JP7307614B2 - Surface treatment method and surface treatment apparatus - Google Patents

Description

TECHNICAL FIELD The present invention relates to a surface treatment method and a surface treatment apparatus for removing deposits on an object by laser irradiation, and is particularly suitable for performing surface treatment on objects with complex shapes and objects with large areas. The present invention relates to a surface treatment method and a surface treatment apparatus.

For example, on the surface of steel structures such as bridges, various coatings such as coating, pavement, lining, and resin sheets are formed according to their uses and functions. Such coatings are often exposed to the weather, and over time, they deteriorate or become contaminated with oxides, dirt, and the like. Even if the paint is applied without properly removing the dirt and rust attached to the iron part, the paint will not adhere firmly, so it will peel off immediately, and the original durability cannot be demonstrated. For this reason, it is necessary to improve adhesion by performing surface preparation work to remove dirt and rust without fail, and by roughening the surface to increase the surface area. Therefore, structures and the like having such coatings are periodically subjected to removal work such as cleaning and peeling (including surface treatment work), and if necessary, the coating is repainted or re-covered.

In the past, coating stripping was performed using coating stripping agents and shot blasting, but not only was the work environment and work efficiency poor, but there were also problems with the collection and disposal of a large amount of removed material, so laser irradiation has been proposed as a paint film stripping treatment.

For example, as a coating film removing method capable of removing a coating film without using chemicals, and a laser processing apparatus suitable for removing the coating film, a laser beam is condensed or diverged to irradiate the surface of the object to be processed. a lens, a lens support mechanism for supporting the lens and capable of adjusting the height from the surface of the object to be processed to the lens, and a gas ejection means for blowing gas onto the laser beam irradiated portion of the surface of the object to be processed, A laser processing apparatus has been proposed in which an increase in the surface temperature of an object to be processed can be suppressed by spraying (see, for example, Patent Document 1).

In Patent Document 1, in such a laser processing apparatus, a laser irradiation head is attached to the tip of a manipulator arm, the manipulator arm is controlled by a manipulator body, and the laser irradiation head is moved to a desired position on the surface of the object to be processed. It is stated that it will support

In addition, as a laser irradiation device capable of efficiently removing the coating film on the surface of the structure and sucking and collecting the removed material, the laser head is composed of an optical system for irradiating the laser light, and from the irradiation point of the laser light. The optical system is composed of a suction means for sucking the resulting removed matter and an attachment configured to be able to abut on the surface of the structure, and the optical system has an optical axis on a surface substantially perpendicular to the optical axis of the laser beam. A laser coating film removing apparatus has been proposed that operates so as to scan an irradiation point of a laser beam so as to draw a trajectory of a first circle with a center radius (see, for example, Patent Document 2).

JP-A-10-309899 Japanese Patent No. 5574354

In the coating film stripping treatment by laser irradiation, the coating film on the surface of the object to be treated can be removed by laser ablation without using chemicals.

However, in the laser irradiation apparatus disclosed in Patent Document 1, the laser condenser lens is fixed at a predetermined focal length, and in order to maintain the height, the laser irradiation head is kept in contact with the surface of the object to be processed. A manipulator arm moves the laser irradiation head to a desired position on the surface of the object to be processed.

Therefore, with the technique disclosed in Patent Document 1, it is extremely difficult to work in a complicated shape or in a narrow space. There was a problem.

Further, in the technique disclosed in Patent Document 2, laser irradiation from a laser irradiation device having a portable laser head for converging laser light output from a laser oscillator and irradiating the surface of the structure with laser light is applied to the structure. It removes the coating film on the surface, and since the operator carries out the peeling process with the laser irradiation device, it is difficult to keep the focal distance of the object to be processed constant. It was necessary to install an attachment at the tip of the laser and perform the peeling treatment by irradiating the laser while the attachment is in contact with the object to be treated.

Therefore, in view of the conventional circumstances as described above, an object of the present invention is to provide a substrate that can reliably and efficiently perform surface treatment by laser irradiation on objects with complex shapes and objects with large areas. An object of the present invention is to provide a processing method and a substrate processing apparatus.

Another object of the present invention is to automate the surface preparation work by laser irradiation, improve the working environment, and secure the safety and health of workers.

Other objects of the present invention and specific advantages obtained by the present invention will become clearer from the description of the embodiments described below.

In the present invention, a robot is provided with a laser irradiating device to perform a surface treatment operation for removing deposits on an object by irradiating the laser.

Further, in the present invention, a base treatment operation is performed to remove deposits on an object by laser irradiation in which the irradiation conditions of the laser light are appropriately set according to the surface shape of the region to be processed, the quality of the base treatment, and the like.

Further, in the present invention, shape-following control is performed so that the optical axis of the irradiated laser light coincides with the normal direction of the surface position of the object to be treated. Perform surface preparation work to remove

In the present invention, the shape following control corrects the ground processing work trajectory of the robot based on the three-dimensional shape information of the object obtained from the measurement results of a shape measuring device that measures the three-dimensional shape of the object. A predetermined focal length and laser irradiation angle are appropriately controlled by moving the laser irradiation device with a robot following the surface shape of an object of arbitrary shape.

Furthermore, according to the present invention, the generation of black scale is prevented by applying a coating treatment to the area of the object that has been subjected to the base treatment operation by laser irradiation.

That is, the present invention relates to a surface treatment method for removing deposits on an object by laser irradiation, in which a shape measuring device for measuring the three-dimensional shape of the object and a laser irradiation device for irradiating the object with a laser beam are used as manipulators. and move it within the work area including the processing target area of the object, and based on the three-dimensional shape information of the object obtained from the measurement result by the shape measuring device, the laser irradiation device in the processing target area of the object The normal direction at the laser irradiation position and the distance to the laser irradiation position are obtained, and based on the calculation result by the shape processing device, the operation of the laser irradiation device and the manipulator is controlled, and the laser light emitted by the laser irradiation device Shape following control is performed so that the optical axis of is aligned with the normal direction of the surface position of the target, and the laser irradiation conditions are appropriately adjusted according to the required performance for the surface texture of the target before and after processing. It is characterized in that it is set and implemented by irradiating a pulsed laser beam from the laser irradiation device .

As a more specific condition, in the surface treatment method according to the present invention, a pulsed laser beam is irradiated by a laser irradiation device, the laser irradiation position is moved in the X-axis direction or the Y-axis direction for each pulse, and the pulsed laser beam is irradiated. D is the spot diameter at the irradiation point, and _ΔX is the feed amount in the X-axis direction per pulse. The feed rate α _y =(ΔX/D)×100=(ΔY/D)×100, where ΔY is the feed amount in the direction, can be set to 35% or less.

Further, in the surface treatment method according to the present invention, a pulsed laser beam is two-dimensionally scanned by a laser irradiation device to irradiate a rectangular irradiation range of a predetermined area, and then the manipulator is moved by the irradiation range portion. Subsequently, laser irradiation by similar two-dimensional scanning can be repeated.

Further, in the surface treatment method according to the present invention, the pulsed laser beam is one-dimensionally scanned by the laser irradiation device, thereby repeatedly irradiating the laser beam in a line of a predetermined length, and at the same time, the laser irradiation device is moved by the manipulator. A linear laser can be one that moves continuously in the vertical direction.

Further, in the surface treatment method according to the present invention, the manipulator is a robot arm, which automatically controls a series of surface treatment operations for removing deposits on the processing target area of the object by moving the laser irradiation position of the laser irradiation device. shall be allowed.

In the base treatment method according to the present invention, the area of the object that has been subjected to the base treatment by laser irradiation can be further coated with a coating agent. Furthermore, the manipulator holds a spray or nozzle for applying a coating agent such as a coating agent, a pretreatment agent, or an adhesive agent for resin bonding, and applies it to the area where the base treatment work by laser irradiation has been completed on the object. A coating treatment with an agent may be applied.

In the surface treatment method according to the present invention, a spray or nozzle for ejecting a gas for blocking oxygen in the air is further provided in accordance with the laser irradiation in order to prevent the generation of rust on the target material after the surface treatment. It is possible to hold the object by the manipulator and apply a gas blowing process to the area where the base treatment work by laser irradiation has been completed on the object.

Further, the present invention is a substrate processing apparatus for removing deposits on an object by laser irradiation, comprising: a laser irradiation device; A manipulator that moves the device, a shape measuring device that measures the three-dimensional shape of the object, and laser irradiation in the processing target area of the object based on the three-dimensional shape information of the object obtained from the measurement results of the shape measuring device. A shape processing device that performs arithmetic processing to determine the normal direction at the laser irradiation position by the device and the distance to the laser irradiation position, and a control device that controls the operation of the laser irradiation device and the manipulator based on the calculation results of the shape processing device. And, the control device performs shape following control so that the optical axis of the laser light irradiated by the laser irradiation device is aligned with the normal direction at the surface position of the object, and the laser irradiation device is the object The laser irradiation conditions are set according to the performance required for the surface texture before treatment and the surface texture after treatment, and pulsed laser light is applied.

In the surface treatment apparatus according to the present invention, the laser irradiation apparatus irradiates a pulsed laser beam with the laser irradiation conditions set according to the performance required for the surface texture of the object before processing and the surface texture after processing. can do.

In the substrate processing apparatus according to the present invention, where D is the spot diameter at the irradiation point of the pulsed laser beam, and ΔX is the feed amount in the X-axis direction per pulse, the X-direction feed rate α _x =(ΔX/D)× 100 = (ΔY/D) × 100 and the feed rate α _y where ΔY is the feed amount in the Y-axis direction = (ΔX/D) × 100 = (ΔY/D) × 100 is controlled to be 35% or less. It can be controlled by the device.

A substrate processing apparatus according to the present invention includes a two-dimensional scanning means for two-dimensionally scanning a pulsed laser beam emitted from a laser irradiation device and irradiating a rectangular irradiation range of a predetermined area on an object, and a manipulator. Each time the laser irradiation device is moved by the irradiation range, the laser irradiation device can repeatedly irradiate the irradiation range.

A substrate processing apparatus according to the present invention includes a one-dimensional scanning means for irradiating a line of a predetermined length by one-dimensionally scanning a pulsed laser beam emitted from a laser irradiation device, and a laser irradiation device operated by a manipulator. While moving continuously in the direction perpendicular to the linear laser, laser irradiation can be performed repeatedly in a linear form of a predetermined length with a laser irradiation device.

In the surface treatment apparatus according to the present invention, the manipulator is a robot arm, and the control device automatically performs a series of surface treatment operations for removing deposits on the processing target area of the object by moving the laser irradiation position of the laser irradiation device. can be controlled.

The surface treatment apparatus according to the present invention further includes a coating device such as a spray nozzle for coating an object with a coating agent such as a coating agent, a pretreatment agent, or an adhesive for resin bonding, and the coating device is held by a manipulator. Alternatively, the control device may control the coating device so as to apply a coating agent to a region of the object that has been subjected to the base treatment operation by laser irradiation.

The surface treatment apparatus according to the present invention further includes a spray or nozzle for ejecting a gas for blocking oxygen in the air in accordance with the laser irradiation in order to prevent the generation of rust on the target material after the surface treatment. is provided with a spraying device, the spraying device is held by a manipulator, and the control device controls to perform gas spraying treatment on the area where the surface treatment work by laser irradiation has been completed on the object. .

According to the present invention, it is possible to perform a surface treatment operation for removing deposits on an object by laser irradiation in which the irradiation conditions of the laser beam are appropriately set according to the surface shape of the processing target area and the quality of the surface treatment. By having a robot hold the device and perform the surface treatment work that removes deposits on the target by laser irradiation, the surface treatment work by laser irradiation is automated, improving the working environment and improving the safety and health of the worker. can be ensured.

Further, in the present invention, shape follow-up control is performed so that the optical axis of the irradiated laser light coincides with the normal direction of the surface position of the object, and deposits on the object are removed by laser irradiation from the normal direction. By performing the surface treatment work, it is possible to reliably and efficiently perform surface treatment by laser irradiation on an object having a complicated shape or an object having a large area shape.

In the present invention, the shape following control corrects the ground processing work trajectory of the robot based on the three-dimensional shape information of the object obtained from the measurement results of a shape measuring device that measures the three-dimensional shape of the object. A predetermined focal length and laser irradiation angle can be appropriately controlled by moving the laser irradiation device with a robot following the surface shape of an object having an arbitrary shape.

Furthermore, in the present invention, by applying a coating agent such as a primer or paint to the area of the object that has undergone the base treatment work by laser irradiation, it is possible to prevent the occurrence of black scale. In addition, the object can be reinforced by applying a coating agent such as an adhesive for resin bonding to the object and bonding the object with the resin.

1 is a block diagram showing a configuration example of a laser surface treatment apparatus to which the present invention is applied; FIG. FIG. 2 is a schematic diagram for explaining irradiation conditions of laser light in a laser surface treatment apparatus; FIG. 3 is a schematic diagram for explaining the definition of the laser light feed rate in the laser surface treatment apparatus. FIG. 2 is a perspective view schematically showing the structure of a two-axis galvano-mirror mechanism provided in the laser surface treatment apparatus; FIG. 4A is a schematic diagram showing the feeding state of the irradiation position of the laser light in the laser substrate processing apparatus having the two-axis galvano-mirror mechanism, wherein (A) is the feeding state in the case of an object that is long in the X-axis direction by the galvano-mirror mechanism. , (B) shows the feeding state of an object that is long in the Y-axis direction by the galvano-mirror mechanism, (D) shows the feeding state when the base treatment is performed by sequentially moving it with the manipulator. This shows the feeding state when the base treatment is performed by moving the . 1 is a block diagram showing a configuration example of a laser surface treatment apparatus including a coating device that applies a coating agent to an object after surface treatment work; FIG. 4 is a flow chart showing the procedure of the surface treatment work and the coating treatment performed by this laser surface treatment apparatus.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Note that common constituent elements will be described by attaching common reference numerals in the drawings. Further, the present invention is not limited to the following examples, and can be arbitrarily modified without departing from the gist of the present invention.

The present invention is a laser surface treatment apparatus 100 that performs a surface treatment operation of removing deposits on an object 1 by laser irradiation by having a robot manipulator 20 hold a laser irradiation apparatus 10 configured as shown in the block diagram of FIG. 1, for example. Applies to

This laser surface treatment apparatus 100 includes a laser irradiation apparatus 10, a manipulator 20, a shape measuring apparatus 30, a shape processing apparatus 40, a control device 50, and the like.

The laser irradiation device 10 comprises a laser oscillation section 11 and a laser head section 13 connected to the laser oscillation section 11 via an optical fiber 12 . The operation of this laser irradiation device 10 is controlled by an integrated control unit 51 provided in a control device 50 , a laser beam is generated by a laser oscillation unit 11 and emitted from a laser head unit 13 to irradiate an object 1 . .

The robot manipulator 20 has a multi-joint robot arm 21, and a shape measuring device 30 is attached to the distal end portion 21A of the robot arm 21 together with the laser head portion 13 of the laser irradiation device 10 described above.

This robot manipulator 20 is controlled by a robot control unit 53 provided in a control device 50 to freely move the distal end portion 21A of the robot arm 21 within a predetermined working range, and to move forward at a substantial solid angle. It can be turned in any direction.

That is, the laser head portion 13 of the laser irradiation device 10 attached to the distal end portion 21A of the robot arm 21 can be positioned at an arbitrary position within the working range of the robot manipulator 20 and at an arbitrary solid angle in front of the robot manipulator 20. A laser beam can be radiated in any direction.

Further, the shape measuring device 30 attached to the distal end portion 21A of the robot arm 21 together with the laser head portion 13 of the laser irradiation device 10 irradiates the object 1 with laser light from the laser head portion 13 of the laser irradiation device 10. Measure the three-dimensional shape of the surface of

The shape measuring device 30 is composed of a stereo imaging device, a three-dimensional distance measuring device, or the like, measures the three-dimensional shape of the surface of the object 1, and supplies the measurement results to the shape processing device 40. .

In the shape processing device 40, based on the three-dimensional shape information of the surface of the object 1 obtained from the measurement result by the shape measuring device 30, the normal line at the laser irradiation position by the laser irradiation device 10 in the processing target area of the object 1 Arithmetic processing is performed to obtain the direction and the distance to the laser irradiation position. The information on the normal direction at the laser irradiation position by the laser irradiation device 10 in the processing target area of the object 1 obtained by the shape processing device 40 and the distance to the laser irradiation position is obtained by a shape tracing device provided in the control device 50. It is supplied to the control unit 52 .

The control device 50 includes an integrated control unit 51, a shape following control unit 52, and a robot control unit 53. The integrated control unit 51 controls the operation of the shape following control unit 52 and the robot control unit 53, By controlling the operation, a series of base treatment operations by the laser base treatment apparatus 100 are automatically controlled.

That is, the integrated control unit 51 in the control device 50 is configured so that the laser head unit 13 of the laser irradiation device 10 attached to the tip portion 21A of the robot arm 21 passes through the preset surface treatment work trajectory by the robot manipulator 20. In addition, it controls the robot control unit 53 and also controls the operation of the laser irradiation device 10 to automatically control a series of base treatment operations by the laser base treatment device 100 .

The integrated control unit 51 in the control device 50 automatically controls the series of surface treatment operations by the laser surface treatment apparatus 100, and the laser irradiation in the processing target area of the object 1 obtained by the shape processing apparatus 40 is performed. Based on the information of the normal direction at the laser irradiation position by the device 10 and the distance to the laser irradiation position, the shape following control unit generates correction control information for correcting the initially set base treatment work trajectory by the robot manipulator 20. 52.

The shape following control unit 52 generates correction control information for correcting the initially set base treatment work trajectory by the robot manipulator 20 according to the control by the integrated control unit 51, and supplies it to the robot control unit 53, whereby the laser irradiation device Shape following control is performed so that the optical axis of the laser beam irradiated by 10 coincides with the normal direction of the surface position of the object 1 .

Here, the laser beam generated by the laser oscillation unit 11 of the laser irradiation device 10 has the power necessary to remove adherents (for example, a paint film applied to the surface) of the object 1 by laser ablation. If so, either continuous light or pulsed light may be used, and the irradiation conditions of the laser light are determined by the integrated control unit 51 of the control device 50 according to the surface shape of the processing target area of the object 1 and the quality of the surface treatment. can be performed to remove deposits on the object 1 by laser irradiation with appropriately set .

That is, the laser surface treatment apparatus 100 shown in FIG. 1 is a robot manipulator that holds the laser irradiation apparatus 10 and the laser irradiation apparatus 10 and moves the laser irradiation apparatus 10 within a work area including the processing target area of the object 1. 20, a shape measuring device 30 for measuring the three-dimensional shape of the object 1, and based on the three-dimensional shape information of the object 1 obtained from the measurement result by the shape measuring device 30, the laser in the processing target area of the object 1 A shape processing device 40 that performs arithmetic processing to obtain the normal direction at the laser irradiation position by the irradiation device 10 and the distance to the laser irradiation position, and the laser irradiation device 10 and the robot manipulator 20 based on the calculation result by the shape processing device 40. The control device 50 controls the shape following such that the optical axis of the laser light emitted by the laser irradiation device 10 coincides with the normal direction of the surface position of the object 10. conduct.

In the laser surface treatment apparatus 100 having such a configuration, the robot manipulator 20 holds the shape measuring device 30 for measuring the three-dimensional shape of the object 1 and the laser irradiation device 10 for irradiating the object 1 with a laser. 1, and based on the three-dimensional shape information of the object 1 obtained from the measurement result by the shape measuring device 30, the laser irradiation device 10 in the processing target region of the object 1. The normal direction at the irradiation position and the distance to the laser irradiation position are obtained, and based on the calculation result by the shape processing device 40, the operations of the laser irradiation device 10 and the robot manipulator 20 are controlled, and the laser irradiation device 10 is irradiated. It is possible to carry out a base treatment method in which shape follow-up control is performed so that the optical axis of the laser beam is aligned with the normal direction of the surface position of the object 1 .

In this laser surface treatment apparatus 100, the laser irradiation apparatus 10 is held by the robot manipulator 20, and the surface treatment work of removing the deposits on the object 1 is performed by laser irradiation, thereby automating the surface treatment work by laser irradiation. , it can improve the working environment and ensure the safety and health of workers.

Further, in this laser surface treatment apparatus 100, shape follow-up control is performed so that the optical axis of the irradiated laser light coincides with the normal direction of the surface position of the object 1, and the object 1 is irradiated with laser light from the normal direction. By performing the base treatment work for removing the deposits, it is possible to reliably and efficiently surface-treat the object 1 having a complicated shape or a large-area shape by irradiating the laser.

The shape following control in this laser surface treatment apparatus 100 is based on the three-dimensional shape information of the object 1 obtained from the measurement result by the shape measuring device 30 that measures the three-dimensional shape of the object 1, and the surface treatment of the robot manipulator 20. By correcting the work trajectory and moving the laser irradiation device 10 by the robot manipulator 20 following the surface shape of an object of arbitrary shape, the predetermined focal length and laser irradiation angle can be appropriately controlled.

Here, in the laser surface treatment apparatus 100, when performing the surface treatment work by irradiating the object 1 with a pulsed laser beam from the laser irradiation device 10, the feed pitch in the X-axis direction and the Y-axis direction per pulse ( By appropriately setting the feed rates α _x and α _y ), the quality of the underlying treatment can be controlled, and the laser irradiation conditions can be optimized as follows.

That is, by appropriately setting the feed pitches (feed rates α _x and α _y ) in the X-axis direction and Y-axis direction per pulse, the surface treatment quality can be controlled.

FIG. 2 shows the result of testing the feed rate α of the pulsed laser light irradiated to the object 1 from the laser head portion 13 of the laser irradiation device 10 and the rust removal performance, which is one of the surface treatment qualities. By setting α _x and α _y to 35% or less, good conditions could be obtained although the quality was slightly lowered. If the feed rate α is 25% or less, even better conditions can be obtained.

Here, as shown in FIG. 3, the feed rates α _x and α _y are defined as follows: D is the spot diameter at the irradiation point O of the pulsed laser beam irradiated from the laser head 13 of the laser irradiation device 10 to the object 1. , the X-direction feed rate α _x , where ΔX is the feed amount in the X-axis direction per pulse, is
_αx = (ΔX/D) x 100 = (ΔY/D) x 100
Similarly, the Y-direction feed rate α _y , where ΔY is the feed amount in the Y-axis direction per pulse, is
_αy = (ΔX/D) x 100 = (ΔY/D) x 100
is.

That is, in the laser surface treatment apparatus 100, the integrated control unit 51 optimizes the feed rate αx in the X-axis direction and the feed rate _αy in the Y-axis direction of laser irradiation according to the condition of the object 1 and the quality of the surface treatment. The above condition α _x = (ΔX/D) × 100 = (ΔY/D) × 100 ≤ 35%
_αy = (ΔX/D) x 100 = (ΔY/D) x 100 ≤ 35%
, and the robot control unit 53 controls the trajectory of the base treatment work by the robot manipulator 20 so that the base treatment work is performed at the optimum values of the set feed rates α _x and α _y , and the laser The laser oscillation device 11 of the irradiation device 10 emits a pulsed laser beam at predetermined timings corresponding to the optimum values of the set feed rates α _x and α _y to irradiate the object 1 from the laser head section 13 . control.

Here, as specifications of the laser beam used in the present invention, a pulsed laser beam having a laser output of 100 to 500 W and a wavelength of 1060 to 1100 nm is desirable. Desirably, the laser pulse repetition frequency is 50 to 150 kHz, the laser spot diameter D is 50 to 200 μm, and the laser energy density is 10 to 100 J/cm ² .

The test results shown in FIG. 2, in which the irradiation conditions for the laser light were found, will be described.
FIG. 2 shows the results of examining the ability to remove millscale from steel materials by laser irradiation.

The object 1 is SS400 (JIS G 3101:2010 rolled steel for general structure), and its dimensions are length 50 mm×width 50 mm×thickness 6 mm.

As the laser irradiation device, one that emits a pulsed laser beam within the specification range described above was used.

FIG. 2 shows the target when the irradiation range of 30 mm × 30 mm set on the surface of the object 1 is irradiated by a combination of changing the X-axis direction feed rate α _x and the Y-axis direction feed rate α _y as laser irradiation conditions. This is the result of confirming the surface properties of the material by photographing with a microscope at a magnification of 100 times and visual observation.

Here, as the surface condition, the best range indicated by ○ indicates that the black scale is almost completely removed, the good range indicated by △ indicates that the black scale is partially remaining, and the black scale remains in a considerable part. It was sorted out as a defective range indicated by x.

From the results shown in FIG. 2, it was found that the scale was removed satisfactorily when the feed rate was 35% or less.

Here, it is not enough to simply reduce the feed rate, and the smaller the feed rate, the longer the laser irradiation time and the lower the work efficiency. Therefore, it is important to set it as large as possible within the range in which the surface quality (property) satisfies the required performance.

Here, as the object 1, a C-shaped steel like the object shown in FIG. Examples include, but are not limited to, shaped steel.

In the case of long target materials such as these, since the length of the robot arm 21 cannot reach them, it is necessary to perform surface treatment while moving the robot manipulator 20 in the longitudinal direction of the target materials. In such a case, the robot manipulator 20 is placed on a rack-and-pinion or ball-bearing slider to control the position of the robot manipulator 20 in the longitudinal direction. Although not shown, the integrated control unit 51 performs control.

In addition, the robot control unit 12 sets in advance an operation trajectory of the base treatment work by the robot manipulator 20 before the base treatment work.

Then, under the control of the robot control unit 12, the robot manipulator 20 is operated based on a preset initial trajectory, and at that time, the shape measurement device 30 measures the three-dimensional shape of the region to be processed on the surface of the object 1. The measurement results are sent to the shape processing device 40 .

Based on the three-dimensional shape information of the object 1 obtained from the measurement result by the shape measuring device 30, the shape processing device 40 determines the normal direction and Find the distance to the laser irradiation position.

Then, the shape processing device 40 obtains the normal direction at the laser irradiation position by the laser irradiation device 10 and the distance to the laser irradiation position for each point on the trajectory of the surface treatment work, and supplies the distance to the laser irradiation position to the shape tracing control unit 52. do.

The shape following control unit 52 is controlled by the integrated control unit 51 based on the information on the normal direction at the laser irradiation position by the laser irradiation device 10 supplied from the shape processing device 40 and the distance to the laser irradiation position. By generating correction control information for correcting the initially set base treatment work trajectory by the robot manipulator 20 and supplying it to the robot control unit 53, the optical axis of the laser light irradiated by the laser irradiation device 10 is adjusted to the surface of the object 1. Shape following control is performed so as to match the normal direction at the position.

In the laser surface treatment apparatus 100, by performing such shape-following control, the fixed-focus laser head unit 13 irradiates the surface of the object 1 with a pulsed laser beam of a preset laser power from the normal direction. Therefore, the base treatment work can be performed appropriately and reliably.

Here, in the laser surface treatment apparatus 100, as shown in FIG. 4, the laser head section 13 of the laser irradiation apparatus 10 includes two motors 131X and 131Y and two mirrors 132X and 132Y. A mechanism 130 may be provided.

The two-axis galvanomirror mechanism 130 can scan the laser light L supplied from the laser oscillator 11 through the optical fiber 12 by independently changing the reflection angle of the laser in the X-axis direction and the Y-axis direction. It is possible.

That is, the mirror 132X is rotated around the Z-axis by the motor 131X, thereby scanning the object 1 with the laser light L in the X-axis direction.

Also, the mirror 132Y is rotated around the X-axis by the motor 131Y, thereby scanning the object 1 with the laser light L in the Y-axis direction.

The two mirrors 132X and 132Y in the two-axis galvanomirror mechanism 130 can be replaced with polygon mirrors.

That is, in a state where the position of the laser head portion 13 of the laser irradiation device 10 is fixed, irradiation can be performed within a predetermined range.

In scanning by a galvanometer mirror or a polygon mirror, the optical axis coincides with the normal direction only at one point, and the focal position of the laser beam is positioned in an arc. , a telecentric f-.theta. lens (or a telecentric optical system having optical characteristics equivalent to the telecentric f-.theta. In other words, in the laser irradiation by scanning the carbonometer mirror, the focal length changes to the object 1, so it is necessary to restrict the laser irradiation range so that the laser beam irradiation position is scanned within a range in which the decrease in laser processing capacity is small. be.

Then, a laser irradiation method by such a biaxial galvanomirror mechanism 130 will be described with reference to FIG. 5(A).

FIG. 5A shows the laser irradiation by the galvanomirrors 132X and 132Y of the biaxial galvanomirror mechanism 130 when scanning in the Y-axis direction and then in the X-axis direction within the designated rectangular laser irradiation range _ARA . indicates a situation where

At this time, the conditions for the optimum value of the feed rate α _y in the Y-axis direction of laser irradiation α _y = (ΔY/D) × 100 ≤ 35%
The galvanomirror 132Y in the laser head section 13 of the laser irradiation device 10 is operated so as to satisfy

Similarly, the condition for the optimum value of the feed rate α _x in the X-axis direction of laser irradiation α _x = (ΔX/D) × 100 ≤ 35%
The galvanomirror 132X in the laser head section 13 is operated so as to satisfy the conditions.

FIG. 5B shows the state of laser irradiation by the galvanometer mirrors 132X and 132Y when the specified rectangular laser irradiation range _ARB is irradiated in the X direction and then in the Y direction.

That is, the condition for the optimum value of the feed rate α _x in the X-axis direction of laser irradiation α _x = (ΔX/D) × 100 ≤ 35%
The galvanomirror 132X in the laser head section 13 of the laser irradiation device 10 is operated so as to satisfy

Similarly, the condition for the optimum value of the laser irradiation feed rate α _y in the Y-axis direction α _y = (ΔY/D) × 100 ≤ 35%
The galvanomirror 132Y in the laser head section 13 is operated so as to satisfy the conditions.

In this laser surface treatment apparatus 100, the trajectory control of the robot manipulator 20 by the robot control unit 53 and the scanning control of the laser beam by the two-axis galvanomirror mechanism 130 are combined, and the laser head unit 13 of the laser irradiation device 10 is applied to the object. A laser that irradiates the surface of the object 1 can be scanned.

Therefore, the cooperation of the feed operation by the robot manipulator 20 in accordance with the operation of the galvanomirror mechanism 130 will be described with reference to FIGS. 5(C) and 5(D).

Next, a laser surface treatment method using the robot manipulator 20 will be described with reference to FIGS. 5(C) and 5(D).

Two working methods are described here for the laser surface treatment of the sides of a C-section steel such as the object 1 shown in FIG.

In the first working method, as shown in FIG. 5C, the scanning range of the irradiation position of the laser light by the biaxial galvanomirror mechanism 130, that is, the size of the laser irradiation range is set to, for example, 50 mm×50 mm. With the basic area of the square, divide the side of the C-shaped steel into n divisions, set the upper left end point to (1, 1), set the point advanced 50 mm in the X axis direction to (1, 2), and proceed sequentially to the right Let the end of the direction be (1, n).

Next, the point 50 mm downward in the Y direction is set to (2, n), and the point 50 mm to the left in the X direction is set to (2, n-1). (2, 1).

Thereafter, in the same manner, this operation is performed up to the final point (m, n) on the lower right.

As a method of moving the robot manipulator 20, based on the above points, start from the upper left point (1, 1), scan the hatched irradiation range AR ₁₁ with the two-axis galvanomirror mechanism 130, and perform surface treatment. The laser head 13 is moved to the (1, 2) point of , and the base treatment is performed in the same manner.

Here, the number of divisions m and n is 150 mm in width, 100 mm in height, and 6000 mm in length. becomes. Similarly, in an H-shaped steel with a width of 200 mm, a height of 200 mm, and a length of 6000 mm, the sides are rectangular with a length of 200 mm and a width of 6000 mm, so m=4 and n=120.

Since the horizontal length of these objects 1 is as long as 6000 mm, they cannot be reached by the robot hand 21 of the robot manipulator 20 alone. Carry out similar work.

A second working method is shown in FIG. 5(D).

In the first working method shown in FIG. 5(C), the laser irradiation range, that is, the scanning range of the laser light irradiation position by the galvanomirror mechanism 130 is a rectangle. In the working method, a case where the laser irradiation range is linear will be described.

In the second working method, the laser irradiation range, that is, the scanning range of the irradiation position of the laser light by the galvanomirror mechanism 130, is set to, for example, a vertical line of 1 mm in the X-axis direction and 50 mm in the Y-axis direction, and all movements in the X-axis direction are performed by robots. This is a method of moving with the manipulator 20 .

That is, every time the robot manipulator 20 moves the laser head 13 in the X-axis direction (right direction) by 1 mm from the upper left corner point (1, 1), the galvanomirror mechanism 130 scans the irradiation position of the laser beam by 50 mm in the Y-axis direction. Then, the surface treatment is repeatedly performed in a vertical line, and when the point (1, n) is reached, it moves 50 mm downward in the Y-axis direction, and moves from the point (2, n) to the point (2, 1) on the X-axis. Direction (left direction) Each time the robot manipulator 20 moves leftward by 1 mm, the laser beam irradiation position is scanned 50 mm in the Y-axis direction by the galvano-mirror mechanism 130, and base treatment is repeatedly performed in a vertical line. In this case also, if the horizontal length is 6000 mm, the robot hand 21 of the robot manipulator 20 alone cannot reach, so it is necessary to move the robot manipulator 20 itself in the X-axis direction in accordance with the movement of the robot hand. .

Moreover, the laser surface treatment apparatus according to the present invention can further include a coating device 60 that applies a coating agent to the object 1, like the laser surface treatment apparatus 100A shown in FIG.

The coating device 60 includes a coating agent supply device 61 and a spray nozzle 63 to which a coating agent such as a primer or paint is supplied from the coating agent supply device 61 through a supply pipe 62 . It is installed at the tip portion 21A.

This laser surface treatment apparatus 100A is a laser surface treatment apparatus 100 provided with a coating device 60. Components other than the coating device 60 are the same as those of the laser surface treatment apparatus 100, and are therefore denoted by the same reference numerals. Therefore, a detailed description thereof will be omitted.

In this laser surface treatment apparatus 100A, the coating device 60 is controlled by the integrated control unit 51 of the control device 50 to apply a coating agent to the object 1 after the surface treatment operation. That is, in the laser base treatment apparatus 100A, the controller 50 controls the operations of the laser irradiation device 10, the robot manipulator 20, and the coating device 60, and performs the base treatment work and the coating process according to the procedure shown in the flowchart of FIG. to run.

That is, the shape measuring device 30 measures the three-dimensional shape of the surface of the object 1, the shape processing device 40 acquires three-dimensional shape information (ST1), and based on the acquired three-dimensional shape information of the object 1, Then, while performing shape-following control so that the optical axis of the laser beam irradiated by the laser irradiation device 10 coincides with the normal direction of the surface position of the object 1, the base treatment work by laser irradiation is executed (ST2). .

It is confirmed whether or not the base treatment work is completed for the processing target area of the object 1 (ST3), and when the base treatment work is completed, the laser irradiation by the laser irradiation device 10 is stopped, and the coating agent is supplied from the coating device 60. Start the device 61 (ST4).

Then, the spray nozzle 63 installed at the tip portion 21A of the robot arm 21 sprays the target area of the target object 1 on which the base treatment work has been completed, while performing shape-following control based on the three-dimensional shape information of the target object. A coating process is performed to spray a coating agent and apply it to the processing target region of the object (ST5).

It is confirmed whether or not the coating process has been completed for all the processing target areas of the object 1 (ST6), and when the coating process is completed, the coating agent supply device 61 of the coating device 60 is stopped, and a series of controls is performed. finish.

In this laser surface treatment apparatus 100A, the surface treatment work trajectory of the robot manipulator 20 is corrected based on the three-dimensional shape information of the object 1 obtained from the measurement result by the shape measuring device 30, thereby making the object 1 of any shape. By moving the laser irradiation device 10 by the robot manipulator 20 following the surface shape of the object, while appropriately controlling the predetermined focal length and laser irradiation angle, the surface treatment work by laser irradiation can be performed efficiently. For 1, it is possible to automatically perform a coating process that applies a coating agent such as a primer or paint to the area where the base treatment work by laser irradiation has been completed. It is possible to prevent the occurrence of rust again and the deterioration of the activated surface properties.

Here, the timing of switching from the laser surface treatment to the coating treatment in the laser surface treatment apparatus 100A is determined as follows according to the surface quality requirements of the final product.

Generally, the surface of a material that has undergone surface treatment is not only free of contaminants on the surface, but also in a chemically activated state in which functional groups appear on the surface. may be used to perform the following processing:

In such a case, if the surface is left untreated for a long period of time, rust may occur again on the surface and the performance of the next treatment may be significantly reduced. The processing must be executed within a predetermined time (processing switching time) until the start.

Therefore, in the laser surface treatment operation described in FIG. 5C, if it is necessary to switch the processing within a very short time, the laser surface treatment of the area AR ₁₁ from the upper left point (1, 1) is completed, the coating process of the area _AR11 from the point (1,1) is performed immediately. When this is completed, the series of operations is then finalized such that immediately after the laser surface treatment of the area _AR12 from the point (1,2) is completed, the coating treatment _of the area AR12 from the point (1,2) is performed. Repeat until point (m,n). Needless to say, the size of the irradiation range must be set so that the laser scanning time is within the process switching time.

Next, in the laser base treatment operation described in FIG. 5D, the robot manipulator 20 follows the surface shape of the object 1 having an arbitrary shape, and the laser head 13 moves the laser head 13 from the point (1, 1) to the area AR _1. is moved in the X direction, the laser base treatment is performed during the treatment time. Immediately after this is completed, the coating process is again performed for the area _AR1 from the point (1,1). This series of operations is repeated until the final point (m, n).

As a matter of course, if the processing switching time can be long, the subsequent coating processing operation can be performed after completing the laser surface treatment of the entire processing target surface of the object 1 . This is more efficient with less switching of processes.

Also, here, the case where the subsequent process is the coating process has been described, but the present invention is not limited to this. be. Furthermore, in order to prevent the generation of rust on the target material after surface treatment, it is conceivable to irradiate the laser while injecting a gas (nitrogen gas, etc.) to block oxygen in the air in conjunction with the laser irradiation. .

That is, the laser surface treatment apparatus according to the present invention further includes a spray that jets a gas for blocking oxygen in the air in accordance with the laser irradiation in order to prevent the generation of rust on the target material after the surface treatment. Alternatively, a spraying device (not shown) such as a nozzle is provided, the spraying device is held by a manipulator, and the control device controls the gas to be sprayed onto an area of the object on which the base treatment work by laser irradiation has been completed. can be

1 Object, 10 Laser Irradiator, 11 Laser Oscillator, 12 Optical Fiber, 13 Laser Head, 20 Robot Manipulator, 21 Robot Arm, 21A Tip, 30 Shape Measuring Device, 40 Shape Processing Device, 50 Control Device, 51 Supervisor control unit 52 shape following control unit 53 robot control unit 60 coating device 61 coating agent supply device 62 supply pipe 63 spray nozzle 100, 100A laser surface treatment device 130 galvanomirror mechanism 131X, 131Y motor, 132X, 132Y mirror, 133 telecentric f-θ lens

Claims (14)

A surface treatment method for removing deposits on an object by laser irradiation,
A shape measuring device that measures the three-dimensional shape of the object and a laser irradiation device that irradiates the object with a laser beam are held by a manipulator and moved within a work area including a processing target region of the object,
Based on the three-dimensional shape information of the object obtained from the measurement result by the shape measuring device, the normal direction at the laser irradiation position by the laser irradiation device in the processing target area of the object and the laser irradiation position find the distance
The operation of the laser irradiation device and the manipulator is controlled based on the calculation result by the shape processing device so that the optical axis of the laser light irradiated by the laser irradiation device is aligned with the normal direction of the surface position of the object. Shape following control to match,
A substrate characterized in that the laser irradiation conditions are appropriately set according to the performance required for the surface texture of the object before processing and the surface texture after processing, and the laser irradiation device is used to irradiate a pulsed laser beam. processing method . A pulsed laser beam is irradiated by the laser irradiation device,
moving the laser irradiation position in the X-axis direction or the Y-axis direction for each pulse,
D is the spot diameter at the irradiation point of the pulsed laser beam, and _ΔX is the feed amount in the X-axis direction per pulse. 100 and the feed rate α _y =(ΔX/D)×100=(ΔY/D)×100, where ΔY is the feed amount in the Y -axis direction, is set to 35% or less. Processing method. After irradiating a rectangular irradiation range with a predetermined area by scanning the pulsed laser light two-dimensionally with the laser irradiation device, after moving only the irradiation range portion with the manipulator, the same two-dimensional 3. The base treatment method according to claim 1 , wherein the laser irradiation by scanning is repeatedly performed. By one-dimensionally scanning the pulsed laser light with the laser irradiation device, laser irradiation is repeated in a line of a predetermined length, and at the same time, the laser irradiation device is moved in a direction perpendicular to the linear laser by the manipulator. 3. The substrate treatment method according to claim 1 , wherein the substrate is moved continuously. the manipulator is a robot arm,
5. The apparatus according to any one of claims 1 to 4 , wherein a series of base treatment operations for removing deposits on the processing target region of the object by moving the laser irradiation position of the laser irradiation device are automatically controlled. 1. The base treatment method according to item 1. Furthermore, a spray or nozzle for applying a coating agent such as a coating agent, a pretreatment agent, or an adhesive agent for resin bonding is held by the manipulator, and the area where the base treatment work by the laser irradiation is completed on the object. 6. The base treatment method according to any one of claims 1 to 5 , wherein a coating treatment with the coating agent is applied to the substrate. Furthermore, in order to prevent the generation of rust on the target material after the base treatment, the manipulator holds a spray or nozzle that injects a gas for blocking oxygen in the air in accordance with the laser irradiation. 6. The base treatment method according to any one of claims 1 to 5 , wherein the gas is blown onto a region where the base treatment operation by the laser irradiation has been completed. A surface treatment apparatus for removing deposits on an object by laser irradiation,
a laser irradiation device;
a manipulator that holds the laser irradiation device and moves the laser irradiation device within a work area including a processing target area of the object;
a shape measuring device that measures the three-dimensional shape of the object;
Based on the three-dimensional shape information of the object obtained from the measurement result by the shape measuring device, the normal direction at the laser irradiation position by the laser irradiation device in the processing target area of the object and the laser irradiation position a shape processing device that performs arithmetic processing to obtain a distance;
a control device that controls operations of the laser irradiation device and the manipulator based on the result of calculation by the shape processing device;
with
The control device performs shape-following control so that the optical axis of the laser light irradiated by the laser irradiation device is aligned with the normal direction of the surface position of the object,
A substrate processing apparatus, wherein the laser irradiation apparatus irradiates a pulsed laser beam under laser irradiation conditions set according to the performance required for the surface properties of an object before processing and the surface properties after processing. D is the spot diameter at the irradiation point of the pulsed laser beam, and _ΔX is the feed amount in the X-axis direction per pulse. 100 and the feed rate α _y =(ΔX/D)×100=(ΔY/D)×100, where ΔY is the feed amount in the Y-axis direction, is controlled by the control device so as to be 35% or less. The substrate processing apparatus according to claim 8 . A two-dimensional scanning means for two-dimensionally scanning a pulsed laser beam emitted from the laser irradiation device to irradiate a rectangular irradiation range of a predetermined area of the object,
10. Each time the manipulator moves the laser irradiation device by the irradiation range, the laser irradiation device irradiates the irradiation range with the laser repeatedly. The substrate treatment apparatus according to any one of items 1 and 2. A one-dimensional scanning means for one-dimensionally scanning the pulsed laser light emitted from the laser irradiation device to irradiate the laser in a line of a predetermined length,
8. The manipulator continuously moves the laser irradiation device in a direction perpendicular to the linear laser, and the laser irradiation device repeatedly irradiates the laser in a linear shape of a predetermined length. Or the substrate treatment apparatus according to claim 9 . the manipulator is a robot arm,
8. The controller automatically controls a series of surface treatment operations for removing deposits on the processing target region of the object by moving the laser irradiation position of the laser irradiation device. 12. The substrate treatment apparatus according to any one of 11 . Furthermore, an application device such as a spray nozzle for applying a coating agent such as a paint agent, a pretreatment agent, or an adhesive agent for resin bonding to the object,
Holding the coating device with a manipulator,
8. The control device controls the coating device so as to apply the coating agent to a region of the object on which the base treatment work by the laser irradiation has been completed. Item 12. The substrate processing apparatus according to any one of Item 11 . In addition, in order to prevent rusting of the target material after surface treatment, it is equipped with a blowing device such as a spray or nozzle that injects gas to block oxygen in the air in accordance with the laser irradiation.
holding the spraying device with the manipulator;
12. The control device controls the blowing device so as to blow the gas onto a region of the object on which the base treatment work by the laser irradiation has been completed . The substrate treatment apparatus according to any one of 1.

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