JP7372825B2 - Transport system and consumables box - Google Patents

Description

The present invention relates to a transport system for transporting articles from a source to a particular processing device, and a consumables box for storing consumables in the transport system.

In a cluster-type processing device that is configured by integrating multiple devices such as a grinding device, a polishing device, a tape mounter, and a cleaning device into one device to process workpieces such as semiconductor wafers, for example, a circular processing device is used. A work set is formed in which a wafer is placed in an opening of an annular ring frame, and a tape is attached to the ring frame and the wafer using a rolling roller or the like to integrate the wafer through the tape. Then, only the wafer or a work set is held by a holding means such as a chuck table, and the wafer is processed using various processing tools such as a grindstone (for example, see Patent Document 1).

Japanese Patent Application Publication No. 2018-117003

In the grinding equipment, when the grindstone is worn out during wafer processing, it is replaced with a new one.
Further, in the tape mounter, tape is attached to the ring frame and the wafer. Therefore, it is necessary to replenish the tape mounter with tapes and ring frames at any time.
In this way, it is necessary to transport consumables such as grindstones, ring frames, tapes, etc., or workpieces to a plurality of processing devices.

Workpieces are stored in cassettes and transported by workers to multiple processing devices, or by an OHT (Overhead Hoist Transport) installed above each processing device. , AGV (Automated Guided Vehicle), or RGV (Rail Guided Vehicle) installed between each processing device to transport the material to multiple processing devices. There is.

On the other hand, consumables such as grindstones are transported by workers to a plurality of processing devices on trolleys. Therefore, transporting consumables is a burden on the workers.
Therefore, there is a problem of reducing the burden on workers when transporting workpieces and consumables between a plurality of processing devices that process workpieces with processing tools.

To solve the above problems, the present invention is a transportation system for transporting an article from a supply source to a specific processing apparatus between a plurality of processing apparatuses that process workpieces with processing tools, the article comprising: A cassette containing a workpiece, and a consumables box containing consumables including the processing tool used in the processing device,
The cassette includes a first gripped part, a top plate on which the first gripped part is arranged, a plurality of side plates hanging down from the top plate and facing each other, and a workpiece formed on opposing surfaces of the side plates. and a bottom plate connecting the lower ends of the side plates, the consumables box includes a second gripped part, an upper part on which the second gripped part is arranged, The processing apparatus includes at least a consumables container connected to the upper part and housing the consumables, and the processing device includes a cassette stage on which the cassette is placed, a consumables stage on which the consumables box is placed, a consumables storage for storing the consumables box, the cassette and the consumables box are provided with a discrimination mark for determining whether they are the cassette or the consumables box, and the cassette and the consumables box are placed on the consumables stage. a consumables transporting mechanism that transports the consumables box, which is being held, to the consumables storage; a consumables moving means for moving a gripping part between the consumables stage and the consumables storage, the first gripped part of the cassette or the second gripped part of the consumables box. a gripping section that grips the article; and a discriminating section that determines whether the article gripped by the gripping section is the cassette or the consumables box, using the discrimination mark; A discrimination conveying mechanism is provided for conveying between the supply source and the cassette stage or between the supply source and the consumables stage based on the discrimination made by the discrimination section, and between the supply source and the processing device. The cassette is transported between the supply source and the processing device based on the information transmission, and the consumables box is transported between the supply source and the processing device based on a consumables transportation request sent from the processing device to the supply source. This is a transportation system that transports the device to and from the device.

The consumables box includes a consumables mark that allows identification of the consumables stored therein, and the consumables transport mechanism includes a consumables discriminator that reads the consumables mark and identifies the consumables. Preferably, the consumables box in which the consumables stored therein have been determined by the consumables discriminating section is transported by the consumables moving means to the consumables storage of the corresponding processing device.

The consumables box includes a used/unused display section that allows the processing device to determine whether or not the consumables stored therein have been used, and the processing device at least displays the consumables in the consumables box. If it is determined that the consumables are used, it is preferable to transport the consumables box containing the used consumables from the consumables storage to the supply source.

A transportation system according to the present invention transports an article from a supply source to a specific processing apparatus between a plurality of processing apparatuses that process the workpiece with a processing tool, the article is a cassette containing the workpiece, and a processing apparatus. A consumables box containing consumables including processing tools used in By transporting the consumables box between the supply source and processing equipment based on the sent consumables transportation request, workpieces and consumables can be transported between the supply source and each processing equipment, and between multiple processing equipment. This eliminates the need for the worker to carry the material, reducing the burden on the worker.

In the conveyance system according to the present invention, the cassette includes a first gripped part, a top plate on which the first gripped part is arranged, a plurality of side plates hanging down from the top plate and facing each other, and formed on opposing surfaces of the side plates. The consumables box has at least a plurality of shelves on which workpieces are placed, and a bottom plate connecting the lower ends of the side plates, and the consumables box includes a second gripped part, an upper part on which the second gripped part is arranged. , a consumables container connected to the upper part of the device and configured to accommodate consumables; The consumables box has a discrimination mark for distinguishing whether it is a cassette or a consumables box, and includes a gripping part that grips the first gripped part of the cassette or the second gripped part of the consumables box, and a gripping part that grips the consumables box. A discriminating section that discriminates whether the article being held by the gripping section is a cassette or a consumables box by means of a discriminating mark; and a discriminating transportation mechanism that determines whether the article being held by the gripping section is a cassette or a consumables box based on the discrimination made by the discriminating section between the supply source and the cassette stage. or between the supply source and the consumables stage.

The processing device includes a consumables storage for storing a consumables box, a consumables transport mechanism that transports the consumables box placed on the consumables stage to the consumables storage, and the consumables transport mechanism includes: A consumables box gripping part that grips the second gripped part, and a consumables moving means that moves the consumables box gripping part between the consumables stage and the consumables storage, thereby storing consumables. This makes it possible to appropriately transport the consumables box to the consumables storage of each processing device.

The consumables box is equipped with a consumables mark that can identify the consumables stored therein, and the consumables transport mechanism is equipped with a consumables discrimination section that reads the consumables mark and discriminates the consumables. By transporting the consumables box, which has identified the consumables stored therein, to the consumables storage of the corresponding processing equipment using the consumables transport means, consumables can be transported to each processing equipment without making mistakes. becomes possible.

The consumables box includes a used/unused indicator that allows the processing device to determine whether the consumables stored therein have been used or not, and the processing device can at least determine whether the consumables in the consumables box have been used. Once identified, consumables boxes containing used consumables stored in the consumables storage are transported (recovered) from the consumables storage to the supply source, for example, at the supply source or collection located near the supply source. You can collect consumables boxes containing used consumables at a location.

The consumables box according to the present invention that stores consumables including processing tools includes a second gripped part, an upper part where the second gripped part is arranged, and a consumables storage part that is connected to the upper part and stores the consumables. and a used/unused display section that indicates whether the consumable is used or not, so that the consumable can be appropriately used in the transportation system according to the present invention.

FIG. 2 is a perspective view showing an example of a transportation system that transports an article from a supply source to a specific processing device among a plurality of processing devices that process a workpiece with a processing tool. FIG. 2 is a plan view illustrating an example of a transportation system that transports an article from a supply source to a specific processing device between a plurality of processing devices that process a workpiece with a processing tool, together with a consumables transportation mechanism of the transportation system. FIG. 2 is a plan view illustrating an example of a transportation system that transports an article from a supply source to a specific processing device, together with a workpiece transport mechanism, between a plurality of processing devices that process a workpiece with a processing tool. It is a perspective view showing an example of the 1st cassette which accommodates a workpiece.

Between a plurality of processing devices shown in FIGS. 1 to 3 that process the workpiece W with a processing tool, that is, a grinding device 2 that grinds the workpiece W to thin it to a desired thickness, and a grinding device 2 that processes the workpiece W to a desired thickness; A polishing device 5 that increases the bending strength of the surface to be polished or makes the surface to be polished mirror-finished, and a protective tape (not shown) is peeled off from the workpiece W, and an adhesive tape T1 ( A transportation system A according to the present invention that transports articles from a supply source B to a specific processing device between tape mounters 4 for pasting (see 2) will be described below.

For example, the grinding device 2, the polishing device 5, and the tape mounter 4 are installed in a clean room in a manner that they are arranged or connected at a predetermined interval in the X-axis direction. The front side (−Y direction side) and the rear side (+Y direction side) of each device are, for example, a movement path through which a worker can pass. In addition, the operator can also enter between the processing devices, such as the grinding means 23 and grinding wheel storage 214 of the grinding device 2 shown in FIG. It is also possible to access the storage 58, the frame storage 45 of the tape mounter 4, the tape roll storage 46 of the tape mounter 4 (only shown in FIG. 3), and the like.

In this embodiment, the articles transported by the transport system A are a first cassette 61 and a second cassette 62 that house workpieces W shown in FIG. The items also include a consumables box (hereinafter referred to as a grinding wheel storage box 64) containing a grinding wheel 232 (see FIG. 2), which is a consumable used in the grinding device 2, and a consumables box (hereinafter referred to as a grinding wheel storage box 64) that is a consumable used in the polishing device 5. A consumables box (hereinafter referred to as polishing wheel storage box 65) containing the polishing wheel 532 shown in FIG. 2, which is a product, and a consumables box containing the ring frame F shown in FIG. A consumables box (hereinafter referred to as a ring frame storage box 66) or a consumables box (hereinafter referred to as a tape roll storage box 67) containing a tape roll R shown in FIG. ).

The conveying system A includes a supply source B in which a number of first cassettes 61 and a second cassette 62 and a number of grinding wheel storage boxes 64, polishing wheel storage boxes 65, and ring frame storage boxes 66 are stored; At least the first cassette 61 and the second cassette 62 are transported between the supply source B and the grinding device 2 based on information transmission with the processing device (in this embodiment, the grinding device 2). Furthermore, based on a consumables transportation request sent from the grinding device 2, the polishing device 5, or the tape mounter 4 to the supply source B, the transportation system A includes a grinding wheel storage box 64, a polishing wheel storage box 65, and a ring frame storage box. 66 or tape roll storage box 67 is transported between the supply source B and the grinding device 2, the polishing device 5, or the tape mounter 4.

The workpiece W supplied from the supply source B to the grinding device 2 in a state housed in the first cassette 61 is, for example, a circular semiconductor wafer made of a silicon base material, but is not limited to this. It may be made of gallium arsenide, sapphire, ceramics, resin, gallium nitride, silicon carbide, or the like. For example, the workpiece W before processing is placed in the first cassette 61 with a protective tape (not shown) attached to one surface, that is, the surface on which devices such as ICs and LSIs are formed. They are stored one by one on shelves. The protective tape (not shown) serves to protect the device surface of the workpiece W from the grinding pressure applied to the workpiece W during grinding.

In the example shown in FIGS. 1 and 2, for example, a grinding device 2, a polishing device 5, and a single-wafer type workpiece cleaning device that cleans the workpiece W in order from the +X direction side to the -X direction side, for example. 30 and a tape mounter 4 are provided.

As shown in FIG. 2, the grinding device 2 is a device that grinds a workpiece W suction-held on a chuck table 20 by a grinding means 23 equipped with a rotating grinding wheel 232, and the longitudinal direction is the Y-axis direction. A grinding device base 21 is provided. The front (-Y direction side) on the grinding device base 21 is an attachment/detachment area where the workpiece W is attached to and removed from the chuck table 20, and the rear (+Y direction side) on the grinding device base 21 is the attachment/detachment area where the workpiece W is attached/detached to/from the chuck table 20. This is a processing area where the workpiece W held on the chuck table 20 is ground by the means 23.

For example, a first cassette stage 261 and a second cassette stage 262 on which cassettes are placed are provided near the grinding device 2, which is a processing device.
As shown in FIGS. 1 and 2, a first cassette stage 261 and a second cassette stage 262 are provided on the front surface of the grinding device base 21 in the -Y direction so as to protrude in the -Y direction. A first cassette 61 containing a workpiece W before grinding is placed on the first cassette stage 261, and a first cassette 61 containing a workpiece W after grinding is placed on the second cassette stage 262. For example, an empty second cassette 62 is placed thereon.

Since the first cassette 61 and the second cassette 62 have similar configurations, only the first cassette 61 shown in detail in FIG. 4 will be described below.
For example, the first cassette 61 containing the workpiece W before processing is a closed type hoop (Foup: Front Opening Unified Pod), and is held by the gripping section 170 of the discrimination and transportation mechanism 17 shown in FIGS. a first gripped part 611, a top plate 612 on which the first gripped part 611 is arranged, a plurality of (three) side plates 613a hanging down from the top plate 612 in the vertical direction (Z-axis direction) and facing each other, The side plates 613b and 613c are connected to a plurality of shelves 615 formed on the inner surfaces of the side plates 613a and 613b facing each other in the X-axis direction and on which the workpieces W are placed, and the lower ends of the side plates 613a to 613c. It has at least a bottom plate 616. For example, handles that can be grasped by an operator may be provided on the outer surfaces of the side plates 613a and 613b.
Note that in this embodiment, the first cassette 61 is of a sealed type to prevent dust from entering inside, as the degree of cleanliness required is increasing as the semiconductor devices that are ultimately manufactured become finer. However, an open cassette may also be used.

The first cassette 61 has an opening 61a on the front side (+Y direction side), and is configured such that the workpiece W can be carried in and out through the opening 61a. Inside the first cassette 61, a plurality of shelves 615 are formed at predetermined intervals in the vertical direction, and each shelf 615 supports the outer circumferential portion of the workpiece W, and supports the workpieces W one by one. It is possible to accommodate W.

When the first cassette 61 itself is transported from the supply source B, the opening 61a is closed by, for example, a cassette lid 617. When taking out the workpiece W from the first cassette 61, the opening/closing handle 617a provided on the cassette lid 617 is turned by an opening/closing means (not shown) provided on the grinding device 2, and the cassette lid 617 becomes open.

The first gripped part 611 is erected on the top plate 612, and has a hook plate 611a on its upper end side, which is gripped by the gripping part 170 of the discrimination and transportation mechanism 17 shown in FIGS. 1 and 2. Note that the shape, configuration, etc. of the first gripped portion 611 are not limited to the example shown in FIG. 4.

For example, the first cassette 61 and the second cassette 62 in this embodiment are cassettes that accommodate the workpiece W or consumables (grinding wheel 232, polishing wheel 532 or ring frame F) (grinding wheel storage box 64, polishing wheel storage box 65, ring frame storage box 66, or tape roll storage box 67). ing.
The discrimination mark Ma is arranged, for example, on the upper surface of the first gripped part 611, but is not limited thereto. Although the discrimination mark Ma is shown as a white circle in the examples shown in FIGS. 1 and 4, it may be colored, a two-dimensional bar code, a figure, a number, an alphabet, or the like.

Note that the third cassette 63 or the fourth cassette 68 shown in FIG. 1 containing the workpieces W serving as a work set are placed on the first cassette stage 261 and the second cassette stage 262. In some cases. This is a case where the grinding device 2 grinds the workpiece W, which is a workpiece set.

Regarding the grinding device 2, in this embodiment, for example, two chuck tables 20 for holding the workpiece W are disposed on a turntable 22 that rotates around a rotation axis in the Z-axis direction shown in FIG. By rotating the turntable 22, the chuck table 20 can be revolved, and the chuck table 20 holding the workpiece W can be positioned below the grinding means 23. Note that the positioning of the chuck table 20 below the grinding means 23 may be performed not by the turntable 22 but by an electric slider or the like that directly moves the chuck table 20 in the Y-axis direction.

A grinding device column 211 is erected on the processing area side of the grinding device base 21, and the front surface of the grinding device column 211 includes a ball screw mechanism (not shown) that moves the grinding means 23 up and down in the Z-axis direction. A grinding feed means is provided.

The grinding means 23 includes a spindle 230 whose axial direction is vertical (Z-axis direction), a motor (not shown) that rotationally drives the spindle 230, and a grinding wheel 232 detachably connected to the lower end side of the spindle 230. . The grinding wheel 232 has a plurality of substantially rectangular parallelepiped-shaped grinding wheels 232a arranged annularly on the bottom side of the wheel base.

The grinding device base 21 is provided with a grinding wheel storage 214 that is a consumable box that stores a grinding wheel 232 that is a consumable item, that is, a grinding wheel storage box 64 that stores a grinding wheel storage box 64 . For example, in the example shown in FIG. 2, the grinding wheel storage 214 is located beside the moving path in the X-axis direction of the consumables box gripping part 121 of the consumables transporting mechanism 12, and the consumables box gripping unit 121 is rotatably movable. It is disposed at a middle position on the grinding device base 21 within the movement range of the section 121.

As shown in FIGS. 1 and 2, the grinding wheel storage box 64 is a second gripped part that can be gripped by the gripping part 170 of the discriminating transport mechanism 17 and can be gripped by the consumables box gripping part 121 of the consumables transporting mechanism 12. 641, an upper part 642 in which a second gripped part 641 is arranged, and a consumables storage part 643 connected to the upper part 642 and accommodating the grinding wheel 232 as shown in FIG.

In this embodiment, as shown in FIG. 2, inside the consumables storage part 643, there are a plurality of fixing tools 643a such as clamps that can securely hold the grinding wheel 232 in a horizontal state, for example, in the circumferential direction. For example, 4) are arranged at equal intervals.
In addition, in this embodiment, the grinding wheel storage box 64 can accommodate one grinding wheel 232, but it may also be able to accommodate multiple grinding wheels 232, or multiple types of consumables. That is, for example, the grinding wheel 232 and the polishing wheel 532 may be accommodated.

For example, in the grinding wheel storage box 64 shown in FIG. 1, the upper part 642 can function as a removable lid from the consumables storage part 643, and the operator can open the upper part 642 and take out the grinding wheel 232 from the consumables storage part 643. It may be .

As shown in FIG. 1, the second gripped part 641 is erected on the upper part 642, and a hook plate 641a that is gripped by the gripper 170 or the consumable box gripper 121 is attached to the upper end side of the second gripped part 641. Note that the shape, configuration, etc. of the second gripped portion 641 are not limited to the example shown in FIG.

For example, the grinding wheel storage box 64 in this embodiment is a box for determining whether it is a first cassette 61 or a second cassette 62 that stores the workpiece W, or a box that stores the grinding wheel 232 that is a consumable item. It is provided with a discrimination mark Mb.
The discrimination mark Mb is arranged, for example, on the upper surface of the second gripped part 641, but is not limited thereto. The discrimination mark Mb is shown as a black circle in FIGS. 1 and 2, but may be colored, a two-dimensional bar code, a figure, a number, an alphabet, or the like.

Further, the grinding wheel storage box 64, which is a consumables box in this embodiment, allows the consumables discriminating unit 126 of the consumables transport mechanism 12 to determine that the consumables stored therein are the grinding wheels 232, for example. Equipped with consumables mark Nb. The consumable mark Nb is arranged, for example, on the upper surface of the second gripped part 641, but is not limited thereto. The consumable item mark Nb is shown as a triangle in the examples shown in FIGS. 1 and 2, but may be colored, a two-dimensional bar code, a figure, a number, an alphabet, or the like.

The polishing device 5 shown in detail in FIG. 2 is a device that polishes a workpiece W suction-held on a chuck table 50 by a polishing means 53 equipped with a rotating polishing wheel 532, and the polishing device base 51 of the polishing device 5 The upper front (-Y direction side) is an attachment/detachment area where the workpiece W is attached to and detached from the chuck table 50, and the rear (+Y direction side) on the polishing device base 51 is chucked by the polishing means 53. This is a processing area where the workpiece W held on the table 50 is polished. The polishing device 5 may be configured to perform dry polishing or may be configured to perform CMP polishing.

In this embodiment, the chuck table 50 is capable of reciprocating in the Y-axis direction on the polishing device base 51 by a Y-axis moving means such as a ball screw mechanism (not shown), and the polishing wheel 532 is moved during the polishing process. positioned at the bottom.

A polishing device column 511 is erected on the processing area side of the polishing device base 51, and a ball screw mechanism, etc. that moves the polishing means 53 up and down in the Z-axis direction (vertical direction) is provided on the front surface of the polishing device column 511. A polishing feed means (not shown) consisting of the following is provided.

The polishing means 53 includes a spindle 530 whose axial direction is the vertical direction (Z-axis direction), a motor (not shown) that rotationally drives the spindle 530, and a polishing wheel 532 detachably connected to the lower end side of the spindle 530. . The polishing wheel 532, which is circular in plan view, has a polishing pad made of a non-woven fabric such as felt (not shown) attached to the lower surface thereof. The diameter of the polishing wheel 532 is larger than the diameter of the chuck table 50.

For example, the polishing device 5 includes a grinding wheel storage box 64, a polishing wheel storage box 65 that stores a polishing wheel 532 that is a consumable item, or a consumables stage 57 that places a ring frame storage box 66 thereon.
For example, the consumable stage 57 is provided on the front side (-Y direction side) of the polishing device base 51 so as to protrude in the -Y direction side. Further, on the front side of the polishing device base 51, a second cassette 62 containing a workpiece W ground by the grinding device 2 is placed on a not-shown mounting cassette 62 that is carried from the grinding device 2 by the discrimination transport mechanism 17. A stage is set up.
Note that the consumable stage 57 may be attached to the front side of the grinding device base 21 of the grinding device 2 which is a processing device, or may be attached to the front side of the mounter base 40 of the tape mounter 4. That is, it is sufficient that it is located under the moving path of the gripping section 170 of the discrimination and transportation mechanism 17.
In FIG. 1, the grinding wheel storage box 64 is placed on the consumables stage 57, and in FIGS. 2 and 3, the ring frame storage box 66 is placed on the consumables stage 57. is in a state.

The polishing device base 51 is provided with a polishing wheel storage 58 which is a consumables storage in which a polishing wheel storage box 65 is stored. For example, in the example shown in FIGS. 1 and 2, the polishing wheel storage 58 is located beside the movement path in the X-axis direction of the consumables box gripping part 121 of the consumables transport mechanism 12, and is a consumable that can be rotated. It is disposed at a middle position on the polishing device base 51 within the movement range of the box gripping section 121.

The polishing wheel storage box 65, which is a consumables box shown in FIG. 651, an upper part (not shown) in which the second gripped part 651 is arranged, and a consumables accommodating part (not shown) connected to the upper part and housing the polishing wheel 532. The outer shape of the polishing wheel storage box 65 is, for example, approximately the same as the grinding wheel storage box 64 shown in FIG. 1 .

In this embodiment, inside the polishing wheel storage box 65, there are a plurality of (for example, four) fixing devices 653, such as clamps, which can securely hold the polishing wheel 532 in a horizontal position at equal intervals in the circumferential direction. It is placed with a gap between the two.

In addition, in this embodiment, the polishing wheel storage box 65 can accommodate one polishing wheel 532, but it may also be able to accommodate a plurality of polishing wheels 532 or multiple types of consumables. That is, for example, the grinding wheel 232 and the polishing wheel 532 may be accommodated.

For example, the polishing wheel storage box 65 may have an upper part (not shown) that functions as a removable lid from the consumables storage section, and an operator can open the top and take out the polishing wheel 532 from the consumables storage section. good.

For example, it is determined whether the polishing wheel storage box 65 in this embodiment is a first cassette 61 or a second cassette 62 that stores the workpiece W, or a consumable box that stores the polishing wheel 532 that is a consumable item. The second gripped portion 651 is provided with the discrimination mark Mb described above.

Further, the polishing wheel storage box 65 in this embodiment allows the consumables discriminating unit 126 (see FIG. 2) of the consumables transport mechanism 12 to determine that the consumables stored therein are the polishing wheels 532, for example. Equipped with consumables mark Nc. The consumable mark Nc is arranged, for example, on the upper surface of the second gripped part 651, but is not limited thereto. The consumable mark Nc is indicated by an x in the example shown in FIG. 1, but may be colored, a two-dimensional bar code, a figure, a number, an alphabet, or the like.

As shown in FIGS. 1 and 2, the workpiece cleaning device 30 disposed next to the polishing device 5 holds the lower surface of the workpiece W with a spinner table 300, and the upper surface of the held workpiece W. Cleaning water is sprayed onto the upper surface of the workpiece W from the cleaning nozzle 301 that rotates to clean the upper surface. Next, for example, air is ejected from the cleaning nozzle 301 to dry the workpiece W.

The tape mounter 4 disposed next to the workpiece cleaning device 30 has, for example, a ring that accommodates a ring frame F, which is a consumable item, placed on the mounter base 40 in order from the +X direction side to the −X direction side. A frame storage 45 that is a consumables storage that stores frame storage boxes 66, a frame stocker 41 that stores stacked ring frames F, and a workpiece W that is held under suction by the chuck table 20 of the grinding device 2 during grinding. A protective tape peeling means 43 that peels off a protective tape (not shown) that protects the lower surface of the workpiece W from the workpiece W, and a circular adhesive tape T1 having a larger diameter than the workpiece W is attached to the workpiece W and the ring frame F. Adhesive tape applying means 47 and a tape roll storage 46 are provided for attaching the workpiece W to the ring frame F via the adhesive tape T1 to form a work set that can be handled by the ring frame F. has been done. The tape roll storage 46 can store a tape roll storage box 67 (only shown in FIG. 3) that stores a tape roll R in the form of a roll, in which a belt-like sheet (not shown) to which the adhesive tape T1 is attached is wound around a tube. can.

The frame stocker 41 includes a stocker stage 412 on which the ring frames F are placed one on top of the other. Four poles 410 are erected at equal intervals. By inserting each pole 410 into the opening of the ring frame F, the ring frames F are stacked sequentially from the bottom on the mounting surface along the outer peripheral surface of each pole 410. A plurality of ring frames F are housed in the frame stocker 41 with their centers aligned, and are lifted in order from the topmost ring frame F by, for example, a frame clamp 833 of a workpiece transfer robot 83, for example. , and is transported to the tape application table 470 of the adhesive tape application means 47.

The adhesive tape application means 47 includes, for example, a tape application table 470 that can hold the workpiece W and the ring frame F by suction. The tape application table 470 can be reciprocated in the Y-axis direction by a ball screw mechanism 473. Above the moving path of the tape application table 470 in the Y-axis direction, there is a pull-out roller 472 that pulls out a belt-shaped sheet (not shown) to which a pre-cut circular adhesive tape T1 is pasted from the tape roll R, and a pull-out roller 472 that pulls out a belt-like sheet (not shown) to which a circular pre-cut adhesive tape T1 is pasted from the tape roll R; A peel plate 475 for peeling off T1 and a rotating adhesive tape application roller 474 are provided. A peel plate 475 peels off the adhesive tape T1 from the strip sheet pulled out from the tape roll by a pull-out roller 472, and is held on a tape application table 470 that moves below the adhesive tape application roller 474 in the Y-axis direction. An adhesive tape application roller 474 applies tape to the workpiece W and the ring frame F. In the example shown in FIG. 2, the pull-out roller 472, the peel plate 475, and the adhesive tape sticking roller 474 are arranged in this order from the +Y direction side to the -Y direction side. The above configurations may be arranged in order from the top to the +Y direction side.

The protective tape peeling means 43 includes, for example, a peeling table 430 that can hold the workpiece W or work set by suction. A peeling unit 431 is provided above the peeling table 430 to peel the protective tape from the workpiece W by moving the protective tape in the Y-axis direction using a ball screw mechanism 432 while the peeling tape is attached to the protective tape. There is. Note that the peeling section 431 may be a peeling clamp that grips and peels off the protective tape attached to the workpiece W.
In addition, in FIGS. 2 and 3, what is held on the peeling table 430 is a workpiece set, but it may also be a workpiece W.

A third cassette stage 403 and a fourth cassette stage 404 are provided on the front side (-Y direction side) of the mounter base 40 so as to protrude in the -Y direction side. A third cassette 63 that accommodates the workpiece W that has become a work set is placed, and a fourth cassette 68 that accommodates the workpiece W that has become a work set is placed on the fourth cassette stage 404. It will be placed.
Note that the first cassette 61 or the second cassette 62 containing workpieces W that are not part of a work set may be placed on the third cassette stage 403 and the fourth cassette stage 404. .

While the first cassette 61 accommodates the workpieces W to which only protective tape is attached, the third cassette 63 and the fourth cassette 68 accommodate the workpieces W supported by the ring frame F. Objects W can be stored on shelves. The rest of the configuration is substantially the same as the first cassette 61 described above, so the description will be omitted.

For example, in the example shown in FIGS. 2 and 3, the frame storage 45 that stores the ring frame storage box 66 and the tape roll storage 46 that stores the tape roll storage box 67 are used to hold the consumables box of the consumables transport mechanism 12. It is disposed at a corner of the mounter base 40 beside the movement path of the part 121 in the X-axis direction and within the movement range of the consumable box gripping part 121.

The ring frame storage box 66, which is a consumables box, has a second gripped part 661 that can be gripped by the gripping part 170 of the discriminating transport mechanism 17, and a second gripped part 661 that can be gripped by the consumables box gripping part 121 of the consumables transporting mechanism 12. It has at least an upper part (not shown) in which the two gripped parts 661 are arranged, and a consumables accommodating part (not shown) connected to the upper part and housing the ring frame F. The outer shape of the ring frame storage box 66 is, for example, substantially the same as the grinding wheel storage box 64 shown in FIG. 1.

In the present embodiment, the ring frame storage box 66 can store a plurality of ring frames F in a stacked and fixed state, for example, but it can store a plurality of types of consumables, for example, the grinding wheel 232 and the ring. It may also be possible to accommodate the frame F.

For example, the upper part of the ring frame storage box 66 may function as a lid that is removable from the consumables storage section, so that an operator can open the top and take out the ring frame F from the consumables storage section.

For example, it is determined whether the ring frame storage box 66 in this embodiment is a first cassette 61 or a second cassette 62 that stores a workpiece W, or a consumable box that stores a ring frame F that is a consumable item. The second grasped portion 661 has the discrimination mark Mb described above for this purpose.

Further, the ring frame storage box 66 in this embodiment has a consumable mark Nd that allows the consumable discriminating unit 126 of the consumable supply transport mechanism 12 to determine that the consumable stored therein is the ring frame F, for example. We are prepared. The consumable mark Nd is arranged, for example, on the upper surface of the second gripped part 661, but is not limited thereto. Although the consumables mark Nd is shown as a square in the example shown in FIG. 1, it may be colored, a two-dimensional bar code, a figure, a number, an alphabet, or the like.

The tape roll storage box 67, which is a consumables box shown in FIG. 671, an upper part (not shown) in which the second gripped part 671 is arranged, and a consumables accommodating part (not shown) connected to the upper part and housing the ring frame F. The outer shape of the tape roll storage box 67 is, for example, approximately the same as that of the grinding wheel storage box 64 shown in FIG. 1.

In the present embodiment, the tape roll storage box 67 can store one or more tape rolls R, for example, in a state where they are lined up and fixed. and a ring frame F may be accommodated.

For example, the upper part of the tape roll storage box 67 may function as a lid that is removable from the consumables storage section, so that an operator can open the top and take out the tape roll R from the consumables storage section.

For example, it is determined whether the tape roll storage box 67 in this embodiment is a first cassette 61 or a second cassette 62 that stores the workpiece W, or a consumable box that stores the tape roll R that is a consumable item. The second grasped portion 671 has the previously described discrimination mark Mb for this purpose.

Further, the tape roll storage box 67 in this embodiment has a consumable mark Ne that allows the consumable discriminating unit 126 of the consumable supply transport mechanism 12 to determine that the consumable stored therein is a tape roll R, for example. We are prepared. The consumable item mark Ne is arranged, for example, on the upper surface of the second gripped part 671, but is not limited thereto. The consumable mark Ne is shown in a star shape in the example shown in FIG. 3, but may be colored, a two-dimensional bar code, a figure, a number, an alphabet, or the like.

As shown in FIGS. 1 and 2, the first cassette stage 261, the second cassette stage 262, the consumables stage 57, and the third cassette stage 403 are lined up in order from the +X direction side to the -X direction side. , and above the fourth cassette stage 404, a gripping section 170 of the discrimination transport mechanism 17 that transports the article from the supply source B is capable of reciprocating in the X-axis direction.

The discrimination transport mechanism 17 is, for example, an OHT (Overhead Hoist Transport), and is a first gripped portion 611 of the first cassette 61 or the second cassette 62, or a consumables box, for example. The gripping part 170 that grips the second gripped part 641 of the grinding wheel storage box 64 and the article gripped by the gripping part 170 are either the first cassette 61 or the second cassette 62 that stores the workpiece W, or are worn out. A discrimination section 173 that discriminates whether the product box (grinding wheel storage box 64, polishing wheel storage box 65, ring frame storage box 66, or tape roll storage box 67) is a product box (grinding wheel storage box 64, polishing wheel storage box 65, ring frame storage box 66, tape roll storage box 67) by a discrimination mark Ma or discrimination mark Mb, and a gripping section 170 with an X The holding portion moving means 175 is provided for reciprocating in the axial direction.

The gripping portion moving means 175 shown in FIG. 1 is, for example, an electric slider combining a ball screw and a motor (not shown), and a guide rail 175a arranged on the ceiling of the production facility (inside the clean room) and extending in the X-axis direction. , and a slide member 175b that slides reciprocally in the X-axis direction on the lower surface side of the guide rail 175a.

The grip part 170 is connected to a vertical movement cylinder 170a attached to the lower surface side of a slide member 175b, and parallel opening/closing is connected to the vertical movement cylinder 170a and grips the second gripped part 641 of the grinding wheel storage box 64, for example. and a chuck 170b.
Note that the plurality of gripping parts 170 may each be movable in the X-axis direction along the guide rail 175a.

The discriminating unit 173 shown in FIG. 1 uses, for example, a camera (not shown) disposed on the parallel chuck 170b to detect a discriminator disposed on the second gripped portion 641 of the grinding wheel storage box 64 gripped by the parallel chuck 170b. The mark Mb is imaged and image processing such as pattern matching is performed based on the obtained captured image, and since the discrimination mark is not the discrimination mark Ma of the first cassette 61 and the second cassette 62, the grip unit 170 grips the mark Mb. The item is determined to be a consumables box.
Then, based on the determination made by the determining unit 173 that the article gripped by the gripping unit 170 is the grinding wheel storage box 64, the determining and transporting mechanism 17 selects the article brought out from the supply source B, that is, the grinding wheel storage box 64. The wheel storage box 64 is carried into the consumables stage 57.

As shown in FIGS. 1 and 2, the conveyance system A according to the present invention includes a grinding wheel storage box 64, a polishing wheel storage box 65, or a ring frame storage box 66 placed on the consumables stage 57, and a tape roll storage box 64, which is placed on the consumables stage 57. The consumables transport mechanism 12 is provided to transport the box 67 to the grinding wheel storage 214, the polishing wheel storage 58, the frame storage 45, or the tape roll storage 46.

The consumables transport mechanism 12 is, for example, an OHT, and includes, for example, a consumables box gripping part 121 that grips the second gripped part 641 of the grinding wheel storage box 64, and a consumables box gripping part 121 that is used for grinding the consumables stage 57 and the consumables box gripping part 121. The consumables moving means 124 is provided to move the consumables between the wheel storage 214, the polishing wheel storage 58, the frame storage 45, or the tape roll storage 46.

The consumables moving means 124 is, for example, an electric slider that combines a ball screw and a motor (not shown), and is arranged on the ceiling of the production equipment and extends in the X-axis direction. A slide member 124b that slides reciprocally in the X-axis direction is provided.

A consumable box gripper 121, which is, for example, an articulated robot, is disposed on the lower surface side of the slide member 124b. The consumables box gripping part 121 includes a swing arm part 121a that is composed of a plurality of plate-like arms and has a pulley mechanism inside, a motor (not shown) that generates a driving force to swing the swing arm part 121a in the horizontal direction, and a swing It includes an elevating part 121b such as an electric cylinder attached to the lower end side of the arm part 121a, and a parallel opening/closing chuck 121c that is connected to the elevating part 121b and grips, for example, the second gripped part 641 of the grinding wheel storage box 64. ing.
Note that the plurality of consumable box gripping parts 121 may each be movable in the X-axis direction on the guide rail 124a.

In this embodiment, the consumables transport mechanism 12 reads the consumables mark Nb provided on the second gripped part 641 of the grinding wheel storage box 64, and reads the consumables mark Nb arranged on the second gripped part 641 of the grinding wheel storage box 64, and reads the consumables box ( The grinding wheel storage box 64 includes a consumable determining unit 126 that determines that the consumable stored in the grinding wheel storage box 64) is the grinding wheel 232.
For example, the consumables identification unit 126 uses a camera (not shown) disposed on the parallel chuck 121c to identify a consumables mark disposed on the second gripped portion 641 of the grinding wheel storage box 64 gripped by the parallel chuck 121c. Nb is imaged and read, image processing such as pattern matching is performed based on the acquired captured image, and it is determined that the consumable box held by the consumable box gripping section 121 is the grinding wheel storage box 64.
Then, based on the determination by the consumables determining unit 126 that the consumables box gripped by the consumables box gripping unit 121 is the grinding wheel storage box 64, the consumables transport mechanism 12 The grinding wheel storage box 64 is carried into the grinding wheel storage 214 by the rotating arm portion 124 and the rotating arm portion 121a.

For example, as shown in FIGS. 1 and 3, the front side (-Y direction side) of the grinding device base 21 of the grinding device 2, the front side (-Y direction side) of the polishing device base 51 of the polishing device 5, the tape mount 4 A workpiece transfer robot base 80 is mounted on each device so as to cross the front side (-Y direction side) of the mounter base 40 in the X-axis direction. As shown in FIG. 3, a transfer robot rail 81 is installed on the workpiece transfer robot base 80 and extends in the X-axis direction.

The workpiece transfer robot 83, which is capable of reciprocating in the X-axis direction while sliding on the transfer robot rail 81 with an electric slider 82, has a rotating arm section that is composed of a plurality of plate-like arms and has a pulley mechanism inside. 831, a robot hand 832 which is attached to the rotation arm part 831 and can rotate in a horizontal plane (in the X-axis and Y-axis plane) and can suction and hold the workpiece W; It is provided with a frame clamp 833 which is movable and which can clamp the ring frame F. That is, the workpiece transport robot 83 can transport any of the workpiece W, the ring frame F, or a work set in which the workpiece W is attached to the ring frame F via the adhesive tape T1. The robot hand 832 and frame clamp 833 can be moved up and down in the Z-axis direction by a vertical movement means (not shown). Further, the robot hand 832 and the frame clamp 833 are capable of vertically inverting the upper and lower surfaces of the workpiece W or the ring frame F held by suction using an inverting means (not shown).
The workpiece transport mechanism 8 is composed of the transport robot rail 81, the electric slider 82, the workpiece transport robot 83, and the like. Note that the workpiece transport mechanism 8 may be configured such that a plurality of workpiece transport robots 83 can each move on the transport robot rail 81 in the X-axis direction.

In this embodiment, the consumables box, that is, the grinding wheel storage box 64, the polishing wheel storage box 65, the ring frame storage box 66, or the tape roll storage box 67, contains the grinding wheel 232 or the consumables stored therein. Whether the polishing wheel 532 has been used or not, whether the inside of the ring frame storage box 66 is empty or not, or whether the tape roll storage box 67 has a tape roll storage box 67 in which the belt-like sheet to which the adhesive tape T1 is attached has been pulled out and is gone. The processing device 1 is provided with a used/unused display section 69 that allows the processing device 1 to determine whether or not the processing device 1 is accommodated. Note that the used/unused display section 69 is shown only for the grinding wheel storage box 64 in FIG. 1 .

The used/unused display section 69 shown in FIG. 1 will be explained using the grinding wheel storage box 64 as an example. For example, the used and unused display section 69 includes a slide plate 69a provided on the side surface of the box-shaped consumables storage section 643 of the grinding wheel storage box 64, and a used mark formed on the side surface of the consumables storage section 643. It is composed of P. In the example shown in FIG. 1, the used mark P is the word "completed", but it may be colored, a two-dimensional barcode, a figure, a number, an alphabet, or the like. Note that the used/unused display section 69 may be disposed on the top surface of the grinding wheel storage box 64, etc., instead of on the side surface.

For example, a fixture 643a disposed in the grinding wheel storage box 64 shown in FIG. When a used grinding wheel 232 whose weight is lighter than that of the grinding wheel 232 is inserted, a decrease in the weight is detected. Then, in the grinding wheel storage box 64 containing the unused grinding wheel 232, the slide plate 69a slides from the hidden state covering the used mark P to expose the used mark P. Then, the operator can visually see the used mark P, or the grinding device 2 can determine that the grinding wheel 232 in the grinding wheel storage box 64 is used by imaging it with a discriminating camera (not shown) of the grinding device 2. or A discrimination camera (not shown) is disposed, for example, in the grinding wheel storage 214, and the grinding device 2 uses at least the grinding wheel 232 in the grinding wheel storage box 64 in the grinding wheel storage 214 as described above. If it is determined that the grinding wheel 232 is finished, the grinding wheel storage box 64 containing the new unused grinding wheel 232 is transported from the supply source B to the grinding wheel storage 214 by the transport system A.

As shown in FIG. 1, the grinding device 2, the polishing device 5, or the tape mounter 4 each includes a grinding control means 29, a polishing control means 59, or A mounter control means 49 is provided.

For example, the grinding control means 29 of the grinding device 2, the polishing control means 59 of the polishing device 5, the control means (not shown) of the workpiece cleaning device 30, the mounter control means 49 of the tape mounter 4, the discrimination transport mechanism 17, the consumables transport mechanism 12 and the workpiece transport mechanism 8 are connected to a host computer C that centrally controls a plurality of devices via a wireless or wired communication path. In this embodiment, each processing device communicates information with supply source B via host computer C, sends a consumables transportation request to supply source B, and communicates information between mutual devices. I'll go there.
Note that each device can directly communicate information with supply source B without going through host computer C, directly transmit a consumables transport request to supply source B, or directly communicate information between mutual devices. You may also do this.

An example in which the workpiece W is processed by the grinding device 2, the polishing device 5, etc. will be described below along with the operation of the transportation system A.
For example, first, information transmission between the supply source B and the grinding device 2 via the host computer C activates the discrimination transport mechanism 17, and the discrimination transport mechanism 17 receives the unprocessed workpiece W from the supply source B. The first cassette 61 thus prepared is carried into the grinding device 2 side. That is, the grip part 170 of the discrimination transport mechanism 17 that has moved to the supply source B grasps the first gripped part 611 of the first cassette 61 located in the supply source B, and reads the discrimination mark Ma of the first cassette 61. It is determined that the gripped article is a cassette containing a workpiece W, and then the first cassette 61 is carried into and placed on the first cassette stage 261 of the grinding device 2 .
Note that the workpiece W is housed in the first cassette 61 with a protective tape (not shown) attached thereto.

On the first cassette stage 261, the cassette lid 617 of the first cassette 61 shown in FIG. 4 is opened, and the workpiece W can be carried out from the opening 61a. The workpiece transport robot 83 of the workpiece transport mechanism 8 shown in FIG. 3 holds and carries out the workpiece W from within the first cassette 61, and further places it on the chuck table 20. With the center of the workpiece W substantially aligned with the center of the chuck table 20, the workpiece W is suctioned and held by the chuck table 20, with the surface not protected by a protective tape (not shown) facing upward. It will be in a state where it is

As the turntable 22 rotates, the chuck table 20 holding the workpiece W moves below the grinding means 23, and the center of rotation of the grinding wheel 232 of the grinding means 23 is aligned with the center of rotation of the workpiece W. The chuck table 20 is positioned horizontally by a predetermined distance so that the rotation locus of the grinding wheel 232 passes through the center of rotation of the workpiece W.
The grinding means 23 is lowered by a grinding feeding means (not shown), and the grinding wheel 232a, which rotates as the spindle 230 rotates, comes into contact with the upper surface of the workpiece W, thereby performing grinding. During grinding, the workpiece W also rotates as the chuck table 20 rotates, so the entire upper surface of the workpiece W is ground. Further, grinding water is supplied to the contact area between the grinding wheel 232a and the workpiece W, and the contact area is cleaned and cooled.
Then, after the workpiece W is ground to a desired thickness while the thickness of the workpiece W is being measured, the grinding means 23 is raised and separated from the workpiece W, thereby grinding the workpiece W. Processing is completed.

The chuck table 20 that suction-holds the workpiece W after grinding is positioned within the movable range of the workpiece transport robot 83 of the workpiece transport mechanism 8 as the turntable 22 rotates. Furthermore, the workpiece transfer robot 83 carries out the workpiece W after grinding from the chuck table 20 and transfers it to an empty second cassette placed on the second cassette stage 262 by the discrimination transfer mechanism 17, for example. 62.

For example, all of the plurality of workpieces W in the first cassette 61 are ground in order as described above, and the plurality of workpieces W after the grinding process are accommodated in the second cassette 62. Thereafter, for example, the grinding control means 29 transmits information on the completion of grinding to the host computer C, and the host computer C issues a command to the discrimination transport mechanism 17, and the discrimination transport mechanism 17 loads the cassette onto the second cassette stage 262. The second cassette 62, which has been placed and accommodates a plurality of workpieces W after grinding, is carried into a mounting stage (not shown) of the polishing apparatus 5.

Next, the workpiece transport robot 83 of the workpiece transport mechanism 8 shown in FIG. 5 on the chuck table 50. With the center of the workpiece W substantially aligned with the center of the chuck table 50, the workpiece W is suctioned and held by the chuck table 50, with the surface not protected by a protective tape (not shown) facing upward. It will be in a state where it is

The chuck table 50 moves in the Y-axis direction, and the polishing wheel 532 of the polishing means 53 and the workpiece W held on the chuck table 50 are aligned. In this alignment, as shown in FIG. 3, the chuck table 50 is positioned at a predetermined position so that the polishing wheel 532 is always in contact with the entire upper surface of the workpiece W during the polishing process. Note that in the example shown in FIG. 3, the outer periphery of the polishing wheel 532 and the outer periphery of the workpiece W are substantially matched, but they do not need to be substantially matched.

The polishing means 53 descends, and the polishing process is performed while the polishing pad on the lower surface of the polishing wheel 532 contacts the upper surface of the workpiece W. Further, during the polishing process, as the chuck table 50 rotates, the workpiece W also rotates, and the entire upper surface of the workpiece W is polished by the polishing wheel 532.
During the polishing process, for example, slurry (polishing liquid) may be supplied to the contact area between the workpiece W and the polishing wheel 532.

After the polishing process has been performed for a predetermined period of time, the polishing means 53 is raised and separated from the workpiece W, thereby completing the polishing process of the workpiece W.
Next, the workpiece W is transported from the chuck table 50 to the spinner table 300 of the workpiece cleaning device 30 by an unloading arm (not shown). Then, cleaning water is sprayed onto the upper surface of the workpiece W from a cleaning nozzle 301 that rotates above the workpiece W held by the spinner table 300 to clean the upper surface. Next, for example, air is ejected from the cleaning nozzle 301 to dry the workpiece W.

For example, the workpiece W after cleaning is stored in an empty shelf (not shown) in the second cassette 62 placed on a mounting stage (not shown) of the polishing apparatus 5 by the workpiece transport mechanism 8 . Thereafter, when the workpieces W polished and cleaned as described above are stored in, for example, all the shelves in the second cassette 62, the polishing control means 59 (see FIG. 1) sends the workpieces W to the host computer C. The information on the completion of polishing and cleaning is transmitted, and the host computer C issues a command to the discrimination transport mechanism 17, and the discrimination transport mechanism 17 transfers the second cassette 62 containing the polished and cleaned workpiece W to the fourth cassette 62. cassette stage 404.

The workpiece transfer robot 83 holds and carries out the workpieces W from the second cassette 62, and then places them on the tape application table 470 of the adhesive tape application means 47 of the tape mounter 4 shown in FIG. The workpiece W is placed so that the centers of the two substantially coincide with each other. Furthermore, the frame clamp 833 of the workpiece transfer robot 83 carries out one ring frame F from the frame stocker 41 and places it on the tape application table 470. The workpiece W is placed in the opening of the ring frame F with its center substantially aligned with the center of the opening. The device surface of the workpiece W to which a protective tape (not shown) is attached is held under suction by the tape application table 470, and the ground and polished surface of the workpiece W faces upward.

Next, the strip-shaped sheet is pulled out toward the peel plate 475 by the pull-out roller 472 from the tape roll R set so as to be drawn near the pull-out roller 472, and while the adhesive tape T1 is peeled off from the strip-shaped sheet by the peel plate 475, Adhesive tape application roller 474 rotates at a predetermined rotational speed. Furthermore, as the tape application table 470 is sent out in the Y-axis direction by the ball screw mechanism 473, the adhesive tape application roller 474 moves one side of the ring frame F held on the tape application table 470 and the workpiece. Adhesive tape T1 is pressed against both objects from the outer circumferential side of W.

Then, while pressing the adhesive tape T1 against the ring frame F and the workpiece W with the adhesive tape application roller 474, the tape application table 470 is moved in the Y-axis direction until it reaches a predetermined position where it passes through the adhesive tape application roller 474. When the workpiece W and the ring frame F are moved to , a piece of adhesive tape T1 can be attached to the workpiece W and the ring frame F, and a work set in which the workpiece W and the ring frame F are integrated with the adhesive tape T1 is created. Can be created.

The workpiece transfer robot 83 holds the workpiece W, which has become a work set, and carries it out from the tape application table 470, and further places it on the peeling table 430 of the protective tape peeling means 43 of the tape mounter 4. . The workpiece W is suction-held by the peeling table 430 in a state where the center of the workpiece W serving as the workpiece set and the center of the peeling table 430 substantially coincide with each other. The workpiece W, which has become a work set, is in a state in which the device surface protected by a masking tape (not shown) faces upward.

Under the control of the mounter control means 49, for example, the peeling part 431 moves in the Y-axis direction by the ball screw mechanism 432, and a protective tape (not shown) attached to the device surface of the workpiece W is placed directly below the peeling part 431. The outer peripheral portion is positioned. Subsequently, the peeling unit 431 attaches the peeling tape to the protective tape. In this state, the peeling part 431 is moved in the Y-axis direction by the ball screw mechanism 432, and the peeling part 431 is relatively moved in the radial direction from the outer periphery of the workpiece W toward the center to remove the protective tape from the workpiece W. Peel off.

As information is transferred between the supply source B and the tape mounter 4 via the host computer C shown in FIG. The third cassette 63 is placed on the third cassette stage 403 shown in FIG. The processed workpiece W is taken out and stored in an empty third cassette 63 placed on the third cassette stage 403.

As described above, work sets are stored one by one on the shelf in the third cassette 63, and when the third cassette 63 becomes full, for example, information is sent from the tape mounter 4 to the host computer C shown in FIG. Then, the discrimination transport mechanism 17 operates in response to a command from the host computer, and the discrimination transport mechanism 17 transports the third cassette 63 from the third cassette stage 403 to a cutting device or the like (not shown). Then, in a cutting device (not shown), the workpiece W is divided into individual device chips.

For example, when the workpiece W has a modified layer formed therein along the line to be divided by a laser processing device, or a half-cut groove is formed along the line to be divided by a cutting device. If it is, as described above, it is transported from the supply source B to the grinding device 2 in a state accommodated in the first cassette 61 by the discriminating transport mechanism 17, and then the grinding device 2 The workpiece W is divided by grinding the surface of the workpiece W opposite to the device surface. After the workpiece W is polished and cleaned, and furthermore, the workpiece W is made into a work set, the protective tape on the device surface side of the workpiece W is peeled off. Then, the discrimination transport mechanism 17 transports the divided workpiece W, which has been divided into workpiece sets, from the third cassette stage 403 to, for example, a tape expanding device, and picks up the chips of the workpiece W. spread out at appropriate intervals.

As described above, in this embodiment, the workpiece W is ground and polished to form a workpiece set, but the workpiece W brought in from the supply source B by the discrimination transport mechanism 17 is first The mounter 4 may set the workpiece W as a workpiece, and the workpiece W may be subjected to grinding and polishing.

As described above, when the grinding device 2 shown in FIG. 2 grinds the workpiece W, for example, the grinding wheel 232a of the grinding wheel 232 is worn out and the workpiece W cannot be ground. Therefore, at an appropriate timing, the operator opens, for example, the top 642 (see FIG. 1), which is the lid of the grinding wheel storage box 64 stored in the grinding wheel storage 214, and The new grinding wheel 232 is taken out and replaced with the used grinding wheel 232 attached to the grinding means 23. The used grinding wheel 232 is stored, for example, in an empty grinding wheel storage box 64.

In this embodiment, the consumables stored in the grinding wheel storage box 64 stored in the grinding wheel storage 214, that is, the grinding wheels 232, are used as shown in FIG. This is indicated by the usage indicator 69. That is, the used mark P is exposed so as to be visible from the outside.

As described above, when the polishing device 5 polishes the workpiece W, the polishing pad of the polishing wheel 532 is worn out and the workpiece W cannot be polished. Therefore, at an appropriate timing, the operator takes out a new polishing wheel 532 housed in the polishing wheel storage box 65 stored in the polishing wheel storage 58 and removes the used polishing wheel 532 from the polishing wheel 532 attached to the polishing means 53. Replace it with the polishing wheel 532. The used polishing wheel 532 is stored, for example, in an empty polishing wheel storage box 65.

In this embodiment, if the polishing wheel 532 stored in the polishing wheel storage box 65 stored in the polishing wheel storage 58 shown in FIG. Indicated by That is, the used mark of the polishing wheel storage box 65 is exposed so as to be visible from the outside.

As described above, when the tape mounter 4 sets the workpiece W and the ring frame F as a work set, the number of ring frames F stored in the frame stocker 41 decreases and disappears, so the adhesive tape sticking means 47 Therefore, the workpiece W cannot be used as a work set. Therefore, at an appropriate timing, an operator takes out a new ring frame F stored in the ring frame storage box 66 stored in the frame storage 45 and replenishes the frame stocker 41. Then, the ring frame storage box 66 becomes empty.

In the present embodiment, a used/unused indicator (not shown) indicates that there is no more ring frame F stored in the ring frame storage box 66 stored in the frame storage 45. That is, the used mark (mark indicating that it is empty) of the ring frame storage box 66 is exposed so as to be visible from the outside.

As described above, when the tape mounter 4 sets the workpiece W and the ring frame F as a work set, the tape roll R, that is, the adhesive tape T1 decreases and disappears, so the adhesive tape attaching means 47 attaches the workpiece to the workpiece. W cannot be used as a workset. Therefore, at an appropriate timing, the operator takes out a new tape roll R stored in the tape roll storage box 67 stored in the tape roll storage 46 and sets it near the pull-out roller 472. Then, the tape roll storage box 67 becomes empty.

In the present embodiment, a used/unused indicator (not shown) indicates that there is no more tape roll R stored in the tape roll storage box 67 stored in the tape roll storage 46. That is, the used mark (for example, a mark indicating that an empty roll tube is stored) of the tape roll storage box 67 is exposed so as to be visible from the outside.

In this way, when the grinding wheel storage box 64 containing used grinding wheels 232 is stored in the grinding wheel storage 214 of the grinding device 2 shown in FIG. The mark P (see FIG. 1) is read, and the grinding control means 29 of the grinding device 2 determines that the grinding wheel 232 in the grinding wheel storage box 64 in the grinding wheel storage 214 is used.
When the polishing wheel storage box 65 containing the used polishing wheels 532 is stored in the polishing wheel storage 58 of the polishing device 5, the used mark is read by a discriminating camera (not shown) of the polishing device 5, and the polishing control means 59 determines that the polishing wheel 532 in the polishing wheel storage box 65 in the polishing wheel storage 58 is used.
When the ring frame storage box 66 stored in the frame storage 45 of the tape mounter 4 becomes empty, a used mark (a mark indicating empty) is read by a discriminating camera (not shown) of the tape mounter 4, and the mounter control means 49 It is determined that the ring frame storage box 66 stored in the frame storage 45 has become empty.
When the tape roll storage box 67 stored in the tape roll storage 46 of the tape mounter 4 is in a state where an empty roll cylinder is stored, a used mark (empty mark) is marked by a discriminating camera (not shown) of the tape mounter 4. mark) is read, and the mounter control means 49 determines that the tape roll storage box 67 stored in the tape roll storage 46 needs to be replaced.

From the grinding control means 29 of the grinding device 2, via the host computer C, there is a request to transport consumables, that is, a request to transport the grinding wheel storage box 64 containing the new grinding wheel 232 to the grinding wheel storage 214. , is sent to source B.
Further, the polishing control means 59 of the polishing device 5 sends a consumables transport request via the host computer C, that is, a request to transport the polishing wheel storage box 65 containing the new polishing wheel 532 to the polishing wheel storage 58. A request is sent to source B.
A request for transporting consumables is sent from the mounter control means 49 of the tape mounter 4 via the host computer C, that is, a request to carry the ring frame storage box 66 containing the new ring frame F into the frame storage 45. Sent to source B.
The mounter control means 49 of the tape mounter 4 sends a request to transport consumables via the host computer C, that is, a request to carry the tape roll storage box 67 containing a new tape roll R into the tape roll storage 46. , is sent to source B.

Based on the above consumables transportation requests sent to supply source B, transportation system A transfers grinding wheel storage box 64, polishing wheel storage box 65, ring frame storage box 66, or tape roll storage box 67 to supply source B. It is transported between the grinding device 2, the polishing device 5, or the tape mounter 4.
Below, a case will be described in which the transportation system A carries, for example, the grinding wheel storage box 64 into the grinding device 2.

Note that, before the grinding wheel storage box 64 containing a new grinding wheel 232 is brought in by the transportation system A, the grinding wheel storage box 64 containing a used grinding wheel 232 is, for example, used for replacing the grinding wheel 232. The grinding wheel is carried out from the grinding wheel storage 214 by the worker who has done this or by the worker who has seen the used mark P.
For example, the grinding device 2 displays on a monitor (not shown) or issues an alarm from a speaker that the grinding wheel storage box 64 stored in the grinding wheel storage 214 is for storing a used grinding wheel 232. A different worker than the one who replaced the grinding wheel 232 may be made to recognize the grinding wheel 232 by doing so. Then, the operator carries out the grinding wheel storage box 64 containing the used grinding wheels 232 from the grinding wheel storage 214.
Alternatively, if the grinding control means 29 determines that the grinding wheel 232 in the grinding wheel storage box 64 in the grinding wheel storage 214 is used, the host computer C to which information has been transmitted from the grinding control means 29 transports consumables. A command is issued to the mechanism 12 and the discrimination transport mechanism 17, and the consumables transport mechanism 12 and the discrimination transport mechanism 17 move the grinding wheel storage box 64 containing the used grinding wheel 232 to contain, for example, a new grinding wheel 232. Transport (recovery) from grinding wheel storage 214 to source B (or to a collection location located near source B) for reuse.

The host computer C shown in FIG. 1 issues a command to the discrimination transport mechanism 17, and the discrimination transport mechanism 17 moves to the supply source B, and at the supply source B, the first cassette 61 containing the workpiece W is stored. Rather, the gripping portion 170 grips the grinding wheel storage box 64 in which the grinding wheel 232, which is a consumable item, is stored. That is, in the present embodiment, the discriminating unit 173 of the discriminating transport mechanism 17 detects the second cover of the grinding wheel storage box 64 gripped by the parallel chuck 170b using, for example, a camera (not shown) disposed on the parallel chuck 170b. The discrimination mark Mb provided on the gripping part 641 is imaged, and based on the acquired image, it is determined that the article gripped by the gripping part 170 is the grinding wheel storage box 64, which is a consumables box.
Then, based on the determination made by the determining unit 173 that the article gripped by the gripping unit 170 is the grinding wheel storage box 64, the determining and transporting mechanism 17 selects the article brought out from the supply source B, that is, the grinding wheel storage box 64. The wheel storage box 64 is carried into the consumables stage 57.

Next, the grinding wheel storage box 64 placed on the consumables stage 57 is carried into the grinding wheel storage 214 of the grinding device 2 by the consumables transport mechanism 12 shown in FIG. In this embodiment, the consumables box gripping section 121 of the consumables transporting mechanism 12 is positioned in front of the consumables stage 57 by the consumables moving means 124, and the parallel opening/closing chuck 121c of the consumables box gripping section 121 is positioned in front of the consumables stage 57. The second gripped part 641 of the grinding wheel storage box 64 is gripped, and the consumable item determination unit 126 images the second gripped part 641 of the grinding wheel storage box 64, reads the consumable item mark Nb from the captured image, and determines the consumable item mark Nb. It is determined that the consumable box gripped by the product box gripping section 121 is the grinding wheel storage box 64.
Then, based on the determination by the consumables determining unit 126 that the consumables box gripped by the consumables box gripping unit 121 is the grinding wheel storage box 64, the consumables transport mechanism 12 The grinding wheel storage box 64 is carried into the grinding wheel storage 214 by the rotating arm portion 124 and the rotating arm portion 121a.
As explained above, the consumables transport request is sometimes sent from each device to the supply source B at the same time, and the consumables box that the discrimination transport mechanism 17 transports to the consumables stage 57 also accommodates the grinding wheel. Since the box 64 is not the only one, the box discrimination by the consumables transport mechanism 12 is useful.

As explained above, the grinding device 2 grinds the workpiece W with the grinding wheel 232, the polishing device 5 grinds the workpiece W with the polishing wheel 532, and peels off the protective tape from the workpiece W. Alternatively, the transportation system according to the present invention transports the article from the supply source B to a specific processing device between tape mounters 4 that attach adhesive tape T1 to the workpiece W to form a work set that is integrated with the ring frame F. In A, the articles are, for example, a first cassette 61 containing a workpiece W or an empty second cassette 62, and a grinding wheel storage box 64 containing a grinding wheel 232, which is a consumable item used in the grinding device 2. , a polishing wheel storage box 65 that stores the polishing wheel 532 used in the polishing device 5, a ring frame storage box 66 that stores the ring frame F used in the tape mounter 4, or a cylindrically wound wheel used in the tape mounter 4. A tape roll storage box 67 that stores a tape roll R, and a first cassette 61 that stores a workpiece W, for example, is transferred between the supply source B and the grinding device 2 based on information transmission between the supply source B and the grinding device 2, for example. In addition, the grinding wheel storage box 64 is transported between the supply source B and the grinding device 2 based on the consumables transportation request sent from the grinding device 2 to the supply source B. This eliminates the need for the worker to transport the cassette containing the workpiece W and the consumables (i.e., the consumables box containing the consumables) between the grinding device B and the grinding device 2, or between multiple processing devices. , it becomes possible to reduce the burden on the worker.

In the transportation system A according to the present invention, for example, the first cassette 61 includes a first gripped part 611, a top plate 612 on which the first gripped part 611 is arranged, and a plurality of cassettes hanging from the top plate 612 and facing each other. Side plates 613a to 613c, a plurality of shelves 615 formed on opposing inner surfaces of side plates 613a and 613b and on which workpieces W are placed, and a bottom plate 616 connecting the lower ends of side plates 613a to 613c. For example, a grinding wheel storage box 64, which is a consumables box, has at least a second gripped part 641, an upper part 642 in which the second gripped part 641 is arranged, and a grinding wheel which is a consumable item and is connected to the upper part 642. The grinding device 2 includes a first cassette stage 261 on which the first cassette 61 is placed, and a second cassette stage 261 on which the second cassette 62 is placed. For example, the polishing device 5 includes a cassette stage 262, and a consumables stage 57 on which a grinding wheel storage box 64, a polishing wheel storage box 65, etc. are placed.For example, the first cassette 61 stores a workpiece W. For example, the grinding wheel storage box 64, which is a consumables box, is provided with a discrimination mark Mb for determining whether it is a cassette or a consumables box. A gripping part 170 that grips the first gripped part 611 of the cassette 61 or, for example, the second gripped part 641 of the grinding wheel storage box 64, and a mark Ma for determining whether the article gripped by the gripping part 170 is a cassette or a consumables box. Alternatively, the discriminating conveyance mechanism 17 including a discriminating unit 173 that discriminates based on the discriminating mark Mb determines whether the article held by the gripping unit 170 is selected between the supply source B and the first cassette stage based on the discrimination performed by the discriminating unit 173. 261 or between the supply source B and the consumables stage 57.

The grinding device 2, which is an example of a processing device, includes a grinding wheel storage 214 that is a consumables storage for storing a grinding wheel storage box 64, and grinds the grinding wheel storage box 64 placed on the consumables stage 57. The consumables transport mechanism 12 includes a consumables transport mechanism 12 that transports the consumables to the wheel storage 214. 121 between the consumables stage 57 and the grinding wheel storage 214, it is possible to transport, for example, the grinding wheel storage box 64 to the consumables stage 57 without mistake, and the final In addition, it becomes possible to transport the grinding wheel to the grinding wheel storage 214 of the grinding device 2 without making a mistake.

For example, the grinding wheel storage box 64, which is a consumables box, is provided with a consumables mark Nb that allows the consumables stored therein to be identified as the grinding wheel 232, and the consumables transport mechanism 12 is provided with the consumables mark Nb. The grinding wheel storage box 64 is equipped with a consumables discriminating unit 126 that reads the consumables and discriminates that the consumables are the grinding wheels 232, and the consumables discriminating unit 126 discriminates that the consumables stored therein are the grinding wheels 232. By transporting the consumables to the grinding wheel storage 214 of the grinding device 2, which is the corresponding processing device, by the consumables moving means 124, for example, a request for consumables transportation from the grinding device 2, the polishing device 5, and the tape mounter 4 to the supply source B can be made. Even if there is a possibility that a plurality of grinding wheel storage boxes 64, polishing wheel storage boxes 65, or ring frame storage boxes 66 are placed on the consumables stage 57, It becomes possible to transport the grinding wheel storage box 64 containing the grinding wheel 232 to the grinding wheel storage 214 of the grinding device 2 without making a mistake.

For example, the grinding wheel storage box 64, which is a consumables box, includes a used/unused display section 69 that allows the grinding device 2 to determine whether or not the stored grinding wheel 232, which is a consumable item, has been used. 2 determines that the grinding wheels 232 in the grinding wheel storage box 64 stored in the grinding wheel storage 214 are used, the transportation system A transports the grinding wheels from the grinding wheel storage 214 to the supply source B. By transporting (recovering) the grinding wheel storage box 64 that stores used grinding wheels 232 stored in the storage 214, the used grinding wheels 232 can be delivered to, for example, supply source B or a collection location located near supply source B. The grinding wheel storage box 64 containing the grinding wheel can be recovered.

For example, the grinding wheel storage box 64, which is a consumables box according to the present invention that stores the grinding wheel 232, is connected to a second gripped part 641, an upper part 642 where the second gripped part 641 is arranged, and the upper part 642. By having at least a consumable storage section 643 that accommodates the grinding wheel 232 and a used/unused display section 69 that indicates whether or not the grinding wheel 232 has been used, the transportation system A according to the present invention can be appropriately configured. It becomes available for use.

It goes without saying that the conveyance system A and consumable boxes such as the grinding wheel storage box 64 according to the present invention are not limited to the above-described embodiments, and may be implemented in various different forms within the scope of the technical idea. Furthermore, the components such as the grinding device 2, polishing device 5, tape mounter 4, etc. illustrated in the attached drawings are not limited to these, and can be changed as appropriate within the scope of achieving the effects of the present invention. be.
For example, the conveyance system A does not include the consumables conveyance mechanism 12 and allows an operator to move a consumables box conveyed from the supply source B to the consumables stage 57 by the discrimination conveyance mechanism 17 from the consumables stage 57. May be transported to consumables storage.

For example, the grinding wheel storage 214, the polishing wheel storage 58, the frame storage 45, and the tape roll storage 46 are equipped with a sensor (light sensor, capacitance sensor, weight sensor, etc.) that recognizes the presence or absence of a consumables box. For example, if the sensor recognizes that the grinding wheel storage box 64 is not stored in the grinding wheel storage 214, the grinding control means 29 of the grinding device 2, via the host computer The request, that is, the request to carry the grinding wheel storage box 64 containing the grinding wheel 232 into the grinding wheel storage 214 may be configured to be transmitted to the supply source B.

B: Supply source W: Workpiece A: Conveyance system
12: Consumables transport mechanism 121: Consumables box gripping part 121a: Swivel arm part 121b: Elevating part 121c: Parallel opening/closing chuck 124: Consumables moving means 124a: Guide rail 124b: Slide member 126: Consumables discriminating part 17: Discrimination Conveying mechanism 170: Gripping part 170a: Vertical movement cylinder 170b: Parallel opening/closing chuck 173: Discriminating part 175: Gripping part moving means 175a: Guide rail 175b: Slide member 61: First cassette 611: First gripped part 611a: Hook Plate 611a: Horizontal plate Ma: Discrimination mark 612: Top plate 613a to 613c: Side plate 615: Shelf 616: Bottom plate 61a: Opening 617: Cassette lid 617a: Opening/closing handle 62: Second cassette Ma: Discrimination mark 64: Grinding wheel accommodation Box 641: Second gripped part 642: Upper part 643: Consumables storage part 643a: Fixture Mb: Discrimination mark Nb: Consumables mark 69: Used and unused display part
65: Polishing wheel storage box 651: Second gripped part 653: Fixture Mb: Discrimination mark Nc: Consumables mark 66: Ring frame storage box 661: Second gripped part Mb: Discrimination mark Nd: Consumables mark 67: Tape roll storage box 671: Second gripped part Mb: Discrimination mark Ne: Consumables mark 2: Grinding device 21: Grinding device base 211: Grinding device column 214: Grinding wheel storage 20: Chuck table 22: Turntable 23: Grinding means 230: Spindle 232: Grinding wheel 232a: Grinding wheel 261: First cassette stage 262: Second cassette stage 29: Grinding control means 5: Polishing device 51: Polishing device base 511: Polishing device column 50: Chuck table 53: Polishing means 530: Spindle 532: Polishing wheel 57: Consumables stage 58: Polishing wheel storage 59: Polishing control means 30: Workpiece cleaning device 300: Spinner table 301: Cleaning nozzle 4: Tape mounter T1: Adhesive tape 40: Mounter base 41: Frame stocker 410: Pole 412: Stocker stage 43: Protective tape peeling means 430: Peeling table 432: Ball screw mechanism 431: Peeling part
47: Adhesive tape application means 470: Tape application table 473: Ball screw mechanism 472: Pull-out roller 475: Peel plate 474: Adhesive tape application roller 45: Frame storage F: Ring frame 46: Tape roll storage R: Tape Roll 403: Third cassette stage 63: Third cassette 404: Fourth cassette stage 68: Fourth cassette 49: Mounter control means 12: Consumables transport mechanism
121: Consumables box gripping part 121a: Swivel arm part 121b: Lifting part 121c: Parallel opening/closing chuck 124: Consumables moving means 124a: Guide rail 124b: Slide member 8: Workpiece transport mechanism 80: For workpiece transport robot Base 81: Rail for transfer robot 82: Electric slider 83: Workpiece transfer robot 831: Swivel arm section 832: Robot hand 833: Frame clamp C: Host computer

Claims (3)

A transportation system that transports an article from a supply source to a specific processing device between a plurality of processing devices that process a workpiece with a processing tool,
The article is a cassette containing a workpiece and a consumables box containing consumables including the processing tool used in the processing device,
The cassette is
a first gripped part, a top plate on which the first gripped part is arranged, a plurality of side plates hanging down from the top plate and facing each other, and formed on opposite surfaces of the side plates on which a workpiece is placed. It has at least a plurality of shelves and a bottom plate connecting the lower ends of the side plates,
The consumables box is
It has at least a second gripped part, an upper part where the second gripped part is arranged, and a consumables storage part connected to the upper part and housing the consumables,
The processing device includes a cassette stage on which the cassette is placed, a consumables stage on which the consumables box is placed, and a consumables storage where the consumables box is stored,
The cassette and the consumables box are provided with a discrimination mark for distinguishing between the cassette and the consumables box,
comprising a consumables transport mechanism that transports the consumables box placed on the consumables stage to the consumables storage;
The consumables transporting mechanism includes a consumables box gripping section that grips the second gripped part, and a consumables moving means that moves the consumables box gripping section between the consumables stage and the consumables storage. and,
A gripping part that grips the first gripped part of the cassette or the second gripped part of the consumables box, and a mark for determining whether the article gripped by the gripping part is the cassette or the consumables box. a discriminating section that discriminates between the supply source and the cassette stage, or between the supply source and the cassette stage, based on the discrimination made by the discriminating section, the article held by the grasping section. Equipped with a discrimination transport mechanism that transports the product between the product stage and
The cassette is transported between the supply source and the processing device based on information transmission between the supply source and the processing device, and the consumable is transported based on a consumables transportation request sent from the processing device to the supply source. A transportation system for transporting boxes between the source and the processing equipment. The consumables box includes a consumables mark that allows identification of the consumables stored therein,
The consumables transport mechanism includes a consumables discriminating unit that reads the consumables mark and determines the consumables,
2. The consumables box in which the consumables contained therein have been determined by the consumables discriminator is transported by the consumables moving means to the consumables storage of the corresponding processing device. conveyance system. The consumables box includes a used/unused display section that allows the processing device to determine whether the consumables stored therein are used or not,
When the processing device determines that at least the consumables in the consumables box are used, the consumables box containing the used consumables is transported from the consumables storage to the supply source. The transportation system according to claim 1 or claim 2 .

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