JP7394924B1 - Multi-sensor position measurement system - Google Patents

Abstract

[Problem] An object of the present invention is to provide a multi-sensor position measurement system. The present invention discloses a multi-sensor position measurement system that mainly includes a base, a carrier provided with a first signal array and a second signal array, and a modular assembly. The modular assembly is provided on the base, and includes two Hall sensors for sensing changes in the magnetic field of the first signal array and two magnetoresistives for sensing changes in the magnetic field of the second signal array. It includes a sensor, a marking unit provided on the carrier, and a sensing element provided on the base, and then generates a reference signal, connects measurement results between other sensors, identifies the direction of return to origin, etc. and a first status sensor for sensing a signal generated by the marking unit. [Selection diagram] Figure 1

Description

The present invention relates to position measurement technology, and particularly to a multi-sensor position measurement system.

Conventional position measurement systems have usually used Hall sensors for detection, but the drawbacks are that the accuracy is low, that is, about ±0.25 mm, and the resolution is not high, so Hall sensors have been used in the high-precision industrial field. has been limited in its application.

In addition, to ensure the accuracy of the measurement position, initialization is normally performed, but if there are too many sensors and carriers, the initialization process becomes very complicated.

Therefore, it is necessary for those skilled in the art to consider how to reduce the cost of the measurement system, while at the same time simplifying the initialization process and improving the accuracy.

Therefore, the main objective of the present invention is to provide a multi-sensor position measurement system that can accurately measure the position of a carrier.

Therefore, in order to achieve the above object, the multi-sensor position measurement system of the present invention has a modular assembly mainly including two primary sensors and two secondary high-precision sensors, and has a modular assembly between the primary sensor and the secondary high-precision sensor. The stepwise switching detection provides the effect of highly accurate measurement.

Specifically, the system further includes a base, a carrier, a first signal array, and a second signal array, and the carrier is movable with respect to the base. Each of the signal arrays includes a plurality of signal source elements spaced from each other on the carrier and arranged in sequence, and the signal period of the second signal array is smaller than the signal period of the first signal array. This improves measurement accuracy.

The modular assembly receives the signals detected by these sensors and generates a reference signal, with a processing unit for calculating the position of the carrier, splicing the measurements between other sensors and identifying the homing direction. and a first status sensor having functions such as.

In one embodiment, the first sensor and the second sensor are primary sensors, such as a Hall sensor for position feedback, and the third sensor and the fourth sensor correct the position measured by the primary sensor and provide motor current commutation. A secondary high-precision sensor such as an anisotropic magnetoresistive sensor to determine the

In one embodiment, when the first status sensor is activated, it is at the end of the measurement range of the first sensor, and the amplitude signal of the second sensor is higher than a predetermined threshold.

In one embodiment, the processing unit calculates the results measured by each of these sensors using a weighting function to obtain a reference signal.

In one embodiment, the processing unit compares the amplitude signal of each Hall sensor with a predetermined threshold based on the reference signal, analyzes the state of the status sensor, and estimates the moving direction of the carrier. shall be.

In one embodiment, the measurement module is located at the end of the measurement range of the measurement module, and comprises a marking unit provided on the carrier and a sensing element provided on the base, and the measurement module includes a marking unit provided on the carrier and a sensing element provided on the base; and a second status sensor for sensing the signal.

When the second status sensor is activated, it is at the end of the second sensor measurement range and the amplitude signal of the first sensor is lower than a predetermined threshold.

In one embodiment, the processing unit identifies a mechanical displacement associated with a signal period in a phase change between the first signal array and the second signal array on the carrier to identify the carrier.

In one embodiment, the measurement range of the measurement module is divided into two regions, a home return positive region and a home return negative region, with the home position as a boundary, and the automatic home return direction of the carrier is estimated based on the results measured by these sensors. .

In one embodiment, the modular assembly further includes a stator, the two Hall sensors and the two magnetoresistive sensors are respectively located on opposite sides of the stator, and the first signal array is above the stator. When located, the processing unit starts a return-to-origin operation.

To summarize the above, the present invention solves the problems of conventional measurement systems such as low accuracy, difficulty in identifying carriers, and complicated initialization calculations with a modular assembly.

1 is a schematic diagram of Example 1 of the present invention. 1 is a top view, a side view, and a front view showing specific positional relationships of each component according to Example 1 of the present invention. FIG. FIG. 2 is a schematic diagram of internal elements of a Hall sensor. FIG. 2 is a schematic diagram of the internal elements of a magnetoresistive sensor. FIG. 3 is a schematic diagram of signals detected by each sensor according to Example 1 of the present invention. FIG. 3 is a schematic diagram of relevant signals and positions within the initialization procedure according to the first embodiment of the present invention; FIG. 6 is a schematic diagram of further specifying the absolute area following FIG. 5; FIG. 7 is a diagram showing that the number of modular assemblies is two according to Example 2 of the present invention. They are a top view, a side view, and a front view of Example 3 of the present invention. It is a schematic diagram of Example 3 of this invention. FIG. 6 is a schematic diagram of the encoding principle of the second status sensor according to the third embodiment of the present invention. FIG. 4 is a schematic diagram of a fourth embodiment of the present invention showing an aspect of increasing the step size. FIG. 6 is a schematic diagram of homing identification between two modular assemblies according to Example 5 of the present invention; FIG. 6 is a schematic diagram of a carrier identification principle according to Example 5 of the present invention.

First, in this application, ordering terms such as first, second, etc. are used as a convenient way to distinguish between elements, have no technical meaning in themselves, and are omitted when there is no need for distinction. Please note that.

(Example 1)
Referring to FIGS. 1 to 6, the multi-sensor position measurement system provided in the first embodiment of the present invention mainly includes a base, a movable part, and a modular assembly 60.

The base has a length and serves as a basis for the configuration of other components. Taking a linear motor as an example, the base is a stator base of the linear motor.

The movable part includes a first signal array 10, a carrier 11, and a second signal array 12, the carrier 11 has a length and is movably arranged on one side of the base, and each signal array 10, 12 are provided on the carrier 11 at intervals from each other. Taking a linear motor as an example in this embodiment, the first signal array 10 is a magnet array on the rotor, which interacts with the magnetic field created by the coil in the stator to cause the movable part to perform linear displacement. A magnet is used as a signal source element. The second signal array 12 may be of the prior art such as a magnetic ruler or an optical ruler consisting of a regularly arranged array of magnetic, electrical or optical non-contact signal source elements; By using a magnetic ruler composed of several magnetic materials 101, each signal array 10, 12 has a magnetic period T1, T2, respectively, and extends along the longitudinal direction of the carrier 11 to a predetermined length L1. , L2, and T2<T1 to improve measurement accuracy and make L1 more than twice T2.

Furthermore, there is a spacing DHA between each signal array 10, 12 to reduce mutual influence of magnetic fields, and for example, DHA can be 60 mm, but is not limited thereto.

The preset predetermined width of the modular assembly 60 is a step size DM, and includes a measurement module 20, a processing unit 30, a drive unit 40, and a stator 50, the stator 50 being provided on a base, It interacts with the magnetic field of the first signal array 10 and moves the carrier 11 relative to the base. The processing unit 30 receives the information sensed by the measurement module 20 and performs calculation to obtain positional information about the carrier 11, and then feeds it back to the drive unit 40, which in turn provides current commutation to the stator 50. Execute power supply control such as

The measurement module 20 includes a first sensor 21, a second sensor 22, a third sensor 23, a fourth sensor 24, and a first status sensor 25, and each of the first and second sensors is connected to the Hall sensor 21. , 22 serve as primary sensors, and are located at both ends in the longitudinal direction of the base, and a stator 50 is interposed between these Hall sensors 21 and 22 to detect changes in the magnetic field of the first signal array 10 and detect changes in the carrier. 11, the distance DH between each Hall sensor 21 and 22 is an integral multiple of the magnetic period T1.

Each Hall sensor 21, 22 comprises at least two sensing elements H1, H2, respectively, each provided along the X-axis at T1/4, as shown in FIG. When the carrier 11 moves along the X-axis, the signals output by each sensing element are proportional to the cosine and sine differential signals Cos1+ and Sin1+, respectively, that is, U _Cos1 = U _ampl1 cos (α1), U _Sin1 = U _ampl1 sin(α1), where α1 is the phase of the signal, U _ampl1 is the amplitude signal, and the sub-period position x1 is calculated by the processing unit 30 according to Equation 1.

where atan2(y,x) is a four-quadrant arctangent function.

Since the position of the Hall sensors 21, 22 with respect to the stator 50 is known, after the current commutation, high-precision measurements of another group can be made without the drive unit 40 performing any actions to find the phase of the current commutation. You can switch directly to the sensor, which is very convenient.

The third and fourth sensors 23, 24 are magnetoresistive sensors, which are secondary high-precision sensors, and can be, for example, Anisotropic Magneto-Resistive sensors, which control the motor current commutation during the initialization period of the system. and sensing changes in the magnetic field of the second signal array 12. The magnetoresistive sensors 23 and 24 are located at both longitudinal ends of the base, and the stator 50 is interposed between the magnetoresistive sensors 23 and 24.

Each magnetoresistive sensor 23, 24 each includes at least four sensing elements (S1, S2, S3 and S4) each provided along the X-axis at T2/8. When the carrier 11 moves along the X-axis, the signals output by each sensing element are proportional to the half period of the differential sine and cosine signals Cos2+, Sin2+, Cos2-, and Sin2-, that is, the anisotropic magnetic Anisotropic Magneto-Resistive effect,
U _Cos2+ = U _ampl2 cos(α2),
U _sin2+ = U _ampl2 sin(α2),
U _Cos2- =-U _ampl2 cos(α2),
U _Sin2- =-U _ampl2 sin(α2),
Here, α2 is the phase of the signal, and U _ampl2 is the signal amplitude.

The processing unit 30 estimates the sub-period position x2 within the half-magnetic period T2 using an arctangent trigonometric function.

The present invention also simplifies the switching procedure between each signal array 10, 12 through the following conditions: the spacing DA of the magnetoresistive sensors 23, 24 is an integer multiple of the magnetic period T1. T1 is an integral multiple of T2, for example, T1=30 mm and T2=10 mm. L1 is an integer multiple of T1 and equal to the step size DM. L2 is at least two T2 and is as shown in the following relational expression.

As shown in FIG. 4, the sub-period phase 231 of the third sensor 23 is synchronized with the position of the phase 211 of the first sensor 21, for example when the phase 211 is equal to 0, the phase 231 is also equal to 0. In addition, in FIG. 6, the current position of the carrier 11 is further indicated by a mark 13, so that the state of each position sensor can be understood.

If the signal amplitude 212 of the first sensor 21 is higher than a predetermined threshold value 213, the first sensor 21 is in an active state, and the threshold value 213 is half of the maximum signal amplitude 212.

When the carrier 11 moves along the X-axis, the length L2 of the second signal array 12 is greater than the length L1 of the first signal array 10, so the third sensor 23 detects the carrier 11 earlier than the first sensor 21. Let them do it.

The signal amplitudes 212 and 222 of the signals A1 and A2 measured by the Hall sensors 21 and 22 are calculated as follows.

In FIG. 4, the signal amplitude 212 is equal to the threshold value 213 at positions 214, 215, and the distance between the two positions 214, 215 is the measurement range 270 of the first sensor 21.

The signal amplitudes 232 and 242 of the signals A3 and A4 measured by the respective magnetoresistive sensors 23 and 24 are calculated as follows.

When the signal amplitude 232 of the third sensor 23 is higher than the predetermined threshold 233 and the signal amplitude 212 of the first sensor 21 is higher than the threshold 213, the third sensor 23 is switched to the active state, and the origin position 272 is set to the first This is the basis for positional synchronization with the signal array 10 and the second signal array 12.

Said position synchronization means that while the first signal array 10 is switched to the second signal array 12, a new sub-periodic position x2' is calculated according to equation 6 and used for motor current commutation and precision position feedback. means.

where round(x) is a function that finds the smaller integer.

In FIG. 4, the signal amplitude 222 is equal to the threshold value 223 at positions 224, 225, the interval between the two positions 224, 225 is the measurement range 271 of the second sensor 22 and the fourth sensor 24, and the measurement range 292 of the measurement module 20 is interposed between positions 214 and 225.

When the carrier 11 moves in and out of the measurement range 270, 271 of each Hall sensor 21, 22, there are end effects due to changes in the magnetic field and the sensing elements H1, H2 are completely covered by the first signal array 10. This causes signal distortion. Therefore, since the position of the carrier 11 can be measured continuously and smoothly, the measurement range between each Hall sensor 21 and 22 has an overlapping area 291, and the overlapping area 291 is interposed between these positions 215 and 224, and The range is at least one magnetic period T1.

To further reduce the influence of end effects, the present invention further specifies the region 290 with a digital joining method, as shown in Equation 7. When the carrier 11 is within the bonding region 290, the digital bonding method sums the phases 211, 221 of each Hall sensor 21, 22 with a first weighting function 280 and a second weighting function 281, respectively.

Further, the connection timing of the phases 211 and 221 of each Hall sensor 21 and 22 is before the system switches to the second signal array 12, and the connection timing of the phases 231 and 241 of each magnetoresistive sensor 23 and 24 is before the system switches to the second signal array 12. This is after switching to the two-signal array 12.

As shown in FIG. 4, the phase 221 of the second sensor 22 estimates the junction region 290 with junction phase thresholds 226, 227, each junction phase threshold 226, 227 is 60° and 120°, respectively, and the position 2261, 2271 are the starting point and ending point of the joining region 290, respectively.

In junction region 290, digital connection phase 282 is calculated as follows.

In the formula, α1 _join is the digital connection phase 282 of each Hall sensor 21, 22, α1 ₂₁ is the phase 211 of the first sensor 21, α1 ₂₂ is the phase 221 of the second sensor 22, and W1 (α1 ₂₂ ) is In the first weighting function 280, W2(α1 ₂₂ ) is the second weighting function 281, for example, the weighting function is a linear inverse function in the joining region 290 in FIG.

Next, the digital connection phase 283 of the magnetoresistive sensors 23 and 24 is calculated using Equation 8.

where α2 _join is the digital connection phase 283 of each magnetoresistive sensor 23, 24, α2 ₂₃ is the phase 231 of the third sensor 23, and α2 ₂₄ is the phase 241 of the fourth sensor 24.

The first status sensor 25 may be an optical switch sensor to generate a reference signal, connect measurement results between other sensors, and realize position estimation such as identifying a return-to-origin direction. , a marking unit 251, and a sensing element 253, the marking unit 251 is provided on the carrier 11 close to the first signal array 10, and its length L3 must be larger than the distance between the positions 2261 and 2271. The sensing element 253 is provided on the base and is used to sense the signal generated by the marking unit 251. When the carrier 11 enters the detection range of the first status sensor 25, particularly between positions 2261 and 2271, and matches the positional relationship between the sensing element 253 and the marking unit 251, the first status sensor 25 becomes active. It becomes possible to become.

According to the sensor arrangement method, the junction region 290 is identified through the state signal 252, the phase 221, the junction phase thresholds 226, 227, and the thresholds 213, 223.

Next, in order to build an incremental absolute measurement system, a homing process, also called an axis initialization run, needs to be performed, in which the origin is located on the travel path as a reference basis to trigger the switching. A position 272 is provided, and the drive unit 40 moves the carrier 11 to the origin position 272 to determine the absolute position of the carrier 11 and obtain a reference signal.

In FIG. 4, the origin position 272 is obtained based on the threshold values 213 and 223 of each Hall sensor 21 and 22 and the origin position threshold value 228 of the second sensor 22. Here, the origin position threshold 228 is 150°.

Considering the positional relationship between the first status sensor 25, the joining area 290, and the origin position 272, the length L3 of the marking unit 251 should be larger than the distance between the position 2261 and the origin position 272.

Also, as shown in FIG. 6, to ensure the uniqueness of the step size DM of the modular assembly 60, the first status sensor 25 is activated only in the last cycle 2111 of the first sensor 21. The period 2111 means a point where the signal A1 becomes smaller than the threshold value 213 during the movement process of the carrier 11.

Further, when the phase 221 of the first sensor 21 is between 0° and 60°, the status signal 252 becomes active.

The length L3 of the marking unit 251 is equal to the magnetic period T1 to ensure the uniqueness of the period 2111.

In FIG. 5, the measurement range 292 is divided into two with the origin position 272 as a boundary into a origin return positive region 293 and an origin return negative region 294. homing direction). If the carrier 11 is at the home position 272, the phase 221 of the second sensor 22 is equal to the home position threshold 228, and the status signal 252 is in the active state, there is no need to return to the home position.

When the carrier 11 is in the home return positive region 293, it is necessary to adjust the zero point in the positive direction of the X axis, and the state signal 252 is in the active state, and the phase 221 is lower than the home position threshold 228, It is also necessary to satisfy the conditions that the signal A1 is in the range of 30° to 150° and the signal A1 is higher than the amplitude threshold 213, or the state signal 252 is not in the active state and the signal A1 is higher than the amplitude threshold 213.

When the carrier 11 is in the negative origin return region 294, the origin return must be performed in the negative direction of the X-axis.

In FIG. 4, the processing unit 30 determines the homing direction by increasing or decreasing the digital connection phases 282, 283. If the return-to-origin direction is positive, subtract two magnetic periods T1, ie -720°, from the digital connection phase 282. If the homing direction is negative, add two magnetic periods T1, ie +720°, to the digital connection phase 282. Then, when the drive unit 40 receives the correction phase 285 calculated by the processing unit 30, it can decode the position and estimate the homing direction.

Furthermore, when the length L3 of the marking unit 251 is smaller than two magnetic periods T1 and the status signal 252 is in the active state, the present invention can also estimate the absolute position without performing return to origin.

As shown in FIG. 6, by further dividing the absolute region 295 from within the measurement range 292 using the active range within the status signal 252, the absolute position and the automatic origin return direction are calculated.

If the carrier 11 is within the absolute region 295 and the status signal 252 is in the active state, no homing is necessary and the absolute position is calculated as follows.

If signal A1 is higher than threshold 213,

where x _abs is the standard absolute phase 286 and α _home is the origin position threshold 228, for example α _home =150°.

If signal A1 is not higher than threshold 213,

When the carrier 11 is within the home return positive region 293, the status signal 252 is inactive, and the signal A1 is higher than the threshold value 213, it is necessary to adjust the zero point in the positive direction of the X axis.

When the carrier 11 is within the zero point return negative region 294, the zero point return must be performed in the negative direction of the X-axis.

In addition, the present invention is powered by a discontinuous stator permanent magnet type linear synchronous motor, and the first signal array 10 is above the stator 50 to avoid that the motor cannot provide sufficient driving force to the carrier. The automatic origin return direction calculation is performed only when the overlapping region has at least one magnetic period T1.

(Example 2)
As shown in FIG. 7, since the position of the carrier 11 can be continuously measured, the second embodiment of the present invention can arrange more modular assemblies 60 along the movement path of the carrier 11, and can The distance between the origin positions 272 between the modular assemblies 60 is equal to the step size DM of a single modular assembly 60, and there are overlapping measurement areas between the two modular assemblies 60, and two adjacent modular assemblies 60 are electrically connected by the field bus 71. After being connected, it is connected to a motion controller 70 and used to control the movement of the carrier.

The motion controller 70 analyzes the received standard absolute phase 287 of the adjacent modular assemblies 60 and performs a homing operation on one of the modular assemblies 60. Then, if the received standard absolute phase 287 is lower than four magnetic periods T1, i.e. +1440°, select the modular assembly 60 in the front order on the X-axis; otherwise, in the rear order on the X-axis Select modular assembly 60.

(Example 3)
When the carrier 11 is between two adjacent modular assemblies 60, two situations can occur: one is that both of the two modular assemblies 60 can perform homing, but both The direction is opposite. The other reason is that the carrier 11 cannot be moved due to a lack of overlapping area. Therefore, in order to solve the above-mentioned problems, as shown in FIGS. 8 to 10, a third embodiment of the present invention is provided, the difference from the first embodiment being that the marking unit 251 or A second status sensor 26 with a sensing unit (263) for sensing another independent marking unit 261 is added and placed at the end of the measuring range 292, and the processing unit 30 is activated at the end of the measuring range 292. It is to recognize the approach and separate the end region 296 from the measurement range 292 with the active range in the status signal 262.

When the carrier 11 is in the end region 296, the status signal 262 of the second status sensor 26 becomes active and the processing unit 30 tracks four magnetic periods T1, i.e. +1440°, to the digital connection phase 282. After correction, a standard absolute phase 287 is obtained and transmitted to the drive unit 40 and further transmitted to the motion controller 70 via the field bus 71.

(Example 4)
As shown in FIG. 11, this is a fourth embodiment of the present invention, and the difference from the first embodiment is that a set of magnets 101 is added to the first signal array 10, the step size DM is changed, and the overlapping area 291 also changes accordingly, and in order to ensure the uniqueness of the overlapping region 291, the present invention utilizes the first status sensor 25 as an aid.

(Example 5)
In the fifth embodiment shown in FIG. 12, following the fourth embodiment, two modular assemblies 60 identify the automatic origin return direction, and the subsequent modular assembly 60 needs to adjust the zero point in the positive direction of the X axis. .

During the homing process, the present invention further uses sensor redundancy technology to automatically identify different carriers 11, and in FIG. ). In order not to affect the calculation result of Equation 6, the mechanical displacement d12 needs to be 0.5 mm in order to have distinguishability, and the difference between the mechanical displacements d12 of different carriers needs to be 0.05 mm. The second sensor 22 or the fourth sensor 24 can measure the mechanical displacement d12, and the motion controller 70 stores the mechanical displacement d12 of all the carriers 11 for decoding.

In this example, the origin position 272 is used as the measurement position for carrier identification in accordance with the origin position 272 in the origin return procedure, thereby avoiding the problem of a difference in measurement results occurring at different reference positions and a decrease in accuracy.

10 First signal array 101 Magnet 11 Carrier 12 Second signal array 200 Origin return direction 20 Measurement module 21 First sensor 22 Second sensor 211, 221, 231, 241 Phase 2111 Period 212, 222 Signal amplitude 213, 223, 233 Threshold 226, 227 Junction phase threshold 214, 215, 224, 225, 232, 242, 2261, 2271 Position 228 Origin position threshold 23 Third sensor 24 Fourth sensor 25 First status sensor 251 Marking unit 252 Status signal 253 Sensing element 26 2 status sensor 261 marking unit 262 status signal 263 sensing elements 270, 271, 292 measurement range 272, 2722 origin position 280 first weighting function 281 second weighting function 282, 283 digital connection phase 285 correction phase 286 standard absolute phase 290 joining area 291 Overlapping area 293 Homing positive area 294 Homing negative area 295 Absolute area 296 End area 30 Processing unit 40 Drive unit 50 Stator 60 Modular assembly 70 Motion controller 71 Line fields A1, A2, A3, A4 Signal DM Step size DHA , DA, DH Interval d12 Mechanical displacement H1, H2, S1, S2, S3, S4 Sensing element L1, L2, L3 Length T1, T2 Magnetic period x1, x2, x2' Sub-period position

Claims (8)

The base and
a carrier (11) movable relative to the base;
The carrier (11) is provided at intervals from each other, each comprising a plurality of signal source elements arranged in sequence, and the signal period of the second signal array (12) is equal to the signal period of the first signal array (10). a smaller first signal array (10) and a second signal array (12);
a modular assembly (60) comprising a measurement module (20) and a processing unit (30);
A multi-sensor position measurement system comprising:
The measurement module (20) includes:
a first sensor (21) and a second sensor (22) provided at intervals on the base for sensing signals of the first signal array (10);
a third sensor (23) and a fourth sensor (24) provided on the base at intervals and for sensing the signal of the second signal array (12);
a first status comprising a marking unit (251) provided on the carrier (11) and a sensing element (253) provided on the base, for sensing a signal generated by the marking unit (251); a sensor (25);
The processing unit (30) receives the signals detected by the sensors (21), (22), (23), and (24) and calculates the position of the carrier (11) ,
The measurement module (20) is located at the end of the measurement range (292) of the measurement module (20), and includes a marking unit (261) provided on the carrier (11) and a sensing device provided on the base. element (263), further comprising a second status sensor (26) for sensing the signal generated by said marking unit (261) . When the first status sensor (25) is activated, the carrier (11) is within the detection range of the first status sensor (25), and the amplitude signal (222) of the second sensor (22) is Multi-sensor position measurement system according to claim 1, which is higher than a predetermined threshold (223). 3. The processing unit (30) according to claim 2, wherein the processing unit (30) calculates each of the results measured by the sensors (21) (22) (23) (24) using a weighting function to obtain a reference signal. Multi- sensor position measurement system. The processing unit (30) calculates amplitude signals (212), (222) of the first sensor (21) and the second sensor (22) and predetermined threshold values (213), (223) based on the reference signal. 4. The multi-sensor position measuring system according to claim 3, wherein the moving direction of the carrier (11) is estimated by comparing the status sensor (25) and analyzing the state of the status sensor (25). When the carrier (11) is in the end region (296) of the measurement range (292), the status signal (262) of the second status sensor (26) becomes active and the status signal (262) of the first sensor (21) becomes active. Multi-sensor position measurement system according to claim 1 , wherein the amplitude signal (212) is lower than a predetermined threshold (213). In order for the processing unit (30) to identify the carrier (11), the signal period is determined by a phase change between the first signal array (10) and the second signal array (12) on the carrier (11). A multi-sensor position measurement system according to claim 1, which determines a mechanical displacement (d12) associated with. The measuring range (292) of the measurement module (20) is divided into two parts, the origin position (272) as a boundary, the origin return positive region (293) and the origin return negative region (294), and the sensors (21) (22) (23) ) (24), the multi-sensor position measurement system according to claim 1, wherein the automatic home return direction (200) of the carrier (11) is estimated through the results measured by the method (24). The modular assembly (60) further includes a stator (50), and the sensors (21, 22, 23, and 24) are located on both sides of the stator (50), and the first signal array The multi-sensor position measurement system according to claim 1, wherein the processing unit (30) starts a return-to-origin calculation when the stator (10) is located above the stator (50).