JP7286271B2 - 光学セル及びガス分析装置 - Google Patents
光学セル及びガス分析装置 Download PDFInfo
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- JP7286271B2 JP7286271B2 JP2018098135A JP2018098135A JP7286271B2 JP 7286271 B2 JP7286271 B2 JP 7286271B2 JP 2018098135 A JP2018098135 A JP 2018098135A JP 2018098135 A JP2018098135 A JP 2018098135A JP 7286271 B2 JP7286271 B2 JP 7286271B2
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- YBNMDCCMCLUHBL-UHFFFAOYSA-N (2,5-dioxopyrrolidin-1-yl) 4-pyren-1-ylbutanoate Chemical compound C=1C=C(C2=C34)C=CC3=CC=CC4=CC=C2C=1CCCC(=O)ON1C(=O)CCC1=O YBNMDCCMCLUHBL-UHFFFAOYSA-N 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
- G01N21/534—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke by measuring transmission alone, i.e. determining opacity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/031—Multipass arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/0332—Cuvette constructions with temperature control
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
- G01N2021/151—Gas blown
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/391—Intracavity sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
- G01N2021/399—Diode laser
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
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Description
10 光源
20 光学セル
21 一方のセル要素
22 他方のセル要素
23 加熱機構
26 セル本体
26a 外面
27 マニホールド部材
H1~H3 貫通孔
L1 ガス導入路(サンプルガス導入路)
L2 ガス導出路
L3 パージガス導入路
30 光検出器
40 情報処理装置
Claims (9)
- ガスが導入される内部空間を有する光学セルであって、
前記内部空間を形成するセル本体と、
前記セル本体に対向する対向面を有し、その対向面が前記セル本体の外面に接続されるマニホールド部材と、
前記マニホールド部材を加熱する加熱機構とを備え、
前記セル本体が、前記外面から前記内部空間へ貫通する第1の貫通孔を有し、
前記マニホールド部材が、前記セル本体の前記外面に沿うように延びており、外部から取り込んだ前記ガスを前記第1の貫通孔を介して前記内部空間へ導入するガス導入路を有し、
前記ガス導入路が、前記マニホールド部材の内部に形成されており、
前記加熱機構が、前記ガス導入路に沿って設けられていることを特徴とする光学セル。 - 前記セル本体が、前記第1の貫通孔と対をなし、前記第1の貫通孔から長手方向に離間して配置された第2の貫通孔を有し、
前記マニホールド部材が、外部から取り込んだ前記ガスを前記第1の貫通孔を介して前記内部空間へ導入する前記ガス導入路を有すると共に、前記内部空間に導入された前記ガスを前記第2の貫通孔を介して外部へ導出するガス導出路をさらに有している請求項1記載の光学セル。 - 前記ガス導出路及び前記ガス導入路が、前記マニホールド部材の長手方向のいずれか一方側に外部へ連通する一端を有している請求項2記載の光学セル。
- 前記マニホールド部材が、前記ガス導入路を二つ有し、一方がサンプルガスを導くサンプルガス導入路であり、他方がパージガスを導くパージガス導入路であり、
前記加熱機構が、前記サンプルガス導入路及び前記パージガス導入路を加熱している請求項1乃至3のいずれかに記載の光学セル。 - 前記パージガス導入路が、その途中で二つの分岐路に分岐し、一方の前記分岐路が、前記パージガスを前記内部空間の長手方向のいずれか一方側へ導入し、他方の前記分岐路が、前記パージガスを前記内部空間の長手方向の他方側へ導入する請求項4記載の光学セル。
- 前記セル本体に接続された前記マニホールド部材を、当該セル本体の外面と直交し、かつ、前記第1の貫通孔及び前記第2の貫通孔を結ぶ直線の中心を通る軸線を回転軸として180°回転させた場合に、その回転前後において前記ガス導入路に連通する前記第1の貫通孔又は前記第2の貫通孔の一方と前記ガス導出路に連通する前記第1の貫通孔又は前記第2の貫通孔との他方とが入れ替わるように構成されている請求項2記載の光学セル。
- ガスが導入される内部空間を有する光学セルであって、
前記内部空間を形成する少なくとも二つのセル要素と、
前記二つのセル要素のうちで一方のセル要素を加熱する加熱機構とを備え、
前記一方のセル要素が、他方のセル要素に対向する対向面を有し、その対向面が前記他方のセル要素の外面に接続されており、
前記一方のセル要素が、外部から取り込んだ前記ガスを前記内部空間へ導入するガス導入路を有し、
前記ガス導入路が、前記一方のセル要素の内部に形成されており、
前記加熱機構が、前記ガス導入路に沿って前記一方のセル要素の内部に設けられていることを特徴とする光学セル。 - 前記一方のセル要素が、前記内部空間に導入された前記ガスを前記外部へ導出するガス導出路をさらに有し、
前記ガス導入路及び前記ガス導出路の前記内部空間へ連通する一端が、前記一方のセル要素の長手方向に離間して配置される請求項7記載の光学セル。 - 請求項1乃至8のいずれかに記載の光学セルと、
前記光学セルの前記内部空間へ向けて光を射出する光源と、
前記内部空間から出射した光を検出する光検出器と、
前記光検出器で検出された光強度信号に基づいて前記ガスを分析する情報処理装置とを備えるガス分析装置。
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JP2018098135A JP7286271B2 (ja) | 2018-05-22 | 2018-05-22 | 光学セル及びガス分析装置 |
US16/418,465 US11506603B2 (en) | 2018-05-22 | 2019-05-21 | Optical cell and gas analyzer |
EP19175976.0A EP3572791A1 (en) | 2018-05-22 | 2019-05-22 | Optical cell and gas analyzer |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000002656A (ja) | 1998-06-12 | 2000-01-07 | Horiba Ltd | ガス分析装置 |
WO2012120957A1 (ja) | 2011-03-09 | 2012-09-13 | 株式会社堀場製作所 | ガス分析装置 |
JP2017504028A (ja) | 2014-01-22 | 2017-02-02 | エイヴィエル エミッション テスト システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツングAVL Emission Test Systems GmbH | 赤外吸収分光法を用いて試料ガス流中の少なくとも1つのガスの濃度を測定する装置 |
JP2017194458A (ja) | 2016-04-18 | 2017-10-26 | 株式会社堀場製作所 | 分光分析装置及び分光分析方法 |
JP2018509598A (ja) | 2015-01-19 | 2018-04-05 | インテグリス・インコーポレーテッド | 赤外線および紫外線を監視するための小容積、長経路長のマルチパスガスセル |
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US3981176A (en) * | 1974-09-16 | 1976-09-21 | The United States Of America As Represented By The Secretary Of The Department Of Health, Education And Welfare | Dual frequency acoustic gas composition analyzer |
JPS60233536A (ja) | 1984-05-04 | 1985-11-20 | Nippon Soken Inc | 光透過式黒煙濃度測定器 |
JPS6191542A (ja) * | 1984-10-12 | 1986-05-09 | Ngk Insulators Ltd | 直結形非分散赤外線ガス分析計 |
JP3268966B2 (ja) * | 1995-10-05 | 2002-03-25 | 株式会社堀場製作所 | 多重反射型ガスセル |
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2018
- 2018-05-22 JP JP2018098135A patent/JP7286271B2/ja active Active
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- 2019-05-21 US US16/418,465 patent/US11506603B2/en active Active
- 2019-05-22 EP EP19175976.0A patent/EP3572791A1/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000002656A (ja) | 1998-06-12 | 2000-01-07 | Horiba Ltd | ガス分析装置 |
WO2012120957A1 (ja) | 2011-03-09 | 2012-09-13 | 株式会社堀場製作所 | ガス分析装置 |
JP2017504028A (ja) | 2014-01-22 | 2017-02-02 | エイヴィエル エミッション テスト システムズ ゲゼルシャフト ミット ベシュレンクテル ハフツングAVL Emission Test Systems GmbH | 赤外吸収分光法を用いて試料ガス流中の少なくとも1つのガスの濃度を測定する装置 |
JP2018509598A (ja) | 2015-01-19 | 2018-04-05 | インテグリス・インコーポレーテッド | 赤外線および紫外線を監視するための小容積、長経路長のマルチパスガスセル |
JP2017194458A (ja) | 2016-04-18 | 2017-10-26 | 株式会社堀場製作所 | 分光分析装置及び分光分析方法 |
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EP3572791A1 (en) | 2019-11-27 |
JP2019203752A (ja) | 2019-11-28 |
US20190360931A1 (en) | 2019-11-28 |
US11506603B2 (en) | 2022-11-22 |
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