JP7438457B2 - Actuator device manufacturing method and actuator device - Google Patents

Description

The present disclosure relates to, for example, a method for manufacturing an actuator device and an actuator device.

For example, vehicles such as automobiles and railway cars are provided with actuator devices that serve as shock absorbers. The actuator device operates between two members that move relative to each other, for example, between a car body on the sprung side and a wheel on the unsprung side, between a car body on the sprung side and a truck on the unsprung side, or between the car body on the sprung side and a truck on the unsprung side. It is installed between the bogie and the wheel (axle, wheel axle) on the unsprung side. The actuator devices of Patent Documents 1 to 4 have an air chamber into which a rod moves in and out.

JP2014-167320A JP2007-274820A Japanese Patent Application Publication No. 2011-033124 Japanese Patent Application Publication No. 2005-256924

The air chamber into which the rod enters and exits preferably has a sealed structure in order to prevent water from condensation from getting mixed into the oil. However, in this case, the pressure inside the air chamber changes as the rod moves in and out of the air chamber. For this reason, for example, if the rod is assembled in the maximum extension state (that is, if the air chamber is sealed in the maximum extension state), a large reaction force (air reaction force) will be applied to the rod when the actuator device moves to the contraction stroke. is added. As a result, the thrust force may be biased between the extension stroke and the contraction stroke of the actuator device.

An object of an embodiment of the present invention is to provide a method for manufacturing an actuator device and an actuator device that can reduce bias in thrust.

One embodiment of the present invention relates to a method of manufacturing an actuator device, wherein the actuator device is provided between two members that move relatively, and the actuator device is provided between one of the two members. a first member to be attached and a second member to be attached to the other of the two members; the first member has a first cylinder having a bottom at one end and an opening at the other end; a rod that opens from the bottom of the cylinder and extends toward the other end, the second member having a second cylinder into which the rod is inserted, slides on the outer periphery of the rod, and has one end closed. and a closing member provided at the other end of the second cylinder, and the method for manufacturing the actuator device includes a step of inserting the rod into the second cylinder, and a closing member provided at the other end of the second cylinder. The closing member is fixed at , and moved to a position other than the maximum length where the relative positions of the first member and the second member are maximum and the minimum length where the relative positions are minimum, and the volume is increased by pressure in the second cylinder. and closing the changing first fluid at atmospheric pressure .

Further, an embodiment of the present invention relates to an actuator device, wherein the actuator device is provided between two members that move relatively, and the actuator device is attached to one of the two members. a first member attached to the other of the two members, and a power means that operates so that the first member and the second member move relative to each other, the first member , a first cylinder having a bottom at one end and an opening at the other end, and a rod extending from the bottom in the first cylinder to the other end that is open, and the second member has a rod inserted into the first cylinder. a second cylinder that slides on the outer periphery of the rod and has one end closed, and a closing member provided at the other end of the second cylinder, and has an opening at the other end of the first cylinder and a second cylinder whose one end is closed. The space between the second member and the second member is closed by a ring member, and a first fluid whose volume changes depending on the pressure is sealed in the second cylinder, and the pressure in the second cylinder is , at a minimum length when the rod is fully inserted into the second cylinder, the pressure is higher than atmospheric pressure, and at a maximum length when the rod is fully expelled from the second cylinder, the pressure is lower than atmospheric pressure. , when the rod is at an intermediate length in the second cylinder, which is near an intermediate position between the maximum length and the minimum length , atmospheric pressure is applied, and the first fluid whose volume changes due to pressure is in the first cylinder. The pressure within the first cylinder is greater than atmospheric pressure at the minimum length, less than atmospheric pressure at the maximum length, and atmospheric pressure at the intermediate length.

According to one embodiment of the present invention, it is possible to reduce thrust bias.

FIG. 1 is a longitudinal cross-sectional view showing an actuator device (electromagnetic actuator) according to a first embodiment. FIG. 2 is a longitudinal cross-sectional view showing the actuator device in FIG. 1 in a maximum length state (most extended state). FIG. 2 is a longitudinal cross-sectional view showing the actuator device in FIG. 1 in a minimum length state (most contracted state). FIG. 3 is a vertical cross-sectional view showing the assembly process of the actuator device in the order of (1), (2), and (3). FIG. 5 is a vertical cross-sectional view showing the assembly process following (3) in FIG. 4 in the order of (4), (5), and (6). FIG. 6 is a vertical sectional view showing the assembly process from (6) in FIG. 5 in order of (6) and (7). FIG. 7 is a longitudinal cross-sectional view showing the assembly process following (7) in FIG. 6 in order of (8) and (9). FIG. 7 is a vertical cross-sectional view showing the assembly process of the actuator device according to the second embodiment in the order of (7), (8), and (9).

Hereinafter, a method for manufacturing an actuator device and an actuator device according to embodiments will be described with reference to the accompanying drawings.

1 to 7 show a first embodiment. In FIG. 1, an electromagnetic actuator 1 as an actuator device is configured as an electric linear motor (electric linear actuator). FIG. 2 shows the electromagnetic actuator 1 in its maximum length state (most extended state), and FIG. 3 shows the electromagnetic actuator 1 in its minimum length state (most contracted state).

The electromagnetic actuator 1 is mounted on a vehicle such as a railway vehicle or an automobile, and forms an electromagnetic suspension device together with a spring (not shown) (suspension spring, coil spring, air spring). That is, although not shown, the electromagnetic actuator 1 is used together with the spring, for example, between the car body on the sprung side and the wheels on the unsprung side, between the car body on the sprung side and the truck on the unsprung side, Alternatively, it is provided between the bogie on the sprung side and the wheel (axle, wheel axle) on the unsprung side. Hereinafter, members on the sprung side of a car body, a truck, etc. will be referred to as "spring members." In addition, unsprung members such as bogies, wheels, axles, wheel axles, etc. are referred to as "unsprung members."

The electromagnetic actuator 1 includes, for example, a stator 2 arranged on the sprung side and a movable element 21 arranged on the unsprung side. The electromagnetic actuator 1 includes permanent magnets 22, 22 provided on a mover 21 serving as a first member, and coil members 15 (coils 15A, 15B, 15C) of an armature 13 provided on a stator 2 serving as a second member. ) constitutes a three-phase linear motor (three-phase linear synchronous motor).

More specifically, the electromagnetic actuator 1 is configured as a cylindrical linear electromagnetic actuator consisting of a pair of coaxial cylindrical members that are movable relative to each other. It is interposed in between. In this case, the electromagnetic actuator 1 includes permanent magnets 22, 22 as magnetic members provided in the outer cylinder 23 corresponding to the first cylinder, and permanent magnets 22, 22 as magnetic members provided in the inner cylinder 3 corresponding to the second cylinder via the core member 14. The coil member 15 (coils 15A, 15B, and 15C) is comprised of a group of coils of multiple phases. The coil member 15 is arranged to face the permanent magnets 22, 22 in the radial direction over the entire circumference.

The stator 2 and the movable element 21 of the electromagnetic actuator 1 are each attached between two members that move relative to each other (for example, between an unsprung member that is one of the two members and a sprung member that is the other of the two members). ing. The stator 2 and the movable element 21 are arranged linearly between a sprung member and an unsprung member so as to be capable of relative displacement (relative movement), and are arranged in the axial direction that is the stroke direction, that is, in the direction of relative displacement. Thrust is generated in the vertical direction in FIG.

In the embodiment, a case is illustrated in which, of the first and second members of the electromagnetic actuator 1, the first member is the mover 21 and the second member is the stator 2. However, the present invention is not limited to this, and the first member may be a stator, and the second member may be a movable member. That is, the stator may be attached to the unsprung member (one of the two members), and the mover may be attached to the sprung member (the other of the two members). Alternatively, one of the two members (one side member) may be a sprung member, and the other of the two members (other side member) may be an unsprung member. In addition, in the following explanation, one end side in the axial direction of the electromagnetic actuator 1 is referred to as the lower end side (lower end side in FIG. 1), and the other end side in the axial direction is referred to as the upper end side (upper end side in FIG. 1). One end side in the axial direction may be the upper end side, and the other end side in the axial direction may be the lower end side.

The stator 2 of the electromagnetic actuator 1 has an armature 13 at its lower end, which is one end thereof. That is, the stator 2 as a second member includes an inner cylinder 3, an outer shell 4 as a cover member, an intermediate cylinder 5 as a third cylinder, a bottom member 6, a closing member 7, an armature 13, The annular member 12 is provided. The inner cylinder 3 is formed as a cylindrical member (cylindrical member) extending in the vertical direction (axial direction). The intermediate cylinder 5 of the stator 2 and the outer cylinder 23 of the movable element 21 are arranged radially outside the inner cylinder 3. Conversely, the inner cylinder 3 is arranged radially inside the outer cylinder 23 and the intermediate cylinder 5. Thereby, the inner cylinder 3 is arranged on the inner periphery of the outer cylinder 23 so as to be relatively movable in the axial direction of the outer cylinder 23.

An armature 13 is provided at the lower end, which is one end of the inner cylinder 3 . The inner cylinder 3 has a lower end extending in the axial direction on the inner peripheral side of the armature 13 (core member 14), and is inserted inside the core member 14. That is, the lower end of the inner cylinder 3 extends to the armature 13 and is located on the inner peripheral side of the armature 13. A bottom member 6 that closes the lower end of the inner cylinder 3 is fixed to the lower end of the inner cylinder 3 . The inner cylinder 3 and the bottom member 6 constitute a second cylinder, and the bottom member 6 corresponds to a closing part (bottom part) that closes one end of the second cylinder. The bottom member 6 includes a small diameter portion 6A inserted into the lower end side of the inner cylinder 3, and a large diameter portion 6B having approximately the same outer diameter as the core member 14 of the armature 13.

The outer periphery of the small diameter portion 6A is a male threaded portion 6C. The male threaded portion 6C is screwed into the female threaded portion 3A provided on the lower end side of the inner cylinder 3. That is, the bottom member 6 is fixed to the inner cylinder 3 by screwing the male threaded part 6C of the small diameter part 6A and the female threaded part 3A of the inner cylinder 3. The bottom member 6 is provided with a through hole 6D that axially penetrates the small diameter portion 6A and the large diameter portion 6B. A rod 24 is inserted into the through hole 6D of the bottom member 6 and the inner cylinder 3. A sliding member (not shown) that slides on the outer peripheral surface of the rod 24 with low friction is provided in the through hole 6D. Further, a seal member 6E is provided in the through hole 6D to seal between the rod 24 and the through hole 6D.

The upper end, which is the other end of the inner cylinder 3, is attached to a sprung member (the other of the two members). In this case, the upper end side of the inner cylinder 3 is closed by a closing member 7. That is, the closing member 7 is provided at the other end (upper end) of the inner cylinder 3. The closing member 7 is fixed to the upper member 10 by bolts 9. Thereby, the upper end portion of the inner cylinder 3 is attached to the upper member 10 via the closing member 7.

The closing member 7 includes a small diameter part 7A inserted into the upper end of the inner cylinder 3, a large diameter part 7B inserted into the upper end of the intermediate cylinder 5, and a large diameter part 7B directed upward from the radial center position of the large diameter part 7B. It is provided with a protrusion 7C that protrudes. The outer periphery of the small diameter portion 7A is a male threaded portion 7D. The male threaded portion 7D is screwed into the female threaded portion 3B provided on the upper end side of the inner cylinder 3. That is, the closing member 7 is fixed to the inner cylinder 3 by screwing the male threaded part 7D of the small diameter part 7A and the female threaded part 3B of the inner cylinder 3.

Further, the outer periphery of the large diameter portion 7B is a male threaded portion 7E. The male threaded portion 7E is screwed into a female threaded portion 5A provided on the upper end side of the intermediate cylinder 5. That is, the closing member 7 is fixed to the intermediate cylinder 5 by screwing the male threaded part 7E of the large diameter part 7B and the female threaded part 5A of the intermediate cylinder 5. The protrusion 7C is inserted into an insertion hole 10A provided in the upper member 10.

The closing member 7 is provided with a through hole 7F that axially passes through the small diameter portion 7A, the large diameter portion 7B, and the protruding portion 7C. The through hole 7F corresponds to a communication hole that communicates the inside of the inner cylinder 3 with the outside. The opening of the through hole 7F on the side of the protrusion 7C, which is the upper end side, is closed with a bolt 11. That is, the upper end side (protrusion 7C side) of the through hole 7F is a female thread, and the bolt 11 is screwed into this female thread. The bolt 11 corresponds to a plug member for opening and closing the through hole 7F.

The upper member 10 serving as the second end member includes a disk portion 10B having a larger diameter than the outer cylinder 23 of the movable element 21. An insertion hole 10A through which the protrusion 7C of the closing member 7 and the bolt 11 are inserted is provided at the radial center of the disc portion 10B. Further, the upper member 10 includes an attachment eye 10C that is attached to a sprung member of a vehicle, for example. The attachment eye 10C is integrally provided on the disc portion 10B. The upper member 10, together with the closing member 7, constitutes an attachment member for attaching the inner tube 3, intermediate tube 5, and outer shell 4 to the sprung member.

A cylindrical outer shell 4 extending downward over the entire circumference is attached to the outer peripheral edge of the disc portion 10B. The outer shell 4 covers the intermediate cylinder 5. Further, the outer shell 4 covers the upper side or the upper half of the outer cylinder 23 of the movable element 21 . Thereby, the stator 2 is provided with an outer shell 4 as a cover member located on the outer peripheral side of the outer cylinder 23. The upper member 10 and the outer shell 4 protect the intermediate cylinder 5 and the outer cylinder 23 from flying stones and the like when the vehicle is running.

The intermediate tube 5 is formed as a cylindrical tube member (cylindrical member) extending in the vertical direction (axial direction). The intermediate cylinder 5 is provided on the outer peripheral side of the inner cylinder 3. The upper end side of the intermediate cylinder 5 is attached to the large diameter portion 7B of the closing member 7. That is, the upper end side of the intermediate cylinder 5 is closed by the closing member 7. A lower end portion of the intermediate cylinder 5 is connected to an annular member 12 provided above the armature 13. The intermediate cylinder 5 presses the armature 13 toward the bottom member 6 via the annular member 12 by screwing with the large diameter portion 7B of the closing member 7. Thereby, the armature 13 is integrated with the bottom member 6, the annular member 12, the intermediate cylinder 5, the inner cylinder 3, and the closing member 7 to constitute the stator 2 which becomes the first member.

The armature 13 is formed in an annular shape. The inner cylinder 3 is inserted into the inner circumference (space on the inner circumference side) of the armature 13 . The armature 13 includes a substantially cylindrical core member 14 made of, for example, a magnetic material, and a plurality of coils 15A, 15B, 15C (i.e., a u-phase coil 15A, a v-phase coil) that are provided on the core member 14 and constitute a coil member 15. 15B, and a w-phase coil 15C). The core member 14 is provided on the lower end side of the inner cylinder 3. The core member 14 has a coil member 15, that is, coils 15A, 15B, and 15C on its outer periphery. Note that the number of coils 15A, 15B, and 15C is not limited to three, but can be changed as appropriate, such as six, nine, or twelve, depending on design specifications and the like.

Although not shown, a stroke sensor that detects the stroke amount of the electromagnetic actuator 1 is provided on the outer peripheral side of the annular member 12. The stroke sensor measures the absolute position or relative position in the axial direction between the armature 13 and the mover 21 (permanent magnets 22, 22). The stroke sensor may be configured with a magnetic sensor such as a magnetoresistive element or a Hall element (Hall IC) that detects a magnetic field (magnetic field, magnetic flux) and polarity (magnetic pole) using changes in magnetic resistance, the Hall effect, etc. Can be done.

The stroke sensor detects the magnetic field, polarity, etc. of the permanent magnets 22, 22 of the mover 21 that are displaced in the axial direction with respect to the stroke sensor. Thereby, the axial position (stroke position) of the permanent magnets 22, 22 can be calculated, and the necessary current can be supplied to the coils 15A, 15B, 15C of the stator 2 according to this position. Note that the stroke sensor is not limited to a magnetic sensor, but also includes various stroke sensors (displacement sensors) that can measure the relative position or absolute position in the axial direction between the armature 13 and the mover 21, such as a laser displacement meter. ) can be used.

The lower end of the movable element 21 is connected to an unsprung member of the vehicle. The movable element 21 is provided with a field composed of a plurality of permanent magnets 22, 22 extending in the axial direction of the movable element 21 and formed in an annular shape. The movable element 21 has an outer cylinder 23 that is a cylindrical member and a lower member 25 that closes the lower end side of the outer cylinder 23. That is, the mover 21 includes an outer cylinder 23 as a yoke arranged on the outer peripheral side of the armature 13 (core member 14 and coils 15A, 15B, 15C), and a lower member 25 fixed to the lower end side of the outer cylinder 23. a rod 24 located inside the outer cylinder 23 and extending in the axial direction from the lower member 25; and a plurality of magnetic members provided in the outer cylinder 23 and facing the coils 15A, 15B, and 15C with gaps in the radial direction. Permanent magnets 22, 22 are provided. Further, the movable element 21 includes a ring member 26 attached to the upper end side of the outer cylinder 23.

The outer cylinder 23 and the lower member 25 constitute a first cylinder, and the lower member 25 corresponds to the bottom of the first cylinder. The outer cylinder 23 is formed using, for example, a magnetic material that forms a magnetic path when placed in a magnetic field. A plurality of permanent magnets 22, 22 are arranged radially inside the outer cylinder 23 in line with each other in the axial direction. By using a magnetic material, the outer cylinder 23 forms a magnetic circuit of the electromagnetic actuator 1, and also functions as a cover to prevent the magnetic flux of the permanent magnets 22, 22 from leaking to the outside. The outer tube 23 is formed as a cylindrical tube member (cylindrical member) extending in the vertical direction (axial direction). The outer cylinder 23 is provided on the outer peripheral side of the inner cylinder 3 and the intermediate cylinder 5 of the stator 2 .

A lower end portion, which is one end portion, of the outer cylinder 23 is attached to an unsprung member (one of the two members). In this case, the lower end side of the outer cylinder 23 is fixed to the lower member 25. That is, the lower end of the outer cylinder 23 extends in the axial direction to the position of the lower member 25 and is closed by the lower member 25. The lower end side of the outer cylinder 23 is fixed to the lower member 25 with bolts 27.

The lower member 25 serving as the first end member includes a disk portion 25A having a larger diameter than the inner cylinder 3 (and intermediate cylinder 5) of the stator 2. The disk portion 25A is provided with a bolt insertion hole 25B into which the bolt 27 is inserted. A screw hole 23A is provided at the lower end of the outer cylinder 23 in correspondence with the bolt insertion hole 25B of the disc portion 25A. The outer cylinder 23 and the disc part 25A are fixed by bolts 27 that are inserted into the bolt insertion holes 25B of the disc part 25A and screwed into the screw holes 23A of the outer cylinder 23.

Further, the disc portion 25A is provided with a through hole 25C that is located on the inner diameter side of the bolt insertion hole 25B and penetrates in the axial direction. The through hole 25C corresponds to a second communication hole that communicates the inside of the outer cylinder 23 with the outside. The through hole 25C is closed with a bolt 28. That is, the through hole 25C has a female thread, and the bolt 28 is screwed into this female thread. The bolt 28 corresponds to a second plug member for opening and closing the through hole 25C.

The lower member 25 includes an attachment eye 25D that is attached to, for example, an unsprung member of a vehicle. The attachment eye 25D is integrally provided on the disc portion 25A. The lower member 25 constitutes an attachment member for attaching the outer cylinder 23 to the unsprung member. The lower member 25 is provided with a rod 24 located on the opposite side in the axial direction from the attachment eye 25D and extending from the lower member 25 inside the armature 13 in the axial direction.

The rod 24 is located inside the outer cylinder 23. In this case, the rod 24 is inserted into the inner cylinder 3. That is, the rod 24 extends from the lower member 25 (disk portion 25A) toward the opening side of the outer cylinder 23, that is, toward the ring member 26 side. The rod 24 has a lower end portion, which is one end portion, attached to the lower member 25 (disk portion 25A). The rod 24 has an upper end, which is the other end, extending through the through hole 6D of the bottom member 6 into the inner cylinder 3, which is the inner peripheral part of the armature 13. For example, the rod 24 may be formed integrally with the lower member 25, or the rod 24, which is separate from the lower member 25, may be fixed to the lower member 25 by screwing.

A piston 29 is provided on the tip side of the rod 24. The piston 29 slides on the inner surface of the inner cylinder 3 and divides the inside of the inner cylinder 3 into two chambers. Further, on the outer periphery of the piston 29, a communication passage 29A is provided that communicates the two chambers partitioned by the piston 29. The rod 24 is relatively displaced in the axial direction within the inner cylinder 3. In this case, the outer circumferential surface of the piston 29 and the inner circumferential surface of the inner cylinder 3 slide, and the outer circumferential surface of the rod 24 and the sliding member provided in the bottom member 6 (through hole 6D) slide. As a result, the rod 24 is guided into the inner cylinder 3.

The ring member 26 is provided at the upper end, which is the other end of the outer tube 23 . The ring member 26 is formed in an annular shape, and is fixedly attached to the outer cylinder 23 by, for example, screwing or caulking. The ring member 26 partitions the outer periphery of the intermediate cylinder 5 from the outside. Further, the ring member 26, for example, prevents the permanent magnets 22, 22 from slipping out of the outer cylinder 23, and positions the permanent magnets 22, 22 in the axial direction.

A sliding member (not shown) that slides on the outer peripheral surface of the intermediate cylinder 5 with low friction is provided on the inner peripheral side of the ring member 26. Furthermore, a seal member 26A is provided on the inner peripheral surface of the ring member 26 to seal between the intermediate cylinder 5 and the ring member 26. The intermediate cylinder 5 is displaced relative to the ring member 26 in the axial direction. In this case, the outer peripheral surface of the intermediate cylinder 5 and the sliding member provided on the inner peripheral side of the ring member 26 slide, so that the intermediate cylinder 5 is guided to the ring member 26 (i.e., the outer cylinder 23). .

A plurality of permanent magnets 22, 22 serving as a field are provided in the movable element 21. The permanent magnets 22 , 22 are magnetic members that generate a magnetic field, and are arranged in the outer cylinder 23 . In this case, the permanent magnets 22, 22 are each formed in an annular shape. The permanent magnets 22, 22 can be configured, for example, by a ring magnet integrally formed in a cylindrical shape, a segmented segment magnet formed into an annular shape by arranging a plurality of arc-shaped magnetic elements in the circumferential direction, or the like. can.

The permanent magnets 22, 22 are provided on the inner circumferential surface side of the outer cylinder 23 in parallel along the axial direction. Permanent magnets 22, 22 adjacent to each other in the axial direction have opposite polarities. For example, a permanent magnet with an S pole on the inner circumferential side and a N pole on the outer circumferential side is placed next to a permanent magnet with an N pole on the inner circumferential side and an S pole on the outer circumferential side. Note that the number of permanent magnets 22, 22 is not limited to the illustrated example. For example, a required number of permanent magnets 22, 22 can be arranged according to the stroke amount.

Next, the operation of the electromagnetic actuator 1 will be explained. For example, the electromagnetic actuator 1 constitutes an electromagnetic suspension device for a vehicle together with a spring (not shown). The electromagnetic suspension device can be interposed, for example, between a sprung member (vehicle body side) and an unsprung member (wheel side) of a vehicle in a vertically disposed state (as an inverted type) in an upward and downward direction. In this case, when the vehicle vibrates upward or downward, force acts on the electromagnetic suspension device in the stroke direction (axial direction). In response to this force, the stator 2 and movable element 21 of the electromagnetic actuator 1 move relative to each other. At this time, the electromagnetic actuator 1 causes the thrust (damping force ) can be adjusted. As a result, the ride comfort and steering stability of the vehicle can be improved.

Incidentally, the inner cylinder 3 through which the rod 24 strokes preferably has a sealed structure in order to prevent water from condensation from getting mixed into the oil. However, when the inner cylinder 3 has a sealed structure, the pressure inside the inner cylinder 3, that is, the pressure in the space marked "A" in FIG. 1, changes as the rod 24 strokes inside the inner cylinder 3. For this reason, for example, if the rod 24 is assembled in the maximum extension state (that is, if the inner cylinder 3 is sealed in the maximum extension state), a large reaction force will be applied to the rod 24 when the mover 21 (rod 24) contracts. (air reaction force) is added. As a result, the thrust force may be biased between the extension stroke and the contraction stroke of the electromagnetic actuator 1.

Furthermore, when the outer cylinder 23 is made into a sealed structure, the stroke of the stator 2 inside the outer cylinder 23 changes the pressure inside the outer cylinder 23, that is, the pressure in the space marked "B" in FIG. . Therefore, for example, when the stator 2 and the mover 21 are assembled in the maximum extension state (that is, when the outer cylinder 23 is sealed in the maximum extension state), the stator 2 and the mover 21 are contracted. A large reaction force (air reaction force) is applied to the stator 2 and the movable element 21. As a result, the thrust force may be biased between the extension stroke and the contraction stroke of the electromagnetic actuator 1.

Therefore, in the embodiment, the rod 24 is assembled, that is, the inner cylinder 3 is sealed, with an intermediate length (a length other than the maximum length and the minimum length). Further, in order to improve the degree of freedom in length (stroke) when sealing the inner cylinder 3, a bolt 11 for sealing the inner cylinder 3 is provided. Further, the assembly of the outer cylinder 23, that is, the sealing of the outer cylinder 23 is performed at an intermediate length (a length other than the maximum length and the minimum length). Further, in order to improve the degree of freedom in the length (stroke) when sealing the outer cylinder 23, a bolt 28 for sealing the outer cylinder 23 is provided. Hereinafter, a configuration for suppressing uneven thrust of the electromagnetic actuator 1 will be described in detail.

First, the electromagnetic actuator 1 is provided between two members that move relative to each other (for example, between an unsprung member and a sprung member of a vehicle). The electromagnetic actuator 1 includes a mover 21 as a first member attached to one of the two members (for example, an unsprung member), and a fixed member as a second member attached to the other of the two members (for example, an unsprung member). Has two children. Further, the electromagnetic actuator 1 includes a coil member 15 (coils 15A, 15B, 15C) and permanent magnets 22, 22 as power means that operate so that the movable element 21 and the stator 2 move relative to each other.

The mover 21 includes an outer cylinder 23 and a lower member 25 as a first cylinder, and a rod 24. The first cylinder is provided with a lower member 25 serving as a bottom at one end (lower end). That is, the bottom of the first cylinder is formed by a lower member 25 serving as a first end member that is detachable from the outer cylinder 23. The other end (upper end) of the first cylinder is open. The rod 24 extends from the bottom (lower member 25) in the first cylinder toward the other open end (upper end). A piston 29 is attached to the rod 24. That is, the rod 24 has a piston 29 on the tip side.

The stator 2 includes an inner cylinder 3 as a second cylinder, a bottom member 6, and a closing member 7. A rod 24 is inserted into the second cylinder. The second cylinder slides on the outer periphery of the rod 24 and has one end (lower end) closed. In this case, the inner cylinder 3 slides on the outer circumference of a piston 29 provided on the rod 24. That is, a piston 29 is fixed to the rod 24, which slides on the inner periphery of the inner cylinder 3, divides the inside of the inner cylinder 3 into two chambers, and includes a communication passage 29A that communicates the two chambers. Further, one end (lower end) of the inner cylinder 3 is closed by a bottom member 6. That is, one end (lower end) of the second cylinder is formed by a detachable bottom member 6. The through hole 6D of the bottom member 6 slides on the outer periphery of the rod 24 via a sliding member. On the other hand, the closing member 7 is provided at the other end (upper end) of the second cylinder.

Air is sealed in the second cylinder (inner cylinder 3 and bottom member 6) as a first fluid whose volume changes depending on pressure. In addition, inside the second cylinder (inner cylinder 3 and bottom member 6), air as the first fluid is replaced with a lubricant as a second fluid (for example, lubricant oil shown only in FIG. 30) is included. As the lubricant, in addition to the lubricating oil 30, various other lubricants such as grease can be used. The closing member 7 is provided with a through hole 7F that serves as a communication hole that communicates the inside of the second cylinder (inner cylinder 3 and bottom member 6) with the outside. The closing member 7 has a bolt 11 as a plug member that can arbitrarily open and close the through hole 7F. In the embodiment, the pressure within the second cylinder (inner cylinder 3 and bottom member 6), that is, the pressure in the space marked "A" in FIG. At the minimum length, the pressure becomes higher than the atmospheric pressure, and at the maximum length, when the rod 24 is fully discharged from the inner cylinder 3, the pressure becomes lower than the atmospheric pressure. That is, the pressure in the air chamber in the inner cylinder 3 becomes positive pressure at the minimum length of time and negative pressure at the maximum length of time.

Furthermore, in the embodiment, air is also sealed inside the first cylinder (outer cylinder 23 and lower member 25) as a first fluid whose volume changes depending on pressure. The lower member 25 (disk portion 25A) as the first end member is provided with a through hole 25C as a second communication hole that communicates the inside of the first cylinder (outer cylinder 23 and lower member 25) with the outside. ing. The lower member 25 has a bolt 28 as a second plug member that can arbitrarily open and close the through hole 25C. In the embodiment, the pressure inside the first cylinder (the outer cylinder 23 and the lower member 25), that is, the pressure in the space marked "B" in FIG. At the minimum length, the pressure becomes higher than the atmospheric pressure, and at the maximum length, when the relative position between the movable element 21 and the stator 2 becomes maximum, the pressure becomes lower than the atmospheric pressure. That is, the pressure in the air chamber in the outer cylinder 23 becomes positive pressure at the minimum length and negative pressure at the maximum length.

Next, the assembly process (manufacturing process) of the electromagnetic actuator 1, which is an actuator device, will be explained with reference to FIGS. 4 to 7. 4 to 7, the assembly process of the electromagnetic actuator 1 is shown in order from (1) to (9). Further, in FIGS. 4 and 5, illustrations of the outer cylinder 23, the upper member 10, etc. that are assembled in a later step are omitted. (6) of FIG. 5 and (6) of FIG. 6 differ in that the outer cylinder 23, the upper member 10, etc. are omitted or shown.

FIG. 4 (1) shows a part of the stator 2 and a part of the movable element 21 in an exploded state. In the steps (1) to (2) in FIG. 4, the bottom member 6 is inserted into the rod 24 of the "rod assembly" to which the lower member 25 and the rod 24 are fixed. In the steps (2) to (3) in FIG. 4, a piston 29 is attached to the tip of the rod 24. In this manner, in the embodiment, after the bottom member 6 is inserted into the rod 24, the piston 29 is attached to the rod 24.

The steps from (3) in FIG. 4 to (4) in FIG. , the inner cylinder 3 and the bottom member 6 are screwed together. That is, in the steps from (3) in FIG. 4 to (4) in FIG. 5, the rod 24 is inserted into the inner cylinder 3. Then, as shown in FIG. 5(4), the internal cylinder 3 and the bottom member 6 are fixed by screwing together the female threaded part 3A of the internal cylinder 3 and the male threaded part 6C of the bottom member 6.

Note that the inner cylinder 3 and armature 13 of the "second cylinder assembly" are not fixed. Further, the "second cylinder assembly" may be configured by the inner cylinder 3, the armature 13, and the annular member 12. That is, a “second cylinder assembly” composed of the inner cylinder 3, the armature 13, and the annular member 12 may be inserted into the rod 24. Alternatively, the armature 13 and the annular member 12 may be inserted into the rod 24 in order after the inner cylinder 3 is inserted into the rod 24 and the inner cylinder 3 and the bottom member 6 are screwed together. In any case, before inserting the rod 24 into the inner cylinder 3, the bottom member 6 is inserted into the rod 24.

In steps (4) to (5) in FIG. 5, the closing member 7 is attached to the inner cylinder 3. That is, the small diameter portion 7A of the closing member 7 is inserted into the inner cylinder 3 and screwed. In this case, as shown in (5) of FIG. 5, the inner cylinder 3 and the closing member 7 are fixed by screwing the female threaded part 3B of the inner cylinder 3 and the male threaded part 7D of the closing member 7. Note that lubricating oil 30 (see FIG. 2) as a second fluid is placed in the inner cylinder 3. This step of putting the lubricating oil 30 into the inner cylinder 3 is performed before fixing the closing member 7 to the inner cylinder 3. That is, the lubricating oil 30 is applied before the state shown in FIG. 5 (5), that is, before the closing member 7 is attached to the inner cylinder 3. Furthermore, when using a material with high viscosity and low fluidity as the lubricating oil 30, for example, grease, it may be put into the inner cylinder 3 before inserting the rod 24 into the inner cylinder 3, or It may be put into the inner cylinder 3 after the cylinder 3 and the bottom member 6 are fixed.

In addition, when using a material with high viscosity and low fluidity as the lubricating oil 30, for example, grease, it is necessary to Lubricating oil 30 may be put into the inner cylinder 3 in both cases. For example, by putting lubricating oil 30 into the inner cylinder 3 before fixing the inner cylinder 3 and the bottom member 6, the sliding resistance between the piston 29 and the inner cylinder 3 when the rod 24 is inserted into the inner cylinder 3 can be reduced. can be made smaller. Furthermore, by adding the lubricating oil 30 after fixing the inner cylinder 3 and the bottom member 6, it is possible to prevent the lubricating oil 30 from leaking from inside the inner cylinder 3.

The amount of lubricating oil 30 is set to be an amount that can prevent damage to the inner cylinder 3 due to an increase in the internal pressure of the inner cylinder 3 and the rod 24 not being able to stroke (lock) when the length is at its minimum. Specifically, the amount of lubricating oil 30 is determined by the volume inside the inner cylinder 3 at the minimum length (volume inside the inner cylinder 3 - volume of the rod 24 inserted into the inner cylinder 3 - volume of the piston 29). The amount should be less than that. For example, as shown in FIG. 2, in order to maintain lubricity, the lubricating oil 30 may be injected to such an extent that the end of the rod 24 or the entire piston 29 is immersed in the lubricating oil 30 at its maximum length. preferable.

In the steps (5) to (6) in FIG. 5, the intermediate cylinder 5 is attached to the closing member 7. That is, the closing member 7 is inserted into the intermediate cylinder 5 and screwed. In this case, as shown in (6) of FIG. 5 and (6) of FIG. 7 and fixed. The annular member 12 and armature 13 are sandwiched between the intermediate cylinder 5 and the bottom member 6, and their axial positions are fixed. Steps (6) to (7) in FIG. 6 connect the outer cylinder 23 and the lower member 25. That is, the assembly shown in FIG. 5(6) is inserted into the outer cylinder 23, and the outer cylinder 23 and the lower member 25 are bolted together. Specifically, with the lower end of the outer cylinder 23 in contact with the lower member 25, the bolt 27 is screwed into the screw hole 23A of the outer cylinder 23, thereby fixing the outer cylinder 23 and the lower member 25.

The steps from (7) in FIG. 6 to (8) in FIG. (approximately half) the through hole 7F and the through hole 25C are closed. That is, the relative position of the movable element 21 and the stator 2 is extended from the state shown in (7) in FIG. 6 to the state shown in (8) in FIG. 7, and air is introduced into the inner cylinder 3. Then, with the relative position of the movable element 21 and the stator 2 as shown in (8) in FIG. . Further, a bolt 28 serving as a plug member is screwed into the through hole 25C of the lower member 25 to seal the inside of the outer cylinder 23. The maximum length (maximum extension) is, for example, when the lower surface of the piston 29 is in contact with a step provided on the inner peripheral surface of the lower end of the inner cylinder 3 (or the upper surface of the small diameter portion 6A of the bottom member 6) (see Fig. Corresponds to 2). The minimum length (minimum reduction) corresponds to, for example, a state in which the lower surface of the bottom member 6 is in contact with the upper surface of the lower member 25 (disk portion 25A).

The intermediate length for sealing the inner cylinder 3 and/or the intermediate length for sealing the outer cylinder 23 may be other than the maximum length and minimum length. For example, the intermediate length can be half (approximately half) the length between the maximum length and the minimum length. However, the present invention is not limited to this, and the intermediate length may be shifted from a half (approximately half) between the maximum length and the minimum length. The intermediate length can be set, for example, between the maximum length and the minimum length so that the reaction force (thrust) in the extension stroke and the contraction stroke falls within a desired range. Further, the intermediate length when the inside of the inner cylinder 3 is sealed and the intermediate length when the inside of the outer cylinder 23 is sealed may be made different.

In steps (8) to (9) in FIG. 7, the upper member 10 is bolted to the closing member 7. That is, with the lower surface of the upper member 10 (disc portion 10B) in contact with the upper surface of the closing member 7 (large diameter portion 7B), the upper member 10 (disc portion 10B) and the closing member 7 (large diameter portion 7B) ) are fixed with bolts 9.

As described above, the assembly process (manufacturing process) of the embodiment includes the following steps (A), (B), (C), (D), and (E). (A) Step of inserting the rod 24 into the second cylinder (inner cylinder 3, bottom member 6). That is, the steps (1) to (2) in FIG. 4 and the steps (3) to (4) in FIG. 5. (B) The closing member 7 is fixed to the other end (upper end) of the inner cylinder 3, and the position (maximum A step in which air is introduced into the inner cylinder 3 as a first fluid whose volume changes due to pressure at a position other than the length and a position other than the minimum length) and the inner cylinder 3 is closed. That is, the steps (4) to (5) in FIG. 5 and the steps (7) to (8) in FIG. 7. (C) Before fixing the closing member 7, a step of introducing lubricating oil 30 as a second fluid, which has a different compressibility depending on pressure than air, into the inner cylinder 3. That is, the step of putting the lubricating oil 30 into the inner cylinder 3 in any of the states shown in FIG. 4 (1) to FIG. 5 (4). For example, when using grease with high viscosity and low fluidity as the lubricating oil 30, the lubricating oil 30 can be added in at least one of (1) in FIG. 4 to (4) in FIG. 5. For example, if the lubricating oil 30 has low viscosity and high fluidity, it can be inserted at (4) in FIG. (D) A step of inserting the bottom member 6 into the rod 24 before inserting the rod 24 into the inner cylinder 3. That is, the steps (1) to (2) in FIG. (E) After inserting the bottom member 6 into the rod 24, a step of mounting the piston 29 on the rod 24. That is, steps (2) to (3) in FIG.

Furthermore, the assembly process (manufacturing process) of the embodiment includes the following process (F). (F) The lower member 25 is fixed to one end (lower end) of the outer cylinder 23, and a position other than the maximum length where the relative position between the movable element 21 and the stator 2 becomes the maximum and the minimum length where the relative position becomes the minimum (other than the maximum length, and a step in which air is introduced into the outer cylinder 23 as a first fluid whose volume changes due to pressure at a position other than the minimum length) and the outer cylinder 23 is closed. That is, the steps (6) to (7) in FIG. 6 and the steps (7) to (8) in FIG. 7.

As described above, according to the embodiment, the closing member 7 is fixed to the other end (upper end) of the inner cylinder 3, and the relative position of the movable element 21 and the stator 2 is "other than the maximum length and other than the minimum length". At the "position", air is introduced into the inner cylinder 3 to close the air chamber of the inner cylinder 3 (the space marked "A" in FIGS. 1 and 7). Therefore, if the axial position of the rod 24 when the inner cylinder 3 is closed is the intermediate length (closed position), and the pressure inside the inner cylinder 3 at that time is atmospheric pressure (closed pressure), then the The pressure becomes higher than atmospheric pressure as the rod 24 is displaced from the intermediate length (closed position) to the contracted side. Further, the pressure inside the inner cylinder 3 becomes lower than atmospheric pressure as the rod 24 is displaced from the intermediate length (closed position) to the extension side.

That is, the pressure inside the inner cylinder 3 (the pressure in the space marked "A" in FIGS. 1 and 7) "simply increases" or "simply decreases" relative to the atmospheric pressure as the rod 24 is displaced. rather than "increase and decrease" relative to atmospheric pressure. Therefore, the reaction force based on the pressure of the gas (air) in the inner cylinder 3 (the air reaction force applied to the rod 24) can be reduced, for example, compared to the case where the inner cylinder 3 is closed at the maximum length. As a result, the bias of the reaction force and, by extension, the bias of the thrust of the electromagnetic actuator 1 can be reduced.

According to the embodiment, the lower member 25 is fixed to one end (lower end) of the outer cylinder 23, and when the relative position of the mover 21 and the stator 2 is "a position other than the maximum length and other than the minimum length", the outer cylinder 23 The air chamber (the space marked "B" in FIGS. 1 and 7) of the outer cylinder 23 is closed by introducing air therein. Therefore, if the relative position when the outer cylinder 23 is closed is the intermediate length (closed position), and the pressure inside the outer cylinder 23 at that time is atmospheric pressure (closed pressure), then the pressure inside the outer cylinder 23 is As the child 21 and stator 2 are relatively displaced from the intermediate length (closed position) to the contraction side, the pressure becomes higher than atmospheric pressure. Further, the pressure inside the outer cylinder 23 becomes lower than the atmospheric pressure as the movable element 21 and the stator 2 are displaced from the intermediate length (closed position) to the extended side.

In other words, the pressure inside the outer cylinder 23 (the pressure in the space marked "B" in FIGS. 1 and 7) "simply increases with respect to the atmospheric pressure" due to the relative displacement between the mover 21 and the stator 2. ” or “increases and decreases” relative to atmospheric pressure rather than “simply decreases.” For this reason, for example, compared to the case where the outer cylinder 23 is closed at the maximum length, the reaction force based on the pressure of the gas (air) inside the outer cylinder 23 (the air reaction force applied to the mover 21 and the stator 2) can be reduced. As a result, also from this point of view, it is possible to reduce the bias of the reaction force and, by extension, the bias of the thrust of the electromagnetic actuator 1.

According to the embodiment, lubricating oil 30 is put into the inner cylinder 3 before the closing member 7 is fixed to the inner cylinder 3. Therefore, not only air but also lubricating oil 30 can be introduced into the inner cylinder 3. That is, the lubricating oil 30 can be sealed inside the inner cylinder 3. Thereby, the sliding resistance between the inner cylinder 3 and the rod 24 can be reduced, and wear due to sliding can be suppressed.

According to the embodiment, before inserting the rod 24 into the inner cylinder 3, the bottom member 6 is inserted into the rod 24, and then the piston 29 is mounted on the rod 24. Therefore, the piston 29 having an outer diameter larger than the inner diameter of the bottom member 6 (in other words, the outer diameter of the rod 24) can be attached to the rod 24. In this case, by setting the outer diameter of the piston 29 to a size that allows it to slide on the inner circumference of the inner cylinder 3, when a lateral force is applied between the mover 21 and the stator 2, the piston 29 It is possible to suppress the movable element 21 and the stator 2 from moving in the bending direction.

According to the embodiment, the pressure in the inner cylinder 3 is higher than atmospheric pressure at the minimum length and lower than atmospheric pressure at the maximum length. That is, the pressure within the inner cylinder 3 does not "simply increase" or "simply decrease" with respect to atmospheric pressure as the rod 24 is displaced, but "increases and decreases" with respect to atmospheric pressure. For this reason, for example, the reaction force based on the pressure of the gas (air) in the inner cylinder 3 (the air reaction force applied to the rod 24) is greater than when the pressure inside the inner cylinder 3 becomes atmospheric pressure at the maximum length. can be reduced. As a result, the bias of the reaction force and, by extension, the bias of the thrust of the electromagnetic actuator 1 can be reduced.

According to the embodiment, the pressure within the outer cylinder 23 is higher than atmospheric pressure at the minimum length and lower than atmospheric pressure at the maximum length. That is, the pressure inside the outer cylinder 23 does not "simply increase" or "simply decrease" with respect to atmospheric pressure due to the relative displacement between the movable element 21 and the stator 2, but "increase" with respect to atmospheric pressure. and decrease”. For this reason, for example, compared to the case where the pressure inside the outer cylinder 23 becomes atmospheric pressure at the maximum length, the reaction force based on the pressure of the gas (air) inside the outer cylinder 23 (the force exerted on the mover 21 and the stator 2 air reaction force) can be reduced. As a result, also from this point of view, it is possible to reduce the bias of the reaction force and, by extension, the bias of the thrust of the electromagnetic actuator 1.

According to the embodiment, a piston 29 that slides on the inner circumference of the inner cylinder 3 is fixed to the rod 24, and the piston 29 is provided with a communication passage 29A that communicates two chambers in the inner cylinder 3. . Therefore, when a lateral force is applied between the movable element 21 and the stator 2, it is possible to suppress the piston 29 from moving the movable element 21 and the stator 2 in the bending direction. Moreover, since the two chambers in the inner cylinder 3 are communicated with each other by the communication passage 29A of the piston 29, it is possible to suppress the difference in pressure between the two chambers in the inner cylinder 3 from increasing. Thereby, also from this point of view, it is possible to reduce the bias of the reaction force and, by extension, the bias of the thrust of the electromagnetic actuator 1.

According to the embodiment, the closing member 7 has a through hole 7F that communicates between the inside of the inner cylinder 3 and the outside, and a bolt 11 that can open and close the through hole 7F as desired. Therefore, the inner cylinder 3 can be closed while the relative position between the movable element 21 and the stator 2 (that is, the axial position of the rod 24) is at a desired position. For example, with the through hole 7F open, the relative position between the mover 21 and the stator 2 (i.e., the axial position of the rod 24) is set to an intermediate length (desired length), and in this state, the bolt 11 is inserted through the shaft. Close hole 7F. Thereby, the inner cylinder 3 can be closed at atmospheric pressure at an intermediate length (desired length). In this case, this operation can be easily performed by opening and closing the through hole 7F with the bolt 11. Therefore, in addition to improving the workability when closing the inner cylinder 3, there is also freedom in the relative position of the mover 21 and stator 2 (i.e., the axial position of the rod 24) when closing the inner cylinder 3. You can improve your degree.

According to the embodiment, the lower member 25 (disk portion 25A) has a through hole 25C that communicates between the inside of the outer cylinder 23 and the outside, and a bolt 28 that can open and close the through hole 25C as desired. Therefore, the outer cylinder 23 can be closed while the movable element 21 and the stator 2 are in a desired relative position. For example, with the through hole 25C open, the relative position between the movable element 21 and the stator 2 is set to an intermediate length (desired length), and in this state, the through hole 25C is closed with the bolt 28. Thereby, the outer cylinder 23 can be closed at atmospheric pressure at the intermediate length (desired length). In this case, this operation can be easily performed by opening and closing the through hole 25C with the bolt 28. Therefore, in addition to improving the workability when closing the outer tube 23, the degree of freedom in the relative position of the movable element 21 and the stator 2 when closing the outer tube 23 can be improved.

Next, FIG. 8 shows a second embodiment. The feature of the second embodiment is that before the outer tube of the first cylinder and the first end member are connected (fixed), the relative position of the first member and the second member is set to a length other than the maximum length and the minimum length. At the position, air is admitted into the second cylinder and the second cylinder is closed. Note that, in the second embodiment, the same components as those in the first embodiment described above are given the same reference numerals, and the explanation thereof will be omitted.

In the first embodiment described above, after the outer cylinder 23 and the lower member 25 are fixed with the bolts 27 in the steps (6) to (7) in FIG. 6, the steps (7) to (7) in FIG. In step 8), the relative position of the movable element 21 and the stator 2 is set to an intermediate length, and the through holes 7F and 25C are closed. In contrast, in the second embodiment, the process proceeds from (6) in FIG. 5 to (7) in FIG. That is, in the second embodiment, before fixing the outer cylinder 23 and the lower member 31 with the bolts 27, the relative position of the movable element 21 and the stator 2 is set to an intermediate length, and the through hole 7F is closed. Additionally, in the second embodiment, the lower member 31 does not include the through hole 25C and bolt 28 like the lower member 25 of the first embodiment.

That is, in the second embodiment, the lower member 31 corresponding to the bottom (first end member) of the first cylinder has a disk portion 31A and a mounting eye 31C. The disc portion 31A is provided with a bolt insertion hole 31B through which a bolt 27 for fixing the lower member 31 and the outer cylinder 23 is inserted. 2 communicating holes) are not provided. Note that the lower member 25 of the first embodiment may be used in the second embodiment as well, for example, from the viewpoint of common parts. That is, in the second embodiment as well, the lower member 25 having the through hole 25C and the bolt 28 may be used.

Next, the assembly process (manufacturing process) of the second embodiment will be explained. Note that FIG. 8 shows the assembly process from (7) as the assembly process (manufacturing process) of the second embodiment. The steps (1) to (6) are similar to the steps (1) to (6) shown in FIGS. 4 and 5 of the first embodiment. The steps from (6) in FIG. 5 to (7) in FIG. (approximately half) the through hole 7F is closed. That is, the relative positions of the movable element 21 and the stator 2 are extended from the state shown in (6) in FIG. 5 to the state shown in (7) in FIG. 8, and air is introduced into the inner cylinder 3. Then, with the relative position of the movable element 21 and the stator 2 as shown in (7) in FIG. 8, the bolt 11 serving as a plug member is screwed into the through hole 7F of the closing member 7 to seal the inside of the inner cylinder 3. .

Steps (7) to (8) in FIG. 8 connect the outer cylinder 23 and the lower member 31. That is, the assembly shown in (7) of FIG. 8 is inserted into the outer cylinder 23, and the outer cylinder 23 and the lower member 31 are bolted together. Specifically, with the lower end of the outer cylinder 23 in contact with the lower member 31, the bolt 27 is screwed into the screw hole 23A of the outer cylinder 23, thereby fixing the outer cylinder 23 and the lower member 31. In steps (8) to (9) in FIG. 8, the upper member 10 is bolted to the closing member 7 with bolts 9.

In the second embodiment, the electromagnetic actuator 1 is assembled through the assembly process as described above, and its basic operation is not particularly different from that of the first embodiment described above. In particular, in the second embodiment, before fixing the outer cylinder 23 and the lower member 31 with the bolts 27, the relative position of the movable element 21 and the stator 2 is set to an intermediate length, and the through hole 7F is closed. Therefore, when the movable element 21 and the stator 2 are set to an intermediate length, the armature 13 (core member 14, coil member 15) and the permanent magnets 22, 22 are not closely opposed to each other. You can do the work you want to do with less force. Further, it is not necessary to provide a communication hole (second communication hole) in the disc portion 31A of the lower member 31, and there is no need for a bolt to close this communication hole. Thereby, the number of processing steps and the number of parts can be reduced.

In addition, in the first embodiment and the second embodiment, the case where the bolt 11 is used as a plug member for sealing the inner cylinder 3 has been described as an example. However, the present invention is not limited to this, and for example, other than bolts, various plug members such as pin members and plugs can be used as long as the inside of the inner cylinder 3 can be sealed. This also applies to the bolt 28 that seals the outer cylinder 23 of the first embodiment.

In the first embodiment and the second embodiment, the piston 29 is fixed (attached) to the rod 24, that is, the outer circumference of the rod 24 is slid onto the inner cylinder 3 via the piston 29. Explained using an example. However, the present invention is not limited to this, and for example, the piston may be omitted. For example, a configuration may be adopted in which the outer periphery of the rod slides only into the through hole of the bottom member, or a configuration in which the outer periphery of the rod slides into the inner periphery of the inner cylinder.

In the first embodiment and the second embodiment, the first fluid introduced into the inner cylinder 3 is air and the second fluid is lubricating oil. However, the present invention is not limited to this, and for example, a gas other than air such as nitrogen gas may be used as the first fluid, or a fluid other than liquid (semi-solid fluid) such as grease may be used as the second fluid. Good too. Furthermore, as the first fluid, various fluids other than gas can be used, such as a fluid that is a mixture of gas (for example, air, nitrogen gas) and liquid (for example, lubricating oil). This also applies to the second fluid.

In the first embodiment and the second embodiment, a cylindrical linear electromagnetic actuator is provided with coils 15A, 15B, 15C (coil member 15) provided in the core member 14 on the stator 2 side, and coils 15A, 15B, 15C (coil member 15) on the movable element 21 side. The explanation has been given by taking as an example the case where the magnet is configured with permanent magnets 22, 22 (magnetic members) provided in the outer cylinder 23 of the magnet. However, the present invention is not limited to this. For example, a cylindrical linear electromagnetic actuator may be configured by a coil (coil member) provided on the movable element side and a permanent magnet (magnetic member) provided on the stator side. .

In the first embodiment and the second embodiment, the stator 2 is attached to the sprung member of the vehicle, and the movable element 21 is attached to the unsprung member of the vehicle. However, the present invention is not limited to this, and for example, the stator may be attached to an unsprung member of the vehicle, and the movable element may be attached to a sprung member of the vehicle.

In the first embodiment and the second embodiment, the electromagnetic actuator 1 is installed vertically in a vehicle such as a railway vehicle or an automobile. The electromagnetic actuator may be installed in a horizontal position on a vehicle such as a railway vehicle.

In the first embodiment and the second embodiment, the electromagnetic actuator 1 is attached to a vehicle. However, the electromagnetic actuator is not limited to this. It may also be used as a shock absorber for machines, buildings, etc. Further, the electromagnetic actuator is not limited to a shock absorber, but can be used as an actuator device (drive device) for driving various devices.

In the first embodiment and the second embodiment, a linear motor having a circular cross-sectional shape, that is, a case where the stator 2 and the movable element 21 are formed into a cylindrical shape has been described as an example. However, the present invention is not limited to this, and may be configured by a linear motor having a cylindrical shape other than circular in cross section, such as a linear motor having an I-shaped (flat plate), rectangular, or H-shaped cross-sectional shape. You may.

Furthermore, in the first embodiment and the second embodiment, the electromagnetic actuator 1 configured as a linear motor has been described as an example of the actuator device. However, the actuator device is not limited to this, and for example, a configuration may be adopted in which a rod of a ball screw mechanism (rotation-linear motion conversion mechanism) is driven by an electric motor (rotary motor). That is, the power means of the actuator device is not limited to the electric linear motor in which the coils 15A, 15B, 15C and the permanent magnets 22, 22 are arranged in the axial direction, but can also be constituted by an electric motor (rotary motor) and a rotation-to-linear motion conversion mechanism. Various power means such as the above can be adopted.

According to the embodiment described above, the closing member is fixed to the other end of the second cylinder, and when the relative position of the first member and the second member is other than the maximum length and the minimum length, the closing member is fixed to the second cylinder. The second cylinder is closed with the first fluid. Therefore, if the axial position of the rod when the second cylinder is closed is defined as the "closed position" and the pressure inside the second cylinder at that time is defined as the "closed pressure", then the pressure inside the second cylinder is As the pressure moves from the closed position to the contraction side, the closed pressure increases. Moreover, the pressure in the second cylinder decreases from the closing pressure as the rod is displaced from the closing position to the extension side. That is, the pressure in the second cylinder "increases and decreases" with respect to the occlusion pressure, rather than "merely increases" or "simply decreases" with respect to the occlusion pressure as the rod is displaced. For example, consider a case where the second cylinder is closed at atmospheric pressure when the rod is positioned at a half (approximately half) length between the maximum length and the minimum length. In this case, the pressure in the second cylinder becomes higher than atmospheric pressure as the rod is displaced from half length to the contraction side, and as the rod is displaced from half length to the extension side. lower than atmospheric pressure. Therefore, for example, the reaction force based on the pressure of the first fluid in the second cylinder (the air reaction force applied to the rod) can be reduced compared to the case where the second cylinder is closed at the maximum length. As a result, it is possible to reduce the bias of the reaction force and, by extension, the bias of the thrust of the actuator device.

According to an embodiment, a second fluid is introduced into the second cylinder before securing the closure member. Therefore, not only the first fluid but also the second fluid can be put into the second cylinder. In this case, by adding a lubricant (for example, oil or grease) as the second fluid, the sliding resistance between the second cylinder and the rod can be reduced, and wear due to sliding can be suppressed.

According to an embodiment, before inserting the rod into the second cylinder, the bottom member is inserted into the rod and then the piston is mounted on the rod. Therefore, a piston having an outer diameter larger than the inner diameter of the bottom member (in other words, the outer diameter of the rod) can be attached to the rod. In this case, for example, by setting the outer diameter of the piston to a size that allows it to slide on the inner circumference of the second cylinder, when a lateral force is applied between the first member and the second member, the piston It is possible to suppress the first member and the second member from moving in the bending direction.

According to an embodiment, the pressure in the second cylinder is above atmospheric pressure during the minimum length and below atmospheric pressure during the maximum length. That is, the pressure in the second cylinder "increases and decreases" with respect to atmospheric pressure, rather than "merely increases" or "merely decreases" with respect to atmospheric pressure as the rod is displaced. For this reason, for example, the reaction force based on the pressure of the first fluid in the second cylinder (air reaction force applied to the rod) is reduced compared to the case where the pressure in the second cylinder becomes atmospheric pressure at the maximum length. can. As a result, it is possible to reduce the bias of the reaction force and, by extension, the bias of the thrust of the actuator device.

According to the embodiment, a piston that slides on the inner circumference of the second cylinder is fixed to the rod, and the piston includes a communication passage that communicates two chambers in the second cylinder. Therefore, when a lateral force is applied between the first member and the second member, it is possible to prevent the first member and the second member from moving in the bending direction by the piston. Moreover, since the two chambers in the second cylinder are communicated with each other by the communication path of the piston, it is possible to suppress the difference in pressure between the two chambers in the second cylinder from increasing. Thereby, also from this point of view, it is possible to reduce the bias of the reaction force and, by extension, the bias of the thrust of the actuator device.

According to an embodiment, a second fluid is enclosed within the second cylinder. Therefore, by enclosing a lubricant (for example, oil or grease) as the second fluid, the sliding resistance between the second cylinder and the rod can be reduced, and wear due to sliding can be suppressed.

According to the embodiment, the closing member includes a communication hole that communicates between the inside of the second cylinder and the outside, and a plug member that can arbitrarily open and close the communication hole. Therefore, the second cylinder can be closed while the relative position between the first member and the second member (that is, the axial position of the rod) is at a desired position. For example, with the communication hole open, the relative position of the first member and the second member (i.e., the axial position of the rod) is set to an intermediate length (desired length), and in this state, the communication hole is closed with the plug member. close. Thereby, the second cylinder can be closed at atmospheric pressure at the intermediate length (desired length). In this case, this operation can be easily performed by opening and closing the communicating hole with a plug member. Therefore, in addition to improving the workability when closing the second cylinder, the degree of freedom in the relative position of the first member and the second member (i.e., the axial position of the rod) when closing the second cylinder is improved. can be improved.

Note that the present invention is not limited to the embodiments described above, and includes various modifications. For example, the above-described embodiments have been described in detail to explain the present invention in an easy-to-understand manner, and the present invention is not necessarily limited to having all the configurations described. Furthermore, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. Furthermore, it is possible to add, delete, or replace some of the configurations of each embodiment with other configurations.

This application claims priority based on Japanese Patent Application No. 2021-076008 filed on April 28, 2021. The entire disclosure content of Japanese Patent Application No. 2021-076008 filed April 28, 2021, including the specification, claims, drawings, and abstract, is incorporated into the present application by reference in its entirety.

1 Electromagnetic actuator (actuator device) 2 Stator (second member) 3 Inner cylinder (second cylinder) 6 Bottom member (one end of second cylinder) 7 Closure member 7F Through hole (communication hole) 11 Bolt 15 Coil member (power means) 21 Mover (first member) 22 Permanent magnet (power means) 23 Outer cylinder (first cylinder) 24 Rod 25, 31 Lower member (bottom of first cylinder) 29 Piston 29A Communication passage

Claims (7)

A method for manufacturing an actuator device, the method comprising:
The actuator device is provided between two members that move relatively,
Further, the actuator device includes a first member attached to one of the two members and a second member attached to the other of the two members,
The first member is
a first cylinder having a bottom at one end and an open end;
a rod extending from the bottom of the first cylinder toward the other end that opens;
has
The second member is
a second cylinder into which the rod is inserted, slides on the outer periphery of the rod, and has one end closed;
a closing member provided at the other end of the second cylinder;
has
The method for manufacturing the actuator device includes:
inserting the rod into the second cylinder;
The closing member is fixed to the other end of the second cylinder, and moved to a position other than the maximum length where the relative position between the first member and the second member becomes the maximum and the minimum length where the relative position becomes the minimum, and a step of closing a first fluid whose volume changes depending on pressure in the second cylinder at atmospheric pressure;
A method for manufacturing an actuator device having the following. The method for manufacturing an actuator device according to claim 1,
Furthermore, before fixing the closing member, introducing a second fluid having a different compressibility due to pressure from the first fluid into the second cylinder,
A method for manufacturing an actuator device having the following. The method for manufacturing an actuator device according to claim 1 or 2,
The actuator device has a piston attached to the rod,
one end of the second cylinder is formed of a removable bottom member;
The method for manufacturing an actuator device further includes:
inserting the bottom member into the rod before inserting the rod into the second cylinder;
A method for manufacturing an actuator device, comprising the steps of: inserting the bottom member into the rod, and then mounting the piston on the rod. An actuator device,
The actuator device is provided between two members that move relatively,
Further, the actuator device includes:
a first member attached to one of the two members and a second member attached to the other of the two members;
power means that operates so that the first member and the second member move relative to each other;
It has
The first member is
a first cylinder having a bottom at one end and an open end;
a rod extending from the bottom of the first cylinder to the other end that opens;
has
The second member is
a second cylinder into which the rod is inserted, slides on the outer periphery of the rod, and has one end closed;
a closing member provided at the other end of the second cylinder;
has
A ring member closes a space between the opening at the other end of the first cylinder and the second member,
A first fluid whose volume changes depending on pressure is sealed in the second cylinder,
The pressure within the second cylinder is greater than atmospheric pressure at a minimum length at which the rod is fully inserted into the second cylinder, and at a maximum length at which the rod is fully expelled from within the second cylinder. when the rod is at an intermediate length, which is near an intermediate position between a maximum length and a minimum length within the second cylinder, the pressure is lower than atmospheric pressure;
The first fluid whose volume changes depending on the pressure is sealed in the first cylinder,
An actuator device characterized in that the pressure in the first cylinder is higher than atmospheric pressure at the minimum length, lower than atmospheric pressure at the maximum length, and atmospheric pressure at the intermediate length. . The actuator device according to claim 4,
The actuator device has a piston fixed to the rod, which slides on the inner periphery of the second cylinder, divides the inside of the second cylinder into two chambers, and includes a communication passage that communicates the two chambers. The actuator device according to claim 4 or 5,
In the actuator device, a second fluid whose compressibility under pressure is different from that of the first fluid is sealed in the second cylinder. The actuator device according to any one of claims 4 to 6,
The closing member is provided with a communication hole that communicates the inside of the second cylinder with the outside,
The closing member includes a plug member that can arbitrarily open and close the communication hole.