JP7259809B2 - Storage plate and storage device - Google Patents

Description

The present invention relates to storage plates and storage devices.

A method for storing parts is described in Patent Document 1, for example. In Patent Document 1, a storage plate having a plurality of storage holes is prepared, and a plurality of parts are put on the storage plate. A method is described for swinging a plurality of parts into respective storage holes as they are moved on the storage plate by directional vibration.

WO2018/105591

In the method described in US Pat. No. 6,200,000, the component on the storage plate slides on the surface of the storage plate. Therefore, the plurality of parts move as a mass while being rolled and agitated on the storage plate repeatedly while being physically rubbed against the surface of the storage plate. Then, of the moving parts, those that are aligned with the storage hole are put into the storage hole.

In the above method, the multiple parts are moved on the containment plate by vibration. When parts move on the storage plate due to vibration on the storage plate, there is a tendency for the parts to move toward and gather at a specific position on the storage plate due to the effects of the natural vibration of the vibration. Typically there is a tendency for the parts to cluster near the center on the containment plate.
If the parts gather at a specific position on the storage plate, the parts will not be sufficiently stored in the storage holes. It becomes necessary.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a storage plate and a storage device in which the gathering of parts biased to a specific position is reduced.

A storage plate of the present invention is a storage plate having a first main surface, in which a plurality of storage holes for storing components and a plurality of gas passages for passing gas are provided on the first main surface, Air permeability in the storage hole is lower than air permeability in a portion of the first main surface excluding the storage hole, and the first main surface extends from a central region of the first main surface to a peripheral region surrounding the central region. or a second component movement path from the peripheral region of the first major surface to the central region.

The storage device of the present invention comprises the storage plate of the present invention, in which the components placed on the first main surface have the second component movement path, and the rotation axis located in the central region of the storage plate. a rotation drive mechanism for rotating the storage plate.

Advantageous Effects of Invention According to the present invention, it is possible to provide a storage plate and a storage device in which a collection of parts biased to a specific position is reduced.

FIG. 1 is a top view schematically showing an example of a storage device and a storage plate according to the first embodiment. FIG. 2 is a cross-sectional view of the storage device and storage plate shown in FIG. 1 taken along line II-II. FIG. 3 is a cross-sectional view schematically showing an example of a storage device and a storage plate according to the second embodiment. FIG. 4 is a cross-sectional view schematically showing an example of a storage device and a storage plate according to the third embodiment. FIG. 5 is a cross-sectional view schematically showing another example of the storage device and the storage plate according to the third embodiment. FIG. 6 is a cross-sectional view schematically showing an example of a storage device and a storage plate according to the fourth embodiment. FIG. 7 is a cross-sectional view schematically showing another example of the storage device and the storage plate according to the fourth embodiment. FIG. 8 is a top view schematically showing an example of a storage device and a storage plate according to the fifth embodiment.

The storage plate and storage device of the present invention will now be described.
However, the present invention is not limited to the following configurations, and can be appropriately modified and applied without changing the gist of the present invention. Combinations of two or more of the individual desirable configurations described below are also part of the present invention.

(First embodiment)
Configurations of a storage device and a storage plate according to the first embodiment and its modification of the present invention will be described.

FIG. 1 is a top view schematically showing an example of a storage device and a storage plate according to the first embodiment, and FIG. 2 is a cross-sectional view of the storage device and the storage plate shown in FIG. 1 taken along line II-II.
As shown in FIGS. 1 and 2, the storage device 1 comprises a storage plate 11 and a main chamber 81 . Furthermore, the enclosure 1 comprises a gas supplier 82 and a controller 85 .
The storage device 1 also has a vibration mechanism (not shown) for vibrating the storage plate 11, and the vibration of the storage plate 11 can move the parts on the storage plate. The controller 85 controls the amount of gas generated from the gas supplier 82 and controls the degree of vibration in the vibration mechanism. Also, if the storage device has a blower, which will be described later, it controls the blowing speed of the gas from the blower. Also, if the storage device has a rotation drive mechanism, which will be described later, the rotation speed of the rotation drive mechanism is controlled.

The storage plate 11 is provided with a plurality of storage holes 13 each capable of storing a component 101 (see FIG. 2). Note that FIG. 1 does not show all the storage holes 13 that are actually provided, but schematically shows them. Each storage hole 13 has an opening 14 , a bottom surface 15 and side surfaces 16 . When the component 101 has a rectangular parallelepiped shape, the storage hole 13 preferably has a substantially rectangular shape in accordance with the shape of the component 101 when viewed from above the first main surface, and the bottom surface 15 has a rectangular shape. is preferred.

The plurality of storage holes 13 are arranged in a grid pattern along a first direction (row direction) along the first main surface 18 and along a second direction (column direction) perpendicular to the first direction along the first main surface 18 . is provided. Furthermore, a frame portion projecting from the first main surface 18 may be provided on the peripheral edge portion of the first main surface 18 of the storage plate 11 . The frame can prevent the component 101 placed on the first main surface 18 of the storage plate 11 from falling off from the storage plate 11 .

Although not shown, the storage plate 11 may have a structure in which an upper plate portion formed with a through hole forming the side surface of the storage hole 13 and a lower plate portion forming the bottom surface of the storage hole 13 are combined. good. If the requirements for the size of the part 101 are different, the optimum size of the storage hole 13 for the part 101 will also be different. By preparing different types of upper plate portions, it is possible to quickly respond to changes in the dimensions of the component 101 using a common lower plate portion.

In this embodiment, the parts 101 are placed one in each storage hole 13 . When the parts 101 transferred into the storage hole 13 are parts as finished products, a plurality of the parts 101 are aligned in a grid on the storage plate 11 and held so that the parts can be measured or packed. Convenience is provided in feeding to the process. Further, when the component 101 placed in the storage hole 13 is a chip-shaped electronic component body before the external electrodes are formed, a plurality of electronic component bodies are aligned and held on the storage plate 11. , the supply of the component body to the process for forming the external electrodes is facilitated.

As shown in FIG. 2, the storage device 1 can comprise a main chamber 81 which also serves as a base for supporting the storage plate 11 . A main chamber 81 having a main space 86 supports the containment plate 11 . The containment plate 11 is supported by the main chamber 81 so that the main space 86 of the main chamber 81 forms an internal space closed by the second main surface 19 of the containment plate 11 .

When storing components in the storage plate, first, a plurality of components 101 are placed on the first major surface 18 of the storage plate 11 .
As an example, if the containment plate 11 has the containment holes 13 arranged in a grid pattern having a plurality of rows and a plurality of columns, the dimensions of the rectangular openings 14 of the containment holes 13 are It is preferable that the openings 14 have a square shape with one side of 0.65 mm or more and 0.80 mm or less, and that the interval between the openings 14 is 0.85 mm or more. For such storage holes 13 , approximately 1.5 times the number of storage holes 13 of components 101 are placed on the first major surface 18 of the storage plate 11 .

Note that the component 101 handled in this embodiment is in the form of a chip having a substantially rectangular parallelepiped shape. As an example, the component 101 has a substantially square planar dimension of 0.6 mm×0.6 mm. At this time, as an example, the size of the rectangular opening 14 of the storage hole 13 is a square shape with a side of 0.65 mm when viewed from the top of the first main surface 18, and the interval between the openings 14 is a square shape. 0.85 mm, which is longer than the diagonal length of the chip.

Air supplied from a gas supplier 82 through the main chamber 81 is discharged from a plurality of gas passages 12 provided in the first major surface 18 of the containment plate 11 .
Also, the air permeability in the storage hole 13 is lower than the air permeability in the portion of the first main surface 18 excluding the storage hole 13 . In this way, the first velocity of air exiting the containment hole 13 is less than the second velocity of air exiting the first major surface 18 surrounding the containment hole 13, so that this relative difference in flow Part 101 is easier to enter the storage hole.
The storage plate 11 preferably has a plurality of gas passages 12 formed by a plurality of through-holes connected to the first main surface 18 and the second main surface 19 . Furthermore, a structure having a porous portion in which a large number of pores are interconnected is preferable.
Preferably, the porous portion is provided on at least the first main surface 18 and part of the storage cavity 13 and can be connected to the main space 86 of the main chamber 81 . It is most preferable that the storage plate 11 is made of a porous material, because the structure is simple and the storage plate 11 is easy to manufacture.

In the storage plate 11 shown in FIG. 2, the surface position in the normal direction of the first main surface 18 continuously changes, and the cross-sectional shape of the first main surface 18 is such that the surface position of the central region of the first main surface 18 is It has a convex shape that is high and the surface position of the peripheral region is low. In other words, there is a difference between the surface position of the central region of the first main surface 18 and the surface position of the peripheral region in the normal direction of the first main surface 18, and the surface position is different from a high surface position to a low surface position. It is configured to have a component movement path due to the difference.
With such a configuration, the components placed on the first principal surface 18 are separated from the central region due to the difference between the surface position of the central region and the surface position of the peripheral region in the normal direction of the first principal surface 18 . Head to the surrounding area.
In this way, the path along which the component placed on the first main surface extends from the central area of the first main surface to the peripheral area is called a first component movement path. On the other hand, the path along which the component placed on the first main surface moves from the peripheral area to the central area of the first main surface is called a second component movement path.

In the conventional storage plate, when the parts are vibrated on the storage plate, the parts tend to concentrate near the center (the central region of the first main surface) on the storage plate. Like the storage plate, if the surface of the first main surface is provided with a height difference so that the parts move from the central area to the peripheral area, the collection of parts biased to a specific position is reduced, and the entire storage plate is covered. Since they are distributed, the storage plate is efficiently stored with multiple parts.

The storage plate according to the first embodiment is used in combination with a configuration (vibration mechanism in the above example) that moves the parts from the peripheral area to the central area of the first main surface, so that the parts biased to a specific position can be Aggregation can be reduced.

In this specification, the central region of the storage plate is the region including the center of gravity in the top view of the storage plate. The center of gravity is the intersection of the diagonals if the top view shape of the containment plate is a rectangle, square or parallelogram. Also, if the top view of the storage plate is a circle, it is the center of the circle. The peripheral region of the containment plate is the region surrounding the central region.
As used herein, the central region and peripheral region are regions defined to indicate the direction in which a component placed on the first major surface of the containment plate moves.
When considering the movement direction of a part, compare the start point where the part starts moving and the end point where it moves. is considered to move from the central region to the peripheral region.
On the other hand, if the starting point is far from the center of gravity in the top view of the storage plate and the end point is close to the center of gravity, the part moves from the peripheral area to the central area. think to move.
The containment plate of the present invention has a first component travel path from a central region of the first major surface to a peripheral region surrounding the central region, or a second component from the peripheral region of the first major surface to the central region. It has a path of movement.

FIG. 1 and FIG. 2 show the center of gravity G of the top view shape of the storage plate. When a part moves in a direction from a point closer to the center of gravity G to a point farther from it, it is considered that the part moves from the central area to the peripheral area. In this case, the storage plate has a first component movement path. As shown in FIG. 2, the shape of the first major surface 18 with the center of gravity G at a higher surface position and the peripheral region of the center of gravity G at a lower surface position will direct the part to move from the central region to the peripheral region. . Moreover, it is preferable that the first component moving paths are radially distributed from the central region to the peripheral region of the first main surface.

A specific example of the gas supplier 82 is a blower. Also, any positive pressure source may be used. In addition, in the embodiment, the gas discharged from the plurality of gas paths 12 is not limited to air. For example, an inert gas such as nitrogen gas or argon gas can be used as the gas. Thereby, the influence of the chemical reaction between the gas and the component 101 can be reduced. Alternatively, a predetermined structure of gas, eg, a gas that is reactive with the particular material of component 101, can be used. Part storage and part processing can be obtained simultaneously by gases with specific reactivity. In addition, air whose humidity is lower than that of air can be used. At this time, a configuration in which the gas supplier 82 includes a dehumidification mechanism or is connected to the dehumidification mechanism is preferable.

In this embodiment, one part 101 is inserted into one storage hole 13. As shown in FIG. In this case, the depth dimension of the storage hole 13 is approximately the same as the length dimension of the longest side of the external dimensions of the component 101 . With this configuration, not only is it possible to reduce the inconvenience that the part 101 jumps out again after being thrown into the storage hole 13, but also the upper surface of the part 101 that has entered the storage hole 13 and the first main surface 18 are separated from each other. The parts 101 are aligned in a state in which the step between and is reduced. Next, the part 101 entering the storage hole 13 supports the part 101 about to pass over the storage hole 13, and functions to make the movement path of the part 101 about to pass more flat. Therefore, the subsequent component 101 can be smoothly moved on the storage plate 11 . This effect becomes more pronounced when the part 101 has a rectangular parallelepiped shape as in this embodiment.

(Second embodiment)
Configurations of a storage device and a storage plate according to the second embodiment and its modification of the present invention will be described. In the second embodiment, subsequent embodiments, and modifications thereof, elements corresponding to elements shown in the first embodiment are denoted by the same reference numerals, and redundant description may be omitted.

FIG. 3 is a cross-sectional view schematically showing an example of a storage device and a storage plate according to the second embodiment.
The storage device 2 shown in FIG. 3 has the same top view shape as the storage device 1 shown in FIG. 1, but the shape of the storage plate 21 is different.
In the storage plate 21 shown in FIG. 2, the surface position in the normal direction of the first main surface 18 changes continuously, and the cross-sectional shape of the first main surface 18 is such that the surface position of the central region of the first main surface 18 is It has a concave shape that is low and the surface position of the peripheral region is high. In such an example, there is also a height difference between the surface position of the central region of the first main surface 18 and the surface position of the peripheral region in the normal direction of the first main surface 18, and the surface position is lower than the high surface position. It is a configuration that has a part movement path due to the height difference toward the area.
With such a configuration, the component placed on the first main surface 18 is separated from the peripheral region due to the difference between the surface position of the central region and the surface position of the peripheral region in the normal direction of the first main surface 18 . Head to the central area.
That is, the containment plate has a second component movement path.

The enclosure 2 shown in FIG. 3 further has a blower section 83 using a blower for supplying air to the first major surface 18 . The air blower 83 can apply acceleration to the part 101 on the first main surface 18 to move the part 101 on the first main surface 18 .
When the component 101 is moved on the first main surface 18 by the air blower 83 , the component 101 is moved from the central region of the first main surface 18 to the periphery by blowing air from directly above the central region of the first main surface 18 . It can be moved to an area.
When the air blower is simply used, the parts tend to gather in the peripheral area of the storage plate. By moving the parts from the peripheral area to the central area, the collection of parts that are biased toward a specific position is reduced, and the parts are distributed over the entire storage plate. be stored.

The containment plate according to the second embodiment, in combination with a configuration that moves the parts from the central region of the first main surface to the peripheral region (in the above example, the air blower that supplies air to the first main surface) By using it, it is possible to reduce the collection of parts biased to a specific position.
Moreover, it is preferable that the second component moving paths are radially distributed from the peripheral region to the central region of the first main surface.

(Third embodiment)
The structure of the storage plate according to the third embodiment and its modification of the present invention will now be described.

FIG. 4 is a cross-sectional view schematically showing an example of a storage device and a storage plate according to the third embodiment.
A gas passage 12 is provided on the first main surface 18 of the storage plate 31 shown in FIG.
The storage device 3 shown in FIG. 4 has the same top view shape as the storage device 1 shown in FIG. The containment plate 31 has a configuration in which the air permeability in the central region of the first main surface 18 is different from the air permeability in the peripheral region.
The air permeability in the central region of the first major surface and the air permeability in the peripheral region of the first major surface refer to the air permeability in portions of the first major surface excluding the storage holes.

The storage plate 31 shown in FIG. 4 has a configuration in which the first main surface has a portion with high air permeability and a portion with low air permeability. In this case, the boundary line between the highly breathable portion and the low breathable portion can be regarded as the boundary line between the central region and the peripheral region.

FIG. 4 shows a central region 32 containing the center of gravity G of the top view shape of the storage plate and a peripheral region 33 surrounding the central region 32 . In the example shown in FIG. 4, the air permeability of the central region 32 is assumed to be higher than that of the peripheral region 33 .
In FIG. 4 and subsequent drawings, portions with high air permeability are indicated by light hatching close to white, and portions with low air permeability are indicated by dark hatching close to black.
In this case, the pressure of the air supplied from the gas supplier 82 through the main chamber 81 is relatively high in the central region 32 and relatively low in the peripheral region 33 .
Then, the part moves from the central area to the peripheral area along the flow of the air supplied from the gas supplier to the area with high air permeability (central area) toward the area with low air permeability (peripheral area). Oriented. Such air permeability difference forms a component movement path from the central region to the peripheral region.
That is, the containment plate has a first component movement path.
In this case, by using in combination with a configuration (such as the vibration mechanism of the example described in the first embodiment) that moves the part from the peripheral region to the central region of the first main surface, the part that is biased to a specific position can be used. Aggregation can be further reduced.

On the other hand, assuming that the air permeability of the central region is lower than that of the peripheral region, the pressure of the air supplied from the gas supplier through the main chamber is relatively low in the central region and relatively low in the peripheral region. get higher In this case, the parts are moved from the peripheral area to the central area along the flow of air supplied from the gas supplier to the area with high air permeability (peripheral area) toward the area with low air permeability (central area). directed to
That is, in this case the storage plate has a second component movement path.
In this case, by using in combination with a configuration that moves the parts from the central area of the first main surface to the peripheral area (such as the air blower in the example described in the second embodiment), it is possible to remove the parts biased to a specific position. Aggregation can be further reduced.

Moreover, when there is a difference in breathability between the central region and the peripheral region of the first main surface, the breathability may change stepwise from the central region to the peripheral region.
FIG. 5 is a cross-sectional view schematically showing another example of the storage device and the storage plate according to the third embodiment.

A storage plate 41 included in the storage device 4 shown in FIG. 5 has a central region 42 including the center of gravity G in the top view shape of the storage plate, and a peripheral region 43 surrounding the central region 42 .
As shown in FIG. 5, the air permeability of the storage plate 41 is divided into four levels, with the central region 42 having the highest air permeability and the peripheral region 43 located at the outermost periphery of the storage plate 41 having the lowest air permeability. ing. That is, it can be said that the air permeability changes stepwise from the central region to the peripheral region. By making fine differences in the air permeability of the storage plate, it is possible to finely control the movement of the parts, so it is possible to further reduce the gathering of the parts that are biased toward a specific position.
Although FIG. 5 shows an example in which the central region has the highest air permeability, the central region may have the lowest air permeability.

Ventilation in the containment plate can be controlled by changing the size of the holes provided in the containment plate as gas passages or by changing the number of holes (hole density per area). That is, the portion of the first principal surface with low air permeability may have smaller holes in the gas path than the portion with high air permeability. In other words, the portion of the first main surface with low air permeability may have fewer gas passage holes than the portion with high air permeability.
In addition, the holes that become the gas passages of the storage plate are uniformly provided in the storage plate, and the density of the holes is lowered in some areas by filling some of the holes with a coating agent, etc. to lower the air permeability. A configuration is also possible.
In this case, it can be said that the portion having low air permeability in the first main surface has a configuration in which the number of holes of the gas passage is reduced by partially covering the plurality of holes of the gas passage.
In addition, the storage plate has a structure in which an upper plate portion in which a through hole forming the side surface of the storage hole is formed and a lower plate portion forming the bottom surface of the storage hole are combined. A portion of the first main surface having low air permeability may be provided by having a mask pattern that inhibits air permeability in a partial region of the first main surface.

(Fourth embodiment)
Configurations of a storage device and a storage plate according to the fourth embodiment and its modification of the present invention will be described.

FIG. 6 is a cross-sectional view schematically showing an example of a storage device and a storage plate according to the fourth embodiment.
The storage device 5 shown in FIG. 6 has the same top view shape as the storage device 1 shown in FIG.
As with the storage plate 11 shown in FIG. 2, the storage plate 51 has a convex shape in which the surface position of the central region of the first main surface 18 is high and the surface position of the peripheral region is low. Moreover, it has a structure in which the air permeability in the central region of the first main surface 18 differs from the air permeability in the peripheral region. Contrary to the storage plate 31 shown in FIG. 4, the ventilation of the central area 52 is lower than that of the peripheral area 53 with respect to the ventilation of the storage plate.

The storage plate 51 shown in FIG. 6 has a height difference between the surface position of the central region of the first main surface 18 and the surface position of the peripheral region, and the air permeability in the central region of the first main surface 18 and the air permeability in the peripheral region. It can be said that there is a difference in air permeability.
The component placed on the first main surface 18 moves from the central area to the peripheral area of the first main surface 18 due to the height difference. In other words, the moving path due to the height difference is the first component moving path.
On the other hand, the components placed on the first main surface 18 move from the peripheral area to the central area of the first main surface 18 due to the difference in air permeability. That is, the movement path due to the difference in air permeability is the second component movement path.

In this way, the storage plate has both the first movement path due to the difference in height and the second movement path due to the difference in air permeability. , allowing the storage plate to store multiple parts efficiently.

FIG. 7 is a cross-sectional view schematically showing another example of the storage device and the storage plate according to the fourth embodiment.
The storage device 6 shown in FIG. 7 has the same top view shape as the storage device 1 shown in FIG.
As with the storage plate 21 shown in FIG. 3, the storage plate 61 has a concave shape in which the surface position of the central region of the first main surface 18 is low and the surface position of the peripheral region is high. Moreover, it has a structure in which the air permeability in the central region of the first main surface 18 differs from the air permeability in the peripheral region. Regarding the ventilation of the storage plate, the ventilation of the central region 62 is higher than that of the peripheral region 63, like the storage plate 31 shown in FIG.

The storage plate 61 shown in FIG. 7 has a height difference between the surface position of the central region of the first main surface 18 and the surface position of the peripheral region, and the air permeability in the central region of the first main surface 18 and the air permeability in the peripheral region. It can be said that there is a difference in air permeability.
The component placed on the first main surface 18 moves from the peripheral area to the central area of the first main surface 18 due to the height difference. In other words, the moving path due to the height difference is the second component moving path.
On the other hand, the components placed on the first main surface 18 move from the central area to the peripheral area of the first main surface 18 due to the difference in air permeability. That is, the movement path due to the difference in air permeability is the second component movement path.

In this way, the storage plate has both the second movement path due to the difference in elevation and the first movement path due to the difference in air permeability. , allowing the storage plate to store multiple components efficiently.

That is, in both the storage device and the storage plate according to the fourth embodiment, the direction in which the component placed on the first main surface of the storage plate is moved by the difference in height is opposite to the direction in which the component is moved by the difference in air permeability. It is designed to be With such a configuration, the collection of parts biased to a specific position is reduced, and the parts are distributed over the entire storage plate, so that a plurality of parts can be efficiently stored in the storage plate.

(Fifth embodiment)
Configurations of a storage device and a storage plate according to the fifth embodiment of the present invention and modifications thereof will be described.
FIG. 8 is a top view schematically showing an example of a storage device and a storage plate according to the fifth embodiment.
The storage device 7 shown in FIG. 8 comprises a storage plate 71 having a secondary path of component movement from the peripheral region to the central region of the first major surface 18 .
Further, the storage device 7 comprises a rotary drive mechanism 84 for rotating the storage plate 71 around a rotation axis located in the central region of the storage plate 71 .

The top view shape of the storage plate 71 is circular, and the rotation axis of the rotary drive mechanism 84 exists at the center of the circle.
When a component is placed on the first main surface 18 of the storage plate 71 and the rotation drive mechanism 84 is driven to rotate the storage plate 71, the component is moved from the central area to the peripheral area of the first main surface 18 by centrifugal force. be able to.

If only the movement by centrifugal force described above were performed, the parts would be unevenly gathered in the peripheral area of the first main surface 18, but the storage plate 71 is a first main surface moving from the peripheral area to the central area of the first main surface 18. 2 movement paths.
As for the structure of such a storage plate, similar to the storage plate 21 shown in FIG. 3, the surface position of the central region of the first main surface 18 is low, and the surface position of the peripheral region is high. is mentioned. Contrary to the storage plate 31 shown in FIG. 4, there is also a case where the air permeability of the central region is lower than that of the peripheral region.

The storage device 7 includes both a second component movement path from the peripheral area to the central area (the configuration of the storage plate itself) and a configuration for moving the component from the central area to the peripheral area (the rotary drive mechanism). Therefore, the collection of parts biased to a specific position is reduced, and the parts are distributed over the entire storage plate, so that a plurality of parts can be efficiently stored in the storage plate.

Each embodiment described above is an example, and various modifications are possible within the scope of the present invention. For example, the shape of the part to be handled does not have to be rectangular parallelepiped. For example, the shape of the component may be disk-shaped, cylindrical, or prismatic. Furthermore, the shape of the component may be a coiled shape made of helically wound wire.

In this case, the term "parts" is not limited to finished products, but intermediate products in the process of part manufacturing, such as chip-shaped electronic component bodies before external electrodes are formed. Also includes those that should be parts for parts as finished products.

It should also be pointed out that the scope of the present invention is not limited to the above-described embodiments, but also extends to partial permutations and combinations of configurations between different embodiments.

1, 2, 3, 4, 5, 6, 7 Enclosures 11, 21, 31, 41, 51, 61, 71 Enclosure plate 12 Gas passage 13 Enclosure hole 14 Opening 15 Bottom surface 16 Side surface 18 First major surface 19 Second Principal surfaces 32, 42, 52, 62 Central regions 33, 43, 53, 63 Peripheral region 81 Main chamber 82 Gas supplier 83 Blower unit 84 Rotary drive mechanism 85 Controller 86 Main space 101 Parts

Claims (13)

A storage plate having a first major surface, the storage plate having a plurality of storage holes for storing components and a plurality of gas passages through which gas is provided on the first major surface,
A gas supplier is connected to supply gas to the gas path provided on the first main surface,
air permeability in the storage hole is lower than air permeability in a portion of the first main surface excluding the storage hole,
The first main surface has a first component movement path from a central region of the first main surface to a peripheral region surrounding the central region, or from the peripheral region of the first main surface to the central region. A containment plate having a second path of component movement toward. 2. The containment plate of claim 1, wherein the first component movement path or the second component movement path are radially distributed from the central region to the peripheral region of the first major surface. The first component movement path or the second component movement path has a difference in air permeability in the central region of the first main surface and air permeability in the peripheral region, and the air permeability from the gas supplier is different. 3. A containment plate according to claim 1 or 2 , having a path of movement of parts due to differential permeability along the flow of air directed to areas of low permeability of air supplied to areas of high air permeability. 4. The containment plate of claim 3 , wherein the less permeable portion of the first major surface has smaller perforations in the gas passageway than the more highly permeable portion. 5. The containment plate of claim 3 or 4 , wherein the less permeable portion of the first major surface has fewer perforations in the gas passageway than the more highly permeable portion. 6. The storage plate according to claim 5 , wherein the portion of the first main surface having low air permeability has a reduced number of gas passage holes by partially covering the plurality of gas passage holes. The storage plate has a structure in which an upper plate portion having a through hole forming a side surface of the storage hole and a lower plate portion forming a bottom surface of the storage hole are combined, and the upper plate portion and the lower plate portion are combined. The containment plate according to any one of claims 3 to 6 , wherein a portion of the first major surface having low air permeability is provided by having a mask pattern that inhibits air permeability in a region between the two. A containment plate according to any one of claims 3 to 7, wherein the breathability changes stepwise from the central region to the peripheral region. The first component movement path or the second component movement path is located at the surface position of the central region and the surface position of the peripheral region of the first main surface in the normal direction of the first main surface. A containment plate according to any one of claims 1 to 8 , having differential elevation component movement paths from areas of high surface elevation to areas of low surface elevation. The surface position in the normal direction of the first main surface continuously changes,
A cross-sectional shape of the first main surface is a convex surface shape in which the surface position of the central region is high and the surface position of the peripheral region is low, and the first component extends from the central region of the first main surface to the peripheral region. A storage plate as claimed in any one of claims 1 to 9 having a travel path. The surface position in the normal direction of the first main surface continuously changes,
a second component having a cross-sectional shape of the first principal surface, the concave surface shape having a low surface position in the central region and a high surface position in the peripheral region; A storage plate as claimed in any one of claims 1 to 9 having a travel path. A storage plate having a first major surface, the storage plate having a plurality of storage holes for storing components and a plurality of gas passages through which gas is provided on the first major surface,
air permeability in the storage hole is lower than air permeability in a portion of the first main surface excluding the storage hole,
The first main surface has a first part movement path from a central area of the first main surface to a peripheral area surrounding the central area, and a first part movement path from the peripheral area of the first main surface to the central area. has 2 component movement paths,
In the normal direction of the first main surface, there is a difference between the surface position of the central region of the first main surface and the surface position of the peripheral region, and from a region with a high surface position to a region with a low surface position, It has a part movement path by height difference, and furthermore,
A gas supplier is connected to supply gas to the gas path provided on the first main surface,
There is a difference between the air permeability in the central region and the air permeability in the peripheral region of the first main surface, and the air supplied from the gas supplier to the region with high air permeability flows toward the region with low air permeability. It has a part movement path due to the difference in air permeability along the flow of
A storage plate, wherein one of a component movement path based on the height difference and a component movement path based on the air permeability difference is the first component movement path, and the other is the second component movement path. a storage plate according to any one of claims 1 to 9 or 11 having the second component movement path;
a rotation drive mechanism for rotating the storage plate about a rotation axis located in a central region of the storage plate.

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