JP3166186B2 - Apparatus and method for aligning minute work - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a micro work, for example,
The present invention relates to an alignment apparatus used for aligning and supplying semiconductor pellets such as diodes, and an alignment method.

[0002]

2. Description of the Related Art A process for manufacturing a diode or the like includes a process of dividing a semiconductor wafer into minute semiconductor pellets and aligning the individual semiconductor pellets. In this step,
For example, the minute work 100 is accommodated in the accommodating recess 102 recessed in the alignment jig 101, and the minute work 100 is vacuum-adsorbed and aligned in each accommodating recess 102 by driving an external vacuum pump or the like.

[0003] Each accommodation recess 102 of the above-mentioned alignment jig 101
As a method for accommodating the micro work 100, for example,
A large number of minute works 100 are supplied on an alignment jig 101,
While the alignment jig 101 is rocked, the minute work 100 is moved evenly and dropped into each of the accommodation recesses 102, and then is vacuum-sucked to discharge the surplus minute work 100.

[0004]

However, as a mechanism for swinging the alignment jig 101, for example, a complicated transmission mechanism combining a ball joint or the like for simultaneously transmitting vibration and rotation is required. Wear due to mechanical friction was remarkable, the life of the alignment device itself was short, and maintenance was difficult.

When the alignment jig 101 is swung,
Since the movement is uniform, the range of movement of the minute work is naturally limited, and if it is attempted to align the work in a short time, the accommodation ratio of the accommodation concave portion 102 becomes extremely low. Thus, there is a limit to the time reduction of the alignment work using the alignment jig 101 as described above.

[0006]

In order to solve the above-mentioned problems, an apparatus for aligning small works according to the present invention comprises: a work storage jig for accommodating a large number of small works and rotating around a vertical rotation axis; An alignment jig having a large number of accommodation recesses for accommodating and aligning the work and supported on the periphery of the work storage jig so as to be rotatable in a horizontal direction ; and a tilting jig in the vertical direction.
Tilting hand throw with power, and the rotation speed of the rotating shaft increases.
Lower the outer end of the alignment jig as it rises,
Is characterized in that the inclination angle with respect to is reduced . Further, in the method for aligning minute works according to the present invention, a large number of minute works supplied to the work holding jig rotating around the vertical rotation axis are supported by the periphery of the work holding jig by the rotation of the work holding jig. moves on to the alignment fixture, rotating speed of the rotary shaft
When the height rises, the inclination angle of the alignment jig with respect to the horizontal
When the rotation speed of the rotating shaft decreases, the horizontal
The angle of inclination with respect to is increased, and a large number of micro-workpieces are moved on an alignment jig to be housed in the housing recess and aligned.

[0007]

In the apparatus for aligning small workpieces having the above-described configuration, the alignment jig attached to the periphery of the work storage jig is arranged vertically.
It is arranged at an angle to the work storage jig by a tilting means having a biasing force for inclining the work storage jig, and the rotation shaft can be rotated to integrally rotate the work storage jig. Along with this rotation, the outer end of the alignment jig is tilted with respect to the work storage jig by centrifugal force to moderate the inclination, and a large number of minute works supplied to the work storage jig are placed in the alignment jig. It moves by centrifugal force due to rotation.
At this time, if the rotation speed of the rotating shaft is changed, the angular acceleration and centrifugal force applied to the minute work moved into the alignment jig changes, and the moving direction of each minute work changes exquisitely.
Therefore, the minute work can be evenly moved to every corner of the alignment jig, and the minute work can be reliably housed and aligned in the housing recess.

[0008]

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of an apparatus for aligning small workpieces according to one embodiment of the present invention, and FIG. 2 is a schematic longitudinal sectional view thereof. The device for aligning a micro work shown in the figure is, for example, to divide a semiconductor pellet used for manufacturing an electronic component such as a diode as a micro work 1 from a semiconductor wafer and align it when transferring to a next process such as an assembly process. Device . The device for arranging the minute work includes a minute work 1
Work jig 2 for supplying a large number of workpieces, four alignment jigs 3 arranged on four sides of the work storage jig 2, a rotating shaft 5 connected to a motor 4, A rotary table 6 having a rotation center connected to the shaft 5, and a rotary table 6 connected to the back surface of the alignment jig 3 and the alignment jig 3 tilted in a vertical direction;
And a telescopic member (tilting means) 7 having an urging force .

The work storage jig 2 has a square side wall 21 formed on each side thereof.
2 are formed, and one side edge of the alignment jig 3 is fixed to each step 22 via a shaft 31 so as to be tiltable.

Side walls 32 are formed on three sides of the alignment jig 3 except for the work storage jig 2 side so that the minute work 1 does not protrude, and only one minute work 1 is accommodated on the surface. For this purpose, a large number of housing recesses 33 are provided vertically and horizontally. Through holes (not shown) are formed on the bottom surfaces of the accommodating recesses 33 so as to be connected to the side of the external vacuum driving device. Has become. The back surface of each alignment jig 3 and the turntable 6 are, for example, elastic members 7 such as compression springs.
Usually, the elastic member 7 is extended, and the alignment jig 3 is held in a vertical state .

The work holding jig 2 and the rotary table 6 are connected to a rotating shaft 5 of a motor 4. For example, the angular velocity given to the work holding jig 2 by changing the rotation speed of the motor 4 is changed. When the angular acceleration is changed, a centrifugal force is applied to each of the alignment jigs 3 so that each of the alignment jigs 3 compresses the elastic member 7 and tilts so as to be horizontal with respect to the work storage jig 2. . As a method of controlling the rotation of the rotating shaft 5, for example, means for holding the motor 4 at a constant speed and adjusting the rotation of the rotating table 6 with an electromagnetic brake or the like may be used.

The aligning method using the aligning device for the horizontal micro work 1 is performed as follows. That is, first, FIG.
As shown in (2), the stretching member 7 is extended around the work storage jig 2 to tilt and arrange the alignment jig 3, so that excess work is returned to the central work storage jig 2 and a large number of minute works 1 are removed. Supply and make the alignment jig 3 vertical .

Next, the work 4 is rotated together with the turntable 6 by rotating the motor 4. As a result, centrifugal force is applied to each of the alignment jigs 3 that are tiltably attached to the four sides of the work storage jig 2, and the expansion and contraction members 7 are pressed and shrunk so as to center on the shaft 31 as shown in FIG. , Gradually tilt. Accordingly, a centrifugal force acts on the minute work 1 supplied to the work storage jig 2, and the micro work 1 moves outward while being pressed against the inclined surface of the alignment jig 3.

When the rotation of the motor 4 is increased, as shown in FIG. 4, each alignment jig 3 completely compresses and contracts the expansion and contraction member 7 so as to be in a substantially horizontal state, and the minute work 1 spreads evenly within the alignment jig 3. , And the minute work 1 falls into the accommodation recess 33 and is aligned. When each of the micro-workpieces 1 is accommodated in the accommodation recess 33, an external vacuum drive mechanism is operated to vacuum-suction and align the micro-workpieces 1 in the accommodation recess 33. At this time, if the rotation speed of the motor 4 is changed, the tilt angle due to the centrifugal force acting on the alignment jig 3 is changed, and the angular acceleration applied to the minute work 1 supplied to the work storage jig 2 is changed. The direction changes. Therefore, just by adjusting the rotation of the work holding jig 2, the angular velocity and the angular acceleration applied to the minute work 1 fluctuate, and the behavior changes. The work 1 can be accommodated and aligned.

When the rotation of the work storage jig 2 is stopped in a state where the minute work 1 is aligned and sucked, the respective alignment jigs 3 are pushed up by the expansion and contraction members 7 to return to the original state shown in FIG. Surplus micro work not accommodated in
1 is returned to the work storage jig 2 and is stored.

After the rotation is stopped, each alignment jig 3 is removed from the work storage jig 2 and transported to the next assembling step or the like.

According to this method, by controlling the rotation of the work storage jig 2, the tilting of the alignment jig 3 by the silk member 7 and the movement direction of the minute work 1 due to the fluctuation of the angular velocity and the angular acceleration are easily changed. As a result, the minute work 1 spreads to the accommodating recesses 33 at the corners of the four alignment jigs 3 in a short time, and the accommodation ratio of the minute work 1 in the accommodating recesses 33 is increased. Also, the work holding jig 2 is attached to the rotating shaft 5.
A rotary motion machine transverse linked to, structures very simple menu
Maintenance becomes easy .

The tilting means is not limited to the elastic member 7, but always tilts (raises) the alignment jig 3 in the vertical direction.
What is necessary is just to have an appropriate biasing force. For example, apply
Set the air pressure value of the high-pressure air to
An air cylinder with an appropriately adjusted stretching force hits it.
You.

[0020]

As is apparent from the above description, according to the present invention, the tilting of the alignment jig and the movement of the minute work can be easily controlled only by adjusting the rotation speed of the work holding jig for the minute work. Therefore, there is an effect that the minute work can be accommodated and aligned in the accommodating recess at a high accommodation ratio in a short time.

[Brief description of the drawings]

FIG. 1 is a perspective view of an apparatus for aligning a small work according to an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view of FIG. 1 showing a state in which a minute work is supplied to a work holding jig in the method for aligning a minute work according to one embodiment of the present invention.

FIG. 3 is a longitudinal sectional view of FIG. 1 showing a tilting state of the alignment jig accompanying the rotation of the work storage jig in the method for aligning small works according to one embodiment of the present invention.

FIG. 4 is a longitudinal sectional view of FIG. 1 showing a horizontal state of an alignment jig in the method for aligning small workpieces according to one embodiment of the present invention.

FIG. 5 is an enlarged sectional view of a conventional micro-workpiece aligning apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Micro work 2 Work storage jig 3 Alignment jig 6 Rotary table 7 Telescopic member (tilting means) 33 Housing recess

Claims (2)

(57) [Claims] 1. A work storage jig for accommodating a large number of micro-workpieces and rotating around a vertical rotation axis, and a large number of accommodation recesses for accommodating and aligning the micro-workpieces, and being horizontal to the periphery of the work accumulation jig. and aligning jig which is rotatably supported in the direction, the alignment jig
Tilting hand throw with a biasing force to tilt the tool in the vertical direction.
The alignment jig as the rotation speed of the rotating shaft increases.
An apparatus for aligning small workpieces, characterized in that an end is lowered to reduce an inclination angle with respect to a horizontal plane . 2. A large number of minute workpieces supplied to a work storage jig rotating about a vertical rotation axis are moved onto an alignment jig supported by a peripheral edge of the work storage jig by rotation of the work storage jig. When the rotation speed of the rotating shaft increases, the water
Reduce the angle of inclination with respect to the plane, and
When descending, the inclination angle of the alignment jig with respect to the horizontal plane increases.
And a method of specially distributing a large number of micro-workpieces on an alignment jig so as to be accommodated in a housing recess and aligned.