JP7343417B2 - Metal parts, watch movements with metal parts, watches with watch movements, and methods for manufacturing metal parts - Google Patents

Description

The present invention relates to metal parts, a timepiece movement having metal parts, a timepiece having a timepiece movement, and a method for manufacturing metal parts.

Metal watch parts, including nickel electroformed parts, are manufactured using UV-LIGA (microfabrication using photolithography using ultraviolet rays, electrolytic plating, etc.) and transfer methods. In addition, watch parts are widely made from brittle materials such as silicon and nickel-phosphorus electroforming to reduce weight, make them non-magnetic, and increase precision. Further, based on the mechanical structure, electroformed parts having a multi-stage structure are being considered (see, for example, Patent Document 1).

Japanese Patent Application Publication No. 2007-46147

However, since many of the parts manufactured by these methods are thin objects such as gears, they are often attached with a shaft called a pinion on which a relatively small number of teeth are formed. In this case, a method such as press-fitting a shaft or the like into these parts having openings or gluing them is adopted.

In the case of normal nickel electroforming, the hardness is low relative to the shaft, so press-fitting using its plastic deformation is common, but the exit side may bulge due to press-fitting (see Figures 12 and 13). . Furthermore, in severe cases, the parts may be deformed and damaged, and the deformation may lead to a decrease in dimensional accuracy.

Furthermore, in the case of brittle materials such as silicon or nickel-phosphorus alloys, fixing by adhesive is mainly used under fitting conditions with a gap to the shaft. If a shaft or the like is press-fitted into a part made of these brittle materials, the part will be damaged, so the fitting portion between the gear and the shaft requires a relatively large gap in consideration of processing tolerances. In such a case, if the amount of adhesive applied to the connection part is not appropriate, the adhesive may protrude or the parts may become tilted, as shown in Figures 14 and 15. Ta.

Furthermore, when fixing a nail stone to an ankle, if the nail stone is forced into a forced fit, the abutting edges may bulge, and in severe cases, the parts may be deformed or damaged.

The present invention has been made in view of the above-mentioned problems, and it is possible to improve the dimensional accuracy, suppress the protrusion of the deformed part to the outside when fitting other parts, and reduce the deformation of the part. An object of the present invention is to provide a metal component, a watch movement having the metal component, a timepiece having the watch movement, and a method for manufacturing the metal component, which can improve the fitting force.

The metal part according to the first aspect is a metal part formed to a predetermined thickness by electroforming or electroless plating, and includes a fitting part that can be fitted by inserting another part, and a fitting part that can be fitted by inserting another part. A step-like sloped part is provided in the part and slopes so that the fitting part is spaced apart in the width direction from one end side in the thickness direction to the other end side, and the angle of the sloped surface of the sloped part is: The angle is 2 degrees or more and 10 degrees or less with respect to the thickness direction, and the inclined portion fits with the other component on the inner side in the width direction of the fitting portion.

In the first aspect, the fitting portion is provided with a step-like slope portion that slopes from one end side to the other end side in the thickness direction. This inclined portion fits into another component on the widthwise inner side of the fitting portion. One end of this slope is the side with a smaller distance to other parts (in the case of a hole, the smaller diameter side), and the other end of the slope is the side with a larger distance to other parts (in the case of a hole, the larger diameter side). .

According to the first aspect, the fit tolerance of the fitting part is determined on the small diameter side (the side where the distance from other parts is small), so the fit tolerance on the large diameter side (the side where the distance from other parts is large) The tolerance can be set smaller than that determined by , and as a result, dimensional accuracy can be improved.

In addition, by increasing dimensional accuracy, it is possible to suppress the protrusion of the deformed part to the outside when fitting other parts, reduce the deformation of the part, and improve the fitting force. Can be done. Furthermore, by providing the fitting part with an inclined part that slopes from one end in the thickness direction to the other end, a space is created between the inclined part of the metal part and the surface of the other part to be fitted. can be provided. As a result, when using adhesive when fitting other parts, the adhesive can be contained in the space between the sloped part and the surface of the other part, increasing the adhesive effect, and also This prevents the adhesive from leaking into the product.
In addition, if the angle of the inclined surface in each stage of the inclined part is less than 2 degrees with respect to the thickness direction, the difference in the separation distance of the fitting part between one end and the other end in the thickness direction will be small, and one end No improvement in dimensional accuracy can be expected between one end and the other end, and no improvement in fitting force can be expected. On the other hand, if the angle of each inclined surface exceeds 10 degrees with respect to the thickness direction, the inclined portion will become sharply pointed, and its strength will not be maintained and it will easily crack or break. Unable to maintain resultant force. On the other hand, according to the fifth aspect, by setting the angle of each slope to 2 degrees or more and 10 degrees or less with respect to the thickness direction, it is possible to both improve dimensional accuracy and suppress cracks and damage. This is possible, and the fitting force for fitting other parts can be improved.

In the metal component according to the second aspect, in the first aspect, the inclined part includes a first inclined part inclined from the middle in the thickness direction to the other end side, and a first inclined part inclined from the one end side to the middle. and a second inclined part, at least the one end side of the first inclined part fitting into the other component.

The second aspect is characterized in that two stages of sloped parts, a first sloped part and a second sloped part, are provided in the fitting part. Here, the positional accuracy of the sloped surface in the sloped part can be improved as the thickness of the metal component becomes smaller. A step-like inclined surface that divides the area into two can improve accuracy.

That is, by having two inclined parts, the dimensional tolerance as a fitting tolerance can be reduced, and the dimensional accuracy can be improved more than in the case of one inclined part. By improving dimensional accuracy in this way, it is also possible to prevent the deformed part from protruding outward when fitting other parts, reduce the deformation of the part, and further improve the fitting force. can be achieved.

In the metal component according to the third aspect, in the second aspect, the other component fits into each of the first inclined part and the second inclined part.

According to the third aspect, it is possible to fit other parts at the edges of both the first sloped part and the second sloped part, and it is possible to fit the other parts at the edge of one sloped part. It is possible to improve the fitting force compared to the case.

In the metal component according to the fourth aspect, in the second aspect or the third aspect, the downstream side of the insertion direction of the other component has an adhesive reservoir portion for collecting a surplus of adhesive for bonding with the other component. Equipped with

In the fourth aspect, since the fitting portion has two sloped portions, the first sloped portion and the second sloped portion, the following effects are achieved when adhering to other components. In other words, if there is a large amount of adhesive when inserting another component into the mating part, the space between the inclined part and the surface of the other component on the downstream side in the insertion direction of the other component functions as an adhesive reservoir. . That is, according to the fourth aspect, it is possible to enhance the adhesion effect of other parts and to prevent the adhesive from flowing out.

A timepiece movement according to a fifth aspect has a metal component according to any one of the first to fourth aspects .

According to the fifth aspect , it is possible to improve the fitting force between the metal parts and other parts, and it is possible to provide a timepiece movement that is resistant to impact at low cost.

A timepiece according to a sixth aspect has the timepiece movement according to the fifth aspect .

According to the sixth aspect , it is possible to improve the fitting force between the metal component and other components, and it is possible to provide a watch that is resistant to impact at low cost.

A seventh aspect is a method for manufacturing a metal component according to any one of the first to fourth aspects , which comprises applying a first photoresist layer to a first thickness on a substrate. a first coating step, a first exposure step of partially exposing the first photoresist layer through a first photomask, and a second photoresist layer formed on the first photoresist layer. a second coating step in which the second photoresist layer is partially exposed through a second photomask; a developing step of developing the photoresist layer No. 2 to expose the substrate and forming a mold having an opening having the external shape of the metal component; and immersing the mold in an electroforming solution and energizing it. The metal is deposited inside the opening to form a desired thickness along the mold, or by immersing the mold in an electroless plating solution and performing electroless plating. a molding step of molding a metal body; a thickness adjustment step of adjusting the thickness of the metal body to the predetermined thickness; and a removal step of removing the photoresist layer and the substrate to obtain a metal component. and.

According to the seventh aspect , by including the first exposure step and the second exposure step, it is possible to manufacture a metal component having a two-step structure having steps.

According to the present invention, it is possible to improve dimensional accuracy, suppress the outward protrusion of the deformed part when fitting other parts, reduce the deformation of the part, and improve the fitting force. be able to.

(A) to (F) are diagrams illustrating a method of manufacturing a mold according to a first embodiment of the present invention. (A) and (B) are explanatory diagrams showing a method of manufacturing a metal component according to a first embodiment of the present invention. (A) to (C) are explanatory diagrams showing a process of driving a pinion shaft into a metal component, according to a first embodiment of the present invention. FIG. 2 is an explanatory diagram showing a mold according to a second embodiment of the present invention. (A) to (C) are explanatory diagrams illustrating a second embodiment of the present invention, showing a process of driving a pinned shaft into a metal component using an adhesive. FIG. 7 is an explanatory diagram showing a process of driving a pinned shaft into a metal component using an adhesive in a second embodiment of the present invention. (A) and (B) are explanatory diagrams showing the fourth embodiment of the present invention and a state before the nail stone is fitted to the ankle. (A) to (C) are explanatory diagrams showing a fourth embodiment of the present invention, in which a nail stone is fitted to the ankle. (A) to (C) are explanatory diagrams illustrating a fifth embodiment of the present invention, in which a nail stone is fitted to the ankle using an adhesive. (A) and (B) are explanatory diagrams showing supplementary explanation for deepening understanding of the present invention. (A) to (C) are explanatory diagrams showing supplementary explanations for deepening understanding of the present invention. (A) and (B) are explanatory diagrams showing a conventional process of driving a pinion into a metal part. (A) and (B) are explanatory diagrams showing a conventional process of driving a pinion into a metal part. (A) and (B) are explanatory diagrams showing a conventional process of driving a pinion into a metal part using an adhesive. (A) and (B) are explanatory diagrams showing a conventional process of driving a pinion into a metal part using an adhesive.

Embodiments of the present invention will be described below based on the drawings. In addition, in this specification, when there is a numerical range expressed using "~", the numerical range means a range that includes the numerical values written before and after "~" as a lower limit value and an upper limit value.

(First embodiment)
The method for manufacturing the mold 64 according to the first embodiment using FIGS. 1(A) to (F), and the manufacturing method for the metal component 10 according to the first embodiment using FIGS. The manufacturing method will be explained. In this embodiment, an electroforming mold is manufactured as the mold 64, and the metal component 10 is manufactured by electroforming using the mold 64.

The metal component 10 according to the present embodiment corresponds to, for example, a component of a timepiece movement such as a gear, a pallet wheel, or an escape wheel. The metal component 10 of this embodiment is manufactured through a first coating process, a first exposure process, a second coating process, a second exposure process, a development process, a molding process, a thickness adjustment process, and a removal/separation process. be done. Each of these steps will be explained in detail below.

Note that the metal component 10 according to the present embodiment includes a fitting portion 80 (see FIG. 2) that is a through hole into which another component such as a shaft body can fit. As described later, this fitting part 80 includes an inclined part (a first inclined part 81 and a second inclined part 82) which is inclined from the lower side to the upper side and whose lower side fits into other parts. (See Figure 2). Here, the lower side corresponds to one end side in the thickness direction, and the upper side corresponds to the other end side in the thickness direction.

In the first coating step, as shown in FIG. 1A, a conductive film 52 is formed on one surface of a silicon wafer 51 to obtain a substrate 50. The conductive film 52 is made of, for example, a metal such as gold, copper, chromium, nickel, or titanium, but may be composed of a plurality of films. Further, as a forming method, a vapor phase plating method such as a vacuum evaporation method or a sputtering method, or a wet plating method such as an electroless plating method may be adopted. Furthermore, the film thickness is preferably in the range of several nm to several μm.

Next, by applying a photoresist onto the substrate 50, a first photoresist layer having a first thickness shown in FIG. 1(B) is formed. The first thickness in this embodiment is 50 μm. Coating methods include a spin coating method using a liquid photoresist, a printing method, and the like, but a method of attaching a dry film photoresist, which is a film photoresist, by thermocompression bonding or the like can also be employed in this step. Further, although either a negative type or a positive type photoresist can be applied, in this embodiment, an example in which a negative type photoresist is used will be described.

Next, a first exposure step is performed. In the first exposure step, the exposed portion 61 is formed by performing exposure using a first photomask (not shown).

Next, in the second coating process, as shown in FIG. A second photoresist layer 54 having a thickness of 1.2 mm is formed. Although the second thickness in this embodiment is 50 μm, the second thickness is not limited to this, and may be different from the first photoresist layer. The two photoresist layers 53 and 54 formed as described above become an unexposed portion 62 and an exposed portion 61 of the photoresist, as shown in FIG. 1(D).

Here, second tapered portions 57 corresponding to second inclined portions 82 of the metal component 10, which will be described later, are formed on both side end surfaces of the exposure portion 61. The second tapered portion 57 is inclined outward in the width direction with respect to the exposure portion 61 as it goes upward, and the angle thereof is set to be 2 degrees or more and 10 degrees or less.

The angle of this taper (slope) is obtained by selecting an appropriate photoresist material with a predetermined resolution and adjusting the spacing between the photoresist and photomask, as described below. be.

Note that in manufacturing the electroforming mold by the LIGA method, an exposure method using X-rays and an exposure method using ultraviolet rays are performed.

In X-ray exposure, the wavelength used is sufficiently short relative to the thickness of the photoresist used, so an electroforming mold with high resolution can be provided. However, exposure using X-rays requires expensive equipment such as an X-ray source.

The exposure method using ultraviolet rays can be handled using equipment used for normal photolithography. However, since the wavelength used is relatively long, effects such as diffusion and interference of ultraviolet rays appear, so the resolution is not sufficient. When there is a gap between the photoresist and the photomask, this effect is significant, and especially when the photoresist becomes thick, unevenness and undulations tend to occur on the surface of the photoresist. Therefore, resolution problems may occur. Further, thick parts have a taper (slanted surface) in the thickness direction.

In this embodiment, an appropriate acrylic type photoresist material is used instead of an epoxy resin type photoresist which has a very high resolution and a small taper (inclined surface) angle. By adjusting the appropriate distance between the photoresist and the photomask, the angle of the taper (slanted surface) is set to be 2 degrees or more and 10 degrees or less with respect to the above-mentioned thickness direction.

Next, a second exposure step is performed. In the second exposure step, by performing exposure using a second photomask (not shown) on which a second exposure pattern is drawn, the exposed area 61 and the exposed area after development are exposed as shown in FIG. 1(E). An unexposed portion 62 which becomes an opening in the shape of a metal part is obtained. Here, near the center in the width direction, an upper exposed portion 61 of approximately the same shape formed by the second photoresist layer 54 is formed on a lower exposed portion 61 formed by the first photoresist layer 53. It is formed so that it appears to be placed on the upper side.

Note that both side end surfaces of the exposed portion 61 formed by the second photoresist layer 54 have a shape similar to the second tapered portion 57 described above, and correspond to the first inclined portion 81 of the metal component 10 described later. A first tapered portion 56 is formed. The first tapered portion 56 is also inclined outward in the width direction with respect to the exposure portion 61 as it goes upward, and its angle is also 2 degrees or more, similar to the second tapered portion 57 described above. It is set to be 10 degrees or less.

Note that the angle of this taper (slanted surface) can also be obtained by selecting an appropriate photoresist material having a predetermined resolution and adjusting the spacing between the photoresist and the photomask, similarly to the first taper portion 56. It is something that

Next, a developing process is performed. As shown in FIG. 1F, in the developing step, the unexposed areas 62 are developed and removed using a developer (not shown). As a result, an opening 55 having the outer diameter shape of a metal component with the conductive film 52 exposed at the bottom, and a photoresist layer 63 surrounding this as an insulator are obtained, and when the development process is completed, a molding using an electroforming mold is obtained. The mold 64 is completed.

Next, a molding process is performed. First, in the molding process, the mold 64 is immersed in a matte copper sulfate plating solution (not shown) and energized, so that the root mean square of the surface of the conductive film 52 exposed at the bottom of the opening 55 of the mold 64 is A matte copper plating layer with a thickness of about 300 nm to 5 μm and a surface roughness is formed. This matte copper plating layer is formed only on the conductive film 52, which is a conductive portion, and is not formed on the surface of the photoresist layer 63 of the mold 64.

Next, after forming the above-mentioned plating layer, the mold 64 that has been thoroughly washed with water is immersed in a nickel sulfamate electroforming solution (not shown), and electricity is applied through the conductive film 52 to open the opening of the mold 64. Nickel electroforming is performed on the matte copper plating layer exposed at the bottom of 55. As a result, nickel is deposited inside the opening 55, and the metal body 11 is formed along the mold 64 shown in FIG. 2(A). Nickel electroforming is performed until a desired thickness is achieved, specifically, until the opening 55 is filled without any gaps, so that a portion of the metal body 11 reaches onto the photoresist layer 63.

Next, a thickness adjustment step is performed. After the electroforming process is completed, the mold 64 with the metal body 11 formed thereon is taken out from the electroforming solution and thoroughly cleaned. Thereafter, unnecessary parts of the surface of the metal body 11 are removed using a grinding device or polishing device, and thickness adjustment and surface smoothing are performed to obtain a metal with the thickness and surface condition shown in FIG. 2(A). Obtain body 11. Through this step, a metal body 11 made of nickel whose shape, thickness, and other dimensions have been adjusted as a metal part 10, a molded substrate 13 consisting of a photoresist layer 63, a copper plating layer (not shown), and a substrate 50. get.

Finally, a removal/separation step is performed. After cleaning the molded substrate 13 obtained in the thickness adjustment process, the molded substrate 13 is immersed in a resist stripping solution (not shown) to remove the photoresist layer 63, thereby removing the metal body 11 and the copper plating layer (not shown). A molded substrate 13 consisting of a substrate 50 and a substrate 50 is obtained.

Next, the molded substrate 13 is immersed in an aqueous ammonium persulfate solution, which is a copper etching solution, to remove the copper plating layer (not shown) from the end surface direction by so-called side etching. Thereby, a metal component 10 of a predetermined thickness made of a nickel electroformed body shown in FIG. 2(B) can be manufactured. Here, the predetermined thickness is the sum of the thickness of the first photoresist layer (first thickness) and the thickness of the second photoresist layer (second thickness).

The inner surface of the fitting part 80 formed at the center in the width direction of the metal component 10 has an inclined part ( Specifically, it includes a first slope part 81 and a second slope part 82).

This inclined part includes a first inclined part 81 which is inclined from the upper side to the middle of the metal component 10, and a second inclined part 82 which is inclined from the middle to the lower side.

Here, the position of the second inclined part 82 on the inner side in the width direction is equal to the inner position of the first inclined part 81 in the width direction. In this case, the thickness direction of the metal component 10 is divided into two by the first inclined part 81 and the second inclined part 82, and when the angles of the inclined surfaces are the same, each inclined part (the first inclined part 81, the second inclined part 82, The lower edges of the second inclined part 82 are on the same line in the vertical direction, and when another component is inserted into the fitting part 80, the first inclined part 81 and the second inclined part 82 Both lower end points of the two parts come into contact with other parts and are fitted together, so that the fitting can be made stronger than when fitting at one place.

In this embodiment, since the first inclined part 81 and the second inclined part 82 are formed at substantially the same position on the inner side in the width direction, other parts such as a shaft are inserted into the fitting part 80 at the center in the width direction. Then, both the first inclined part 81 and the second inclined part 82 are fitted into contact with other parts. Of course, the present invention is not limited to this, and it is sufficient if at least one of the parts, specifically, the lower side of the first inclined part 81, is formed to fit with other parts.

3(A) to (C) show a first embodiment of the present invention, in which the mold 64 described in FIGS. 1(A) to (F) is used as shown in FIG. ) shows the process of manufacturing the metal component 10 described in 1.) and driving the shaft 91 with a hook into the metal component 10.

A case will be described in which a pinned shaft 91 as another component is driven into the metal component 10 shown in FIG. 3(A) from below, as shown in FIG. 3(B).

The fitting part 80 according to the present embodiment has a two-stage structure including a first slope part 81 and a second slope part 82. Therefore, when the pinion shaft 91 is driven in, it is possible to hold the pinion shaft 91 in a firmly tightened state at two locations: the lower side of the first inclined part 81 and the lower side of the second inclined part 82. It becomes possible.

Furthermore, since the first inclined part 81 and the second inclined part 82 are inclined so as to expand in diameter upward, even if the pinion shaft 91 is pushed in from below, the diameter will expand upward. The plastically deformed region fits into the space between each inclined portion and the surface of the pinioned shaft 91 (see FIG. 3(C)). This can prevent a portion of the plastically deformed first inclined portion 81 from protruding or protruding from the upper end of the metal component 10 and forming a burr.

By having the above-described configuration, this embodiment has the following effects and effects.

According to the present embodiment, the fitting portion 80 includes a step-like inclined portion that is inclined in a direction in which the diameter increases from the lower side toward the upper side, and whose lower side fits into other parts such as the shaft body. There is. In other words, each of the inclined parts (the first inclined part 81 and the second inclined part 82) has a taper (inclined surface) from the lower side to the upper side, and the lower side of this taper (inclined surface) is the pinion shaft. 91 will fit. The lower side of this taper (sloped surface) is the small diameter side where the distance from the other component, the shaft 91 with a pinion, is small, and the upper side of the taper (slanted surface) is the side with a larger distance from the shaft 91 with a pinion (large diameter). diameter side).

As a result, the fitting tolerance of the fitting part 80 is determined on the small diameter side (the side where the distance from the pinion shaft 91 as another part is small), so 91), the tolerance can be set to a smaller value than in the case where the distance is larger, and as a result, dimensional accuracy can be improved.

In addition, by increasing the dimensional accuracy, it is possible to suppress the protrusion of the deformed part to the outside when fitting the pinion shaft 91 as another part, and to reduce the deformation of the part. It is possible to improve the resultant force.

Furthermore, the present embodiment is characterized in that the fitting portion 80 has a two-stage configuration of a first inclined portion 81 and a second inclined portion 82. Here, in the metal part 10 manufactured using the mold 64 which is an electroforming mold by the LIGA method, the positional accuracy of the inclined surface of the fitting part 80 improves as the thickness of the metal part 10 becomes smaller. be able to. Therefore, if the thickness of the metal component 10 is the same, a step-shaped inclined surface that divides the thickness into two can improve accuracy rather than a single inclined surface.

That is, in this embodiment, by having the first slope part 81 and the second slope part 82 as the two slope parts, the dimensional tolerance as a fitting tolerance can be made smaller than in the case of one slope part. Dimensional accuracy can be improved.

Furthermore, according to the present embodiment, the fitting portion 80 is stepped and the dimensional accuracy is further improved, thereby suppressing the protrusion of the deformed portion to the outside when fitting the pinioned shaft 91 as another component. , deformation of the component can be reduced, and the fitting force can be further improved. For example, FIG. 12 shows an example in which the deformed portion protrudes from the fitting portion 80 when the pinion shaft 91 is inserted into the fitting portion 80 whose inner diameter is reduced by more than the design error. Further, FIG. 13 shows an example of a fitting portion 80 that does not have a step-like inclined surface, in which a deformed portion protrudes from the fitting portion 80 when a pinion shaft 91 is inserted from the enlarged diameter side.

Further, according to the present embodiment, the end edges of both the first inclined portion 81 and the second inclined portion 82 can be fitted with the pinion shaft 91, and the end edge of one inclined portion can be fitted with other parts. It is possible to improve the fitting force compared to the case where the fittings are fitted together.

Further, in this embodiment, the angle of each slope of the first slope portion 81 and the second slope portion 82 is set to 2 degrees or more and 10 degrees or less. If the angle of each inclined surface is less than 2 degrees with respect to the thickness direction, the difference in the distance in the width direction between the lower side and the upper side in the thickness direction will be small, and the dimensional accuracy will be reduced between the lower side and the upper side. No improvement can be expected, and no improvement in the fitting force as described above can be expected. On the other hand, if the angle of each slope exceeds 10 degrees with respect to the thickness direction, the edges of each slope become sharply pointed, making it impossible to maintain strength and easily cracking or breaking. Therefore, the above-mentioned fitting force cannot be maintained. In contrast, according to the present embodiment, by setting the angle of each inclined surface to 2 degrees or more and 10 degrees or less with respect to the thickness direction, it is possible to improve dimensional accuracy and suppress cracks and damage. Therefore, the fitting force for fitting other parts can be improved.

Note that in the case of the fitting of this embodiment involving deformation of the fitting portion 80, the angle of each inclined surface is desirably set to 2 to 4 degrees, thereby suppressing cracking of the metal component 10 and reducing the fitting force. can be ensured.

By applying the metal component 10 of this embodiment to gears, pallets, escape wheels, etc., a timepiece movement can be manufactured. According to this embodiment, it is possible to improve the fitting force between the metal component 10 and other components, and it is possible to provide a timepiece movement that is resistant to impact at low cost. Moreover, a watch can be manufactured using this watch movement. In this case as well, it is possible to provide a watch that is resistant to impact at low cost.

(Second embodiment)
FIG. 4 shows a second embodiment of the present invention, which differs from the first embodiment in the shape of a mold 64. Furthermore, in the first embodiment, the two are fitted together by driving the pinned shaft 91 into the metal part 10, but in this embodiment, both are fixed by bonding.

Specifically, in the first embodiment, the exposed portion 61 formed by the first photoresist layer 53 and the exposed portion 61 formed by the second photoresist layer 54 are formed by the shape of a photomask (not shown). and had the same shape. In contrast, in the present embodiment, the exposed portion 61 on the lower center side in the width direction formed by the first photoresist layer 53 is the exposed portion 61 on the upper side center in the width direction formed by the second photoresist layer 54. It is formed larger than 61.

When the metal component 10 is manufactured using the mold 64 according to this embodiment shown in FIG. 4, it will be as shown in FIG. 5(A). In the metal component 10 of this embodiment, when inserting the pinion shaft 91 as another component from one end side (lower side in FIG. It is set widely.

In this way, the fitting part 80 as the inclined part of this embodiment has a two-stage structure, so that the pinned shaft 91 as another part is inserted from the lower side of the metal part 10, and the metal part 10 is attached with the adhesive 92. When bonding the pinion shaft 91 and the pinned shaft 91, the following effects are achieved. Specifically, in this embodiment, the space between the second inclined part 82 and the surface of the angled shaft 91 functions as the filling part 71 for the adhesive 92, and the space between the second inclined part 82 and the surface of the angled shaft 91 is The space between can be made to function as an adhesive reservoir 70 for storing the remainder of the adhesive 92.

For example, as shown in FIG. 5(B), when a pinned shaft 91 with adhesive 92 applied around the shaft is pushed into the fitting part 80 from below, most of the adhesive 92 is applied to the second slope. It can be housed in the filling part 71 between the part 82 and the surface of the hooked shaft 91. In this embodiment, since the adhesive reservoir 70 is provided above the filling section 71, the remainder of the adhesive 92 that could not be stored in the filling section 71 is stored in the adhesive reservoir 70. I can pay it. Thereby, the adhesive effect between the metal component 10 and the pinned shaft 91 can be further enhanced.

FIG. 6 shows a case where, in this embodiment, less adhesive 92 is used than the amount of adhesive 92 shown in FIG. This is an example showing a state in which 92 is contained. Even if the amount of adhesive 92 applied is small, as long as the filling portion 71 is filled, the adhesive strength between the metal component 10 and the pinion shaft 91 can be ensured.

In addition, as shown in FIG. 5A, in this embodiment, the first inclined portion 81 and the second inclined portion 82 are inclined inward in the width direction as the pinion shaft 91 is pulled out (downward side in the figure). are doing. Then, as shown in FIG. 5(C), the cured adhesive 92 has a wedge-like shape. As a result, when the inserted pinned shaft 91 is about to be pulled out from the metal component 10, the adhesive 92 acts as a wedge against the metal component 10. According to the metal component 10 of this embodiment, the pull-out strength when the pinned shaft 91 is adhesively fixed can be improved.

Note that the angle of the first inclined part 81 and the second inclined part 82 is preferably set to 2 to 4 degrees in the fitting of this embodiment using the adhesive 92; In this case, the larger the angle, the greater the wedge effect.

Further, according to the present embodiment, even if the amount of adhesive 92 is not appropriate, for example, even if more adhesive 92 is used than appropriate, the adhesive may protrude or the parts may be tilted. can be suppressed. For example, FIG. 14 shows an example in which, when a pinned shaft 91 is inserted into a fitting part 80 that does not have an inclined surface, a large amount of applied adhesive 92 protrudes from the fitting part 80. Further, FIG. 15 shows an example in which when a pinion shaft 91 is inserted into a fitting part 80 that does not have a stepped inclined surface, a large amount of applied adhesive 92 protrudes from the fitting part 80.

As described above, in the metal component 10 of the present embodiment, the adhesive reservoir 70 is provided between the first inclined portion 81 and the surface of the pivot shaft 91, and the adhesive reservoir portion 70 is provided between the second inclined portion 82 and the surface of the pivot shaft 91. A filling portion 71 can be provided in the. As a result, when the adhesive 92 is used when fitting the hooked shaft 91 as another component, the adhesive 92 can be stored in the space between the fitting portion 80 and the surface of the hooked shaft 91. . In addition, if the amount of adhesive 92 is large when inserting the pinion shaft 91 into the fitting part 80, it overflows into the adhesive reservoir 70 provided on the upper side, which is the downstream side in the insertion direction of the pinion shaft 91. The adhesive 92 can be contained therein. That is, according to this embodiment, it is possible to enhance the adhesive effect and prevent the adhesive 92 from flowing out.

According to the present embodiment, dimensional accuracy can be improved similarly to the first embodiment. By placing the adhesive 92 between the fitting part 80, which is the inclined part, and the pinned shaft 91, which is another part, the adhesive effect can be enhanced and the metal part 10 can be prevented from flowing out. can be provided. Furthermore, when a timepiece movement or a timepiece having the timepiece movement is manufactured using the metal component 10 of this embodiment, a timepiece that is resistant to impact can be provided at low cost.

(Third embodiment)
The metal component 10 of the second embodiment was manufactured by electroforming using the mold 64, but the metal component 10 of this embodiment is manufactured by electroless plating.
Similarly to the above embodiments, the metal component 10 of this embodiment also includes a first coating process, a first exposure process, a second coating process, a second exposure process, a development process, a molding process, and a thickness adjustment process. , manufactured through a removal and separation process. Details of the first coating process, first exposure process, second coating process, second exposure process, and development process are as described in the first embodiment.

Note that when manufacturing the metal component 10 by electroforming, the substrate 50 in which the conductive film 52 is formed on the silicon wafer 51 is used, but when manufacturing the metal component 10 by electroless plating, the conductive film 52 is formed on the substrate 50. 52 is not required. However, in order to promote the start of electroless plating, it is preferable that the conductive film 52 be present. Furthermore, if the conductive film 52 is not provided, it is preferable to form a copper plating layer with a thickness of about 300 nm to 5 μm in place of the conductive film 52 so that the silicon wafer 51 can be separated from the metal body 11 in the removal/separation process. . As a result, in the removal/separation step, by immersing the molded substrate 13 in an ammonium persulfate aqueous solution, which is a copper etching solution, the conductive film 52, which is a copper plating layer, can be removed from the end surface direction by so-called side etching, and The silicon wafer 51 can be separated from the substrate 13.

Moreover, in this embodiment, the molding process is different from the case where the metal component 10 is manufactured by electroforming. In the molding process, electroless plating is performed on the substrate 50 at the bottom of the opening 55 in the mold 64 by immersing the thoroughly cleaned mold 64 in a nickel-phosphorus electroless plating solution (not shown). As a result, the nickel-phosphorus alloy is deposited inside the opening 55, and the metal body 11 is formed along the mold 64. The nickel-phosphorus alloy is deposited until it reaches a desired thickness, specifically, until it completely fills the opening 55, so that a portion of the metal body 11 reaches onto the photoresist layer 63.

Thereafter, through a thickness adjustment process and a removal/separation process, a metal component 10 made of a nickel-phosphorus alloy shown in FIG. 5(A) is manufactured. The metal body 11 constituting this metal component 10 is amorphous and non-magnetic.

Although the nickel-phosphorus alloy formed by electroless plating is non-magnetic compared to electrolytic nickel plating, it is brittle, and in the conventional structure shown in Figure 12, mechanical fitting is difficult due to the occurrence of cracks. be. On the other hand, in the metal component 10 of the present embodiment, even when the pinioned shaft 91 was inserted, problems associated with fitting such as cracking did not occur.
In this embodiment, by manufacturing the other parts such as the pinion shaft 91 and other main parts with non-magnetic materials, in addition to being low cost and strong against shock, the watch movement with excellent magnetic resistance and the We can provide watch movements.

(Fourth embodiment)
FIGS. 7 and 8 show a fourth embodiment, in which a nail stone 102 is fitted to an ankle 101 as a metal component 10 made by nickel electroforming without using an adhesive, before and after fitting. FIG. FIG. 7(A) shows the state before the nail stone 102 is fitted to the pallet pallet 101, and FIG. 8(B) is a sectional view taken along the line P1-P1 in FIG. 7(A).

This ankle 101 is used in a movement that is a drive mechanism of a mechanical wristwatch. The pallet pallet 101 is connected to a mechanism consisting of a pallet shaft 103, which is the center of swing, and a hairspring (not shown) for keeping the vibration of the pallet 101 constant. The pallet wheel 101 includes two pawl stones 102 for rotating an escape wheel (not shown) in one direction when vibrating around the pallet shaft portion 103.

This ankle 101 is a metal component 10, and has a fitting portion 80 having substantially the same configuration as the first embodiment for fitting a nail stone 102 as another component.

The fitting portion 80 of this embodiment has a first inclined portion 81 and a second inclined portion 82, as in the first embodiment.

Note that, as shown in FIG. 7A, in this embodiment, the nail stone 102 is formed so that it can be inserted from the opening side of the fitting part 80 (lower side in FIG. 7) and fitted. . The nail stone 102 is held by the spring force generated by the structure of the fitting part 80 of the pallet pallet 101.

FIG. 8(A) shows a state in which the nail stone 102 is press-fitted and fitted into the fitting part 80, and FIG. 8(B) shows a cross-sectional view taken along the line Q1-Q1 in FIG. A Q2 sectional view is shown in FIG. 8(C).

This embodiment also has substantially the same configuration as the first embodiment, and can produce similar effects.

(Fifth embodiment)
In this embodiment, in the fourth embodiment, the nail stone 102 is fitted into the fitting part 80 of the pallet pallet 101 as the metal component 10 using an adhesive 92.

FIG. 9(A) shows a state in which the nail stone 102 is fitted into the fitting part 80, and FIG. 9(B) shows the R1-R1 sectional view of FIG. 9(A), and the R2-R2 sectional view A diagram is shown in FIG. 9(C).

This embodiment also has substantially the same configuration as the first embodiment, and can produce similar effects. Further, this embodiment also includes a filling part 71 for filling the adhesive 92 and an adhesive reservoir part 70 for storing the remainder of the adhesive 92. Therefore, this embodiment also has substantially the same configuration as the second embodiment having the adhesive reservoir 70, and can produce similar effects.

(Supplementary explanation for deepening understanding of the present invention)
FIGS. 10(A) and 10(B) are explanatory diagrams showing supplementary explanation for deepening the understanding of the present invention. In manufacturing the metal part 10, the shape of the end face on the inner diameter side of the fitting part 80 is not completely perpendicular to the plane part, but has a certain angle, and the shape of the end face on the inner diameter side is not completely perpendicular to the flat part. Due to the fluctuation, the inclination angle of the end face varies.

For example, in the LIGA processing according to each embodiment, the diffraction and intensity of light during exposure, the state of dissolution during development, etc. become fluctuation factors.

When this is illustrated, it can be seen that the variation is proportional to the thickness t of the component. FIG. 10(B) is an example of a cast component 110 including a fitting portion 80 consisting of one inclined surface without steps. As shown in FIG. 10(B), the dimensional variations in the fitting portion 80 of the cast part 110 are
φB1−φB2=2t×(tanθ1−tanθ2).

On the other hand, since the fitting part 80 of each embodiment is formed in multiple stages, the thickness t of the component per stage becomes small, so dimensional variations can be suppressed without changing the total thickness of the component. becomes possible.

Specifically, as shown in FIG. 10(A), the variation in dimensions of the fitting portion 80 of the metal component 10 is as follows:
φA1-φA2=t×(tanθ1-tanθ2).
When calculations are performed using a two-tiered product with a thickness of 1/2t, it can be seen that the variation in dimensions is 1/2.

Furthermore, in the case of a multi-stage configuration having a plurality of sloped parts as in each embodiment, exposure is performed at each stage, so if the photomask position of each stage shifts even slightly, this may cause another error in the shape. There will be variations. That is, it is not easy to make the vertical variations exactly the same as shown in FIG. 11(B).

In order to suppress this, as shown in FIG. 11(A), any one of the multiple steps (the upper step in FIG. 11(A)) has the required shape, and the other steps (the upper step in FIG. 11(A), the lower part) is shaped so that it becomes small when it is made into a part, so that the error of the slope part can always be kept within the range of A as a part.

FIG. 11(C) is an example of a cast component 110 including a fitting portion 80 consisting of one inclined surface without steps. If the fitting portion 80 does not have a multi-stage configuration as shown in FIG. 11C, even if an error of the same angle as the inclined portion of each embodiment occurs, the error B will be larger than the error A.

Note that in the fourth and fifth embodiments, an example of an ankle is shown as a timepiece component, but the present invention is not limited thereto. For example, the present invention can be applied to timepiece parts such as escape wheels, balance springs, and ordinary gears.

Note that although the embodiments of the present invention have been described by citing embodiments, these embodiments are merely examples, and various modifications can be made without departing from the scope of the invention. Furthermore, it goes without saying that the scope of the present invention is not limited to these embodiments, and that it can be implemented in various forms without departing from the gist of the present invention.

10 Metal parts 11 Metal body 13 Molded substrate 50 Substrate 51 Silicon wafer 52 Conductive film 53 First photoresist layer 54 Second photoresist layer 55 Opening portion 56 First tapered portion 57 Second tapered portion 61 Exposed portion 62 Unexposed Part 63 Photoresist layer 64 Molding mold 70 Adhesive reservoir 71 Filling part 80 Fitting part 81 First inclined part 82 Second inclined part 91 Shaft 92 Adhesive 101 Ankle 102 Nail stone 103 Ankle shaft

Claims (7)

A metal part formed to a predetermined thickness by electroforming or electroless plating,
A fitting part that can be fitted by inserting other parts;
a step-like inclined part provided in the fitting part and inclined so that the fitting part is spaced apart in the width direction from one end side in the thickness direction to the other end side;
The angle of the inclined surface of the inclined part is 2 degrees or more and 10 degrees or less with respect to the thickness direction,
The inclined portion is a metal component that fits with the other component on the inner side in the width direction of the fitting portion. The inclined portion includes a first inclined portion that slopes from the middle in the thickness direction to the other end, and a second inclined portion that slopes from the one end to the middle,
The metal component according to claim 1, wherein at least the one end side of the first inclined portion fits into the other component. The metal component according to claim 2, wherein the other component fits into each of the first slope portion and the second slope portion. 4. The metal component according to claim 2, further comprising an adhesive reservoir on the downstream side in the insertion direction of the other component for storing a surplus adhesive for bonding the other component. A timepiece movement comprising the metal component according to any one of claims 1 to 4 . A timepiece comprising the timepiece movement according to claim 5 . a first coating step of coating a first photoresist layer on the substrate to a first thickness;
a first exposure step of partially exposing the first photoresist layer through a first photomask;
a second coating step of coating a second photoresist layer to a second thickness on the first photoresist layer;
a second exposure step of partially exposing the second photoresist layer through a second photomask;
a developing step of developing the exposed first photoresist layer and second photoresist layer to expose the substrate and forming a mold having an opening having an external shape of the metal component;
Metal is deposited inside the opening by immersing the mold in an electroforming solution and applying electricity to perform an electroforming process, or by immersing the mold in an electroless plating solution and performing an electroless plating process. a molding step of depositing and molding a metal body of a desired thickness along the mold;
a thickness adjustment step of adjusting the thickness of the metal body to the predetermined thickness;
The method for manufacturing a metal component according to any one of claims 1 to 4 , comprising a removing step of removing the photoresist layer and the substrate to obtain a metal component.