor unit 30 is arranged so that the direction of fluid flow in the flow sensor unit 30 intersects with the connection direction of the pressure adjustment unit 40 and the flow adjustment unit 20. The flow path 10 connects to the flow sensor unit 30 from the side of the flow sensor unit 30 and extends downstream from the end of the flow sensor unit 30. The part where the directions of fluid flow in the flow path in the flow sensor unit 30 intersect is the bent portion B.

As shown in FIG. 6, the sixth example of the flow control device has a flow path 10, a pressure adjustment unit 40, a flow sensor unit 30, and a flow adjustment unit 20. The pressure adjustment unit 40, the flow sensor unit 30, and the flow adjustment unit 20 are connected by the flow path 10 in this order from the upstream side. The flow sensor unit 30 is arranged in a direction in which the flow direction of the fluid in the flow sensor unit 30 intersects with the pressure adjustment unit 40, and the flow adjustment unit 20 is connected to the flow sensor unit 30 on its downstream side. The flow path 10 connects to the flow sensor unit 30 from the side of the flow sensor unit 30 and extends from the end of the flow sensor unit 30 to the flow adjustment unit 20. The part where the flow directions of the fluid in the flow path in the flow sensor unit 30 intersect is the bent portion B.

In the fourth to sixth examples, the flow path is generally L-shaped, making them suitable for use as a flow control device that is placed in a curved space, for example.

Figures 7 to 9 are schematic diagrams showing seventh to ninth examples of the configuration of the flow control device of this embodiment, respectively. In all of the seventh to ninth examples, the flow path has a generally L-shaped configuration including one bend B, and both ends of the flow path open in a direction such that the fluid flow directions intersect with each other. All of the seventh to ninth examples have a bend B within the flow adjustment unit 20.

The seventh example of the flow control device has a flow path 10, a flow sensor unit 30, and a flow adjustment unit 20, as shown in FIG. 7. The flow sensor unit 30 and the flow adjustment unit 20 are connected by the flow path 10 in this order from the upstream side. The flow adjustment unit 20 and the flow sensor unit 30 are arranged so that the directions of fluid flow intersect with each other, and the flow path 10 connects to the flow adjustment unit 20 from the side of the flow adjustment unit 20 and extends downstream from the end of the flow adjustment unit 20. The part where the directions of fluid flow intersect in the flow path inside the flow adjustment unit 20 is the bent portion B.

As shown in FIG. 8, the eighth example of the flow control device has a flow path 10, a pressure adjustment unit 40, a flow rate adjustment unit 20, and a flow rate sensor unit 30. The pressure adjustment unit 40, the flow rate adjustment unit 20, and the flow rate sensor unit 30 are connected by the flow path 10 in this order from the upstream side. The flow rate adjustment unit 20 is arranged in a direction that intersects with the pressure adjustment unit 40, and the flow rate sensor unit 30 is connected to the downstream side of the flow rate adjustment unit 20. The flow path 10 connects to the flow rate adjustment unit 20 from the side of the flow rate adjustment unit 20, and extends from the end of the flow rate adjustment unit 20 to the flow rate sensor unit 30. The part where the flow directions of the fluid in the flow path in the flow rate adjustment unit 20 intersect is the bent portion B.

As shown in FIG. 9, the ninth example of the flow control device has a flow path 10, a pressure adjustment unit 40, a flow sensor unit 30, and a flow adjustment unit 20. The pressure adjustment unit 40, the flow sensor unit 30, and the flow adjustment unit 20 are connected by the flow path 10 in this order from the upstream side. The flow adjustment unit 20 is arranged so that the fluid flow direction intersects with the connection direction of the pressure adjustment unit 40 and the flow sensor unit 30. The flow path 10 connects to the flow adjustment unit 20 from the side of the flow adjustment unit 20, and extends from the end of the flow adjustment unit 20 to the downstream side. The part where the fluid flow direction intersects in the flow path in the flow adjustment unit 20 is the bent portion B.

Normally, when viewed in a plan view, the length of the device in the direction in which the fluid flows is longer for the flow sensor unit 30 than for the flow adjustment unit 20 and the pressure adjustment unit 40. Thus, in the seventh and ninth examples, the flow paths are both approximately L-shaped, but the devices are arranged in a substantially straight line. Therefore, both the seventh and ninth examples are suitable as flow control devices for cases where, for example, the space is a long and narrow rectangular space as in the conventional case, but there are restrictions on the direction in which the flow paths are connected.

The eighth example, like the fourth to sixth examples, is suitable for a flow control device that is arranged in a space having a curved shape. In this embodiment, the bent portion B may be formed in the pressure adjustment unit 40 instead of the flow sensor unit 30 or the flow adjustment unit 20 in the fourth to ninth examples.

[Mode having a bendable flow path]
In this embodiment, the flow path may include a bendable connecting pipe. The connecting pipe is a pipe connected to at least one of the aforementioned devices and has flexibility. The connecting pipe may be connected to one of the aforementioned devices or may be located between any two of the aforementioned devices. When the flow path includes a connecting pipe, the flow path upstream or downstream of the device may be bent. By including a connecting pipe in the flow path in this way, it is possible to configure a flow control device in which both ends of the flow path are open in directions that are not back-to-back with each other, and it is also possible to configure a flow control device in which the devices are not arranged in a straight line.

Examples of connecting tubes include flexible plastic tubes such as urethane tubes, silicone tubes, and nylon tubes, as well as metal pipes such as stainless steel.

Figures 10 to 12 are schematic diagrams showing tenth to twelfth examples of the configuration of the flow control device of this embodiment, respectively. In all of the tenth to twelfth examples, the flow path includes a bendable connecting pipe that connects two devices, and the connecting pipe forms the bend described above.

As shown in FIG. 10, the tenth example of the flow control device has a flow path 10, a flow adjustment unit 20, and a flow sensor unit 30. The flow adjustment unit 20 and the flow sensor unit 30 are connected by a flexible, bendable connecting tube 15.

As shown in FIG. 11, the flow control device of the eleventh example has a flow path 10, a pressure adjustment unit 40, a flow adjustment unit 20, and a flow sensor unit 30. The pressure adjustment unit 40 and the flow adjustment unit 20, and the flow adjustment unit 20 and the flow sensor unit 30 are all connected by a connecting pipe 15.

As shown in FIG. 12, the flow control device of the twelfth example has a flow path 10, a pressure adjustment unit 40, a flow sensor unit 30, and a flow adjustment unit 20. The pressure adjustment unit 40 and the flow sensor unit 30, and the flow sensor unit 30 and the flow adjustment unit 20 are all connected by a connecting pipe 15.

In the tenth to twelfth examples, the devices are all connected to each other by connecting pipes, and the orientation of the devices can be freely set. Therefore, these examples are suitable for example for flow control devices that are placed in spaces with relatively complex shapes. Alternatively, these examples are suitable for application to devices where the placement location of the flow control device is not determined.

As described above, the flow control device of this embodiment allows the arrangement of the connected devices to be changed in various ways, and the planar shape of the flow control device can be changed accordingly. Therefore, it is possible to configure the flow control device in a shape that can be accommodated in the location where the flow control device is to be disposed. In this way, the flow control device of this embodiment can achieve space saving by various device arrangements. Therefore, the flow control device of this embodiment can be configured as a small flow control device by using small devices, and a flow control device that can be made even smaller and has a higher degree of design freedom can be realized.

[More specific configuration explanation]
The configuration of the flow rate control device of this embodiment will be described in more detail below.

[Configuration Overview]
Fig. 13 is a diagram showing a schematic configuration of a flow control device according to one embodiment of the present invention. Fig. 14 is a diagram showing a schematic cross section of the flow control device taken along line A-A in Fig. 13. As shown in Fig. 13, the flow control device 1 has a flow control unit 2, a flow sensor unit 3, a pressure control unit 4, a connection unit 5, a control board 6, and a cover 7.

The longitudinal direction of the flow control device 1 is the X direction, the lateral direction is the Y direction, and the height direction is the Z direction. The X direction is the same as the connection direction between the pressure adjustment unit 4 and the flow adjustment unit 2. The Y direction is the direction in which the pressure adjustment unit 4 or the flow adjustment unit 2 and the flow sensor unit 3 are arranged. The Z direction is a direction perpendicular to both the X direction and the Y direction.

The flow control device 1 has a structure shown in FIG. 2, and is connected in the following order from the upstream side in the direction of fluid flow: pressure adjustment unit 4, flow adjustment unit 2, connection unit 5, and flow sensor unit 3. From one end side in the X direction, the pressure adjustment unit 4, flow adjustment unit 2, and connection unit 5 are arranged in this order. From one end side in the Y direction, the pressure adjustment unit 4, flow adjustment unit 2, flow sensor unit 3, and control board 6 are arranged in this order. The connection unit 5 is arranged on the other end side in the X direction of the flow adjustment unit 2 and the flow sensor unit 3. The control board 6 is arranged adjacent to the flow sensor unit 3 on the other end side in the Y direction. The cover 7 is a component that covers the above units, the sensor, and the control board 6 as a whole.

The pressure adjustment unit 4 has a pressure adjustment valve. The pressure adjustment valve is a valve that adjusts the pressure of a fluid to a desired pressure, for example, a pressure reducing valve that reduces the pressure of a fluid having a sufficiently high pressure to a specific pressure. The pressure adjustment unit 4 also has a flow path that opens to a pair of side portions opposing each other in the X direction, extends along the X direction, and connects the outside of the pressure adjustment unit 4 to the pressure adjustment valve. The opening 43 is one of the openings at the side portions in the flow path of the pressure adjustment unit.

The flow rate adjustment unit 2 has a flow rate adjustment valve. The flow rate adjustment valve is a valve that controls the opening degree of the flow path in response to a signal from the control board 6 that corresponds to the flow rate detection value in the flow rate sensor unit 3, and is, for example, a proportional adjustment valve that can continuously change the opening degree of the flow path in response to the signal. In addition, the flow rate adjustment unit 2 has a flow path that opens to a pair of side portions that face each other in the X direction, extends along the X direction, and connects the outside of the flow rate adjustment unit 2 to the flow rate adjustment valve. In addition, the opening on the upstream side of the flow path of the flow rate adjustment unit 2 faces and is connected to the opening on the downstream side of the flow path of the pressure adjustment unit 4.

The connecting unit 5 has a flow path that connects to the flow path of the flow rate adjustment unit 2. The connecting unit 5 is configured so that it can be fixed integrally to the flow rate adjustment unit 2 and the pressure adjustment unit 4 by screws inserted from the connecting unit 5 side. The connecting unit 5 is also configured so that it can connect a flow path to the flow rate sensor unit 3 and the flow rate sensor unit 3 can be fixed to the connecting unit 5. The connecting unit 5 will be described later.

The flow sensor unit 3 has a flow sensor. The flow sensor is a device that detects the flow rate of a fluid in a flow path, for example a mass flow sensor that detects the mass flow rate of the fluid. The flow sensor unit 3 has a flow path that passes fluid through the fluid sensor, and both ends of the flow path are formed with female threads, into which corresponding male threads can be screwed. The opening 31 is a downstream opening in the flow path of the flow sensor unit 3. The flow sensor unit 3 is fixed to the connecting unit 5 by a connecting screw 57 so that the fluid can pass through.

The control board 6 generates and transmits a signal that controls the opening of the flow rate adjustment valve in response to a signal corresponding to a flow rate setting value input from the outside and the detection value of the flow rate sensor in the flow rate sensor unit 3.

The cover 7 has a roughly rectangular parallelepiped outer shape. The cover 7 has a cutout on one side, in which an opening 43 of the upstream flow path in the pressure adjustment unit 4 and an opening 31 of the downstream flow sensor unit 3 are located. These openings open to the outside as both ends of the fluid flow path in the flow control device 1.

[Connecting unit]
Fig. 15 is a diagram showing a schematic configuration of a connection unit in one embodiment of the present invention. Fig. 16 is a diagram for explaining the structure of a flow path in a connection unit in one embodiment of the present invention. As shown in Figs. 15 and 16, the connection unit 5 has a connection part 51 and a support part 52, and has a substantially L-shaped shape when viewed in a plane. The support part 52 is a substantially rectangular prism-shaped part that is the other end of the connection part 51 in the Y direction and extends from the lower part of the connection part 51 in the Z direction, and corresponds to the long side part of the substantially L shape.

The connecting portion 51 is a rectangular plate-like portion whose longitudinal direction is in the Y direction and stands up in the Z direction. The connecting portion 51 corresponds to the short side of the approximate L shape. The connecting portion 51 has a first connecting port 53, a second connecting hole 54, a third connecting hole 55, and a through hole 59.

The first connection port 53 is a hole that opens at one end side of the connection part 51 in the X direction and one end in the Y direction, and is formed so as to be connectable to a flow path that opens on the downstream side of the flow rate adjustment unit 2. The second connection hole 54 is a hole that opens at one end face of the connection part 51 in the Y direction and extends along the Y direction. The third connection hole 55 is a hole that extends along the X direction at the other end of the connection part 51 in the Y direction and at the upper part in the Z direction. The through hole 59 is a hole that extends along the X direction in the connection part 51, and a screw that connects the connection unit 5, the flow rate adjustment unit 2, and the pressure adjustment unit 4 is inserted.

The second connecting hole 54 is connected to the first connecting port 53 and opens into the inner wall of the third connecting hole 55. The flow path from the opening of the second connecting hole 54 to the connection with the first connecting port 53 is sealed by a pin 56 inserted from the opening (see FIG. 13). A connecting screw 57 is inserted into the third connecting hole 55.

[Connecting screw]
Fig. 17 is a diagram showing a typical configuration of a connecting screw in one embodiment of the present invention. As shown in Fig. 17, the connecting screw 57 has a substantially cylindrical large diameter portion 571 and a threaded portion 572 connected thereto along its axial direction.

As shown in Figures 17 and 14, the large diameter portion 571 has a disk portion 573, a groove portion 574, a first flange portion 575, a second flange portion 576, a third flange portion 577, a first communication hole 578, and a second communication hole 579. The threaded portion 572 is a generally cylindrical portion with a smaller diameter than the large diameter portion 571. A thread is formed at the tip of the outer circumferential surface of the threaded portion 572 to screw into the female thread at the flow path end of the flow sensor unit 3.

In the large diameter portion 571, the disk portion 573 is a disk-shaped portion disposed at one end of the large diameter portion 571. The groove portion 574 is a linear groove formed on the surface of the disk portion 573. The first flange portion 575, the second flange portion 576, and the third flange portion 577 are all protrusions protruding from the outer peripheral surface of the large diameter portion 571. The position of the first flange portion 575 in the axial direction of the connecting screw 57 is a position where an O-ring 58 can be disposed between the disk portion 573 and the first flange portion 575. Similarly, the positions of the second flange portion 576 and the third flange portion 577 in the axial direction of the connecting screw 57 are positions where an O-ring 58 can be disposed between these flange portions.

A first communication hole 578 opens between the first flange portion 575 and the second flange portion 576 in the axial direction of the connecting screw 57. The first communication hole 578 is a through hole that extends in a direction perpendicular to the axial direction of the connecting screw 57 through the portion of the large diameter portion 571 between the first flange portion 575 and the second flange portion 576. The second communication hole 579 is a hole that opens into the tip surface of the threaded portion 572 and extends from the tip surface to the first communication hole 578 along the axial direction of the connecting screw 57.

In addition to the main components described above, the flow control device 1 also has appropriate structures for connecting each unit to each other, such as recesses, through holes, and bosses.

[Assembly method]
The pressure adjustment unit 4, the flow rate adjustment unit 2, and the connecting unit 5 are connected in this order while connecting the flow paths to each other. The connecting parts of the flow paths are configured with a known configuration for pipe connection, and sealing members such as O-rings are appropriately arranged, so that the flow paths are connected airtight. The pressure adjustment unit 4, the flow rate adjustment unit 2, and the connecting unit 5 are fixed in a connected state to each other by screws inserted from the through holes 59.

Meanwhile, O-rings 58 are fitted between the disk portion 573 and the first flange portion 575 of the connecting screw 57, and between the second flange portion 576 and the third flange portion 577. With the flow sensor unit 3 placed on the support portion 52 of the connecting unit 5, the connecting screw 57 is inserted into the third connecting hole 55 of the connecting unit 5. By pressing a flathead screwdriver against the groove portion 574 and rotating the connecting screw 57, the threaded portion 572 and the flow path end of the flow sensor unit 3 are screwed together. In this way, the connecting unit 5 and the flow sensor unit 3 are fixed to each other with their flow paths connected to each other.

When the screw portion 572 is screwed into the opening of the flow path of the flow sensor unit 3, the O-ring 58 is in close contact with the inner circumferential surface of the third connecting hole 55. In addition, the portion between the first flange portion 575 and the second flange portion 576 of the large diameter portion 571 of the connecting screw 57 has a gap with respect to the inner circumferential surface of the third connecting hole 55, and faces the opening of the second connecting hole 54. The gap is airtightly separated by the O-ring 58. Furthermore, the second communication hole 579 is airtightly connected to the flow path of the flow sensor unit 3 by screwing the screw portion 572 into the flow sensor unit 3. In this way, an airtight flow path is formed in the connecting unit 5 that connects the flow path of the flow adjustment unit 2 and the flow path of the flow sensor unit 3.

After the pressure adjustment unit 4, flow rate adjustment unit 2, connection unit 5 and flow rate sensor unit 3 are fixed together as described above, the control board 6 and cover 7 are appropriately positioned.

[Flow Control]
The control board 6 transmits a control signal for controlling the opening degree of the flow rate adjustment valve in the flow rate adjustment unit 2. A signal of the detection value of the flow rate sensor in the flow sensor unit 3 is supplied to the control board 6, and the control board 6 transmits a signal corresponding to the opening degree of the flow rate adjustment valve according to the signal to the flow rate adjustment valve. Thus, the flow rate of the fluid supplied to the flow control device 1 through the opening 43 is controlled to a desired mass flow rate by the flow control device 1, and is discharged from the opening 31 at the desired flow rate. The fluid is used in a subsequent stage at the mass flow rate controlled by the flow control device.

[Advantageous Effects]
The flow control device 1 can be made shorter in length in the X direction than when each unit and sensor are connected in a row. Also, the horizontal dimension of the flow sensor unit 3 is usually longer than that of the pressure adjustment unit and the flow adjustment unit. Therefore, by connecting the pressure adjustment unit and the flow adjustment unit and arranging them next to the flow sensor unit 3, it is possible to install them in a space with a shorter length in the longitudinal direction (X direction). In this way, the flow control device 1 can be made smaller, and a flow control device with a higher degree of freedom in design can be realized. Therefore, the flow control device 1 is small and can be placed in a desired position.

[Other embodiments related to connection]
In the embodiment of the present invention, the connection between the connection unit and the flow sensor can be appropriately set according to the structure of the flow path end of the flow sensor. Fig. 18 is a partial cross-sectional view showing a schematic configuration of a flow control device according to another embodiment of the present invention. Fig. 18 includes a cross section of the flow control device of this embodiment cut along a line such as line A-A shown in Fig. 13.

As shown in FIG. 18, the flow control device 11 of this embodiment has a pressure adjustment unit 4, a flow adjustment unit 2, a connection unit 150, and a flow sensor unit 130. The pressure adjustment unit 4 and the flow adjustment unit 2 are the same as those of the flow control device 1 described above.

The connecting unit 150 has a third connecting port 155 instead of the third connecting hole 55, and has the same configuration as the connecting unit 5 described above, except that it does not have a support part 52. The connecting unit 150 is a rectangular plate-shaped part extending in the YZ direction, and has a third connecting port 155 that is on the surface of one end side in the X direction and opens to the other end side in the Y direction. The through hole 159 is configured in the same way as the through hole 59 described above, except that the opening is tapered.

The third connection port 155 is a bottomed hole, and the second connection hole 154 opens into its inner peripheral surface. The second connection hole 154 is a hole that connects the outside, the first connection port, and the third connection port 155, and the flow path from the opening of the outside to the first connection port is sealed by a pin (not shown). The opening edge of the third connection port 155 is provided with a recess into which an O-ring 158 can be fitted.

The flow sensor unit 130 has a flow sensor 131 and a fixing block 132 for fixing the flow sensor 131. The flow sensor unit 130 is configured in the same manner as the flow sensor unit 3, except that the other end of the flow path is a bamboo shoot joint 133. The bamboo shoot joint 133 has a tapered shape in which the outer diameter gradually decreases toward the tip.

An O-ring 158 is attached to the groove at the opening of the third connection port 155, and the bamboo joint 133 is inserted into the third connection port 155. The outer peripheral surface of the bamboo joint 133 is in close contact with the O-ring 158. In this way, the connection unit 150 and the flow sensor unit 130 are fixed to each other with their flow paths connected.

The third connecting port 155 is airtightly sealed from the outside by the bamboo joint 133 and the O-ring 158. Meanwhile, a gap is formed between the bottom of the third connecting port 155 and the tip of the outer peripheral surface of the bamboo joint 133. Therefore, the second connecting hole 154 is connected to the bamboo joint 133 via the third connecting port 155 so that fluid can flow through. In this way, a flow path that is airtight from the outside is formed in the connecting unit 150, which connects the flow path of the flow adjustment unit 2 and the flow path of the flow sensor unit 130.

The flow control device 11 is small, like the flow control device 1, and can be placed in a desired location because the connection unit 150 has a configuration that corresponds to the structure of the open end of the flow path in the flow sensor unit 130.

[Application]
Any of the flow control devices according to the present embodiment is effective when there is a restriction on the spatial shape of the installation location. For example, the flow control device of the present embodiment is effective when the device (parent device) on which the flow control device is mounted is small for portable use, and therefore a conventional space with a long and narrow shape and sufficient height does not exist. Alternatively, the flow control device of the present embodiment is effective when it is not possible to connect a fluid flow path to both ends of such a space. Alternatively, the flow control device of the present embodiment is effective when it is not possible to form an installation space in the parent device that is large enough and shaped enough to install an additional flow control device due to modification of the parent device.

The flow control device according to this embodiment can be applied to the control of the flow rate of both liquids and gases. In addition, the flow control device according to this embodiment can be applied to the control of the flow rate of any fluid, as long as the required accuracy of control for the control of the flow rate of the fluid can be achieved. For example, the flow control device according to this embodiment can be applied to a concentrated oxygen supply device in medical treatment such as home oxygen therapy. In addition, the flow control device according to this embodiment can be applied to industrial fields such as semiconductor manufacturing, chemical manufacturing, and factory automation. The control value of the flow rate of the fluid in the flow control device according to this embodiment can be appropriately determined depending on the application of the flow control device or its parent unit.

[Modifications]
The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in the different embodiments are also included in the technical scope of the present invention.

For example, a plurality of through holes may be formed on the surface of the pressure adjustment unit or the flow rate adjustment unit that open to the pressure adjustment valve or the flow rate adjustment valve, and all but two of these may be sealed with a pin as described above. With this configuration, it is possible to form a bent portion in the flow rate adjustment unit and the pressure adjustment unit. Also, by connecting a block having a plurality of intersecting through holes as described above to the flow sensor, it is possible to similarly form a bent portion in the flow sensor unit. Furthermore, by using such a block instead of the connecting unit described above, it is possible to introduce a bent portion that bends the flow path by 90° between the units.

In addition, by connecting the above units with flexible tubing, it is possible to construct a flow control device in which the position of the units can be freely adjusted.

〔summary〕
A flow control device (1, 11) according to an embodiment of the present invention includes a device for controlling a flow rate and a flow path (10) for connecting the devices and circulating a fluid through the device. The device includes a flow control valve for adjusting the flow rate of the fluid flowing through the flow path and a flow sensor for detecting the flow rate of the fluid flowing through the flow path, and both ends of the flow path are open in directions that are not facing each other. Therefore, the flow control device can be installed in a space other than a long and narrow space having opposing flow paths for the fluid at both ends. Therefore, the flow control device can be made smaller and the degree of freedom in design can be increased.

In a flow control device according to an embodiment of the present invention, the flow path may include a bent portion (B) between both ends that bends the flow path so that the fluid flows at one end of the flow path in a direction different from the direction of fluid flow at the other end of the flow path. Having the flow path include a bent portion is even more effective in terms of increasing the degree of freedom in arranging devices in the flow control device.

In the flow control device according to the embodiment of the present invention, the bend may be located between at least any two of the devices. Positioning the bend between the devices is even more effective in terms of increasing the degree of freedom in arranging the devices in the flow control device.

The flow control device according to the embodiment of the present invention may further include a connecting unit (5, 150) that is interposed in the flow path and forms part of the flow path, and the connecting unit may include a bent portion. It is even more effective from the viewpoint of increasing the freedom of arrangement of devices in the flow control device for the flow control device to further include a connecting unit that includes a bent portion.

Alternatively, a flow control device according to an embodiment of the present invention has a device for controlling flow rate and a flow path for connecting the devices and circulating a fluid through the devices. The device includes a flow control valve for adjusting the flow rate of the fluid flowing through the flow path and a flow sensor for detecting the flow rate of the fluid flowing through the flow path, and the flow path includes a bendable connecting pipe (15). Therefore, the flow control device can be appropriately arranged in accordance with the shape of the space in which it is to be installed. Therefore, the flow control device can be made smaller and allows for greater freedom in design.

In the flow control device according to the embodiment of the present invention, the device may further include a pressure regulating valve for regulating the pressure of the fluid flowing through the flow path. Inclusion of a pressure regulating valve in the device is even more effective in terms of improving the accuracy of the flow rate of the fluid.

In the flow control device according to the embodiment of the present invention, the connecting pipe may be located between at least any two of the devices. Positioning the connecting pipe between the devices is even more effective in terms of increasing the degree of freedom in arranging the devices in the flow control device.

In a flow control device according to an embodiment of the present invention, the flow sensor may detect the mass flow rate of the fluid. It is even more effective in terms of increasing the accuracy of the flow rate of the fluid if the flow sensor is a mass flow sensor.

LIST OF SYMBOLS 1, 11 Flow control device 2, 20 Flow adjustment unit 3, 30, 130 Flow sensor unit 4 Pressure adjustment unit 5, 150 Connection unit 6 Control board 7 Cover 10 Flow path 15 Connection pipe 31, 43 Opening 40 Pressure adjustment unit 51 Connection portion 52 Support portion 53 First connection port 54, 154 Second connection hole 55 Third connection hole 56 Pin 58, 158 O-ring 59, 159 Through hole 131 Flow sensor 132 Fixing block 133 Barb joint 155 Third connection port 571 Large diameter portion 572 Thread portion 573 Disc portion 574 Groove portion 575 First flange portion 576 Second flange portion 577 Third flange portion 578 First communication hole 579 Second communication hole B Bend

Claims (2)

A flow control device having a device for controlling a flow rate and a flow path for connecting the device and passing a fluid through the device,
The device includes a flow rate regulating valve for regulating a flow rate of a fluid flowing through the flow path, a flow rate sensor for detecting a flow rate of the fluid flowing through the flow path, and a pressure regulating valve for regulating a pressure of the fluid flowing through the flow path,
Both ends of the flow path are open in directions that are not opposed to each other,
the flow path includes a bent portion between the two ends that bends the flow path such that fluid flows at one end of the flow path in a direction different from a direction of fluid flow at the other end of the flow path,
A connecting unit is further provided in the flow path to form a part of the flow path,
The connection unit includes the bending portion,
the pressure regulating valve, the flow rate regulating valve, the connecting unit, and the flow rate sensor are connected in this order from the upstream side in a fluid flow direction,
the pressure regulating valve, the flow rate regulating valve, and the connecting unit are arranged in this order from one end side in a first direction, the pressure regulating valve, the flow rate regulating valve, and the flow sensor are arranged in this order from one end side in a second direction perpendicular to the first direction, and the connecting unit is arranged on the other end side in the first direction of the flow rate regulating valve and the flow sensor,
A flow control device , wherein the connection unit connects the flow path to the flow sensor, and the flow sensor is fixed to the connection unit . The flow control device of claim 1 , wherein the flow sensor detects a mass flow rate of the fluid.

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