JP7378786B2 - Planar actuator, conveyance device and movement device using the same, and manufacturing method - Google Patents

Description

The present invention relates to a planar actuator that generates a traveling wave (backward wave) using fluid pressure energy, a conveying device and a moving device using the same, and a manufacturing method.

A conventional method for manufacturing a planar actuator that generates traveling waves using fluid pressure energy will be described with reference to FIGS. 13, 14, and 15 (see Patent Document 1).

First, referring to FIG. 13, four layers of flexible members 101, 102, 103, and 104 made of cloth are prepared. Each of the flexible members 101, 102, 103, and 104 is easy to stretch in the length direction and difficult to stretch in the width direction. Further, the intermediate flexible members 102 and 103 are provided with straight stitches 102a and 103a in the length direction to suppress stretching in the length direction. Further, the intermediate flexible members 102, 103 are provided with openings 102b, 103b at equal intervals in the length direction. The flexible members 101, 102, 103, 104 are overlapped and sutured at both ends.

Next, referring to FIG. 14, three tubes 105A, 105B, 105C are inserted between the sutured flexible members 101, 102, 103, 104. Specifically, the tube 105A is inserted so as to reciprocate in the upper and lower flat space 106A, the tube 105B is inserted so as to reciprocate in the upper and lower flat space 106B, and the tube 105C is inserted so as to reciprocate in the upper and lower flat space 106C. inserted. Here, if one period of a traveling wave (retarded wave) is L, then the lengths of the flat spaces 106A, 106B, and 106C, that is, the lengths of the intermediate flexible members 102 and 103, are L/3.

The planar actuator obtained by the manufacturing method shown in FIGS. 13 and 14 operates as shown in FIG. 15. That is, the tubes 105A, 105B, and 105C are sequentially pressurized and non-pressurized repeatedly. As a result, the flat spaces 106A, 106B, and 106C sequentially expand and non-expand, and a traveling wave (backward wave) can be generated in the planar actuator.

If the planar actuator obtained by the manufacturing method of FIGS. 13 and 14 is fixed to the floor etc., the planar actuator will act as a conveyance device, and if the planar actuator is made movable without being fixed to the floor etc., the planar actuator will act as a transfer device. The actuator acts as a moving device on the floor or the like.

Japanese Patent Application Publication No. 2017-155767

However, in the conventional planar actuators shown in FIGS. 13, 14, and 15, only the pressure caused by expansion and non-expansion of the tubes 105A, 105B, and 105C directly contributes to the extrusion force of the planar actuator, and the extrusion force is It is less than 40Pa. Therefore, it is difficult to lift heavy objects, and when used as a transport device or a moving device, there is a problem that the device lacks strength.

Furthermore, since the complicated process of inserting the tubes 105A, 105B, and 105C back and forth into the flat spaces 106A, 106B, and 106C above and below the planar actuator is required, there is also the problem that manufacturing costs are high.

In order to solve the above problems, a planar actuator according to the present invention includes a plurality of chambers that are located between a lower sheet and an upper sheet and that are partitioned by a plurality of partition sheets and extend in a first direction. A planar actuator arranged in parallel in a second direction different from the first direction, where (N+1) chamber groups are constituted by every N (N is an integer of 2 or more) chambers in the second direction. There are (N+1) pressure control units for controlling the positive pressure state and negative pressure state (or atmospheric pressure state) for each room group , and (N+1) pressure control units to control the normal pressure state. The apparatus includes a control unit for making the number of chamber groups in a positive pressure state different from the number of chamber groups in a negative pressure state (or atmospheric pressure state).

Further, the method for manufacturing a planar actuator according to the present invention includes a first step of alternately sandwiching a plurality of thermoplastic partition sheets and a plurality of heat-resistant release sheets to form a thermoplastic partition sheet/heat-resistant release sheet combination. , a second step of laminating the thermoplastic lower sheet and the thermoplastic upper sheet to the thermoplastic partition sheet/heat-resistant release sheet combination from above and below; The method includes a third step of heat pressing the plastic partition sheet/heat-resistant release sheet combination from above and below.

According to the present invention, the pushing force movement of the planar actuator is caused by adding the bending/extending motion of the partition sheet of each chamber to the traveling wave (backward wave) accompanying expansion/non-expansion of each chamber, so that the pushing force of the planar actuator is can be made larger. Further, since it is not necessary to insert a tube between the chambers in the planar actuator, the manufacturing process can be simplified, and therefore manufacturing costs can be reduced.

1 is a perspective view showing an embodiment of a planar actuator according to the present invention. 2 is a photograph of the planar actuator of FIG. 1. FIG. 2 is a diagram for explaining the state of the chamber in FIG. 1, in which (A) shows a non-pressure (atmospheric) state, and (B) shows a mixed positive pressure/negative pressure state at a steady state. 2 is a diagram showing details of the pressure control unit of FIG. 1. FIG. 2 is a diagram for explaining the operation of the planar actuator of FIG. 1. FIG. It is a photograph when the planar actuator of FIG. 1 is operated as a conveyance device. FIG. 2 is a diagram for explaining a method of manufacturing the planar actuator shown in FIG. 1. FIG. FIG. 2 is a diagram for explaining a method of manufacturing the planar actuator shown in FIG. 1. FIG. FIG. 2 is a diagram for explaining a method of manufacturing the planar actuator shown in FIG. 1. FIG. 2 is a plan view showing an application example of the planar actuator of FIG. 1. FIG. A modification example of the partition sheet in FIG. 3 is shown, in which (A) is a sectional view, (B) is a photograph showing the actual product, and (C) is a photograph in operation. It is a graph showing load-average speed characteristics due to the partition sheet. FIG. 2 is a diagram for explaining a conventional method of manufacturing a planar actuator, in which (A) is an exploded perspective view and (B) is an assembled perspective view. FIG. 2 is a diagram for explaining a conventional method of manufacturing a planar actuator, in which (A) is an overall perspective view, (B) is a side view, and (C) is an enlarged sectional view. 15 is a diagram for explaining the operation of the planar actuator obtained by the manufacturing method of FIGS. 13 and 14. FIG.

FIG. 1 is a perspective view showing an embodiment of a planar actuator according to the present invention, and FIG. 2 is a photograph of the planar actuator shown in FIG.

In the planar actuator of FIG. 1, thermoplastic material partition sheets, for example, urethane partition sheets 1-0, 1-, are located between the lower sheet D and the upper sheet U and have a dogleg-shaped cross section along the Y direction. Chambers 2-1, 2-2, . . . , 2-9 divided by sections 1, 1-2, . . . , 1-9 are arranged in parallel in the X direction. Every second chamber 2-1 , 2-4 , . . . constitutes a first chamber group and is connected to a tube 3-1 made of urethane. Every second chamber 2-2 , 2-5 , . . . constitutes a second chamber group, and is connected to a tube 3-2 made of urethane. Every two chambers 2-3 , 2-6 , . . . constitute a third chamber group, and are connected to a tube 3-3 made of urethane. Both ends of the chambers 2-1, 2-2, . . . are sealed as shown in FIG. 2 to prevent air from leaking or entering. The tubes 3-1, 3-2, and 3-3 are connected to pressure control units 4-1, 4-2, and 4-3, respectively, and the pressure control units 4-1, 4-2, and 4-3 are connected to the pressure control units 4-1, 4-2, and 4-3. Controlled by unit 5. The control unit 5 sends the control signals C-1-1 and C-1-2 for controlling the electromagnetic valves and the drive signal D-1 for driving the pump to the pressure control unit 4-1. The control unit 5 sends the control signals C-2-1 and C-2-2 for controlling the solenoid valves and the drive signal D-2 for driving the pump to the pressure control unit 4-3. -3-1, C-3-2 and pump drive drive signal D-3. Note that the control unit 5 is constituted by a microcomputer or the like. The lower sheet D and the upper sheet U are also made of thermoplastic material, such as urethane.

FIG. 3 is a diagram for explaining the states of chambers 2-1, 2-2, 2-3, 2-4, 2-5, and 2-6 in FIG. ) state, and (B) shows a mixed state of positive pressure and negative pressure at steady state. Here, positive pressure is a pressure greater than atmospheric pressure, and negative pressure is a pressure less than atmospheric pressure. Note that in FIG. 3, the lower sheet D and the upper sheet U are not shown.

As shown in FIG. 3(A), when each chamber 2-1, 2-2, 2-3, 2-4, 2-5, 2-6 is in a non-pressure state (atmospheric state), the urethane partition sheet Since the dogleg shape of 1-0, 1-1, 1-2, . . . , 1-6 is maintained, the height H0 in the Z direction is low, for example, about 0.8 mm.

If all chambers 2-1, 2-2, 2-3, 2-4, 2-5, and 2-6 are in a negative pressure state, all urethane partition sheets 1-0, 1-1, and 1 -2, ..., 1-6 are further bent into a flat state, so the height H2 in the Z direction of the central portion is very small, and the urethane partition sheets 1-0, 1-1, The thickness of 1-2, . . . , 1-6 is, for example, about 0.2 mm, and the length L2 in the X direction is small. Furthermore, if all the chambers 2-1, 2-2, 2-3, 2-4, 2-5, and 2-6 are in a positive pressure state, all the urethane partition sheets 1-0, 1-1 , 1-2, . The height H1 in the Z direction in the extended state of 2, .

As shown in FIG. 3B, chambers 2-1 and 2-4 of the first chamber group and chambers 2-4 and 2-5 of the second chamber group are in a positive pressure state, and the third chamber Even when the chambers 2-3, 2-6 of the group are in a negative pressure state, the urethane partition sheets 1-0, 1-1, 1-2, ..., 1-6 are all in a stretched state, and therefore the chambers The Z-direction height H1 of chambers 2-1, 2-2, 2-4, and 2-5 is as large as 8 to 10 mm, and the Z-direction height H2 of the central portion of chambers 2-3 and 2-6 is 0.2 mm. becomes smaller. In other words, the height H1 in the Z direction of the chambers 2-1, 2-4; 2-2, 2-5 in a positive pressure state is the height H2 in the Z direction of the central part of the chambers 2-3, 2-6 in a negative pressure state. The length L1 of the chambers 2-1, 2-4; 2-2, 2-5, which are larger and under positive pressure, is greater than the length L2 of the chambers 2-3, 2-6 under negative pressure. Therefore, the volume of chambers 2-1, 2-4; 2-2, 2-5 in a positive pressure state is larger than the volume of chambers 2-2, 2-5 in a negative pressure state, and each chamber 2 in each chamber group -1, 2-4; 2-2, 2-5; 2-3, 2-6 are sequentially placed in a positive pressure state and a negative pressure state, so that one period L (=2・L1+L2) is made up of two large volumes. A traveling wave (backward wave) can be formed consisting of a chamber (L1, H1) and one chamber of small volume (L2, H2).

FIG. 4 is a diagram showing details of the pressure control unit 4-1 (4-2, 4-3) in FIG. 1.

In FIG. 4, the pressure control unit 4-1 (4-2, 4-3) is composed of electromagnetic valves 41, 42 and a pump 43 provided between the electromagnetic valves 41, 42. The pump 43 is controlled by control signals C-1-1 (C-1-2, C-1-3) and C-2-1 (C-2-2, C-2-3) of the control unit 5. It is controlled by the drive signal D-1 (D-2, D-3) of the control unit 5. 44 is an intake valve, and 45 is an exhaust valve.

The positive pressure operation shown in FIG. 4(A) will be explained. Control signals C-1-1 (C-1-2, C-1-3) and C-2-1 (C-2-2, C-2-3) are set to on level (“1”) and driven. When the signal D-1 (D-2, D-3) is set to a drive level corresponding to positive pressure, the pump 43 operates, the solenoid valve 41 is turned on, and the intake valve 44 is connected to the intake port 43a of the pump 43. However, the solenoid valve 42 is turned on to connect the exhaust port 43b of the pump 43 to the tube 3-1 (3-2, 3-3). As a result, air is sent from the intake valve 44 to the tubes 3-1 (3-2, 3-3) via the solenoid valve 41, pump 43, and solenoid valve 42. Therefore, chambers 2-1, 2-4, ... (2-2, 2-5, ...; 2-3, 2-6, ...) connected to tube 3-1 (3-2, 3-3) becomes a positive pressure state.

The negative pressure operation in FIG. 4(B) will be explained. Control signals C-1-1 (C-1-2, C-1-3) and C-2-1 (C-2-2, C-2-3) are set to off level (“0”) and driven. When the signal D-1 (D-2, D-3) is set to a drive level corresponding to the negative pressure, the pump 43 operates and the solenoid valve 41 is turned off, that is, it is spring-returned and the chambers 2-1, 2- 4, ... (2-2, 2-5, ...; 2-3, 2-6, ...) are connected to the intake port 43a of the pump 43, and the solenoid valve 42 is turned off, that is, it is spring returned, and the pump 43 The exhaust port 43b of the exhaust valve 45 is connected to the exhaust valve 45. As a result, air flows from the tube 3-1 (3-2, 3-3) to the exhaust valve 45 via the solenoid valve 41, pump 43, and solenoid valve 42. Therefore, chambers 2-1, 2-4, ... (2-2, 2-5, ...; 2-3, 2-6, ...) connected to tube 3-1 (3-2, 3-3) becomes a negative pressure state. Note that if the positive pressure and negative pressure are symmetrical with respect to atmospheric pressure, the drive level of the drive signal D-1 (D-2, D-3) may always be the same.

FIG. 5 is a diagram for explaining the operation of the planar actuator of FIG. 1 executed by the control unit 5. As shown in FIG. This operation is stored in the ROM of the control unit 5 as a control program. In FIG. 5, the planar actuator is fixed to a floor or the like and acts as a transport device for transporting the object O. Note that in FIG. 5 as well, the lower sheet D and the upper sheet U are not shown.

First, referring to FIG. -6 are assumed to be a positive pressure state, a positive pressure state, and a negative pressure state, respectively. As a result, the volumes of chambers 2-1, 2-4, 2-2, and 2-5 are large, and the volumes of chambers 2-3 and 2-6 are small. In this case, all the urethane partition sheets 1-0, 1-1, 1-2, . . . , 1-6 are in a highly stretched state.

Next, referring to FIG. -6 are assumed to be a positive pressure state, a negative pressure state, and a positive pressure state, respectively. As a result, the volumes of chambers 2-2 and 2-5 become smaller, while the volumes of chambers 2-3 and 2-6 become larger. In this case, the urethane partition sheets 1-2 and 1-5 are temporarily bent into a low dogleg shape, but eventually the urethane partition sheets 1-2 and 1-5 are bent as shown in FIG. 1-2 and 1-5 are again in a highly stretched state. In this way, along with the formation of traveling waves due to the contraction of chambers 2-2 and 2-5 and the expansion of chambers 2-3 and 2-6, the bending/stretching motion of urethane partition sheets 1-2 and 1-5 is added. , the extrusion force of the planar actuator increases. As a result, the object O on the chambers 2-1 and 2-4 moves a little to the right in the figure due to the contact pressure with the chambers 2-1 and 2-4.

Next, referring to FIG. -6 are assumed to be a positive pressure state, a positive pressure state, and a negative pressure state, respectively. As a result, the volumes of chambers 2-1 and 2-4 become smaller, while the volumes of chambers 2-2 and 2-5 become larger. In this case, the urethane partition sheets 1-1 and 1-4 are temporarily bent into a low dogleg shape, but eventually the urethane partition sheets 1-1 and 1-4 are bent as shown in FIG. 1-1 and 1-4 are again in a highly stretched state. In this way, along with the formation of traveling waves due to the contraction of chambers 2-1 and 2-4 and the expansion of chambers 2-2 and 2-5, the bending/stretching motion of urethane partition sheets 1-1 and 1-4 is added. , the extrusion force of the planar actuator increases. As a result, the object O on the chambers 2-3 and 2-6 moves slightly to the right in the figure due to the contact pressure with the chambers 2-3 and 2-6.

Next, referring to (F) in FIG. -6 are assumed to be a positive pressure state, a positive pressure state, and a negative pressure state, respectively. As a result, the volumes of chambers 2-3 and 2-6 become smaller, while the volumes of chambers 2-1 and 2-4 become larger. In this case, the urethane partition sheets 1-0, 1-3, and 1-6 are temporarily bent into a low dogleg shape, but eventually they become as shown in FIG. 5 (G). , the urethane partition sheets 1-0, 1-3, and 1-6 are again in a highly stretched state. In this way, along with the formation of traveling waves due to the contraction of chambers 2-3 and 2-6 and the expansion of chambers 2-2 and 2-5, the urethane partition sheets 1-0, 1-3 and 1-6 are bent/ With the addition of the stretching action, the pushing force of the planar actuator increases. As a result, the object O on the chambers 2-2 and 2-5 moves slightly to the right in the figure due to the contact pressure with the chambers 2-2 and 2-5.

By repeating the operations of (A), (B), (C), (D), (E), and (F) in Figure 5 above, one cycle L (=2・L1+L2) is in a positive pressure state. A traveling wave consisting of two chambers (length L1) and one chamber (length L2) under negative pressure is formed, and the urethane partition sheets 1-0, 1-1, ... are bent/stretched. The object O moves to the right. For example, as shown in FIG. 6, it was possible to move four 2L plastic bottles P as objects O. Therefore, the planar actuator according to the present invention was able to exert an extrusion force of 40 Pa to 60 Pa. In addition, in (A), (C), (E), and (G) of FIG. 5 during steady state, the number of chamber groups in a positive pressure state is 2, and the number of chamber groups in a negative pressure state is 1. be. In any case, by making the number of chamber groups in a positive pressure state and the number of chamber groups in a negative pressure state different during steady state, a traveling wave (backward wave) can be formed.

Note that the planar actuator according to the present invention can function as a moving device if it is made movable without being fixed to the floor or the like.

7, 8, and 9 are diagrams for explaining a method of manufacturing the planar actuator shown in FIG. 1.

First, referring to the preparation process shown in FIG. 7A, a plurality of urethane partition sheet pieces 11a and a plurality of urethane partition sheet pieces 11b are prepared. Glue allowances for pasting silicone resin or the like are provided at both ends of the urethane partition sheet pieces 11a and 11b (see (B) in FIG. 7). In addition, a plurality of heat-resistant release sheets 12, such as a plurality of cooking sheets 12, each having a cross section shaped like a dogleg, that is, folded, are prepared.

Next, referring to the urethane partition sheet/cooking sheet sandwiching step in FIG. A letter-shaped urethane partition sheet 11 is created. Next, a plurality of dogleg-shaped urethane partition sheets 11 and a plurality of dogleg-shaped cooking sheets 12 are alternately sandwiched to form a urethane partition sheet/cooking sheet combination 13.

Next, referring to the upper and lower urethane sheet preparation process shown in FIG. Prepare sheet U.

Next, referring to the upper and lower urethane sheet laminating process shown in FIG. /A urethane upper sheet U for sealing the upper surface of the cooking sheet assembly 13 is bonded with silicone resin or the like.

Next, referring to the heat press step shown in FIG. 9A, the urethane partition sheet/cooking sheet assembly 13 to which the urethane lower sheet D and the urethane upper sheet U are laminated is subjected to a press pressure of up to 700 kg from above and below. Heat press is performed using a heat press machine (Tex-4050FH) 20.

The heat press process will be explained in detail. First, in the preheating step, the heat press machine 20 is preheated at 175° C. for 30 seconds. Next, the urethane partition sheet/cooking sheet combination 13 with the urethane lower sheet D and the urethane upper sheet U laminated together is set in the heat press machine 20, and the heat press machine 20 is heated to 175°C, which is slightly higher than the urethane welding temperature of 170°C. Heat press for about 100 to 200 seconds. Note that if heat pressing is performed at a temperature that is too high than the welding temperature, air bubbles will be generated inside and will cause peeling if the interface is pulled. Next, it is cooled for, for example, 300 seconds until the vapor pressure of the volatile components contained therein becomes 164° C. or lower, which is atmospheric pressure. As a result, the partition sheet 11, the lower sheet D, and the upper sheet U are welded together, but welding of the partition sheets 11 to each other is prevented by the cooking sheet 12, which is a heat-resistant release sheet. Therefore, it is possible to realize a plurality of chambers divided by the partition sheet 11 having a dogleg-shaped cross section. In this way, the cooking sheet 12 is not necessary for the planar actuator itself, but is essential for manufacturing the planar actuator.

Finally, referring to the final step shown in FIG. It is sealed with silicone resin, etc. (not shown). This completes the planar actuator.

In the embodiments described above, urethane is used for the partition sheet, the lower sheet, and the upper sheet, but other thermoplastic materials may be used. Furthermore, although a cooking sheet was used as the heat-resistant release sheet, other heat-resistant release materials such as silicone resin sheets may be used.

Further, in the above-described embodiment, the chambers of the planar actuator are grouped into three chambers with every second chamber. That is, when N is an even number, the chambers of the planar actuator may be grouped into (N+1) chambers every other N chambers. On the other hand, if N is an odd number of 3 or more, the planar actuator chambers may be grouped into (N+1) chambers with every N chambers, but each chamber group may be in a positive pressure state or a negative pressure state. , a positive pressure state, a negative pressure state, . . . instead of being driven alternately in a positive pressure state, a positive pressure state, a negative pressure state, a positive pressure state, . . . . In the former case, even if the partition sheet is bent/stretched, it becomes a standing wave rather than a traveling wave (backward wave), and as a result, if it is a conveying device, the object hardly moves, or Even mobile devices can hardly move. Therefore, in order to form a traveling wave (backward wave), the number of chamber groups in a positive pressure state and the number of chamber groups in a negative pressure state may be made different.

Furthermore, in the present invention, a plurality of planar actuators may be provided. That is, as shown in FIG. 10, which shows a conveying device or a moving device in which a plurality of planar actuators of FIG. to be different. For example, the direction of the partition sheet C of the planar actuator A is the X direction, and the direction of the partition sheet D of the planar actuator B is the Y direction. Therefore, when a plurality of planar actuators A are simultaneously driven, the object on the transport device or the moving device moves in the Y direction, whereas when a plurality of planar actuators B are simultaneously driven, the object on the transport device or the moving device moves. The device moves in the X direction. Note that the number of planar actuators A and the number of planar actuators B can be changed as appropriate. The transport device shown in FIG. 10 can be applied to beds in hospitals, etc., and can move patients who have difficulty walking in the X direction or the Y direction.

Further, in the above-described embodiment, each chamber group is controlled to a positive pressure state and a negative pressure state, but each chamber group may be controlled to a positive pressure state and an atmospheric pressure state. The atmospheric pressure state can be achieved by turning off the solenoid valves 41 and 42 and turning off the pump 43 in FIG. 4B. However, in this case, the extrusion force is slightly inferior.

Furthermore, in the above-described embodiment, the partition sheet and the heat-resistant release sheet have one dogleg-shaped cross section, but the same effect can be obtained by using multiple dogleg-shaped cross sections, that is, bellows-shaped cross sections. It will be done.

Further, instead of the dogleg-shaped cross section, an inclined flat plate-like cross section may be used. That is, as shown in FIGS. 11A and 11B, when each chamber 2'-1, 2'-2, ... is in a non-pressure state (atmospheric state), the inclined flat urethane partition sheet 1' -1, 1'-2, . . . have a lower height in the Z direction. If each chamber 2'-1, 2'-2, ... is in a positive pressure state, the height of the flat urethane partition sheet 1'-1, 1'-2, ... will be large, and on the other hand, each chamber 2' -1, 2'-2, . . . are in a negative pressure state, the heights of the flat urethane partition sheets 1'-1, 1'-2, . . . become smaller. Therefore, by grouping each chamber 2'-1, 2'-2, etc. and putting them in a positive pressure state or a negative pressure state (or atmospheric state), a traveling wave can be formed as shown in FIG. 11(C). . In the case of an inclined flat partition sheet, the flat partition sheet cannot be driven in a direction opposite to the direction of inclination. In other words, a backward wave cannot be formed.

FIG. 12 is a graph showing the load-traveling wave (retarded wave) average speed characteristic.

As shown in FIG. 12, in the case of the inclined flat partition sheets 1'-1, 1'-2, ..., compared to the case of the dogleg-shaped partition sheets 1-0, 1-1, ... Average speed is slightly lower. In addition, in both the dogleg-shaped partition sheets 1-0, 1-1, ... and the inclined flat partition sheets 1'-1, 1'-2, ..., control using positive pressure + atmospheric pressure is positive. The average speed is slightly inferior compared to control using pressure + negative pressure.

Furthermore, the present invention may be applied to any obvious modifications of the embodiments described above.

As described above, the present invention can be used as a transport device for beds in hospitals and the like.

D: Lower sheet U: Upper sheet 1-0, 1-1, ...: Urethane partition sheet 2-1, 2-2, ...: Chamber 1'-1, 1'-2, ...: Slanted urethane partition sheet 2'-1, 2'-2,...: Chambers 3-1, 3-2, 3-3: Tubes 4-1, 4-2, 4-3: Pressure control units 41, 42: Solenoid valves
43: Pump 44: Intake valve 45: Exhaust valve 5: Control unit 11a, 11b: Urethane partition sheet piece 11: Urethane partition sheet 12: Cooking sheet 13: Urethane partition sheet/cooking sheet combination 20: Heat press machine A, B : Planar actuator
C, D: Partition sheet L: One wavelength of traveling waves (backward waves) 101, 102, 103, 104: Flexible members 102a, 103a: Straight stitches 105A, 105B, 105C: Tubes 106A, 106B, 106C: Flat space

Claims (16)

A plurality of chambers are provided between a lower sheet and an upper sheet, partitioned by a plurality of partition sheets for changing a distance between the lower sheet and the upper sheet, and extending in a first direction. A planar actuator arranged in parallel in a second direction different from the first direction,
(N+1) room groups are formed by every N (N is an integer of 2 or more) rooms in the second direction;
(N+1) pressure control units for controlling each of the chamber groups to a positive pressure state with a positive pressure greater than the atmospheric pressure and a negative pressure state with a negative pressure smaller than the atmospheric pressure;
a control unit for controlling the (N+1) pressure control units to make the number of the chamber groups in the positive pressure state different from the number of the chamber groups in the negative pressure state in a steady state; actuator. A plurality of chambers are provided between a lower sheet and an upper sheet, partitioned by a plurality of partition sheets for changing a distance between the lower sheet and the upper sheet, and extending in a first direction. A planar actuator arranged in parallel in a second direction different from the first direction,
(N+1) room groups are formed by every N (N is an integer of 2 or more) rooms in the second direction;
(N+1) pressure control units for controlling each chamber group to a positive pressure state of a positive pressure greater than atmospheric pressure, and an atmospheric pressure state;
a control unit for controlling the (N+1) pressure control units to make the number of the chamber groups in the positive pressure state different from the number of the chamber groups in the atmospheric pressure state in a steady state; actuator. The planar actuator according to claim 1 or 2, wherein the partition sheet has an inclined flat plate shape. 3. The planar actuator according to claim 1, wherein the partition sheet has at least one dogleg shape in cross section. The planar actuator according to any one of claims 1 to 4 , wherein the partition sheet, the lower sheet, and the upper sheet are made of thermoplastic material. The planar actuator according to claim 5 , wherein the thermoplastic material is urethane. A conveyance device comprising the planar actuator according to any one of claims 1 to 6 . A moving device comprising the planar actuator according to any one of claims 1 to 6 . A conveyance device according to any one of claims 1 to 6 , wherein a plurality of the planar actuators are arranged adjacent to each other, and the partition sheets of at least two of the planar actuators have different directions. The moving device according to any one of claims 1 to 6 , wherein a plurality of the planar actuators are arranged adjacent to each other, and the partition sheets of at least two of the planar actuators have different directions. a first step of alternately sandwiching a thermoplastic partition sheet and a heat-resistant release sheet to form a thermoplastic partition sheet/heat-resistant release sheet combination;
a second step of laminating a thermoplastic lower sheet and a thermoplastic upper sheet to the thermoplastic partition sheet/heat-resistant release sheet combination from above and below;
a third step of heat-pressing the thermoplastic partition sheet/heat-resistant release sheet combination in which the thermoplastic lower sheet and the thermoplastic upper sheet are bonded together from the above-mentioned vertical direction. 12. The method for manufacturing a planar actuator according to claim 11 , wherein the partition sheet has an inclined flat plate shape. 12. The method for manufacturing a planar actuator according to claim 11 , wherein the partition sheet has at least one dogleg shape in cross section. 14. The method for manufacturing a planar actuator according to claim 13 , wherein the at least one thermoplastic partition sheet having a dogleg-shaped cross section is obtained by bonding two thermoplastic partition sheet pieces. 12. The method for manufacturing a planar actuator according to claim 11 , wherein the thermoplastic partition sheet, the thermoplastic lower sheet, and the thermoplastic upper sheet are made of urethane. 12. The method for manufacturing a planar actuator according to claim 11 , wherein the heat-resistant release sheet is made of a cooking sheet or a silicone resin sheet.

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