JP7461013B2 - Conveyor Mechanism - Google Patents

Description

The present invention relates to a transport mechanism that is arranged, for example, in a vacuum-atmosphere replacement chamber.

A transport mechanism for loading and unloading workpieces into and out of the vacuum chamber is placed in a vacuum-atmosphere exchange chamber also called a load-lock chamber. The vacuum-atmosphere exchange chamber is set to atmospheric pressure and the first valve is opened to communicate with the atmosphere, allowing workpieces to be carried in and out between the vacuum-atmosphere exchange chamber and the outside. After the vacuum-atmosphere exchange chamber is evacuated, the second valve is opened to communicate with the vacuum chamber, and workpieces are carried in and out between the vacuum-atmosphere exchange chamber and the vacuum chamber.

The transport mechanism that transports the workpiece between the vacuum chamber and the outside is placed inside the vacuum-atmosphere replacement chamber. The vacuum-atmosphere replacement chamber is evacuated, so it is necessary to reduce its volume. The transport mechanism must have a mechanism for moving the workpiece forward and backward, and a rotation mechanism for changing the direction of the mechanism. In order to place this transport mechanism inside the vacuum-atmosphere replacement chamber, it is necessary to reduce the rotation radius of the mechanism. For this reason, the transport mechanism used in this type of transport mechanism is composed of an articulated robot with a small rotation radius, such as a frog-leg type robot (Patent Document 1).

JP 2017-196732 A

However, because articulated robots have multiple joints that are motor-controlled, their structure and control are complex, and high prices are unavoidable.

An object of the present invention is to provide a transport mechanism that has a simpler structure than an articulated robot and can reduce the maximum rotation radius of a forward/backward mechanism for moving a workpiece forward and backward.

(1) One aspect of the present invention is
A forward/backward mechanism for driving the workpiece forward/backward;
a rotation mechanism that rotates the advance/retract mechanism about a vertical axis within a range of a maximum rotation radius;
having
The advance/retract mechanism includes:
An advance/retract arm that holds a workpiece and moves it forward and backward within a horizontal plane;
A drive unit for the reciprocating arm;
having
The retractable arm includes a long member having a plurality of links connected by pins,
Each of the plurality of links includes a rotation stopper;
a straight portion of the reciprocating arm is formed and maintained by the contact between the rotation stoppers of each of two adjacent links among the plurality of links;
The drive unit is
an advance/retract drive unit that drives the straight portion of the advance/retract arm forward and backward;
a deformation drive unit that applies an external force to one of the plurality of links of the elongated member passing through a first retracted position when the advancing/retracting arm retracts, thereby releasing the contact between the rotation stoppers of each of the two links, thereby forming a non-linear portion in the elongated member and deforming the elongated member so as to fit within the maximum rotation radius;
The present invention relates to a conveying mechanism including:

According to one aspect of the present invention, the orientation of the advance/retract mechanism, which includes an advance/retract arm that holds a workpiece, can be changed by rotating the rotation mechanism. A straight section of the long member that constitutes the advance/retract arm is formed and maintained by the contact between the rotation stoppers of each of two adjacent links, and the workpiece can be transferred by moving the straight section forward and backward. When the advance/retract arm retracts, the deformation drive unit applies an external force to each of the multiple links of the long member that pass through the first retract position, releasing the contact between the rotation stoppers of each of the two adjacent links, thereby deforming the long member so that it fits within the maximum rotation radius. This makes it possible to reduce the maximum rotation radius of the advance/retract mechanism without using an articulated robot, and maintains the compactness of the transport mechanism.

(2) In one aspect (1) of the present invention, the reciprocating arm includes a first elongated member having a plurality of first links connected by pins, and a second elongate member having a plurality of second links connected by pins; In the linear portion of the reciprocating arm, the first elongated member and the second elongated member are vertically stacked and coupled in that order, and each of the plurality of first links is rotated in a first rotation. each of the plurality of second links includes a second rotation stopper, and the contact between the first rotation stoppers of each of two adjacent first links among the plurality of first links causes the second rotation stopper to rotate. Each of the two first links is restricted from rotating so that the tangential direction of rotation around the pin is vertically downward, and the second rotation stoppers of each of two adjacent second links among the plurality of second links are in contact with each other. Accordingly, each of the two second links is restricted from rotating so that the rotation tangential direction around the pin is vertically upward, and the deformation drive section includes a first deformation drive section, and the first deformation drive section is configured to When the advancing/retracting arm retreats, the contact between the first rotation stoppers of each of the two first links of the first elongated member passing through the first retreating position is released by the external force, and the two first rotation stoppers are released from each other by the external force. One of the first links is separated from the corresponding second link, and the corresponding second link separated from one of the two first links hangs down due to its own weight, so that the second elongated member is within the maximum rotation radius. It may be deformed to fit. When the reciprocating arm has a laminated structure in which the first and second elongated members are stacked above and below, the strength of the retracting arm is increased. As a result, bending and bending in directions perpendicular to the advance/retreat direction (up-down direction and left-right direction) are suppressed.

(3) In one aspect (2) of the present invention, each of the first links of the first long member includes a first magnet, and each of the second links of the second long member includes a magnetic body. In this way, each of the second links is magnetically coupled to the corresponding first link, and the second link located in the straight portion of the second long member is restricted from rotating in a manner that the tangent direction of rotation around the pin is vertically downward. In this way, the first and second long members of the upper and lower laminated structure can be connected to each other by magnetic coupling. Note that the coupling between the first and second long members is not limited to magnetic force, and may be other external forces such as electrostatic force, or may be mechanically coupled by fitting of concaves and convexes. In short, it is sufficient that the coupling between the first and second long members is maintained in the straight portion, and this coupling can be released by the first deformation drive unit.

(4) In one aspect of the present invention (3), the first deformation drive unit includes a rotor that rotates around a horizontal axis and a plurality of second magnets arranged along the circumferential direction of the rotor, and the external force can be a magnetic force. When the first deformation drive unit applies a magnetic force as an external force to the first link, the first link is deformed so as to wrap around the rotor, and the magnetic coupling with the corresponding second link is released. In this way, the first and second long members are deformed so as to remain within the maximum radius.

(5) In aspects (2) to (4) of the present invention, the deformation drive section may further include a second deformation drive section. The second deformation driving section is one of the plurality of links of the first elongated member passing through a second retraction position upstream of the first deformation driving section in the retraction direction of the first elongated member. The first elongated member can be deformed within the allowable height and within the maximum rotation radius by applying an external force to the first elongated member. In this way, the first elongated member is deformed so as to stay within the allowable height range and at the maximum rotation radius, and the compactness of the transport mechanism is maintained in the height direction as well.

FIG. 1 is a schematic diagram of a multi-chamber vacuum processing apparatus. FIG. 1 is a schematic diagram of a single-chamber vacuum processing apparatus. FIG. 2 is a schematic diagram of a transport mechanism including a rotation mechanism and a forward/backward movement mechanism. FIG. 2 is a schematic front view of an advancing/retracting mechanism according to an embodiment of the present invention. 5 is a plan view of straight portions of the first and second elongated members shown in FIG. 4. FIG. 5 is a partially enlarged view showing the first and second elongated members shown in FIG. 4. FIG. This is a cross-sectional view taken along the line XX in FIG. 4. 5 is a view taken along the arrows Z-Z in FIG. 4. 9 is an enlarged view of part A in FIG. 8. FIG.

The following disclosure provides many different embodiments and examples for implementing different features of the presented subject matter. Of course, these are just examples and are not intended to be limiting. Additionally, this disclosure may repeat reference numbers and/or characters in various instances. Such repetition is for brevity and clarity and does not itself require a relationship between the various embodiments and/or configurations described. Further, when a first element is described as being "connected" or "coupled" to a second element, such statements mean that the first element and the second element are directly connected to each other. and embodiments in which the first element and the second element are indirectly connected or connected to each other with one or more other elements interposed between them. Also includes form. Also, when it is described that a first element "moves" with respect to a second element, such a description means that at least one of the first element and the second element moves relative to the other. including embodiments of movement.

1. Vacuum Processing Apparatus First, a vacuum processing apparatus in which the transfer mechanism of the present invention is preferably used will be outlined. FIG. 1 shows a multi-chamber type vacuum processing apparatus, and FIG. 2 shows a single-chamber type vacuum processing apparatus. In FIG. 1, a load lock chamber 1A is connected to a plurality of vacuum chambers, for example, three vacuum chambers 3A to 3C, which are connected via three gate valves 2A to 2C. The load lock chamber 1A is connected to the atmosphere by opening a gate valve 2D. In FIG. 2, the load lock chamber 1B is connected to a vacuum chamber 3, which is connected via a gate valve 4. The load lock chamber 1B is connected to the atmosphere by opening a gate valve 4B.

The transport mechanism of the present invention is arranged in the load lock chamber 1A in FIG. 1 and the load lock chamber 1B in FIG. 2. The transport mechanism opens the gate valves 2D and 4B to transport the workpieces into the load lock chambers 1A and 1B. After the load lock chambers 1A and 1B, which can be replaced with air and vacuum, are evacuated, one of the gate valves 2A to 2C or the gate valve 4A is opened, and the workpiece is transferred to one of the vacuum chambers 3A to 3C or the vacuum by the transfer mechanism. It is carried into chamber 3. In FIG. 1, a workpiece that has been processed in a vacuum chamber 3A is sequentially transferred to vacuum chambers 3B and 3C by a transfer mechanism, and all processing is completed. After all the processing has been completed, the workpiece is transported outside by a transport mechanism through the load lock chambers 1A and 1B, which are replaced with vacuum and atmosphere.

2. Transport Mechanism FIG. 3 is a schematic diagram of a transport mechanism arranged in the load lock chamber 1A of FIG. 1 or the load lock chamber 1B of FIG. 2. The transport mechanism 5 includes a rotation mechanism 10 and a forward/backward movement mechanism 100. The rotation mechanism 10 rotates the advancing/retracting mechanism 100 around the vertical axis within the maximum rotation radius R _MAX within the load lock chamber 1A or 1B. The transport mechanism 5 can include a lifting mechanism (not shown) that lifts and lowers the advancing/retracting mechanism 100 in order to transfer the workpiece.

Figure 4 is a schematic front view of the advance/retract mechanism 100. In Figure 4, the advance/retract mechanism 100 includes an advance/retract arm 110 that holds a workpiece and moves it forward and backward in a horizontal plane, and a drive unit 200 that drives the advance/retract arm 110. In Figure 4, the advance/retract arm 110 is driven forward in the left direction and driven backward in the right direction. An attachment unit 111 for a holder that holds the workpiece can be provided at the tip of the advance/retract arm 110 in the forward direction.

2.1. Long member (first and second long member)
In this embodiment, the reciprocating arm 110 includes, for example, a first elongated member 120 and a second elongated member 130 as elongated members. The first elongated member 120 is pin-coupled by connecting a plurality of first links 121 with pins 122 . Similarly, the second elongated member 130 is pin-coupled by connecting a plurality of second links 131 with pins 132. Details of the first and second elongate members 120, 130 will be explained with reference also to FIGS. 5 to 7. As shown in FIGS. 5 to 7, the first elongated member 120 has a first rotation stopper 123 between a pair of first links 121, 121 arranged with a gap between them. As shown in FIG. 7, the pair of first links 121, 121 and the first rotation stopper 123 are connected by a connecting shaft portion 124 inserted into each hole formed therein. For example, a C ring 125 or the like is attached to both ends of the connecting shaft portion 124 to prevent it from coming off. As shown in FIG. 6, the first rotation stoppers 123 of two adjacent first links 121 among the plurality of first links 121 have their first rotation stopper surfaces 123A, which are end surfaces parallel to the vertical axis, in contact with each other. do. Due to the contact between the first rotation stopper surfaces 123A, the rotation R1 of each of the two adjacent first links 121 around the pin 122 is restricted so that the direction of the rotation tangent Z1 shown in FIG. 6 is vertically downward. In this way, a straight portion 120A is formed in the first elongated member 120 as shown in FIG. 4 by the plurality of first links 121 in which the first rotation stopper surfaces 123A are in contact with each other. The first link 121 has a chamfered portion 123B that continues to the first rotation stopper surface 123A. A gap is formed between the chamfered portions 123B of two adjacent first links 121. Thereby, the two adjacent first links 121 are allowed to rotate R2 in which the direction of the rotation tangent Z2 shown in FIG. 6 is vertically upward.

Similarly, as shown in Figs. 5 to 7, the second long member 130 has a second rotation stopper 133 between a pair of second links 131, 131 arranged with a gap between them. As shown in Fig. 7, the pair of second links 131, 131 and the second rotation stopper 133 are connected by a connecting shaft portion 134 inserted into each hole formed in them. For example, a C-ring 135 or the like is attached to both ends of the connecting shaft portion 134 to prevent it from coming off. The second rotation stoppers 133 of two adjacent second links 131 among the plurality of second links 131 contact each other at the second rotation stopper surfaces 133A, which are end surfaces parallel to the vertical axis, as shown in Fig. 6. Due to the contact between the second rotation stopper surfaces 133A, the rotation R2 of each of the two adjacent second links 131 around the pin 132 is restricted so that the direction of the rotation tangent Z2 shown in Fig. 6 is vertically upward. The second link 131 has a chamfered portion 133B that continues from the second rotation stopper surface 133A. A gap is formed between the chamfered portions 133B of two adjacent second links 131. This allows the two adjacent second links 131 to rotate R1 such that the direction of the rotation tangent Z1 shown in FIG. 6 is vertically downward.

As shown in FIG. 7, a first magnetic body 126 is disposed between a pair of first links 121, 121, and the first magnetic body 126 is supported, for example, by being sandwiched between the pair of first links 121, 121. Similarly, a second magnetic body 136 is disposed between a pair of second links 131, 131, and the second magnetic body 136 is supported, for example, by being sandwiched between the pair of second links 131, 131. The first magnetic body 126 and the second magnetic body 136 are in a magnetically attracted relationship, and at least one of them is a magnet. In this embodiment, the first magnetic body 126 is made of a permanent magnet. The first and second rotation stoppers 123, 133 can be made of a non-magnetic material.

In this embodiment, the pair of first links 121, 121 and the pair of second links 131, 131 are formed of a magnetic material. As a result, as shown in FIG. 7, a closed loop of magnetic lines of force is formed between the first magnetic body 126 and the second magnetic body 136 via a pair of first links 121, 121 and a pair of second links 131, 131. G1 is formed. In this way, the second elongated member 130 also has a linear portion 130A formed in a region magnetically coupled to the linear portion 120A of the first elongated member 120 (see FIG. 4). The linear portion 130A of the second elongated member 130 is magnetically coupled to the linear portion 120A of the first elongated member 120, so that each of the two adjacent second links 131 is connected around the pin 132 as shown in FIG. This is because the rotation R1 in which the rotation tangent Z1 direction shown is vertically downward is restricted.

2.2. Driving section In this embodiment, the driving section 200 of the advancing/retreating arm 110 includes an advancing/retreating driving section 210 and a first deformation driving section 220, and may include a second deformation driving section 230 as necessary. As shown in FIG. 8, the driving section 200 has support plates 201, 201, for example, on both sides of the advancing/retreating passage of the advancing/retreating arm 110. Between these support plates 201, 201, the advancing/retreating driving section 210 and the first deformation driving section 220 are provided, and the second deformation driving section 230 may be provided as necessary. Note that, between the support plates 201, 201, as shown in FIG. 4, a pair of upper and lower guide rollers 203-206 may be provided as guide sections for guiding the straight portions 120A, 130A of the advancing/retreating arm 110.

2.2.1. As shown in FIGS. 4 and 8, the forward and backward drive unit 210 is, for example, a sprocket that has a plurality of sprocket teeth 213 on the periphery of a pair of first rotating bodies 212 that rotate around a first horizontal axis 211. configured. As shown in FIGS. 5 and 8, the pin 132 of the second elongated member 130 projects further outward than the pair of second links 131. As shown in FIGS. The sprocket teeth 213 of the forward/backward drive unit 210 come into contact with, for example, the pin 132 of the second elongated member 130 . The pair of first rotating bodies 212 are reversibly rotated and rotate the pin 132 of the second elongated member 130 in forward and reverse directions, thereby driving the forward and backward arm 110 forward and backward. Note that the advance/retreat drive unit 210 may be configured to rotate and feed the pin 122 of the first elongated member 120.

2.2.2. First deformation drive unit As shown in FIGS. 4 and 8, the first deformation drive unit 220 is arranged between a pair of second rotating bodies 222 that rotate around a second horizontal axis 221, for example, at equal intervals in the circumferential direction. A plurality of magnets (second magnets) 223 are provided at intervals. In this embodiment, the pair of second rotating bodies 222 are made of a magnetic material. As a result, as shown in FIG. A closed loop G2 of lines of magnetic force is formed through the first links 121, 121 and the pair of second rotating bodies 222. The closed loop G2 of lines of magnetic force shown in FIG. 9 is formed to be strong enough to overcome the closed loop G1 of lines of magnetic force shown in FIG.

4, the first deformation driving unit 220 releases the contact between the first rotation stoppers 123 of each of the two adjacent first links 121, 121 of the first elongated member 120 passing through the first retracted position P1 by an external force (magnetic force), thereby forming a non-linear portion 120B in the first elongated member 120 along the second rotating body 222. As a result, the first elongated member 120 is deformed so as to fall within the maximum rotation radius R _MAX shown in FIG.

When a magnetic force is applied from the first deformation drive unit 220 to the first link 121, which is one of the two adjacent first links 121 and is downstream in the backward direction, the first link 121 is pulled away from the corresponding second link 131 that was magnetically attracted to the first link 121. As a result, the corresponding second link 131 is rotated by its own weight in the direction of rotation R1 having a rotation tangent Z1 that is directed vertically downward as shown in Fig. 6 and hangs down. In this way, the second elongated member 130 is also deformed so as to fall within the maximum rotation radius R _MAX shown in Fig. 3.

2.2.3. Second deformation driving unit As shown in Fig. 4, the second deformation driving unit 230 has a plurality of magnets (third magnets) 233 at equal intervals in the circumferential direction between a pair of third rotating bodies 232 rotating around a third horizontal shaft 231, for example, in the same manner as the first deformation driving unit 220. In this embodiment, the pair of third rotating bodies 232 is formed of a magnetic material. As a result, a closed loop of magnetic lines is formed between the third magnet 233 between the pair of third rotating bodies 232 and the first magnetic body (first magnet) 126 of the first elongated member 120 via the pair of first links 121, 121 and the pair of second rotating bodies 222, similar to Fig. 9.

As a result, when the retractable arm 110 is driven to retract in the upward direction in Fig. 4, the second deformation driving unit 230 can release the contact between the first rotation stoppers 123 of the two adjacent first links 121, 121 of the first elongated member 120 passing through the second retract position P2 by an external force (magnetic force), and can deform the first elongated member 120 to face the left side in Fig. 4 along the third rotor 232. As a result, the first elongated member 120 is deformed so as to be within the maximum rotation radius R _MAX shown in Fig. 3 and within the allowable height of the load lock chambers 1A, 1B. Note that an additional deformation driving unit may be further provided to deform and drive the second elongated member 130 deformed to face downward in Fig. 4 in a similar manner.

When the reciprocating arm 110 has a laminated structure in which the first and second elongated members 120 and 130 are stacked above and below, the strength of the retracting arm 110 is increased. As a result, bending and bending in directions perpendicular to the advance/retreat direction (up-down direction and left-right direction) are suppressed. However, the advancing/retracting arm 110 may be constructed of the elongated member 120 as long as the required strength is ensured. This is because the elongated member 120 can form the straight portion 120A by contacting the rotation stoppers 123 of two adjacent first links 121 without requiring the second elongated member 130. In this case, the deformation drive unit 220 applies an external force to each one of the plurality of links 121 of the elongated member 120 passing through the first retraction position P1 when the advancing/retracting arm 110 (120) retreats, and By releasing the contact between the rotation stoppers 123 of each of the two links 121, the elongated member 120 is deformed so as to fall within the maximum rotation radius _RMAX .

Reference Signs List 1A, 1B...load lock chamber, 5...transport mechanism, 10...rotation mechanism, 100...advance/retract mechanism, 110...advance/retract arm, 120...first long member, 120A...straight portion, 120B...non-straight portion, 121...first link, 122...pin, 123...first rotation stopper, 123A...first stopper surface, 124...connecting shaft portion, 125...C-ring, 126...first magnetic body (first magnet), 130...second long member, 130A...straight portion, 130B...non-straight portion, 131...second link, 132...pin, 133...second Rotation stopper, 133A...second stopper surface, 134...connecting shaft portion, 135...C-ring, 136...second magnetic body, 200...driving portion, 210...advance/retreat driving portion, 211...first horizontal shaft, 212...first rotating body, 213...sprocket teeth, 220...first deformation driving portion, 221...second horizontal shaft, 222...second rotating body, 223...second magnet, 230...second deformation driving portion, 231...third horizontal shaft, 232...third rotating body, 233...third magnet, G1, G2...closed loop of magnetic field lines, P1...first retracted position, P2...second retracted position, R _MAX ...maximum rotation radius

Claims (2)

A forward/backward mechanism for driving the workpiece forward/backward;
a rotation mechanism that rotates the advance/retract mechanism about a vertical axis within a range of a maximum rotation radius;
having
The advance/retract mechanism includes:
A reciprocating arm for holding the workpiece;
A drive unit for the reciprocating arm;
having
the reciprocating arm includes a long member having a first long member to which a plurality of first links are pin-connected , and a second long member to which a plurality of second links are pin-connected ,
Each of the plurality of first links includes a first rotation stopper and a first magnetic body ,
Each of the plurality of second links includes a second rotation stopper and a second magnetic body,
At least one of the first and second magnetic bodies is a first magnet;
contact between the first rotation stoppers of each of two adjacent links among the plurality of first links restricts each of the two first links from rotating in a vertically downward direction around the pin, and contact between the second rotation stoppers of each of two adjacent second links among the plurality of second links restricts each of the two second links from rotating in a vertically upward direction around the pin, so that a straight portion of the advancing/retracting arm is formed and maintained, and in the straight portion of the advancing/retracting arm, the first elongated member and the second elongated member are stacked one on top of the other in that order, and each of the plurality of second links is magnetically coupled to a corresponding first link, and in the second elongated member, the second link located in the straight portion is restricted from rotating in a vertically downward direction around the pin,
The drive unit is
an advance/retract drive unit that drives the advance/retract arm;
a first deformation drive unit that applies an external force to one of the plurality of first links of the first elongated member passing through a first retracted position when the advancing/retracting arm retracts, thereby releasing the contact between the first rotation stoppers of the two first links, thereby separating one of the two first links from the corresponding second link, thereby forming a non-linear portion in the elongated member, and deforming the first elongated member so as to be within the maximum rotation radius;
Including,
the second link that is separated from one of the two first links hangs down due to its own weight, whereby the second elongated member is deformed so as to be within the maximum turning radius;
A conveying mechanism in which the first deformation drive unit includes a rotating body that rotates around a horizontal axis and a plurality of second magnets arranged along the circumferential direction of the rotating body, and the external force is a magnetic force . In claim 1 ,
A conveying mechanism further including a second deformation drive unit, wherein the second deformation drive unit applies an external force to one of the multiple links of the first long member passing through a second retraction position downstream of the first deformation drive unit in the retraction direction of the first long member, thereby deforming the first long member so that it is within an allowable height and within the maximum turning radius.

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