TWI817561B - Multi-sensor position measuring system - Google Patents

Abstract

The invention discloses a multi-sensor position measurement system, which mainly includes a base, a carrier and a modular component, wherein the carrier is provided with a first signal array and a second signal array. The modular component is disposed on the base, and includes two Hall sensors for sensing the change of the magnetic field of the first signal array, two magnetoresistive sensors for sensing the change of the magnetic field of the second signal array, and A first state sensor has a marking unit set on the carrier and a sensing element set on the base, for sensing the signal generated by the marking unit, as a subsequent reference signal generation, connecting other sensors Measurement results, homing direction identification, etc.

Description

Multi-sensor position measurement system

The present invention relates to position measurement technology, and in particular, to a multi-sensor position measurement system.

According to traditional position measurement systems, Hall sensors are usually used for detection, but their disadvantages are low accuracy, which is about ±0.25mm, and low resolution, which limits the application of Hall sensors in high-precision industrial fields. .

Moreover, in order to ensure the accuracy of the measured position, initialization is usually performed. However, if there are too many sensors and carriers, the initialization process will be quite complicated.

Therefore, how to simplify the initialization process and improve accuracy while reducing the cost of the measurement system will be what relevant industry players need to consider.

Therefore, the main purpose of the present invention is to provide a multi-sensor position measurement system that can accurately measure the position of the carrier.

The reason is that, in order to achieve the above purpose, the multi-sensor position measurement system of the present invention mainly has modular components, which include two primary sensors and two secondary high-precision sensors. Among them, the primary sensor and the secondary Segment switching detection between high-precision sensors achieves high-precision detection.

Specifically, the system further includes a base, a carrier, a first signal array and a second signal array, wherein the carrier system can move relative to the base. Each of the signal arrays is spaced apart from each other on the carrier, and each has a plurality of signal source elements arranged in sequence, and the signal period of the second signal array is smaller than the signal period of the first signal array, thereby improving the Measurement accuracy.

Among them, the modular component further includes a processing unit to receive the signals detected by the sensors and calculate the position of the carrier, and a first state sensor to generate a reference signal and connect the measurement results of other sensors. Homing direction identification and other functions.

In one embodiment, the first sensor and the second sensor are primary sensors, such as Hall sensors, used for position feedback, and the third sensor and the fourth sensor are used as secondary high-precision sensors, such as anisotropic magnetoresistance sensors, for modification. The primary sensor measures the position and determines the motor current commutation phase.

In one embodiment, when the first status sensor is activated, it is at the end of the first sensor's measurement range and the amplitude signal of the second sensor is above a predetermined threshold.

In one embodiment, the processing unit calculates the measurement results of the sensors using a weighting function to obtain a reference signal.

In one embodiment, the processing unit compares the amplitude signal of each Hall sensor with a predetermined threshold based on the reference signal, and analyzes the status of the status sensor as a basis for estimating the moving direction of the carrier.

In one embodiment, the measurement module further includes a second status sensor located at the end of the measurement range of the measurement module and having a marking unit provided on the carrier and a sensitive sensor provided on the base. Component is used to sense the signal generated by the marking unit.

Wherein, when the second status sensor is activated, it is located at the end of the measurement range of the second sensor, and the amplitude signal of the first sensor is lower than a predetermined threshold.

In one embodiment, the phase change between the first signal array and the second signal array on the carrier is used to define a mechanical displacement related to the signal period for the processing unit to identify the carrier.

In one embodiment, an initial position is used to divide the measurement range of the measurement module into a positive homing area and a negative homing area, and the automatic homing direction of the carrier is estimated through the measurement results of the sensors.

In one embodiment, the modular component further includes a stator, and the two Hall sensors and the two magnetoresistive sensors are respectively located on both sides of the stator. When the first signal array is located above the stator, the processing unit Start homing operation.

To sum up, the present invention uses modular components to solve the problems of traditional measurement systems such as low accuracy, difficult carrier identification, and complicated initialization calculations.

(10): First signal array

(101):Magnet

(11): Carrier

(12): Second signal array

(T1), (T2): magnetic period

(L1), (L2), (L3): length

(20):Measurement module

(21):First sensor

(22): Second sensor

(211), (221), (231), (241): Phase

(2111):Period

(212), (222), (232), (242): signal amplitude

(213), (223), (233): threshold

(226), (227): engagement phase threshold

(214), (215), (224), (225), (2261), (2271): position

(228): Initial position threshold

(H1), (H2), (S1), (S2), (S3), (S4): Sensitive components

(A1), (A2), (A3), (A4): signal

(23):Third sensor

(24):Fourth sensor

(25): First state sensor

(251):Mark unit

(252):Status signal

(253): Sensitive element

(26): Second status sensor

(261):Mark unit

(262):Status signal

(263): Sensitive element

(270), (271), (292): Measuring range

(272), (2722): initial position

(280): First weighting function

(281): Second weighting function

(282), (283): digital connection phase

(285):Correction phase

(286): Standard absolute phase

(290):joint area

(291): Overlapping area

(293): Positive homing area

(294): Negative homing area

(295):Absolute area

(296): terminal region

(200): Homing direction

(30):Processing unit

(40):Drive unit

(50):Stator

(60):Modular components

(70):Motion controller

(71):Fieldbus

(DM): step size

(DHA), (DA), (DH): Spacing

(x1), (x2), (x2'): sub-period position

(d12): mechanical displacement

Figure 1 is a schematic diagram of the first embodiment of the present invention.

1A is a top view, a side view and a front view showing the specific positional relationship of each component of the first embodiment of the present invention.

Figure 2 is a schematic diagram of the internal components of the Hall sensor.

Figure 3 is a schematic diagram of the internal components of the magnetoresistive sensor.

FIG. 4 is a schematic diagram of signals sensed by each sensor according to the first embodiment of the present invention.

FIG. 5 is a schematic diagram of relevant signals and locations in the initialization process of the first embodiment of the present invention.

Figure 6 is a schematic diagram that continues Figure 5 and further defines the absolute area.

Figure 7 is a second embodiment of the present invention, which shows that the number of modular components is two.

8 is a top view, a side view and a front view showing a third embodiment of the present invention.

Figure 9 is a schematic diagram of the third embodiment of the present invention.

FIG. 10 is a schematic diagram of the encoding principle for the second state sensor according to the third embodiment of the present invention.

FIG. 11 is a schematic diagram of the fourth embodiment of the present invention, showing the manner of increasing the step distance.

Figure 12 is a schematic diagram of homing identification between two modular components according to the fifth embodiment of the present invention.

Figure 13 is a schematic diagram of the carrier identification principle according to the fifth embodiment of the present invention.

First of all, it should be noted that the ranking terms such as first and second in this case are only used to facilitate the differentiation of components. They themselves have no technical significance. When no distinction is necessary, they will be omitted.

As shown in FIGS. 1 to 6 , the multi-sensor position measurement system provided by the first embodiment of the present invention mainly includes a base part, a moving part and a modular component (60).

The base has a length along it and serves as the basis for the construction of other components. Taking a linear motor as an example, the base is the stator seat of the linear motor.

The moving part has a first signal array (10), a carrier (11) and a second signal array (12), wherein the carrier (11) has a length and is movably located on one side of the base, and each The signal arrays (10) and (12) are spaced apart from each other on the carrier (11); in this embodiment, a linear motor is taken as an example, and the first signal array (10) is a magnet array on the mover. , in addition to interacting with the magnetic field caused by the coil in the stator to cause the moving part to perform linear displacement, the magnet is used as a signal source component; and the second signal array (12) can be magnetic, electrical or optical. Conventional technologies such as non-contact signal source components and regularly arranged magnetic rulers or optical rulers are used in this embodiment using a plurality of magnetic devices such as magnets. A magnetic ruler composed of elements (101); thus each signal array (10), (12) has a magnetic period (T1), (T2) respectively, and extends along the long axis direction of the carrier (11), and each has a predetermined The length (L1), (L2). And make T2<T1 to improve detection accuracy, and make L1 at least a multiple of two T2.

In addition, there is a distance (DHA) between each signal array (10) and (12) to reduce the mutual influence of magnetic fields. For example, the DHA can be 60mm, but is not limited to this.

The predetermined width of the modular component (60) is the step size (DM), and it has a measurement module (20), a processing unit (30), a driving unit (40) and a stator (50) , wherein the stator (50) is located on the base and interacts with the magnetic field of the first signal array (10) to drive the carrier (11) to move relative to the base. The processing unit (30) receives the information sensed by the measurement module (20), and performs calculations to obtain the position information about the carrier (11), and then feeds it back to the driving unit (40), and then the driving unit (40) The stator (50) performs power supply control, such as current commutation.

The measurement module (20) has a first sensor (21), a second sensor (22), a third sensor (23), a fourth sensor (24) and a first status sensor (25), wherein , each of the first and second sensors are Hall sensors (21) and (22) respectively as primary sensors, and are respectively located at both ends of the base in the long axis direction, and the stator (50) is between these Hall sensors. Between the sensors (21) and (22), they are used to sense changes in the magnetic field of the first signal array (10) as a basis for position feedback of the carrier (11), and the distance between the Hall sensors (21) and (22) is ( DH) is an integer multiple of the magnetic period (T1).

Wherein, each Hall sensor (21), (22) has at least two sensitive elements (H1), (H2) respectively, which are respectively arranged along the X-axis at T1/4, as shown in Figure 2. When _the carrier ( 11 ₎ moves _{along the 1} sin(α1), where α1 is the signal phase, U _{amp /1} is the amplitude signal, and the sub-period position (x1) is calculated by the processing unit (30) according to Formula 1: x1=(T1/360°)α1 =(T1/360°)． atan2(U _Sin1+ ,U _Cos1+ ), (Formula 1)

Among them, atan2(y,x) is the four-quadrant arctangent function.

Since the positions of the Hall sensors (21) and (22) relative to the stator (50) are known, they can be directly switched to another set of high-precision measurement sensors after current commutation, without the need for the drive unit (40) to take steps. It is quite convenient to find the current commutation phase with any action.

The third and fourth sensors (23) and (24) are magnetoresistive sensors. As secondary high-precision sensors, they can be, for example, Anisotropic Magneto-Resistive sensors, used to detect the system initialization period. commutation of the motor current, and sensing changes in the magnetic field of the second signal array (12). Each magnetoresistive sensor (23), (24) is located at both ends in the long axis direction of the base, with the stator (50) interposed between the magnetoresistive sensors (23), (24).

Each of the magnetoresistive sensors (23) and (24) includes at least four sensitive elements (S1, S2, S3 and S4), which are respectively arranged along the X-axis at T2/8. When the carrier (11) moves along the Magneto-Resistive effect): U _Cos2+ = U _{amp /2} cos(α2), U _Sin2+ = U _{amp /2} sin(α2), U _Cos2- =- U _{amp /2} cos(α2), U _Sin2- =- U _{amp /2} sin(α2), where α 2 is the signal phase and U _{amp /2} is the signal amplitude.

The processing unit (30) estimates the sub-period position (x2) in the half magnetic period (T2) using an arctangent trigonometric function: x2=(T2/720°). α2=(T2/720°)． atan2(U _Sin2+ -U _Sin2- ),(U _Cos2+ -U _Cos2- ) (Formula 2)

In addition, the present invention simplifies the switching procedures between the signal arrays (10) and (12) through the following conditions, that is, the distance (DA) between the magnetoresistive sensors (23) and (24) is an integer multiple of the magnetic period (T1) . T1 is Integer multiples of T2, such as T1=30mm, T2=10mm. L1 is an integer multiple of T1 and equal to the step size (DM). L2 is at least two T2, as follows: L2=L1+2. T2 (Formula 3)

As shown in Figure 4, the sub-period phase (231) of the third sensor (23) is synchronized with the phase (211) position of the first sensor (21). For example, when the phase (211) is equal to 0, the phase (231) Also equal to zero. In addition, in Figure 6, a label (13) is used to mark the current location of the carrier (11) to understand the status of each sensor at the location.

When the signal amplitude (212) of the first sensor (21) is higher than a predetermined threshold (213), the first sensor (21) becomes active, and the threshold (213) is half of the maximum signal amplitude (212).

When the carrier (11) moves along the The sensor (21) detects the carrier (11) earlier.

The signal amplitudes (212) and (222) of the signals (A1) and (A2) measured by each Hall sensor (21) and (22) respectively are calculated as follows:

In Figure 4, the signal amplitude (212) is equal to the threshold (213) at the positions (214) and (215), and the distance between the two positions (214) and (215) is used as the measurement range (270) of the first sensor (21). ).

The signal amplitudes (232) and (242) of the signals (A3) and (A4) measured by the magnetoresistive sensors (23) and (24) respectively are calculated as follows:

When the signal amplitude (232) of the third sensor (23) is higher than a predetermined threshold (233), and the signal amplitude (212) of the first sensor (21) is higher than the threshold (213), the third sensor (21) is 23) Switch to active Active state, and the initial position (272) is used as the basis for position synchronization of the first signal array (10) and the second signal array (12).

The position synchronization refers to the new sub-period position (x2') calculated according to Formula 6 during the switching of the first signal array (10) to the second signal array (12), and is used for motor current commutation and high voltage. Precision position feedback.

x2’=(T2/2)． round(x1/x2)+x2, (Formula 6)

where round(x) is a function that finds the smaller integer.

In Figure 4, the signal amplitude (222) is equal to the threshold (223) at the positions (224) and (225), and the distance between the two positions (224) and (225) is used as the second sensor (22) and the fourth sensor. The measurement range (271) of (24), and the measurement range (292) of the measurement module (20) is between the positions (214) and (225).

When the carrier (11) enters or leaves the measurement ranges (270) and (271) of each Hall sensor (21) and (22) respectively, the end effects (end effects) caused by changes in the magnetic field and the sensitive element (H1) , (H2) is not completely covered by the first signal array (10), causing signal distortion. Therefore, in order to continuously and smoothly measure the position of the carrier (11), the measurement ranges between the Hall sensors (21) and (22) have an overlapping area (291), and the overlapping area (291) is between between these positions (215) and (224), and its range is at least one magnetic period (T1).

In order to further reduce the influence of the end effect, the present invention further defines a joining area (290) using a digital joining method, as shown in Formula 7. When the carrier (11) is located in the joining area (290), the digital joining method The joining method uses the first weighting function (280) and the second weighting function (281) to respectively sum the phases (211) and (221) of the Hall sensors (21) and (22).

In addition, the timing of connecting the phases (211) and (221) of each Hall sensor (21) and (22) is before the system switches to the second signal array (12), and each magnetoresistive sensor (23), ( The timing of connecting phases (231) and (241) of 24) is after the system switches to the second signal array (12).

As shown in Figure 4, the phase (221) of the second sensor (22) estimates the engagement area (290) using engagement phase thresholds (226), (227), and each engagement phase threshold (226), (227) respectively are 60° and 120°, and the positions (2261) and (2271) are respectively the starting point and the end point of the joint area (290).

In the joint region (290), the digital join phase (282) is calculated as follows: α1 _join =α1 ₂₁ . W1(α1 ₂₂ )+α1 ₂₂ ． W2(α1 ₂₂ ), (Formula 7)

Among them, α1 _join is the digital connection phase (282) of each Hall sensor (21), (22), α1 ₂₁ is the phase (211) of the first sensor (21), α1 ₂₂ is the phase of the second sensor (22) (221), W1 (α1 ₂₂ ) is the first weighting function (280), and W2 (α1 ₂₂ ) is the second weighting function (281). For example, the weighting function is the linear inverse in the joint region (290) in Figure 4 function.

Then use Equation 8 to calculate the digital connection phase (283) of the magnetoresistive sensors (23) and (24).

α2 _join =α2 ₂₃ ． W1(α1 ₂₂ )+α2 ₂₄ ． W2(α1 ₂₂ ), (Formula 8)

Among them, α2 _join is the digital connection phase (283) of each magnetoresistive sensor (23), (24), α2 ₂₃ is the phase (231) of the third sensor (23), α2 ₂₄ is the phase of the fourth sensor (24) (241).

The first state sensor (25) can be an optical switch sensor, used to achieve position estimation, such as reference signal generation, connecting measurement results between other sensors and home direction identification, and has a marking unit (251) And a sensitive element (253), wherein the marking unit (251) is adjacent to the first signal array (10) and is provided on the carrier (11), and its length (L3) must be greater than the positions (2261), (2271) distance between. The sensitive element (253) is arranged on the base and is used to sense the signal generated by the marking unit (251). When the carrier (11) enters the detection range of the first state sensor (25), especially at the position (2261) and (2271), and in conjunction with the positional relationship between the sensitive element (253) and the marking unit (251), the first state sensor (25) can become an activated state.

According to the aforementioned sensor arrangement, the joint area (290) is defined by the status signal (252), phase (221), joint phase thresholds (226), (227) and thresholds (213), (223).

Next, in order to establish an incremental absolute measurement system, a homing process, also called an axis initialization run, is required. An initial position (272) is set on the movement path as a reference for triggering switching. Based on this, the driving unit (40) drives the carrier (11) to move to the initial position (272) to determine the absolute position of the carrier (11) and obtain a reference signal.

In Figure 4, the initial position (272) is obtained based on the thresholds (213), (223) of each Hall sensor (21), (22) and the initial position threshold (228) of the second sensor (22). Among them, the initial position threshold (228) is 150°.

Considering the positional relationship between the first state sensor (25) and the joint area (290) and the initial position (272), the length (L3) of the marking unit (251) must be greater than the distance between the position (2261) and the initial position (272) .

In addition, in order to ensure the uniqueness of the step size (DM) of the modular component (60), the first status sensor (25) is only activated in the last cycle (2111) of the first sensor (21), as shown in Figure 6 shows that the period (2111) refers to the point where the signal (A1) becomes smaller than the threshold (213) when the carrier (11) is moving.

Then, when the phase (221) of the first sensor (21) is between 0° and 60°, the status signal (252) becomes active.

The length (L3) of the marking unit (251) is equal to the magnetic period (T1) to ensure the uniqueness of the period (2111).

In Figure 5, the initial position (272) is used to divide the measurement range (292) into a positive homing area (293) and a negative homing area (294), and through the first state sensor (25) and each Hall sensor (21) and (22) to determine the automatic homing direction. Among them, if the carrier (11) is in the initial position (272), and the phase (221) of the second sensor (22) is equal to the initial position threshold (228), and the status signal (252) is in an active state, there is no need to perform regression.

When the carrier (11) is located in the positive homing area (293), the zeroing correction must be performed in the positive direction of the Position threshold (228), e.g. phase (221) is between 30° and 150° and signal (A1) is above amplitude threshold (213); or status signal (252) is not active and signal (A1) Above the amplitude threshold (213).

When the carrier (11) is located in the negative homing area (294), homing must be performed in the negative direction of the X-axis.

In Figure 4, the processing unit (30) increases or decreases the digital connection phases (282), (283) to determine the home direction. Among them, if the homing direction is positive, two magnetic periods (T1) are subtracted from the digital connection phase (282), that is, -720°; if the homing direction is negative, two two magnetic periods (T1) are added to the digital connection phase (282). magnetic period (T1), which is +720°. Next, when the driving unit (40) receives a modified phase (285) calculated by the processing unit (30), it can decode the position and estimate the home direction.

In addition, if the length (L3) of the marking unit (251) is less than two magnetic periods (T1) and the status signal (252) is in an active state, the present invention can perform absolute position estimation without performing homing correction. .

As shown in Figure 6, the activation range in the status signal (252) is further divided into an absolute area (295) in the measurement range (292), thereby calculating the absolute position and the automatic home direction.

Among them, if the carrier (11) is located in the absolute area (295) and the status signal (252) is active, there is no need to return to the position. The absolute position is calculated as follows: When the signal (A1) is higher than the threshold (213): x _abs =(T1/360°)(α1 _join -α _home ) (Formula 9)

Among them, x _abs is the standard absolute phase (286), α _home is the initial position threshold (228), for example, α _nome =150°; when the signal (A1) is not higher than the threshold (213): x _abs = (T1/360° )(α1 _join -α _home )+T1 (Formula 10)

If the carrier (11) is located in the positive homing area (293), and the status signal (252) is inactive, and the signal (A1) is higher than the threshold (213), a zeroing correction must be performed in the positive direction of the X-axis.

If the carrier (11) is located in the negative homing area (294), homing must be performed in the negative direction of the X-axis.

In addition, the present invention is powered by a discontinuous stator permanent magnet linear synchronous motor. Only when the first signal array (10) is located above the stator (50) and the overlapping area between the two is at least one magnetic period (T1), the invention can Perform automatic homing direction calculation to prevent the motor from being unable to provide sufficient driving force for the carrier.

As shown in Figure 7, in order to continuously measure the position of the carrier (11), the second embodiment of the present invention can configure more modular components (60) along the moving path of the carrier (11), and two adjacent modules The distance between the initial positions (272) of the modular components (60) is equal to the step size (DM) of a single modular component (60), so that the two have overlapping measurement areas, and the fieldbus (71 ) electrically connects two adjacent modular components (60), and is then connected to a motion controller (70), and is used to control the movement of the carrier.

The motion controller (70) analyzes the received standard absolute phases (286) of adjacent modular components (60) and performs a homing algorithm with one of the modular components (60). Then, if the received bid If the quasi-absolute phase (286) is lower than four magnetic periods (T1), that is, +1440°, then the modular component (60) ranked first on the X-axis is selected; otherwise, the modular component (60) ranked later on the X-axis is selected. Modular components (60).

When the carrier (11) is located between two adjacent modular components (60), the following two situations may occur. One is that both modular components (60) can perform homing, but the homing of both The direction is opposite; the other reason is that the carrier cannot be moved due to insufficient overlapping area (11). Therefore, in order to solve the aforementioned problems, a third embodiment of the present invention is shown in Figures 8 to 10. The main difference from the first embodiment is that a second status sensor (26) is added, which can be an optical switch sensor. , has a sensitive unit (263) for sensing the marking unit (251) or another independent marking unit (261), and is placed at the end of the measurement range (292), so that the processing unit (30) knows The measuring range (292) is about to end, and an end zone (296) is further distinguished in the measuring range (292) by the activation range in the status signal (262).

When the carrier (11) is located in the end area (296), the status signal (262) of the second status sensor (26) is activated, and the processing unit (30) converts four magnetic periods (T1), that is, +1440°, The correction is added to the digital link phase (282) to obtain a standard absolute phase (286), which is sent to the drive unit (40) and transmitted to the motion controller (70) via the field bus (71).

As shown in Figure 11, it is the fourth embodiment of the present invention. The main difference from the first embodiment is that a set of magnets (101) is added to the first signal array (10) to change the step size (DM), and the overlapping area (291) also changes accordingly, so the present invention uses the first state sensor (25) as an auxiliary to ensure the uniqueness of the overlapping area (291).

The fifth embodiment disclosed in Figure 12 is a continuation of the fourth embodiment and uses two modular components (60) to identify the direction of automatic return, and the modular component (60) arranged behind must be in the positive direction of the X-axis. direction to perform zero correction.

During the homing process, the present invention also uses sensor redundancy technology to automatically identify different carriers (11). In Figure 13, a mechanical displacement is defined by the phase change between each signal array (10) and (12). (mechanical shift,d12). In order not to affect the calculation results of Formula 6, the mechanical displacement (d12) is 0.5mm, and the mechanical displacement (d12) of different carriers must differ by 0.05mm to ensure identification. The second sensor (22) or the fourth sensor (24) can measure the mechanical displacement (d12), and the motion controller (70) stores the mechanical displacement (d12) of all carriers (11) for decoding.

In this example, in conjunction with the initial position (272) in the homing procedure, the initial position (272) is used as the measurement position of the identification carrier to avoid the problem of different measurement results and reduced accuracy caused by different reference positions.

(10): First signal array

(11): Carrier

(12): Second signal array

(20):Measurement module

(21):First sensor

(22): Second sensor

(23):Third sensor

(24):Fourth sensor

(25): First state sensor

(251):Mark unit

(253): Sensitive element

(30):Processing unit

(40):Drive unit

(50):Stator

(60):Modular components

Claims (9)

A multi-sensor position measurement system includes: a base; a carrier that can move relative to the base; a first signal array and a second signal array that are spaced apart from each other on the carrier, and Each has a plurality of signal source components arranged in sequence, and the signal period of the second signal array is smaller than the signal period of the first signal array; and a modular component has a measurement module and a processing unit, wherein , the measurement module includes: a first sensor and a second sensor, which are spaced apart on the base for sensing the signal of the first signal array; a third sensor and a fourth sensor , are spaced apart on the base for sensing the signal of the second signal array; and a first status sensor has a marking unit provided on the carrier and a mark unit provided on the base The sensitive element is used to sense the signal generated by the marking unit; the processing unit receives the signals detected by the sensors and calculates the position of the carrier; when the first state sensor is activated, It is located at the end of the measurement range of the first sensor, and the amplitude signal of the second sensor is higher than a predetermined threshold. The multi-sensor position measurement system of claim 1, wherein the arrangement of the sensors and the signals they sense define a joint area. The multi-sensor position measurement system of claim 1, wherein the processing unit calculates the measurement results of the sensors using a weighting function to obtain a reference signal. The multi-sensor position measurement system of claim 2, wherein the processing unit compares the amplitude signals of the first sensor and the second sensor with a predetermined threshold according to the reference signal and analyzes the amplitude of the first state sensor. status as the basis for estimating the moving direction of the carrier. The multi-sensor position measurement system of claim 1, wherein the measurement module further includes a second state sensor located at the end of the measurement range of the measurement module and having a The marking unit and a sensitive element provided on the base are used to sense the signal generated by the marking unit. The multi-sensor position measurement system of claim 4, wherein when the second state sensor is activated, it is located at the end of the measurement range of the second sensor, and the amplitude signal of the first sensor is lower than Predetermined threshold. The multi-sensor position measurement system of claim 1, wherein a mechanical displacement related to the signal period is defined by the phase change between the first signal array and the second signal array on the carrier for This processing unit is used to identify the carrier. The multi-sensor position measurement system of claim 1, wherein an initial position is used to divide the measurement range of the measurement module into a positive homing area and a negative homing area, and the measurements are measured by the sensors. As a result, the automatic homing direction of the carrier is estimated. The multi-sensor position measurement system of claim 1, wherein the modular component further includes a stator, and the sensors are respectively located on both sides of the stator. When the first signal array is located above the stator, This processing unit begins homing operations.