JP7293781B2 - Ranging device, distance setting device, ranging method and ranging program - Google Patents

Description

The present invention relates to calibration of distance measuring instruments.

Depending on the electronic device mounting machine, it may be desired to mount the substrate such that the distance between the upper surface of the substrate and the lower surface of the electronic device is accurately set. In this case, the electronic device mounting machine derives the distance between the upper surface of the substrate and the lower surface of the electronic device from the height of the upper surface of the substrate and the height of the lower surface of the electronic device.

FIG. 1 is a conceptual diagram showing a general configuration example for measuring the distance between the upper surface of a substrate and the lower surface of an electronic device. The substrate height measuring instrument 101 and the device height measuring instrument 106 are general laser distance meters (displacement meters) (see, for example, Patent Document 1). The positions and orientations of the substrate height gauge 101 and the device height gauge 106 are fixed. The board height measuring device 101 measures the distance from the board reference height position 801 to the board top surface 901 . A substrate reference height position 801 is given by the XY plane perpendicular to the Z axis. Also, the device height measuring instrument 106 measures the distance from the device reference height position 806 to the surface 901 , which is the lower surface of the electronic device 406 placed on the lower surface of the substrate 401 . The electronic device 406 is, for example, a CCD (Charge Coupled Device) sensor. Also, the substrate 401 is, for example, a ceramic substrate for mounting an electronic device. A device reference height position 806 is given by the XY plane perpendicular to the Z axis.

Thus, the reference height position differs between the distance to the upper surface of the substrate 401 derived by the substrate height measuring instrument 101 and the distance to the lower surface of the electronic device 406 derived by the device height measuring instrument. Therefore, in order to derive the distance between the upper surface of the substrate 401 and the lower surface of the electronic device 406, it is necessary to obtain the distance (calibration value) between the substrate reference height position 801 and the device reference height position.

As a method of obtaining the calibration value, there is a method of placing a plane-parallel substrate 201 with a known thickness between the substrate height measuring instrument 101 and the device height measuring instrument 106, as shown in FIG. FIG. 2 is a conceptual diagram showing a method of deriving calibration values using a plane-parallel substrate. In the method shown in FIG. 2, the distance H1 to the upper surface of the parallel plane substrate 201 measured by the substrate height measuring device 101, the distance H2 to the lower surface of the parallel plane substrate 201 measured by the device height measuring device 106, and the thickness Distance H0=H1+H2+t, which is a calibrated value, is obtained from t. By finding the distance H0, which is the calibration value, it becomes possible to derive the distance from the substrate upper surface to the electronic device lower surface.

Japanese Utility Model Laid-Open No. 3-019909

However, in the calibration method described in the background art section, when the plane-parallel substrate 201 is tilted with respect to the XY plane, as shown in FIG. The distance H0 to 801 cannot be measured accurately. In the case of FIG. 3, the distance between the substrate reference height position 801 and the device reference height position 806 should be H0=H1+H2+(t+α). This is because, in spite of this, H0=H1+H2+t is derived without considering the tilt of the substrate, and an error occurs in the value of the derived distance H0. Therefore, when the electronic device is mounted on the substrate, the derivation accuracy of the distance between the lower surface of the electronic device and the upper surface of the substrate deteriorates.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a rangefinder or the like capable of improving the derivation accuracy of the distance between reference planes for distance measurement in each of two rangefinders that measure distances in opposite directions.

The distance measuring device of the present invention includes, in its outer shape, partial curved surfaces near both ends of each of the plurality of spans, among predetermined constant-width curved surfaces, and is arranged between first and second planes parallel to each other. A first distance, which is the minimum value of the length of the perpendicular drawn from the partial curved surface to the first plane, and the minimum value of the length of the perpendicular drawn to the second plane and an output unit for outputting the sum of the first distance, the second distance, and the width of the constant-width curved surface.

The rangefinder and the like of the present invention can improve the derivation accuracy of the distance between the reference planes for distance measurement in each of two rangefinders that measure distances in opposite directions.

It is a conceptual diagram showing a general configuration example for measuring the distance between the upper surface of the substrate and the lower surface of the electronic device. FIG. 2 is a conceptual diagram showing a general height position calibration method using a plane-parallel substrate; FIG. 4 is a conceptual diagram showing how a plane-parallel substrate is tilted with respect to the XY plane. It is a conceptual diagram showing the calibration method of this embodiment. FIG. 4 is a conceptual diagram showing a processing flow example of processing performed by a processing unit; FIG. 4 is a conceptual diagram showing a first specific example of the processing of S101; FIG. 11 is a conceptual diagram (part 1) showing a second specific example of the processing of S101; FIG. 11 is a conceptual diagram (Part 2) showing a second specific example of the process of S101; 1 is a conceptual diagram showing a configuration example of a distance setting device of this embodiment; FIG. 1 is a conceptual diagram showing a minimum configuration of a distance measuring device of an embodiment; FIG.

[Configuration and operation]
FIG. 4 is a conceptual diagram showing the calibration method of this embodiment. The substrate height gauge 101 and the device height gauge 106 shown in FIG. 4 are the same as those shown in FIGS. The position and orientation of device height measuring instrument 106 are fixed by base 601 . The position and orientation of the substrate height measuring device 101 are fixed to the base 601 by a member (not shown). The device height measurement device 106 and the substrate height measurement device 101 send the distance measurement values to the processing device 221 via signal lines (not shown).

As shown in FIG. 4, in the calibration method of this embodiment, a sphere 206 is used in place of the plane-parallel substrate shown in FIGS. Sphere 206 is of known diameter. The right end of the sphere 206 is fixed to the left end of the sphere holder 211 .

The vicinity of the right end of the sphere holder 211 is fixed to the upper end of the sphere moving device 216 .

A surface 912 , which is the lower surface of the spherical body moving device, is fixed to the base 601 together with the device height measuring device 106 and substrate height measuring device 101 .

The sphere moving device 216 is connected to the processing device 221 by a signal line (not shown). Then, according to the control signal sent from the processing device 221, the sphere moving device 216 moves the surface 911, which is the upper surface to which the vicinity of the right end of the sphere holding part 211 in the sphere moving device 216 is fixed, against the surface 912, which is the lower surface. to move in the XY plane. With this movement, the center of the sphere 206 moves parallel to the XY plane. The movement of the sphere 206 means movement of the center of the sphere 206 . As the sphere moving device 216, for example, a commercially available XY stage can be used.

The processing device 221 includes a processing section 221a and a storage section 221b. The processing device 221 is, for example, configured to include a processor such as a computer.

The processing unit 221a obtains the distances Ha1 and Ha2 by the following first operation or second operation. A distance Ha1 is the minimum value of the distance from the board reference height position 801 to the sphere 206 measured by the board height measuring device 101 . The distance Ha1 is the distance when the board height measuring device 101 measures the point P which is the top of the sphere 206 . A distance Ha2 is the minimum value of the distance from the device reference height position 806 to the sphere 206 measured by the device height measuring device 106 . The distance Ha2 corresponds to the distance when the device height measuring instrument 106 measures the point P', which is the bottom of the sphere 206. FIG.

In the first operation, the sphere moving device 216 moves the sphere 206 over a predetermined range parallel to the XY plane. The processing unit 221a obtains the first distance and the second distance for each position of the sphere 206 within the range while performing the movement. The processing unit 221a stores the acquired first distance and second distance in the storage unit 221b. Here, the first distance is the distance from the board reference height position 801 to the sphere 206 measured by the board height measuring device 101 . Also, the second distance is the distance from the device reference height position 806 to the sphere 206 measured by the device height measuring device 106 . The range is set so as to include the position where the distance Ha1, which is the minimum value of the first distance, and the distance Ha1, which is the minimum value of each of the second distances, are given. Distance Ha1 corresponds to the case where substrate height measuring device 101 measures point P, which is the top of sphere 206 . Also, the distance Ha2 corresponds to the case where the board height measuring device 101 measures the point P′ which is the bottom of the sphere 206 .

Then, the processing unit 221a specifies the distance Ha1, which is the minimum value, from the first distance group acquired for the range, and the distance Ha2, which is the minimum value, from the second distance group acquired for the range.

Alternatively, the processing unit 221a may obtain the minimum values of the first distance and the second distance from the following second operation.

First, the processing unit 221 a positions the sphere 206 at a position where the substrate height measuring device 101 can measure the distance to at least one of the spheres 206 . Then, while moving the sphere 206 in the X direction, the processing unit 221a obtains the X position where the first distance from the substrate height measuring device 101 is minimized, and fixes the X position. Then, the processing unit 221a obtains the Y position where the first distance from the substrate height measuring device 101 is minimized while moving the sphere 206 in the Y direction. The first distance at this time is the minimum distance Ha1.

Next, the processing unit 221 a positions the sphere 206 at a position where the device height measuring device 106 can measure the distance to at least one of the spheres 206 . Then, while moving the sphere 206 in the X direction, the processing unit 221a obtains the X position where the second distance from the device height measuring device 106 is minimized, and fixes the X position. Then, the processing unit 221a obtains the Y position at which the second distance sent from the device height measuring device 106 is minimized while moving the sphere 206 in the Y direction. The second distance at this time is the minimum distance Ha2.

When the distances Ha1 and Ha2 are obtained by the above operation, the distance Ha0=Ha1+Ha2+D, which is the calibration value, is obtained.

Note that the storage unit 221b of the processing device 221 shown in FIG. 4 holds, for example, programs and information for the processing unit 221a to perform the above operations. The storage unit 221b also stores information instructed by the processing unit 221a. The storage unit 221b also sends the storage information instructed by the processing unit 221a to the processing unit 221a.

FIG. 5 is a conceptual diagram showing a processing flow example of processing performed by the processing unit 221a of the processing device 221 shown in FIG.

For example, the processing unit 221a starts the processing shown in FIG. 5 by inputting start information from the outside.

First, as the process of S101, the processing unit 221a specifies the distance Ha1, which is the minimum value of the first distance, and the distance Ha2, which is the minimum value of the second distance, and stores them in the storage unit 221b. A specific example of the processing of S101 is shown in FIGS. 6 and 7. FIG.

The processing unit 221a next derives a distance Ha0, which is a calibration value, from the distances Ha1, Ha2 and the diameter D as the process of S102. The distance Ha0 is given by H0=Ha2+Ha1+D as described above.

Then, as the process of S103, the processing unit 221a outputs the distance Ha0 derived by the process of S102.

Then, the processing unit 221a ends the processing shown in FIG.

FIG. 6 is a conceptual diagram showing a first specific example of the processing of S101 shown in FIG. The processing in FIG. 6 corresponds to the first operation described in the description of the processing section 221a in FIG.

When the process of FIG. 5 is started, first, as the process of S201, the processing unit 221a stores the first distance when the sphere 206 is moved to each position in the first range in the XY plane to the storage unit 221b. store in The first range includes the position where the board height measuring device 101 measures the distance of the point P of the sphere 206 .

Then, as the process of S202, the processing unit 221a specifies the smallest one of the first distances stored in the storage unit 221b, and stores it in the storage unit 221b as the distance Ha1.

Next, as the process of S203, the processing unit 221a stores, in the storage unit 221b, a second distance group consisting of second distances when the sphere 206 is moved to each position in the second range in the XY plane. Let The second range includes the positions at which the device height measurer 106 measures the distance of the point P' on the sphere 206 .

Then, as the process of S204, the processing unit 221a specifies the smallest of the second distances stored in the storage unit 221b, and stores it in the storage unit 221b as the distance Ha2.

Then, the processing unit 221a performs the processing of S102 shown in FIG.



7 and 8 are conceptual diagrams showing a second specific example of the process of S101 shown in FIG. The processing in FIG. 7 corresponds to the second operation described in the description of the processing section 221a in FIG.

When the process of FIG. 5 is started, the processing unit 221a first moves the sphere 206 to the first initial position as the process of S301. The first initial position is a position at which the board height measuring device 101 can measure the distance near the point P of the sphere 206 .

Then, the processing unit 221a moves the sphere 206 by a distance ΔX in the positive direction of the X-axis as the process of S302. The distance ΔX is set to a sufficiently small value.

Then, as the process of S303, the processing unit 221a determines whether or not the first distance sent from the substrate height measuring device 101 has decreased compared to the nearest distance ΔX before the movement. The processing unit 221a performs the processing of S304 when the determination result of the processing of S303 is yes. On the other hand, the processing unit 221a performs the processing of S306 when the determination result of the processing of S303 is no.

When performing the processing of S304, the processing unit 221a moves the sphere 206 in the positive direction of the X axis by a distance ΔX as the same processing.

Then, as the process of S305, the processing unit 221a determines whether the first distance has decreased compared to before the movement of the latest distance ΔX. The processing unit 221a performs the processing of S304 again when the determination result of the processing of S305 is yes. On the other hand, the processing unit 221a performs the processing of S308 when the determination result of the processing of S305 is no.

When performing the processing of S306, the processing unit 221a moves the sphere 206 by a distance ΔX in the negative direction of the X axis as the same processing.

Then, as the process of S307, the processing unit 221a determines whether the first distance has decreased compared to before the movement of the latest distance ΔX. The processing unit 221a performs the processing of S306 again when the determination result of the processing of S307 is yes. On the other hand, the processing unit 221a performs the processing of S308 when the determination result of the processing of S307 is no.

When performing the processing of S308, the processing unit 221a moves the sphere 206 by a distance ΔY in the positive direction of the Y-axis as the same processing. The distance ΔY is set to a sufficiently small value.

Then, as the process of S309, the processing unit 221a determines whether the first distance sent from the substrate height measuring device 101 has decreased compared to the nearest distance ΔY before the movement. The processing unit 221a performs the processing of S310 when the determination result of the processing of S309 is yes. On the other hand, the processing unit 221a performs the processing of S312 when the determination result of the processing of S309 is no.

When performing the processing of S310, the processing unit 221a moves the sphere 206 by a distance ΔY in the positive direction of the Y-axis as the same processing.

Then, as the process of S311, the processing unit 221a determines whether the first distance has decreased compared to before the movement of the latest distance ΔY. The processing unit 221a performs the processing of S310 again when the determination result of the processing of S311 is yes. On the other hand, the processing unit 221a performs the processing of S314 when the determination result of the processing of S311 is no.

When performing the processing of S312, the processing unit 221a moves the sphere 206 by a distance ΔY in the negative direction of the Y-axis as the same processing.

Then, as the process of S313, the processing unit 221a determines whether the first distance has decreased compared to before the movement of the latest distance ΔY. The processing unit 221a performs the processing of S312 again when the determination result of the processing of S313 is yes. On the other hand, the processing unit 221a performs the processing of S314 when the determination result of the processing of S307 is no.

When performing the processing of S314, the processing unit 221a causes the storage unit 221b to store the first distance at the time of the processing of S314 as the distance Ha1 as the same processing.

Then, the processing unit 221a performs the processing of S401 shown in FIG.

After the process of S314 shown in FIG. 7, the processing unit 221a moves the sphere 206 to the second initial position as the process of S401. The second initial position is a position at which device height measurer 106 can perform distance measurements near point P on sphere 206 .

Then, the processing unit 221a moves the sphere 206 by a distance ΔX in the positive direction of the X-axis as the process of S402. The distance ΔX is set to a sufficiently small value.

Then, as the process of S403, the processing unit 221a determines whether or not the second distance sent from the device height measuring device 106 has decreased compared to the nearest distance ΔX before the movement. The processing unit 221a performs the processing of S404 when the determination result of the processing of S403 is yes. On the other hand, the processing unit 221a performs the processing of S406 when the determination result of the processing of S403 is no.

When performing the processing of S404, the processing unit 221a moves the sphere 206 in the positive direction of the X axis by a distance ΔX as the same processing.

Then, as the process of S405, the processing unit 221a determines whether the second distance has decreased compared to before the movement of the latest distance ΔX. The processing unit 221a performs the processing of S404 again when the determination result of the processing of S405 is yes. On the other hand, the processing unit 221a performs the processing of S408 when the determination result of the processing of S405 is no.

When performing the processing of S406, the processing unit 221a moves the sphere 206 by a distance ΔX in the negative direction of the X-axis as the same processing.

Then, as the process of S407, the processing unit 221a determines whether the second distance has decreased compared to before the movement of the latest distance ΔX. The processing unit 221a performs the processing of S406 again when the determination result of the processing of S407 is yes. On the other hand, the processing unit 221a performs the processing of S408 when the determination result of the processing of S407 is no.

When performing the processing of S408, the processing unit 221a moves the sphere 206 by a distance ΔY in the positive direction of the Y-axis as the same processing. The distance ΔY is set to a sufficiently small value.

Then, as the process of S409, the processing unit 221a determines whether or not the second distance sent from the device height measuring device 106 has decreased compared to the nearest distance ΔY before movement. The processing unit 221a performs the processing of S410 when the determination result of the processing of S409 is yes. On the other hand, the processing unit 221a performs the processing of S412 when the determination result of the processing of S409 is no.

When performing the processing of S410, the processing unit 221a moves the sphere 206 by a distance ΔY in the positive direction of the Y-axis as the same processing.

Then, as the process of S411, the processing unit 221a determines whether or not the second distance has decreased compared to before the movement of the latest distance ΔY. The processing unit 221a performs the processing of S410 again when the determination result of the processing of S411 is yes. On the other hand, the processing unit 221a performs the processing of S414 when the determination result of the processing of S411 is no.

When performing the processing of S412, the processing unit 221a moves the sphere 206 by a distance ΔY in the negative direction of the Y-axis as the same processing.

Then, as the process of S413, the processing unit 221a determines whether or not the second distance has decreased compared to before the movement of the latest distance ΔY. The processing unit 221a performs the processing of S412 again when the determination result of the processing of S413 is yes. On the other hand, the processing unit 221a performs the processing of S414 when the determination result of the processing of S407 is no.

When performing the processing of S414, the processing unit 221a causes the storage unit 221b to store the second distance at the time of the processing of S414 as the distance Ha2 as the same processing.

Then, the processing unit 221a performs the processing of S102 shown in FIG.

FIG. 9 is a conceptual diagram showing the configuration of a distance setting device 351, which is an example of the distance setting device of this embodiment. FIG. 9 shows the state after the distance Ha0 is derived by the configuration shown in FIG. 4, and then the sphere 206, the sphere holder 211 and the sphere moving device 216 shown in FIG. 4 are removed or moved.

The distance setting device 351 includes holding members 501 and 502 , an elevating device 551 , a mounting member 506 , a substrate height measuring device 101 , a device height measuring device 106 and a processing device 221 . The processing device 221 includes a processing section 221a and a storage section 221b.

The substrate height measuring instrument 101 and the device height measuring instrument 106 are fixed to the holding member 501 by members (not shown). The processing device 221 is connected to the lifting device 551, the substrate height measuring device 101 and the device height measuring device 106 by signal lines (not shown).

The lifting device 551 moves the combination of the holding member 502 , the mounting member 506 and the electronic device 406 up and down with respect to the combination of the holding member 501 and the substrate 401 . The lifting device 551 moves up and down according to an instruction signal from the processing device 221 .

The storage unit of the processing device 221 already stores the distance Ha0 derived by the method described with reference to FIGS.

The processing unit 221a of the processing device 221 derives the distance G from the distance Hb1 sent by the substrate height measuring device 101, the distance Hb2 sent by the device height measuring device 106, and the distance Ha0 held by the storage unit 221b. . Here, the distance Hb1 is the distance from the substrate reference height position 801 to the plane 901. FIG. A distance Hb2 is the distance from the device reference height position 806 to the plane 902 . again. A distance G is the distance between the surfaces 901 and 902 .

Then, the processing unit 221a causes the lifting device 551 to move the combination of the holding member 502, the mounting member, and the electronic device 406 up and down so that the distance G becomes the set value.

An XY stage or the like for moving the lifting device 551 with respect to the holding member 501 within the XY plane may be provided between the holding member 501 and the lifting device 551 .
[effect]
The processing apparatus of this embodiment for deriving the calibration value uses a sphere instead of the plane-parallel substrate in the general derivation method for the derivation. Here, the calibration value is the distance between the reference height positions for distance measurement for each of the substrate height measuring device and the device height measuring device. Then, the processing device derives the calibration value from the minimum value of the distance from the derived substrate height measuring device to the sphere, the minimum value of the distance from the device height measuring device to the sphere, and the diameter of the sphere. . Here, unlike the parallel plane substrate, the sphere has the same shape even if it is tilted. Therefore, the processing device can accurately derive the calibration value regardless of the inclination of the sphere.

On the other hand, the distance setting device of the present embodiment sets the distance based on the set value of the distance between the lower surface of the electronic device and the upper surface of the substrate derived from the calibrated value more accurately derived by the derivation method. Therefore, the distance setting device can improve the setting accuracy of the distance.

In the above examples of embodiments, the case where the substrate height measuring device is fixed and the sphere is moved in a plane parallel to the XY plane to derive the minimum value of the first distance has been described. However, the minimum value of the first distance may be derived by moving the sphere in a fixed plane and the substrate height measuring device in a plane parallel to the XY plane. Furthermore, the minimum value of the first distance may be derived by moving both the sphere and the substrate height measuring device in a plane parallel to the XY plane. That is, the minimum value of the first distance should be derived by relatively moving the sphere and the substrate height measuring device in a plane parallel to the XY plane.

In the above example of the present embodiment, the device height measuring instrument is fixed, and the sphere moves in a plane parallel to the XY plane, thereby deriving the minimum value of the second distance. bottom. However, the sphere may be fixed and the device height measurer may be moved in a plane parallel to the XY plane to derive the minimum value of the second distance. Furthermore, the minimum value of the second distance may be derived by moving both the sphere and the device height measuring device in a plane parallel to the XY plane. That is, the minimum value of the second distance may be derived by relatively moving the sphere and the device height measuring device in a plane parallel to the XY plane.

Also, the substrate height measuring device does not necessarily have to measure the distance to the upper surface of the substrate, and may be any device that measures the distance to an object in the first direction. Also, the device height measuring instrument does not necessarily have to measure the distance to the bottom surface of the device, but may measure the distance to an object in the opposite direction to the first direction.

Furthermore, in the above description, an example of inserting a sphere as a member to be measured between the device height measuring device and the substrate height measuring device has been described. However, the distance measurement target member to be inserted may have a constant-width curved surface other than a spherical surface. Furthermore, all the curved surfaces of the surface of the member to be distance-measured do not have to match the constant-width curved surface. The distance measurement target member may have, in its outer shape, a partial curved surface in the vicinity of both ends of each of the plurality of spans among the curved surfaces of constant width.

FIG. 10 is a conceptual diagram showing the configuration of a range finder 221x, which is the minimum configuration of the range finder of the embodiment.

The distance measurement device 221x includes a distance measurement target member 206x, a distance measurement section 2211x, and an output section 2212x.

The distance measurement target member 206x includes, in its outer shape, partial curved surfaces 921x near both ends of each of the plurality of spans 916x of the predetermined constant-width curved surface 901x, and has a first plane 906x and a second plane 911x parallel to each other. is placed between

The distance measuring unit 2211x measures a first distance h1, which is the minimum value of the length of the perpendicular drawn from the partial curved surface 921x to the first plane 906x, and the minimum value of the length of the perpendicular drawn to the second plane. and output the second distance h2.

The output unit 2212x outputs the sum of the first distance h1, the second distance h2, and the width Dh of the constant-width curved surface.

Since the partial curved surface 921x of the target member 206x is included in the constant-width curved surface 901x, the sum of the first distance h1, the second distance h2, and the width Dh of the constant-width curved surface is related to the inclination of the target member 206x. is not a value. Therefore, the distance measuring device 221x does not lower the accuracy of the distance between the reference surfaces when the plane-parallel substrate is tilted as shown in FIG. Therefore, the distance measuring device 221x can improve the derivation accuracy of the distance between the reference planes for distance measurement in each of the two distance measuring devices that measure distances in opposite directions.

Therefore, the distance measuring device 221x has the effects described in the section [Effects of the Invention] due to the above configuration.

Here, the distance measuring device 221x is, for example, a combination of the sphere 206 shown in FIGS. 4 and 9, the substrate height measuring device 101, the device height measuring device, and the processing section 221a. Also, the distance measuring unit 2211x is a combination of the sphere 206, the substrate height measuring device 101, the device height measuring device, and the portion of the processing unit 221a that performs the processing of S101 shown in FIG. The output unit 2212x is, for example, a part that performs the processing of S102 and S103 shown in FIG. 5 of the processing unit 221a. Also, the constant-width curved surface 901x is, for example, the spherical surface of the sphere 206 shown in FIG. Also, the plurality of spans 916x are, for example, spans of the sphere 206 shown in FIG. Also, the partial curved surface 921x is, for example, the upper and lower surfaces of the sphere 206 shown in FIG. Also, the first plane 906x is, for example, a plane representing the substrate reference height position 801 shown in FIG. Also, the second plane 911x is, for example, a plane representing the device reference height position 806 shown in FIG. Also, the first distance h1 is, for example, the distance Ha1 shown in FIG. Also, the second distance h2 is, for example, the distance Ha2 shown in FIG. Also, the width Dh of the constant-width curved surface is, for example, the diameter D shown in FIG.

Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and further modifications, replacements, and adjustments can be made without departing from the basic technical idea of the present invention. can be added. For example, the configuration of elements shown in each drawing is an example for helping understanding of the present invention, and the configuration is not limited to the configuration shown in these drawings.

Moreover, part or all of the above-described embodiments can be described as the following supplementary remarks, but are not limited to the following.
(Appendix 1)
a distance measurement target member whose outer shape includes partial curved surfaces in the vicinity of both ends of each of the plurality of spans of a predetermined constant-width curved surface, and which is arranged between first and second planes parallel to each other;
Output a first distance, which is the minimum value of the length of the perpendicular to the first plane, and a second distance, which is the minimum value of the length of the perpendicular to the second plane, from the partial curved surface. a distance measuring unit that
and an output unit that outputs the sum of the first distance, the second distance, and the width of the constant-width curved surface.
(Appendix 2)
The rangefinder according to appendix 1, wherein the curved surface of constant width is a spherical surface.
(Appendix 3)
3. A ranging device according to appendix 1 or appendix 2, wherein the ranging unit comprises a laser range finder.
(Appendix 4)
3. The rangefinder according to any one of supplementary notes 1 to 3, wherein the rangefinder includes a first rangefinder that outputs the first distance and a second rangefinder that outputs the second distance. rangefinder.
(Appendix 5)
The first distance measuring unit moves the target member for distance measurement relatively to the first distance measuring unit within a first movement plane perpendicular to the direction of distance measurement of the first distance measuring unit. 5. The ranging device of clause 4, wherein the first distance is derived by:
(Appendix 6)
The first distance measuring unit moves the target member for distance measurement relative to the second distance measuring unit within a second movement plane perpendicular to the direction of distance measurement by the second distance measuring unit. 6. The ranging device according to appendix 4 or appendix 5, wherein the second distance is derived by:
(Appendix 7)
The first distance measuring unit measures a distance to a third plane parallel to the first plane and the second plane, and the second distance measuring unit measures the first plane and 7. A ranging device according to any one of appendices 4 to 6, for measuring a distance to a fourth plane parallel to said second plane.
(Appendix 8)
8. The range finder according to appendix 7, wherein the third plane is the substrate surface and the fourth plane is the electronic device surface.
(Appendix 9)
A distance setting device for adjusting the distance between the substrate surface and the electronic device surface according to the sum output by the output unit of the distance measuring device according to appendix 8.
(Appendix 10)
of the predetermined constant-width curved surface, the member to be distance-measured is arranged between the first and second planes parallel to each other and includes, in its external shape, partial curved surfaces in the vicinity of both ends of each of the plurality of spans; outputting a first distance that is the minimum value of the length of the perpendicular drawn to the first plane and a second distance that is the minimum value of the length of the perpendicular drawn to the second plane from the partial curved surface; ,
A ranging method that outputs the sum of the first distance, the second distance, and the width of the constant-width curved surface.
(Appendix 11)
of the predetermined constant-width curved surface, the member to be distance-measured is arranged between the first and second planes parallel to each other and includes, in its external shape, partial curved surfaces in the vicinity of both ends of each of the plurality of spans; From the partial curved surface, output a first distance that is the minimum value of the length of the perpendicular to the first plane, and a second distance that is the minimum value of the length of the perpendicular to the second plane. processing;
a process of outputting the sum of the first distance, the second distance, and the width of the constant-width curved surface;
A distance measurement program that causes a computer to execute

Reference Signs List 101 substrate height measuring device 206 sphere 206x distance measurement target member 211 sphere holding unit 216 sphere movement device 221 processing device 2211x distance measurement unit 2212x output unit 221a processing unit 221b storage unit 221x distance measurement device 401 substrate 406 electronic device 501, 502 holding Member 506 Mounting member 551 Elevating device 801 Substrate reference height position 806 Device reference height position 901, 902 Surface 901x Fixed width curved surface 906x First plane 911x Second plane 916x Plural bridges 921x Partial curved surface

Claims (10)

a distance measurement target member whose outer shape includes partial curved surfaces in the vicinity of both ends of each of the plurality of spans of a predetermined constant-width curved surface, and which is arranged between first and second planes parallel to each other;
Output a first distance, which is the minimum value of the length of the perpendicular to the first plane, and a second distance, which is the minimum value of the length of the perpendicular to the second plane, from the partial curved surface. a distance measuring unit that
and an output unit that outputs the sum of the first distance, the second distance, and the width of the constant-width curved surface. 2. A range finder according to claim 1, wherein said constant width curved surface is a spherical surface. 3. A range finder according to claim 1 or 2, wherein said range finder comprises a laser range finder. 4. The range finder according to any one of claims 1 to 3, wherein the range finder includes a first range finder that outputs the first distance and a second range finder that outputs the second distance. range finder. a distance measurement target member moving unit that moves the distance measurement object member relative to the first distance measurement unit within a first movement plane perpendicular to the distance measurement direction of the first distance measurement unit; ,
5. The distance measuring device according to claim 4, wherein said first distance measuring section derives said first distance when said distance measurement target member moves within said first movement plane. The distance measurement target member moving unit moves the distance measurement target member relative to the second distance measurement unit within a second movement plane perpendicular to the distance measurement direction of the second distance measurement unit. let
6. The range finder according to claim 5, wherein said second range finder derives said second distance when said member to be ranged moves within said second movement plane. The first distance measuring unit measures a distance to a substrate surface parallel to the first plane and the second plane, and the second distance measuring unit measures the first plane and the second plane. 7. A rangefinder according to any one of claims 4 to 6, for measuring a distance to a plane of an electronic device parallel to two planes. 8. A distance setting device for adjusting the distance between the substrate surface and the electronic device surface according to the sum output from the output unit of the distance measuring device according to claim 7. of the predetermined constant-width curved surface, the member to be distance-measured is arranged between the first and second planes parallel to each other and includes, in its external shape, partial curved surfaces in the vicinity of both ends of each of the plurality of spans; outputting a first distance that is the minimum value of the length of the perpendicular drawn to the first plane and a second distance that is the minimum value of the length of the perpendicular drawn to the second plane from the partial curved surface; ,
A ranging method that outputs the sum of the first distance, the second distance, and the width of the constant-width curved surface. of the predetermined constant-width curved surface, the member to be distance-measured is arranged between the first and second planes parallel to each other and includes, in its external shape, partial curved surfaces in the vicinity of both ends of each of the plurality of spans; From the partial curved surface, output a first distance that is the minimum value of the length of the perpendicular to the first plane, and a second distance that is the minimum value of the length of the perpendicular to the second plane. processing;
a process of outputting the sum of the first distance, the second distance, and the width of the constant-width curved surface;
A distance measurement program that causes a computer to execute

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