JP7286232B2 - height measuring machine - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a height measuring instrument for measuring the height of a workpiece, and more particularly, to a height measuring instrument capable of grasping spatial position information of a probe and performing movement guidance during measurement. .

A height measuring instrument for measuring the height of a workpiece placed on the surface of a surface plate includes a base placed movably along the surface of the surface plate, a support pillar erected on the base, and the support pillar. and a displacement sensor for detecting the amount of displacement of the slider in the height direction.

The height measuring machine needs to move the base along the surface of the surface plate in order to bring the probe closer to the measurement point of the workpiece. For example, Patent Literature 1 discloses a height measuring instrument provided with an air levitation means for ejecting air from a base onto a surface plate to levitate the base relative to the surface plate. This height measuring instrument is equipped with a handle equipped with a switch that controls the supply/cutoff of air to the air levitation means. can be moved.

Japanese Patent No. 4009379

Although the height measuring machine can measure the height of the workpiece with high accuracy, the amount of movement along the surface of the surface plate (the amount of planar movement) cannot be determined. For this reason, even if the place to hit the probe is wrong in the plane direction, it cannot be detected and warned.

In addition, when measuring a work in two axial directions (two-dimensional measurement) with a height measuring machine, first, the work is placed on a surface plate and then measured in the first axial direction. The workpiece is rotated by 90 degrees and measured in the second axial direction. In such a two-dimensional measurement, the order of visiting the measurement points in the measurement in the second axis direction must be exactly the same as the order of visiting the measurement points in the measurement in the first axis direction, otherwise correspondence between the measurement points cannot be obtained.

In addition, the operator may move the probe according to the part program even for the measurement using the part program that can measure and analyze a plurality of items by automatic measurement. At the time of measurement in the second axis direction of such two-dimensional measurement, or at the time of measurement by a part program, it is desirable to guide the operator to move the probe.

However, if the position in the plane direction is not known, the movement operation of the probe cannot be guided. In particular, when the workpiece is rotated in two-dimensional measurement, it is easy to induce a mistake in the destination of the probe. Therefore, it is required to be able to guide the moving operation of the probe.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a height measuring instrument capable of detecting the amount of movement along the surface of the surface plate and guiding the movement of the probe.

One aspect of the present invention is a height measuring instrument for measuring the height of a workpiece, comprising: a base mounted movably along a surface plate surface of a surface plate; a slider that can move up and down along the surface and has a probe; a displacement sensor that detects the amount of displacement in the height direction of the slider; a position detector that detects the horizontal position of the base along the surface plate surface; and a controller that associates the detected horizontal position with the amount of displacement detected by the displacement sensor.

According to such a configuration, when the base is moved along the surface of the platen, the horizontal position of the base can be detected by the position detection section. As a result, not only the position of the probe in the height direction but also the position (horizontal position) along the surface of the platen can be obtained, and the position of the probe in at least two axial directions can be grasped.

In the above height measuring instrument, it is preferable that the position detection section uses a non-contact sensor that detects the horizontal position in a non-contact manner. As a result, the contact resistance between the base and the platen surface does not increase even if the position detection section is provided. Moreover, the surface plate does not need to have a special function, and even a normal surface plate can be used to obtain a horizontal position along the surface of the surface plate of the base.

In the above height measuring instrument, the position detection section has a first sensor and a second sensor, and the control section measures the height along the surface of the surface plate of the probe based on the detection values of the first sensor and the second sensor. Horizontal position and angle may be computed. This makes it possible to obtain both the amount of translation and the angle of rotation of the base from the two sensors that obtain the amount of translation along the platen surface.

In the above height measuring machine, the position detection unit has a first sensor, a second sensor, and a third sensor, and the control unit detects at least two of the first sensor, the second sensor, and the third sensor. The horizontal position and angle of the probe along the platen surface may be calculated based on the values. As a result, even if one sensor is located near the center of rotation, the translation amount and the rotation angle can be obtained based on the detection values of the other two sensors.

The height measuring instrument further includes a display unit, and the control unit causes the display unit to display positional information about the current position of the probe along two axes as an image. In addition, the control unit causes the display unit to display, as an image, positional information along the two axes regarding the position measured by the probe and information regarding the measurement direction.

In addition, the control unit causes the display unit to display, as an image, positional information along the two axes regarding the location to be measured next. In addition, the control unit causes the display unit to display the positional information along the two axes regarding the measurement order as an image.

Also, the control unit causes the display unit to display an image corresponding to the workpiece. In addition, the control unit causes the display unit to display the direction and distance for moving the probe from the current measurement position to the next measurement position. Display of these images can guide the movement of the probe in the measurement.

In the above height measuring instrument, the control unit outputs a predetermined warning when the amount of deviation between the preset measurement position along the two axes and the position of the probe along the two axes exceeds an allowable range. may be performed. This makes it possible to notify with a warning that the probe has been moved to the wrong measurement point.

It is a perspective view which illustrates the height measuring machine which concerns on this embodiment. FIG. 4 is a schematic diagram illustrating the bottom surface of the base; 5 is a flow chart illustrating a height measuring method using a height measuring device; It is a schematic diagram which shows an example of a workpiece|work. (a) and (b) are schematic diagrams showing an example of two-dimensional measurement. (a) to (c) are schematic diagrams showing examples of two-dimensional analysis. (a) to (d) are schematic diagrams showing display examples during two-dimensional measurement. (a) to (d) are schematic diagrams showing display examples during two-dimensional measurement. (a) to (d) are schematic diagrams showing display examples for guiding the order of measurement. (a) to (d) are schematic diagrams showing display examples for guiding the order of measurement. (a) to (d) are schematic diagrams showing an example of graphic representation of a workpiece. (a) to (d) are schematic diagrams showing an example of graphic representation of a workpiece.

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of the present invention will be described below with reference to the drawings. In the following description, the same members are denoted by the same reference numerals, and the description of members that have already been described will be omitted as appropriate.

[Configuration of height measuring instrument]
FIG. 1 is a perspective view illustrating a height measuring device according to this embodiment.
FIG. 2 is a schematic diagram illustrating the bottom surface of the base.
A height measuring machine 1 according to this embodiment is a device that measures the height of a work placed on a surface plate 10 . The height measuring instrument 1 includes a base 11 mounted movably along a surface plate surface 10a of a surface plate 10, a column 12 erected on the base 11, and a probe mounted vertically along the column 12. 13, and a displacement sensor 45 for detecting the amount of displacement of the slider 14 in the height direction.

Further, the height measuring machine 1 detects the horizontal position of the base 11 along the surface plate surface 10a of the base 11, the horizontal position detected by the position detector 30, and the displacement amount detected by the displacement sensor 45. and a control unit 41 to be associated.

In this embodiment, the direction along the normal to the surface plate surface 10a is the Z direction, one of the directions perpendicular to the Z direction is the X direction, and the direction perpendicular to both the Z and X directions is the Y direction. Also, the Z direction is also referred to as the height direction and the vertical direction. A position along the XY plane is also called a horizontal position.

The bottom surface of the base 11 is provided with an air bearing 21 for injecting air for floating toward the platen surface 10a to float the base 11 with respect to the platen surface 10a. A grip portion 15 is provided on the back side of the column 12 on the base 11 . A display operation unit 18 is rotatably provided on the upper surface of the grip unit 15 and has a display unit 16 such as an LCD and a key input unit 17 on the surface.

In such a height measuring instrument 1, the air bearing 21 includes a plurality of air pads 21A provided on the lower surface of the base 11 (the surface facing the surface plate surface 10a) and having air ejection holes, and air is supplied to the air pads 21A. A compressor (not shown, but installed under the grip part 15) and the like are provided. The air bearing 21 blows air from the base 11 toward the platen surface 10a by changing the rotation speed of the motor that drives the compressor, and floats the base 11 with a predetermined gap from the platen surface 10a. Let

The operator presses, for example, a button 15a provided on the grip portion 15 to operate the air bearing 21, thereby floating the base 11 from the surface plate surface 10a. Then, while the base 11 is floating, the height measuring machine 1 is moved along the surface plate surface 10a by holding the grip part 15. - 特許庁Since the base 11 is floated by the air bearing 21, the height measuring instrument 1 can be smoothly moved in a plane.

As shown in FIG. 2, the position detection unit 30 has two sensors (a first sensor 31 and a second sensor 32) provided on the bottom surface of the base 11, for example. It is preferable that the first sensor 31 and the second sensor 32 are non-contact sensors that detect the horizontal position in a non-contact manner. Accordingly, even if the first sensor 31 and the second sensor 32 are provided on the bottom surface of the base 11, the contact resistance between the base 11 and the platen surface 10a does not increase during movement.

An optical two-dimensional displacement sensor, for example, is used for the first sensor 31 and the second sensor 32, which are non-contact sensors. From each of the first sensor 31 and the second sensor 32, the amount of displacement in the X direction and the Y direction (the amount of relative movement with respect to the surface plate 10) is output. It is preferable to arrange the first sensor 31 and the second sensor 32 as far apart as possible.

A displacement amount from each of the first sensor 31 and the second sensor 32 is sent to the control unit 41 . The control unit 41 calculates the displacement of the tip of the probe 13 (displacement along the XY plane) and the handle of the probe 13 by geometric calculation based on the displacement amounts sent from each of the first sensor 31 and the second sensor 32. A change in orientation (a change in angle along the XY plane in the extending direction of the handle of the probe 13) can be calculated.

Since the first sensor 31 and the second sensor 32 are provided with a circuit module that calculates and outputs the displacement amount, the displacement amount can be sent to the control section 41 as it is. Therefore, the control unit 41 is not burdened with calculating the amount of displacement. Although the detection accuracy of the position detection unit 30 is not so high, the detection accuracy is sufficient to guide the position of the probe 13 .

In the height measuring instrument 1 according to this embodiment, the horizontal position of the base 11 can be detected by the position detection section 30 when the base 11 is moved along the surface plate surface 10a. Thereby, not only the position of the probe 13 in the height direction but also the position (horizontal position) along the surface plate surface 10a can be obtained, and the position of the probe 13 in at least two axial directions (Z direction and at least one of the X and Y directions) can be obtained. direction).

[Another example of the position detector]
If a sensor capable of detecting parallel movement and rotational movement (center position and angle) of the base 11 is used as the position detection unit 30, one sensor will suffice. On the other hand, three optical sensors may be used as the position detection section 30 . That is, when using an optical sensor that detects only the amount of relative translation, if the vicinity of the optical sensor is the center of rotation, sufficient detection accuracy may not be obtained. Therefore, by arranging the three optical sensors as far apart as possible, even if the vicinity of one of the optical sensors is the center of rotation, at least the other two optical sensors are far from the center of rotation. high detection accuracy. Therefore, the control unit can calculate the displacement and the angle change based on the displacement detected by the two sensors away from the center of rotation.

Also, a laser tracker may be used as the position detection unit 30 . A laser tracker tracks the movement of a reflector (target) provided on an object to be measured to obtain the spatial coordinates of the object. When a laser tracker is used as the position detection unit 30, a reflector for reflecting laser light is attached to the height measuring device 1 in advance. A laser tracker body arranged outside the height measuring instrument 1 irradiates a laser beam toward the reflector, and receives the reflected light from the reflector so as to follow it. Thereby, the horizontal position of the base 11 in the height measuring device 1 can be obtained.

When using a laser tracker, two reflectors may be attached in order to grasp the rotation (orientation) of the height measuring device 1 . Also, it is preferable to place a reflector near the top of the height measuring instrument 1 so that the laser tracker main body looks down on the reflector.
Also, when the height measuring device 1 is used without much rotation (for example, when used within a rotation range of about ±60 degrees), the laser tracker body may be arranged at the end of the surface plate surface 10a.

〔Measuring method〕
Next, the measuring method will be explained.
FIG. 3 is a flowchart illustrating a height measuring method using a height measuring device.
First, as shown in step S101, a workpiece W to be measured is placed on the surface plate 10a. At this time, a reference position (origin) for measurement on the workpiece W is set. The reference position can be set by bringing the probe 13 into contact with the reference position of the workpiece W and detecting the position. When the reference position is set, the measurement point is determined based on the design data of the workpiece W.

Next, as shown in step S102, the height measuring machine 1 is planarly moved along the surface of the platen 10a, and the probe 13 is aligned with the measurement position of the workpiece W. Then, as shown in FIG. The plane movement of the height measuring machine 1 is carried out by holding the grip part 15 and moving it to a desired position while the base 11 is floated by injecting floating air from the air bearing 21 by the operation of the operator. After the position of the probe 13 is aligned with the measurement point, the jetting of air for floating from the air bearing 21 is stopped, and the base 11 is landed on the surface plate surface 10a.

When the height measuring instrument 1 is moved in a plane, the horizontal position is detected by the position detection section 30 as shown in step S103. The position detector 30 detects the amount of movement of the base 11 along the platen surface 10 a and sends it to the controller 41 . The controller 41 calculates the displacement of the tip of the probe 13 based on the amount of movement sent from the position detector 30 .

The control unit 41 can obtain the coordinates of the probe 13 with respect to a preset reference position (origin) from the calculated displacement of the tip of the probe 13 . The coordinates are at least one of X-direction coordinates (X-coordinates) and Y-direction coordinates (Y-coordinates) on the XY plane.

Further, when the first sensor 31 and the second sensor 32 are provided as the position detection unit 30, the control unit 41 calculates the change in the orientation of the handle of the probe 13 based on the amount of movement detected by the two sensors. can be done.

Next, as shown in step S104, it is determined whether the position of the probe 13 is within the allowable range. By placing the workpiece W and setting the reference position, the allowable range of the position of the probe 13 at the measurement point is grasped. Then, the probe 13 is moved to determine whether or not it is within the allowable range. The allowable range is the allowable range of deviations between preset measurement positions along the two axes and the position of the probe 13 along the two axes. If the position of the probe 13 is not within the allowable range, a warning is issued as shown in step S105, and the process returns to step S102 to return to the planar movement of the height measuring instrument 1. FIG.

If the position of the probe 13 is within the allowable range, height measurement is performed as shown in step S106. That is, the probe 13 is brought into contact with the measurement location of the workpiece W, and the value of the displacement sensor 45 at this time (coordinate in the Z direction: Z coordinate) is detected.

Next, as shown in step S107, the horizontal position is associated with the height. That is, the height (Z coordinate) of the measurement point of the workpiece W detected in the previous step S106 is associated with the horizontal position (at least one of the X coordinate and the Y coordinate) of the probe 13 detected in step S103. Remember.

Next, as shown in step S108, it is determined whether or not there is a next measurement point. If there is a next measurement point, the process returns to step S102 and the subsequent processes are repeated. If there is no next measurement point, the measurement is terminated.

In this way, by knowing the horizontal position of the probe 13 when the height measuring device 1 is moved in the plane direction, it is possible to issue a warning when the probe 13 is moved to an erroneous measurement position. . In addition, it is possible to guide the measuring point, which will be described later.
In the above example, a warning is issued when the amount of deviation between the measurement position and the position of the probe 13 is not within the allowable range, but the direction of the handle of the probe 13 exceeds the preset allowable angle. A warning may be given in such a case.

[Example of two-dimensional measurement]
Next, an example of two-dimensional measurement using the height measuring instrument 1 according to this embodiment will be described.
FIG. 4 is a schematic diagram showing an example of a work.
FIGS. 5A and 5B are schematic diagrams showing an example of two-dimensional measurement.
FIGS. 6A to 6C are schematic diagrams showing examples of two-dimensional analysis.
Here, for convenience of explanation, a case where two-dimensional measurement is performed on a workpiece W as shown in FIG. 4 will be taken as an example. The workpiece W is provided with a circular first hole CR1, second hole CR2 and third hole CR3. When two-dimensional measurement is performed, the front surface of the workpiece W is defined as the XZ plane. The center coordinates of the first hole CR1 are (X1, Z1), the center coordinates of the second hole CR2 are (X2, Z2), and the center coordinates of the third hole CR3 are (X3, Z3). The diameter of the first hole CR1 is D1, the diameter of the second hole CR2 is D2, and the diameter of the third hole CR3 is D3.

To perform two-dimensional measurement of such a work W, first, as shown in FIG. 5A, measurement is performed along the first axis (for example, Z axis) of the work W. That is, the probe 13 is brought into contact with the upper end and the lower end of the inner diameter of the first hole CR1, and the Z coordinate (Z1) of the center is obtained from these values. Similarly, the Z coordinate (Z2) of the center of the second hole CR2 and the Z coordinate (Z3) of the center of the third hole CR3 are obtained. At this time, the diameters D1, D2 and D3 of each hole can also be obtained from the measured values.

Next, a measurement along the second axis (eg, X-axis) of the workpiece W is performed. To measure along the X axis, rotate the workpiece W by 90 degrees. In the example shown in FIG. 5, it is rotated counterclockwise by 90 degrees. As a result, the workpiece W is arranged as shown in FIG. 5(b). By rotating the work W by 90 degrees, the X-axis direction of the work W becomes the vertical direction in the height measuring device 1, and measurement along the X-axis can be performed. In this state, the probe 13 is brought into contact with the upper end and the lower end of the inner diameter of the first hole CR1, and the X coordinate (X1) of the center is obtained from these values. Similarly, the X coordinate (X2) of the center of the second hole CR2 and the X coordinate (X3) of the center of the third hole CR3 are obtained.

By rotating the workpiece W by 90 degrees in this manner, the height measuring device 1 can obtain two-dimensional coordinates along two axes in the ZX direction. By performing two-dimensional measurement, various two-dimensional analyzes as shown in FIGS. 6(a) to (c) can be performed.

For example, as shown in FIG. 6A, an intersection angle CA of a line connecting the origin O and the central coordinates of the holes CR11 and CR12 can be obtained. Further, as shown in FIG. 6B, two-dimensional coordinates along two axes in the ZX direction are defined with the center coordinates of a predetermined hole (for example, hole CR21) among the plurality of holes CR21, CR22, and CR23 as the origin. It can be converted to a value based on X'Z' coordinates. Also, as shown in FIG. 6(c), the center coordinates and diameter DD of the pitch circle CR31 passing through the center of each hole can be analyzed.

[Display example]
Next, a display example of the display unit 16 in the height measuring instrument 1 according to this embodiment will be described.
Since the height measuring instrument 1 according to the present embodiment can detect the position of the probe 13 along two axes, it is possible to perform various guide displays regarding the measurement points on the display section 16 . The guide display is controlled by the controller 41 .

A display example when two-dimensionally measuring four circular holes provided in the work W will be described below.
FIGS. 7(a) to 8(d) are schematic diagrams showing display examples during two-dimensional measurement.
FIGS. 7(a) to 8(d) show the transition of graphic screens displayed on the display unit 16. FIG.
Various illustrated images are displayed on the graphic screen G. FIG. In the illustrated image G1 of the arrow, the direction of the arrow indicates the Z-axis, and the line orthogonal to the direction of the arrow indicates the X-axis. A cross-line cursor G2 indicates the current position of the tip of the probe 13. FIG. The illustrated images G3A to G3D marked with a circle show the measured holes. A horizontal line in the circle indicates that position detection was performed with high accuracy in the direction perpendicular to the line, and position detection was performed with low accuracy in the direction parallel to the line. The illustrated images G3A to G3D marked with circles may reflect the hole diameter, or may be drawn on an accurate scale. However, if the image is too small and collapses, it may be enlarged and displayed to the extent that it does not collapse.

In the measurement, the operator places the work W on the surface plate surface 10a and detects the horizontal position by applying the probes 13 to two positions (two positions separated as much as possible in the horizontal direction) on the front surface of the work W. . This allows the height measuring device 1 to recognize the X-axis direction. Next, the operator applies the probe 13 to the left end of the work W to detect the horizontal position. The height measuring machine 1 uses this detection position as the origin in the X-axis direction.

First, when the first hole is measured, as shown in FIG. 7(a), an illustrated image G3A with a horizontal line and a circle is displayed corresponding to the position of the first hole. Since the height measuring instrument 1 according to the present embodiment can detect the ZX coordinates of the measurement position by the probe 13, it is possible to grasp the position of the measured hole on the ZX coordinates. The operator can recognize that the lower left hole of the work W has been measured from the positional relationship between the illustrated image G1 of the arrow indicating the ZX axis and the illustrated image G3A of the circle mark on the graphic screen G.

Next, when the second hole is measured, as shown in FIG. 7B, an illustrated image G3B with a horizontal line and a circle is displayed corresponding to the position of the second hole. Similarly, when the third hole is measured, as shown in FIG. After the measurement, as shown in FIG. 7(d), an illustrated image G3D with a horizontal line in the circle is displayed corresponding to the position of the fourth hole.

When the four holes have been measured, illustrated images G3A to G3D of horizontal lines with circles corresponding to the positions of the four holes are displayed as shown in FIG. 7(d). The operator can refer to the illustrated images G3A to G3D to recognize that the four holes have been measured and that only the Z-axis direction has been measured with high accuracy.

Next, the workpiece W is rotated counterclockwise by 90 degrees. After that, the operator applies the probes 13 to two points on the front surface of the work W (two points separated as much as possible in the horizontal direction) to detect the horizontal position. Thereby, the height measuring device 1 can recognize the Z-axis direction. Next, the operator applies the probe 13 to the left end of the work W to detect the horizontal position. The height measuring machine 1 uses this detection position as the origin in the Z-axis direction.

As the workpiece W is rotated 90 degrees counterclockwise, the graphic screen G is displayed in a state rotated 90 degrees counterclockwise with respect to the image shown in FIG. 7(d) (FIG. 8(a) reference).

Then, as the first measurement, the bottom left hole is measured. When the measurement is performed, as shown in FIG. 8(a), an illustrated image G3B of horizontal and vertical lines is displayed in circles corresponding to the position of the first hole. That is, a horizontal line is added to the ○ mark corresponding to the hole where the measurement was performed. As a result, a vertical line and a horizontal line (cross) are shown in the ○ mark corresponding to the hole where the measurement was performed. From this, it can be seen that this hole was measured with high precision in both the Z direction and the X direction. Also, the intersection point of the cross within the circle indicates the center of the hole.

Next, when the upper left hole is measured as a second measurement, an illustrated image G3C of a horizontal line and a vertical line is displayed with a circle corresponding to the position of the second hole as shown in FIG. 8(b). Similarly, when the upper right hole is measured as the third, as shown in FIG. When the lower right hole is measured as the first, as shown in FIG. 8(d), an illustrated image G3A of a horizontal line and a vertical line is displayed with a circle corresponding to the position of the fourth hole.

In this way, by referring to the display state of the vertical and horizontal lines within the circles displayed corresponding to the position of the hole, the operator can measure the hole at the measurement point in two directions or in one direction. It is possible to distinguish whether or not the measurement was performed. Therefore, the operator can easily recognize that the hole in which only the vertical line is displayed within the circle should be measured.

Note that in the present embodiment, the X-axis measurement order may not be the same as the Z-axis measurement order. That is, since the plane coordinates of the probe 13 can be detected when performing measurement, it is possible to grasp which of the plurality of holes is being measured. Therefore, even if the order of measurement on the Z-axis and the measurement on the X-axis are different, there is a correspondence between which hole is measured, and there is no need to determine the order of measurement.

In addition, since it is possible to grasp the positions of multiple holes during Z-axis measurement, if you try to measure a different measurement point during X-axis measurement than during Z-axis measurement (the position of probe 13 is different from that during Z-axis measurement) If you attempt to measure a position beyond a given tolerance from the position), output a warning. This makes it possible to avoid measuring the wrong location.

FIGS. 9(a) to 10(d) are schematic diagrams showing display examples for guiding the measurement order.
For example, when the workpiece W is measured for the first time, the measurement points are recorded (teaching measurement). When measuring another workpiece W having the same shape, repeat measurement can be performed by reproducing the measurement sequence recorded in this teaching measurement.
In the repeat measurement, since the measurement points are known in advance, the measurement order can be guided by a graphic screen G as shown in FIGS. 9(a) to 10(d).

For example, as shown in FIG. 9A, when the measurement along the Z-axis of the lower left hole of the workpiece W is completed, the illustrated image G3B of the ○ mark indicating the upper left hole is highlighted (for example, displayed thickly). ) is done. This makes it possible to inform that the next measurement point is the upper left hole.

Similarly, as shown in FIGS. 9(b) to 9(c), when one hole is measured, an illustrated image G3C with a circle corresponding to the position of the hole to be measured next is highlighted. . When the measurement of the four holes is completed and there is no hole to be measured next, as shown in FIG.

As shown in FIGS. 10(a) to 10(d), the measurement along the X-axis is displayed similarly to the measurement along the Z-axis. This allows the operator to easily and accurately grasp the measurement order of the holes.

FIGS. 11(a) to 12(d) are schematic diagrams showing examples of graphic display of the workpiece.
When there is drawing data of the work W, the drawing data of the work can be superimposed on the graphic screen G.
FIGS. 11(a) to 11(d) show display examples when performing measurements along the Z-axis. In FIGS. 12(a)-(d), the display is shown for measurements along the X-axis. 11(a) to 12(d) is an image SD showing the contour of the workpiece W. The two-dot chain line shown in FIGS.

When measuring along the Z-axis, rotating the workpiece W by 90 degrees counterclockwise, and measuring along the X-axis, the contour image SD of the workpiece W is also rotated counterclockwise by 90 degrees. Become. By displaying the image SD showing the contour of the work W, the operator can easily grasp the positional relationship between the contour of the work W and the hole at the measurement point.

In addition, since the image SD of the contour of the workpiece W is displayed, it becomes easier to grasp the positions of the plurality of holes, so even if it is a one-dimensional measurement that is not a repeat measurement, the guidance effect to the next measurement point can be enhanced. can.

As described above, according to the embodiment, the amount of movement of the height measuring machine 1 along the surface plate surface 10 a can be detected, and the spatial position information of the probe 13 can be grasped by the height measuring machine 1 . In addition, the movement operation of the probe 13 by the operator can be guided. Further, when two-dimensional measurement is performed, even if the order of measurement in the first axis measurement and the order of measurement in the second axis measurement do not match, it is possible to associate the measurement points with the measured values. In addition, it is possible to detect an error in the measurement location and output a warning.

[Modification of Embodiment]
Although the present embodiment has been described above, the present invention is not limited to these examples. For example, as a guide display indicating the order of measurement, the direction and distance to move the probe 13 from the current measurement position to the next measurement position may be displayed as an arrow image on the display unit 16 . Alternatively, the orientation of the handle of the probe 13 may be grasped based on the amount of movement detected by the position detection unit 30, and guide display may be performed according to the orientation of the handle of the probe 13. FIG. In addition, additions, deletions, and design changes made by those skilled in the art to the above-described embodiments, and combinations of features of the embodiments as appropriate, do not include the gist of the present invention. to the extent possible are included within the scope of the present invention.

DESCRIPTION OF SYMBOLS 1... Height measuring machine 10... Surface plate 10a... Surface plate surface 11... Base 12... Post 13... Probe 14... Slider 15... Grip part 15a... Button 16... Display part 17... Key input part 18... Display operation part 21... Air Bearing 21A Air pad 30 Position detector 31 First sensor 32 Second sensor 41 Control unit 45 Displacement sensor CA Crossing angle CR1 First hole CR2 Second hole CR3 Third hole CR11, CR12, CR21, CR22, CR23 Hole CR31 Pitch circle DD Diameter G Graphic screen G1 Illustrated image G2 Cross line cursor G3A, G3B, G3C, G3D Illustrated image SD Image O Origin W Workpiece

Claims (11)

A height measuring instrument for measuring the height of a workpiece,
a base movably mounted along the surface of the surface plate;
a pillar erected on the base;
a slider provided so as to move up and down along the support and having a probe;
a displacement sensor that detects the amount of displacement of the slider in the height direction;
a position detection unit that detects a horizontal position of the base along the surface plate;
a control unit that associates the horizontal position detected by the position detection unit with the displacement amount detected by the displacement sensor;
with
The position detection unit has a first sensor and a second sensor,
The first sensor and the second sensor are provided on the bottom surface of the base and detect the amount of relative movement of the sensor relative to the surface plate in a non-contact manner,
The height measuring machine, wherein the control unit calculates a horizontal position and an angle of the probe along the surface of the surface plate based on detection values of the first sensor and the second sensor. A height measuring instrument for measuring the height of a workpiece,
a base movably mounted along the surface of the surface plate;
a pillar erected on the base;
a slider provided so as to move up and down along the support and having a probe;
a displacement sensor that detects the amount of displacement of the slider in the height direction;
a position detection unit that detects a horizontal position of the base along the surface plate;
a control unit that associates the horizontal position detected by the position detection unit with the displacement amount detected by the displacement sensor;
with
The position detection unit has a first sensor, a second sensor, and a third sensor,
The control unit calculates the horizontal position and angle of the probe along the surface plate surface based on the detection values of at least two of the first sensor, the second sensor, and the third sensor. height measuring machine. further equipped with a display,
3. The height measuring machine according to claim 1, wherein the control unit causes the display unit to display positional information along two axes regarding the current position of the probe as an image. A height measuring instrument for measuring the height of a workpiece,
a base movably mounted along the surface of the surface plate;
a pillar erected on the base;
a slider provided so as to move up and down along the support and having a probe;
a displacement sensor that detects the amount of displacement of the slider in the height direction;
a position detection unit that detects a horizontal position of the base along the surface plate;
a control unit that associates the horizontal position detected by the position detection unit with the displacement amount detected by the displacement sensor;
a display unit;
with
3. The height measuring machine according to claim 1 , wherein the control unit causes the display unit to display positional information along two axes regarding the current position of the probe as an image. 5. The height measuring instrument according to claim 4, wherein the control unit causes the display unit to display, as an image, positional information along two axes regarding the position measured by the probe and information regarding the measurement direction. 6. The height measuring instrument according to claim 4, wherein the control unit causes the display unit to display positional information along two axes regarding a location to be measured next as an image. The height measuring machine according to any one of claims 4 to 6, wherein the control unit causes the display unit to display positional information along two axes regarding the measurement order as an image. 8. The height measuring machine according to any one of claims 4 to 7, wherein the control section causes the display section to display an image corresponding to the workpiece. further equipped with a display,
3. The height measuring instrument according to claim 1, wherein the control unit causes the display unit to display the direction and distance to move the probe from the current measurement position to the next measurement position. A height measuring instrument for measuring the height of a workpiece,
a base movably mounted along the surface of the surface plate;
a pillar erected on the base;
a slider provided so as to move up and down along the support and having a probe;
a displacement sensor that detects the amount of displacement of the slider in the height direction;
a position detection unit that detects a horizontal position of the base along the surface plate;
a control unit that associates the horizontal position detected by the position detection unit with the displacement amount detected by the displacement sensor;
a display unit;
with
3. The height measuring instrument according to claim 1, wherein the control unit causes the display unit to display the direction and distance to move the probe from the current measurement position to the next measurement position. A height measuring instrument for measuring the height of a workpiece,
a base movably mounted along the surface of the surface plate;
a pillar erected on the base;
a slider provided so as to move up and down along the support and having a probe;
a displacement sensor that detects the amount of displacement of the slider in the height direction;
a position detection unit that detects a horizontal position of the base along the surface plate;
a control unit that associates the horizontal position detected by the position detection unit with the displacement amount detected by the displacement sensor;
with
The control unit performs control to output a predetermined warning when a deviation amount between a preset measurement position along two axes and a measurement position along two axes measured by the probe exceeds an allowable range. 3. The height measuring instrument according to claim 1 or 2, characterized by:

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