JP2021121751A - Planar actuator, transport device and moving device each using the same, and manufacturing method - Google Patents

Abstract

To provide a planar actuator having a large extrusion force, a transport device, a moving device and a manufacturing method.SOLUTION: Chambers 2-1, 2-2, ..., 2-9 which are partitioned by urethane partitioning sheets 1-0, 1-1, 1-2, ..., 1-9 whose cross sections are formed into dogleg shapes along a Y-direction are arranged in an X-direction in parallel with one another between a lower-side sheet D and an upper-side sheet U. Every-two chambers 1-1, 1-4, ... constitute a first chamber group, and are connected to a tube 3-1. Every-two chambers 1-2, 1-5, ... constitute a second chamber groove, and are connected to a tube 3-2. Every-two chambers 1-3, 1-6, ... constitute a third chamber group, and are connected to a tube 3-3. The tubes 3-1, 3-2 and 3-3 are connected to pressure control units 4-1, 4-2 and 4-3, respectively, and the pressure control units 4-1, 4-2 and 4-3 are controlled by a control unit 5. At a normal time, the two chamber groups are brought into positive pressure states, and one chamber group is brought into a negative pressure state.SELECTED DRAWING: Figure 1

Description

The present invention relates to a planar actuator that generates a traveling wave (backward wave) by fluid pressure energy, a transport device and a moving device using the planar actuator, and a manufacturing method.

A method of manufacturing a conventional planar actuator that generates a traveling wave by fluid pressure energy will be described with reference to FIGS. 13, 14, and 15 (see: Patent Document 1).

First, referring to FIG. 13, four layers of flexible members 101, 102, 103, 104 made of cloth are prepared. Each of the flexible members 101, 102, 103, 104 is easy to extend in the length direction and difficult to extend in the width direction. Further, the intermediate flexible members 102 and 103 are provided with straight stitches 102a and 103a in the length direction in order to suppress stretching in the length direction. Further, the intermediate flexible members 102 and 103 are provided with openings 102b and 103b at equal intervals in the length direction. The flexible members 101, 102, 103, 104 are overlapped and sewn at both ends.

Next, referring to FIG. 14, the three tubes 105A, 105B, 105C are inserted between the sewn flexible members 101, 102, 103, 104. Specifically, the tube 105A is inserted so as to reciprocate in the upper and lower flat spaces 106A, the tube 105B is inserted so as to reciprocate in the upper and lower flat spaces 106B, and the tube 105C reciprocates in the upper and lower flat spaces 106C. Will be inserted. Here, assuming that one cycle of the traveling wave (delayed wave) is L, the lengths of the flat spaces 106A, 106B, 106C, that is, the lengths of the intermediate flexible members 102, 103 are L / 3.

The operation of the planar actuator obtained by the manufacturing method shown in FIGS. 13 and 14 is performed as shown in FIG. That is, the tubes 105A, 105B, and 105C are sequentially pressurized and non-pressurized repeatedly. As a result, the flat spaces 106A, 106B, and 106C are sequentially expanded and non-expanded, and a traveling wave (backward wave) can be generated in the planar actuator.

If the planar actuator obtained by the manufacturing methods of FIGS. 13 and 14 is fixed to the floor or the like, the planar actuator acts as a transport device, and if the planar actuator is movable without being fixed to the floor or the like, the surface is surfaced. The shape actuator acts as a moving device on the floor or the like.

JP-A-2017-155767

However, in the conventional planar actuators shown in FIGS. 13, 14, and 15, only the pressure due to the expansion and non-expansion of the tubes 105A, 105B, and 105C directly contributes to the push output of the planar actuator, and the push output is It is less than 40 Pa. Therefore, it is difficult to lift a heavy object, and when it is used as a transport device and a moving device, there is a problem that the force is insufficient.

Further, since the complicated process of inserting the tubes 105A, 105B, 105C into the flat spaces 106A, 106B, 106C above and below the planar actuator so as to reciprocate is required, there is also a problem that the manufacturing cost is high.

In order to solve the above-mentioned problems, the planar actuator according to the present invention has a plurality of chambers between a lower sheet and an upper sheet, which are divided by a plurality of partition sheets and extend in a first direction. It is a planar actuator arranged in parallel in a second direction different from the first direction, and constitutes (N + 1) chamber groups by chambers every N (N is an integer of 2 or more) in the second direction. Each room group is provided with (N + 1) pressure control units for controlling a positive pressure state and a negative pressure state (or atmospheric pressure state).

Further, the method for manufacturing a planar actuator according to the present invention includes a first step of alternately sandwiching a plurality of thermoplastic partition sheets and a plurality of heat-resistant release sheets to form a thermoplastic partition sheet / heat-resistant release sheet combination. , The second step of laminating the thermoplastic lower sheet and the thermoplastic upper sheet from above and below to the thermoplastic partition sheet / heat-resistant peeling sheet union, and the heat of laminating the thermoplastic lower sheet and the thermoplastic upper sheet. It includes a third step of heat-pressing the thermoplastic partition sheet / heat-resistant release sheet combination from the vertical direction.

According to the present invention, the pushing force of the planar actuator is such that the bending / stretching motion of the partition sheet of each chamber is added to the traveling wave (backward wave) accompanying the expansion and non-expansion of each chamber. Can be increased. Further, since it is not necessary to insert the tube between the chambers in the planar actuator, the manufacturing process can be simplified, and therefore the manufacturing cost can be reduced.

It is a perspective view which shows the embodiment of the planar actuator which concerns on this invention. It is a photograph of the planar actuator of FIG. It is a figure for demonstrating the state of the chamber of FIG. 1, (A) shows a non-pressure (atmosphere) state, (B) shows a positive pressure / negative pressure mixed state at a steady state. It is a figure which shows the detail of the pressure control unit of FIG. It is a figure for demonstrating the operation of the planar actuator of FIG. It is a photograph when the planar actuator of FIG. 1 is operated as a transport device. It is a figure for demonstrating the manufacturing method of the planar actuator of FIG. It is a figure for demonstrating the manufacturing method of the planar actuator of FIG. It is a figure for demonstrating the manufacturing method of the planar actuator of FIG. It is a top view which shows the application example of the planar actuator of FIG. An example of modification of the partition sheet of FIG. 3 is shown, (A) is a cross-sectional view, (B) is a photograph showing the real thing, and (C) is a photograph in operation. It is a graph which shows the load-average velocity characteristic by a partition sheet. It is a figure for demonstrating the manufacturing method of the conventional planar actuator, (A) is an exploded perspective view, (B) is an assembly perspective view. It is a figure for demonstrating the manufacturing method of the conventional planar actuator, (A) is an overall perspective view, (B) is a side view, (C) is an enlarged sectional view. It is a figure for demonstrating the operation of the planar actuator obtained by the manufacturing method of FIG. 13 and FIG.

FIG. 1 is a perspective view showing an embodiment of a planar actuator according to the present invention, and FIG. 2 is a photograph of the planar actuator of FIG.

In the planar actuator of FIG. 1, a thermoplastic material partition sheet between the lower sheet D and the upper sheet U and having a cross section along the Y direction of a "<" shape, for example, urethane partition sheets 1-0, 1- Rooms 2-1, 2-2, ..., 2-9 classified by 1, 1-2, ..., 1-9 are arranged in parallel in the X direction. The two chambers 1-1, 1-4, ... Consist of the first chamber group and are connected to the urethane tube 3-1. The two chambers 1-2, 1-5, ... Consist of a second chamber group and are connected to a tube 3-2 made of urethane. The two chambers 1-3, 1-6, ... Consist of a third chamber group and are connected to a tube 3-3 made of urethane. Both ends of chambers 2-1, 2-2, ... Are sealed as shown in FIG. 2 so that air does not leak and enter. The tubes 3-1, 3-2, and 3-3 are connected to the pressure control units 4-1, 4-2, and 4-3, respectively, and the pressure control units 4-1, 4-2, and 4-3 are controlled. It is controlled by the unit 5. The control unit 5 sends the electromagnetic valve control control signals C-1-1 and C-1-2 and the pump drive drive signal D-1 to the pressure control unit 4-1. The control unit 5 sends the pressure control unit 4- The control signals C-2-1 and C-2-2 for controlling the electromagnetic valve and the drive signal D-2 for driving the pump are sent to 2, and the control unit 5 sends the control signal C for controlling the electromagnetic valve to the pressure control unit 4-3. 3-1 and C-3-2 and the pump drive drive signal D-3 are transmitted. The control unit 5 is composed of a microcomputer or the like. The lower sheet D and the upper sheet U are also made of a thermoplastic material such as urethane.

FIG. 3 is a diagram for explaining the states of chambers 2-1, 2-2, 2-3, 2-4, 2-5, and 2-6 of FIG. 1, and (A) is a non-pressure (atmosphere). ) State, (B) shows a mixed state of positive pressure and negative pressure at a steady state. Here, the positive pressure is a pressure larger than the atmospheric pressure, and the negative pressure is a pressure smaller than the atmospheric pressure. In FIG. 3, the lower sheet D and the upper sheet U are not shown.

As shown in FIG. 3A, when each chamber 2-1, 2-2, 2-3, 2-4, 2-5, 2-6 is in a non-pressure state (atmospheric state), a urethane partition sheet Since the "<" shape of 1-0, 1-1, 1-2, ..., 1-6 is maintained, the height H0 in the Z direction is low, for example, about 0.8 mm.

If all chambers 2-1, 2-2, 2-3, 2-4, 2-5, 2-6 are in a negative pressure state, all urethane partition sheets 1-0, 1-1, 1 Since the "<" shape of -2, ..., 1-6 is further bent and becomes flat, the height H2 in the Z direction of the central portion is very small, and the urethane partition sheets 1-0, 1-1, The thickness of 1-2, ..., 1-6 is, for example, about 0.2 mm, and the length L2 in the X direction becomes smaller. If all chambers 2-1, 2-2, 2-3, 2-4, 2-5, and 2-6 are in a positive pressure state, all urethane partition sheets 1-0, 1-1. Since the "<" shape of 1-2, ..., 1-6 is eliminated and the stretched state is obtained, the height H1 in the Z direction is very large, and the urethane partition sheets 1-0, 1-1, 1- The height H1 in the Z direction in the stretched state of 2, ..., 1-6 is, for example, about 8 to 10 mm, and the length L1 in the X direction becomes large.

As shown in FIG. 3B, chambers 2-1 and 2-4 of the first chamber group and chambers 2-4 and 2-5 of the second chamber group are in a positive pressure state, and the third chamber is in a positive pressure state. Even when the chambers 2-3 and 2-6 of the group are in the negative pressure state, the urethane partition sheets 1-0, 1-1, 1-2, ..., 1-6 are all in the stretched state, and therefore the chambers. The Z-direction height H1 of 2-1, 2-2, 2-4, and 2-5 is as large as 8 to 10 mm, and the Z-direction height H2 of the central portion of the chambers 2-3 and 2-6 is 0.2 mm. Becomes smaller. That is, the height H1 in the Z direction of the chambers 2-1 and 2-4 in the positive pressure state; 2-2 and 2-5 is the height H2 in the Z direction of the central portion of the chambers 2-3 and 2-6 in the negative pressure state. The length L1 of the larger and positive pressure chambers 2-1 and 2-4; 2-2 and 2-5 is larger than the length L2 of the negative pressure chambers 2-3 and 2-6. Therefore, the volumes of the chambers 2-1 and 2-4 in the positive pressure state; 2-2 and 2-5 are larger than the volumes of the chambers 2-2 and 2-5 in the negative pressure state, and each chamber 2 of each chamber group By sequentially setting -1, 2-4; 2-2, 2-5; 2-3, and 2-6 to the positive pressure state and the negative pressure state, one cycle L (= 2 · L1 + L2) has two large volumes. A traveling wave (backward wave) consisting of a chamber (L1, H1) and one chamber (L2, H2) having a small volume can be formed.

FIG. 4 is a diagram showing details of the pressure control unit 4-1 (4-2, 4-3) of FIG.

In FIG. 4, the pressure control unit 4-1 (4-2, 4-3) is composed of the solenoid valves 41, 42 and the pump 43 provided between the solenoid valves 41, 42, and the solenoid valves 41, 42 are The pump 43 is controlled by the control signals C-1-1 (C-1-2, C-1-3) and C-2-1 (C-2-2, C-2-3) of the control unit 5. It is controlled by the drive signals D-1 (D-2, D-3) of the control unit 5. 44 is an intake valve and 45 is an exhaust valve.

The positive pressure operation of FIG. 4A will be described. The control signals C-1-1 (C-1-2, C-1-3) and C-2-1 (C-2-2, C-2-3) are set to the on-level ("1") and driven. When the signals D-1 (D-2, D-3) are set to the drive level according to the positive pressure, the pump 43 operates, the electromagnetic valve 41 is turned on, and the intake valve 44 is connected to the intake port 43a of the pump 43. Then, the electromagnetic valve 42 is turned on and the exhaust port 43b of the pump 43 is connected to the tube 3-1 (3-2, 3-3). As a result, air is sent from the intake valve 44 to the tubes 3-1 (3-2, 3-3) via the solenoid valve 41, the pump 43, and the solenoid valve 42. Therefore, chambers 2-1 and 2-4, ... (2-2, 2-5, ...; 2-3, 2-6, ...) Connected to tubes 3-1 (3-2, 3-3). Is in a positive pressure state.

The negative pressure operation of FIG. 4B will be described. The control signals C-1-1 (C-1-2, C-1-3) and C-2-1 (C-2-2, C-2-3) are set to the off level ("0") and driven. When the signal D-1 (D-2, D-3) is set to the drive level corresponding to the negative pressure, the pump 43 operates and the solenoid valve 41 is turned off, that is, the solenoid valve 41 is spring-returned and the chambers 2-1 and 2- 4, ... (2-2, 2-5, ...; 2-3, 2-6, ...) Are connected to the intake port 43a of the pump 43, and the solenoid valve 42 is turned off, that is, spring-returned to pump 43. The exhaust port 43b of the above is connected to the exhaust valve 45. As a result, air flows from the tube 3-1 (3-2, 3-3) to the exhaust valve 45 via the solenoid valve 41, the pump 43, and the solenoid valve 42. Therefore, chambers 2-1 and 2-4, ... (2-2, 2-5, ...; 2-3, 2-6, ...) Connected to tubes 3-1 (3-2, 3-3). Is in a negative pressure state. If the positive pressure and the negative pressure are symmetrical with respect to the atmospheric pressure, the drive levels of the drive signals D-1 (D-2, D-3) may always be the same.

FIG. 5 is a diagram for explaining the operation of the planar actuator of FIG. 1 executed by the control unit 5. This operation is stored as a control program in the ROM or the like of the control unit 5. In FIG. 5, the planar actuator is fixed to the floor or the like and acts as a transport device for transporting the object O. Also in FIG. 5, the lower sheet D and the upper sheet U are not shown.

First, referring to (A) of FIG. 5, the pressure control units 4-1 and 4-2 and 4-3 have chambers 2-1 and 2-4; 2-2, 2-5; 2-3, 2 Let -6 be a positive pressure state, a positive pressure state, and a negative pressure state, respectively. As a result, the volumes of chambers 2-1, 2-4, 2-2, and 2-5 are large, and the volumes of chambers 2-3 and 2-6 are small. In this case, all urethane partition sheets 1-0, 1-1, 1-2, ..., 1-6 are in a highly stretched state.

Next, referring to (B) of FIG. 5, the pressure control units 4-1 and 4-2 and 4-3 have chambers 2-1 and 2-4; 2-2, 2-5; 2-3, 2 Let -6 be a positive pressure state, a negative pressure state, and a positive pressure state, respectively. As a result, the volumes of chambers 2-2 and 2-5 become smaller, while the volumes of chambers 2-3 and 2-6 become larger. In this case, the urethane partition sheets 1-2 and 1-5 are temporarily bent into a low "<" shape, but finally, as shown in FIG. 5C, the urethane partition sheets are formed. 1-2 and 1-5 are in a high stretch state again. In this way, the bending / stretching operation of the urethane partition sheets 1-2 and 1-5 is added together with the formation of the traveling wave by the contraction of the chambers 2-2 and 2-5 and the expansion of the chambers 2-3 and 2-6. , The push output of the planar actuator increases. As a result, the object O on the chambers 2-1 and 2-4 moves slightly to the right side in the figure due to the contact pressure with the chambers 2-1 and 2-4.

Next, referring to (D) of FIG. 5, the pressure control units 4-1 and 4-2 and 4-3 have chambers 2-1 and 2-4; 2-2, 2-5; 2-3, 2 Let -6 be a positive pressure state, a positive pressure state, and a negative pressure state, respectively. As a result, the volumes of chambers 2-1 and 2-4 become smaller, while the volumes of chambers 2-2 and 2-5 become larger. In this case, the urethane partition sheets 1-1 and 1-4 are temporarily bent into a low "<" shape, but finally, as shown in FIG. 5 (E), the urethane partition sheet is formed. 1-1, 1-4 are in a high stretch state again. In this way, along with the formation of the traveling wave by the contraction of the chambers 2-1 and 2-4 and the expansion of the chambers 2-2 and 2-5, the bending / stretching operation of the urethane partition sheets 1-1 and 1-4 is added. , The push output of the planar actuator increases. As a result, the object O on the chambers 2-3 and 2-6 moves slightly to the right side in the figure due to the contact pressure with the chambers 2-3 and 2-6.

Next, referring to FIG. 5 (F), the pressure control units 4-1, 4-2, and 4-3 have chambers 2-1 and 2-4; 2-2, 2-5; 2-3, 2 Let -6 be a positive pressure state, a positive pressure state, and a negative pressure state, respectively. As a result, the volumes of chambers 2-3 and 2-6 become smaller, while the volumes of chambers 2-1 and 2-4 become larger. In this case, the urethane partition sheets 1-0, 1-3, and 1-6 are temporarily bent into a low "<" shape, but finally, as shown in FIG. 5 (G). , Urethane partition sheets 1-0, 1-3, 1-6 are in a high stretch state again. In this way, the urethane partition sheets 1-0, 1-3, 1-6 are bent / With the addition of stretching motion, the push output of the planar actuator increases. As a result, the object O on the chambers 2-2 and 2-5 moves slightly to the right side in the figure due to the contact pressure with the chambers 2-2 and 2-5.

By repeating the operations of (A), (B), (C), (D), (E), and (F) in FIG. 5, one cycle L (= 2. L1 + L2) is in a positive pressure state. A traveling wave consisting of two chambers (length L1) and one chamber (length L2) in a negative pressure state is formed, and the urethane partition sheets 1-0, 1-1, ... Are bent / extended. This is done and the object O moves to the right. For example, as shown in FIG. 6, four 2L PET bottles P could be placed and moved as the object O. Therefore, the push output of the planar actuator according to the present invention could be 40 Pa to 60 Pa. In (A), (C), (E), and (G) of FIG. 5 in the steady state, the number of chamber groups in the positive pressure state is 2, and the number of chamber groups in the negative pressure state is 1. be. In any case, a traveling wave (backward wave) can be formed by making the number of chamber groups in the positive pressure state and the number of chamber groups in the negative pressure state different from each other.

The planar actuator according to the present invention can act as a moving device if it can be moved without being fixed to the floor or the like.

7, 8 and 9 are diagrams for explaining a method of manufacturing the planar actuator of FIG. 1.

First, referring to the preparation step of FIG. 7A, a plurality of urethane partition sheet pieces 11a and a plurality of urethane partition sheet pieces 11b are prepared. Glue allowances for attaching silicone resin or the like are provided at both ends of the urethane partition sheet pieces 11a and 11b (see (B) in FIG. 7). Further, a heat-resistant peeling sheet having a "<" shape in cross section, that is, a bent heat-resistant peeling sheet, for example, a plurality of cooking sheets 12 are prepared.

Next, referring to the urethane partition sheet / cooking sheet sandwiching step of FIG. 7B, the urethane partition sheet piece 11a and the urethane partition sheet piece 11b are attached and fixed with a silicone resin or the like. A urethane partition sheet 11 having a U-shape is created. Next, a plurality of "K" -shaped urethane partition sheets 11 and a plurality of "K" -shaped cooking sheets 12 are alternately sandwiched to form a urethane partition sheet / cooking sheet combination 13.

Next, referring to the upper and lower urethane sheet preparation steps shown in FIG. 8A, the urethane lower sheet D for sealing the lower surface side of the urethane partition sheet / cooking sheet combination 13 and the urethane upper surface for sealing the upper surface side Prepare the seat U.

Next, referring to the upper and lower urethane sheet bonding steps shown in FIG. 8B, the urethane lower sheet D is bonded to the lower surface side of the urethane partition sheet / cooking sheet combination 13 with a silicone resin or the like, and the urethane partition sheet is bonded. / The urethane upper sheet U for sealing the upper surface side of the cooking sheet combination 13 is bonded with a silicone resin or the like.

Next, referring to the heat pressing process shown in FIG. 9A, the urethane partition sheet / cooking sheet combination 13 to which the urethane lower sheet D and the urethane upper sheet U are bonded is pressed from above and below with a pressing pressure of Max 700 kg. Heat press is performed by the heat press machine (Tex-4050FH) 20.

The heat press process will be described in detail. First, in the preheating step, the heat press machine 20 is preheated at 175 ° C. for 30 seconds. Next, the urethane partition sheet / cooking sheet combination 13 to which the urethane lower sheet D and the urethane upper sheet U are bonded to the heat press machine 20 is set in the heat press machine 20, and the urethane welding temperature is 175 ° C., which is slightly higher than 170 ° C. Heat press for about 100 to 200 sec. If heat pressing is performed at a temperature higher than the welding temperature, bubbles are generated inside and pulling the interface causes peeling. Then, it is cooled for, for example, 300 seconds until the vapor pressure of the volatile component contained therein becomes 164 ° C. or lower, which becomes the atmospheric pressure. As a result, the partition sheet 11, the lower sheet D, and the upper sheet U are welded together, but the welding of the partition sheets 11 to each other is hindered by the cooking sheet 12, which is a heat-resistant peeling sheet. Therefore, it is possible to realize a plurality of chambers separated by the partition sheet 11 having a dogleg-shaped cross section. As described above, the cooking sheet 12 is not necessary for the planar actuator itself, but is essential for manufacturing the planar actuator.

Finally, referring to the final step shown in FIG. 9B, the tubes 3-1, 3-2, and 3-3 are attached to the planar actuator taken out from the heat press machine 20, and both ends of the planar actuator are attached. Seal with a silicone resin (not shown). This completes the planar actuator.

In the above-described embodiment, urethane is used as the partition sheet, the lower sheet and the upper sheet, but other thermoplastic materials may be used. Further, although the cooking sheet is used as the heat-resistant peeling sheet, another heat-resistant peeling material such as a silicone resin sheet may be used.

Further, in the above-described embodiment, the planar actuator chambers are grouped into three chambers with every two chambers. That is, when N is an even number, the chambers of the planar actuator may be grouped into (N + 1) chambers for every N chambers. On the other hand, when N is an odd number of 3 or more, the chambers of the planar actuator may be grouped into (N + 1) chambers for every N chambers, but each chamber group is in a positive pressure state or a negative pressure state. , Positive pressure state, negative pressure state, ..., Not driven alternately, but positive pressure state, positive pressure state, negative pressure state, positive pressure state, .... In the former case, even if the partition sheet is bent / extended, it becomes a standing wave instead of a traveling wave (backward wave), and as a result, if it is a transport device, the object hardly moves or moves. Even a mobile device can hardly move. Therefore, in order to form a traveling wave (backward wave), the number of chamber groups in the positive pressure state and the number of chamber groups in the negative pressure state may be different.

Further, in the present invention, a plurality of planar actuators may be provided. That is, as shown in FIG. 10 showing a transfer device or a moving device in which a plurality of planar actuators of FIG. 1 are arranged adjacent to each other, the direction of the partition sheet C of the planar actuator A and the direction of the partition sheet D of the planar actuator B. And make it different. For example, the direction of the partition sheet C of the planar actuator A is the X direction, and the direction of the partition sheet D of the planar actuator B is the Y direction. Therefore, when a plurality of planar actuators A are driven at the same time, the object or the moving device on the transport device moves in the Y direction, while when the plurality of planar actuators B are driven at the same time, the object or the moving device on the transport device moves. The device moves in the X direction. The number of planar actuators A and the number of planar actuators B can be changed as appropriate. The transport device of FIG. 10 can be applied to a bed or the like in a hospital or the like, and can move a patient who has difficulty walking in the X direction or the Y direction.

Further, in the above-described embodiment, the positive pressure state and the negative pressure state are controlled for each room group, but the positive pressure state and the atmospheric pressure state may be controlled for each room group. The atmospheric pressure state can be achieved by turning off the solenoid valves 41 and 42 and turning off the pump 43 in FIG. 4B. However, in this case, the push output is slightly inferior.

Further, in the above-described embodiment, the partition sheet and the heat-resistant peeling sheet have one "K" -shaped cross section, but the same effect can be obtained with a plurality of "K" -shaped cross sections, that is, bellows-shaped cross sections. Be done.

Further, instead of the "<" -shaped cross section, an inclined flat plate-shaped cross section may be used. That is, as shown in FIGS. 11A and 11B, when each chamber 2'-1, 2'-2, ... Is in a non-pressure state (atmospheric state), an inclined flat plate urethane partition sheet 1'. The height of -1, 1'-2, ... Is lowered in the Z direction. If each chamber 2'-1, 2'-2, ... Is in a positive pressure state, the height of the flat urethane partition sheet 1'-1, 1'-2, ... Will increase, while each chamber 2', ... When -1, 2'-2, ... Are in a negative pressure state, the heights of the flat urethane partition sheets 1'-1, 1'-2, ... Are reduced. Therefore, by grouping each chamber 2'-1, 2'-2, ... Into a positive pressure state and a negative pressure state (or atmospheric state), a traveling wave can be formed as shown in FIG. 11 (C). .. In the case of an inclined flat plate-shaped partition sheet, the flat plate-shaped partition sheet cannot be driven in the direction opposite to the inclined direction. That is, a receding wave cannot be formed.

FIG. 12 is a graph showing the load-traveling wave (slow regression wave) average velocity characteristic.

As shown in FIG. 12, in the case of the inclined flat plate-shaped partition sheets 1'-1, 1'-2, ..., Compared with the case of the dogleg-shaped partition sheets 1-0, 1-1, ... The average speed is slightly inferior. Further, in any of the dogleg-shaped partition sheets 1-0, 1-1, ... And the inclined flat plate-shaped partition sheets 1'-1, 1'-2, ..., The control by positive pressure + atmospheric pressure is positive. The average speed is slightly inferior to the control by pressure + negative pressure.

Furthermore, the present invention may be applied to any modification within the obvious scope of the above-mentioned examples.

As described above, the present invention can be used as a transport device in a bed or the like in a hospital or the like.

D: Lower sheet U: Upper sheet 1-0, 1-1, ...: Urethane partition sheet 2-1, 2-2, ...: Chamber 1'-1, 1'-2, ...: Inclined urethane partition sheet 2'-1, 2'-2, ...: Chambers 3-1, 3-2, 3-3: Tubes 4-1 and 4-2, 4-3: Pressure control units 41, 42: Solenoid valve
43: Pump 44: Intake valve 45: Exhaust valve 5: Control units 11a, 11b: Urethane partition sheet piece 11: Urethane partition sheet 12: Cooking sheet 13: Urethane partition sheet / cooking sheet combination 20: Heat press machines A, B : Planar actuator
C, D: Partition sheet L: Traveling wave (backward wave) 1 wavelength 101, 102, 103, 104: Flexible members 102a, 103a: Straight stitch 105A, 105B, 105C: Tube 106A, 106B, 106C: Flat space

Claims (18)

A plurality of chambers between the lower sheet and the upper sheet, which are separated by a plurality of partition sheets for changing the distance between the lower sheet and the upper sheet and extend in the first direction. A planar actuator arranged in parallel in a second direction different from the first direction.
(N + 1) chamber groups are formed by the chambers for every N (N is an integer of 2 or more) in the second direction.
A planar actuator including (N + 1) pressure control units for controlling a positive pressure state having a positive pressure greater than the atmospheric pressure and a negative pressure state having a negative pressure smaller than the atmospheric pressure for each chamber group. A plurality of chambers between the lower sheet and the upper sheet, which are separated by a plurality of partition sheets for changing the distance between the lower sheet and the upper sheet and extend in the first direction. A planar actuator arranged in parallel in a second direction different from the first direction.
(N + 1) chamber groups are formed by the chambers for every N (N is an integer of 2 or more) in the second direction.
A planar actuator including (N + 1) pressure control units for controlling a positive pressure state having a positive pressure larger than the atmospheric pressure and an atmospheric pressure state for each chamber group. A plurality of chambers between the lower sheet and the upper sheet, which are separated by a plurality of partition sheets for changing the distance between the lower sheet and the upper sheet and extend in the first direction. A planar actuator arranged in parallel in a second direction different from the first direction.
(N + 1) chamber groups are formed by the chambers for every N (N is an integer of 2 or more) in the second direction.
Each chamber group has (N + 1) pressure control units for controlling a positive pressure state having a positive pressure larger than the atmospheric pressure and a negative pressure state having a negative pressure smaller than the atmospheric pressure.
A surface surface provided with a control unit for controlling the (N + 1) pressure control units to make the number of the chamber groups in the positive pressure state different from the number of the chamber groups in the negative pressure state in a steady state. Actuator. A plurality of chambers between the lower sheet and the upper sheet, which are separated by a plurality of partition sheets for changing the distance between the lower sheet and the upper sheet and extend in the first direction. A planar actuator arranged in parallel in a second direction different from the first direction.
(N + 1) chamber groups are formed by the chambers for every N (N is an integer of 2 or more) in the second direction.
For each chamber group, there are (N + 1) pressure control units for controlling the positive pressure state and the atmospheric pressure state, which are larger than the atmospheric pressure.
A planar surface provided with a control unit for controlling the (N + 1) pressure control units to make the number of the chamber groups in the positive pressure state different from the number of the chamber groups in the atmospheric pressure state in a steady state. Actuator. The planar actuator according to any one of claims 1 to 4, wherein the partition sheet has an inclined flat plate shape. The planar actuator according to any one of claims 1 to 4, wherein the partition sheet has at least one "<" shape in cross section. The planar actuator according to any one of claims 1 to 6, wherein the partition sheet, the lower sheet, and the upper sheet are made of a thermoplastic material. The planar actuator according to claim 7, wherein the thermoplastic material is urethane. A transport device including the planar actuator according to any one of claims 1 to 8. A mobile device including the planar actuator according to any one of claims 1 to 8. A transport device in which a plurality of the planar actuators according to any one of claims 1 to 8 are arranged adjacent to each other, and the directions of the partition sheets of at least two of the planar actuators are different. A moving device in which a plurality of the planar actuators according to any one of claims 1 to 8 are arranged adjacent to each other, and the directions of the partition sheets of at least two of the planar actuators are different. The first step of alternately sandwiching the thermoplastic partition sheet and the heat-resistant release sheet to form the thermoplastic partition sheet / heat-resistant release sheet combination, and
The second step of laminating the thermoplastic lower sheet and the thermoplastic upper sheet from the vertical direction to the thermoplastic partition sheet / heat resistant release sheet combination, and
A method for manufacturing a planar actuator comprising a third step of heat-pressing the thermoplastic partition sheet / heat-resistant release sheet combination to which the thermoplastic lower sheet and the thermoplastic upper sheet are bonded from the vertical direction. The method for manufacturing a planar actuator according to claim 13, wherein the partition sheet has an inclined flat plate shape. The method for manufacturing a planar actuator according to claim 13, wherein the partition sheet has at least one "<" shape in cross section. The method for manufacturing a planar actuator according to claim 15, wherein the thermoplastic partition sheet having at least one "<" -shaped cross section is obtained by laminating two thermoplastic partition sheet pieces. The method for manufacturing a planar actuator according to claim 13, wherein the thermoplastic partition sheet, the thermoplastic lower sheet, and the thermoplastic upper sheet are made of urethane. The method for manufacturing a planar actuator according to claim 13, wherein the heat-resistant release sheet is made of a cooking sheet or a silicone resin sheet.

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