JP7427667B2 - 表面改質を施した多成分層状誘電体膜 - Google Patents

表面改質を施した多成分層状誘電体膜 Download PDF

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JP7427667B2
JP7427667B2 JP2021526213A JP2021526213A JP7427667B2 JP 7427667 B2 JP7427667 B2 JP 7427667B2 JP 2021526213 A JP2021526213 A JP 2021526213A JP 2021526213 A JP2021526213 A JP 2021526213A JP 7427667 B2 JP7427667 B2 JP 7427667B2
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dielectric
layers
polymeric material
layer
polymer
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JP2021530879A (ja
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ランゲ,ディーパック
ポンティング,マイケル
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ポリマープラス エルエルシー
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