JP7389466B2 - containment device - Google Patents

Description

TECHNICAL FIELD The present invention relates to a containment device for enclosing and processing a processed material, such as a dryer that heat-processes the processed material.

A dryer serving as a containment device is used to house a heat-treated product in a furnace and heat-treat it.

An oven that is this type of dryer is disclosed in Patent Document 1. That is, in the clean oven described in Patent Document 1, a duct provided outside the furnace and the inside of the furnace are connected through both connecting parts where the atmospheric gas pressure is equal to each other, and a cooler and a cooling device are installed inside the duct. It is said to be configured to include a dexterous fan.

In this way, the clean oven described in Patent Document 1 is capable of achieving high clean performance with almost no heat loss due to the arrangement of the cooler outside the oven.

Japanese Patent Application Publication No. 2007-271126

In the clean oven described in Patent Document 1, an operator opens the door to store the heated object in the furnace, closes the door to heat-process the heated object in the furnace, and then opens the door again. It is designed to open and take out the heat-treated material.

However, the atmospheric gas in the furnace after the heat treatment may contain hazardous substances such as powder and organic solvents generated when the heat-treated object is heat-treated. Therefore, when a worker opens the door to take out the heat-treated material, the hazardous substances inside the furnace leak out of the furnace, and in the worst case scenario, the worker is exposed to the leaked hazardous substances. There was a risk of being exposed.

The present invention has been made in view of the above, and its purpose is to prevent the atmospheric gas inside the main body from leaking to the outside even when the operator opens the door. The objective is to provide a containment device that can ensure high safety against.

In order to achieve the above object, a containment device according to one embodiment of the present invention includes:
A containment device that confines and processes a processed material,
a main body portion having a processing space for accommodating the processing object;
an opening/closing door that is provided in the opening of the main body and that opens and closes the processing space;
An air supply path for supplying atmospheric gas for performing a predetermined treatment on the processing object into the processing space, and an atmosphere in the processing space after performing the predetermined processing on the processing object. a ventilation path having an exhaust path for exhausting gas;
During air supply, the atmospheric gas is supplied into the processing space via the air supply path, and during exhaust, the atmospheric gas inside the main body is transferred from the exhaust section of the exhaust path to the outside of the main body. an exhaust fan that exhausts the air to the
a filter section disposed at a front stage of the exhaust fan;
a switching unit that is disposed at a boundary between the air supply route and the exhaust route of the air blowing route and operates in conjunction with an opening operation of the opening/closing door;
Equipped with
When the opening/closing door is opened, the switching section blocks the atmospheric gas that has passed through the filter section and is supplied into the processing space from the air supply path, and closes the atmospheric gas from the exhaust section of the exhaust path. The feature is that the air is exhausted from the air .

According to the containment device of one aspect of the present invention, when an attempt is made to open the door, the terminal end of the exhaust path is connected to the exhaust section by the switching section. That is, prior to opening the opening/closing door, the atmospheric gas in the processing space passes through the filter section and is then exhausted to the outside of the main body section by the exhaust fan. This makes it possible to suppress the atmospheric gas inside the main body from leaking out from the opening when the opening/closing door is opened. Therefore, even if the atmospheric gas contains a hazardous substance, it is possible to avoid exposing the worker to the hazardous substance.

According to the present invention, even when an operator opens the opening/closing door, it is possible to prevent the atmospheric gas inside the main body from leaking to the outside, and it is possible to provide a containment device that can ensure high safety against exposure.

1 is a front view showing a dryer to which a containment device according to an embodiment of the present invention is applied. 2 is a plan view of the dryer shown in FIG. 1. FIG. FIG. 2 is a right side view of the dryer shown in FIG. 1. FIG. It is a schematic diagram showing the internal structure of a dryer. 2 is a flowchart showing operations during heat treatment. FIG. 3 is a schematic diagram showing the operation during heat treatment. It is a flowchart which shows the operation|movement of taking out a heat-processed object. FIG. 3 is a schematic diagram showing the operation of taking out the heat-treated material.

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a front view showing a dryer (for example, a clean oven) to which a containment device according to one embodiment of the present invention is applied. FIG. 2 is a plan view of the dryer shown in FIG. 1. FIG. 3 is a right side view of the dryer shown in FIG. 1.

As shown in FIGS. 1 to 3, the dryer 1 according to the present embodiment is a constant temperature bath or a constant temperature/humidity bath having a box-shaped tank (chamber or furnace) made of heat-resistant metal. be. In particular, the dryer 1, which is used as a stability testing device, has a function of performing a predetermined process, such as enclosing and heat-treating a heat-treated material such as a chemical under atmospheric pressure conditions.

In the dryer 1, when a heat-treated product is heat-treated, hazardous substances such as powder and organic solvents may be generated in the main body 2 from the heat-treated product, for example.

The dryer 1 has a main body 2 and an opening/closing door 3. The main body portion 2 and the opening/closing door 3 constitute a box-shaped sealable tank.

The main body part 2 is, for example, a rectangular parallelepiped-shaped box member having a top part 2A, a bottom part 2B, a left side part 2C, a right side part 2D, a back part 2E, and a front part 2F. The interior of the main body portion 2 is a heat treatment space (hereinafter simply referred to as a treatment space) SP in the shape of, for example, a rectangular parallelepiped, in which a heat treatment object can be heat treated at a predetermined temperature under atmospheric pressure conditions.

Leg members 2G for supporting the main body 2 are provided on the bottom surface 2B of the main body 2, corresponding to the four corner positions.

The front surface portion 2F of the main body portion 2 is provided with a rectangular front opening portion (opening portion) 2H. Further, an opening/closing door 3 is provided so as to be able to close the front opening 2H in a sealed state. As a result, even if hazardous substances such as powder or organic solvents are generated from the heat-treated material heated in the processing space SP of the main body 2, the atmospheric gas containing the hazardous substances (hot air for heat treatment) ) does not leak out from the front opening 2H.

The opening/closing door 3 has a heat-resistant glass window 3G. It is possible to observe the inside of the processing space SP through this heat-resistant glass window 3G.

One end portion 3A of the opening/closing door 3 is attached to the front end portion of the left side surface portion 2C of the main body portion 2 using a hinge member HB. Thereby, the opening/closing door 3 can be opened in the direction of the arrow RR in the figure, centering on the hinge member HB (see FIG. 2).

A handle (opening/closing handle) 5 is provided on the surface of the other end 3B of the opening/closing door 3. By grasping the handle 5 and opening the opening/closing door 3 in the direction of the arrow RR shown in the figure, the operator can store (set) the heated object in the processing space SP of the main body 2 through the front opening 2H. In addition, by grasping the handle 5 and opening the door 3, the operator can transfer the heat-treated material that has been heat-treated from inside the processing space SP to the outside of the main body 2 through the front opening 2H. It can be taken out.

The handle 5 has a contact sensor (detection sensor) 25. When the operator touches the handle 5, the contact sensor 25 outputs a contact signal CS to a control unit 100 (see FIG. 4), which will be described later.

A door lock portion 26 is provided on the right side portion 2D of the main body portion 2, as shown in FIG. 3, for example. This door lock part 26 is for locking the opening/closing door 3 so that it cannot be opened or closed, and is provided to prevent the opening/closing door 3 from being opened carelessly. When the door lock section 26 receives a door opening signal DS from the control section 100 (see FIG. 4), which will be described later, the locked state is released. This unlocks the door 3 and allows the operator to open and close the door 3.

A door switch 6 is disposed on the upper surface portion 2A of the main body portion 2, as shown in FIG. 2, for example. This door switch 6 generates an off signal when the opening/closing door 3 closes the front opening 2H of the main body 2, but when the opening/closing door 3 opens the front opening 2H of the main body 2 even a little. When this happens, an on signal OS is generated. The on signal OS of the door switch 6 is output to a control section 100 (see FIG. 4), which will be described later. Thereby, it is possible to reliably detect that the opening/closing door 3 is opened and the front opening 2H is open.

Further, a control box 7 controlled by a control section 100 (see FIG. 4), which will be described later, is arranged on the upper surface 2A of the main body section 2. For example, as shown in FIG. 1, the control box 7 includes a door opening/closing lamp 8, an exhaust fan starting lamp 9, and a temporary exhaust switch 10.

The door opening/closing lamp 8 is a lamp that indicates whether the opening/closing door 3 is closed or open. The door opening/closing lamp 8 indicates a state in which the opening/closing door 3 closes the front opening 2H of the main body 2, for example, a green lamp 8A, and a state in which the opening/closing door 3 opens the front opening 2H of the main body 2. for example, a red lamp 8B. The green lamp 8A emits light when the door switch 6 is generating an off signal and is in a safe state, and the red lamp 8B is emitting light when the door switch 6 is generating an on signal OS and is in a state of alerting. It emits light.

The exhaust fan start lamp 9 is a lamp that lights up when an exhaust fan 145 (see FIG. 4), which will be described later, is in operation.

The temporary exhaust switch 10 is a switch that is turned on by an operator when the atmospheric gas in the processing space SP is forcibly exhausted (ventilated) to the outside of the main body 2 .

Furthermore, for example, an intake port (not shown) is provided on the upper surface portion 2A of the main body portion 2 to take in outside air when exhausting atmospheric gas, which will be described later. This intake port may be equipped with an automatic valve that can be opened and closed.

As shown in FIG. 3, an exhaust section 11 is provided on the back surface section 2E of the main body section 2. The exhaust section 11 is an exhaust port for exhausting atmospheric gas within the main body section 2 to the outside of the main body section 2 . The exhaust section 11 includes a check valve and an automatic valve (not shown) that can be controlled by a control section 100 (see FIG. 4), which will be described later.

Next, the internal structure of the main body section 2 will be explained with reference to FIG. 4.

In addition, in FIG. 4, the internal structure of the dryer 1 is shown in a state where the right side surface portion 2D of the main body portion 2 is seen through.

A heater H is arranged in the main body 2 in order to heat-process the heat-processed object MD set in the processing space SP at a predetermined temperature. In FIG. 4, one heater H is illustrated for convenience, but the heater H is configured in a panel shape, for example, and includes an upper wall portion 14A, a lower wall portion 14B, a left/right side, and a lower wall portion 14B forming a processing space SP. It may be arranged on the wall (not shown) and the back wall 14C. Moreover, it may be arranged also on the inner surface of the opening/closing door 3, if necessary. The energization (on/off) of the heater H is controlled by the control unit 100.

In the present embodiment, some of the heat-treated objects MD are placed in the processing space SP via one or more removable mounting tables (not shown) that have a shelf-like shape, for example. is set to

Further, in the main body portion 2, a ventilation path 14 is arranged along the outer peripheral portion of the processing space SP, excluding the front opening 2H on the side of the opening/closing door 3. Among the ventilation paths 14, the upper wall portion 14A side of the processing space SP serves as an air supply path (air supply line) 141, and the other, for example, the lower wall portion 14B side, the left/right wall side (not shown), and The back wall portion 14C side mainly functions as an exhaust path (exhaust line) 142.

Here, as shown in FIG. 4, the main body portion 2 has a processing space SP in the shape of a rectangular parallelepiped. An air supply path 141 that constitutes the ventilation path 14 is provided on the upper wall portion 14A side of the processing space SP. The air supply path 141 supplies atmospheric gas (so-called downflow) flowing downward from the upper wall portion 14A side to the lower wall portion 14B side of the processing space SP.

That is, a plurality of air supply ports 141a and 141b are provided along the air supply path 141 in the upper wall portion 14A forming the processing space SP. The plurality of air supply ports 141a and 141b are arranged so that the amount of atmospheric gas supplied to the processing space SP is smaller on the back wall portion 14C side and larger on the opening/closing door 3 side. For example, the number of air supply ports 141a on the side closer to the opening/closing door 3 is increased compared to the air supply ports 141b on the back wall portion 14C side farther from the opening/closing door 3, or the size (aperture, etc.) is made smaller. You may do so. In this way, by supplying more air (air blowing) at a higher speed on the side of the door 3, it is possible to reduce the amount of hazardous substances adhering to the door 3.

The air supply path 141 is provided with, for example, an intake port (not shown) for taking in outside air. When exhausting atmospheric gas from inside the processing space SP, for example, outside air taken in from an intake port (not shown) is supplied through the air supply ports 141a and 141b, thereby removing atmospheric gas from inside the processing space SP. It can promote exhaustion of atmospheric gas.

On the other hand, in the lower wall portion 14B forming the processing space SP, a plurality of exhaust ports 142a connected to the exhaust path 142 are provided on the side closer to the opening/closing door 3.

The exhaust path 142 is provided with a drain section 143, a filter section 144, an exhaust fan 145, a cooler 146, a heater H, and a damper section 147 as a switching section in this order from the exhaust port 142a side. For example, the drain section 143, the filter section 144, and the exhaust fan 145 are located on the horizontal exhaust path 142 corresponding to the lower wall section 14B, and the cooler 146 and the heater H are located on the back wall section 14C. They are respectively arranged on the vertical exhaust path 142. The damper portion 147 is disposed, for example, at a boundary portion between the exhaust path 142 and the air supply path 141 (a portion of the air supply path 141 facing the exhaust portion 11), which corresponds to the terminal end of the exhaust path 142.

The damper section 147 performs switching to connect the terminal end side of the exhaust path 142, which is a part of the ventilation path 14, to either the air supply path 141 or the exhaust section 11, and the switching is performed under control. It is configured to be controlled by the unit 100. As shown in FIG. 6, for example, the damper section 147 connects the exhaust path 142 to the air supply path 141 to block the exhaust gas in its horizontal position, and as shown in FIG. 8, in its vertical position (fully closed). state), the exhaust path 142 is connected to the exhaust section 11 to cut off the air supply.

Note that the damper section 147 is switched in conjunction with the opening operation of the opening/closing door 3 to block the atmospheric gas supplied from the air supply path 141 into the processing space SP, so that the atmospheric gas flows through the exhaust path. The air may be exhausted from the exhaust section 11 of 142.

A position sensor 148 is provided near the damper section 147 to detect the movement (position) of the damper section 147 in the direction of the arrow in the figure. The detection output of this position sensor 148 is supplied to the control section 100.

That is, when the atmospheric gas is exhausted by the movement of the damper section 147 in the direction of the arrow shown in the figure, an ON signal is sent from the position sensor 148 to the control section 100, for example. As a result, the connection with the air supply path 141 is cut off, and a portion of the air blowing path 14 functions as an exhaust path 142 connected to the exhaust section 11 . Therefore, during exhaust, the atmospheric gas in the processing space SP is guided by the exhaust fan 145 from the exhaust port 142a to the exhaust path 142, passes through the filter section 144, and then goes to the exhaust section 11 via the cooler 146. is sent.

On the other hand, at times other than exhaust, particularly during heat treatment, the damper section 147 connects the exhaust path 142 to the air supply path 141 and closes the exhaust section 11 . Thereby, the atmospheric gas in the processing space SP is guided by the exhaust fan 145 from the exhaust port 142a to the exhaust path 142, passes through the filter section 144, and then is sent to the air supply path 141. In this manner, during the heat treatment, air supply is repeated so that the atmospheric gas exhausted from the processing space SP is circulated back to the processing space SP.

Note that the inner wall 15, which is disposed opposite to the lower wall portion 14B forming the processing space SP and forms the exhaust path 142, has a drain port for the drain portion 143 and a replacement port 144H for the filter portion 144, respectively. , and a drive motor 145M for the exhaust fan 145.

Note that the ventilation path 14 formed by the left/right side wall portions (not shown) may also function as part of the exhaust path 142.

Here, the processing space SP and the filter section 144 are configured to be washable with washing water. In order to drain the washing water when the processing space SP and the filter section 144 are washed with water, a drain port of the drain section 143 is provided downward in the corresponding portion of the inner wall 15. The drainage section 143 includes, for example, an automatic valve 143A for opening and closing. The opening and closing of this automatic valve 143A is controlled by the control section 100.

The filter section 144 has a replaceable built-in HEPA filter (High Efficiency Particulate Air Filter) HF. This HEPA filter HF is a high-performance removal filter used in fields where air purification is required. The HEPA filter HF is replaced through a replacement port 144H provided in the inner wall 15.

When the atmospheric gas in the processing space SP passes through the filter section 144 as the exhaust fan 145 operates, the HEPA filter HF removes hazardous substances such as powder and organic solvents contained in the atmospheric gas. It is something to capture (remove).

Therefore, the atmospheric gas is cleaned by passing through the HEPA filter HF. The cleaned atmospheric gas is cooled by the cooler 146 and then exhausted from the exhaust section 11 to the outside of the main body section 2 .

Note that the used HEPA filter HF may have attached thereto hazardous substances such as powder and organic solvents generated when the heat-treated product MD is heat-treated, for example. Therefore, when replacing a used HEPA filter HF, first spray a spray liquid onto the surface of the HEPA filter HF to adsorb the hazardous substances attached thereto so that they do not scatter, and then store them in a container (not shown). Store in a bag (collection bag).

In this state, by removing the used HEPA filter HF from the exchange port 144H to the outside of the main body 2, it is possible to prevent hazardous substances such as powder and organic solvents attached to the used HEPA filter HF from leaking to the outside. becomes. Thereby, even when replacing the HEPA filter HF, it is possible to prevent the worker from being exposed to hazardous substances such as powder and organic solvents, further improving work safety.

The exhaust fan 145 is used to exhaust the atmospheric gas inside the main body part 2 to the outside especially when exhausting the atmospheric gas, and is always operated while the opening/closing door 3 is opened. Further, the exhaust fan 145 circulates atmospheric gas for heat treatment into the processing space SP during the heat treatment. This exhaust fan 145 is operated by a drive motor 145M. Drive motor 145M is controlled by control section 100.

The cooler 146 is used, for example, to cool the atmospheric gas in the exhaust path 142 during exhaust, and includes automatic valves 146A and 146B for circulating cooling water therein. The opening and closing of automatic valves 146A and 146B are controlled by control unit 100.

In the present embodiment, when performing the heat treatment on the heat-treated object MD, the control section 100 connects the exhaust path 142 to the air supply path 141 by controlling the damper section 147 to a predetermined horizontal position. In this case, by closing the exhaust section 11, the atmospheric gas in the main body section 2 is processed through the air supply ports 141a and 141b of the air supply path 141 after passing through the filter section 144 as the exhaust fan 145 operates. It is repeatedly supplied into the space SP.

On the other hand, when taking out the heat-treated object MD after the heat treatment, the control section 100 switches the damper section 147 to the vertical position in accordance with the detection output of the contact sensor 25. That is, the connection between the exhaust path 142 and the air supply path 141 is cut off, and the exhaust path 142 is connected to the exhaust section 11 . As a result, as the exhaust fan 145 operates, the atmospheric gas inside the main body section 2 passes through the filter section 144, passes through the cooler 146, and is exhausted from the exhaust section 11 to the outside of the main body section 2. Become.

However, for a predetermined period of time, for example, until all atmospheric gases containing hazardous substances such as powder and organic solvents in the main body part 2 can be completely exhausted to the outside, the door lock part 26 will open and close the door. 3 remains locked.

The control unit 100 is also connected to the control box 7, and controls lighting of the door opening/closing lamp 8 and exhaust fan starting lamp 9, turning on the temporary exhaust switch 10, and the like.

This control unit 100 can also be provided within the control box 7, for example.

Further, in this dryer 1, for example, the main body portion 2 and the control box 7 receive power supply from a commercial power source.

Next, an example of the operation of the dryer 1 as a containment device according to the present embodiment will be described.

Note that FIG. 5 is a flowchart showing the operation during the heat treatment, and FIG. 6 is a schematic diagram showing the operation of the main body section 2 during the heat treatment. Moreover, FIG. 7 is a flowchart showing the operation of taking out the heat-treated object MD after the heat treatment, and FIG. 8 is a schematic diagram showing the operation of the main body part 2 at the time of taking out.

First, with reference to FIGS. 5 and 6, the operation during the heat treatment of the heat-treated object MD will be described.

In step S11 in FIG. 5, the dryer 1 waits until the heated object MD is set in the processing space SP of the main body 2. In this case, in the dryer 1, the control unit 100 determines, based on the output of the position sensor 148, that the position of the damper unit 147 has been switched to the air supply path 141 side, as shown in FIG. 6, for example. At the same time, an automatic valve (not shown) of the exhaust section 11 is closed.

When the heated object MD is set in the processing space SP of the main body 2 by the operator, the process moves to the next step S12.

In step S12, after the operator opens the opening/closing door 3 of the main body 2 and setting the heated object MD in the processing space SP, the control unit 100 determines whether or not the opening/closing door 3 is further closed. is determined based on the output of the door switch 6.

When the operator closes the opening/closing door 3 of the main body section 2 after setting the heat-treated object MD, the process moves to the next step S13.

In step S13, when the control unit 100 determines that the damper unit 147 has been switched to the air supply path 141 side, the process waits until the operator operates a heat treatment start switch (not shown).

When it is determined that the operator has operated the heat treatment start switch, the process moves to the next step S14.

In step S14, in response to the operation of the heat treatment start switch, the control unit 100 causes the heater H to heat the processed material at a predetermined temperature while maintaining the processing space SP of the main body 2 at atmospheric pressure. Heat treatment of the MD is started. In this case, for example, the control unit 100 controls energization of the heater H to heat the heater H to a predetermined temperature. Thereby, the heat-treated object MD in the processing space SP is heated at a predetermined temperature by the heater H for a predetermined time under atmospheric pressure.

Here, during the heat treatment of the heat treatment object MD, the drive motor 145M is controlled by the control unit 100 to operate the exhaust fan 145, so that the atmospheric gas in the treatment space SP is removed from the exhaust port 142a. It is guided to the exhaust path 142. In addition, the green lamp 8A of the door opening/closing lamp 8 of the control box 7 and the exhaust fan start lamp 9 are turned on to display to the operator that the exhaust fan 145 is in operation.

At this time, the atmospheric gas in the processing space SP may be forced out to the exhaust port 142a by taking in outside air from an intake port (not shown) and supplying the air into the processing space SP.

Then, when the atmospheric gas guided to the exhaust path 142 passes through the filter section 144, the built-in HEPA filter HF captures hazardous substances such as powder and organic solvents contained in the atmospheric gas. Ru.

The atmospheric gas thus cleaned by passing through the filter section 144 is further sent through the exhaust path 142 by the exhaust fan 145.

In this embodiment, the cleaned atmospheric gas that has passed through the cooler 146 may be heated to a predetermined temperature by the heater H, for example.

The cleaned atmospheric gas sent through the exhaust route 142 is guided to the air supply route 141 by the damper section 147, and then supplied into the processing space SP from the air supply ports 141a and 141b. At this time, the air is supplied from the air supply port 141a at a higher speed than the air supplied from the air supply port 141b so that more air is supplied in the processing space SP on the side of the opening/closing door 3. be exposed.

In this manner, when the heat treatment of the heat-treated object MD under the atmospheric pressure state is completed, the process moves to the next step S15.

That is, in step S15, the exhaust of the atmospheric gas from the processing space SP and the atmospheric gas into the processing space SP in the step S14 are performed until the predetermined time period for heat-treating the heat-treated object MD has elapsed. Air supply is repeated.

Note that in step S15, when the predetermined heat treatment is completed, the control unit 100 turns off the power to the heater H. Further, the operation of the exhaust fan 145 is stopped. Then, the exhaust fan start lamp 9 of the control box 7 is turned off, indicating to the operator that the operation of the exhaust fan 145 has been stopped.

Next, with reference to FIGS. 7 and 8, the operation when taking out the heat-treated object MD will be described.

In the dryer 1 according to the present embodiment, the operations when taking out the heat-treated product MD include, for example, when the operator grasps the handle 5 to open the opening/closing door 3; 5 includes the case where the temporary exhaust switch 10 is pressed without touching it.

That is, in step S101 in FIG. 7, the control unit 100 first determines whether the contact sensor 25 has detected that the operator has grasped the handle 5 of the door 3 by hand in order to open the door 3. to decide. In the control unit 100, for example, when the worker grasps the handle 5 of the door 3 with his or her hand, the contact sensor 25 outputs a contact signal CS, so that the worker grasps the handle 5 with his or her hand in order to open the door 3. is determined to have been grasped.

If the control unit 100 determines that the contact sensor 25 has detected that the operator has gripped the handle 5, the process moves to step S103, and if not, the process moves to step S102. .

In step S102, the control unit 100 determines whether the operator has pressed the temporary exhaust switch 10 of the control box 7.

If the control unit 100 determines that the worker has pressed the temporary exhaust switch 10 of the control box 7, the process moves to step S103, and if not, the processes of steps S101 to S102 are repeated.

In step S103, only when the operator actually attempts to open the door 3 within a predetermined elapsed time, the control section 100 changes the position of the damper section 147 as shown in FIG. 8, for example. , the exhaust path 142 is switched to the exhaust section 11 side. Further, an automatic valve (not shown) of the exhaust section 11 is opened.

Next, in step S104, the control unit 100 controls the drive motor 145M to operate the exhaust fan 145, thereby guiding the atmospheric gas in the processing space SP to the exhaust path 142 through the exhaust port 142a. In this case, the exhaust fan start lamp 9 of the control box 7 is turned on to display to the operator that the exhaust fan 145 is in operation.

Then, when the atmospheric gas guided to the exhaust path 142 passes through the filter section 144, the built-in HEPA filter HF captures hazardous substances such as powder and organic solvents contained in the atmospheric gas. Ru.

The atmospheric gas thus cleaned by passing through the filter section 144 is further sent through the exhaust path 142 by the exhaust fan 145. After being cooled by the cooler 146, this cleaned atmospheric gas is almost forcibly exhausted from the exhaust section 11 to the outside of the main body section 2.

That is, when exhausting the atmospheric gas, automatic valves 146A and 146B of the cooler 146 are opened in advance, and cold water is supplied to the cooler 146. Therefore, the atmospheric gas cleaned by the filter section 144 is once cooled down to a predetermined temperature or lower by the cooler 146. Thereby, the high temperature atmospheric gas can be prevented from being exhausted to the outside of the main body part 2 in a high temperature state.

If the control unit 100 determines that the atmospheric gas in the main body 2 has been largely exhausted, for example, by timing with a timer (not shown), the process moves to step S105.

For example, if the capacity of the processing space SP is 2 m ³ , the control unit 100 will operate the exhaust fan 145 for 4 minutes or more to exhaust the air.

In step S105, when it is determined that the atmospheric gas has been exhausted to the outside, the control unit 100 sends a door opening signal DS to the door lock unit 26, thereby releasing the locked state of the door 3. be locked.

That is, the door 3 is kept in a locked state by the door lock section 26 until the door opening signal DS from the control section 100 is supplied, so that the door 3 cannot be opened inadvertently. As a result, atmospheric gas containing hazardous substances such as powder and organic solvents remaining in the main body 2 before being cleaned is removed from the front opening 2H to the outside of the dryer 1 when the opening/closing door 3 is opened. It will not leak out.

Then, when the control unit 100 unlocks the door 3 by the door lock unit 26, the process moves to step S106.

In step S106, the control unit 100 determines whether the operator has actually opened the door 3 within a predetermined elapsed time based on the output of the door switch 6.

When the door 3 cannot be opened, the ON signal OS from the door switch 6 is not sent to the control unit 100. When the opening/closing door 3 is opened, the control unit 100 turns on the red lamp 8B of the door opening/closing lamp 8 of the control box 7 (the green lamp 8A is off) based on the ON signal OS from the door switch 6. This displays to the operator that the opening/closing door 3 is opened.

Note that if the ON signal OS from the door switch 6 is not transmitted within a predetermined time, it may be assumed that the operator has no intention of opening the door 3, and the subsequent processing may be terminated.

When the control unit 100 determines that the door 3 has been opened, the process moves to step S107.

In step S107, the control unit 100 controls the exhaust fan 145 to continue operating. Here, the exhaust fan 145 continues to operate until it is confirmed that the door 3 is closed. At this time, the exhaust fan start lamp 9 of the control box 7 is turned on to display to the operator that the exhaust fan 145 is in operation.

In the following step S108, the control unit 100 determines whether the operator has closed the door 3 based on the output of the door switch 6. That is, when the front opening 2H of the main body 2 is closed by the opening/closing door 3, the ON signal OS from the door switch 6 is not sent. It can be concluded that

When the opening/closing door 3 is closed, the green lamp 8A of the door opening/closing lamp 8 of the control box 7 is turned on (the red lamp 8B is off), so that the operator can see that the opening/closing door 3 is closed. Is displayed.

Further, when the control unit 100 determines that the opening/closing door 3 is closed, the process moves to step S109.

In step S109, the control unit 100 stops the operation of the exhaust fan 145. As a result, the exhaust fan start lamp 9 of the control box 7 is turned off, and the operator is informed that the operation of the exhaust fan 145 is stopped.

Note that if it is determined in step S108 that the opening/closing door 3 is not closed, the process returns to step S107 and the exhaust fan 145 continues to operate.

As described above, when the heat-treated object MD is taken out from the processing space SP after the heat treatment, the exhaust fan 145 continues to operate while the opening/closing door 3 is opened. As a result, even if there is atmospheric gas remaining in the main body 2 when taking out the heat-treated object MD, the worker is exposed to the atmospheric gas containing hazardous substances such as powder and organic solvents. This makes it possible to ensure work safety by ensuring that no accidents occur.

Next, the operation when cleaning (replacing) the filter section 144 will be explained.

For example, in the filter section 144, when the atmospheric gas from inside the processing space SP passes through, the built-in HEPA filter HF captures hazardous substances such as powder and organic solvents contained in the atmospheric gas. Therefore, the HEPA filter HF of the filter section 144 becomes contaminated with hazardous substances as it is used.

Therefore, in the dryer 1 according to the present embodiment, the filter section 144 is configured so that the used HEPA filter HF can be easily replaced. That is, when replacing a used HEPA filter HF, with the dryer 1 stopped, first, in order to prevent the captured hazardous substances from scattering, apply an adsorption agent to the used HEPA filter HF, for example. spray liquid is sprayed. After adsorbing the captured hazardous substances in this way, the used HEPA filter HF is stored in a storage bag (not shown). Then, the entire storage bag containing the HEPA filter HF is removed from the filter section 144 via the exchange port 144H. Thereby, the filter section 144 can easily replace the HEPA filter HF without scattering hazardous substances such as powder and organic solvents captured by the HEPA filter HF.

Note that the used HEPA filter HF accommodated in the accommodation bag may preferably be removed from the filter section 144 while being further placed in a disposal bag (not shown) together with the accommodation bag. By doing this, it becomes possible to more reliably prevent the hazardous substances adsorbed on the used HEPA filter HF from scattering into the exhaust path 142 or leaking to the outside of the main body 2 (so-called , bag-in/bag-out method).

Furthermore, when replacing a used HEPA filter HF, the filter section 144 may be cleaned. That is, a drain port of the drain section 143 is provided on the inner wall 15 of the exhaust path 142 corresponding to the front section of the filter section 144, which faces the lower wall section 14B. Through this drainage part 143, it is possible to drain the washing water during washing. Therefore, by configuring the filter section 144 so that the entire exhaust path 142 can be washed, the entire filter section 144 can be washed with water. Therefore, the degree of contamination of the filter section 144 due to residual hazardous substances can be reduced.

By configuring not only the filter section 144 but also the processing space SP to be washable, the processing space SP can also be washed with water. In this way, by draining the cleaning water when cleaning the inside of the processing space SP through the drainage section 143, it is possible to reduce the degree of contamination inside the processing space SP.

As described above, according to the dryer 1 according to the present embodiment, before the operator attempts to open the door 3, by switching the damper section 147 and operating the exhaust fan 145, It becomes possible to exhaust the atmospheric gas inside the main body part 2 to the outside.

That is, when the operator grasps the handle 5 of the opening/closing door 3 when taking out the heat-treated object MD after the heat treatment has been completed, the control unit 100 accordingly switches the position of the damper unit 147 to the fully closed state, The exhaust path 142 is connected to the exhaust section 11. Further, the automatic valve of the exhaust section 11 is opened, and the drive motor 145M is controlled to operate the exhaust fan 145.

In this way, before the operator attempts to open the door 3, the atmospheric gas inside the main body 2 is cleaned by the filter part 144, and then further cooled by the cooler 146, and then the gas is passed from the exhaust part 11 to the main body. Exhaust air to the outside of section 2. In this way, until the operator actually opens the opening/closing door 3, all the atmospheric gas in the main body 2 used for the heat treatment of the heat-treated object MD is exhausted. This prevents atmospheric gas containing hazardous substances such as powder and organic solvents in the processing space SP from leaking out from the front opening 2H of the main body 2 when the operator actually opens the opening/closing door 3. It is possible to prevent this. Therefore, even when taking out the heat-treated object MD from the processing space SP, it is possible to prevent the worker from being exposed to atmospheric gas containing hazardous substances, and it is possible to easily ensure a high level of safety against exposure. becomes. As a result, the operator can open the door 3 with peace of mind.

Furthermore, by keeping the exhaust fan 145 in operation at all times during the opening operation of the opening/closing door 3, even if there is atmospheric gas remaining inside the main body 2, powder contained in the atmospheric gas can be removed. It can prevent workers from being exposed to hazardous substances such as organic solvents.

Furthermore, during the opening operation of the opening/closing door 3, more outside air taken in from an intake port (not shown) may be supplied into the processing space SP from the air supply port 141a side.

Further, the damper portion 147 may not be in a fully closed state but may be in a partially open state. This makes it possible to form an air curtain in the processing space SP, increasing the amount of clean atmospheric gas that can be exhausted to the front opening 2H side corresponding to the operator, and further improving Safety can be ensured.

Although the above-described dryer 1 has been described as an example of a clean oven that performs heat treatment under atmospheric pressure, the dryer 1 is not limited thereto. For example, it can be applied to a vacuum dryer that performs heat treatment under a vacuum pressure state, and various ovens that perform predetermined processing under conditions such as the adjusted atmospheric pressure in the room in which the main body 2 is installed or the surrounding environmental pressure. .

It can also be applied to various containment devices such as constant temperature chambers, constant temperature dryers, constant temperature dryers, constant temperature and humidity chambers.

Further, as a containment device, local exhaust devices such as a fume hood and a draft chamber can be similarly applied.

Further, the containment device is limited to a downflow (vertical circulation) type in which the air supply path 141 supplies atmospheric gas downward from the upper wall portion 14A side of the processing space SP to the lower wall portion 14B side. For example, a horizontal circulation type or a natural convection type may be used.

It can also be applied to an inert structure using an inert gas as an atmospheric gas.

Further, the air supply ports 141a, 141b and the exhaust port 142a may have, for example, a configuration in which slit-shaped openings are arranged in one direction, or a plurality of openings arranged in a matrix so as to be orthogonal to each other. It may also be configured as follows.

Further, the switching section is not limited to a damper structure, but may have a structure in which the opening area of an opening for providing clean atmospheric gas can be adjusted by a sliding method, for example.

Although one aspect of the present invention has been described above by illustrating the embodiment, it is merely an example, and the scope of the invention described in the claims can be modified in various ways without departing from the gist of the invention. be.

1 Dryer (containment device)
2 Main body 2H Front opening 3 Opening/closing door 5 Handle (opening/closing handle)
6 Door switch 7 Control box 10 Temporary exhaust switch 11 Exhaust section 14 Ventilation route 25 Contact sensor (detection sensor)
26 Door lock section 100 Control section 141 Air supply route (air supply line)
141a, 141b Air supply port 142 Exhaust route (exhaust line)
142a Exhaust port 143 Drain section 144 Filter section 144H Exchange port 145 Exhaust fan 146 Cooler 147 Damper section (switching section)
148 Position sensor H Heater HF HEPA filter MD Heated object SP Processing space

Claims (9)

A containment device that confines and processes a processed material,
a main body portion having a processing space for accommodating the processing object;
an opening/closing door that is provided in the opening of the main body and that opens and closes the processing space;
An air supply path for supplying atmospheric gas for performing a predetermined treatment on the processing object into the processing space, and an atmosphere in the processing space after performing the predetermined processing on the processing object. a ventilation path having an exhaust path for exhausting gas;
During air supply, the atmospheric gas is supplied into the processing space via the air supply path, and during exhaust, the atmospheric gas inside the main body is transferred from the exhaust section of the exhaust path to the outside of the main body. an exhaust fan that exhausts the air to the
a filter section disposed at a front stage of the exhaust fan;
a switching unit that is disposed at a boundary between the air supply route and the exhaust route of the air blowing route and operates in conjunction with an opening operation of the opening/closing door;
Equipped with
When the opening/closing door is opened, the switching section blocks the atmospheric gas that has passed through the filter section and is supplied into the processing space from the air supply path, and closes the atmospheric gas from the exhaust section of the exhaust path. A containment device characterized in that the air is exhausted from the air . 2. The containment according to claim 1, wherein during the evacuation, the switching section is in a fully closed state or in a partially open state so that a part of the atmospheric gas is supplied into the processing space. Device. The opening/closing door includes an opening/closing handle having a detection sensor,
The containment device according to claim 1 , wherein the opening operation of the opening/closing door is detected by the detection sensor. Claim characterized in that the air supply path includes an intake port for taking in outside air during exhaust, and an air supply port for supplying the outside air taken in from the intake port into the processing space. 1. The containment device according to 1. 5. The air supply path is configured such that the amount of the atmospheric gas supplied into the processing space is larger on the opening/closing door side. Containment device. 2. The containment device according to claim 1, wherein the filter section includes a HEPA filter and is configured such that the used HEPA filter can be replaced while being accommodated in a collection bag. 5. The containment device according to claim 1, wherein the exhaust path further includes a drainage section for draining cleaning water used when cleaning the filter section. 8. The containment device according to claim 7, wherein the drainage section is configured to be able to drain cleaning water when cleaning the processing space. Further comprising a door lock part that locks the opening/closing door,
9. The door lock section is configured to unlock the opening/closing door after the atmospheric gas in the processing space is exhausted. Containment device as described in .

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