JP2022069208A - Flow control device - Google Patents

Abstract

To provide a flow control device which can be further miniaturized and further increases a degree of design freedom.SOLUTION: A flow control device includes apparatuses for controlling the flow rate of a fluid flowing in a flow channel, and the flow channel for connecting the apparatuses and allowing the fluid to flow to the apparatuses. The flow control device includes a flow rate adjustment unit 20 and a flow rate sensor unit 30, and both ends of the flow channel 10 for the fluid in the flow control device are opened in directions in which they are not opposed to each other.SELECTED DRAWING: Figure 1

Description

The present invention relates to a flow control device.

Flow control devices are used in various fields to control the flow rate of a fluid. A mass flow controller is known as such a flow rate control device. In a mass flow controller, the mass flow controller may be required to have a compact configuration due to the miniaturization of a device such as an oxygen concentrator. Such a mass flow controller is configured so that the openings at both ends of the flow path connecting the flow rate adjusting valve and the flow rate sensor in series face each other at the shortest distance (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 11-194833

However, in a conventional mass flow controller as described above, such a structure is allowed because the valves and sensors are arranged linearly and the piping of the flow path opens back to each other at both ends of the mass flow controller. Must be placed in place. Therefore, even if the mass flow controller is small, it may be difficult to place it at a desired position in a device that requires control of the fluid flow rate.

One aspect of the present invention is to realize a flow rate control device that can be made smaller and has a higher degree of freedom in design.

In order to solve the above-mentioned problems, the flow rate control device according to one aspect of the present invention has a device for controlling the flow rate and a flow path for connecting the device and allowing fluid to flow through the device. The device includes a flow rate adjusting valve for adjusting the flow rate of the fluid flowing through the flow path, and a flow rate sensor for detecting the flow rate of the fluid flowing through the flow path. Both ends of the flow path are open so as not to face each other.

Further, in order to solve the above-mentioned problems, the flow rate control device according to one aspect of the present invention includes a device for controlling the flow rate and a flow path for connecting the device and allowing fluid to flow through the device. The device is a flow rate control device having The flow path includes a bendable connecting tube.

According to one aspect of the present invention, it is possible to realize a flow rate control device that can be made smaller and has a higher degree of freedom in design.

It is a figure which shows typically the first example of the structure of the flow rate control device which concerns on embodiment of this invention. It is a figure which shows typically the 2nd example of the structure of the flow rate control device which concerns on embodiment of this invention. It is a figure which shows typically the 3rd example of the structure of the flow rate control device which concerns on embodiment of this invention. It is a figure which shows typically the 4th example of the structure of the flow rate control device which concerns on embodiment of this invention. It is a figure which shows typically the 5th example of the structure of the flow rate control device which concerns on embodiment of this invention. It is a figure which shows typically the sixth example of the structure of the flow rate control device which concerns on embodiment of this invention. It is a figure which shows typically the 7th example of the structure of the flow rate control device which concerns on embodiment of this invention. It is a figure which shows the eighth example of the structure of the flow rate control device which concerns on embodiment of this invention schematically. It is a figure which shows typically the 9th example of the structure of the flow rate control device which concerns on embodiment of this invention. It is a figure which shows the tenth example of the structure of the flow rate control device which concerns on embodiment of this invention schematically. It is a figure which shows the eleventh example of the structure of the flow rate control device which concerns on embodiment of this invention schematically. It is a figure which shows the twelfth example of the structure of the flow rate control device which concerns on embodiment of this invention schematically. It is a figure which shows typically the structure of the flow rate control apparatus of one Embodiment of this invention. FIG. 3 is a partial cross-sectional view showing a cross section of the flow rate control device of FIG. 13 cut along the line AA. It is a figure which shows typically the structure of the connection unit in one Embodiment of this invention. It is a figure for demonstrating the structure of the flow path in the connection unit in one Embodiment of this invention. It is a figure which shows typically the structure of the connecting screw in one Embodiment of this invention. It is a partial cross-sectional view schematically showing the structure of the flow rate control device which concerns on other embodiment of this invention.

Hereinafter, one embodiment of the present invention will be described in detail. The flow rate control device of the present embodiment has a device for controlling the flow rate and a flow path for connecting the device and allowing fluid to flow through the device.

The device includes a flow rate adjusting valve for adjusting the flow rate of the fluid flowing through the flow path and a flow rate sensor for detecting the flow rate of the fluid flowing through the flow path. The flow rate regulating valve can be appropriately selected from known valves capable of adjusting the flow rate of the fluid according to the accuracy required for controlling the flow rate. For example, the flow rate regulating valve may be a proportional regulating valve from the viewpoint of sufficiently precisely controlling the flow rate of the fluid.

The flow rate sensor may be appropriately selected from known sensors capable of detecting the flow rate of the fluid, depending on the accuracy and type of flow rate to be controlled. For example, the flow rate sensor may be a mass flow rate sensor that detects the mass flow rate of the fluid, or may be a volume flow rate sensor that detects the volume flow rate of the fluid.

The device may further have a configuration other than the above as long as the effect of the present embodiment can be obtained. Examples of such other configurations include a pressure regulating valve for regulating the pressure of the fluid flowing through the flow path.

If the pressure regulating valve is located upstream of the flow regulating valve and the flow sensor, it is possible to adjust the pressure of the fluid to a pressure suitable for operating these devices. As described above, the pressure regulating valve is preferable from the viewpoint of realizing the pressure of the fluid according to the situation on the downstream side and improving the accuracy and stability of the operation of the device. In addition, the pressure regulating valve can adjust the pressure of the fluid to a pressure suitable for use of the fluid whose flow rate is controlled by the flow control device.

In the following embodiment, a mode including a pressure regulating valve will be described, but the flow rate control device according to one aspect of the present invention may not include the pressure regulating valve. A fluid whose pressure has been adjusted by a separately prepared pressure regulating valve may flow into the fluid control device.

The order of connecting the above devices can be appropriately determined within a range in which the desired flow rate can be detected. For example, when the flow rate sensor is a mass flow rate sensor, the connection order of the devices is not limited as long as the usage conditions of the devices are satisfied. From the viewpoint of improving the accuracy of flow rate detection and control, it is preferable that the connection order of the above devices is a pressure regulating valve, a flow rate regulating valve and a flow rate sensor from the upstream side. When the flow rate sensor is a volumetric flow rate sensor, it is preferable that the flow rate sensor is connected to the downstream side of the pressure control valve from the viewpoint of improving the accuracy of flow rate detection.

Further, examples of other configurations that the flow control device may have include a control board for controlling the opening degree of the flow rate adjusting valve according to the detection value of the flow rate sensor, the above-mentioned equipment, and a cover covering the flow path. , And a pedestal for mounting the above-mentioned equipment and flow path.

The flow path may be appropriately formed according to the fluid flowing through the flow path, and may be formed by pipes, holes, or other voids that can be used in the flow control device. In this embodiment, the fluid may be a liquid or a gas. In the present embodiment, both ends of the flow path are opened in a direction that does not face each other (a direction that is not back-to-back). Here, the "both ends of the flow path" mean the open ends of the flow path peculiar to the flow control device.

The flow path includes a bend between both ends of the flow path that bends the flow path so that fluid flows at the other end of the flow path in a direction different from the flow direction of the fluid at one end of the flow path. You can stay. The flow path including the bent portion has a curved shape so that the inflow direction at the inlet of the flow path and the outflow direction at the exit of the flow path are different at any position between the openings at both ends. Therefore, the above-mentioned flow path is formed in which the openings at both ends are opened so as not to face each other.

Here, the "bent portion" is a portion that is bent at an angle different from the bending for introducing the fluid into the above-mentioned device or in a direction different from the bending. There may be one bent portion or more bent portions in the flow path. Further, the bending direction of the flow path is not limited by the bent portion.

For example, the bent portion may be a portion where the flow path bends in the horizontal direction, a portion where the flow path bends in the vertical direction, or a portion where the flow path bends diagonally upward. Further, the bent portion may be a portion where the flow path bends at a right angle, a portion where the flow path bends at an acute angle, or a portion where the flow path bends at an obtuse angle. Further, the flow path may be composed of a bent portion. For example, the flow path may be arcuate, and in this case, the entire flow path can be said to be a bent portion.

The bend may be located between at least any two of the above devices. Such a bent portion bends the flow path so as to bend the connecting direction of the two devices arranged on the upstream side and the downstream side thereof. Therefore, it is suitable for arranging the above-mentioned equipment at a desired position in the flow rate control device.

The bent portion may be introduced into the flow control device by a component in which a flow path including the bent portion is formed. That is, the flow rate control device may further include a connecting unit that is interposed in the flow path and forms a part of the flow path, and the connecting unit may include a bent portion. The connecting unit will be described in more detail later.

[A form having a curved flow path]
Specific examples of the device configuration of the flow rate control device of this embodiment are shown in FIGS. 1 to 9. 1 to 3 are diagrams schematically showing the first to third examples of the configuration of the flow control device of the present embodiment, respectively. In each of the first to third examples, the flow path has a substantially U-shaped shape including two bent portions B, and both ends of the flow path are open in the same direction. are doing. Each of the first to third examples has a bent portion B between the devices.

As shown in FIG. 1, the flow rate control device of the first example includes a flow path 10, a flow rate adjusting unit 20, and a flow rate sensor unit 30. The flow rate adjusting unit 20 is a unit including a flow rate adjusting valve, and the flow rate sensor unit 30 is a unit including a flow rate sensor. In addition, in this specification, a "unit" means a unit structure constituting a flow rate control device. For example, the flow rate adjusting unit 20 includes a flow rate adjusting valve, a flow path through which the fluid flows, and a structure for connecting the flow rate adjusting valve to another configuration. If the flow rate adjusting valve can be connected to other configurations independently, the flow rate adjusting unit 20 may be composed of only the flow rate adjusting valve. The flow rate adjusting unit 20 is arranged on the upstream side of the bent portion B in the flow path 10, and the flow rate sensor unit 30 is arranged on the downstream side of the bent portion B.

As shown in FIG. 2, the flow rate control device of the second example includes a flow path 10, a pressure adjusting unit 40, a flow rate adjusting unit 20, and a flow rate sensor unit 30. The pressure adjusting unit 40 is a unit including a pressure adjusting valve. The pressure adjusting unit 40 and the flow rate adjusting unit 20 are arranged on the upstream side of the bent portion B in the flow path 10, and the flow rate sensor unit 30 is arranged on the downstream side of the bent portion B.

As shown in FIG. 3, the flow rate control device of the third example includes a flow path 10, a pressure adjusting unit 40, a flow rate sensor unit 30, and a flow rate adjusting unit 20. The pressure adjusting unit 40 and the flow rate sensor unit 30 are arranged on the upstream side of the bent portion B in the flow path 10, and the flow rate adjusting unit 20 is arranged on the downstream side of the bent portion B.

Since both ends of the flow path are open in the same direction in each of the first to third examples, it is suitable for, for example, a flow control device arranged in a rectangular space having a small vertical-horizontal difference. be.

4 to 6 are diagrams schematically showing the fourth to sixth examples of the configuration in the flow control device of the present embodiment, respectively. In each of the fourth to sixth examples, the flow path has a substantially L-shaped shape including one bent portion B, and both ends of the flow path pass through the two ends of each other. It is open in the direction in which the flow directions of the flowing fluid intersect. Each of the fourth to sixth examples has a bent portion B in the flow rate sensor unit 30.

As shown in FIG. 4, the flow rate control device of the fourth example includes a flow path 10, a flow rate adjusting unit 20, and a flow rate sensor unit 30. The flow rate adjusting unit 20 and the flow rate sensor unit 30 are connected by a flow path 10 in this order from the upstream side. The flow rate sensor unit 30 is arranged so that the flow directions of the fluids intersect with each other with respect to the flow rate adjusting unit 20. The flow path 10 is connected to the flow rate sensor unit 30 from the side of the flow rate sensor unit 30, and extends downstream from the end of the flow rate sensor unit 30. The bent portion B is a portion of the flow path in the flow sensor unit 30 where the fluid flow directions intersect.

As shown in FIG. 5, the flow rate control device of the fifth example includes a flow path 10, a pressure adjusting unit 40, a flow rate adjusting unit 20, and a flow rate sensor unit 30. The pressure adjusting unit 40, the flow rate adjusting unit 20, and the flow rate sensor unit 30 are connected by a flow path 10 in this order from the upstream side. The flow rate sensor unit 30 is arranged so that the flow direction of the fluid in the flow rate sensor unit 30 intersects with the connection direction of the pressure adjustment unit 40 and the flow rate adjustment unit 20. The flow path 10 is connected to the flow rate sensor unit 30 from the side of the flow rate sensor unit 30, and extends downstream from the end of the flow rate sensor unit 30. The bent portion B is a portion of the flow path in the flow sensor unit 30 where the fluid flow directions intersect.

As shown in FIG. 6, the flow rate control device of the sixth example includes a flow path 10, a pressure adjusting unit 40, a flow rate sensor unit 30, and a flow rate adjusting unit 20. The pressure adjusting unit 40, the flow rate sensor unit 30, and the flow rate adjusting unit 20 are connected by a flow path 10 in this order from the upstream side. The flow rate sensor unit 30 is arranged with respect to the pressure adjustment unit 40 in a direction in which the flow directions of the fluids in the flow rate sensor unit 30 intersect with each other, and the flow rate adjustment unit 20 is located downstream of the flow rate sensor unit 30. It is connected by. The flow path 10 is connected to the flow rate sensor unit 30 from the side of the flow rate sensor unit 30, and extends from the end of the flow rate sensor unit 30 to the flow rate adjustment unit 20. The bent portion B is a portion of the flow path in the flow sensor unit 30 where the fluid flow directions intersect.

Since the flow paths of the fourth to sixth examples are all substantially L-shaped, they are suitable for, for example, a flow rate control device arranged in a space having a bent shape.

7 to 9 are diagrams schematically showing the seventh to ninth examples of the configuration in the flow control device of the present embodiment, respectively. In each of the seventh to ninth examples, the flow path has a substantially L-shaped shape including one bent portion B, and both ends of the flow path are in the direction in which the fluid flows. Is open in the direction in which they intersect. Each of the seventh to ninth examples has a bent portion B in the flow rate adjusting unit 20.

As shown in FIG. 7, the flow rate control device of the seventh example includes a flow path 10, a flow rate sensor unit 30, and a flow rate adjusting unit 20. The flow rate sensor unit 30 and the flow rate adjusting unit 20 are connected by a flow path 10 in this order from the upstream side. The flow rate adjusting unit 20 and the flow rate sensor unit 30 are arranged so that the directions in which the fluid flows intersect with each other, and the flow path 10 is connected to the flow rate adjusting unit 20 from the side of the flow rate adjusting unit 20. , Extends downstream from the end of the flow rate adjusting unit 20. The bent portion B is a portion of the flow path in the flow rate adjusting unit 20 where the fluid flow directions intersect.

As shown in FIG. 8, the flow rate control device of the eighth example includes a flow path 10, a pressure adjusting unit 40, a flow rate adjusting unit 20, and a flow rate sensor unit 30. The pressure adjusting unit 40, the flow rate adjusting unit 20, and the flow rate sensor unit 30 are connected by a flow path 10 in this order from the upstream side. The flow rate adjusting unit 20 is arranged so as to intersect the pressure adjusting unit 40, and the flow rate sensor unit 30 is connected to the downstream side of the flow rate adjusting unit 20. The flow path 10 is connected to the flow rate adjusting unit 20 from the side of the flow rate adjusting unit 20, and extends from the end of the flow rate adjusting unit 20 to the flow rate sensor unit 30. The bent portion B is a portion of the flow path in the flow rate adjusting unit 20 where the fluid flow directions intersect.

As shown in FIG. 9, the flow rate control device of the ninth example includes a flow path 10, a pressure adjusting unit 40, a flow rate sensor unit 30, and a flow rate adjusting unit 20. The pressure adjusting unit 40, the flow rate sensor unit 30, and the flow rate adjusting unit 20 are connected by a flow path 10 in this order from the upstream side. The flow rate adjusting unit 20 is arranged so that the flow directions of the fluids intersect with each other with respect to the connecting direction of the pressure adjusting unit 40 and the flow rate sensor unit 30. The flow path 10 is connected to the flow rate adjusting unit 20 from the side of the flow rate adjusting unit 20, and extends from the end of the flow rate adjusting unit 20 to the downstream side. The bent portion B is a portion of the flow path in the flow rate adjusting unit 20 where the fluid flow directions intersect.

Normally, when viewed in a plan view, the length of the device in the direction in which the fluid flows is longer in the flow rate sensor unit 30 than in those in the flow rate adjusting unit 20 and the pressure adjusting unit 40. Therefore, in both the seventh example and the ninth example, the flow path is substantially L-shaped, but the devices are arranged in a substantially linear shape. Therefore, both the seventh example and the ninth example are suitable as a flow rate control device when, for example, the space is an elongated rectangular space as in the conventional case, but the connection direction of the flow path is restricted.

Further, the eighth example is suitable for, for example, a flow rate control device arranged in a space having a bent shape, as in the fourth to sixth examples. In this embodiment, the bending portion B may be formed in the pressure adjusting unit 40 instead of the flow rate sensor unit 30 or the flow rate adjusting unit 20 in the fourth to ninth examples.

[A form having a bendable flow path]
In this embodiment, the flow path may include a bendable connecting pipe. The connecting pipe is a pipe connected to at least one of the above-mentioned devices and has flexibility. The connecting pipe may be connected to any one of the above-mentioned devices, or may be located between any two of the devices. When the flow path includes a connecting pipe, the flow path on the upstream side or the downstream side of the device can be bent. By including the connecting pipe in this way, it is possible to configure a flow control device in which both ends of the flow path are open in directions that do not face each other, and the devices are arranged in a straight line. It is possible to configure a flow control device that does not have.

Examples of connecting pipes include flexible resin tubing such as urethane tubing, silicone tubing and nylon tubing, as well as metal pipes such as stainless steel.

10 to 12 are diagrams schematically showing the tenth to twelfth examples of the configuration in the flow control device of the present embodiment, respectively. In each of the tenth to twelfth examples, the flow path includes a bendable connecting pipe connecting the two devices, and the connecting pipe forms the above-mentioned bent portion.

As shown in FIG. 10, the flow rate control device of the tenth example has a flow path 10, a flow rate adjusting unit 20, and a flow rate sensor unit 30. The flow rate adjusting unit 20 and the flow rate sensor unit 30 are connected by a flexible flexible connecting pipe 15.

As shown in FIG. 11, the flow rate control device of the eleventh example includes a flow path 10, a pressure adjusting unit 40, a flow rate adjusting unit 20, and a flow rate sensor unit 30. The pressure adjusting unit 40 and the flow rate adjusting unit 20, and the flow rate adjusting unit 20 and the flow rate sensor unit 30 are all connected by a connecting pipe 15.

As shown in FIG. 12, the flow rate control device of the twelfth example has a flow path 10, a pressure adjusting unit 40, a flow rate sensor unit 30, and a flow rate adjusting unit 20. The pressure adjusting unit 40 and the flow rate sensor unit 30, and the flow rate sensor unit 30 and the flow rate adjusting unit 20 are all connected by a connecting pipe 15.

In each of the tenth to twelfth examples, the devices are connected to each other by a connecting pipe, and the orientation of the devices can be freely set. Therefore, these examples are suitable for, for example, a flow rate control device arranged in a space having a relatively complicated shape. Alternatively, these examples are suitable for application to, for example, a device in which the location of the flow control device is not fixed.

As described above, the flow rate control device of the present embodiment can change the arrangement of the connected devices in various ways, and can change the planar shape of the flow rate control device accordingly. Therefore, it is possible to configure the flow rate control device in a shape that can be accommodated in the place where the flow rate control device is arranged. As described above, the flow rate control device of the present embodiment can realize space saving by various arrangements of the devices. Therefore, the flow rate control device of the present embodiment can be configured as a small flow rate control device by using a small device, can be made smaller, and has a higher degree of freedom in design. It can be realized.

[Explanation of more specific configuration]
Hereinafter, the configuration of the flow rate control device of this embodiment will be described more specifically.

[Outline of configuration]
FIG. 13 is a diagram schematically showing the configuration of the flow rate control device according to the embodiment of the present invention. FIG. 14 is a diagram schematically showing a cross section of the flow rate control device of FIG. 13 cut along the line AA. As shown in FIG. 13, the flow rate control device 1 includes a flow rate adjusting unit 2, a flow rate sensor unit 3, a pressure adjusting unit 4, a connecting unit 5, a control board 6, and a cover 7.

The longitudinal direction of the flow control device 1 is the X direction, the lateral direction is the Y direction, and the height direction is the Z direction. The X direction is the same as the connection direction between the pressure adjusting unit 4 and the flow rate adjusting unit 2. The Y direction is the direction in which the pressure adjusting unit 4 or the flow rate adjusting unit 2 and the flow rate sensor unit 3 are arranged. The Z direction is a direction orthogonal to both the X direction and the Y direction.

The flow rate control device 1 has the structure shown in FIG. 2, and the pressure adjustment unit 4, the flow rate adjustment unit 2, the connection unit 5, and the flow rate sensor unit 3 are connected in this order from the upstream side in the flow direction of the fluid. Has been done. The pressure adjusting unit 4, the flow rate adjusting unit 2, and the connecting unit 5 are arranged in this order from one end side in the X direction. The pressure adjusting unit 4, the flow rate adjusting unit 2, the flow rate sensor unit 3, and the control board 6 are arranged in this order from one end side in the Y direction. The connecting unit 5 is arranged on the other end side of the flow rate adjusting unit 2 and the flow rate sensor unit 3 in the X direction. The control board 6 is arranged adjacent to the flow rate sensor unit 3 on the other end side in the Y direction. The cover 7 is a component that integrally covers the unit, the sensor, and the control board 6.

The pressure adjusting unit 4 has a pressure adjusting valve. A pressure regulating valve is a valve that regulates the pressure of a fluid to a desired pressure, for example, a pressure reducing valve that reduces the pressure of a fluid having a sufficiently high pressure to a specific pressure. Further, the pressure adjusting unit 4 has a flow path that opens to a pair of side portions facing each other in the X direction, extends along the X direction, and connects the outside of the pressure adjusting unit 4 and the pressure adjusting valve. There is. The opening 43 is one of the side openings in the flow path of the pressure adjusting unit.

The flow rate adjusting unit 2 has a flow rate adjusting valve. The flow rate adjusting valve is a valve that controls the opening degree of the flow path according to a signal from the control board 6 according to the detected value of the flow rate in the flow rate sensor unit 3, and is, for example, an opening of the flow path according to the signal. It is a proportional adjustment valve that can change the degree continuously. Further, the flow rate adjusting unit 2 has a flow path that opens to a pair of side portions facing each other in the X direction, extends along the X direction, and connects the outside of the flow rate adjusting unit 2 and the flow rate adjusting valve. There is. Further, the opening on the upstream side of the flow path of the flow rate adjusting unit 2 faces and is connected to the opening on the downstream side of the flow path of the pressure adjusting unit 4.

The connecting unit 5 has a flow path that is connected to the flow path of the flow rate adjusting unit 2. Further, the connecting unit 5 is configured to be integrally fixable to the flow rate adjusting unit 2 and the pressure adjusting unit 4 by a screw inserted from the connecting unit 5 side. Further, the connecting unit 5 is configured to connect the flow path to the flow rate sensor unit 3 and fix the flow rate sensor unit 3 to the connecting unit 5. The connecting unit 5 will be described later.

The flow rate sensor unit 3 has a flow rate sensor. The flow rate sensor is a device that detects the flow rate of the fluid in the flow path, and is, for example, a mass flow rate sensor that detects the mass flow rate of the fluid. The flow rate sensor unit 3 has a flow path for flowing a fluid through the fluid sensor, and female threads are formed at both ends of the flow path, and male threads corresponding to the female threads can be screwed. The opening 31 is an opening on the downstream side in the flow path of the flow sensor unit 3. The flow rate sensor unit 3 is fixed to the connecting unit 5 by a connecting screw 57 so that fluid can flow.

The control board 6 generates and transmits a signal for controlling the opening degree of the flow rate adjusting valve according to a signal corresponding to a flow rate set value input from the outside and a signal detected by the flow rate sensor in the flow rate sensor unit 3. ..

The cover 7 has a substantially rectangular parallelepiped outer shape. The cover 7 has a notch on one side surface thereof, and the notch has an opening 43 of the flow path on the upstream side of the pressure adjusting unit 4 and an opening 31 on the downstream side of the flow sensor unit 3. positioned. These openings are open to the outside as both ends of the fluid flow path in the flow control device 1.

[Connecting unit]
FIG. 15 is a diagram schematically showing a configuration of a connecting unit according to an embodiment of the present invention. FIG. 16 is a diagram for explaining the structure of the flow path in the connecting unit according to the embodiment of the present invention. As shown in FIGS. 15 and 16, the connecting unit 5 has a connecting portion 51 and a supporting portion 52, and has a substantially L-shaped shape when viewed in a plan view. The support portion 52 is the other end of the connecting portion 51 in the Y direction and is a substantially quadrangular prism-shaped portion extending from the lower portion of the connecting portion 51 in the Z direction, and corresponds to a long side portion in a substantially L shape. ..

The connecting portion 51 is a rectangular plate-shaped portion whose longitudinal direction is the Y direction, and stands upright in the Z direction. The connecting portion 51 corresponds to a portion of a short side in a substantially L-shape. The connecting portion 51 has a first connecting port 53, a second connecting hole 54, a third connecting hole 55, and a through hole 59.

The first connecting port 53 is a hole that opens at one end of the connecting portion 51 in the X direction and at one end in the Y direction, and is formed so as to be connectable to a flow path that opens on the downstream side of the flow rate adjusting unit 2. There is. The second connecting hole 54 is a hole that opens at one end surface of the connecting portion 51 in the Y direction and extends along the Y direction. The third connecting hole 55 is a hole extending along the X direction at the other end of the connecting portion 51 in the Y direction and at the upper portion in the Z direction. The through hole 59 is a hole extending along the X direction in the connecting portion 51, and a screw connecting the connecting unit 5, the flow rate adjusting unit 2, and the pressure adjusting unit 4 is inserted.

The second connecting hole 54 is connected to the first connecting port 53 and is open to the inner peripheral wall of the third connecting hole 55. The flow path from the opening in the second connecting hole 54 to the connecting portion with the first connecting port 53 is sealed by a pin 56 inserted from the opening (see FIG. 13). A connecting screw 57 is inserted through the third connecting hole 55.

[Connecting screw]
FIG. 17 is a diagram schematically showing the configuration of a connecting screw according to an embodiment of the present invention. As shown in FIG. 17, the connecting screw 57 has a substantially cylindrical large-diameter portion 571 and a threaded portion 572 connected thereto along the axial direction thereof.

As shown in FIGS. 17 and 14, the large diameter portion 571 includes a disk portion 573, a groove portion 574, a first flange portion 575, a second flange portion 576, a third flange portion 577, a first communication hole 578, and the like. It has a second communication hole 579. The threaded portion 572 is a substantially cylindrical portion having a diameter smaller than that of the large diameter portion 571. At the tip of the outer peripheral surface of the threaded portion 572, a screw to be screwed into the female screw at the end of the flow path of the flow sensor unit 3 is formed.

In the large-diameter portion 571, the disk portion 573 is a disk-shaped portion arranged at one end of the large-diameter portion 571. The groove portion 574 is a linear groove formed on the surface of the disk portion 573. The first flange portion 575, the second flange portion 576, and the third flange portion 577 are all protrusions protruding from the outer peripheral surface of the large diameter portion 571. The position of the first flange portion 575 in the axial direction of the connecting screw 57 is a position where the O-ring 58 can be arranged between the disk portion 573 and the first flange portion 575. Similarly, the positions of the second flange portion 576 and the third flange portion 577 in the axial direction of the connecting screw 57 are positions where the O-ring 58 can be arranged between these flange portions.

A first series of through holes 578 is opened between the first flange portion 575 and the second flange portion 576 in the axial direction of the connecting screw 57. The first series through hole 578 is a through hole extending in a direction orthogonal to the axial direction of the connecting screw 57 at a portion between the first flange portion 575 and the second flange portion 576 in the large diameter portion 571. The second communication hole 579 is a hole that opens in the tip surface of the screw portion 572 and extends from the tip surface to the first series hole 578 along the axial direction of the connecting screw 57.

The flow rate control device 1 appropriately has a structure for connecting each unit such as a recess, a through hole, and a boss to each other, in addition to the main configuration described above.

[Assembly method]
The pressure adjusting unit 4, the flow rate adjusting unit 2, and the connecting unit 5 are connected in this order while connecting the flow paths to each other. The connecting portion of the flow path is configured with a known configuration of pipe connection, a sealing member such as an O-ring is appropriately arranged, and the flow path is airtightly connected. The pressure adjusting unit 4, the flow rate adjusting unit 2, and the connecting unit 5 are fixed to each other in a connected state by a screw inserted from the through hole 59.

On the other hand, the O-ring 58 is fitted between the disk portion 573 and the first flange portion 575 and between the second flange portion 576 and the third flange portion 577 of the connecting screw 57. With the flow rate sensor unit 3 mounted on the support portion 52 of the connecting unit 5, the connecting screw 57 is inserted into the third connecting hole 55 of the connecting unit 5. By pressing a flat-blade screwdriver against the groove portion 574 and rotating the connecting screw 57, the screw portion 572 and the flow path end portion of the flow rate sensor unit 3 are screwed together. In this way, the connecting unit 5 and the flow rate sensor unit 3 are fixed to each other in a state where the flow paths are connected to each other.

The O-ring 58 is in close contact with the inner peripheral surface of the third connecting hole 55 in a state where the threaded portion 572 is screwed into the opening of the flow path of the flow sensor unit 3. Further, the portion of the large diameter portion 571 of the connecting screw 57 between the first flange portion 575 and the second flange portion 576 has a gap with respect to the inner peripheral surface of the third connecting hole 55, and the second flange portion 55 has a gap. It faces the opening of the two connecting holes 54. The gap is airtightly separated by an O-ring 58. Further, the second communication hole 579 is airtightly connected to the flow path of the flow rate sensor unit 3 by screwing the threaded portion 572 and the flow rate sensor unit 3. In this way, the connecting unit 5 is formed with an airtight flow path that connects the flow path of the flow rate adjusting unit 2 and the flow path of the flow rate sensor unit 3.

After the pressure adjusting unit 4, the flow rate adjusting unit 2, the connecting unit 5, and the flow rate sensor unit 3 are integrally fixed as described above, the control board 6 and the cover 7 are appropriately arranged.

[Flow control]
The control board 6 transmits a control signal for controlling the opening degree of the flow rate adjusting valve in the flow rate adjusting unit 2. A signal of the detection value of the flow rate sensor in the flow rate sensor unit 3 is supplied to the control board 6, and the control board 6 transmits a signal corresponding to the opening degree of the flow rate control valve corresponding to the signal to the flow rate control valve. Therefore, the flow rate of the fluid supplied to the flow rate control device 1 through the opening 43 is controlled by the flow rate control device 1 to a desired mass flow rate, and is discharged from the opening 31 at a desired flow rate. The fluid is used in the subsequent stage at a mass flow rate controlled by the flow control device.

[Advantageous effect]
The flow rate control device 1 can have a shorter length in the X direction as compared with the case where the units and the sensors are connected in a row. Further, the lateral dimension of the flow rate sensor unit 3 is usually longer than that of the pressure adjusting unit and the flow rate adjusting unit. Therefore, by connecting the pressure adjusting unit and the flow rate adjusting unit and installing them in the flow rate sensor unit 3, it is possible to install the pressure adjusting unit and the flow rate adjusting unit in a space having a shorter length in the longitudinal direction (X direction). As described above, the flow rate control device 1 can be made smaller and can realize a flow rate control device having a higher degree of freedom in design. Therefore, the flow rate control device 1 is small and can be arranged at a desired position.

[Other embodiments relating to connection]
In the embodiment of the present invention, the connection between the connection unit and the flow rate sensor can be appropriately set according to the structure of the flow path end portion of the flow rate sensor. FIG. 18 is a partial cross-sectional view schematically showing the configuration of the flow rate control device according to another embodiment of the present invention. FIG. 18 includes a cross section when the flow control device of the present embodiment is cut by a line such as the line AA shown in FIG.

As shown in FIG. 18, the flow rate control device 11 of the present embodiment includes a pressure adjusting unit 4, a flow rate adjusting unit 2, a connecting unit 150, and a flow rate sensor unit 130. The pressure adjusting unit 4 and the flow rate adjusting unit 2 are the same as those of the flow rate control device 1 described above.

The connecting unit 150 has the same configuration as the above-mentioned connecting unit 5 except that it has a third connecting port 155 instead of the third connecting hole 55 and does not have a support portion 52. The connecting unit 150 is a rectangular plate-shaped component extending in the YZ direction, and has a third connecting port 155 that is a surface on one end side in the X direction and opens at the other end in the Y direction. The through hole 159 is configured in the same manner as the above-mentioned through hole 59 except that the opening has a taper.

The third connecting port 155 is a bottomed hole, and the second connecting hole 154 is opened on the inner peripheral surface thereof. The second connecting hole 154 is a hole that communicates the outside, the first connecting port, and the third connecting port 155, and the flow path from the external opening to the first connecting port is sealed by a pin (not shown). A recess into which an O-ring 158 can be fitted is provided around the open end edge of the third connecting port 155.

The flow rate sensor unit 130 has a flow rate sensor 131 and a fixed block 132 for fixing the flow rate sensor 131. The flow rate sensor unit 130 is configured in the same manner as the flow rate sensor unit 3 except that the other end of the flow path is a bamboo shoot joint 133. The bamboo shoot joint 133 has a tapered shape whose outer diameter gradually decreases toward the tip.

An O-ring 158 is attached to the recess in the opening of the third connecting port 155, and the bamboo shoot joint 133 is inserted into the third connecting port 155. The outer peripheral surface of the bamboo shoot joint 133 is in close contact with the O-ring 158. In this way, the connecting unit 150 and the flow rate sensor unit 130 are fixed to each other with their flow paths connected to each other.

The third connecting port 155 is hermetically closed to the outside by the bamboo shoot joint 133 and the O-ring 158. On the other hand, a gap is formed between the bottom portion of the third connecting port 155 and the tip portion of the outer peripheral surface of the bamboo shoot joint 133. Therefore, the second connecting hole 154 is connected to the bamboo shoot joint 133 via the third connecting port 155 so that the fluid can flow. In this way, the connecting unit 150 is formed with an airtight flow path that connects the flow path of the flow rate adjusting unit 2 and the flow path of the flow rate sensor unit 130.

The flow rate control device 11 is compact and is arranged at a desired position, similarly to the flow rate control device 1, because the connection unit 150 has a configuration corresponding to the structure of the open end of the flow path in the flow rate sensor unit 130. be able to.

[Use]
Any flow rate control device according to the present embodiment is effective when there are restrictions on the spatial shape of the installation location. For example, in the flow rate control device of the present embodiment, since the device (master unit) on which the flow rate control device is mounted is small for portable applications, the conventional slender and sufficiently high space is created. It is effective when it does not exist. Alternatively, the flow control device of the present embodiment is also effective when the fluid flow path cannot be connected to both ends of such a space. Alternatively, the flow rate control device of the present embodiment is also effective when it is not possible to form an installation space having a sufficient area and shape in the master unit to additionally install the flow rate control device due to the modification of the master unit.

The flow rate control device according to the present embodiment can be applied to control the flow rate of either liquid or gas. Further, the flow rate control device according to the present embodiment can be applied to the control of the flow rate of any fluid within the range in which the accuracy required for the control of the flow rate of the fluid can be controlled. For example, the flow rate control device according to the present embodiment can be applied to a concentrated oxygen supply device in medical treatment such as home oxygen therapy. In addition, the flow rate control device according to the present embodiment can be applied to industrial fields such as semiconductor manufacturing, chemical manufacturing, and factory automation. The control value of the fluid flow rate in the flow rate control device of the present embodiment can be appropriately determined according to the application of the flow rate control device or its master unit.

[Modification example]
The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims. The technical scope of the present invention also includes embodiments obtained by appropriately combining the technical means disclosed in the different embodiments.

For example, even if a plurality of through holes are formed on the surface of the pressure adjustment unit or the flow rate adjustment unit and communicate with the pressure adjustment valve or the flow rate adjustment valve, and any two of them are sealed with pins as described above. good. With such a configuration, it is possible to form a bent portion in the flow rate adjusting unit and the pressure adjusting unit. Further, by connecting the block having a plurality of through holes intersecting each other to the flow rate sensor, it is possible to form a bent portion in the flow rate sensor unit as well. Further, by using the above-mentioned block instead of the above-mentioned connecting unit, it is possible to introduce a bent portion that bends the flow path by 90 ° between the above-mentioned units.

Further, by connecting to the unit with a flexible pipe, it is possible to configure a flow rate control device in which the arrangement of the units can be freely adjusted.

〔summary〕
The flow rate control device (1, 11) according to the embodiment of the present invention has a device for controlling the flow rate and a flow path (10) for connecting the device and allowing fluid to flow through the device. The above-mentioned device includes a flow rate adjusting valve for adjusting the flow rate of the fluid flowing through the flow path and a flow rate sensor for detecting the flow rate of the fluid flowing through the flow path, and both ends of the flow path are back to each other. It opens in the direction that it does not face. Therefore, the flow rate control device can be installed in a space other than an elongated space having flow paths facing the fluid at both ends. Therefore, the flow rate control device can be miniaturized and the degree of freedom in design can be further increased.

In the flow control device according to the embodiment of the present invention, the flow path is bent so that the fluid flows at the other end of the flow path in a direction different from the flow direction of the fluid at one end of the flow path between both ends. The bent portion (B) may be included. It is more effective that the flow path includes a bent portion from the viewpoint of increasing the degree of freedom in arranging the equipment in the flow control device.

In the flow control device according to the embodiment of the present invention, the bent portion may be located between at least any two of the devices. The location of the bent portion between the devices is even more effective from the viewpoint of increasing the degree of freedom in arranging the devices in the flow control device.

The flow rate control device according to the embodiment of the present invention further has a connecting unit (5, 150) that is interposed in the flow path and constitutes a part of the flow path, and the connecting unit may include a bent portion. It is more effective that the flow rate control device further has a connecting unit including a bent portion from the viewpoint of increasing the degree of freedom in arranging the equipment in the flow rate control device.

Alternatively, the flow rate control device according to the embodiment of the present invention has a device for controlling the flow rate and a flow path for connecting the device and allowing fluid to flow through the device. The device includes a flow rate adjusting valve for adjusting the flow rate of the fluid flowing through the flow path and a flow rate sensor for detecting the flow rate of the fluid flowing through the flow path, and the flow path is a bendable connecting pipe ( 15) is included. Therefore, the flow rate control device can appropriately set the arrangement of the equipment according to the shape of the space to be installed. Therefore, the flow rate control device can be miniaturized and the degree of freedom in design can be further increased.

In the flow control device according to the embodiment of the present invention, the device may further include a pressure regulating valve for adjusting the pressure of the fluid flowing through the flow path. The inclusion of additional pressure control valves in the equipment is even more effective in terms of improving the accuracy of the fluid flow rate.

In the flow control device according to the embodiment of the present invention, the connecting pipe may be located between at least any two of the devices. The location of the connecting pipe between the devices is even more effective from the viewpoint of increasing the degree of freedom in arranging the devices in the flow control device.

In the flow rate control device according to the embodiment of the present invention, the flow rate sensor may detect the mass flow rate of the fluid. The fact that the flow rate sensor is a mass flow rate sensor is even more effective from the viewpoint of improving the accuracy of the flow rate of the fluid.

1, 11 Flow control device 2, 20 Flow adjustment unit 3, 30, 130 Flow sensor unit 4 Pressure adjustment unit 5, 150 Connection unit 6 Control board 7 Cover 10 Flow path 15 Connection pipe 31, 43 Opening 40 Pressure adjustment unit 51 Connection part 52 Support part 53 First connection port 54, 154 Second connection hole 55 Third connection hole 56 Pin 58, 158 O-ring 59, 159 Through hole 131 Flow sensor 132 Fixed block 133 Takenoko joint 155 Third connection port 571 diameter Large part 57 2 Thread part 573 Disk part 574 Groove part 575 First flange part 576 Second flange part 575 Third flange part 578 First series through hole 579 Second communication hole B Bending part

Claims (9)

A flow rate control device having a device for controlling a flow rate and a flow path for connecting the device and allowing a fluid to flow through the device.
The device includes a flow rate adjusting valve for adjusting the flow rate of the fluid flowing through the flow path and a flow rate sensor for detecting the flow rate of the fluid flowing through the flow path.
A flow control device in which both ends of the flow path are open so as not to face each other. The flow rate control device according to claim 1, wherein the device further includes a pressure adjusting valve for adjusting the pressure of a fluid flowing through the flow path. The flow path includes a bend between both ends that bends the flow path so that fluid flows at the other end of the flow path in a direction different from the flow direction of the fluid at one end of the flow path. The flow control device according to claim 1 or 2. The flow rate control device according to claim 3, wherein the bent portion is located between at least any two of the devices. Further having a connecting unit that is interposed in the flow path and constitutes a part of the flow path.
The flow rate control device according to claim 4, wherein the connecting unit includes the bent portion. A flow rate control device having a device for controlling a flow rate and a flow path for connecting the device and allowing a fluid to flow through the device.
The device includes a flow rate adjusting valve for adjusting the flow rate of the fluid flowing through the flow path and a flow rate sensor for detecting the flow rate of the fluid flowing through the flow path.
The flow path is a flow control device including a bendable connecting pipe. The flow rate control device according to claim 6, wherein the device further includes a pressure adjusting valve for adjusting the pressure of a fluid flowing through the flow path. The flow control device according to claim 6 or 7, wherein the connecting pipe is located between at least any two of the devices. The flow rate control device according to any one of claims 1 to 8, wherein the flow rate sensor detects the mass flow rate of the fluid.

Images