JP7445845B2 - Shape measuring machine and its control method - Google Patents

Description

The present invention relates to a shape measuring machine that measures the shape of an object to be measured using a contact, and a control method thereof.

2. Description of the Related Art Surface shape measuring machines (shape measuring machines) that measure surface shapes such as the contour shape and surface roughness of the surface of a workpiece (object to be measured) are known. In this type of surface profile measuring machine, the contact and the workpiece are moved relative to each other in the horizontal direction while the contactor is in contact with the workpiece surface. Displacement is detected by a displacement detector, and the surface shape of the workpiece surface is measured based on a displacement detection signal output from the displacement detector (see Patent Document 1).

Japanese Patent Application Publication No. 2017-161548

By the way, when measuring the surface shape of a workpiece using a surface shape measuring device, an abnormal waveform may occur in the displacement detection signal output from the displacement detector. In this case, it is difficult to determine whether this abnormal waveform is caused by the actual shape of the workpiece surface or by external environmental factors such as vibration.

Therefore, for example, it is conceivable to install the surface profile measuring device in a measurement room with a low vibration environment or on a vibration isolating table. However, when installing a surface profile measuring machine in a measurement room with a low-vibration environment, it requires a great deal of cost to install this measuring room, and furthermore, it is not possible to install the surface profile measuring machine at the workpiece processing site. There's a problem.

Furthermore, when the surface profile measuring device is installed on a vibration isolation table, if the vibration isolation table is of a so-called passive type, it is difficult to remove vibrations of low frequency components. Furthermore, if a so-called active type vibration isolation table is used, it is possible to remove vibrations of low frequency components, but there is a problem in that it requires a large amount of cost.

The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a shape measuring machine and a control method thereof that can easily detect the cause of an abnormality in shape measurement of an object to be measured.

A shape measuring machine for achieving the object of the present invention is a shape measuring machine that measures the shape of a measuring object using a contactor that comes into contact with the measuring object. A displacement detector that detects the displacement of a child, a relative movement mechanism that moves the displacement detector relative to the object to be measured and traces the surface of the object to be measured with a contact, and a displacement detector for the object to be measured. a position detection sensor that detects the relative position of and a synchronization control unit that repeatedly executes three operations in synchronization with each other, including displacement detection by the vibration detection unit and vibration detection by the vibration detection unit.

According to this shape measuring machine, by repeatedly performing three operations in synchronization with each other, the operator can check the vibration detection results obtained at a timing synchronized with the relative position for each relative position of the displacement detector. Can be done. That is, the operator can confirm the vibration detection results corresponding to any relative position.

In the shape measuring machine according to another aspect of the present invention, a synchronization control section outputs a synchronization signal for synchronizing three operations to a position detection sensor, a displacement detector, and a vibration detection section. Thereby, the three operations described above can be repeatedly executed in synchronization with each other.

In the shape measuring machine according to another aspect of the present invention, each time three operations are performed synchronously, the relative position detected by the position detection sensor, the displacement of the contact detected by the displacement detector, A storage control section is provided that stores the vibration displacement of the vibration detected by the vibration detection section in association with the vibration displacement in the storage section. Thereby, for each relative position of the displacement detector, the operator can confirm the vibration detection results obtained at a timing synchronized with the relative position.

A shape measuring machine according to another aspect of the present invention includes a first signal generation unit that generates a displacement detection signal indicating a displacement of a contactor for each relative position, and a vibration detection signal that generates a vibration detection signal that indicates a vibration displacement for each relative position. A second signal generation section. Thereby, by comparing the waveform of the displacement detection signal and the waveform of the vibration detection signal, it is possible to efficiently and easily detect the cause of abnormality in shape measurement.

In the shape measuring machine according to another aspect of the present invention, the vibration detection section is provided at a first position where vibrations of the displacement detector can be detected and a second position where vibrations of the object to be measured can be detected. The vibration meter is a vibration meter, and the second signal generating section generates a vibration detection signal corresponding to the displacement detector based on the vibration detection result for each relative position by the vibration meter at the first position, and A vibration detection signal corresponding to the object to be measured is generated based on the vibration detection results for each position. Thereby, the cause of abnormality in shape measurement can be efficiently and easily detected based on the displacement detector and the vibration detection signal corresponding to the object to be measured.

In the shape measuring machine according to another aspect of the present invention, the vibration detection section includes a vibration meter, a first vibration transmission characteristic from the vibration meter to the displacement detector, and a second vibration transmission characteristic from the vibration meter to the object to be measured. and a vibration transfer characteristic acquisition unit that acquires , and a vibration transfer characteristic acquisition unit for each relative position based on the vibration detection result for each relative position by the vibration meter and the first vibration transfer characteristic and second vibration transfer characteristic acquired by the vibration transfer characteristic acquisition unit. a vibration displacement estimating section that estimates the vibration displacement of the displacement detector of the displacement detector and the vibration displacement of the measurement target for each relative position, and the second signal generation section estimates the vibration displacement of the displacement detector of the displacement detector and the vibration displacement of the measurement target for each relative position. A vibration detection signal corresponding to the object to be measured and a vibration detection signal corresponding to the object to be measured are generated. As a result, it is not necessary to provide a plurality of vibration meters in the shape measuring machine, so that the cause of abnormality in shape measurement can be detected at low cost.

A shape measuring machine according to another aspect of the present invention includes a difference value calculation section that calculates a difference value between the vibration displacement of the displacement detector and the vibration displacement of the object to be measured for each relative position. This makes it possible to determine the influence of vibrations other than the vibrations of the displacement detector on the vibration detection signal corresponding to the displacement detector.

In the shape measuring machine according to another aspect of the present invention, a remeasurement apparatus that determines whether or not to perform remeasurement of retracing the surface to be measured with a contactor based on the calculation result of the difference value for each relative position by the difference value calculation section. It includes a measurement determination section and a first remeasurement control section that drives a relative movement mechanism to perform remeasurement when the remeasurement determination section determines to perform remeasurement. Thereby, a shape measurement result of the object to be measured can be obtained without being affected by vibrations other than those of the displacement detector.

In the shape measuring machine according to another aspect of the present invention, a display control unit displays on a monitor the displacement detection signal generated by the first signal generation unit, and specifies an arbitrary designated position of the displacement detection signal displayed on the monitor. An operation unit that accepts a designation operation, and a display control unit, refer to the storage unit and cause the monitor to display vibration displacement information indicating a vibration displacement corresponding to a designated position designated by the designation operation. This allows the operator to confirm the vibration displacement corresponding to the desired designated position.

In the shape measuring machine according to another aspect of the present invention, the display control section repeatedly refers to the storage section and updates the vibration displacement information displayed on the monitor every time the specified position is changed. This allows the operator to confirm the vibration displacement corresponding to the desired designated position. Further, when an abnormal waveform occurs in the displacement detection signal, the vibration displacement detected before and after the abnormal waveform can be confirmed, so that the cause of the abnormal waveform can be easily detected.

A shape measuring machine according to another aspect of the present invention includes a low-pass filter that performs low-pass filter processing on the displacement detection signal generated by the first signal generation section, and the display control section detects displacement before and after the low-pass filter processing. It has a superimposed display mode that displays the signal on the monitor. As a result, false shapes caused by external environmental factors such as foreign objects can be eliminated from the shape measurement results with higher accuracy, and the reliability and accuracy of the measurement results can be further improved.

In the shape measuring machine according to another aspect of the present invention, a first signal generation section generates a displacement detection signal indicating the displacement of the contact at each relative position, and a displacement detection signal is determined from the displacement detection signal generated by the first signal generation section. If the range of the relative position where the abnormal waveform is detected by the abnormal waveform detecting section and the abnormal waveform detecting section is set as the first range, the first range in the storage section is set as the first range. A first abnormality determination unit that determines whether or not there is an abnormality in shape measurement based on the corresponding vibration displacement. Thereby, it is possible to automatically determine whether there is an abnormality in shape measurement.

In the shape measuring machine according to another aspect of the present invention, the first abnormality determination unit determines whether the shape measurement is abnormal based on whether the amount of vibration displacement corresponding to the first range is larger than a predetermined threshold. Determine the presence or absence of. Thereby, it is possible to automatically determine whether there is an abnormality in shape measurement.

A shape measuring machine according to another aspect of the present invention includes a second remeasurement control section that drives the relative movement mechanism to perform remeasurement of retracing the surface to be measured with a contact, and the first abnormality determination section Each time it is determined that there is an abnormality, the second remeasurement control section executes remeasurement, the first signal generation section generates a displacement detection signal, and the abnormal waveform detection section detects an abnormal waveform, and A first abnormality determination unit determines whether or not there is an abnormality in shape measurement. This allows re-measurement when an abnormality occurs in shape measurement, making it easier to determine whether the abnormality is caused by the actual shape of the surface being measured or by external environmental factors (vibration, etc.). Can be accurately determined.

A shape measuring machine according to another aspect of the present invention includes a notification section that reports warning information when the number of remeasurements exceeds a predetermined certain number of times. This allows the operator to recognize the occurrence of an abnormality and quickly confirm the cause of the abnormality.

A shape measuring machine according to another aspect of the present invention includes a second abnormality determination section that determines whether or not there is an abnormality in shape measurement based on the vibration displacement for each relative position stored in the storage section. Thereby, it is possible to automatically determine whether there is an abnormality in shape measurement.

In the shape measuring machine according to another aspect of the present invention, the second abnormality determining section determines whether or not there is an abnormality in shape measurement based on whether the amount of vibration displacement becomes larger than a predetermined threshold. Thereby, it is possible to automatically determine whether there is an abnormality in shape measurement.

In the shape measuring machine according to another aspect of the present invention, there is provided a first signal generating section that generates a displacement detection signal indicating the displacement of the contact at each relative position; a display control unit for displaying a display, the display control unit detecting a second range indicating a range of relative positions corresponding to the vibration displacement determined to be abnormal by the second abnormality determination unit with reference to the storage unit; A waveform region corresponding to the second range is identifiably displayed on the monitor in the waveform of the displacement detection signal displayed on the monitor. This makes it possible to notify the operator of the position and range of the second range where the shape measurement abnormality has occurred.

A shape measuring machine according to another aspect of the present invention includes a notification section that notifies warning information when the second abnormality determination section determines that there is an abnormality. This allows the operator to recognize the occurrence of an abnormality and quickly confirm the cause of the abnormality.

In the shape measuring instrument according to another aspect of the present invention, the relative movement mechanism moves the displacement detector relative to the object to be measured in a linear direction perpendicular to the detector sensitivity direction.

In the shape measuring machine according to another aspect of the present invention, when the linear direction is the X direction among mutually perpendicular XYZ directions and the detector sensitivity direction is the Z direction, the displacement detector is parallel to the Y direction. It is equipped with an arm that is swingably supported around a swing fulcrum, a contact is provided at the tip of the arm, and a vibration detection unit is two vibration meters that detect the vibration of the displacement detector. In addition, there are two vibration meters installed at one end and the other end in the linear direction of the displacement detector, and the vibration is detected at a known interval between the two vibration meters and at each relative position of the two vibration meters. A posture detection section detects the posture around an axis parallel to the Y direction of the displacement detector for each relative position based on the detection results, and a posture detection section detects the posture around the axis parallel to the Y direction of the displacement detector for each relative position. and a displacement calculation section that calculates the displacement amount of the contactor in the Z direction in accordance with the attitude change of the displacement detector for each relative position based on the distance to the contactor. This makes it possible to determine the influence of the orientation of the displacement detector on the shape measurement results of the object to be measured. Furthermore, the influence of the orientation of the displacement detector can be removed from this shape measurement result.

In the shape measuring machine according to another aspect of the present invention, the relative movement mechanism rotates the measurement object and the displacement detector while the contactor is in contact with the circumferential surface of the columnar or cylindrical measurement object. Relative rotation around the center.

In the shape measuring machine according to another aspect of the present invention, the relative movement mechanism moves the displacement detector into a first attitude in which the detector sensitivity direction is perpendicular to the rotation center and a first attitude in which the detector sensitivity direction is perpendicular to the rotation center. has a detector holding part that selectively holds the sensor in a second attitude in which the displacement detector is parallel to the first attitude, and the vibration detection part detects the vibration of the displacement detector in the first attitude; a second vibrometer that detects vibrations of the detector, the first vibrometer operates when the displacement detector is in the first attitude, and when the displacement detector is in the second attitude; The second vibrometer is activated. Thereby, it is possible to support shape measurement in two types of postures.

In the shape measuring machine according to another aspect of the present invention, the rotation center is in the Z direction among mutually perpendicular XYZ directions, the detector sensitivity direction is in the X direction, and the peripheral surface is tapered or curved. , the vibration detection unit includes a first vibrometer that detects vibrations in the A displacement amount calculating section that calculates the amount of displacement of the contact in the X direction. Thereby, it is possible to determine the influence of vertical vibration on the X-direction vibration detection result detected by the first vibration meter. As a result, the cause of abnormality in shape measurement can be detected more accurately.

A method for controlling a shape measuring machine to achieve the object of the present invention includes: a contact that contacts an object to be measured; a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction; Shape measurement that measures the shape of the object using a contact, which includes a relative movement mechanism that moves a displacement detector relative to the object to be measured and traces the surface to be measured of the object with a contact. In the machine control method, a position detection step detects the relative position of the displacement detector with respect to the object to be measured, a displacement detection step detects the displacement of the contact by the displacement detector, and a vibration detects vibration in the detector sensitivity direction. A detection step, and three operations including detection of relative position in a position detection step, detection of displacement in a displacement detection step, and detection of vibration in a vibration detection step while relative movement is being performed by the relative movement mechanism. and a synchronization control step of synchronizing each other and repeatedly executing the steps.

According to the present invention, it is possible to easily detect the cause of an abnormality in shape measurement of a measurement target.

FIG. 1 is a schematic diagram of a surface profile measuring machine according to a first embodiment. FIG. 1 is a block diagram showing the configuration of a control device according to a first embodiment. FIG. 3 is a schematic diagram of saved data stored in a data storage by a storage control unit. FIG. 3 is an explanatory diagram showing an example of a displacement detection signal and a vibration detection signal displayed on a monitor by a display control unit. 2 is a flowchart showing the flow of processing for measuring the shape of the surface of a workpiece by a surface shape measuring device. It is a block diagram showing the composition of the control device of the surface shape measuring machine of a 2nd embodiment. FIG. 3 is an explanatory diagram for explaining calculation of a difference value and generation of a differential vibration detection signal by a difference value calculation section. It is a schematic diagram of a surface shape measuring machine of a 3rd embodiment. It is a block diagram showing the composition of the control device of the surface shape measuring machine of a 3rd embodiment. FIG. 3 is an explanatory diagram for explaining display of vibration displacement information on a monitor according to a specified operation. It is a block diagram showing the composition of the control device of the surface shape measuring machine of a 5th embodiment. FIG. 7 is an explanatory diagram for explaining the waveform of a displacement detection signal and vibration displacement information displayed on a monitor in the fifth embodiment. It is a block diagram showing the composition of the control device of the surface shape measuring machine of a 6th embodiment. FIG. 7 is an explanatory diagram for explaining first to third examples of abnormal waveform detection by the abnormal waveform detection unit. FIG. 7 is an explanatory diagram for explaining a process of determining the presence or absence of an abnormality in surface shape measurement by an abnormality determining unit. FIG. 12 is an explanatory diagram for explaining notification of warning information by a notification control unit according to a sixth embodiment. It is a flowchart which shows the flow of the re-measurement process and warning process by the surface profile measuring machine of 6th Embodiment. It is a block diagram showing the composition of the control device of the surface shape measuring machine of a 7th embodiment. FIG. 7 is an explanatory diagram for explaining an example of a displacement detection signal displayed on the monitor when the abnormality determination unit determines that there is an abnormality in surface shape measurement. FIG. 12 is an explanatory diagram for explaining notification of warning information by the notification control unit of the seventh embodiment. It is a block diagram showing the composition of the control device of the surface shape measuring machine of an 8th embodiment. It is an enlarged view of the displacement detector of the surface profile measuring machine of 8th Embodiment. FIG. 6 is an explanatory diagram for explaining detection of a detector attitude angle of a displacement detector by an attitude detection section and calculation of a displacement amount of a contactor by a displacement amount calculation section. It is a schematic diagram of the roundness measuring machine of a 9th embodiment. It is a schematic diagram of the roundness measuring machine of a 9th embodiment. It is a schematic diagram of the roundness measuring machine of a 10th embodiment. It is a block diagram showing a part of composition of a control device of a 10th embodiment. FIG. 6 is an explanatory diagram for explaining the taper angle acquired by the design information acquisition unit and the calculation of the displacement amount of the contact by the displacement amount calculation unit.

[First embodiment]
FIG. 1 is a schematic diagram of a surface profile measuring machine 10 according to a first embodiment, which corresponds to the profile measuring machine of the present invention. As shown in FIG. 1, the surface shape measuring machine 10 measures the shape of the surface Wa of the workpiece W, specifically, measures the contour shape, surface roughness, etc. Here, the work W corresponds to the object to be measured according to the present invention, and the surface Wa corresponds to the surface to be measured according to the present invention. Furthermore, among the mutually orthogonal XYZ directions in the figure, the XY plane including the XY directions is a plane parallel to the horizontal direction, and the Z direction is an up-down direction perpendicular to the horizontal direction. Note that the X direction corresponds to the linear direction of the present invention.

The surface shape measuring device 10 includes a flat measuring table 12, a column 14, a detector moving mechanism 16, a position detection sensor 18, a displacement detector 20, vibrometers 22A and 22B, and an operating section 25. It includes a monitor 27 and a control device 28.

A workpiece W is set on the upper surface of the measuring table 12 parallel to the XY plane. Further, a column 14 extending in the Z direction is provided on the upper surface of the measurement table 12. A detector moving mechanism 16 is attached to this column 14 so as to be movable in the Z direction.

The detector moving mechanism 16 corresponds to the relative moving mechanism of the present invention, and is a known actuator that holds the holder 17 movably in the X direction. By driving this detector moving mechanism 16, the displacement detector 20 (contact 34) can be moved relative to the workpiece W in the X direction. Further, the detector moving mechanism 16 is provided with a position detection sensor 18 .

The position detection sensor 18 includes a linear scale 18a that extends, for example, in the X direction (horizontal direction), and a reading head 18b that reads the linear scale 18a using various methods such as optical or magnetic. The position detection sensor 18 detects the displacement in the X direction (displacement direction and displacement amount) of the holder 17 moved in the X direction by the detector moving mechanism 16, thereby detecting the X direction position of the displacement detector 20, which will be described later. The relative position of the displacement detector 20 in the X direction with respect to the workpiece W is detected. Then, the position detection sensor 18 outputs the X-direction position detection result D1 of the displacement detector 20 to the control device 28. Note that as the position detection sensor 18, a known detector other than a scale type detector may be used.

The holder 17 is provided with a displacement detector 20 . Thereby, the displacement detector 20 is held movably in the X direction by the detector moving mechanism 16 via the holder 17. Further, the displacement detector 20 is held by the column 14 via the holder 17 and the detector moving mechanism 16 so as to be adjustable in position in the Z direction.

The displacement detector 20 includes a swing fulcrum 30, an arm 32, a contact 34, and a displacement detection sensor 36.

The swing fulcrum 30 swingably supports the arm 32 about a rotation axis (swing axis) parallel to the Y direction.

The arm 32 is swingably supported on a swing fulcrum 30, and has an arm tip 32a extending in one direction in the X direction (opposite to the column 14) and an arm tip 32a extending in the other direction in the X direction. An arm base end portion 32b.

A contactor 34 (also referred to as a stylus or measuring element) is provided on the distal end side of the arm distal end portion 32a. The contactor 34 contacts the surface Wa. The contact 34 is displaced in the Z direction as the arm 32 swings about the swing fulcrum 30 . Therefore, the detector sensitivity direction K1 of the displacement detector 20 of this embodiment is the Z direction. Further, the contactor 34 traces (scans) the surface Wa along the X direction as the displacement detector 20 is moved in the X direction by the detector moving mechanism 16.

The arm base end portion 32b is urged upward in the Z direction by a biasing member (not shown). As a result, the arm tip 32a and the contact 34 are urged downward in the Z direction about the swing fulcrum 30. Thereby, the state in which the contactor 34 is in contact with the surface Wa is maintained.

As the displacement detection sensor 36, for example, a linear variable differential transformer (LVDT) is used. In this case, although not shown, the displacement detection sensor 36 includes a core provided at the arm base end portion 32b and a coil into which the core is inserted. The displacement detection sensor 36 detects displacement in the Z direction (displacement direction and displacement amount) due to the swinging of the arm 32 and the contactor 34, and outputs a displacement detection result D2, which is the detection result of this displacement, to the control device 28. . Note that as the displacement detection sensor 36, a known sensor other than the LVDT (for example, a scale type sensor) may be used.

The vibration meters 22A and 22B correspond to the vibration detection section of the present invention, and have detection sensitivity in the Z direction. That is, the vibration meter sensitivity direction K2 of the vibration meters 22A, 22B coincides with the previously described detector sensitivity direction K1, and the vibration meters 22A, 22B detect vibrations in the Z direction. Note that the types of the vibrometers 22A and 22B are not particularly limited, and various known vibrometers may be used.

The vibration meter 22A is provided inside the displacement detector 20, that is, at a position where vibrations in the Z direction of the displacement detector 20 can be detected (corresponding to the first position of the present invention). This vibration meter 22A continuously detects the vibration of the displacement detector 20 in the Z direction, and sequentially outputs a vibration displacement V1 (vibration detection result) indicating the displacement of the vibration of the displacement detector 20 in the Z direction to the control device 28. . This makes it possible to confirm whether or not vibration has been applied to the displacement detector 20 from the outside, for example.

The vibration meter 22B is provided at a position near the workpiece W on the measurement table 12, that is, at a position where the vibration of the workpiece W on the measurement table 12 in the Z direction can be detected (corresponding to the second position of the present invention). This vibration meter 22B continuously detects the vibration of the workpiece W (measuring table 12) in the Z direction, and sequentially outputs vibration displacement V2 (vibration detection result) indicating the displacement of the vibration of the workpiece W in the Z direction to the control device 28. do.

The operation unit 25 uses, for example, a keyboard, a mouse, an operation panel, operation buttons, etc., and receives inputs of various operations from an operator.

As the monitor 27, various displays such as a known liquid crystal display are used. This monitor 27 receives a displacement detection signal D3 (described later) which is the shape measurement result of the surface Wa by the surface shape measuring device 10 (see FIG. 2), a displacement detector 20 during shape measurement, and a vibration described below which indicates the vibration waveform of the workpiece W. Detection signals V3A and V3B (see FIG. 2), various setting screens, various operation screens, etc. are displayed.

The control device 28 includes an arithmetic circuit including various processors, memories, and the like. Various processors include CPU (Central Processing Unit), GPU (Graphics Processing Unit), ASIC (Application Specific Integrated Circuit), and programmable logic devices [for example, SPLD (Simple Programmable Logic Devices), CPLD (Complex Programmable Logic Device), and FPGA (Field Programmable Gate Arrays)]. Note that the various functions of the control device 28 may be realized by one processor, or may be realized by a plurality of processors of the same type or different types.

FIG. 2 is a block diagram showing the configuration of the control device 28 of the first embodiment. As shown in FIG. 2, the control device 28 includes the previously described detector moving mechanism 16, position detection sensor 18, displacement detector 20 (displacement detection sensor 36), vibration meters 22A, 22B, operation section 25, and monitor. 27 etc. are connected, and the operation of each part of the surface profile measuring device 10 is generally controlled. Further, the control device 28 synchronizes the detection by the position detection sensor 18, the detection by the displacement detection sensor 36, and the detection by the vibrometers 22A and 22B. Furthermore, each time the above-mentioned detection is executed, the control device 28 outputs the X-direction position detection result D1 of the displacement detector 20 detected by the position detection sensor 18 and the contactor 34 detected by the displacement detection sensor 36. The displacement detection result D2 and the vibration displacements V1 and V2 by the vibration meters 22A and 22B are stored in the data storage 50 in association with each other.

The control device 28 includes a drive control section 40, a synchronization control section 42, signal acquisition sections 44 and 46, a storage control section 48, a data storage 50, a first signal generation section 52, a low pass filter 54 (LPF), A second signal generation section 55 and a display control section 56 are provided.

The drive control section 40 controls the drive of the detector moving mechanism 16. The drive control unit 40 drives the detector moving mechanism 16 to move the displacement detector 20 and the like in the X direction in response to a measurement start operation input to the operating unit 25. Thereby, the surface Wa is traced along the X direction by the contactor 34, that is, the shape measurement of the surface Wa is executed.

The synchronization control unit 42 controls the movement of the displacement detector 20 in the X direction by the detector moving mechanism 16, that is, while the surface shape measurement device 10 is measuring the shape of the surface Wa (hereinafter simply referred to as (abbreviated as "surface shape measurement in progress"), a synchronization signal CL is output to the position detection sensor 18, displacement detection sensor 36, and vibration meters 22A, 22B. This synchronization signal CL is a signal that synchronizes the detection by the position detection sensor 18, the detection by the displacement detection sensor 36, and the detection by the vibrometers 22A and 22B, and uses, for example, a clock signal. As a result, during surface shape measurement, the position detection sensor 18 detects the position of the displacement detector 20 in the X direction, the displacement detection sensor 36 detects the displacement of the contactor 34, and the vibration meters 22A and 22B detect the displacement detector 20. and detecting the vibration of the workpiece W (hereinafter simply referred to as "three operations") are repeatedly executed in synchronization with each other by the synchronization signal CL.

The signal acquisition unit 44 is a connection interface that connects to the position detection sensor 18 and the displacement detection sensor 36. During surface shape measurement, the signal acquisition unit 44 acquires the X-direction position detection result D1 of the displacement detector 20 from the position detection sensor 18 and outputs the X-direction position detection result D1 to the storage control unit 48, It also acquires the displacement detection result D2 of the contactor 34 from the displacement detection sensor 36 and outputs the displacement detection result D2 to the storage control unit 48.

The signal acquisition unit 46 is a connection interface that connects to the vibration meters 22A, 22B, and together with the vibration meters 22A, 22B constitutes the vibration detection unit of the present invention. The signal acquisition unit 46 acquires vibration displacements V1 and V2 from the vibrometers 22A and 22B and outputs the vibration displacements V1 and V2 to the storage control unit 48 during surface shape measurement.

FIG. 3 is a schematic diagram of saved data 51 stored in data storage 50 by storage control unit 48. As shown in FIG. 3 and FIG. 2 described above, the data storage 50 corresponds to the storage unit of the present invention, and includes various known storage media ( memory, storage, etc.).

The storage control unit 48 stores saved data 51 in the data storage 50 during surface shape measurement. This saved data 51 is continuously stored in association with the X-direction position detection result D1, displacement detection result D2, and vibration displacements V1 and V2 obtained in three operations synchronized with the synchronization signal CL during surface shape measurement. This is the data.

Specifically, when the three operations are executed in synchronization with the synchronization signal CL, the storage control unit 48 receives the X-direction position detection result D1 and the displacement from the position detection sensor 18 and the displacement detection sensor 36 via the signal acquisition unit 44. Obtain detection result D2. Furthermore, the storage control unit 48 acquires the vibration displacement V1 of the displacement detector 20 and the vibration displacement V2 of the workpiece W from the vibration meters 22A and 22B via the signal acquisition unit 46. Then, the storage control unit 48 stores the X-direction position detection result D1, the displacement detection result D2, and the vibration displacements V1 and V2 in the data storage 50 in association with each other. As a result, each time the three operations are executed, the X-direction position detection result D1, the displacement detection result D2, and the vibration displacements V1 and V2 are repeatedly stored in the data storage 50 in an associated state.

Returning to FIG. 2, the first signal generation unit 52 refers to the stored data 51 in the data storage 50 to determine the displacement of the contact 34 in the Z direction for each position in the X direction of the displacement detector 20 (contact 34), i.e. A displacement detection signal D3 (see FIG. 4) indicating the surface shape of the surface Wa is generated, and this displacement detection signal D3 is output to the low-pass filter 54. Note that the first signal generation unit 52 generates the displacement detection signal D3 by directly and continuously acquiring the X-direction position detection result D1 and the displacement detection result D2 from the signal acquisition unit 44 during surface shape measurement. It may also be output to the low-pass filter 54.

The low-pass filter 54 performs low-pass filter processing on the displacement detection signal D3 output from the first signal generation section 52 based on a preset cutoff value, and removes high-frequency noise from the displacement detection signal D3. The displacement detection signal D3 output from the low-pass filter 54 is input to the display control section 56.

The second signal generation unit 55 refers to the stored data 51 in the data storage 50 and generates a vibration detection signal V3A indicating the vibration displacement V1 of the displacement detector 20 at each position in the X direction, and also generates a vibration detection signal V3A indicating the vibration displacement V1 at each position in the X direction. A vibration detection signal V3B indicating the vibration displacement V2 of W is generated. The second signal generation section 55 then outputs the vibration detection signals V3A and V3B to the display control section 56. Note that the second signal generation unit 55 directly and continuously acquires the X-direction position detection result D1 and the vibration displacements V1, V2 from the signal acquisition units 44, 46 during the surface shape measurement, and generates the vibration detection signals V3A, V3B may be used. Further, the vibration detection signals V3A and V3B may be outputted from the second signal generation section 55 to the display control section 56 via the low-pass filter 54.

FIG. 4 is an explanatory diagram showing an example of the displacement detection signal D3 and the vibration detection signals V3A and V3B displayed on the monitor 27 by the display control unit 56. 4 and the already mentioned FIG. The vibration detection signals V3A and V3B (see reference numeral 4B) inputted from the section 55 are displayed on the monitor 27.

At this time, the display control unit 56 displays the display position of the origin in the X direction of both the waveform of the displacement detection signal D3 and the waveform of the vibration detection signals V3A and V3B displayed on the monitor 27, and the scales in the X direction of both. It is preferable to have them aligned. As a result, as shown by arrow A1 in the figure, if the abnormal waveform ER is included in the waveform of the displacement detection signal D3 being displayed on the monitor 27, for example, the operator can determine the occurrence position of the abnormal waveform ER ( The waveforms of the vibration detection signals V3A and V3B corresponding to the position in the X direction can be efficiently and easily confirmed.

Note that in this embodiment, the waveform of the displacement detection signal D3 and the waveforms of the vibration detection signals V3A and V3B are displayed side by side in the vertical direction of the screen of the monitor 27, but the display method is not particularly limited. For example, they may be displayed side by side in the horizontal direction on the screen of the monitor 27, or may be displayed selectively.

[Operation of the first embodiment]
FIG. 5 is a flowchart showing the process of measuring the shape of the surface Wa of the workpiece W by the surface shape measuring device 10 according to the method of controlling the shape measuring device of the present invention. As shown in FIG. 5, the operator sets the workpiece W on the measuring table 12 and brings the tip of the contactor 34 into contact with the surface Wa, and then performs a measurement start operation using the operation unit 25. In response to this operation, the drive control unit 40 drives the detector moving mechanism 16 to move the displacement detector 20 in the X direction (step S1). Thereby, the surface Wa is traced along the X direction by the contactor 34.

Further, in response to the measurement start operation, the synchronization control unit 42 outputs a synchronization signal CL to the position detection sensor 18, displacement detection sensor 36, and vibration meters 22A, 22B (step S2, the synchronization control step of the present invention). equivalent). As a result, the position detection sensor 18 detects the position of the displacement detector 20 in the X direction (step S3A), the displacement detection sensor 36 detects the displacement of the contactor 34 (step S3B), and the vibration meters 22A and 22B detect the displacement. Three operations including vibration detection of the device 20 and workpiece W (step S3C) are executed synchronously. Note that step S3A corresponds to the position detection step of the present invention, step S3B corresponds to the displacement detection step of the present invention, and step S3C corresponds to the vibration detection step of the present invention.

Next, the X-direction position detection result D1 detected by the position detection sensor 18 and the displacement detection result D2 detected by the displacement detection sensor 36 are input to the storage control unit 48 via the signal acquisition unit 44. Further, vibration displacements V1 and V2 detected by the vibration meters 22A and 22B are input to the storage control unit 48 via the signal acquisition unit 46. Then, as shown in FIG. 3 described above, the storage control unit 48 associates the X-direction position detection result D1, the displacement detection result D2, and the vibration displacements V1 and V2 obtained by the three mutually synchronized operations. It is stored in the saved data 51 (step S4).

Thereafter, the processes from step S2 to step S4 are repeatedly executed until the movement of the displacement detector 20 is completed (NO in step S5). As a result, during surface shape measurement, the three operations are repeatedly executed in synchronization with each other using the synchronization signal CL, and each time the three operations are executed, the X-direction position detection result D1, the displacement detection result D2, and the vibration The displacements V1 and V2 are repeatedly stored in the saved data 51 in an associated state.

After the displacement detector 20 has finished moving (YES in step S5), that is, after the shape measurement of the surface Wa has been completed, when the operator performs an operation to display the shape measurement results of the surface Wa on the operation unit 25, the first signal The generation unit 52 and the second signal generation unit 55 operate. Next, the first signal generation section 52 generates the displacement detection signal D3 with reference to the stored data 51, and the second signal generation section 55 generates the vibration detection signals V3A and V3B with reference to the stored data 51 (step S6 ). The displacement detection signal D3 is input to the display control unit 56 after being subjected to low-pass filter processing by the low-pass filter 54, and the vibration detection signals V3A and V3B are input to the display control unit 56.

Then, the display control unit 56 displays the low-pass filtered displacement detection signal D3 and the vibration detection signals V3A and V3B on the monitor 27, as shown in FIG. 4 described above (step S7). Thereby, when the abnormal waveform ER is included in the waveform of the displacement detection signal D3, the operator can confirm the waveforms of the vibration detection signals V3A and V3B corresponding to the position where the abnormal waveform ER occurs. As a result, it is easy to determine whether the abnormal waveform ER is caused by vibrations of the displacement detector 20 and the workpiece W (i.e., external vibration input), or by scratches on the surface Wa. can be determined.

[Effects of the first embodiment]
As described above, in the first embodiment, by repeating the three operations (detecting the position in the X direction, detecting the displacement of the contactor 34, and detecting vibrations of the displacement detector 20, etc.) in synchronization with each other during surface shape measurement, Every time the three operations are executed, the X-direction position detection result D1, the displacement detection result D2, and the vibration displacements V1 and V2 can be stored in the storage data 51 in association with each other. As a result, the operator can check the waveforms of the vibration detection signals V3A and V3B corresponding to the desired position on the waveform of the displacement detection signal D3, so that the cause of the abnormality in shape measurement of the surface Wa can be efficiently and easily identified. can be detected.

Further, since there is no need to prepare a measurement room with a low-vibration environment, a vibration-isolating table, etc., an increase in cost is prevented, and furthermore, the surface shape measuring device 10 can be installed at the work site where the workpiece W is processed.

[Second embodiment]
FIG. 6 is a block diagram showing the configuration of the control device 28 of the surface profile measuring device 10 of the second embodiment. The vibration displacement V1 detected by the vibration meter 22A includes not only the vibration of the displacement detector 20 but also the influence of the vibration of the surface shape measuring device 10 (measuring table 12, etc.). Therefore, in the second embodiment, a signal caused by the vibration of the displacement detector 20 is estimated based on the vibration displacements V1 and V2 for each X-direction position of the displacement detector 20 by the vibration meters 22A and 22B, and based on this signal, the It is determined whether the shape of Wa needs to be remeasured. In the second embodiment, re-measurement is performed when it is determined that re-measurement is necessary.

As shown in FIG. 6, the surface profile measuring device 10 according to the second embodiment has the following exceptions: the control device 28 is provided with a difference value calculation section 57, a re-measurement determination section 58, and a re-measurement control section 59. Since the configuration is basically the same as that of the first embodiment, the same reference numerals are given to the same elements in function or configuration as in the first embodiment, and the explanation thereof will be omitted.

FIG. 7 is an explanatory diagram for explaining the calculation of the difference value ΔV and the generation of the difference vibration detection signal V4 by the difference value calculation unit 57. As shown in FIG. 7 and the previously described FIG. -V2), that is, the difference between vibration detection signals V3A and V3B (see reference numeral 7A) is calculated.

By calculating the difference value ΔV in this way, the influence of the vibration of the measuring table 12, etc. is removed from the vibration displacement V1 detected by the vibration meter 22A, and the signal caused by the vibration of the displacement detector 20 (displacement detector A signal showing only 20 vibrations is obtained. As a result, only the vibration of the displacement detector 20 can be accurately detected. Conversely, it is possible to determine the magnitude of the influence of vibrations other than the vibrations of the displacement detector 20 on the vibration detection signal V3A.

Then, the difference value calculation unit 57 generates a difference vibration detection signal V4 (see reference numeral 7B in FIG. 7) indicating the difference value ΔV for each position in the X direction of the displacement detector 20, and controls the display of this difference vibration detection signal V4. It outputs to the section 56 and the re-measurement determination section 58. Thereby, the display control unit 56 causes the monitor 27 to display the differential vibration detection signal V4.

Returning to FIG. 6, the re-measurement determination section 58 re-trace the area to be measured on the surface Wa with the contactor 34 along the X direction based on the differential vibration detection signal V4 inputted from the difference value calculation section 57. Determine whether or not measurement is to be performed. Specifically, the re-measurement determination unit 58 determines the magnitude of the influence of vibrations other than the vibrations of the displacement detector 20 (for example, vibration displacement amount) included in the vibration detection signal V3A, based on the differential vibration detection signal V4. Then, the re-measurement determination unit 58 determines whether or not re-measurement should be performed based on whether or not the magnitude of this influence becomes larger than a predetermined threshold value, and outputs the determination result to the re-measurement control unit 59. .

The remeasurement control section 59 corresponds to the first remeasurement control section of the present invention. The remeasurement control unit 59 drives the detector moving mechanism 16 via the drive control unit 40 to move the displacement detector 20 in the X direction when the remeasurement determination unit 58 determines to perform remeasurement. Execute re-measurement. Thereafter, the re-measurement, the generation of the differential vibration detection signal V4 etc. by the difference value calculation unit 57, and the determination by the re-measurement determination unit 58 are repeatedly executed until the re-measurement determination unit 58 determines that the measurement is not to be performed. . Thereby, the shape measurement of the surface Wa is performed in a state where it is not affected by the above-mentioned vibrations.

As described above, in the second embodiment, the influence of vibrations other than the vibrations of the displacement detector 20 on the vibration detection signal V3A is determined by calculating the difference value ΔV (differential vibration detection signal V4) by the difference value calculation unit 57. be able to. As a result, when the influence of vibrations other than the vibrations of the displacement detector 20 becomes large, re-measurement is performed, thereby obtaining a shape measurement result of the surface Wa in a state where it is not affected by the above-mentioned vibrations. Further, instead of performing re-measurement, the influence of the vibration described above may be removed from the vibration detection signal V3A, and in this case, there is no need to waste time in re-measurement.

[Third embodiment]
FIG. 8 is a schematic diagram of a surface profile measuring device 10 according to the third embodiment. FIG. 9 is a block diagram showing the configuration of the control device 28 of the surface profile measuring device 10 of the third embodiment. In the surface profile measuring device 10 of each of the embodiments described above, the vibration displacement V1 of the displacement detector 20 and the vibration displacement V2 of the workpiece W are detected by the vibration meters 22A and 22B, but in the third embodiment, one vibration meter 22 The vibration displacements V1 and V2 are estimated based on the detection result of the vibration displacement V0.

As shown in FIGS. 8 and 9, the surface profile measuring device 10 of the third embodiment includes a vibration meter 22 instead of the vibration meters 22A and 22B, and a vibration transfer characteristic acquisition unit 60 and a vibration displacement measurement unit 60 in the control device 28. The configuration is basically the same as that of each of the above embodiments except that an estimator 62 is provided. For this reason, the same reference numerals are given to the same elements in terms of functions or configurations as in each of the above-described embodiments, and the explanation thereof will be omitted. In the third embodiment, the vibration meter 22, the vibration transfer characteristic acquisition section 60, and the vibration displacement estimation section 62 constitute the vibration detection section of the present invention.

The vibrometer 22 is basically the same as the vibrometers 22A and 22B of the above-described embodiments, and is provided at a predetermined position within the surface shape measuring device 10, for example, on the measurement table 12. The vibration meter 22 detects the input vibration F input to the measuring table 12 from the outside in synchronization with the synchronization signal CL, and detects the vibration displacement indicating the displacement of the vibration in the Z direction of the measuring table 12 (the installation part of the vibration meter 22). V0 is sequentially output to the control device 28.

The vibration transfer characteristic acquisition unit 60 acquires a first vibration transfer characteristic T1 and a second vibration transfer characteristic T2 stored in advance in a memory or an external server (not shown), and obtains the first vibration transfer characteristic T1 and the second vibration transfer characteristic T2. T2 is output to the vibration displacement estimation section 62.

The first vibration transfer characteristic T1 is a vibration transfer characteristic from the vibration meter 22 to the displacement detector 20. Further, the second vibration transfer characteristic T2 is a vibration transfer characteristic from the vibration meter 22 to the workpiece W. The first vibration transfer characteristic T1 and the second vibration transfer characteristic T2 can be obtained by conducting experiments or simulations in advance. Note that the definition of the vibration transmission characteristic (also referred to as vibration transmission rate) is a known technique (see, for example, Japanese Patent No. 6179379 and Japanese Patent Application Laid-open No. 2001-292590), so a specific explanation will be omitted here.

The vibration displacement estimation unit 62 calculates the vibration displacement V0 inputted from the vibration meter 22 via the signal acquisition unit 46, and the first vibration transfer characteristic T1 and the second vibration transfer characteristic T2 inputted from the vibration transfer characteristic acquisition unit 60. , the vibration displacement V1 of the displacement detector 20 and the vibration displacement V2 of the workpiece W are estimated (calculated). The vibration displacement estimation unit 62 repeatedly estimates the vibration displacements V1 and V2 every time the vibration displacement V0 is input from the vibration meter 22 in synchronization with the synchronization signal CL. As a result, similarly to each of the embodiments described above, the vibration displacements V1 and V2 are repeatedly acquired and stored in the saved data 51 in synchronization with the synchronization signal CL.

Since the subsequent processing is basically the same as in each of the embodiments described above, detailed explanation will be omitted here.

As described above, in the third embodiment, by obtaining the first vibration transfer characteristic T1 and the second vibration transfer characteristic T2 in advance, even if the number of vibration meters 22 is one, it can be synchronized with the synchronization signal CL. Thus, the vibration displacement V1 of the displacement detector 20 and the vibration displacement V2 of the work W can be acquired (estimated) and stored. As a result, the cause of abnormality in shape measurement of the surface Wa can be detected at a lower cost than in each of the above embodiments.

Note that in the third embodiment, the vibration displacement V0 is output from the signal acquisition unit 46 to the vibration displacement estimation unit 62, but this vibration displacement V0 may not be output from the signal acquisition unit 46 to the storage control unit 48. The vibration displacement V0 may be stored in the saved data 51 in association with the X-direction position detection result D1 etc. each time the above three operations are executed. In this case, the vibration displacement estimation unit 62 estimates vibration displacements V1 and V2 for each position of the displacement detector 20 in the X direction based on each vibration displacement V0 in the stored data 51.

Further, in the third embodiment, the vibration meter 22 is provided on the measurement table 12, but the vibration meter 22 may be provided in other parts of the surface shape measuring device 10. In this case, the first vibration transfer characteristic T1 and the second vibration transfer characteristic T2 corresponding to the installation position of the vibration meter 22 are determined in advance.

Furthermore, in the third embodiment, based on the estimation result of the vibration displacement estimating section 62, similarly to the second embodiment, the difference value ΔV is calculated (generation of the differential vibration detection signal V4), and determination is made as to whether re-measurement is to be performed. , and re-measurement may be performed.

[Fourth embodiment]
Next, a description will be given of a surface profile measuring device 10 according to a fourth embodiment of the present invention. In the fourth embodiment, when the operator specifies an arbitrary position on the waveform of the displacement detection signal D3 displayed on the monitor 27, vibration displacements V1, V2 ( Vibration displacement information 68 including the waveform of the vibration detection signals V3A, V3B) and the amount of vibration displacement is displayed on the monitor 27.

The surface profile measuring machine 10 of the fourth embodiment has basically the same configuration as the surface profile measuring machine 10 of each of the above embodiments, so the same reference numerals are used for the same functions or configurations as those of the above embodiments. The explanation will be omitted.

FIG. 10 is an explanatory diagram for explaining the display of the vibration displacement information 68 on the monitor 27 according to the specified operation. In addition, in FIG. 10, in order to prevent the drawing from becoming complicated, only the display of the vibration displacement information 68 corresponding to the vibration displacement V1 (vibration detection signal V3A) is illustrated, and the display corresponding to the vibration displacement V2 (vibration detection signal V3B) is illustrated. The display of the vibration displacement information 68 is omitted from illustration (the same applies to FIGS. 12 and 15, which will be described later).

As shown by reference numeral XA in FIG. 10, the operation unit 25 receives an input of a designation operation for designating an arbitrary designated position SP on the waveform of the displacement detection signal D3 displayed on the monitor 27. Thereby, for example, when the abnormal waveform ER is included in the waveform of the displacement detection signal D3 on the monitor 27, the operator can designate the abnormal waveform ER as the specified position SP. Furthermore, when displaying the waveform of the displacement detection signal D3 on the monitor 27, the display control unit 56 displays a cursor Cu indicating the specified position SP in a superimposed manner on the waveform of the displacement detection signal D3.

As shown by reference numeral XB in FIG. 10, the display control unit 56 determines the position of the displacement detector 20 in the X direction corresponding to the specified position SP based on the operation for specifying the specified position SP on the operation unit 25. Next, based on the determined X-direction position, the display control unit 56 refers to the data storage 50 and generates a vibration displacement waveform 66 indicating the waveform of the vibration displacements V1 and V2 in the X-direction position and the range before and after the X-direction position. A detected value 67 of the amount of vibration displacement of vibration displacements V1 and V2 corresponding to the position in the X direction is obtained from the saved data 51.

Next, as indicated by reference symbol XC in FIG. Display. Thereby, the operator can confirm the vibration displacement waveform 66 and the detected value 67 corresponding to the specified position SP. The vibration displacement waveform 66 and detected value 67 corresponding to the specified position SP referred to here are the vibration displacement waveform 66 and detected value detected in synchronization with the detection of the X-direction position of the displacement detector 20 corresponding to the specified position SP. Points to 67.

When a specified position change operation C1 (see symbol XA) for moving the cursor Cu (specified position SP) in the X direction is input to the operation unit 25, the display control unit 56 controls the displacement corresponding to the moved cursor Cu. The position of the detector 20 in the X direction is determined again. Next, the display control unit 56 acquires vibration displacement information 68 (vibration displacement waveform 66 and detected value 67) as indicated by symbols XB and XC, based on the re-discrimination result of the X-direction position of the displacement detector 20. Execute display update.

Thereafter, each time the specified position change operation C1 of the cursor Cu (specified position SP) is executed, the re-determination of the X-direction position of the displacement detector 20, and the acquisition and display update of the vibration displacement information 68 are repeatedly executed. Ru.

Note that the vibration displacement information 68 corresponding to the vibration displacement V2 (vibration detection signal V3B) can be similarly displayed on the monitor 27 in accordance with each operation (designation operation, designated position change operation C1).

As described above, in the fourth embodiment, the operator can confirm the vibration displacement information 68 corresponding to the desired position of the cursor Cu (specified position SP). As a result, the cause of abnormality in shape measurement of the surface Wa can be detected more efficiently and easily.

[Fifth embodiment]
FIG. 11 is a block diagram showing the configuration of the control device 28 of the surface profile measuring device 10 of the fifth embodiment. FIG. 12 is an explanatory diagram for explaining the waveform of the displacement detection signal D3 and the vibration displacement information 68 displayed on the monitor 27 in the fifth embodiment.

Note that the surface profile measuring device 10 of the fifth embodiment has basically the same configuration as each of the above embodiments (especially the fourth embodiment), except that the display method of the displacement detection signal D3 on the monitor 27 is different. . For this reason, the same reference numerals are given to the same elements in terms of functions or configurations as in each of the above-described embodiments, and the explanation thereof will be omitted. Further, although FIG. 11 shows a modification of the control device 28 of the first embodiment shown in FIG. 2 as the control device 28 of the fifth embodiment, it is also applicable to the control device 28 of other embodiments. be.

The display control unit 56 in each of the embodiments described above causes the monitor 27 to display the displacement detection signal D3 after low-pass filter processing by the low-pass filter 54. In this case, it is difficult to determine from the waveform of the displacement detection signal D3 a protrusion shape (false shape) of the waveform caused by vibration or the like.

Therefore, as shown by reference numeral XIIA in FIGS. 11 and 12, the display control unit 56 of the fifth embodiment sets a superimposed display mode in which the displacement detection signal D3 before and after low-pass filter processing by the low-pass filter 54 is displayed in a superimposed manner on the monitor 27. have. This makes it possible to easily identify the above-mentioned false shapes that are difficult to identify through low-pass filter processing.

Then, as shown by symbols XIIB and XIIC in FIG. Information 68 can be displayed on monitor 27. As a result, the cause of the abnormality in shape measurement of the surface Wa can be identified with higher accuracy, so that the reliability of this shape measurement can be improved.

[Sixth embodiment]
FIG. 13 is a block diagram showing the configuration of the control device 28 of the surface profile measuring device 10 of the sixth embodiment. The surface profile measuring device 10 of the sixth embodiment determines whether or not there is an abnormality in the shape measurement of the surface Wa based on the displacement detection signal D3, and if it is determined that there is an abnormality in the shape measurement, the shape of the surface Wa is remeasured. Execute.

The surface profile measuring device 10 of the sixth embodiment has the above-mentioned implementations except that the control device 28 is provided with an abnormal waveform detection section 70, an abnormality determination section 72, a re-measurement control section 74, and a notification control section 76. It has basically the same configuration as the form. For this reason, the same reference numerals are given to the same elements in terms of function or configuration as in each of the above embodiments, and the explanation thereof will be omitted. Note that although FIG. 13 shows a modification of the control device 28 of the first embodiment shown in FIG. 2 as the control device 28 of the sixth embodiment, it is also applicable to the control device 28 of other embodiments. be.

The abnormal waveform detection section 70 detects the abnormal waveform ER from the waveform of the displacement detection signal D3 generated by the first signal generation section 52.

FIG. 14 is an explanatory diagram for explaining first to third examples of detection of the abnormal waveform ER by the abnormal waveform detection unit 70.

As shown by reference numeral XIVA in FIG. 14, in the first example, the abnormal waveform detection unit 70 detects that the amount of displacement of the contactor 34 in the Z direction becomes larger than a predetermined abnormality determination threshold ET based on the displacement detection signal D3. Based on whether the abnormal waveform ER is within the normal range NR (within the abnormality determination threshold ET), it is determined whether the abnormal waveform ER has occurred. When the abnormality determining unit 72 determines that the abnormal waveform ER has occurred, the abnormality determining unit 72 sends range information 75 (corresponding to the first range of the present invention) indicating the range of the position of the abnormal waveform ER in the X direction to the abnormality determining unit 72. Output.

As shown by reference numeral XIVB in FIG. 14, in the second example, the abnormal waveform detection unit 70 detects, based on the displacement detection signal D3, that the amount of displacement of the contactor 34 in the Z direction exceeds the abnormality determination threshold ET for a predetermined period or more. If the abnormal waveform ER continues, it is determined that the abnormal waveform ER has occurred, and range information 75 of the abnormal waveform ER is output to the abnormality determining section 72. This prevents erroneous detection of the occurrence of the abnormal waveform ER due to noise in the displacement detection signal D3.

As shown by reference numeral XIVC in FIG. 14, in the third example, the abnormal waveform detection unit 70 calculates a moving average line MA of the displacement amount of the contactor 34 in the Z direction based on the displacement detection signal D3. Then, the abnormality determination unit 72 generates an abnormal waveform ER when the deviation of the displacement amount from the moving average line MA returns to the original state (a state within the abnormality determination threshold ET) from a state in which the deviation exceeds the abnormality determination threshold ET. It is determined that the abnormal waveform ER exists, and the range information 75 of the abnormal waveform ER is output to the abnormality determining section 72. Thereby, the drift of the displacement detection signal D3 and the abnormal waveform ER can be distinguished, and the detection accuracy of the abnormal waveform detection section 70 can be improved.

FIG. 15 is an explanatory diagram for explaining the process of determining the presence or absence of an abnormality in the shape measurement of the surface Wa by the abnormality determining unit 72. As shown in FIG. 15, the abnormality determination section 72 corresponds to the first abnormality determination section of the present invention, and based on the range information 75 of the abnormal waveform ER input from the abnormal waveform detection section 70, the abnormality determination section 72 determines the stored data 51. With reference to the vibration displacements V1 and V2 within, it is determined whether there is an abnormality in the shape measurement of the surface Wa.

Specifically, the abnormality determination unit 72 stores vibration displacements V1 and V2 within the X-direction position range WQ of the displacement detector 20 indicated by the range information 75, based on the range information 75 input from the abnormal waveform detection unit 70. Obtained from data 51. Then, the abnormality determination unit 72 measures the shape of the surface Wa based on whether at least one of the vibration displacements V1 and V2 (vibration displacement amounts) within the X-direction position range WQ becomes larger than a predetermined threshold FT. Determine whether there is any abnormality.

Returning to FIG. 13, the remeasurement control section 74 corresponds to the second remeasurement control section of the present invention. When the abnormality determination unit 72 determines that there is an abnormality in shape measurement, the remeasurement control unit 74 controls the detector moving mechanism via the drive control unit 40, similar to the remeasurement control unit 59 of the second embodiment. 16 to execute re-measurement. As a result, the three operations described above are repeatedly executed in synchronization with each other, and each time the three operations are executed, the X-direction position detection result D1, the displacement detection result D2, and the vibration displacements V1 and V2 are associated and stored as data. 51. In this embodiment, the entire region to be measured on the surface Wa is re-measured, but only the location where the abnormal waveform ER occurs in the region to be measured may be re-measured based on the range information 75.

When the remeasurement control unit 74 executes the remeasurement, the first signal generation unit 52 described above generates the displacement detection signal D3, the abnormal waveform detection unit 70 detects the abnormal waveform ER, and the abnormality determination unit 72 makes a determination. is executed repeatedly. Hereinafter, every time the abnormality determining section 72 determines that there is an abnormality in shape measurement, the re-measurement control section 74 performs re-measurement and the first signal generating section 52 generates a displacement detection signal D3 within a certain number of times (described later). Detection of the abnormal waveform ER by the abnormal waveform detecting section 70 and determination by the abnormality determining section 72 are repeatedly executed.

FIG. 16 is an explanatory diagram for explaining notification of warning information 79 by the notification control unit 76 of the sixth embodiment. As shown in FIG. 16 and FIG. 13 described above, the notification control section 76 and the monitor 27 constitute the notification section of the present invention. When the number of remeasurement executions by the remeasurement control section 74 exceeds a predetermined number of times, the notification control section 76 causes the monitor 27 to display warning information 79 indicating this fact. Thereby, it is possible to notify the operator of the occurrence of an abnormality in shape measurement of the workpiece W (surface Wa). Note that instead of displaying the warning information 79 on the monitor 27, or in addition to displaying the warning information 79 on the monitor 27, this warning information 79 may be outputted as a sound from a speaker (corresponding to a notification section) not shown.

FIG. 17 is a flowchart showing the flow of re-measurement processing and warning processing by the surface profile measuring device 10 of the sixth embodiment. Note that the flow of measuring the shape of the surface Wa of the workpiece W from step S1 to step S5 is the same as that of the first embodiment shown in FIG. 5 described above, so a detailed explanation will be omitted here.

When the first shape measurement of the surface Wa is completed, the first signal generation unit 52 generates the displacement detection signal D3 with reference to the saved data 51 (step S21). When the generation of the displacement detection signal D3 is completed, the abnormal waveform detection section 70 detects the abnormal waveform ER from the waveform of the displacement detection signal D3, as shown in FIG. 14 described above, and adds the abnormal waveform to the displacement detection signal D3. If ER is included, the range information 75 is output to the abnormality determination unit 72 (step S22).

Next, based on the range information 75 input from the abnormal waveform detection unit 70, the abnormality determination unit 72 calculates the vibration displacements V1 and V2 within the X-direction position range WQ from the stored data 51 as shown in FIG. Acquire (step S23). Then, the abnormality determination unit 72 determines whether or not there is an abnormality in the shape measurement of the surface Wa based on whether at least one of the vibration displacements V1 and V2 (vibration displacement amount) within the X-direction position range WQ becomes larger than the threshold value FT. is determined (step S24).

When the abnormality determination unit 72 determines that there is an abnormality in shape measurement (YES in step S24, NO in step S25), the remeasurement control unit 74 drives the detector moving mechanism 16 via the drive control unit 40. The shape of the surface Wa is remeasured (step S26). As a result, the three operations described above are repeatedly executed in synchronization with each other, and each time the three operations are executed, the X-direction position detection result D1, the displacement detection result D2, and the vibration displacements V1 and V2 are associated and stored as data. 51.

When the re-measurement is completed, the processes from step S21 to step S24 are repeatedly executed. If the abnormality determination unit 72 determines that there is an abnormality in shape measurement and the number of remeasurements is less than the above-described certain number of times, the processes of steps S26 and S21 to S24 are repeatedly executed again (YES in step S24, (NO in step S25). Thereafter, until the number of remeasurements reaches a certain number of times, the above-described process is repeatedly executed every time the abnormality determining section 72 determines that there is an abnormality in shape measurement. Even when a false shape due to vibration occurs in the displacement detection signal D3, the risk of adopting a false shape as a measurement result is reduced by repeatedly performing re-measurement.

If the number of remeasurements exceeds a certain number, the notification control unit 76 displays a warning to display warning information 79 to that effect on the monitor 27 as shown in FIG. 16 described above (in step S25). YES, step S27). Thereby, it is possible to notify the operator of the occurrence of an abnormality in the shape measurement of the surface Wa. As a result, the operator can recognize the occurrence of an abnormality and quickly confirm the cause of the abnormality.

As described above, in the sixth embodiment, it is determined whether or not there is an abnormality in the shape measurement of the surface Wa based on the waveform of the displacement detection signal D3, and if an abnormality has occurred in the shape measurement, re-measurement is performed. It is possible to more accurately determine whether this abnormality is caused by the actual shape of the surface Wa or by external environmental factors (vibration, etc.).

[Seventh embodiment]
FIG. 18 is a block diagram showing the configuration of the control device 28 of the surface profile measuring device 10 of the seventh embodiment. The abnormality determination unit 72 of the sixth embodiment determines whether there is an abnormality in shape measurement of the surface Wa based on the displacement detection signal D3, but the abnormality determination unit 72 of the seventh embodiment stores it in the saved data 51. It is determined whether there is an abnormality in the shape measurement based on the vibration displacements V1 and V2.

As shown in FIG. 18, the surface profile measuring machine 10 according to the seventh embodiment has basically the same configuration as the surface profile measuring machine 10 according to the sixth embodiment, so it is functionally or structurally similar to the sixth embodiment. Identical components will be given the same reference numerals and their explanation will be omitted.

The abnormality determination section 72 of the seventh embodiment corresponds to the second abnormality determination section of the present invention. The abnormality determination unit 72 determines whether or not there is an abnormality in shape measurement based on the vibration displacements V1 and V2 stored in the saved data 51.

Specifically, similar to the sixth embodiment shown in FIG. 15 described above, the abnormality determination unit 72 determines whether the shape measurement is abnormal based on whether each vibration displacement V1, V2 becomes larger than the threshold value FT. Determine the presence or absence of. As a result, when the abnormality determination unit 72 determines that there is an abnormality in the shape measurement of the surface Wa, the remeasurement control unit 74 executes remeasurement as in the sixth embodiment. Note that the entire area to be measured on the surface Wa may be re-measured, or only the location where the abnormal waveform ER occurs in the area to be measured may be re-measured based on range information 75A to be described later.

Further, when it is determined that there is an abnormality in the shape measurement of the surface Wa, the abnormality determination unit 72 refers to the stored data 51 and determines the position of the displacement detector 20 corresponding to the vibration displacements V1 and V2 that are determined to have an abnormality in the shape measurement. Range information 75A (corresponding to the second range of the present invention) indicating the range of positions in the X direction is generated. The abnormality determination unit 72 then outputs the range information 75A to the display control unit 56.

Furthermore, when it is determined that there is an abnormality in the shape measurement of the surface Wa, the abnormality determination unit 72 selects the range information 75A from the displacement detection signal D3 generated by the first signal generation unit 52 based on the range information 75A described above. Extract the data of the corresponding abnormal waveform ER. Furthermore, the abnormality determination unit 72 generates abnormality content information 78 indicating the content of the abnormality in shape measurement (for example, vibration, etc.). Then, the abnormality determination unit 72 generates warning information 80 including range information 75A, data of abnormal waveform ER, abnormality content information 78, and vibration displacement waveform 66A indicating the waveforms of vibration displacements V1 and V2 determined to be abnormal in shape measurement. (see FIG. 20) and outputs this warning information 80 to the notification control section 76.

FIG. 19 is an explanatory diagram for explaining an example of the displacement detection signal D3 displayed on the monitor 27 when the abnormality determination unit 72 determines that there is an abnormality in the shape measurement of the surface Wa. As shown in FIG. 19, the display control unit 56 causes the monitor 27 to display the displacement detection signal D3 when the abnormality determination unit 72 determines that there is an abnormality in shape measurement.

Also, at this time, the display control unit 56 selects a waveform region WR corresponding to the range information 75A in the waveform of the displacement detection signal D3 displayed on the monitor 27 based on the range information 75A input from the abnormality determination unit 72. Display it in an identifiable manner, for example, by coloring it. This makes it possible to notify the operator of the position and range of the range information 75A in which the shape measurement abnormality has occurred. Note that, as long as the waveform region WR can be identified, there is no particular limitation on the display mode.

FIG. 20 is an explanatory diagram for explaining notification of warning information 80 by the notification control unit 76 of the seventh embodiment. As shown in FIG. 20, when the abnormality determining section 72 determines that there is an abnormality in the shape measurement of the surface Wa, the notification control section 76 of the seventh embodiment responds to the warning information 80 input from the abnormality determining section 72. Based on this, the display control section 56 is controlled to display the warning information 80 on the monitor 27. Thereby, the operator can be notified of the occurrence of an abnormality in shape measurement of the surface Wa, the position (range) and content of the abnormality, the abnormal waveform ER, and the vibration displacement waveform 66A at the location where the abnormality has occurred.

As described above, in the seventh embodiment, it is possible to determine whether there is an abnormality in shape measurement based on the vibration displacements V1 and V2 stored in the data storage 50 (saved data 51), so it is similar to the sixth embodiment described above. The effect of this can be obtained.

[Eighth embodiment]
FIG. 21 is a block diagram showing the configuration of the control device 28 of the surface profile measuring device 10 of the eighth embodiment. FIG. 22 is an enlarged view of the displacement detector 20 of the surface profile measuring device 10 of the eighth embodiment. In the eighth embodiment, two vibrometers 22A1 and 22A2 are used to detect the attitude of the displacement detector 20, and the displacement amount ΔZ1 (see FIG. 23) of the contactor 34 in the Z direction according to the change in attitude is detected. calculate.

As shown by symbols XXIIA and XXIIB in FIGS. 21 and 22, the surface profile measuring device 10 of the eighth embodiment includes two types of vibration meters 22A1 and 22A2 in the displacement detector 20, and a control device 28. The configuration is basically the same as that of each of the embodiments described above, except that a posture detection section 82 and a displacement calculation section 84 are provided. For this reason, the same reference numerals are given to the same elements in terms of function or configuration as in each of the above embodiments, and the explanation thereof will be omitted. Note that although FIG. 21 shows a modification of the control device 28 of the first embodiment shown in FIG. 2 as the control device 28 of the eighth embodiment, it is also applicable to the control device 28 of other embodiments. be.

The vibration meters 22A1 and 22A2 are basically the same as the vibration meters 22A of each of the embodiments described above, and are provided at one end and the other end of the displacement detector 20 in the X direction. The vibration meter 22A1 detects the vibration displacement V1A in the Z direction of one end of the displacement detector 20 in synchronization with the synchronization signal CL, and sequentially outputs the detected vibration displacement V1A to the control device 28. Further, the vibration meter 22A2 detects the vibration displacement V1B in the Z direction of the other end of the displacement detector 20 in synchronization with the synchronization signal CL, and sequentially outputs the detected vibration displacement V1B to the control device 28.

The vibration displacements V1A and V2B are stored in the stored data 51 of the data storage 50 by the storage control unit 48 via the signal acquisition unit 46. Thereby, each time the above three operations are executed, the vibration displacements V1A and V2B are repeatedly stored in the saved data 51 in a state in which they are associated with the X-direction position detection result D1 and the like.

Note that the symbol L1 in FIG. 22 indicates a known interval between the vibration meters 22A1 and 22A2, and the symbol L2 indicates the distance from the swing fulcrum 30 to the contactor 34.

The attitude detection unit 82 detects a detector attitude angle indicating the attitude of the displacement detector 20, which will be described in detail later, based on the vibration displacements V1A and V2B of the displacement detector 20 for each X-direction position stored in the saved data 51. θ (see FIG. 23) is detected (calculated) for each position in the X direction. The detector attitude angle θ is the attitude of the displacement detector 20 around an axis parallel to the Y direction, and indicates the attitude of the displacement detector 20 that affects the position of the tip of the contactor 34 in the Z direction.

The displacement calculation section 84 calculates the Z direction of the contactor 34 according to the change in the posture of the displacement detector 20, which will be described in detail later, based on the detector posture angle θ for each X direction position detected by the posture detection section 82. The displacement amount ΔZ1 (see FIG. 23) is calculated for each position in the X direction.

FIG. 23 is an explanatory diagram for explaining the detection of the detector attitude angle θ of the displacement detector 20 by the attitude detection unit 82 and the calculation of the displacement amount ΔZ1 of the contactor 34 by the displacement amount calculation unit 84.

As shown at XXIIIA in FIG. 23, the posture detection unit 82 refers to the stored data 51 and calculates the difference value ΔV between the vibration displacement V1A and the vibration displacement V1B for each position of the displacement detector 20 in the X direction. . In other words, the posture detection unit 82 generates, for each X-direction position of the displacement detector 20, a vibration detection signal V3A1 indicating the vibration displacement V1A for each X-direction position, and a vibration detection signal V3A2 indicating the vibration displacement V1B for each X-direction position. Calculate the difference value ΔV.

Next, as shown at XXIIIB in FIG. 23, the attitude detection unit 82 calculates the mathematical formula [θ =atan(ΔV)/L1], the detector attitude angle θ is detected for each position in the X direction.

As shown by reference symbol XXIIIC in FIG. Based on the distance L2, the displacement amount ΔZ1 of the contactor 34 is calculated for each position in the X direction using the formula [ΔZ1=L2sinθ].

As described above, in the eighth embodiment, by detecting the detector attitude angle θ and the displacement amount ΔZ1 of the contactor 34 for each position of the displacement detector 20 in the X direction, the displacement detector 20 in the shape measurement result of the surface Wa The influence of posture can be determined. Thereby, the influence of the attitude of the displacement detector 20 can be removed from the shape measurement results of the surface Wa.

[Ninth embodiment]
24 and 25 are schematic diagrams of a roundness measuring machine 100 according to a ninth embodiment, which corresponds to the shape measuring machine of the present invention. The roundness measuring machine 100 (including a cylindrical shape measuring machine) uses a contactor 132 to measure the circumferential surface Wb (outer circumferential surface, inner circumferential surface) of a cylindrical or cylindrical workpiece W as shown in FIG. Roundness measurement and measurement of the surface shape (for example, flatness, etc.) of the upper surface Wc of the workpiece W as shown in FIG. 25 are performed. Note that the peripheral surface Wb and the upper surface Wc correspond to the surface to be measured.

The roundness measuring machine 100 includes a measuring table 102, a rotary table 104, a motor 106, a rotation angle detection sensor 108, a column 110, a horizontal arm 112, a displacement detector 114, and vibration meters 116A and 116B. , an operating section 118, a monitor 120, and a control device 122.

The measurement stand 102 is a support stand (base) that supports each part of the roundness measuring machine 100. A rotary table 104 and a column 110 are provided on the upper surface side of the measurement table 102. Furthermore, a motor 106 and a rotation angle detection sensor 108 are provided inside the measurement table 102.

A workpiece W is placed on the upper surface of the rotary table 104. This rotary table 104 is provided on the measuring table 102 so as to be rotatable about a rotation center RC (rotation axis) parallel to the Z direction.

The motor 106 corresponds to the relative movement mechanism of the present invention, and rotates the rotary table 104 around a rotation center RC under the control of a control device 122, which will be described later. By rotating the rotary table 104 in this manner, the displacement detector 114 (contactor 132) can be moved relative to the circumferential surface Wb or the upper surface Wc along the circumferential direction (hereinafter simply referred to as the work circumferential direction). can.

The rotation angle detection sensor 108 corresponds to the position detection sensor of the present invention, and for example, a rotary encoder is used. The rotation angle detection sensor 108 detects the relative position of the displacement detector 114 in the circumferential direction of the workpiece with respect to the circumferential surface Wb or the upper surface Wc by detecting the rotation angle of the rotary table 104. Then, the rotation angle detection sensor 108 outputs the rotation angle detection result Dθ of the rotary table 104 to the control device 122.

The column 110 is provided on the upper surface of the measurement table 102 at a position shifted from the rotary table 104 in the X direction, and has a shape extending in the Z direction. This column 110 holds a horizontal arm 112 movably in the Z direction (see arrow AZ) and the X direction (see arrow AX) via a carriage (not shown). A displacement detector 114 is held at the tip of the horizontal arm 112 so that its posture can be changed. Therefore, the horizontal arm 112 functions as a detector holding portion of the present invention.

The displacement detector 114 includes an arm 130, a contact 132, and a displacement detection sensor 134. The displacement detector 114 is held in a first attitude parallel to the Z direction by the tip of the horizontal arm 112 when measuring the roundness of the circumferential surface Wb (see FIG. 24). Furthermore, when measuring the surface shape of the upper surface Wc, the displacement detector 114 is held in a second posture parallel to the X direction by the tip of the horizontal arm 112 (see FIG. 25).

The arm 130 is swingably supported by the displacement detector 114. Note that the fulcrum of the arm 130 is parallel to the Y direction in the first attitude (see FIG. 24), and parallel to the X direction in the second attitude (see FIG. 25).

The contact 132 is provided at the tip of the arm 130. The contact 132 contacts the circumferential surface Wb when measuring the roundness of the circumferential surface Wb, and swings in the X direction in response to the swing of the arm 130 (see FIG. 24). Therefore, the detector sensitivity direction K1 of the displacement detector 114 in this case is the X direction. Then, the contactor 132 traces (scans) the circumferential surface Wb along the circumferential direction of the workpiece as the rotary table 104 and the workpiece W are rotated relative to the displacement detector 114 by the motor 106 .

Further, the contactor 132 contacts the upper surface Wc when measuring the surface shape of the upper surface Wc, and swings in the Z direction in accordance with the swinging of the arm 130 (see FIG. 25). Therefore, the detector sensitivity direction K1 of the displacement detector 114 in this case is the Z direction. Then, the contactor 132 traces (scans) the upper surface Wc along the circumferential direction of the workpiece as the rotary table 104 and the workpiece W are rotated relative to the displacement detector 114 by the motor 106.

The displacement detection sensor 134 is, for example, a linear variable differential transformer or a scale type sensor similar to the displacement detection sensor 36 of each of the embodiments described above. The displacement detection sensor 134 detects the displacement of the contactor 132 in the X direction (when measuring the roundness of the circumferential surface Wb) or the Z direction (when measuring the surface shape of the upper surface Wc), and controls the displacement detection result D2. Output to device 122.

The vibration meters 116A and 116B are provided, for example, on the measurement table 102. Note that the vibration meters 116A and 116B may be provided other than the measurement table 102.

The vibration meter 116A corresponds to the first vibration meter of the present invention. The vibration meter sensitivity direction K2 of the vibration meter 116A coincides with the X direction (detector sensitivity direction K1 when measuring the roundness of the circumferential surface Wb). The vibration meter 116A continuously detects vibrations in the X direction and sequentially outputs the vibration displacement V1 to the control device 122.

The vibration meter 116B corresponds to the second vibration meter of the present invention. The vibration meter sensitivity direction K2 of the vibration meter 116B coincides with the Z direction (detector sensitivity direction K1 when measuring the surface shape of the upper surface Wc). The vibration meter 116B continuously detects vibrations in the Z direction and sequentially outputs the vibration displacement V2 to the control device 122.

The operation unit 118 uses, for example, a keyboard, a mouse, an operation panel, operation buttons, etc., and receives inputs for various operations from an operator.

As the monitor 120, various displays such as a known liquid crystal display are used. This monitor 120 displays a displacement detection signal D3 which is the shape measurement result of the circumferential surface Wb or the upper surface Wc, various setting screens, various operation screens, and the like. Further, the monitor 120 displays a vibration detection signal V3A, which will be described later, when measuring the roundness of the circumferential surface Wb, and displays a vibration detection signal V3B, which will be described later, when measuring the surface shape of the upper surface Wc.

The control device 122 centrally controls the operation of each part of the roundness measuring machine 100. This control device 122 has basically the same configuration as the control device 28 of each of the embodiments described above. When measuring the roundness of the circumferential surface Wb, the control device 122 operates the vibrometer 116A of the vibrometers 116A and 116B, and performs detection by the rotation angle detection sensor 108, detection by the displacement detection sensor 134, Three operations including vibration detection by the vibration meter 116A are synchronized. Furthermore, the control device 28 detects the rotation angle detection result Dθ detected by the rotation angle detection sensor 108 and the displacement detection of the contactor 132 detected by the displacement detection sensor 134 every time the three mutually synchronized operations are executed. The result D2 and the vibration displacement V1 detected by the vibration meter 116A are stored in the data storage 50 (see FIG. 2) in association with each other.

Further, the control device 122 generates a displacement detection signal D3 indicating the displacement of the contactor 132 in the X direction for each rotational angular position of the rotary table 104, that is, the surface shape (roundness) of the circumferential surface Wb, and displays the generated displacement detection signal D3 on the monitor 120. display. Further, the control device 122 generates a vibration detection signal V3A indicating the vibration displacement V1 for each rotational angular position of the rotary table 104, and displays this vibration detection signal V3A on the monitor 120.

On the other hand, when measuring the surface shape of the upper surface Wc, the control device 122 operates the vibrometer 116B of the vibrometers 116A and 116B, and performs detection by the rotation angle detection sensor 108, detection by the displacement detection sensor 134, Three operations including vibration detection by the vibration meter 116B are synchronized. Furthermore, every time the three mutually synchronized operations are executed, the control device 28 associates the rotation angle detection result Dθ and the displacement detection result D2 described above with the vibration displacement V2 detected by the vibration meter 116B. It is stored in the data storage 50.

Further, the control device 122 also generates a displacement detection signal D3 indicating the displacement of the contactor 132 in the Z direction for each rotational angular position of the rotary table 104, that is, the surface shape (flatness, etc.) of the upper surface Wc, and outputs the displacement detection signal D3 to the monitor 120. to be displayed. Further, the control device 122 generates a vibration detection signal V3B indicating the vibration displacement V2 for each rotational angular position of the rotary table 104, and displays this vibration detection signal V3B on the monitor 120.

As described above, in the roundness measuring machine 100 of the ninth embodiment, by repeatedly executing the three operations in synchronization with each other, the rotation angle detection result Dθ and the displacement detection result are obtained every time the three operations are executed. D2 and either the vibration displacement V1 or the vibration displacement V2 can be stored in the saved data 51 in association with each other. As a result, the same effects as in each of the above embodiments can be obtained. Furthermore, by providing the vibrometers 116A and 116B corresponding to the two types of postures of the displacement detector 114, it is possible to support two types of shape measurement of the circumferential surface Wb and the top surface Wc.

Note that the inventions of the respective embodiments described above may be appropriately combined with the roundness measuring machine 100 of the ninth embodiment.

[Tenth embodiment]
FIG. 26 is a schematic diagram of a roundness measuring machine 100 according to a tenth embodiment of the present invention. As shown in FIG. 10, in the tenth embodiment, the shape measurement (roundness measurement) of the tapered peripheral surface Wd (surface to be measured) of the workpiece W is performed. Note that the roundness measuring machine 100 of the tenth embodiment has basically the same configuration as the roundness measuring machine 100 of the ninth embodiment, so it is the same in function or configuration as the ninth embodiment. The same reference numerals are given to the same reference numerals, and the explanation thereof will be omitted.

The displacement detector 114 of the tenth embodiment is held in the first attitude by the horizontal arm 112. Further, the contactor 132 of the tenth embodiment contacts the circumferential surface Wd when measuring the roundness of the circumferential surface Wb, and swings in the X direction in accordance with the swing of the arm 130.

The vibration meter 116A of the tenth embodiment continuously detects vibrations in the X direction and sequentially outputs the vibration displacement V1 to the control device 122 when measuring the roundness of the circumferential surface Wd.

The vibration meter 116B of the tenth embodiment continuously detects vertical vibration, which is vibration in the Z direction, and sequentially outputs the vibration displacement V2 to the control device 122 when measuring the roundness of the circumferential surface Wd. When vertical vibration occurs, since the circumferential surface Wd has a tapered shape, the contact 132 is displaced in the X direction due to this vertical vibration, which affects the roundness measurement result of the circumferential surface Wd (see FIG. 28). . Therefore, in the tenth embodiment, vertical vibration is detected by the vibration meter 116B.

When measuring the roundness of the circumferential surface Wd, the control device 122 of the tenth embodiment operates both the vibration meters 116A and 116B, and performs detection by the rotation angle detection sensor 108, detection by the displacement detection sensor 134, Three operations including vibration detection by vibration meters 116A and 116B are synchronized. Furthermore, each time the three mutually synchronized operations are executed, the control device 28 outputs the rotation angle detection result Dθ and the displacement detection result D2, and the vibration displacements V1 and V2 detected by the vibration meters 116A and 116B. , are stored in the data storage 50 in association with each other.

FIG. 27 is a block diagram showing a part of the configuration of the control device 122 of the tenth embodiment. As shown in FIG. 27, the control device 122 is provided with a design information acquisition section 124 and a displacement calculation section 126 in addition to the sections described in each of the above embodiments. Note that the second signal generation unit 55 of the tenth embodiment generates a vibration detection signal V3A indicating the vibration displacement V1 for each rotational angular position of the rotary table 104, and outputs it to the display control unit 56. As a result, the vibration detection signal V3A is displayed on the monitor 120.

FIG. 28 is an explanatory diagram for explaining the calculation of the taper angle θA acquired by the design information acquisition unit 124 and the displacement amount ΔX of the contactor 132 by the displacement amount calculation unit 126. As shown in FIG. 28 and the previously described FIG. Information on the taper angle θA is output to the displacement calculation section 126.

The displacement calculation unit 126 calculates the displacement amount ΔX of the contactor 132 in the X direction according to the vertical vibration of the displacement detector 114 based on the vibration displacement V2 for each rotational angular position of the rotary table 104 stored in the saved data 51. Calculate.

Specifically, the displacement amount calculation unit 126 refers to the stored data 51 and detects the displacement amount ΔZ2 of the contactor 132 in the Z direction for each rotational angular position of the rotary table 104. Then, the displacement calculation unit 126 calculates the mathematical formula [ΔX=ΔZ2×tan(θA )] is used to calculate the displacement amount ΔX of the contactor 132 for each rotational angular position, and outputs the calculation result to the display control unit 56. As a result, the displacement amount ΔX of the contactor 132 for each rotational angular position of the rotary table 104 is displayed on the monitor 120.

As described above, in the tenth embodiment, when measuring the shape of the tapered circumferential surface Wd, the vibration detection signal V3A (of the circumferential surface Wd) is calculated by calculating the displacement ΔX of the contactor 132 due to vertical vibration. The influence of vertical vibration on shape measurement results) can be determined. As a result, the cause of abnormality in shape measurement of the circumferential surface Wd can be detected more accurately.

In the tenth embodiment, the case where the shape of the tapered circumferential surface Wd is measured is taken as an example. The present invention is also applicable to

[others]
In each of the above embodiments, the data storage 50 is built into the control device 28, but the data storage 50 may be provided separately from the surface profile measuring device 10 (for example, in an external server or database).

In the first to eighth embodiments described above, the displacement detector 20 is moved in the X direction when measuring the shape of the surface Wa by the surface profile measuring machine 10, but the measuring table 12 and the workpiece W are moved in the X direction. It's okay. That is, as long as the displacement detector 20 and the workpiece W can be moved relative to each other in the X direction, the method of movement is not particularly limited. Further, in the ninth embodiment and the tenth embodiment, instead of rotating the workpiece W, the displacement detector 114 may be rotated about the rotation center RC.

Although the XY plane is parallel to the horizontal plane in each of the above embodiments, it may be non-parallel to the horizontal plane.

In the first to eighth embodiments described above, the stationary surface profile measuring device 10 has been described as an example, but the present invention is also applicable to a handheld surface profile measuring device 10.

In each of the above embodiments, based on the synchronization signal CL output from the synchronization control unit 42, the position detection sensor 18 detects the position detection sensor 18, the displacement detection sensor 36 detects the vibration meters 22A, 22B (vibration meters 22, 116A, 116B). ), but any one of the position detection sensor 18, displacement detection sensor 36, and each of the vibrometers 22A and 22B may function as the synchronization control unit 42. In this case, the operation timing of one of the position detection sensor 18, displacement detection sensor 36, and each of the vibrometers 22A, 22B is used as a synchronization signal CL (trigger) to operate the other two.

In the first to eighth embodiments described above, vibrations of the displacement detector 20 and the workpiece W are detected, but the vibrations of only one of the displacement detector 20 and the workpiece W may be detected. Moreover, the part in which vibration is detected in the surface profile measuring instrument 10 is not particularly limited, and vibration may be detected at any position (for example, the measuring table 12, the column 14, etc.). Similarly, in the ninth and tenth embodiments, the parts where vibration is detected are not particularly limited, and can be placed at any arbitrary position (for example, the measuring table 102, the rotary table 104, the column 110, the horizontal arm 112, and the displacement detector). 114 etc.) may be performed.

In each of the above embodiments, the surface shape measuring machine 10 and the roundness measuring machine 100 have been described as examples, but the present invention uses a contactor that comes into contact with the workpiece W (object to be measured) to measure the workpiece W or its various objects. It is applicable to various shape measuring machines that measure the shape of a measurement surface.

10 Surface shape measuring device 12 Measuring table 14 Column 16 Detector moving mechanism 17 Holder 18 Position detection sensor 18a Linear scale 18b Reading head 20 Displacement detector 22, 22A, 22B, 22A1, 22A2 Vibration meter 25 Operation unit 27 Monitor 28 Control device 30 Swing fulcrum 32 Arm 32a Arm tip 32b Arm base end 34 Contactor 36 Displacement detection sensor 40 Drive control section 42 Synchronization control sections 44, 46 Signal acquisition section 48 Storage control section 50 Data storage 51 Saved data 52 First signal Generation unit 54 Low-pass filter 55 Second signal generation unit 56 Display control unit 57 Difference value calculation unit 58 Re-measurement determination unit 59 Re-measurement control unit 60 Vibration transfer characteristic acquisition unit 62 Vibration displacement estimation unit 66 Vibration displacement waveform 66A Vibration displacement waveform 67 Detection value 68 Vibration displacement information 70 Abnormal waveform detection section 72 Abnormality determination section 74 Re-measurement control section 75, 75A Range information 76 Notification control section 78 Abnormality content information 79 Warning information 80 Warning information 82 Posture detection section 84 Displacement calculation section 100 True Circularity measuring machine 102 Measuring table 104 Rotary table 106 Motor 108 Rotation angle detection sensor 110 Column 112 Horizontal arm 114 Displacement detectors 116A, 116B Vibration meter 118 Operation section 120 Monitor 122 Control device 124 Design information acquisition section 126 Displacement calculation section 130 Arm 132 Contact 134 Displacement detection sensor C1 Specified position change operation CL Synchronization signal Cu Cursor D1 X direction position detection result D2 Displacement detection result D3 Displacement detection signal Dθ Rotation angle detection result ER Abnormal waveform ET Abnormality determination threshold F Input vibration FT Threshold K1 Detector sensitivity direction K2 Vibration meter sensitivity direction L2 Distance MA Moving average line NR Normal range RC Rotation center SP Specified position T1 First vibration transfer characteristic T2 Second vibration transfer characteristic V0, V1, V1A, V1B, V2 Vibration displacement V3A, V3A1 , V3A2, V3B Vibration detection signal V4 Differential vibration detection signal W Work WQ X-direction position range WR Waveform area Wa Surface Wb Circumferential surface Wc Top surface Wd Circumferential surface ΔV Difference value ΔX, ΔZ1, ΔZ2 Displacement θ Detector attitude angle θA Taper angle

Claims (32)

In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object,
a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction;
a relative movement mechanism that moves the displacement detector relative to the measurement object to trace the measured surface of the measurement object with the contact;
a position detection sensor that detects the relative position of the displacement detector with respect to the measurement target;
a vibration detection unit that detects vibration in the detector sensitivity direction;
While the relative movement mechanism is performing relative movement, three operations include detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and detection of the vibration by the vibration detection section. a synchronization control unit that synchronizes with each other and repeatedly executes the
Every time the three operations are executed synchronously, the relative position detected by the position detection sensor, the displacement of the contactor detected by the displacement detector, and the displacement detected by the vibration detection section are determined. a storage control unit that associates and stores the vibration displacement of the vibration in a storage unit;
a first signal generation unit that generates a displacement detection signal indicating the displacement of the contact for each relative position;
a second signal generation unit that generates a vibration detection signal indicating the vibration displacement for each relative position;
Equipped with
The vibration detection section
A vibration meter,
a vibration transfer characteristic acquisition unit that acquires a first vibration transfer characteristic from the vibrometer to the displacement detector and a second vibration transfer characteristic from the vibrometer to the measurement object;
of the displacement detector for each relative position based on the vibration detection result for each relative position by the vibration meter and the first vibration transfer characteristic and the second vibration transfer characteristic acquired by the vibration transfer characteristic acquisition unit. a vibration displacement estimation unit that estimates the vibration displacement of the measurement target for each of the vibration displacement and the relative position;
Equipped with
The shape measuring machine, wherein the second signal generation section generates the vibration detection signal corresponding to the displacement detector and the vibration detection signal corresponding to the measurement object based on the estimation result of the vibration displacement estimation section. The shape measuring instrument according to claim 1 , further comprising a difference value calculation unit that calculates a difference value between the vibration displacement of the displacement detector and the vibration displacement of the object to be measured for each of the relative positions. In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object,
a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction;
a relative movement mechanism that moves the displacement detector relative to the measurement object to trace the measured surface of the measurement object with the contact;
a position detection sensor that detects the relative position of the displacement detector with respect to the measurement target;
a vibration detection unit that detects vibration in the detector sensitivity direction;
While the relative movement mechanism is performing relative movement, three operations include detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and detection of the vibration by the vibration detection section. a synchronization control unit that synchronizes with each other and repeatedly executes the
Every time the three operations are executed synchronously, the relative position detected by the position detection sensor, the displacement of the contactor detected by the displacement detector, and the displacement detected by the vibration detection section are determined. a storage control unit that associates and stores the vibration displacement of the vibration in a storage unit;
a first signal generation unit that generates a displacement detection signal indicating the displacement of the contact for each relative position;
a second signal generation unit that generates a vibration detection signal indicating the vibration displacement for each relative position;
Equipped with
The vibration detection unit is a vibration meter provided at a first position of the displacement detector where the vibration can be detected and a second position where the vibration of the measurement target can be detected,
The second signal generating section generates the vibration detection signal corresponding to the displacement detector based on the vibration detection result for each relative position by the vibration meter at the first position, and generates the vibration detection signal corresponding to the vibration at the second position. generating the vibration detection signal corresponding to the measurement target based on the vibration detection result for each relative position by the meter;
A shape measuring machine including a difference value calculation section that calculates a difference value between the vibration displacement of the displacement detector and the vibration displacement of the object to be measured for each of the relative positions . a re-measurement determination unit that determines whether or not to perform re-measurement of re-tracing the surface to be measured with the contactor, based on a calculation result of the difference value for each relative position by the difference value calculation unit;
a first remeasurement control unit that drives the relative movement mechanism to execute the remeasurement when the remeasurement determination unit determines to execute the remeasurement;
The shape measuring machine according to claim 2 or 3 , comprising: a display control unit that displays the displacement detection signal generated by the first signal generation unit on a monitor;
an operation unit that accepts a designation operation to designate any designated position of the displacement detection signal displayed on the monitor;
5. Any one of claims 1 to 4 , wherein the display control unit refers to the storage unit and causes the monitor to display vibration displacement information indicating the vibration displacement corresponding to the designated position designated by the designation operation. Shape measuring machine described in section. In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object,
a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction;
a relative movement mechanism that moves the displacement detector relative to the measurement object to trace the measured surface of the measurement object with the contact;
a position detection sensor that detects the relative position of the displacement detector with respect to the measurement target;
a vibration detection unit that detects vibration in the detector sensitivity direction;
While the relative movement mechanism is performing relative movement, three operations include detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and detection of the vibration by the vibration detection section. a synchronization control unit that synchronizes with each other and repeatedly executes the
Every time the three operations are executed synchronously, the relative position detected by the position detection sensor, the displacement of the contactor detected by the displacement detector, and the displacement detected by the vibration detection section are determined. a storage control unit that associates and stores the vibration displacement of the vibration in a storage unit;
a first signal generation unit that generates a displacement detection signal indicating the displacement of the contact for each relative position;
a second signal generation unit that generates a vibration detection signal indicating the vibration displacement for each relative position;
Equipped with
a display control unit that displays the displacement detection signal generated by the first signal generation unit on a monitor;
an operation unit that accepts a designation operation to designate any designated position of the displacement detection signal displayed on the monitor;
The shape measuring machine, wherein the display control section refers to the storage section and causes the monitor to display vibration displacement information indicating the vibration displacement corresponding to the designated position designated by the designation operation. The vibration detection unit is a vibration meter provided at a first position of the displacement detector where the vibration can be detected and a second position where the vibration of the measurement target can be detected,
The second signal generating section generates the vibration detection signal corresponding to the displacement detector based on the vibration detection result for each relative position by the vibration meter at the first position, and generates the vibration detection signal corresponding to the vibration at the second position. 7. The shape measuring machine according to claim 6 , wherein the vibration detection signal corresponding to the object to be measured is generated based on vibration detection results for each of the relative positions by the meter. Any one of claims 5 to 7, wherein the display control unit repeatedly refers to the storage unit and updates the vibration displacement information displayed on the monitor every time the specified position is changed. Shape measuring machine described in. comprising a low-pass filter that performs low-pass filter processing on the displacement detection signal generated by the first signal generation section,
The shape measuring instrument according to any one of claims 5 to 8 , wherein the display control section has a superimposed display mode in which the displacement detection signal before and after the low-pass filter processing is displayed on the monitor. a first signal generation unit that generates a displacement detection signal indicating the displacement of the contact for each relative position;
an abnormal waveform detection unit that detects an abnormal waveform in which the waveform of the displacement detection signal is abnormal from the displacement detection signal generated by the first signal generation unit;
When the range of the relative position where the abnormal waveform is detected by the abnormal waveform detection unit is defined as a first range, the abnormality in the shape measurement is determined based on the vibration displacement corresponding to the first range in the storage unit. a first abnormality determination unit that determines the presence or absence of the abnormality;
The shape measuring machine according to any one of claims 1 to 9 . In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object,
a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction;
a relative movement mechanism that moves the displacement detector relative to the measurement object to trace the measured surface of the measurement object with the contact;
a position detection sensor that detects the relative position of the displacement detector with respect to the measurement target;
a vibration detection unit that detects vibration in the detector sensitivity direction;
While the relative movement mechanism is performing relative movement, three operations include detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and detection of the vibration by the vibration detection section. a synchronization control unit that synchronizes with each other and repeatedly executes the
Each time the three operations are executed synchronously, the relative position detected by the position detection sensor, the displacement of the contactor detected by the displacement detector, and the displacement detected by the vibration detection section are determined. a storage control unit that associates and stores the vibration displacement of the vibration in a storage unit;
a first signal generation unit that generates a displacement detection signal indicating the displacement of the contact for each relative position;
an abnormal waveform detection unit that detects an abnormal waveform in which the waveform of the displacement detection signal is abnormal from the displacement detection signal generated by the first signal generation unit;
When the range of the relative position where the abnormal waveform is detected by the abnormal waveform detection unit is defined as a first range, the abnormality in the shape measurement is determined based on the vibration displacement corresponding to the first range in the storage unit. a first abnormality determination unit that determines the presence or absence of the abnormality;
A shape measuring machine equipped with 11. The first abnormality determination unit determines whether or not there is an abnormality in the shape measurement based on whether the amount of vibration displacement corresponding to the first range is larger than a predetermined threshold. 12. The shape measuring machine according to 11 . comprising a second remeasurement control unit that drives the relative movement mechanism to perform remeasurement in which the surface to be measured is retraced by the contactor;
Each time the first abnormality determining section determines that there is an abnormality, the second re-measurement control section executes the re-measurement, and the first signal generating section generates the displacement detection signal, and the abnormal waveform The shape measuring machine according to any one of claims 10 to 12, wherein the detection section detects the abnormal waveform, and the first abnormality determination section determines whether or not there is an abnormality in the shape measurement. 14. The shape measuring machine according to claim 13 , further comprising a notification section that notifies warning information when the number of remeasurements exceeds a predetermined number of times. The shape according to any one of claims 1 to 9 , further comprising a second abnormality determination unit that determines whether or not there is an abnormality in the shape measurement based on the vibration displacement for each of the relative positions stored in the storage unit. Measuring machine. a first signal generation unit that generates a displacement detection signal indicating the displacement of the contact for each relative position;
a display control unit that displays the displacement detection signal generated by the first signal generation unit on a monitor;
Equipped with
The display control unit refers to the storage unit to detect a second range indicating the range of the relative position corresponding to the vibration displacement that the second abnormality determination unit has determined to be abnormal, and displays the second range on the monitor. 16. The shape measuring instrument according to claim 15 , wherein a waveform region corresponding to the second range is identifiably displayed on the monitor in the waveform of the displacement detection signal. In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object,
a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction;
a relative movement mechanism that moves the displacement detector relative to the measurement object to trace the measured surface of the measurement object with the contact;
a position detection sensor that detects the relative position of the displacement detector with respect to the measurement target;
a vibration detection unit that detects vibration in the detector sensitivity direction;
While the relative movement mechanism is performing relative movement, three operations include detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and detection of the vibration by the vibration detection section. a synchronization control unit that synchronizes with each other and repeatedly executes the
Every time the three operations are executed synchronously, the relative position detected by the position detection sensor, the displacement of the contactor detected by the displacement detector, and the displacement detected by the vibration detection section are determined. a storage control unit that associates and stores the vibration displacement of the vibration in a storage unit;
a second abnormality determination unit that determines whether or not there is an abnormality in the shape measurement based on the vibration displacement for each of the relative positions stored in the storage unit;
a first signal generation unit that generates a displacement detection signal indicating the displacement of the contact for each relative position;
a display control unit that displays the displacement detection signal generated by the first signal generation unit on a monitor;
Equipped with
The display control unit refers to the storage unit to detect a second range indicating the range of the relative position corresponding to the vibration displacement that the second abnormality determination unit has determined to be abnormal, and displays the second range on the monitor. The shape measuring device displays on the monitor a waveform region corresponding to the second range in a waveform of the displacement detection signal . 18. Any one of claims 1 to 17 , wherein the second abnormality determination unit determines whether or not there is an abnormality in the shape measurement based on whether the amount of displacement of the vibration displacement becomes larger than a predetermined threshold value. Shape measuring machine described in. 19. The shape measuring machine according to claim 15 , further comprising a notification section that notifies warning information when the second abnormality determination section determines that there is an abnormality. The shape measuring instrument according to any one of claims 1 to 19, wherein the relative movement mechanism moves the displacement detector relative to the object to be measured in a linear direction perpendicular to the detector sensitivity direction. When the linear direction is the X direction among mutually perpendicular XYZ directions, and the detector sensitivity direction is the Z direction, the displacement detector is swingable about a swing fulcrum parallel to the Y direction. with supported arms;
the contactor is provided at the tip of the arm,
The vibration detection unit includes two vibration meters that detect the vibration of the displacement detector, and the two vibration meters are provided at one end and the other end of the displacement detector in the linear direction. and
Based on the known spacing between the two vibration meters and the vibration detection results for each relative position of the two vibration meters, the orientation of the displacement detector around an axis parallel to the Y direction is determined at the relative position. a posture detection unit that detects each
Based on the detection result of the posture for each relative position by the posture detecting section and the distance from the swing fulcrum to the contact, determine the Z direction of the contact according to the change in the posture of the displacement detector. a displacement amount calculation unit that calculates the amount of displacement for each of the relative positions;
The shape measuring machine according to claim 20, comprising: In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object,
a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction;
a relative movement mechanism that moves the displacement detector relative to the measurement object to trace the measured surface of the measurement object with the contact;
a position detection sensor that detects the relative position of the displacement detector with respect to the measurement target;
a vibration detection unit that detects vibration in the detector sensitivity direction;
While the relative movement mechanism is performing relative movement, three operations include detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and detection of the vibration by the vibration detection section. a synchronization control unit that synchronizes with each other and repeatedly executes the
Equipped with
The relative movement mechanism moves the displacement detector relative to the measurement target in a linear direction perpendicular to the detector sensitivity direction,
When the linear direction is the X direction among mutually perpendicular XYZ directions, and the detector sensitivity direction is the Z direction, the displacement detector is swingable about a swing fulcrum parallel to the Y direction. with supported arms;
the contactor is provided at the tip of the arm,
The vibration detection unit includes two vibration meters that detect the vibration of the displacement detector, and the two vibration meters are provided at one end and the other end of the displacement detector in the linear direction. and
Based on the known spacing between the two vibration meters and the vibration detection results for each relative position of the two vibration meters, the orientation of the displacement detector around an axis parallel to the Y direction is determined at the relative position. a posture detection unit that detects each
Based on the detection result of the posture for each relative position by the posture detecting section and the distance from the swing fulcrum to the contact, determine the Z direction of the contact according to the change in the posture of the displacement detector. a displacement amount calculation unit that calculates the amount of displacement for each of the relative positions;
A shape measuring machine equipped with The relative movement mechanism relatively rotates the measurement object and the displacement detector around a rotation center with the contactor in contact with the circumferential surface of the columnar or cylindrical measurement object. The shape measuring machine according to any one of Items 1 to 19. The relative movement mechanism moves the displacement detector in a first attitude in which the detector sensitivity direction is perpendicular to the rotation center and in a second attitude in which the detector sensitivity direction is parallel to the rotation center. It has a detector holding part that selectively holds the detector.
The vibration detection unit includes a first vibration meter that detects the vibration of the displacement detector in the first posture, and a second vibration meter that detects the vibration of the displacement detector in the second posture. death,
23. The first vibrometer operates when the displacement detector is in the first attitude, and the second vibrometer operates when the displacement detector is in the second attitude. Shape measuring machine described in. In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object,
a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction;
a relative movement mechanism that moves the displacement detector relative to the measurement object to trace the measured surface of the measurement object with the contact;
a position detection sensor that detects the relative position of the displacement detector with respect to the measurement target;
a vibration detection unit that detects vibration in the detector sensitivity direction;
While the relative movement mechanism is performing relative movement, three operations include detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and detection of the vibration by the vibration detection section. a synchronization control unit that synchronizes with each other and repeatedly executes the
Equipped with
The relative movement mechanism relatively rotates the measurement object and the displacement detector around a rotation center with the contactor in contact with the circumferential surface of the columnar or cylindrical measurement object,
The relative movement mechanism moves the displacement detector in a first attitude in which the detector sensitivity direction is perpendicular to the rotation center and in a second attitude in which the detector sensitivity direction is parallel to the rotation center. It has a detector holding part that selectively holds the detector.
The vibration detection unit includes a first vibration meter that detects the vibration of the displacement detector in the first posture, and a second vibration meter that detects the vibration of the displacement detector in the second posture. death,
A shape measuring machine in which the first vibrometer operates when the displacement detector is in the first attitude, and the second vibrometer operates when the displacement detector is in the second attitude. When the rotation center is in the Z direction among mutually perpendicular XYZ directions, the detector sensitivity direction is in the X direction, and the peripheral surface is tapered or curved,
The vibration detection section
a first vibrometer that detects the vibration in the X direction;
a second vibration meter that detects the vertical vibration in the Z direction;
a displacement calculation unit that calculates a displacement amount of the contactor in the X direction due to the vertical vibration based on a detection result of the vertical vibration by the second vibrometer;
The shape measuring machine according to any one of claims 23 to 25 . In a shape measuring machine that measures the shape of the object to be measured using a contactor that comes into contact with the object,
a displacement detector that detects displacement of the contact along a predetermined detector sensitivity direction;
a relative movement mechanism that moves the displacement detector relative to the measurement object to trace the measured surface of the measurement object with the contact;
a position detection sensor that detects the relative position of the displacement detector with respect to the measurement target;
a vibration detection unit that detects vibration in the detector sensitivity direction;
While the relative movement mechanism is performing relative movement, three operations include detection of the relative position by the position detection sensor, detection of the displacement by the displacement detector, and detection of the vibration by the vibration detection section. a synchronization control unit that synchronizes with each other and repeatedly executes the
Equipped with
The relative movement mechanism relatively rotates the measurement object and the displacement detector around a rotation center with the contactor in contact with the circumferential surface of the columnar or cylindrical measurement object,
When the rotation center is in the Z direction among mutually perpendicular XYZ directions, the detector sensitivity direction is in the X direction, and the peripheral surface is tapered or curved,
The vibration detection section
a first vibrometer that detects the vibration in the X direction;
a second vibration meter that detects the vertical vibration in the Z direction;
Based on the detection result of the vertical vibration by the second vibration meter, the contact caused by the vertical vibration
a displacement calculation unit that calculates the displacement amount of the child in the X direction;
A shape measuring machine equipped with Every time the three operations are executed synchronously, the relative position detected by the position detection sensor, the displacement of the contactor detected by the displacement detector, and the displacement detected by the vibration detection section are determined. The shape measuring machine according to claim 25 or 27, further comprising a storage control unit that stores the vibration displacement of the vibration in association with the vibration displacement in the storage unit. a first signal generation unit that generates a displacement detection signal indicating the displacement of the contact for each relative position;
a second signal generation unit that generates a vibration detection signal indicating the vibration displacement for each relative position;
The shape measuring machine according to claim 28 , comprising: The vibration detection unit is a vibration meter provided at a first position of the displacement detector where the vibration can be detected and a second position where the vibration of the measurement target can be detected,
The second signal generation unit generates the vibration detection signal corresponding to the displacement detector based on the vibration detection result for each relative position by the vibration meter at the first position, and generates the vibration detection signal corresponding to the vibration at the second position. The shape measuring machine according to claim 29 , wherein the vibration detection signal corresponding to the object to be measured is generated based on vibration detection results for each of the relative positions by the meter. 31. The synchronization controller according to claim 1, wherein the synchronization control section outputs a synchronization signal for synchronizing the three operations to the position detection sensor, the displacement detector, and the vibration detection section. Shape measuring instruments. A contact element that contacts an object to be measured, a displacement detector that detects displacement of the contact element along a predetermined detector sensitivity direction, and a displacement detector that moves the displacement detector relative to the object to be measured. A method for controlling a shape measuring machine that measures the shape of the object to be measured using the contact, the method comprising: a relative movement mechanism that causes the contact to trace the surface to be measured of the object to be measured;
a position detection step of detecting a relative position of the displacement detector with respect to the measurement target;
a displacement detection step of detecting displacement of the contact with the displacement detector;
a vibration detection step of detecting vibration in the detector sensitivity direction;
While the relative movement is being performed by the relative movement mechanism, the method includes detecting the relative position in the position detection step, detecting the displacement in the displacement detection step, and detecting the vibration in the vibration detection step. a synchronous control step in which the three operations are synchronized with each other and repeatedly executed;
Each time the three operations are performed synchronously, the relative position detected in the position detection step, the displacement of the contactor detected in the displacement detection step, and the displacement detected in the vibration detection step are determined. a storage control step of storing the vibration displacement of the vibration in a storage unit in association with the vibration displacement;
a first signal generation step of generating a displacement detection signal indicating the displacement of the contact for each of the relative positions;
a second signal generation step of generating a vibration detection signal indicating the vibration displacement for each of the relative positions;
has
The vibration detection step includes:
a vibration transfer characteristic acquisition step of acquiring a first vibration transfer characteristic from the vibrometer to the displacement detector and a second vibration transfer characteristic from the vibrometer to the measurement object;
of the displacement detector for each relative position based on the vibration detection result for each relative position by the vibration meter and the first vibration transfer characteristic and the second vibration transfer characteristic acquired in the vibration transfer characteristic acquisition step. a vibration displacement estimation step of estimating the vibration displacement of the measurement target for each vibration displacement and the relative position;
including;
In the second signal generation step, the shape measuring device generates the vibration detection signal corresponding to the displacement detector and the vibration detection signal corresponding to the measurement target based on the estimation result of the vibration displacement estimation step. Control method.

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