JP7294438B2 - 電子銃 - Google Patents

電子銃 Download PDF

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Publication number
JP7294438B2
JP7294438B2 JP2021551009A JP2021551009A JP7294438B2 JP 7294438 B2 JP7294438 B2 JP 7294438B2 JP 2021551009 A JP2021551009 A JP 2021551009A JP 2021551009 A JP2021551009 A JP 2021551009A JP 7294438 B2 JP7294438 B2 JP 7294438B2
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JP
Japan
Prior art keywords
electrode
cable
electron gun
region
emitter
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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JP2021551009A
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English (en)
Japanese (ja)
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JPWO2021070289A1 (https=
Inventor
太邦 後藤
元英 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
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Nikon Corp
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Publication date
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Publication of JPWO2021070289A1 publication Critical patent/JPWO2021070289A1/ja
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Publication of JP7294438B2 publication Critical patent/JP7294438B2/ja
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
    • H01J3/14—Arrangements for focusing or reflecting ray or beam
    • H01J3/18—Electrostatic lenses

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2021551009A 2019-10-09 2019-10-09 電子銃 Active JP7294438B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/039850 WO2021070289A1 (ja) 2019-10-09 2019-10-09 電子銃

Publications (2)

Publication Number Publication Date
JPWO2021070289A1 JPWO2021070289A1 (https=) 2021-04-15
JP7294438B2 true JP7294438B2 (ja) 2023-06-20

Family

ID=75437360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021551009A Active JP7294438B2 (ja) 2019-10-09 2019-10-09 電子銃

Country Status (2)

Country Link
JP (1) JP7294438B2 (https=)
WO (1) WO2021070289A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120413392A (zh) * 2025-04-27 2025-08-01 电子科技大学 一种用于回旋波保护器的新型电子枪

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS576790B2 (https=) * 1974-05-13 1982-02-06
JPS54117058U (https=) * 1978-02-06 1979-08-16
JPH0963489A (ja) * 1995-08-28 1997-03-07 Toshiba Corp 電子管
JP3156763B2 (ja) * 1997-08-12 2001-04-16 日本電気株式会社 冷陰極搭載電子管の電極電圧印加方法および装置

Also Published As

Publication number Publication date
WO2021070289A1 (ja) 2021-04-15
JPWO2021070289A1 (https=) 2021-04-15

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