JP7373033B2 - Temperature sensor piping installation structure - Google Patents

Description

The present invention relates to a piping mounting structure for a temperature sensor.

Conventionally, a sensor for detecting the temperature of a measurement target has been proposed, for example, in Patent Document 1. The object to be measured flows through the pipe. The sensor includes a bottomed tubular protrusion that protrudes into the piping passage, and a sensor section housed in the protrusion. The protrusion has an opening through which the object to be measured flows into the protrusion. The opening is oriented upstream of the measurement target when the protrusion is attached to the pipe.

Japanese Patent Application Publication No. 2016-200452

However, in the above-mentioned conventional technique, although the object to be measured flows into the protrusion through the opening, the object to be measured remains within the protrusion, so it is difficult to flow through the protrusion. For this reason, the discrepancy between the temperature of the object to be measured flowing through the pipe and the temperature of the object to be measured inside the protrusion becomes large, resulting in a delay in temperature detection response. As a result, there is a problem that the temperature of the object to be measured cannot be accurately measured.

SUMMARY OF THE INVENTION In view of the above-mentioned points, an object of the present invention is to improve the temperature detection response delay of a measurement target in a pipe mounting structure for a temperature sensor configured to measure the temperature of the measurement target flowing through the pipe.

In order to achieve the above object, in the invention according to claim 1, a temperature sensor piping mounting structure includes a temperature sensor (100) and a piping (200). The temperature sensor includes a sensor chip (150) having a temperature detection section (152) that detects the temperature of the object to be measured.

The temperature sensor has a columnar shape having one end (141) and the other end (142) opposite to the one end, and is arranged so that a portion of the sensor chip corresponding to the temperature detection section is exposed. It includes a molded resin part (140) in which the sensor chip is sealed at one end.

The temperature sensor includes a pipe portion (113), a bottom portion (114), a first opening (111a) provided in the pipe portion and allowing a measurement object to flow into the pipe portion from outside, and a first opening portion (111a) provided in the pipe portion. It has a bottomed tubular protrusion (111) formed with a second opening (111b) that allows the measurement target to flow out from the inside of the tube to the outside, and the temperature detection part of the sensor chip is connected to the tube. Holding parts (110, 120) that hold the molded resin part so as to be located inside the part, and position the bottom side of the protruding part inside the pipe by fixing a part of the pipe part to the pipe to which it is attached. , 130). A part of the pipe portion of the temperature sensor is fixed to the pipe.

The length of the protrusion is at least 4/5 of the length of the inner wall surface (203) of the pipe from the installation wall surface (204) from which the protrusion protrudes to the opposite wall surface (205) facing the installation wall surface. The bottom of the protrusion has a hemispherical shape.

According to this, it becomes difficult for the object to be measured to stay inside the pipe section, so it is possible to reduce the difference between the temperature of the object to be measured flowing through the pipe and the temperature of the object to be measured inside the pipe section. Therefore, it is possible to improve the temperature detection response delay of the measurement target.

Note that the reference numerals in parentheses of each means described in this column and the claims indicate correspondence with specific means described in the embodiment described later.

1 is a cross-sectional view of a temperature sensor according to a first embodiment. These are diagrams for comparing the flow velocities of objects to be measured inside the pipe, in which (a) is a conventional product, (b) is a structure in which the first opening is moved to the installation wall side, and (c) is a structure in which the protrusion is FIG. 3(d) shows a structure in which the first opening is moved toward the installation wall and the protrusion is brought closer to the opposing wall in the pipe. It is a figure which showed the temperature detection response delay in the conventional product of Fig.2 (a). In each structure shown in FIG. 2, it is a diagram showing the flow velocity on the upstream side and the flow velocity on the downstream side with respect to the temperature detection section of the sensor chip. FIG. 7 is a diagram showing the relationship between the maximum value of the flow velocity around the temperature detection section and the maximum temperature difference between the sensor output and the temperature of the measurement target in the pipe. It is a sectional view of the temperature sensor concerning a 2nd embodiment, and is a sectional view parallel to the protrusion direction of a protrusion part, and the flow direction of a measuring object. It is a sectional view of a temperature sensor concerning a 2nd embodiment, and is a sectional view perpendicular to the flow direction of a measuring object. FIG. 7 is a cross-sectional view of a temperature sensor according to a third embodiment. It is a sectional view of the temperature sensor concerning a 4th embodiment. FIG. 9 is a sectional view taken along line XX in FIG. 9; FIG. 9 is a sectional view taken along line XI-XI in FIG. 9; FIG. 7 is a partial cross-sectional view showing the flow of a measurement target with respect to a temperature sensor according to a fourth embodiment. FIG. 7 is a cross-sectional view taken in a direction perpendicular to the protrusion direction of the protrusion when the orientation of the temperature detection part of the sensor chip and the orientation of the fourth opening and the fifth opening with respect to the flow of the object to be measured are changed in four patterns. 14 is a diagram showing the flow velocity of the measurement target near the temperature detection part of the sensor chip in the four patterns shown in FIG. 13. FIG. FIG. 7 is a partial cross-sectional view showing a modification of the temperature sensor according to the fourth embodiment. FIG. 7 is a partial cross-sectional view showing a modification of the temperature sensor according to the fourth embodiment. FIG. 7 is a partial cross-sectional view showing a modification of the temperature sensor according to the fourth embodiment. FIG. 7 is a partial cross-sectional view showing a modification of the temperature sensor according to the fourth embodiment. It is a partial sectional view of the temperature sensor concerning a 5th embodiment. FIG. 3 is a diagram showing the relationship between the center-to-center distance x D and the flow velocity near the temperature detection part of the sensor chip. It is a partial sectional view of the temperature sensor concerning a 6th embodiment. FIG. 3 is a diagram showing the relationship between wall surface distance x D and flow velocity near the temperature detection part of the sensor chip.

Embodiments of the present invention will be described below based on the drawings. Note that in each of the following embodiments, parts that are the same or equivalent to each other are given the same reference numerals in the drawings.

(First embodiment)
The first embodiment will be described below with reference to the drawings. The temperature sensor according to this embodiment is configured to be able to detect both the pressure and temperature of a measurement target. The temperature sensor is fixed to the pipe and detects the pressure and temperature of the object to be measured inside the pipe. The object to be measured is, for example, oil. Of course, the object to be measured may be another fluid such as another liquid or gas.

As shown in FIG. 1, the temperature sensor 100 includes a housing 110, a sensor body 120, a potting part 130, a molded resin part 140, and a sensor chip 150.

The housing 110 is a hollow case made of a metal material such as SUS by cutting or the like. The housing 110 has a protrusion 111 on one end and an opening 112 on the other end. The protruding portion 111 is a bottomed tubular portion in which a tube portion 113 and a bottom portion 114 are formed, and the tube portion 113 communicates with the opening portion 112 . A male threaded portion 115 is formed on the outer circumferential surface of the protruding portion 111 on the opening 112 side, and is threadably connectable to the piping 200 to which it is attached.

The opening 112 of the housing 110 is surrounded by a peripheral wall 116. The housing 110 is fixed to a through screw hole 202 provided in the thick wall portion 201 of the piping 200 to which a part of the pipe portion 113 is attached. Thereby, the bottom 114 side of the protrusion 111 is located inside the pipe 200.

Furthermore, the protrusion 111 has a first opening 111a, a second opening 111b, and a third opening 111c. The first opening 111a is provided in the tube portion 113 and is a portion through which a measurement object flows into the tube portion 113 from the outside. The first opening 111a is oriented toward the upstream side of the measurement target. The outside of the pipe section 113 is the inside of the pipe 200.

The second opening 111b is provided in the tube portion 113 and is a portion through which the measurement target flows from the inside of the tube portion 113 to the outside. In order to allow the object to be measured to flow out smoothly from the inside of the pipe portion 113, the second opening 111b is directed toward the downstream side of the object to be measured. The second opening 111b may be formed at a position facing the first opening 111a.

The third opening 111c is a portion through which objects to be measured other than the first opening 111a and the second opening 111b enter and exit. A plurality of third openings 111c are formed in the tube portion 113.

The sensor body 120 is a component that constitutes a connector for electrically connecting the temperature sensor 100 and an external device. The sensor body 120 is made of a resin material such as PPS, and has one end formed as a fixed part 121 fixed to the opening 112 of the housing 110, and the other end formed as a connector part 122. The fixing portion 121 has a concave portion 123 recessed toward the connector portion 122 side.

Further, the sensor body 120 has a terminal 124 insert molded therein. One end of the terminal 124 is sealed in the fixing part 121, and the other end is insert-molded in the sensor body 120 so as to be exposed inside the connector part 122. One end side of the terminal 124 is connected to an electrical component of the molded resin part 140 by housing a part of the molded resin part 140 in the recess 123 .

The sensor body 120 is fixed by caulking so that the end of the peripheral wall 116 of the housing 110 presses the fixing part 121 with the fixing part 121 fitted into the opening 112 of the housing 110 via the O-ring 125. There is.

The potting part 130 is a sealing part filled in the gap between the recess 123 of the sensor body 120 and the molded resin part 140. The potting portion 130 is made of a resin material such as epoxy resin. The potting part 130 serves to seal and protect a part of the molded resin part 140, the joint part of the terminal 124, etc. from the oil that is the object of measurement.

The molded resin part 140 is a component that holds the sensor chip 150. The molded resin part 140 has a columnar shape having one end 141 and the other end 142 opposite to the one end 141 . The molded resin portion 140 seals a sensor chip 150 on one end portion 141 side.

Further, the mold resin part 140 seals a part of the lead frame 143 and the circuit chip 160. The lead frame 143 is a base component on which the sensor chip 150 and the circuit chip 160 are mounted. A sensor chip 150 is mounted on one end of the lead frame 143, and a circuit chip 160 is mounted on the other end.

The other end of the lead frame 143 is exposed from the other end 142 of the molded resin portion 140 and is connected to one end of the terminal 124 . Note that the lead frame 143 may be divided into a plurality of parts. In this case, electrical connection may be made using bonding wires. The lead frame 143 and the terminal 124 may also be connected by bonding wires.

The circuit chip 160 is an IC chip on which a semiconductor integrated circuit such as a memory is formed. The circuit chip 160 is formed using a semiconductor substrate or the like. The circuit chip 160 supplies a constant current as a power source to the sensor chip 150, receives pressure signals and temperature signals from the sensor chip 150, and processes each signal based on preset signal processing values. The signal processing value is an adjustment value for amplifying, calculating, etc. the signal value of each signal. The circuit chip 160 is electrically connected to the sensor chip 150 via the lead frame 143 by bonding wires (not shown).

The sensor chip 150 is an electronic component that detects the temperature of a measurement target. The sensor chip 150 is mounted on the lead frame 143 using, for example, silver paste. Although not shown, the sensor chip 150 includes a plate-shaped laminated substrate formed by laminating a plurality of layers. The plurality of layers are formed by stacking a plurality of wafers as a wafer level package, processed by a semiconductor process, etc., and then diced into each sensor chip 150.

The sensor chip 150 has a thin diaphragm 151. A plurality of gauge resistors 152 are formed on the diaphragm 151. Each gauge resistor 152 is a diffused resistor formed by ion implantation into a semiconductor layer. Each gauge resistor 152 may be configured as a thin film resistor formed on diaphragm 151. Note that the sensor chip 150 is also formed with wiring parts, pads, etc. (not shown) connected to each gauge resistor 152.

Each gauge resistor 152 is a resistance element whose resistance value changes depending on the distortion of the diaphragm 151. Further, each gauge resistor 152 is an element whose resistance value changes depending on the temperature. Each gauge resistor 152 is electrically connected to form a Wheatstone bridge circuit. The Wheatstone bridge circuit is supplied with constant current power from the circuit chip 160. Thereby, by utilizing the piezoresistance effect of each gauge resistor 152, it is possible to detect a voltage according to the strain or temperature of the diaphragm 151 as a sensor signal.

Specifically, the sensor chip 150 detects a change in the resistance of the plurality of gauge resistors 152 according to the distortion of the diaphragm 151 as a change in the midpoint voltage of the Wheatstone bridge circuit, and outputs the midpoint voltage as a pressure signal. On the other hand, the sensor chip 150 detects the resistance change of the plurality of gauge resistors 152 according to the heat received from the measurement object as a bridge voltage of the Wheatstone bridge circuit, and outputs the bridge voltage as a temperature signal.

Therefore, in this embodiment, each gauge resistor 152 has the functions of both a pressure detection section and a temperature detection section. The sensor chip 150 is sealed on the one end 141 side of the molded resin part 140 so that portions corresponding to the pressure detection section and the temperature detection section are exposed.

The molded resin part 140 is held by the sensor body 120 and the potting part 130 such that the pressure detection part and the temperature detection part of the sensor chip 150 are located inside the tube part 113. The above is the overall configuration of the temperature sensor 100.

Next, specific means for increasing the flow velocity of the measurement object flowing inside the pipe portion 113 and the effects thereof will be explained. First, the protrusion 111 is fixed to the pipe 200 with the temperature detection part of the sensor chip 150 facing upstream of the measurement target. This makes it easier to directly apply the measurement target to the temperature detection section.

The first opening 111a is formed in the tube portion 113 so as to overlap the installation wall surface 204 from which the protrusion 111 protrudes from the inner wall surface 203 of the pipe 200 in a direction perpendicular to the protrusion direction of the protrusion 111. "The first opening 111a and the installation wall surface 204 overlap" means that the installation wall surface 204 and the opening surface of the first opening 111a intersect.

Due to this arrangement, the path from the pipe 200 to the temperature detection part via the first opening 111a is the shortest distance, so that the measurement target around the temperature detection part is affected by the flow of the pipe 200. It becomes easier to flow. In addition, since the measurement object flowing on the installation wall surface 204 side of the pipe 200 flows into the inside of the pipe part 113 through the first opening 111a without colliding with the protrusion 111, that is, the pipe part 113, the inside of the pipe part 113 The flow velocity of the object to be measured flowing into the chamber will not slow down. Therefore, the flow velocity of the object to be measured passing through the first opening 111a can be ensured.

The housing 110 has a stopper 117 in order to arrange the first opening 111a at a position overlapping the installation wall surface 204. The stopper 117 is a component for adjusting the position of the bottom 114 of the protrusion 111 inside the pipe 200. With this stopper 117, even if the temperature sensor 100 is attached to the piping 200 with a specified torque or more, the first opening 111a can be prevented from being disposed at a position away from the installation wall surface 204.

The inventors prepared four structures in which the protrusion length of the protrusion 111 and the position of the first opening 111a were changed, as shown in FIGS. 2(a) to 2(d), and We investigated the temperature detection response delay. The test targeted automobile engine oil.

FIG. 2A shows a conventional example in which the protrusion length of the protrusion 111 is less than 4/5 of the inner diameter of the pipe 200, and the first opening 111a is located between the installation wall surface 204 and the bottom 114. It shows the quality. FIG. 2(b) shows a structure in which the first opening 111a overlaps the installation wall surface 204, and corresponds to FIG.

2(c) and 2(d), the length of the protruding portion 111 is from the installation wall surface 204 from which the protruding portion 111 projects out of the inner wall surface 203 of the piping 200 to the opposing wall surface 205 facing the installation wall surface 204. 4/5 or more of the length thereof is formed so as to protrude from the installation wall surface 204.

When the pipe 200 is cylindrical, the length from the installation wall surface 204 to the opposing wall surface 205 corresponds to the inner diameter of the pipe 200. When the piping 200 is an elliptical cylinder, the length from the installation wall surface 204 to the opposing wall surface 205 is, for example, the length from the intersection of the central axis and the installation wall surface 204 to the center axis and the opposing wall surface 205 with the central axis of the protrusion 111 as a reference. is the length to the intersection of The central axis of the protrusion 111 is an axis parallel to the direction in which the protrusion 111 protrudes. When the piping 200 is a square tube or the like, the length from the installation wall surface 204 to the opposing wall surface 205 is the opposing length of the installation wall surface 204 and the opposing wall surface 205.

Further, the bottom portion 114 of the protruding portion 111 has a hemispherical shape. Since the housing 110 has the stopper 117, even if the temperature sensor 100 is attached to the piping 200 with a specified torque or more, the stopper 117 prevents the bottom 114 of the protrusion 111 from contacting the opposing wall surface 205. can.

According to the above configuration, the protrusion 111 closes a part of the pipe 200, so that the object to be measured can easily enter the first opening 111a. In other words, since the gap between the bottom 114 of the protrusion 111 and the opposing wall surface 205 is narrow, the flow rate of the object to be measured passing through the gap flows into the tube part 113 of the protrusion 111 through the first opening 111a. The flow velocity of the object to be measured increases.

Furthermore, in addition to the protrusion length of the protrusion 111 described above, FIG. 2C shows a structure in which the first opening 111a is located between the installation wall surface 204 and the bottom 114, and FIG. A structure in which the first opening 111a overlaps the installation wall surface 204 is shown.

First, the inventors investigated the temperature detection response delay of the conventional product shown in FIG. 2(a). The results are shown in FIG. As shown in FIG. 3, after the engine is started, the engine speed becomes a constant value. Although the temperature of the engine oil in the pipe 200 increases, the temperature detected by the temperature detection section of the sensor chip 150 does not increase easily. In other words, there is a discrepancy between the actual temperature of the object to be measured and the measured temperature. This is because the object to be measured inside the tube portion 113 remains. Therefore, a delay in temperature detection response occurs.

Next, the inventors investigated the flow velocity on the upstream side and the flow velocity on the downstream side with respect to the temperature detection part of the sensor chip 150 in each structure shown in FIG. The results are shown in FIG. The viscosity of the engine oil flowing through the pipe 200 was 9.0 Pa·s, and the flow velocity was 0.5 m/s. In FIG. 4, negative distances correspond to the upstream side of the sensor chip 150, and positive distances correspond to the downstream side of the sensor chip 150.

As shown in FIG. 4, the flow velocities on the upstream and downstream sides of the sensor chip 150 in the conventional product shown in FIG. 2(a) were the smallest among the four structures. In contrast, in the structures shown in FIGS. 2(b) to 2(d), the flow velocity of the object to be measured inside the pipe portion 113 was improved.

Specifically, in the structure in which the first opening 111a of FIG. 2(b) is moved, the flow velocity on the upstream side of the sensor chip 150 is 1.4 times that of the conventional product. Furthermore, in the structure in which the protruding length of the protruding portion 111 shown in FIG. 2(c) is increased, the flow velocity on the upstream side of the sensor chip 150 is 18 times that of the conventional product. Furthermore, in the structure in which the first opening 111a in FIG. 2(d) is moved to increase the protrusion length of the protrusion 111, the flow velocity on the upstream side of the sensor chip 150 is 26 times that of the conventional product. .

As described above, in the structure in which the first opening 111a is moved and in the structure in which the protrusion length of the protrusion 111 is increased, the flow velocity on the upstream side of the sensor chip 150 is improved, but by combining these, the flow velocity is increased. The result was further improvement.

Normally, when the protruding part 111 only protrudes into the pipe 200, the protruding part 111 becomes a resistance to the flow path, so the engine oil flows quickly along the bottom 114 side of the protruding part 111 and the sides of the protruding part 111, which have less flow resistance. Pass through at a current speed. However, by bringing the bottom 114 of the protrusion 111 closer to the opposing wall surface 205, the flow path resistance on the bottom 114 side of the protrusion 111 increases, and the flow resistance on the side of the protrusion 111 and the first opening increases more than on the bottom 114 side of the protrusion 111. The flow velocity at portion 111a increases. Along with this, the flow velocity around the temperature detection part also became faster.

The inventors investigated the relationship between the maximum value of the flow velocity around the temperature detection section and the maximum temperature difference between the sensor output and the temperature of the measurement target in the pipe 200 in the structure shown in FIG. 2(d). The results are shown in FIG. As shown in FIG. 5, as the maximum value of the flow velocity around the temperature detection section increases, the maximum temperature difference between the sensor output and the temperature of the measurement target inside the pipe 200 decreases. From this result as well, it can be said that the temperature detection response delay is improved because the flow velocity of the object to be measured in the pipe 200 is improved. Note that the same results as in FIG. 5 were obtained also in the structures of FIGS. 2(b) and 2(c).

As described above, by adopting the structure in which the first opening 111a is moved toward the installation wall surface 204 side, the flow velocity of the object to be measured inside the pipe portion 113 can be improved. As a result, the discrepancy between the temperature of the object to be measured flowing through the pipe 200 and the temperature of the object to be measured inside the pipe section 113 can be reduced, and the delay in response to temperature detection of the object to be measured can be improved.

Furthermore, since the flow velocity of the object to be measured inside the pipe portion 113 is improved, the sensor chip 150 does not need to be located inside the pipe 200. Thereby, the pressure detection section and temperature detection section of the sensor chip 150 can be prevented from receiving the dynamic pressure of the object to be measured.

Regarding the correspondence between the description of the present embodiment and the claims, the gauge resistor 152 corresponds to the "temperature detection unit" in the claims. Further, the housing 110, the sensor body 120, and the potting section 130 correspond to a "holding section" in the claims.

As described above, in addition to the structure in which the first opening 111a is moved to the installation wall surface 204 side, there is also a structure in which the protrusion length of the protrusion portion 111 is increased, or a structure in which the first opening portion 111a is moved to the installation wall surface 204 side. A structure may be adopted in which the protruding portion 111 is moved and the protruding length of the protruding portion 111 is increased. In this case as well, the flow velocity of the object to be measured inside the pipe portion 113 is improved. Therefore, as a modification, only the protrusion length of the protrusion 111 may be extended without moving the first opening 111a, or the first opening 111a may be moved and the protrusion length of the protrusion 111 may be extended. may be combined.

As another modification, the second opening 111b may be formed at a position facing the first opening 111a. Thereby, the flow of the object to be measured inside the pipe portion 113 can be made smooth.

As another modification, the shape of the tip of the protrusion 111 is not limited to a hemispherical shape, but may be other shapes such as a flat surface or a trapezoidal shape.

(Second embodiment)
In this embodiment, mainly differences from the first embodiment will be explained. As shown in FIG. 6, the molded resin part 140 has a tip 145 on the bottom 114 side of the protrusion 111 that is in contact with at least a portion of the first opening 111a in the protrusion direction of the protrusion 111, that is, in a direction perpendicular to the central axis. overlapping. A distal end portion 145 of the molded resin portion 140 is disposed inside the tube portion 113 and is a portion closer to the bottom portion 114 than the sensor chip 150.

As shown in FIGS. 6 and 7, in this embodiment, a part of the opening portion of the first opening 111a is connected to the molded resin portion 140 in the direction perpendicular to the central axis of the protrusion 111, that is, in the flow direction of the measurement object. It overlaps with the tip 145 of. As a result, the object to be measured flowing into the tube section 113 through the first opening 111a hits the tip 145 of the molded resin section 140 and changes its flow toward the sensor chip 150 side. The object to be measured that has flowed toward the sensor chip 150 flows around the molded resin portion 140 and moves downstream, flows inside the pipe portion 113 toward the bottom portion 114, and flows out into the pipe 200 from the second opening 111b.

In this way, the tip 145 of the molded resin part 140 holding the sensor chip 150 extends to the bottom 114 of the protrusion 111. Therefore, the flow of the object to be measured flowing into the tube portion 113 through the first opening 111a can be forcibly changed to the flow on the sensor chip 150 side. That is, the flow of the object to be measured changes vertically. Therefore, the same effects as in the first embodiment can be obtained.

As a modification, the entire opening portion of the first opening 111a may overlap the tip portion 145 of the molded resin portion 140 in the direction perpendicular to the central axis of the protrusion 111. Also in this embodiment, the stopper 117 may be used.

(Third embodiment)
In this embodiment, mainly the different parts from the second embodiment will be explained. As shown in FIG. 8, the sensor body 120 has a plate portion 126 disposed inside the tube portion 113. The plate portion 126 is formed into a columnar shape located closer to the second opening 111b than the molded resin portion 140. In other words, the plate portion 126 is located on the downstream side of the flow of the object to be measured than the molded resin portion 140.

Furthermore, the plate portion 126 projects further toward the bottom portion 114 than the tip portion 145 of the molded resin portion 140 . Furthermore, the tip portion of the plate portion 126 overlaps the first opening portion 111a in a direction perpendicular to the central axis of the protrusion portion 111. In other words, a portion of the opening portion of the first opening portion 111a overlaps the tip portion of the plate portion 126 in a direction perpendicular to the central axis of the protruding portion 111, that is, in the flow direction of the object to be measured.

With the above configuration, similarly to the second embodiment, the flow of the measurement target inside the tube section 113 can be forcibly changed. Therefore, the same effects as in the first embodiment can be obtained.

As a modification, the entire opening portion of the first opening 111a may overlap the plate portion 126 in the direction perpendicular to the central axis of the protrusion 111, instead of a part of the opening portion of the first opening 111a. .

(Fourth embodiment)
In this embodiment, parts that are different from each of the above embodiments will be mainly described. As shown in FIG. 9, in the temperature sensor 100 according to this embodiment, the protrusion 111 has a fourth opening 111d and a fifth opening 111e. Note that in this embodiment, the flow of the object to be measured is in the opposite direction to that in each of the above embodiments. In other words, the object to be measured flows from the right side to the left side of the page.

As shown in FIG. 10, three fourth openings 111d are provided. Moreover, as shown in FIG. 11, three fifth openings 111e are provided. That is, the protrusion 111 has six openings 111d and 111e.

Each of the openings 111d and 111e is an elliptical through hole whose long axis is along the protrusion direction of the protrusion 111. Each opening 111d, 111e has the same shape and size. The object to be measured flows into or out of the pipe portion 113 by passing through the openings 111d and 111e.

In the protrusion direction of the protrusion 111, the opening centers of the adjacent apertures 111d and 111e are different from each other. In this embodiment, the opening center of the fourth opening 111d is located closer to the sensor chip 150 than the opening center of the adjacent fifth opening 111e.

The opening center is the center position of the opening shape of the openings 111d and 111e. Since each of the openings 111d and 111e has an elliptical shape, the center of the opening is the center position of the ellipse where the long axis and the short axis intersect. For example, when the opening shape of each of the openings 111d and 111e is circular, the opening center is the center position of the circle.

In this embodiment, the three fourth openings 111d are arranged at equal intervals of 120 degrees in the circumferential direction with the opening centers centered around the central axis of the protrusion 111. Similarly, the three fifth openings 111e are arranged at equal intervals of 120 degrees in the circumferential direction with the opening centers centered around the central axis of the protrusion 111. Therefore, the six openings 111d and 111e are arranged at intervals of 60 degrees in the circumferential direction of the protrusion 111. As described above, the positions of the opening centers of the adjacent fourth opening 111d and the fifth opening 111e are different in the protrusion direction of the protrusion 111, so the six openings 111d and 111e are located in the protrusion 111. are arranged in a staggered manner in the circumferential direction.

Further, as shown in FIG. 9, each fourth opening 111d is arranged such that it overlaps the installation wall surface 204 from which the protrusion 111 protrudes out of the inner wall surface 203 of the piping 200 in a direction perpendicular to the protrusion direction of the protrusion 111. It is formed in the tube portion 113.

According to the above configuration, as shown in FIG. 12, the measurement object that has flowed into the tube portion 113 from the fourth opening 111d flows out from the fifth opening 111e on the downstream side. At this time, since the positions of the fourth opening 111d and the fifth opening 111e are different in the protruding direction of the protrusion 111, it is possible to easily change the direction of the flow of the object to be measured inside the tube 113. . Therefore, the object to be measured easily flows to the temperature detection section of the sensor chip 150 and is less likely to stay inside the tube section 113. Therefore, the temperature responsiveness of the temperature detection section can be improved.

In the temperature sensor 100 shown in FIG. 9, the inventors conducted a simulation to investigate the flow velocity of the object to be measured near the gauge resistor 152 corresponding to the temperature detection section of the sensor chip 150. The object to be measured was engine oil, the oil temperature was -30° C., the oil density was 876 kg/m ³ , the oil viscosity was 9 Pa·s, and the flow velocity of the oil flowing through the pipe 200 was 1.5 m/s.

Further, as shown in FIG. 13, the positions of the openings 111d and 111e with respect to the oil flow in the pipe 200 were changed into four patterns. Although each figure in FIG. 13 shows a cross section at a position corresponding to the fourth opening 111d, as described above, from the positional relationship between each fourth opening 111d and each fifth opening 111e, The position of the opening 111e has also been determined.

FIG. 13A shows a case where the temperature detection section of the sensor chip 150 and one fourth opening 111d are directed toward the upstream side of the pipe 200. FIG. 13B shows a case where the temperature detection section of the sensor chip 150 and one fifth opening 111e are directed toward the upstream side of the pipe 200.

FIG. 13(c) shows a case where the temperature detection part of the sensor chip 150 is tilted at 45 degrees with respect to the flow to be measured, and the two fourth openings 111d are directed toward the upstream side of the pipe 200. . FIG. 13(d) shows a case where the temperature detection part of the sensor chip 150 is tilted at 90 degrees with respect to the flow to be measured, and one fifth opening 111e is directed toward the upstream side of the pipe 200. .

FIG. 14 shows simulation results for each pattern in FIGS. 13(a) to 13(d). As shown in FIG. 14, for all four patterns, the flow velocity of the object to be measured near the temperature detection part of the sensor chip 150 was able to be secured at a sufficient flow velocity of 0.025 m/s or more. Further, it can be seen that there is no difference in the position of each opening 111d, 111e with respect to the flow to be measured, and that the flow velocity can be ensured depending on the positional relationship of each opening 111d, 111e in the protruding direction. Furthermore, it has been found that the difference in the orientation of the temperature detection section of the sensor chip 150 with respect to the flow to be measured inside the tube section 113 does not affect the flow velocity.

As explained above, by making the opening centers of adjacent openings 111d and 111e different from each other in the protruding direction of the protrusion 111, the flow velocity of the object to be measured inside the pipe section 113 can be ensured. .

As a modification, the number of openings 111d and 111e provided in the protrusion 111 is not limited to six. For example, there may be one fourth opening 111d and one fifth opening 111e. In other words, it is sufficient that the protrusion 111 is provided with at least two openings 111d and 111e. In the protrusion direction of the protrusion 111, it is sufficient that the opening centers of adjacent openings 111d and 111e are different from each other, so an odd number such as three openings 111d and 111e may be provided. It is desirable that the protrusion 111 is provided with four to six openings 111d and 111e.

As a modification, the sizes of the openings 111d and 111e may not all be the same. For example, the three fourth openings 111d may all have the same size, and the three fifth openings 111e may all have the same size although different from the fourth opening 111d. The openings 111d and 111e may all have different sizes.

As a modified example, as shown in FIG. 15, each fourth opening 111d is formed on the installation wall surface 204 of the inner wall surface 203 of the pipe 200 from which the protrusion 111 protrudes, in a direction perpendicular to the protrusion direction of the protrusion 111. They may be formed in the tube portion 113 so as not to overlap. That is, in the protrusion direction of the protrusion 111, the entire fourth opening 111d may be located closer to the bottom 114 than the installation wall surface 204.

As a modification, each of the openings 111d and 111e may have a rectangular shape, as shown in FIG. 16. In this case, the opening centers of each of the openings 111d and 111e are the center positions of the rectangles. Of course, each of the openings 111d and 111e may have a polygonal shape other than a quadrangle.

Further, as shown in FIG. 17, at least one of the fourth openings 111d and at least one of the fifth openings 111e are provided so as to overlap in the circumferential direction of the protrusion 111. Also good. Each of the fourth openings 111d may be arranged at different positions in the protrusion 111.

Further, as shown in FIG. 18, each of the openings 111d and 111e may have a cutout 111f provided along the direction in which the protrusion 111 projects. The cutout portion 111f is provided, for example, on the sensor chip 150 side. The cutout portion 111f may be provided in all the openings 111d and 111e. A plurality of notches 111f may be provided in one opening 111d, 111e. In each of the openings 111d and 111e, the shape and number of the notches 111f may be different. When each of the openings 111d and 111e is provided with a notch 111f, the center of the opening is the center position of the entire shape including the shape of the notch 111f. In the example shown in FIG. 18, in the protrusion direction of the protrusion 111, the center of the opening is the length from the end of the notch 111f on the sensor chip 150 side to the end of the openings 111d and 111e on the bottom 114 side. This will be the center position.

Although not shown, the fourth opening 111d and the fifth opening 111e may have different opening shapes. The opening shapes of the plurality of fourth openings 111d may be different, and the opening shapes of the plurality of fifth openings 111e may be different.

In addition, the inventors have determined that the temperature of the sensor chip 150 is determined in the same way as described above for those having the openings 111d and 111e shown in FIGS. The flow velocity near the detection part was investigated by simulation. According to this, a sufficient flow rate could be obtained, similar to the results shown in FIG. 14. From this result, it can be said that the relationship between the adjacent openings 111d and 111e has a large influence on the flow velocity, and the difference in shape of the openings 111d and 111e has a small influence on the flow velocity.

(Fifth embodiment)
In this embodiment, mainly differences from the fourth embodiment will be explained. In this embodiment, the positional relationship between the openings 111d and 111e in the protrusion direction of the protrusion 111 is specifically defined. First, it is assumed that the openings 111d and 111e have the same opening length in the direction in which the protrusion 111 protrudes. Further, the opening length is defined as D.

Then, as shown in FIG. 19, the inventors determined the flow velocity near the temperature detection part of the sensor chip 150 under the same conditions as in the fourth embodiment when changing the center-to-center distance between the openings 111d and 111e. This was investigated through simulation. Specifically, the center-to-center distance is the distance between the opening center of one of the adjacent openings 111d and 111e and the opening center of the other of the adjacent openings 111d and 111e. This is the distance in the protruding direction.

As shown in the simulation results in FIG. 20, when the center-to-center distance x D is 0.6D or more, the flow velocity of the measurement target near the temperature detection part of the sensor chip 150 is ensured to be 0.025 m/s or more, which is considered sufficient. It turns out that it can be done. Therefore, by providing each of the openings 111d and 111e in the tube section 113 so that the center-to-center distance xD is 0.6D or more, the flow velocity of the object to be measured inside the tube section 113 can be ensured.

Note that, similarly to the fourth embodiment, the inventors calculated the center-to-center distance x D and the flow velocity near the temperature detection part of the sensor chip 150 in the same manner as above for those in which the openings 111d and 111e have various shapes. We investigated the relationship between the two using simulations. As a result, similar to the result shown in FIG. 20, a sufficient flow rate could be obtained regardless of the difference in shape of each opening 111d and 111e.

(Sixth embodiment)
In this embodiment, mainly the parts different from the fourth and fifth embodiments will be explained. In this embodiment, the position of the fourth opening 111d on the sensor chip 150 side in the protrusion direction of the protrusion 111 is specifically defined.

First, the opening length is defined as D as in the fifth embodiment. Moreover, the distance on the bottom 114 side in the protrusion direction of the protrusion 111 is defined as L with reference to the installation wall surface 204 of the inner wall surface 203 of the pipe 200 from which the protrusion 111 protrudes. When the distance L is negative, it means that the opening center of the fourth opening 111d is located closer to the sensor chip 150 than the installation wall surface 204.

As shown in FIG. 21, the inventors determined the flow velocity near the temperature detection section of the sensor chip 150 when changing the wall surface distance L from the installation wall surface 204 to the fourth opening 111d according to the fourth embodiment. It was investigated by simulation under the same conditions. The results are shown in FIG.

As shown in FIG. 22, when the wall distance L is larger than -0.3D and when the wall distance L is smaller than 0.4D, the flow velocity of the measurement target near the temperature detection part of the sensor chip 150 is sufficient. It was found that it is possible to secure a speed of 0.025 m/s or more. In other words, if the fourth opening 111d is too close to the sensor chip 150, the flow velocity cannot be ensured, and even if it is separated from the sensor chip 150, the flow velocity cannot be ensured. In other words, the position of the fourth opening 111d may be adjusted so that the wall surface distance L satisfies -0.3D<L<0.4D.

As described above, in the protrusion direction of the protrusion 111, the fourth opening 111d, which is closer to the sensor chip 150, among the adjacent openings 111d and 111e, is set so that -0.3D<L<0.4D is satisfied. It is desirable to provide it in the pipe portion 113. Thereby, the flow velocity of the object to be measured inside the pipe portion 113 can be ensured.

Note that, similarly to the fourth embodiment, the inventors have determined the relationship between the wall surface distance L and the flow velocity near the temperature detection part of the sensor chip 150 in the same way as described above for the openings 111d and 111e having various shapes. The relationship was investigated through simulation. As a result, similar to the results shown in FIG. 22, a sufficient flow velocity could be obtained in the range of -0.3D<L<0.4D, regardless of the difference in shape of each opening 111d and 111e. .

(Other embodiments)
The configurations of the temperature sensor 100 shown in each of the above embodiments are merely examples, and the present invention is not limited to the configurations shown above, and other configurations that can realize the present invention may be adopted. For example, although the plurality of gauge resistors 152 are configured to detect both pressure and temperature, the element for detecting pressure and the element for detecting temperature may be configured separately. That is, the pressure detection section and the temperature detection section may be provided separately in the sensor chip 150. Moreover, the temperature sensor 100 does not need to have a pressure detection section.

The electrical connection component between the circuit chip 160 and the sensor chip 150 is not limited to the lead frame 143. For example, the circuit chip 160 and the sensor chip 150 may be mounted on a printed circuit board.

When only part of the configuration is described in each embodiment, the other embodiments described previously can be applied to other parts of the configuration. For example, the stopper 117 according to the first embodiment can be employed for the temperature sensor 100 according to the fourth embodiment. In this way, it is also possible to partially combine the embodiments even if it is not explicitly stated, as long as there is no problem in combining the configurations shown in each embodiment.

110 housing, 111 protrusion, 111a first opening, 111b second opening, 111d fourth opening, 111e fifth opening, 113 tube, 114 bottom, 120 sensor body, 126 plate, 130 potting part, 140 mold resin part, 141 one end part, 142 other end part, 145 tip part, 150 sensor chip, 152 gauge resistance

Claims (4)

a sensor chip (150) having a temperature detection section (152) that detects the temperature of the measurement target;
The sensor chip has a columnar shape having one end (141) and another end (142) opposite to the one end, and the sensor chip is configured such that a portion of the sensor chip corresponding to the temperature detection section is exposed. a molded resin part (140) in which a sensor chip is sealed on the one end side;
a pipe section (113), a bottom section (114), a first opening (111a) provided in the pipe section and allowing the measurement object to flow into the pipe section from the outside; and a bottomed tubular protrusion (111) formed with a second opening (111b) that allows the measurement target to flow out from the inside of the tube to the outside; The molded resin part is held so that the detection part is located inside the pipe part, and a part of the pipe part is fixed to the piping (200) to which it is attached, so that the bottom side of the protruding part is fixed. a holding part (110, 120, 130) located inside the piping;
a temperature sensor (100),
the piping to which a part of the pipe portion of the temperature sensor is fixed;
including;
The length of the protrusion is 4/5 or more of the length of the inner wall surface (203) of the piping from the installation wall surface (204) from which the protrusion protrudes to the opposing wall surface (205) facing the installation wall surface. is formed to protrude from the installation wall surface,
In the temperature sensor piping mounting structure, the bottom portion of the protrusion has a hemispherical shape. The first opening is formed in the pipe portion so as to overlap the installation wall surface of the inner wall surface (203) of the pipe in a direction perpendicular to the protrusion direction of the protrusion portion. Temperature sensor piping installation structure. The temperature sensor piping mounting structure according to claim 1 or 2, wherein the holding portion includes a stopper (117) for adjusting the position of the protruding portion inside the piping. 4. The temperature sensor piping mounting structure according to claim 1, wherein the protruding portion is fixed to the piping with the temperature detection portion facing upstream of the measurement target.

Images