JP7449262B2 - fan filter unit - Google Patents

Description

The present invention relates to a fan filter unit installed in a clean room or the like.

In a clean room, multiple air supply fan filter units (hereinafter also referred to as FFU: Fan Filter Unit) are placed on the ceiling to blow clean air into the clean room and keep the room clean. . Additionally, an exhaust FFU may be placed on the ceiling and used to exhaust indoor air. The present invention is directed to an exhaust FFU.

Patent Document 1 states, ``A fan filter unit that can be used as an air supply type or an exhaust type is provided.The fan filter unit includes a fan filter unit main body and an installation part for installing the fan filter unit at an installation location. The fan filter unit main body includes a casing, a fan, a filter, an intake section that takes in air, and an exhaust section that exhausts air. ” (see abstract).

Japanese Patent Application Publication No. 2017-161130

When an FFU installed on the ceiling is used to exhaust indoor air, there is a concern that dust adhering to the suction surface may fall into the room when the FFU is stopped.

Patent Document 1 discloses a fan filter unit that can be used as an air supply type or an exhaust type by rotating the fan filter unit that includes a fan and a filter, but it is difficult to prevent dust attached to the suction surface from falling into the room. Prevention is not considered.

SUMMARY OF THE INVENTION An object of the present invention is to provide a fan filter unit that prevents dust attached to a suction surface from falling into a room in an exhaust FFU installed on a ceiling.

An example of the "fan filter unit" of the present invention for solving the above problems is as follows:
An exhaust fan filter unit that is mounted on a ceiling and includes a fan and a filter,
A dust fall prevention means is provided below the filter to prevent dust attached to the filter from falling when the operation is stopped , and the dust fall prevention means includes two punching plates having openings that are relatively movable. When the operation is stopped, the openings of the two punching plates are arranged alternately and the suction port is closed to prevent dust from falling, and when the operation is stopped, the openings of the two punching plates are moved to a position where they overlap, and the suction port is closed. It is characterized by an open mouth to allow air to pass through .

According to the present invention, by providing the dust fall prevention structure, it is possible to provide a fan filter unit that prevents dust attached to the suction surface of the filter from falling into the room.

Problems, configurations, and effects other than those described above will be made clear by the description of the embodiments below.

It is a schematic diagram of a general clean room. 1 is a schematic diagram of a clean room to which the FFU of the present invention is applied. 1 is a schematic configuration diagram of an FFU of Example 1. FIG. FIG. 3 is a layout diagram of two punching plates when the FFU is stopped. FIG. 3 is a layout diagram of two punching plates during operation of the FFU. FIG. 2 is a schematic configuration diagram of an FFU according to a second embodiment. FIG. 3 is a schematic configuration diagram of an FFU according to a third embodiment. FIG. 3 is a schematic configuration diagram of an FFU according to a fourth embodiment. FIG. 3 is a schematic configuration diagram of an FFU of Example 5. FIG. 6 is a schematic configuration diagram of an FFU of Example 6. FIG. 7 is a schematic configuration diagram of an FFU of Example 7. FIG. 8 is a schematic configuration diagram of an FFU of Example 8. FIG. 7 is a schematic configuration diagram of an FFU of Example 9. FIG. 3 is a schematic configuration diagram of an FFU of Example 10.

Prior to explaining the embodiments, a clean room will be explained. FIG. 1 is a schematic diagram of a typical clean room. In FIG. 1, an air supply FFU 2a is arranged on the ceiling of a clean room 1, takes in air from outside, and blows clean air into the clean room 1. In the figure, one FFU 2a is shown, but normally, a plurality of FFUs 2a are arranged on the ceiling of a clean room.

FIG. 2 shows a schematic diagram of a clean room to which the FFU of the present invention is applied. In addition to the air supply FFU 2a, an exhaust FFU 2b is arranged on the ceiling of the clean room 1, and during exhaust, the air inside the clean room is taken in, dust and the like are removed, and the purified air is discharged outside. The FFU of the present invention is placed on the ceiling as shown in FIG. 2, and is applied when indoor air is exhausted to the outside.

Embodiments of the present invention will be described below with reference to the drawings. However, the present invention should not be construed as being limited to the contents described in the Examples shown below. Those skilled in the art will readily understand that the specific configuration can be changed without departing from the spirit or gist of the present invention.
In addition, in each figure for explaining an example, the same name and code|symbol are attached to the same component, and the repeated description is abbreviate|omitted.

FIG. 3 is a schematic diagram of the exhaust FFU 2b of the first embodiment. The figure shows the state when the FFU 2b is stopped. A filter 4 is attached to the fan 3 on the clean room side. Below the filter 4, on the indoor side of the clean room, there is provided dust fall prevention means, which is a feature of the present invention. The dust fall prevention means of this embodiment has a structure in which two punching plates are attached to the lower side of the filter 4. The punching plate is provided with a large number of openings consisting of, for example, round holes. A secondary punching plate 6 is provided so as to be slidable relative to the primary punching plate 5. The secondary punching plate 6 is pulled to the left in the figure by a spring 8. Further, a duct 7 extending from the fan 3 to the side surface of the secondary punching plate 6 is provided.

When the FFU is stopped, the secondary punching plate 6 is pulled leftward by the spring 8, and as shown in FIG. 4A, the openings 21 of the primary punching plate 5 and the openings 21 of the secondary punching 6 are alternated. and the suction port is closed.

When the FFU is in operation, the fan 3 rotates and the wind pressure from the duct 7 presses the side surface of the secondary punching plate 6 to the right. Then, as shown in FIG. 4B, the secondary punching plate 6 is moved to a position where the openings 21 of the two punching plates overlap to open the suction port. At this time, for example, a stopper may be provided on the primary punching plate 5, and the structure may be such that the holes match at the positions where the secondary punching plate 6 collides with the primary punching plate 5. When the FFU operates, the fan 3 rotates to exhaust the air inside the clean room to the outside. At this time, dust in the clean room adheres to the lower surface of the filter 4.

After the operation of the FFU is completed, the secondary punching plate 6 is returned to the initial position by the spring 8, and as shown in FIG. 4A, the suction port is closed to prevent dust from falling into the room.

If the FFU is continued to be used, dust and the like will accumulate on the punching plate, but this can be cleaned when the filter 4 is replaced.

According to this embodiment, in the exhaust FFU, two movable punching plates are arranged below the filter, and the suction ports of the punching plates are blocked when the operation is stopped. Dust attached to the room can be prevented from falling into the room.

FIG. 5 shows the exhaust FFU 2b of the second embodiment.

As shown in the figure, in the FFU of Example 1, a balloon 9 is placed at the air outlet of the duct 7. The other structure is similar to the FFU of the first embodiment. By providing the balloon, air leakage is reduced and the side surface of the secondary punching plate 6 can be pressed favorably.

FIG. 6 shows the exhaust FFU 2b of the third embodiment.

As shown in the figure, in the FFU of Example 1, a cylinder and a piston 10 that moves within the cylinder are provided on the air outlet side of the duct 7, and the piston 10 is configured to press the secondary punching plate 6. The other structure is the same as that of the FFU of the first embodiment. By providing the piston 10 that moves within the cylinder, air leakage is reduced and the secondary punching plate 6 can be pressed favorably.

FIG. 7 shows the exhaust FFU 2b of the fourth embodiment.

As shown in the figure, in the FFU of Example 1, a rail 11 is provided between the primary punching plate 5 and the secondary punching plate 6, and the secondary punching plate 6 is configured to move on the rail. do. The other structure is the same as that of the FFU of the first embodiment. By providing the rails 11, movement of the secondary punching plate 6 can be facilitated.

FIG. 8 shows an exhaust FFU 2b of Example 5.

Instead of providing the duct 7 and moving the secondary punching plate 6 using wind pressure as in the first embodiment, an electric cylinder 12 is provided. The other structure is similar to the FFU of the first embodiment. By using the electric cylinder 12, the secondary punching plate 6 can be moved at high speed and can be electrically controlled.

FIG. 9 shows an exhaust FFU 2b of Example 6.

As shown in the figure, in the FFU of Example 1, a dustproof mat 13 is attached to the upper part of the secondary punching plate 6, and is configured to attract dust. The other structure is similar to the FFU of the first embodiment. In the figure, the dustproof mat 13 is attached only to the secondary punching plate 6, but the dustproof mat 13 may also be attached to the primary punching plate 5. By attaching the dustproof mat 13 to the punching plate and adsorbing dust, it is possible to reliably prevent dust from falling.

FIG. 10 shows an exhaust FFU 2b of Example 7.

As shown in the figure, in the FFU of Example 1, upward protrusions are provided at the peripheries of the openings 21 of the primary punching plate 5 and the secondary punching plate 6, so that dust on the punching plates can be removed from the openings 21. Make it difficult to fall. The other structure is similar to the FFU of the first embodiment.

According to this embodiment, by providing an upward protrusion on the periphery of the opening of the punching plate, it is possible to reliably prevent dust from falling on the punching plate. Further, the contact area between the primary punching plate 5 and the secondary punching plate 6 becomes smaller, and the resistance is reduced, so that the movement of the secondary punching plate becomes easier.

FIG. 11 shows an exhaust FFU 2b of Example 8.

As shown in the figure, the eighth embodiment has a structure in which the opening and closing movement of the punching plate is eliminated compared to the first embodiment. The primary punching plate 5 and the secondary punching plate 6 are arranged vertically apart from each other by a spacer 23, and the openings of the primary punching plate 5 and the openings of the secondary punching plate 6 are arranged alternately. This prevents dust from falling directly when the FFU is stopped.

According to this embodiment, when the FFU stops operating, the dust adhering to the filter 4 falls due to gravity, but since the openings of the two punching plates are arranged alternately, the dust falls directly into the room. It is possible to prevent dust from falling with a simple structure.

FIG. 12 shows an exhaust FFU 2b of Example 9.

As shown in the figure, in the FFU of Example 8, a dustproof mat 13 is attached to the upper part of the primary punching plate 5 and the secondary punching plate 6, and is configured to attract dust. The other structure is the same as the FFU of Example 8. By attaching the dustproof mat 13 to the punching plates 5 and 6 and adsorbing dust, it is possible to reliably prevent dust from falling.

FIG. 13 shows the exhaust FFU 2b of Example 10.

As shown in the figure, this embodiment has a structure in which a high voltage power supply 14 and a charging electrode 15 are arranged to charge dust and attract it to the secondary punching plate 6. By applying a high voltage to the charging electrode 15 and discharging it when the FFU is stopped, ions are generated and dust is charged. When the charged dust approaches the secondary punching plate 6, which is a grounded metal body, electrostatic induction occurs, and the dust adheres to the secondary punching plate 6. The primary punching plate 5 is insulated to prevent electric shock to the user. Examples of insulation methods include insulation coating and rubber packing.

According to this embodiment, it is possible to prevent dust from falling with a simple structure without using a means for moving the punching plate as in the first embodiment.

Note that the present invention is not limited to the above-described embodiments, and includes various modifications. For example, the embodiments described above are described in detail to explain the present invention in an easy-to-understand manner, and the present invention is not necessarily limited to having all the configurations described. Furthermore, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Further, it is possible to add, delete, or replace a part of the configuration of each embodiment with other configurations.

1 Clean room 2a General fan filter unit 2b Fan filter unit (FFU) of the present invention
3 Fan 4 Filter 5 Primary side punching plate 6 Secondary side punching plate 7 Duct 8 Spring 9 Balloon 10 Cylinder and piston 11 Rail 12 Electric cylinder 13 Dustproof mat 14 High voltage power supply 15 Charging electrode 21 Opening 22 Upward protrusion 23 Spacer

Claims (8)

An exhaust fan filter unit that is mounted on a ceiling and includes a fan and a filter,
Provided below the filter is a dust fall prevention means for preventing dust attached to the filter from falling when the operation is stopped ;
The dust fall prevention means is
Two punching plates each having an opening are movable relative to each other,
When the operation is stopped, the openings of the two punching plates are arranged alternately and the suction port is closed to prevent dust from falling.
A fan filter unit characterized in that during operation, the openings of two punched plates are moved to a position where they overlap, opening the suction port and allowing air to pass through . The fan filter unit according to claim 1 ,
A fan filter unit characterized in that a duct is provided leading from the fan to the punching plate, and the punching plate is moved by wind pressure to close and open the suction port. The fan filter unit according to claim 2 ,
A fan filter unit characterized in that a balloon is disposed at the tip of the duct, and the balloon is used to push out the punching plate. The fan filter unit according to claim 2 ,
A fan filter unit characterized in that a cylinder and a piston are arranged at the tip of the duct, and the piston is used to push out the punching plate. The fan filter unit according to claim 1 ,
A fan filter unit characterized in that an electric cylinder is attached to the punching plate, and the electric cylinder is used to move the punching plate. The fan filter unit according to any one of claims 1 to 5 ,
A fan filter unit characterized in that a rail is provided in the movement mechanism of the punching plate. The fan filter unit according to any one of claims 1 to 5 ,
A fan filter unit characterized in that a dustproof mat is attached to the upper part of the punching plate, and the dustproof mat absorbs falling dust. The fan filter unit according to any one of claims 1 to 5 ,
A fan filter unit characterized in that an upwardly extending protrusion is provided on the periphery of the opening of the punching plate.

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