JP7411683B2 - 光学計測のための高輝度の照明源 - Google Patents
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Description
本出願は、全体において本願に引用して援用する、発明者としてアムノン・マナッセン(Amnon Manassen)、アンディ・ヒル(Andy Hill)、オハッド・バッシャール(Ohad Bachar)、およびアヴィ・アブラモフ(Avi Abramov)の名前を挙げる、HIGH BRIGHTNESS ILLUMINATION SYSTEM FOR OVERLAY METROLOGYと題された、2019年4月19日に出願された、米国仮出願第62/836,254号の、米国特許法第119条(e)のもとでの利益を主張するものである。
Claims (20)
- 2つ以上の入力光源と、
前記2つ以上の入力光源からの照明を照明ビームへと組み合わせるための1つ以上のレンズを含む収集器であって、前記2つ以上の入力光源からの前記照明が前記収集器の入力開口における異なる部分を占有する、収集器と、
ビーム均一化器と
を含み、前記ビーム均一化器は、
前記照明ビームを受ける第1の非円形コアファイバと、
第2の非円形コアファイバと、
前記第1の非円形コアファイバからの前記照明ビームの遠視野分布を、前記第2の非円形コアファイバの入力面に中継するための1つ以上の結合レンズであって、前記第2の非円形コアファイバからの前記照明ビームの近視野出力分布および遠視野出力分布が、選択された許容範囲の中で均一である、1つ以上の結合レンズと
を含む照明源。 - 請求項1に記載の照明源であって、前記収集器は、前記2つ以上の入力光源からの照明を共通エタンデュへと組み合わせる照明源。
- 請求項1に記載の照明源であって、
前記2つ以上の入力光源からの照明を平行化するための2つ以上の平行化レンズであって、前記収集器が、前記2つ以上の平行化レンズから、前記2つ以上の入力光源からの照明を受ける、2つ以上の平行化レンズ
をさらに含む照明源。 - 請求項1に記載の照明源であって、前記第1の非円形コアファイバまたは前記第2の非円形コアファイバのうちの少なくとも1つにおけるコアが、正六角形、矩形、または正方形の形状を有する照明源。
- 請求項1に記載の照明源であって、
異なるエタンデュを有する2つ以上の出力ファイバと、
選択されたエタンデュにおける前記照明ビームをもたらすために、前記2つ以上の出力ファイバのうちの選択された出力ファイバ内へと前記照明ビームを選択的に結合するように構成されるファイバ結合器と
をさらに含む照明源。 - 請求項1に記載の照明源であって、前記2つ以上の入力光源のうちの少なくとも1つが、
コヒーレント光源
を含む照明源。 - 請求項6に記載の照明源であって、前記コヒーレント光源が、
レーザ源
を含む照明源。 - 請求項6に記載の照明源であって、レーザ源は、
超連続体レーザ源
を含む照明源。 - 請求項6に記載の照明源であって、
前記照明ビームにおけるスペックルを減ずるために、選択された時間枠の中で前記照明ビームの複数の非相関化された分布を生成するための、少なくとも1つの位相変動する光学要素を含むスペックル低減器
をさらに含む照明源。 - 請求項9に記載の照明源であって、前記スペックル低減器は、
可動な拡散器
を含む照明源。 - 請求項9に記載の照明源であって、前記スペックル低減器は、
前記第1の非円形コアファイバの入力面上の前記照明ビームの位置を変動させるように構成される運動可能な鏡
を含む照明源。 - 請求項11に記載の照明源であって、前記運動可能な鏡は、前記第1の非円形コアファイバの前記入力面にわたって前記照明ビームをオーバー走査する照明源。
- 請求項1に記載の照明源であって、前記2つ以上の光源のうちの少なくとも1つが、
インコヒーレント光源
を含む照明源。 - 請求項13に記載の照明源であって、前記インコヒーレント光源は、
レーザ維持プラズマ源またはランプ源のうちの少なくとも1つ
を含む照明源。 - 請求項1に記載の照明源であって、
可変スペクトルフィルタまたは可変強度フィルタのうちの少なくとも1つ
をさらに含む照明源。 - 照明ビームを受ける第1の非円形コアファイバと、
第2の非円形コアファイバと、
前記第1の非円形コアファイバからの前記照明ビームの遠視野分布を、前記第2の非円形コアファイバの入力面に中継するための1つ以上の結合レンズであって、前記第2の非円形コアファイバからの前記照明ビームの近視野出力分布および遠視野出力分布が、選択された許容範囲の中で均一である、1つ以上の結合レンズと
を含むビーム均一化器。 - 請求項16に記載のビーム均一化器であって、前記第1の非円形コアファイバは、選択された許容範囲の中で、前記第1の非円形コアファイバの入力面における前記照明ビームの空間的分布に関して、前記第1の非円形コアファイバの出力面における前記照明ビームの空間的分布を均一化するビーム均一化器。
- 請求項17に記載のビーム均一化器であって、前記第2の非円形コアファイバは、選択された許容範囲の中で、前記第2の非円形コアファイバの前記入力面における前記照明ビームの空間的分布に関して、前記第2の非円形コアファイバの出力面における前記照明ビームの空間的分布を均一化するビーム均一化器。
- 請求項16に記載のビーム均一化器であって、前記遠視野分布は、
前記第1の非円形コアファイバの出力面における前記照明ビームの角度的分布
を含むビーム均一化器。 - 請求項16に記載のビーム均一化器であって、前記第1の非円形コアファイバまたは前記第2の非円形コアファイバのうちの少なくとも1つにおけるコアが、正六角形、矩形、または正方形の形状を有するビーム均一化器。
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US16/430,861 US11156846B2 (en) | 2019-04-19 | 2019-06-04 | High-brightness illumination source for optical metrology |
US16/430,861 | 2019-06-04 | ||
PCT/US2020/028388 WO2020214746A1 (en) | 2019-04-19 | 2020-04-16 | High-brightness illumination source for optical metrology |
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