CN105188245A - Static eliminator - Google Patents

Abstract

The invention provides a static eliminator which comprises a spray point, a housing, an air-blowing fan, a rotary device, a dust-removal fan and a power supply device, wherein the spray point discharges through corona to enable air to be subjected to ionization to generate ionized gas; a plurality of small holes for allowing ionized gas to pass through are formed in the front end face of the housing; the air-blowing fan is positioned at the back part of the housing and used for generating air flow to enable the ionized gas to flow out of the housing; the rotary device is used for enabling a rotating arm mounted on the rotary device to rotate so as to enable brushes arranged at the tail ends of the rotating arm to clean dust on the spray point; the dust-removal fan is positioned at the back part of the housing and used for generating air flow to discharge dust, generated when the brushes clean the spray point, out of the housing; the power supply device is used for supplying electricity to the spray point, the air-blowing fan and the dust-removal fan. The static eliminator not only can clean the spray point automatically, but also can uniformly release ionized gas to eliminate static electricity.

Description

Static eliminator

technical field

The invention belongs to the field of static elimination, and in particular relates to a static eliminator.

Background technique

In the field of electronic component manufacturing, static electricity is often formed on the surface of electronic components due to contact and friction, and the formed static electricity will attract fine particles such as dust, making them adsorb on the surface of electronic components and pollute them . However, many processes require high cleanliness, such as semiconductor processing processes such as lithography and etching. In addition, when static electricity accumulates to a certain amount, electrostatic discharge will occur and damage electronic components. Therefore, it is necessary to eliminate static electricity for electronic components.

As is well known in the industry, the use of static eliminators to eliminate static electricity has become the main way to eliminate static electricity. The static eliminator mainly generates corona discharge by applying high voltage to the discharge needle, and then ionizes the surrounding air to obtain ionized gas. The ionized gas contacts the static electricity on the surface of the electronic components, thereby neutralizing the static electricity.

However, when the discharge needle produces corona discharge, dust and other impurities are often attracted to the tip of the discharge needle, which gradually reduces the efficiency of eliminating static electricity. Therefore, the user needs to remove the discharge needle regularly to remove the dust on it. Complicated and troublesome, it brings great inconvenience to the use of the static eliminator.

In addition, in the current static eliminator, since the ionized gas is directly sprayed from the nozzle to the surface of the electronic component, uneven gas flow velocity and uneven distribution of ions are generated between the position with the nozzle and the position without the nozzle. Equal, so that the process of eliminating static electricity of electronic components is difficult to carry out uniformly.

Contents of the invention

The object of the present invention is to overcome the above-mentioned shortcomings in the prior art, and provide a static eliminator that can not only automatically clean the discharge needle, but also release ionized gas uniformly to eliminate static electricity.

The technical solution of the present invention is to provide a static eliminator, comprising: a discharge needle, which ionizes the air to generate ionized gas through corona discharge; A fan, located at the rear of the casing, is used to generate an air flow to allow the ionized gas to flow to the outside of the casing; a rotating device is used to rotate the rotating arm installed on the rotating device, so that the rotating arm installed on the rotating device The brush at the end of the arm cleans off the dust on the discharge needle; the dust removal fan is located at the rear of the casing, and is used to generate an air flow to discharge the dust generated by the brush cleaning the discharge needle to the outside of the casing; the power supply device, It is used to supply power to the discharge needle, blower fan and dust removal fan.

Preferably, there is a filter screen for filtering dust at the rear side of the blowing fan, and a filter for filtering dust and collecting dust at the front side of the dust removal fan.

Preferably, there are baffles for blocking the airflow on the outside of the blowing fan and the dust removal fan, and the baffles can be closed and opened according to the needs of blowing and dust removal.

Preferably, the discharge needles are uniformly arranged on a circle parallel to the front end of the casing, and the rotating device is located at the center of the circle.

Preferably, during the rotation of the brush, the discharge needle passes the axis of the corresponding brush.

Preferably, there is a certain space between the discharge needle and the front end of the casing, so that the ionized gas can diffuse uniformly in the space and then be released from the small hole.

Preferably, when the blowing fan is turned on, the airflow flows from the outside of the casing to the inside, and when the dust removal fan is turned on, the airflow flows from the inside of the casing to the outside.

Preferably, the discharge needle is mounted on a mounting bracket.

The working principle of the static eliminator of the present invention is: when it is necessary to eliminate static electricity, the power supply device applies a high voltage to the discharge needle, so that the discharge needle corona discharges, ionizes the air in the shell to obtain ionized gas, and the ionized The gas diffuses evenly in the casing, at the same time, the blower fan and its outer baffle are opened (the dust removal fan and its outer baffle are closed), and the airflow obtained by the blast blows the gas in the casing to the front end of the casing evenly , and then eliminate the static electricity on the surface of the object; when the discharge needle needs to be cleaned, the rotating device starts, and the rotation of the rotating arm drives the brush to brush the dust on the discharge needle and float it in the air. The plate is opened (the blower fan and the baffle on the outside are closed), so that the dust and thus the air sucked into the housing flow to the filter, the dust in the air is filtered out by the filter and collected, and the clean air flows through the filter to the exterior of the enclosure. In order to clean the dust on the discharge needle more cleanly, the rotating device first rotates several times in one direction, and then rotates several times in the opposite direction. In this way, two processes of eliminating static electricity and cleaning the discharge needle are realized.

Compared with the prior art, the beneficial effects of the present invention are as follows: (1) The static eliminator drives the brush to clean the dust on the discharge needle through the rotating device, eliminating the need to manually disassemble the discharge needle for cleaning on a regular basis. Simplifies the use procedure of the static eliminator, improves the automation level, and makes the use more convenient and more efficient; (2) After the ionized gas diffuses inside the shell, it is released from a large number of small holes on the front face of the shell, making the The ionized gas on the front face of the housing is evenly distributed, thereby removing static electricity evenly and effectively.

Description of drawings

FIG. 1 is a schematic cross-sectional view of static electricity elimination according to an embodiment of the present invention.

FIG. 2 is a schematic view of the front end according to an embodiment of the present invention.

Fig. 3 is a schematic cross-sectional view of cleaning a discharge needle according to an embodiment of the present invention.

FIG. 4 is a schematic diagram of a rotating device rotating clockwise according to an embodiment of the present invention.

Fig. 5 is a schematic diagram of a discharge needle installation frame according to an embodiment of the present invention.

In the figure: 1 discharge needle; 2 shell; 3 front end of shell; 4 small hole; 5 blast fan; 6 dust removal fan; 7 dust; 8 rotating device; 9 rotating arm; 10 brush; ; 13 filter; 14 blast fan baffle; 15 dust fan baffle; 16 mounting frame.

detailed description

The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

As shown in Figure 1, the static eliminator includes: a discharge needle 1, which ionizes the air to generate ionized gas through corona discharge; a casing 2, whose front surface 3 has a plurality of small holes 4 for the ionized gas to pass through; The fan 5 is located at the rear of the casing 2, and is used to generate air flow to allow the ionized gas to flow to the outside of the casing 2; the rotating device 8 is used to rotate the rotating arm 9 mounted on the rotating device 8, so that the setting The dust 7 on the discharge needle 1 is cleaned by the brush 10 at the end of the pivot arm 9; External: power supply device 11, used to supply power to discharge needle 1, blower fan 5 and dust removal fan 6.

There is a filter screen 12 for filtering dust on the rear side of the blower fan 5, and a filter 13 for filtering dust and collecting dust is arranged on the front side of the dust removal fan 6; there is a baffle plate 13 for blocking air flow on the outside of the blower fan 5, On the outside of dust removal fan 6, there is a baffle plate 14 for blocking air flow. When blowing, the blower fan baffle 14 is opened, and the dust removal fan baffle 15 is closed; when dust is removed, the dust removal fan baffle 15 is opened, and the blower fan The baffle 14 is closed; the discharge needles 1 are evenly arranged on a circle parallel to the front end surface 3 of the casing, and the rotating device 8 is located at the center of the circle; during the rotation of the brush 10, the discharge needle 1 passes through the corresponding brush 10 Axis; there is a certain space between the discharge needle 1 and the front end surface 2 of the shell, so that the ionized gas can diffuse evenly in this space and then be released from the small hole 4; when the blower fan 5 is turned on, the air flow is from the outside of the shell 2 to the inside Flow, when the dust removal fan 6 is turned on, the airflow flows from the inside of the casing 2 to the outside; the discharge needle 1 is installed on a mounting frame 16 .

As shown in Figures 1 and 2, when it is necessary to eliminate static electricity, the power supply device 11 applies a high voltage to the discharge needle 1, causing the discharge needle 1 to corona discharge, ionize the air in the casing 2 to obtain an ionized gas, and the ionized The gas diffuses evenly in the shell 2. At the same time, the blower fan 5 and its outer baffle 14 are opened (the dust removal fan 6 and its outer baffle 15 are closed), and the airflow obtained by the blast blows the gas in the shell 2 to The small holes 4 on the front surface of the shell are blown out evenly, thereby eliminating the static electricity on the surface of the object.

As shown in Figure 3 and Figure 4, when the discharge needle 1 needs to be cleaned to maintain the static eliminator, the rotating device 8 is activated, and the rotation of the rotating arm 9 drives the brush 10 to rotate clockwise to brush off the dust 7 on the discharge needle 1 Floating in the air, at the same time, the dust removal fan 6 and its outer baffle 15 are opened (the blower fan 5 and its outer baffle 14 are closed), so that the dust 7 and thus the air sucked into the housing 2 flows to the filter 13 , the dust 7 in the air is filtered by the filter 13 and collected, and the clean air flows to the outside of the housing 2 through the filter 13 .

As shown in FIG. 5 , the discharge needle 1 is installed on a mounting frame 16 , and the mounting frame 16 is composed of two rings and several skeletons in order to allow the air flow to pass through smoothly and reduce the weight of the static eliminator.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection of the present invention. within range.

Claims (8)

1. A static eliminator, characterized in that it comprises: Discharge needle, which ionizes the air by corona discharge to generate ionized gas; a housing having a plurality of apertures in its front face for the passage of ionized gas; A blower fan, located at the rear of the housing, is used to generate air flow to allow the ionized gas to flow to the outside of the housing; a rotating device, used to rotate the rotating arm installed on the rotating device, so that the brush arranged at the end of the rotating arm cleans off the dust on the discharge needle; The dust removal fan is located at the rear of the casing, and is used to generate airflow to discharge the dust generated by the brush cleaning the discharge needle to the outside of the casing; The power supply device is used for supplying power to the discharge needle, blower fan and dust removal fan. 2. The static eliminator according to claim 1, characterized in that, there is a filter screen for filtering dust at the rear side of the blower fan, and a filter screen for filtering dust and collecting dust is arranged at the front side of the dust removal fan. device. 3. Static eliminator according to claim 1 or 2, is characterized in that, all there is the baffle plate that is used to block air-flow on the outside of described blower fan and dedusting fan, and described baffle plate can be according to blast and dedusting Closing and opening as needed. 4 . The static eliminator according to claim 1 , wherein the discharge needles are uniformly arranged on a circle parallel to the front surface of the casing, and the rotating device is located at the center of the circle. 5. The static eliminator according to claim 1, characterized in that, during the rotation of the brush, the discharge needle passes the axis of the corresponding brush. 6. The static eliminator according to claim 1, 4 or 5, wherein there is a certain space between the discharge needle and the front end of the casing, so that the ionized gas can diffuse evenly in the space Release from the small hole again. 7. The static eliminator according to claim 1, 2 or 3, wherein when the blowing fan is turned on, the airflow flows from the outside of the housing to the inside, and when the dust removal fan is turned on, the airflow flows from the The inside of the shell flows to the outside. 8. The static eliminator according to claim 1 or 4 or 5 or 6, wherein the discharge needle is mounted on a mounting frame.