JP7397009B2 - Lidar出力信号のステアリングにおける位相の制御 - Google Patents
Lidar出力信号のステアリングにおける位相の制御 Download PDFInfo
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- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
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- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
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- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
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- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/34—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
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- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
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- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
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- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
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- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
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- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0085—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for modulating the output, i.e. the laser beam is modulated outside the laser cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/023—Mount members, e.g. sub-mount members
- H01S5/02325—Mechanically integrated components on mount members or optical micro-benches
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/50—Systems of measurement based on relative movement of target
- G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
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- G—PHYSICS
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- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
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- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
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Description
Claims (26)
- 基盤上に配置され、及び、各々が出力信号を伝送するように構成され、それぞれが、ファセットで終端する複数のステアリング導波路であって、出力信号が、前記ファセットを通ってチップから出射し、及び、結合し、LIDAR出力信号を形成するように、前記ファセットが配置されている複数のステアリング導波路、および
前記ステアリング導波路の少なくとも一部に配置され、及び、互いに隣接する前記ステアリング導波路上の前記出力信号間の位相差を調整するように構成された位相チューナ、
を有し、
前記ステアリング導波路は、
1μm以上、及び、4μm以下の直径、又は、高さを有し、
前記ステアリング導波路は、
それぞれ、リッジ間に位置する光伝送媒体のスラブ領域から離れて延びる光伝送媒体のリッジを含み、前記スラブ領域の厚さは、該スラブ領域が前記ファセットに近づくにつれて、減少する、LIDARチップ。 - 前記ファセットは、前記基盤の上面及び/又は下面に対して垂直であり、及び前記ファセットの面と前記ファセットにおける前記出力信号の伝送方向との間の最小角度が80°~90°の間である、
請求項1に記載のLIDARチップ 。 - 前記ステアリング導波路の長さは、
直線的に変化する、
請求項1に記載のLIDARチップ。 - システムに含まれる請求項1のチップであって、
前記システムは、さらに、
前記LIDAR出力信号が前記チップから離れる方向を変化させるように前記位相チューナを動作させる電子回路を有する、
LIDARチップ。 - 前記ステアリング導波路の少なくとも一部の幅は、
前記位相チューナと前記ファセットとの間で狭くなる、
請求項1に記載のLIDARチップ。 - 前記ステアリング導波路の少なくとも一部は、
それぞれ、前記位相チューナを除外する、
請求項1に記載のLIDARチップ。 - 前記ファセットは、
隣接するファセット間の分離が、1μm未満であるように配置される、
請求項1に記載のLIDARチップ。 - 前記ファセットは、
1.5μmより大きく、及び/又は、30μm未満のピッチで配置される、
請求項1に記載のLIDARチップ。 - 前記ステアリング導波路の少なくとも一部は、
それぞれ、テーパを有し、及び
前記テーパは、前記ステアリング導波路が前記ファセットに近づくにつれて、該ステアリング導波路の幅を減少するように構成されている、請求項1に記載のLIDARチップ。 - 前記ステアリング導波路は、
前記光伝送媒体のスラブ領域から離れて延伸する前記光伝送媒体のリッジを有し、及び、
前記ファセットに隣接する前記スラブ領域の一部は、
前記スラブ領域が前記ファセットに近づくにつれて、前記スラブ領域の厚さが増大するように、垂直にテーパ付けられている、
請求項1に記載のLIDARチップ。 - 前記LIDAR出力信号は、
前記ファセットを通して前記チップを出射する出力信号を結合することにより形成される複数のLIDAR出力信号のうちの1つであり、前記LIDAR出力信号の各々は、異なるレーザ共振器からの光を有している、
請求項1に記載のLIDARチップ。 - 前記LIDAR出力信号は、
前記ファセットを通して前記チップを出射する出力信号を結合することにより形成される複数のLIDAR出力信号のうちの1つであり、前記LIDAR出力信号の各々は、異なる波長を有している、
請求項1に記載のLIDARチップ。 - 前記スラブ領域の厚さは、
前記厚さTのスラブ領域の部分から厚さtのスラブ領域の減少した厚さの部分まで減少し、
前記厚さT:減少したスラブ領域の厚さ(t)の比は、
1.2:1より大きく、及び/又は、5:1未満である、
請求項1に記載のLIDARチップ。 - 前記厚さTのスラブ領域の部分は、
水平にテーパ付けられている、
請求項13に記載のLIDARチップ。 - 前記ステアリング導波路は、シングルモードである、
請求項13に記載のLIDARチップ。 - 前記厚さTから前記厚さtへの前記スラブ領域の厚さの減少は、
隣接するステアリング導波路の非テーパ部分の間で生じる、
請求項13に記載のLIDARチップ。 - 基盤上に配置され、及び、各々が出力信号を伝送するように構成され、それぞれが、ファセットで終端する複数のステアリング導波路であって、出力信号が、前記ファセットを通ってチップから出射し、及び、結合し、LIDAR出力信号を形成するように、前記ファセットが配置されている複数のステアリング導波路、および
前記ステアリング導波路の少なくとも一部に配置され、及び、互いに隣接する前記ステアリング導波路上の前記出力信号間の位相差を調整するように構成された位相チューナ
を有し、
前記ステアリング導波路は、1μm以上、及び、4μm以下の直径、又は、高さを有し、
前記ステアリング導波路は、光伝送媒体のスラブ領域から離れて延びる前記光伝送媒体のリッジを有し、
前記ステアリング導波路間のスラブ領域の部分は、
前記スラブ領域が前記ファセットに近づくにつれて、該スラブ領域の厚さが増大するように、垂直にテーパ付けられている、
LIDARチップ。 - 前記ステアリング導波路の長さは、
直線的に変化する、
請求項17に記載のLIDARチップ。 - システムに含まれる請求項17のLIDARチップであって、
前記システムは、さらに、
前記LIDAR出力信号が前記チップから離れる方向を変化させるように前記位相チューナを動作させる電子回路を有する、
LIDARチップ。 - 前記ステアリング導波路の少なくとも一部の幅は、
前記位相チューナと前記ファセットとの間で狭くなる、
請求項17に記載のLIDARチップ。 - 前記ステアリング導波路の少なくとも一部は、
それぞれ、前記位相チューナを除外する、
請求項17に記載のLIDARチップ。 - 前記ファセットは、
隣接するファセット間の分離が、1μm未満であるように配置される、
請求項17に記載のLIDARチップ。 - 前記ファセットは、
1.5μmより大きく、及び/又は、30μm未満のピッチで配置される、
請求項17に記載のLIDARチップ。 - 前記ステアリング導波路の少なくとも一部は、
それぞれ、テーパを有し、及び
前記テーパは、
前記ステアリング導波路が前記ファセットに近づくにつれて、該ステアリング導波路の幅が減少するように構成されている、
請求項17に記載のLIDARチップ。 - 前記ファセットは、
前記基盤の上面及び/又は下面に対して垂直であり、及び
前記ファセットの面と前記ファセットにおける前記出力信号の伝送方向との間の最小角度が80°~90°の間である、
請求項17に記載のLIDARチップ。 - 前記ステアリング導波路は、シングルモードの導波路である、
請求項17に記載のLIDARチップ。
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