JP7250407B2 - WORK PRESSING JIG FOR LASER WELDING AND PRODUCTION METHOD THEREOF - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for holding a workpiece (work) during laser welding and a method for manufacturing the same.

In laser welding, a laser beam generated by an oscillator is transmitted through an optical path, condensed into an appropriate size by a condenser lens, and the laser beam is irradiated to the joining part of the product to melt and join the product. Since laser light can be narrowed, it has a high energy density, is easy to control, and can be used for fine welding and precise welding. Therefore, laser welding is used for various product processing (joining). However, if the distortion of the product to be welded at the welded portion is large, there is a problem that a gap is generated at the welded portion and the welding quality deteriorates. Therefore, various welding holding jigs have been proposed so as not to create gaps between welded parts. Also, various measures have been taken to improve welding quality. For example, a clamp jig that pressurizes and constrains the welded part of the product to be welded (work) is provided with a hole through which the laser beam passes, and a shielding gas (Ar, He) is introduced into the hole to improve the welding quality. is proposed. (Patent document 1)

JP 2006-7237

In the method proposed above, a hole is simply made in the clamping jig and the hole communicates with the outside air. Therefore, even if the shielding gas is introduced into the hole, the shielding gas escapes through the hole. Further, when the shielding gas is He, since He is lighter than air, it easily diffuses into the outside air, and there is a problem that He does not stay in the holes. When the shielding gas is Ar, if a pressure of 1 atmosphere or more is applied, the Ar gas escapes from the hole, and a pressure of 1 atmosphere or more cannot be applied, so there is also the problem that the welding quality during laser welding cannot be improved much. Furthermore, since there are many places where the welding part becomes a closed curve in the product to be welded (work), it is difficult to form a closed curve while continuing the hole. do not get However, since the laser beam cannot pass through the discontinuous portion of the hole, the laser beam must be passed through the discontinuous portion by moving the hole or using another clamping jig, which greatly reduces work efficiency. There is also a problem that the alignment error becomes large at the discontinuous portion.

In order to solve the above-described problems, the present invention uses a workpiece holding jig containing a transparent material that transmits laser light to hold down the workpiece and irradiate the laser beam onto the welded portion of the workpiece. Specifically, it has the following features.
(1) The present invention is a work holding jig for laser welding, which has a transparent plate, and performs laser welding by irradiating a laser beam to a welding portion of a work through the transparent plate, wherein the welding is performed. A space (hereinafter referred to as a welding space) is formed between the site and the transparent plate, and the laser beam passes through the welding space to irradiate the welding site, and the transparent plate is a quartz plate or a quartz glass plate. characterized by being
(2) In the present invention, in addition to (1), a portion of the transparent plate presses a portion of the work, and a work pressing member is attached to the transparent plate at a portion of the transparent plate that presses the work. and the pressing member is a flexible member.

(3) In the present invention, in addition to (1) and (2), the transparent plate has a groove in a region facing the welding site, and the laser beam passes through the groove of the transparent plate to irradiate the welding site. The groove is a welding space, or a plate material is attached to the transparent plate, and a through groove is formed by removing the plate material in a portion to be irradiated with the laser light, and the through groove The groove serves as a welding space, and the plate material is metal, alloy, plastic, or ceramics.
(4) In the present invention, in addition to (1) to (3), the transparent plate has a mold conforming to the shape of the work other than the portion of the welding space, and the work is laser-welded with the mold. It is characterized in that it is held down by a mold, the mold material is plastic, metal, or ceramics, and a flexible member or metal member is arranged on the lower surface of the mold.

(5) In the present invention, in addition to (1) to (4), a protective material is disposed on the side surface of the welding space to protect the side surface of the welding space, and the protective material is a heat-resistant material and/or a high A strength material, wherein said protective material is a metal or an alloy.
(6) In the present invention, in addition to (1) to (5), a part of the welded portion is a closed curve, a welding space surrounds the welded portion of the closed curve, and the laser beam is continuously irradiated to the closed curve. It is characterized by being able to weld the entire welding part and having a mechanism for flowing a shield gas into the welding space, a mechanism for reducing the pressure of the welding space to less than 1 atmosphere, or a mechanism for increasing the pressure of the welding space to more than 1 atmosphere. do.
(7) In addition to (1) to (6), the present invention provides a welding space (first welding space) of the laser welding work holding jig (upper welding work holding jig) on the side irradiated with laser light. Also has a laser welding work holding jig (lower welding work holding (restraining) jig) having a welding space (second welding space) on the opposite side, and the upper welding work holding jig is a jig that holds the upper work and the lower welding work holding jig is a jig for holding (constraining) the lower work, and in the lower welding work holding jig, a plate facing the work lower plate constituting the second welding space is characterized by being a material that does not transmit laser light.
(8) In the present invention, in addition to (1) to (7), a mechanism for setting the second welding space to a low pressure of less than 1 atmosphere or a mechanism to set the second welding space to a high pressure exceeding 1 atmosphere. When the laser irradiation work holding jig is used, the welding space on the laser irradiation side (first welding space) is set to a low pressure and the welding space on the opposite side (second welding space) is set to a high pressure. and laser irradiation.

The workpiece holding jig for laser welding of the present invention has a transparent plate and a welding space around the welding part of the workpiece, and the irradiated laser light passes through the transparent plate and the welding space to irradiate the welding part of the workpiece, thereby removing the workpiece. It is to be welded. Therefore, since the airtightness in the welding space is maintained, even if the shielding gas is supplied, the consumption of the shielding gas is small, and the running cost can be reduced. In addition, since a mold suitable for the shape of the work can be easily and precisely manufactured from various materials such as plastic, the work can be securely fixed, and the degree of contact between the welded portions of the work can be improved, thereby improving the welding quality. can be dramatically improved. Since the welding space can be easily made into a closed curve (single-stroke curve), laser light can be continuously irradiated along the closed curve, and there is no need for repeated connection irradiation of laser irradiation. Laser irradiation efficiency can be dramatically improved, and laser welding costs can be reduced. High-strength materials with high heat resistance can be placed on the side of the welding space, so it is possible to reduce the effects of the heat generated during welding and scattering, etc., and realize a long life such as repeated use of the work holding jig. can.

FIG. 1 is a diagram showing an example of a workpiece (work) for laser welding. FIG. 2 is a diagram showing the first embodiment of the present invention, showing a state of welding by irradiating a laser through a transparent member. FIG. 3 is a diagram showing a second embodiment of the present invention, in which a workpiece pressing member is arranged on the convex portion. FIG. 4 is a view showing a third embodiment of the present invention, using a work pressing member that covers the entire convex portion of the work. FIG. 5 is a diagram showing a fourth embodiment of the present invention, which is an embodiment representing a basic shape using a mold adapted to the work. FIG. 6 is a diagram showing a method of manufacturing the mold shown in FIG. FIG. 7 is a diagram showing another method of manufacturing the mold of the present invention. FIG. 8 is a diagram showing another embodiment that does not use the photosensitive resin of the present invention. FIG. 9 is a diagram showing a fifth embodiment of the present invention, in which welding spaces (grooves) are formed in the transparent plate itself. FIG. 10 is a diagram showing a sixth embodiment of the present invention, showing a method of forming a welding space in a plate attached to a transparent member. Figure 11 shows a seventh embodiment of the invention, with a heat resistant material on the side of the mold facing the welding space. 12A and 12B are diagrams showing a method of forming and arranging a protective wall on the side surface of the molding material (mold) shown in FIG. 11. FIG. FIG. 13 is a diagram showing an eighth embodiment of the present invention, showing a state in which protective materials (protective walls) are formed not only on the sides of the welding space but also on the bottom (or top) of the welding space in the molding material. is. FIG. 14 is a diagram showing a ninth embodiment of the present invention, and is a diagram showing a method of producing a molding material after prefabricating a protective wall on the side of a welding space. FIG. 15 is a diagram showing a state in which the workpiece is held down and laser irradiation is performed when the workpiece holding jig is manufactured with the structure shown in FIG. 14(a) described above. FIG. 16 is a diagram showing a state in which the shielding gas is caused to flow into the welding space. FIG. 17 is a diagram showing a tenth embodiment of the present invention, in which a transparent plate member provided with a welding space is used as a workpiece retainer.

FIG. 1 is a diagram showing an example of a workpiece for laser welding (hereinafter referred to as work). FIG. 1(a) is a plan view of the work, and FIG. 1(b) is an elevation view of the work. The workpiece 10 is composed of a workpiece upper plate 11 and a workpiece lower plate 12. The workpiece upper plate 11 and the workpiece lower plate 12 have a plurality of convex or concave bodies 13 which are shaped like an upside down bowl and hollow inside. The work 10 is made by combining the flat portions of the upper work plate 11 and the work plate 12, and the hollow spaces 15 (15-1, 2, 3, 4 ) has a plurality of closed spaces. In order to make the hollow space 15 (15-1, 2, 3, 4) airtight, these perimeters 14 (14-1, 2, 3, 4) are welded. In addition, the material of the work (work upper plate, work lower plate), (in particular, the material of the welded portion 14 between the work upper plate 11 and the work lower plate 12 by laser welding) is a material that can be laser welded. For example, it may be a stainless steel material, an iron material, other various metal materials, or ceramics or the like.

The present invention provides means for reliably welding welds 14 (14-1, 2, 3, 4) in workpieces having such convex or concave portions. FIG. 2 is a first embodiment of the present invention, and is a diagram showing a state in which a laser is transmitted through a transparent member and welded. At the time of welding, the upper and lower work plates (work upper plate 11, work lower plate 12) are securely in contact (tangent surfaces) at the welding portions (welding points) 14 (14-A, B, C) without positional deviation. (there should be no gaps between the workpieces at the welding point), but if the contact between the workpiece upper plate 11 and the workpiece lower plate 12 is insufficient due to warpage of the workpiece or variations in thickness, etc., or if there is a misalignment may occur. Alternatively, the workpiece may warp due to heat during welding or the like.

Therefore, in the embodiment shown in FIG. 2, a transparent plate member 21 whose both surfaces are (substantially) flat and transparent is pressed against the work 10 from above (the work upper plate 11) from the laser irradiation side to form the work upper plate 11 and the work lower plate. 12 are securely brought into contact at weld sites 14 (14-A, B, C). The lower side of the work 10 (work lower plate 12) is similarly pressed from below the work 10 (work lower plate 12) by a plate member 22 having (substantially) flat surfaces. (It is also the same as fixing one of them and pressing the other.) That is, since the work top plate 11 has a convex portion 13 on the top, the transparent plate material 21 is pressed from above. By (or constraining), the workpiece upper plate 11 is also held down at the welding sites 14 (14-A, B, C), and similarly, the workpiece lower plate 12 has a downward convex portion 13, so that the downward By holding the plate material 22 from the welding part 14 (14-A, B, C), the workpiece lower plate 12 is also held, and as a result of both, the workpiece upper plate 11 and the workpiece lower plate 12 are held at the welding part 14 (14- A, B, and C) can be reliably contacted. Since the laser is not irradiated from the lower side of the work 10 (work lower plate 12), the pressing plate member (also referred to as pressing member or restraining member) 22 does not have to be transparent. Alternatively, instead of the holding plate member 22, a fixed base may be used.

A laser beam 17 is irradiated from above the outside of the transparent plate member 21 through the transparent plate member 21 to the welded portions 14 (14-A, B, and C) in a state in which they are firmly in contact with each other. They are welded together at (14-A, B, C). Here, the transparent plate material 21 is desirably made of a material that transmits the laser light and is not damaged by the laser light. For example, when a YAG laser is used, the transparent plate 21 is preferably made of heat-resistant glass such as quartz, quartz glass, borosilicate glass, or corundum (hereinafter referred to as quartz glass or the like). In the case of a carbon dioxide (CO2) laser, the transparent member is preferably zinc selenide (ZnSe), for example.

Although the flat plate member 22 is used in FIG. 2, a flat base may be used instead of the plate member. Alternatively, if the workpiece 10 can be held down by the transparent plate material 21 and the workpiece upper plate 11 and the workpiece lower plate 12 at the welded portions 14 (14-A, B, C) are reliably brought into contact with each other, laser welding can be performed efficiently. It doesn't have to be flat. For example, it may be possible to hold down the work lower plate 12 with a member that contacts only the projecting portion 13 of the work lower plate 12 .

The transparent plate material 21 is made of a material having a high transmittance to the laser beam used, and is preferably transparent to visible light as well. Since the positional state of the works (work upper plate 11 and work lower plate 12) can be seen with the naked eye, the positions of the works (work upper plate 11 and work lower plate 12) can be adjusted so as not to be misaligned. For example, quartz glass and zinc selenide (ZnSe) have a high transmittance even to visible light. The work lower plate 12 is also desirably made of a material transparent to visible light so that the aligned state of the work (work upper plate 11 and work lower plate 12) can be seen from below with the naked eye. For example, quartz glass or the like or glass.

If air or oxygen is present in the space 26 between the workpiece upper plate 11 and the transparent plate material 21 for holding the workpiece (referred to as a weld space), the welded portion 14 of the workpiece 10 and its surroundings are oxidized during laser welding, resulting in welding failure. The part deteriorates and the service life of the welded part is shortened. Therefore, a shielding gas (also referred to as an assist gas) such as an inert gas such as nitrogen (N2), argon (Ar), helium (He), or the like can be introduced into the welding space 26 to prevent oxidation during welding. If the height of the projecting portion 13 of the workpiece 10 is small, the volume of the welding space 26 is also small, so the amount of shielding gas is small and the increase in running cost during welding is small. Furthermore, by arranging the sealing member 23 around (entirely) the transparent plate member 21 for holding the workpiece, the shield gas can be confined only in the area of the transparent plate member 21 and the workpiece 10, so that the amount of shield gas can be further reduced. can be less.

The height of the seal member 23 is slightly higher than the height from the flat portion of the work top plate 11 to the top of the convex portion 13 . In addition, the material of the sealing member is made of a resilient structure or material. An elastic structure is, for example, an extendable piston structure, and an elastic material is, for example, a rubber-like member. These elastic sealing members 23 contact the periphery of the work upper plate 11 when the transparent plate member 21 is brought closer to the work 10, and then the transparent plate member 21 contacts the convex portion 13 of the work upper plate 11. to press the workpiece upper plate 11. At this time, since the seal member 23 further presses the periphery of the work upper plate 11, the airtightness of the welding space 26 between the transparent plate 21 and the work upper plate 11 is enhanced. After that, the air or oxygen in the welding space 26 is removed by using a vacuum pump or the like from a shield gas introduction hole formed in the sealing member 23, the work upper plate 11, or a part of the transparent plate 21, and then the shielding is performed using a gas cylinder or the like. The entry of gas allows shielding gas to fill the weld space 26 . Alternatively, the shielding gas may be introduced only with a gas cylinder or the like to push out the air or the like that initially existed in the welding space 26 . A seal member 24 is also arranged around the plate member 22, and the welding space 27 between the plate member 22 and the workpiece lower plate 12 is similarly filled with a shielding gas so that the welding space 27 side during laser welding is sealed. Oxidation or the like of the welded portion 14 and its surroundings can be prevented. The shield gas also has the effect of protecting the transparent plate and the like from spatter (for example, scattering of work metal) and metal vapor generated during welding. In particular, if the shielding gas pressure in the welding spaces 26 and 27 is increased, the effect of preventing oxidation and the effect of protecting the transparent plate can be further enhanced.
In particular, by setting the shield gas pressure to a high pressure exceeding 1 atm, the workpiece upper plates 11 and 12 can be pressed against the welding space 26 and 27 by the pressure of the shield gas. can be reliably performed, and the welding quality of the welded portions 14 (A, B, C) can be improved. At this time, the transparent plate 21 and the plate material 22 are also pressed with a high pressure. Since 22 can press the work upper plates 11 and 12, the transparent plate 21 side and the plate material 22 side will not separate from the work upper plates 11 and 12.例文帳に追加In addition, the welding space 26 on the laser irradiation side and the welding space 27 on the opposite side may be set to high pressure at the same time to press the workpiece upper plates 11 and 12 from the upper and lower sides. At this time, it is also necessary to push or hold the side that is not in high pressure from above or below so that it is not pushed to one side. Furthermore, the other side may be under a low pressure of less than 1 atm (1 atm to vacuum) and the other side may be at a high pressure. For example, by keeping the welding space 26 on the laser irradiation side at a low pressure and the welding space 27 on the other side at a high pressure, the adhesion between the work holding jig (upper side) and the work upper plate 11 is improved, and the work lower plate 12 and the work upper plate 11, the quality of the welded portion is improved.

FIG. 3 is a diagram showing a second embodiment of the present invention, in which a pressing member is arranged on the convex portion. The height of the convex portion 13 varies, and there may be convex portions with different heights. Since the transparent plate member 21 is not a material that is flexibly deformable in the height direction, all of the plurality of convex portions 13 are not pressed against the transparent plate member 12, and gaps may exist. Since the contact of the welding portion 14 existing near the convex portion 13 that is not pushed by the transparent plate material 12 becomes insufficient, reliable welding may not be performed. Therefore, as shown in FIG. 3, a pressing member 31 is arranged on the portion of the transparent plate member 21 corresponding to the portion in contact with the convex portion 13 . The material of the pressing member 31 is a flexible material such as rubber or elastic plastic that is deformable (expandable) in the height direction, or a member having a structure that is expandable in the height direction (for example, a piston or a spring). Since this pressing member 31 is expandable in the height direction, when the transparent plate member 21 is pressed against the work upper plate 13, the pressing member 31 arranged on the transparent member comes into contact with the projecting portion 13 of the work upper plate 11, thereby moving the work. The upper plate 11 is pressed. Even if the heights of the plurality of projecting portions 13 of the work upper plate 11 are uneven, or even if there are projecting portions 13 of different heights, the pressing member 31 expands and contracts. It can press against convex portion 13 to ensure contact at weld site 14 . As for the work lower plate 12 side, if the pressing member 32 is arranged on the plate member 22, the work lower plate 12 can also be pressed from below. In this pressed state, a laser beam 17 is irradiated from above the transparent plate 21 through the transparent plate 21 to the welded portion 14 for welding. As a result, reliable welding can be achieved with little variation. In the embodiment shown in FIG. 3 as well, a sealing member 23 is placed on the transparent plate member 21 to press the periphery of the work upper plate 11 to realize an airtight space 26 . Similarly, an airtight space 27 can be realized by arranging a seal member 24 on the plate member 22 to press the periphery of the work lower plate 12 .

The holding members 31 and 32 are formed by applying an adhesive or the like to the surfaces of the holding members 31 and 32, which are attached to the portions corresponding to the projecting portions 13 of the work, for example, on a sheet (for example, paper). When the sheet is removed after being attached to the plate member 22, the pressing members 31 and 32 are attached to the transparent plate 21 or the plate member 22 at the portions corresponding to the projecting portions 13 of the work, and can be formed by so-called transfer. The sealing members 23 and 24 can also be formed on the transparent plate 21 or the plate member 22 in the same manner. If the height of the convex portion is smaller than the expansion limit of the elastic member, and if airtightness can be ensured by the elastic member, the sealing member and the pressing member can be mounted together on the seat using the same material and the same height. can be applied to the transparent plate 21 or the plate member 22 at the same time. Alternatively, it is also possible to directly form (directly draw) on the transparent plate 21 or the plate member 22 using a two-dimensionally movable dispenser device.

FIG. 4 is a diagram showing a third embodiment of the present invention, in which a pressing member that covers the entire convex portion of the workpiece is used. In FIG. 4, a pressing member 35 is arranged on the transparent plate member 21 so as to cover substantially the entire convex portion 13 of the work upper plate 11 . A pressing member 36 is arranged on the transparent plate member 22 so as to cover substantially the entire convex portion 13 of the work lower plate 12 . Therefore, since the projecting portion 13 of the workpiece 10 is held down as a whole, in the case shown in FIGS. Since the workpiece 10 is held down more securely than the members 31 and 32), the contact at the welded portion 14 becomes more reliable. This is useful when the pressing members 35 and 36 are made of a highly elastic material, or when the height of the projecting portion 13 of the work 10 is small. 2 and 3, seal members 23 and 24 can be arranged around transparent plate member 21 and plate member 22 so as to form airtight (welding) spaces 26 and 27 in contact with the periphery of workpiece 10. As shown in FIG. In this case, since the height of the pressing member and the height of the sealing member can be the same, they can be made of the same material. When the surrounding airtight (welding) spaces 26 and 27 are separated by the pressing members 35 and 37, a passage connecting the surrounding airtight (welding) spaces is provided in a portion that does not affect the pressing of the workpiece 10 so much. , allowing shielding gas to enter all the gastight (welding) spaces 26,27 from the surrounding gastight (welding) spaces 26,27. Although the welding spaces 26 and 27 are narrowed, the amount of shielding gas put into the welding spaces can be reduced. The size of the welding space may be appropriately selected according to the size of the workpiece, conditions of the laser beam, and the like. For example, in small parts (work), the size of the welding space is 0.1 mm to 10 mm in depth (height) and 1 mm to 20 mm in width. If it is a large component (work), it can be made larger than that. The thickness of the transparent plate material may be appropriately selected depending on the type and conditions of the laser beam and the type of the transparent plate material. If grooves (welding spaces) are formed in the transparent plate material itself, the thickness may be greater than this. The members of the pressing members 35 and 36 may have a shape conforming to the shape of the projecting portion 13 of the work 10 . In this case, the material of the pressing members 35 and 36 does not have to be highly stretchable. For example, a metal material may be used. However, even in this case, if a highly stretchable material or elastic material (for example, rubber or elastic plastic) is applied to the surfaces of the pressing members 35 and 36, variations in the height of the convex portion 13 can be dealt with.

FIG. 5 is a diagram showing a fourth embodiment of the present invention, which is an embodiment representing a basic shape using a mold adapted to the work. FIG. 5(a) is a diagram showing individual molds that are suitable for workpieces, separated from each other. The mold 41 is a mold suitable for the work upper plate 11, the mold 41 (41-3, 41-4) is a sealing member, and the mold 41 (41-1, 41-2) is a convex portion of the work upper plate 11. 13. The mold 42 is a mold suitable for the work lower plate 12, the molds 42 (42-3, 42-4) are sealing members, and the molds 42 (41-2, 42-2) are the projecting portions of the work lower plate 12. 13. A transparent plate member 21 is shown above them, and a plate member 22 is shown below them. FIG. 5(b) shows a state in which the molds are attached to the transparent plate member 21 and the plate member 22. As shown in FIG. That is, the molds 41 (41-1 to 41-4) are attached to the transparent plate member 21. As shown in FIG. The molds 41 (41-1 to 4) attached to the transparent plate material 21 are adapted to the work upper plate 11, and the molds 41 (41-1 to 4) attached to the transparent plate material 21 are pressed from above the work upper plate 11. can be done. Also, the molds 42 (42-1 to 42-4) are attached to the plate member 22. As shown in FIG. The molds 42 (42-1 to 4) attached to the plate material 22 are adapted to the work lower plate 12, and the molds 42 (42-1 to 4) attached to the plate material 22 can be pressed from below the work lower plate 12. . FIG. 5(c) shows the molds 41 (41-1 to 41-4) attached to the transparent plate member 21 and the molds 42 attached to the plate member 22 from above and below while the work 10 (the upper work plate 11 and the lower work plate 12) are put together. (42-1 to 42-4) show a state in which the laser 17 is applied to the welded portion 14 while being pressed. Since the welding spaces 26 and 27 exist and the periphery of the welded portion 14 is pressed by the molds 41 and 42, contact between the work upper plate 11 and the work lower plate 12 at the welded portion 14 is ensured. As a result, the laser beam 17 is irradiated onto the welded portion 14 through the transparent plate member 21, and the workpiece upper plate 11 and the workpiece lower plate 12 are securely joined at the welded portion 14 as well. Various materials can be used for the mold material. Examples thereof include iron-based materials, copper-based materials, aluminum-based materials, tin-based materials, metal materials such as various solder materials, various resins (natural resins, synthetic resins), and various ceramics.

FIG. 6 is a diagram showing a method of manufacturing the mold shown in FIG. FIG. 6(a) is a diagram showing a mold. The formwork (upper side) 50 is a formwork for producing the (upper) form 41 shown in FIG. A mold space 55 is formed between the upper frame plate 51 , the lower frame plate 52 and the welding space frame plate 53 . The surface of the upper frame plate 51 on the formwork space 55 side corresponds to the lower surface of the transparent plate 21, so that it is a flat surface. The lower frame plate 52 has a convex portion 52C, which corresponds to the convex portion 13 of the upper work plate 11. As shown in FIG. A welding space frame plate 53 corresponds to the welding space 26 . The upper frame plate 51 may have the same shape as the transparent plate member 21 (or may be the same shape), and the lower frame plate 52 may have the same shape as the work upper plate 11 (or the same shape may be used). The formwork (lower side) can also be produced in the same manner.

Next, as shown in FIG. 6B, a mold material (molding material) is injected into the mold space 55 of the mold (upper side) 50 to form a mold 56 . If it is possible to provide connection holes that connect the formwork spaces 55 (55-1, 2, 3, 4), the mold material can be removed from the outside of some of the formwork spaces 55 (for example, 55-3 and 55-4). (liquid or molten) is injected into the other mold space 55 (for example, 55-1 or 55-2) through the connection hole. As shown in FIG. 1, in the case where the mold space 55 (the portion including the convex portion 13) is surrounded by the welding space 53 (the welding portion 14), connection holes cannot be provided. For example, a molding material injection hole 54 is provided in the upper frame plate 51 to inject the molding material into the mold space 55 . A molding material injection hole 54 may be provided in the lower frame plate 52 . Also, a gas vent hole may be provided in the upper frame plate 51 or the lower frame plate 52 so that when the mold material is injected into the mold space 55, the gas portion remains and no portion is formed without the mold material. However, if the mold to be manufactured can reliably hold down the workpiece 10 and the welding space is reliably formed, the mold itself does not need to be perfect. After injecting the mold material into the mold space 55, the temperature of the mold material is lowered to solidify the liquid mold material, thereby forming a mold corresponding to the mold. Mold materials generally refer to epoxy resins, polyimide resins, and various other plastic (synthetic) resins, but here, in addition to these, various ceramics such as gypsum, wax, cement, and clay, copper-based materials, iron-based materials, etc. Various metal materials such as aluminum-based materials, tin-based materials, lead-based materials, and various alloys are materials from which molds can be made. The material of the mold 50 is a material that does not deform in a solid state at the temperature of the liquefied molding material. For example, various metals, various ceramics, and various plastics.

Next, as shown in FIG. 6(c), the upper frame plate 51 and the welding space frame plate 53 are removed. When assembling the formwork, if the welding space frame plate 53 is attached to the upper frame plate 51, for example, by using an adhesive agent or the like or by mechanically connecting with screws or the like, the upper frame plate 51 can be separated from the molding material. The weld space frame plate 53 can also be removed. If the molding material 56 does not separate, the lower frame plate 52 can also be removed. When the upper frame plate 51 and the welding space frame plate 53 are removed, the mold material 56 adheres to the lower frame plate 52 as shown in FIG. 6(c). This is adhered to the lower surface of the transparent plate 21 . An adhesive layer 58 is attached to the upper surface of the molding material 56 and attached to the lower surface of the transparent plate 21 . The adhesive layer 58 can be applied by attaching an adhesive sheet, or by a dispenser, dipping, squeegee method, brush coating, or the like. When the adhesive layer is solidified by heat treatment or the like, the molding material 56 is firmly adhered to the transparent plate 21 . When the mold material is injected through the molding material injection hole 54 shown in FIG. No protrusions are formed in the mold material 56 side, and the upper surface of the mold material 56 is kept flat. Therefore, the (lower surface of) the flat transparent plate material 21 can be adhered to (the upper surface of) the flat mold material 56 while maintaining flatness. If projections are formed on (the upper surface of) the molding material 56 at the molding material injection hole 54, the (upper surface of) the molding material 56 should be flattened using a polishing machine (for example, a back grinder or a CMP (chemical polishing) apparatus). do it.

Next, as shown in FIG. 6(d), the lower frame plate 52 is removed to complete the transparent plate 21 with the (mold) mold 56 attached thereto (transparent plate mold). This is the same as the upper mold (the mold 41 attached to the transparent plate 21) shown in FIG. 5(b). Similarly, the lower mold (the mold 42 attached to the plate member 22) shown in FIG. 5(b) can also be produced. Moreover, it is important that the hole (which becomes the welding space) is surely formed when the welding space frame plate 53 is removed. When the mold material enters between the lower frame plate 52 and the welding space frame plate 53, the mold material is removed by washing or using a removing liquid or the like after the lower frame plate 52 is removed. It is also possible to use the transparent plate 21 as the upper frame plate 51 and remove the lower frame plate 52 and the welding space frame plate 53 without removing the upper frame plate 51 (transparent plate 21) after FIG. 6(b). can. In this case, the welding space frame plate 53 is attached to the lower frame plate 52 in advance. By doing so, the step of removing the upper frame plate 51 and further attaching the transparent plate 21 can be eliminated. There is no problem in forming the molding material injection hole 54 in the transparent plate 21, and there is no particular problem in leaving the molding material injection hole 54 in the transparent plate 21 as it is.

FIG. 7 is a diagram showing an embodiment of the present invention, and is a diagram showing another method of manufacturing a mold. As shown in FIG. 7A, a photosensitive resin film 62 is applied onto the lower frame plate 61 . The photosensitive resin film 62 is, for example, photosensitive polyimide or various photoresists. The application is carried out by various coating methods such as spin coating, dipping, and squeegeeing. Since the lower frame plate 61 has a convex portion 61C, the surface (upper surface) of the photosensitive resin film 62 covering the convex portion 61C is flattened as much as possible. Therefore, depending on the height of the convex portion 61C, the thick coating is at least thicker than the height of the convex portion 61C. Thick coating can be performed by increasing the liquid viscosity of the photosensitive resin film 62 . Also, after coating, pre-heat treatment (pre-baking) may be performed (for example, at 100° C. or lower), and then coating may be repeated to increase the thickness. Even if the height of the convex portion 61C is 1 to 10 mm or more, it is possible to coat the photosensitive resin film 62 substantially flat and cover the convex portion 61C.

Next, when the photosensitive resin film 62 is of a positive type, as shown in FIG. 7(b), a photomask is used to irradiate a portion 64 that will become the welding space. If the photosensitive resin film 62 is of the negative type, a photomask is used to irradiate the portion other than the portion 64 that will be the welding space. After that, if the photosensitive resin film 62 is immersed in the developer or sprayed with the developer, the photosensitive resin film in the portion 64 that becomes the welding space is dissolved and the welding is performed, as shown in FIG. 7(c). A space 64 is formed. After that, as shown in FIG. 7(d), a transparent plate member 21 is attached. Here, if the photosensitive resin film 62 is uneven due to the convex portion 61C and is not flat, it can be flattened by pressing the transparent plate material 21 thereon. Since the photosensitive resin film 62 is still in a pre-baked state, it adheres (adheres) to the transparent plate member 21 by subsequent heat treatment without using an adhesive. Of course, the transparent plate member 21 may be attached after forming an adhesive layer on the photosensitive resin film 62 . The photosensitive resin film 62 is hardened by appropriate heat treatment (post-heat treatment or post-baking) while pressing the transparent plate material 21 against the photosensitive resin film 62 . For example, heat treatments for photosensitive polyimide films are 150.degree. C.-200.degree. C. and 300.degree. C.-450.degree. After that, the lower frame plate 61 is removed, and a workpiece holder (upper side) 65 having the mold 62 attached to the transparent plate 21 can be produced as shown in FIG. 7(e). The lower frame plate 61 may be removed before the post heat treatment. If a film is formed on the transparent plate 21 in the welding space 64 portion during the post-heat treatment due to outgassing due to the heat treatment of the photosensitive resin film 62 and fogging occurs, wet etching or dry etching is performed after FIG. 7(e). Haze can be removed. The workpiece retainer (lower side) can also be manufactured in the same manner.

FIG. 8 is a diagram showing another embodiment that does not use the photosensitive resin of the present invention. The state of FIG. 7(a) is the same. As shown in FIG. 8(a), a resin liquid is applied onto the lower frame plate 71 to form a resin layer 72. Next, as shown in FIG. Depending on the thickness of the resin layer 72, the type and viscosity of the resin liquid are selected to optimize the application conditions. A welding space frame plate 74 is attached to the upper frame plate 73 . The welding space frame plate 74 conforms to the shape of the welding space. The upper frame plate 73 to which the welding space frame plate 74 is attached while the resin layer 72 is in a liquid and soft state is coated with the resin layer 72 so that the welding space frame plate 74 fits in the welding space. press against. ( FIG. 8( b )) It is desirable that the lower end of the welding space frame plate 74 contacts the lower frame plate 71 so that no resin liquid exists between the welding space frame plate 74 and the lower frame plate 71 . In addition, it is important that there is no gap between the resin layer 72 and the frame plates 71, 73, and 74, and that the frame plate 73 presses the resin layer 72 to increase the pressure of the resin layer 72 to some extent. After solidifying the resin layer 72 by heat treatment in this state, when the upper frame plate 73 and the welding space frame plate 74 are pulled out, as shown in FIG. layer) 72 can be made. The subsequent steps are the same as the steps shown in FIG. Also, the workpiece retainer (lower side) can be manufactured in a similar manner. The above method is a kind of imprint method.

FIG. 9 is a diagram showing a fifth embodiment of the present invention, in which welding spaces (which may be called grooves) are formed in the transparent plate itself. FIG. 9(a) is a diagram showing a state in which the work in which the work upper plate 81 and the work lower plate 82 are combined is pressed by the transparent body member 83 and the plate member 85 from above and below. A welding portion 86 is irradiated with a laser beam 87 from above the transparent plate member 83 to weld the workpiece upper plate 81 and the workpiece lower plate 82 at the welding portion 86 . When the transparent plate member 83 directly presses (contacts) the upper portion of the welded portion 86 , heat, generated gas, generated particles, etc. during welding are transmitted directly to the transparent plate member 83 , and damage the transparent plate member 83 . inflict damage on Also, the welding itself is adversely affected, and sufficient welding cannot be performed. Therefore, as shown in FIG. 9(a), spaces (welding spaces 84, 88) are formed above and below the welded portion 86 so as to allow the heat generated during welding to escape. In particular, by introducing a shielding gas into these spaces, it is possible to prevent oxidation of the work due to welding. In addition, by connecting gas flow lines to the welding spaces 84 and 88 to generate a gas flow, it is possible to effectively release the generated heat and remove the generated particles, etc., so that stable welding can be performed efficiently. can be done systematically.

FIG. 9(b) is a diagram showing a method of forming a welding space 84 in a transparent plate material 83. FIG. A resist pattern 89 is formed on transparent plate material 83 by, for example, photolithography, and a window is opened at a portion where welding space 84 is to be formed. By using dry etching, wet etching, or the like, the transparent plate material 83 is etched to form a welding space (which may be called a groove) 84 . If the transparent plate is made of quartz glass (SiO2) or the like, a hydrofluoric acid-based etchant or alkali etching such as KOH can be used for wet etching. Dry etching can be performed using a fluorocarbon gas such as CF4 gas. By time etching, the transparent plate material 83 can be etched to an appropriate depth. Since a part of the transparent plate material 83 remains without being etched, for example, even if the welded portion is a closed curve as shown in FIG. Alternatively, the welding space 84 can be formed in the transparent member 83 by partially cutting the transparent member 83 in the depth direction using high-pressure jet water, in which case the photolithography method is not required.

FIG. 10 is a sixth embodiment of the present invention, and is a diagram showing another embodiment in which a welding space is formed in a plate attached to a transparent member. As shown in FIG. 10A, a plate member 92 is attached to a transparent plate member 91 . This attachment may be performed using an adhesive, or may be adhered using, for example, a fusion method. The plate material 92 is, for example, a metal or alloy such as an aluminum-based material, a copper-based material, or an iron-based material, a semiconductor such as silicon, or various ceramics, glass, plastic, or the like. The transparent plate material 91 is, for example, quartz glass or the like. A resist pattern 93 is formed on a plate material 92 by photolithography, and a window 94 is formed in a portion for forming a welding space. Next, as shown in FIG. 10B, a photoresist pattern 93 is used to etch the plate material 92 to form a welding space 95. Next, as shown in FIG. If the plate material 92 is aluminum or iron, for example, it can be etched with a solution such as hydrochloric acid or sulfuric acid. Moreover, since this solution does not etch quartz glass or the like, it is possible to completely etch aluminum or iron in the depth direction, and it is also possible to leave the quartz glass plate 91 as it is. For example, if a 5 mm thick aluminum plate is attached to a 0.1 mm to 1 mm thick quartz glass or the like, a welding space 94 with a depth (or height) of 5 mm can be formed. As for other materials, there are etching solutions and dry etching gases that have a high etching selectivity with respect to quartz glass and the like. Only the quartz glass plate 91 can be left on the bottom (surface), and the laser beam can be irradiated to the welding portion (see FIG. 9) through this quartz glass plate 91 .

Even if the plate material 92 is completely removed by etching in the depth direction, the plate material 92 adheres to the plate 91 such as quartz glass. The welded portion 14 is a closed curve), and since the plate material 92 remains on both sides of the welded portion, the work plate is reliably held down, and the laser irradiation is continuously interrupted at the welded portion where the closed curve is formed. can be irradiated like a unicursal drawing). Moreover, since the thickness of the plate material 92 can be appropriately selected and the depth (height) of the welding space 95 can be controlled accordingly, the plate 81 such as quartz glass is not affected by heat, gas, particles, etc. generated by laser beam irradiation. can be made Furthermore, if the material of the plate member 92 is appropriately selected, the influence of heat due to laser irradiation and the effect of spattered particles on the side surface of the plate member 92 in the welding space 95 can be reduced. For example, if the plate material 92 is aluminum, the heat resistance temperature is about 500°C, if it is copper, it can withstand about 800°C, and if it is iron, it can withstand about 1200°C. (Furthermore, among the plates 81 such as quartz glass, quartz and quartz glass can withstand at least about 1000° C. to 1700° C.) As a result, the holding jig composed of the plate materials 81 and 82 such as quartz glass can be used repeatedly. As a result, it is possible to reduce running costs. The plate material 92 may be cut using the high-pressure jet water described in the explanation of FIG. Sometimes there is no need to use photolithography.

FIG. 11 shows another embodiment (seventh embodiment) of the invention, in which the side of the mold facing the welding space is provided with a heat-resistant material. That is, the workpiece 10 (combining the workpiece upper plate 11 and the workpiece lower plate 12) is pressed and fixed by a workpiece pressing jig 107 from above and by a workpiece pressing jig (lower side) 108 from below. A work holding jig 107 is a transparent plate member 21 to which a mold 101 that fits the projecting portion of the upper plate 11 of the work is attached. Similarly, the work holding jig 108 is a plate material 22 to which a mold 105 that fits the projecting portion of the work lower plate 12 is attached, and the area of the welding portion 106 of the work 10 and its peripheral area become the welding space 103. there is A laser beam 109 passes through the welding space 102 through the transparent plate member 21 and irradiates the welding portion of the workpiece 10 . At this time, heat, gas, and scattered matter (particles) are generated (indicated by arrows). Since the welding space is filled with shielding gas and there is a shielding gas flow, the heat is discharged outside the work holding jig along with the shielding gas flow. There is a possibility that the side surface of the molding material (mold) 101 may be degraded by colliding with, transmitting, or drifting against the side surface of the molding material (mold) 101 . In particular, when the molding material is plastic or the like, there is a high possibility of deterioration. Therefore, a protective member (also referred to as a protective wall) 104 is formed and arranged on the side surface of the molding material 101 . The protective material 104 is desirably made of a material having heat resistance and strength. For example, it is a metal such as copper, lead, tin, iron, nickel, or various alloys, an insulating film such as a silicon oxide film, or a semiconductor film such as a silicon film. Laser light does not pass through the welding space 103 on the workpiece holding jig 108 side, but heat is generated during welding. The lower work holding jig may be a jig that directly contacts and holds down the work portion 106 of the work lower plate 12 without providing a welding space if no particular problem occurs during welding. In this case, the material of the portion of the lower work plate 12 that contacts the work portion 106 is desirably the above-described material that can withstand the transmitted heat, since the heat during welding is transmitted.

12A and 12B are diagrams showing a method of forming and arranging protective walls 104 on the side surfaces of molding materials (molds) 101 and 105 shown in FIG. FIG. 12(a) shows, for example, the next view of FIG. 6(b). That is, after the upper frame plate 51 and the welding space frame plate 53 are removed, a metal film or the like 111 having a predetermined thickness is formed on the side surface of the mold material (mold) 101 surrounding the welding space 102 . Here, in FIG. 12, parts that are the same as those in FIG. A conductor film including a metal film, an insulating film, or a semiconductor film (hereinafter referred to as a metal film or the like) 111 is formed by a PVD (physical vapor deposition) method such as sputtering, vapor deposition, or ion plating, or a CVD method (chemical vapor deposition). Therefore, it is laminated not only on the side surface of the molding material (mold) 101 but also on the bottom surface of the welding space 102 (where the lower frame plate 52 is exposed) and the top surface of the molding material (mold) 101 . Metal films include aluminum, copper, nickel, gold, titanium, tungsten, molybdenum, iron, other metals, and other various alloy films. The conductor film is, for example, silicide (compound of Si and metal). The insulating film is a silicon oxide film, a silicon nitride film, a silicon oxynitride film, ceramics, or various other insulating films. The semiconductor film is for example silicon.

Thereafter, an adhesive or the like 114 is formed on the upper surface of the mold material (mold) 101 by a photolithography method, a squeegee method, a dipping method, a roll method, a dispensing method, or the like, and a transparent plate member 21 is adhered thereon. A molding material (mold) 101 is fixed to the plate material 21 . It should be noted that other adhesion methods, such as fusion bonding, may be used for fixing. (FIG. 12(b)) If the transparent plate member 21 is formed with the above-described grooves, alignment is performed so that the grooves are aligned with the welding space 102 . Next, when the upper frame plate 52 is removed from the molding material (mold) 101, the metal film 111 laminated on the upper frame plate 52 on the bottom side disappears, so that the welding space 102 is formed as shown in FIG. 12(c). A metal film or the like is laminated on the side surface (the side surface of the mold (material)). Since these metal films and the like have heat resistance and strength, they can protect the side surfaces of the molding material from heat generated during laser irradiation. Further, when the metal film or the like 111 is a metal film or a conductive film, only the side surface of the welding space 102 (the side surface of the mold (material)) where the metal film or the like 111 is exposed is plated with a metal plating film by selective CVD or the like. can also be laminated thickly, so it can be made into a stronger protective wall.

FIG. 12(d) shows the structure shown in FIG. 12(a) by removing the metal film 111 laminated on the upper surface of the molding material 101 and the bottom surface of the welding space 102 and leaving only the side surface of the welding space 102 with the metal film. It is a figure which shows the state which left equality 111. FIG. For example, anisotropic dry etching (for example, RIE (reactive ion etching)) is applied to the structure shown in FIG. be able to. Alternatively, the metal film or the like 111 laminated on the bottom surface of the welding space 102 may be removed by high-pressure jet water. Next, as shown in FIG. 12(e), an adhesive layer 116 or the like is formed on the upper surface of the molding material 101, and the transparent plate material 21 is adhered thereto. After that, by removing the upper frame plate 52, a work holding jig (upper side) having a metal film or the like 111 formed only on the side surface of the welding space 102 is completed. If the metal film or the like 111 is a conductor film, it is formed thicker with metal plating (eg, copper, gold, zinc, tin, nickel, various solder alloys) or selective CVD metal film (eg, tungsten) to make it more robust. It can also be used as a protective wall. A work holding jig (lower side) can also be manufactured in the same manner.

FIG. 13 is a view showing an eighth embodiment of the present invention, which is similar to FIG. 11, but in mold members 101 and 105, not only the sides of the welding space but also the bottom (or top) side of the welding space is provided with protective material. A (protective wall) 122 is formed. A work holding jig (upper) 125 holds down (holds down) the work upper plate 11 , but a protective material (protective wall) 122 is interposed between the work upper plate 11 and the molding material 101 . A work holding jig (lower) 126 holds down (holds down) the work lower plate 12 , but a protective material (protective wall) 122 is interposed between the work lower plate 11 and the molding material 105 . Since the work holding jig is used repeatedly, if the work 10 comes into direct contact with the molding material, it will wear little by little. influence. In particular, if the molding material is a member that is easily worn (for example, plastic), the wear becomes noticeable. Therefore, as shown in FIG. 13, if a protective material (protective wall) 122 is formed not only on the sides of the welding space but also on the bottom (or top) of the welding space in the molding materials 101 and 105, the life of the molding materials 101 and 105 can be extended. can be extended. Since the protective material (protective wall) 122 can be formed at the same time as the side of the welding space, a material with heat resistance and strength is desirable. Examples include metals such as copper, iron, zinc, nickel, and solder alloys, silicon oxide films, silicon nitride films, and insulating films such as ceramics.

The manufacturing method thereof can be, for example, the same method as in FIG. After the step of FIG. 6B, the lower frame plate 52 is removed without removing the upper frame plate 51. As shown in FIG. The subsequent steps may follow the steps shown in FIG. 12. Protective material films 122 are formed on the side and bottom surfaces of the molding material 101 by sputtering or the like, and if necessary, the protective material film is thickly formed by plating or selective CVD. . Here, when adding by a plating method or the like, a film formed by a sputtering film or the like serves as a seed film (seed film). After that, after attaching a support plate material to the bottom surface of the molding material 101, the upper frame plate 51 is removed. At this time, the protective material film formed on the bottom surface of the welding space 102 is removed. After that, the transparent plate material 21 is attached. After that, the support plate material is removed, and the workpiece holding jig (upper side) 125 is completed. Here, the role of the support plate material is that, as shown in FIG. 1, when the welded portion 14 is a closed curve, the welding space is formed around the welded portion 14, so the upper frame plate can be formed without using the support plate material. Removing 51 separates the mold surrounded by the weld space 102 . Use a support member. Similarly, the workpiece holding jig (lower side) 126 can be manufactured with the same structure.

FIG. 14 is a diagram showing another embodiment (ninth embodiment) of the present invention, showing a method of producing a molding material after preliminarily producing a protective wall on the side of a welding space. As shown in FIG. 14( a ), a protective wall 131 is attached to the lower surface of the transparent plate member 21 . This attachment may use an adhesive, may use a fusion method, or may employ other means. A pattern of the protection wall 131 may be formed in advance on the sheet material and transferred to the transparent plate material 21 . By adhering the protective wall 131 to the transparent plate material 21, a welding space (a portion to be formed) 134 and a molding material (mold) (a portion to be formed) 135 are formed. Further, the transparent plate 21 is formed with a mold injection hole 132 which is an inlet for injecting the molding material so as to communicate with the molding material (mold) (a portion to be formed) 135 . This injection hole 132 can be made by laser, high-pressure jet water, etching, or the like.

Next, as shown in FIG. 14(b), the upper frame plate 133 is attached to the lower surface of the protection wall 131. Next, as shown in FIG. This attachment method can also be performed using an adhesive, a fusion method, or the like. The shape of the upper frame plate 133 is such that the shape of the completed molding material (mold) matches the shape of the upper plate of the work. As a result, the portion of the molding material (mold) (the portion to be) 135 becomes a closed space surrounded by the transparent plate member 21 , the protective wall 131 and the upper frame plate 133 . Next, the molding material is injected through the mold injection hole 132 into the portion (space) of the molding material (mold) (the portion to be formed) 135 . In order to facilitate the injection of the molding material and to prevent the formation of defects (cavities, etc.) in the molding material, if necessary, the transparent plate member 21 and the upper frame plate 133 are provided with gas vent holes or vacuum holes, and the molding material ( Degassing or the like in the portion (space) of the mold) (portion to become) 135 may be performed. After filling the portion (space) of the molding material (mold) (the portion to become) 135 with the molding material, predetermined heat treatment or the like is performed to solidify the molding material (mold) 135 (also denoted as 135).

Since nothing is put in the welding space ((the part to be) 134, it is in a hollow state. After this, by removing the upper frame plate 133, the work holding jig (upper) can be manufactured. Work holding jig In (upper), a welding space 134 and a molding material (mold) 135 are formed in the transparent plate material 21, and a protective material (wall) 131 is attached to the side of the welding space 134 and the molding material (mold) 135. Although the protective member (wall) 131 is made of the materials described above, since it is attached to the transparent plate member 21 in advance, various materials can be used, and a relatively thick and sturdy member can be used. For example, heat-resistant steel, heat-resistant alloys, and heat-resistant metals can be used, such as molybdenum steel, nickel-based alloys, titanium alloys, tungsten, and molybdenum. , For example, various plastics, various ceramics, and various metals (including alloys).Plastics include, for example, epoxy resin, polyimide resin, polycarbonate resin, PET resin, and polypropylene resin.The same applies to the work holding jig (lower). can be made.

FIG. 14(d) is a diagram showing an embodiment different from the above FIGS. 14(b) and 14(c). FIG. 14(d) shows the process after FIG. 14(a). That is, the upper frame plate 136 is attached to the transparent plate member 21 to which the protection wall 131 is attached. The upper frame plate 136 is a mold member that is attached only to the molding material (mold) (the portion to be formed) 135 . The shape of the lower side of the upper frame plate 136 is adapted to the shape of the work upper plate 11 . Therefore, the upper frame plate 136 is not attached to the welding space (the part that should be) 134 . Since the upper frame plate 136 is a mold member that is attached only to the mold material (mold) (the part that should be) 135, as can be seen from FIG. ) (parts to be) 135 are separated, so that they are manually or mechanically (automatically) attached to the lower surface of the protective wall 131 with an adhesive or by using a fusion bonding method or the like while being individually aligned. Alternatively, the upper frame plate 136 may be attached to a sheet or the like and transferred. As a result, the portion of the molding material (mold) (the portion to be) 135 becomes a closed space surrounded by the transparent plate member 21 , the protective wall 131 and the upper frame plate 136 . Next, the mold material is injected through the mold injection hole 132 into the portion (space) of the mold material (mold) (the portion to be formed) 136 . In order to facilitate the injection of the molding material and to prevent the formation of defects (cavities, etc.) in the molding material, if necessary, the transparent plate member 21 and the upper frame plate 136 are provided with gas vent holes or vacuum holes, and the molding material ( Degassing or the like in the portion (space) of the mold) (portion to become) 135 may be performed. After filling the portion (space) of the molding material (mold) (the portion to become) 135 with the molding material, predetermined heat treatment or the like is performed to solidify the molding material (mold) 135 (also denoted as 135). The work holding jig (upper) is now completed, and the work holding jig (upper) is formed by forming a welding space 133, a molding material (mold) 135, and an upper frame plate 136 in the transparent plate member 21. A protective material (wall) 131 is attached to the side surface of 133 and molding material (mold) 135 . In addition, since the upper frame plate 136 is in contact with the work upper plate 11, the mold material (mold) 135 is hardly affected, so that the life of the mold material (mold) 135 can be extended. As a material for the upper frame plate 136, it is desirable to use a material that does not wear out, has high strength, and has a certain degree of heat resistance. For example, various metals, various resins, various insulators, various ceramics, etc. mentioned above may be selected as appropriate according to the work material. A work holding jig (bottom) can be similarly manufactured. If the upper frame plate 136 wears out, it can be removed and replaced.

Since it is not necessary to remove the upper frame plate in FIG. 14(d), the process is simplified. Even if the heat resistance and strength of the mold material are insufficient, there is no particular problem if the protective material (wall) 131 and the upper frame plate 136 are sturdy (have heat resistance and are strong enough to prevent deformation). There is an advantage that there is a large margin for material selection. As can be easily understood, in the case shown in FIG. 14(d), if the protective material (wall) 131 and the upper frame plate 136 are sturdy (having heat resistance and strength to the extent that they do not deform), the mold No need to use materials. Therefore, there is an effect of reducing the material cost. Furthermore, if the protective member (wall) 131 and the upper frame plate 136 are integrally attached to the transparent plate member 21, it can be used as it is, and the manufacturing process of the work holding jig can be greatly reduced. Also, in the structure shown in FIG. 14(a), if the protective material (wall) 131 has sufficient strength, the lower surface of the protective wall 131 can be brought into contact with the work and the work can be restrained. and through the welding space 134 to irradiate and weld the workpiece to be welded. Therefore, material costs and processes can be greatly reduced. Since the welding space 134 surrounded by the protective wall 131 can also be a closed space, the amount of shielding gas can be reduced and the running cost can be reduced. In other words, if a work holding jig having protective walls 131 formed only in necessary areas around the welding area is used, inexpensive and high-quality welding can be performed. As for the work holding jig, the jig through which the laser beam passes (work holding jig (upper side)) should be the one described above, but the jig through which the laser beam does not pass (work holding jig (lower side)) is simply a work holding jig (lower side). It is sufficient to simply hold down the bottom of the joint, or to provide a welding space only around the welding portion.

FIG. 15 is a diagram showing a state in which the workpiece is held down and laser irradiation is performed when the workpiece holding jig is manufactured with the structure shown in FIG. 14(a) described above. A work holding jig (upper side) 139 has a protective wall (which may also be called a protective plate material) 131 on the transparent plate material 21 , and a space surrounded by the protective wall 131 and the transparent plate material 21 is a welding space 134 . A work holding jig (upper side) 139 presses and fixes the work top plate 11 by receiving a downward force 142 when the bottom face (end face) of the protection wall 131 hits the top face of the work top plate 11 . Even if the work top plate 11 has a projecting portion 13, the projecting portion 13 fits into the space 135 of the work holding jig (upper side) 139 (in FIG. 14, where the molding material should be). The pressing of the jig (upper side) 139 is not affected. On the other hand, in the work holding jig (lower side) 140, the upper (lower) surface of the protection wall 131 hits the lower surface of the work lower plate 12, and receives an upward force 142 to hold down and fix the work lower plate 12. As shown in FIG. Even if there is a projecting portion 13 on the work lower plate 12, the projecting portion 13 fits into the space 143 of the work holding jig (lower side) 140 (in FIG. 14, where the mold material should be). The pressing of the pressing jig (lower side) 140 is not affected. As a whole, the work 10 is held by work holding jigs 139 and 140 from above and below so that the work 10 is fixed such that the welding portion 138 of the work 10 is aligned between the work upper plate 11 and the work lower plate 12 . As a result, the positions of the welding space 134 of the work jig (upper side) 139 and the welding space 141 of the work holding jig (lower side) are also substantially aligned.

After the work 10 is held down by the work holding jig (upper side) 139 and the work holding jig (lower side) 140 from above and below, it passes through the transparent plate 21 from above the work holding jig (upper side) 139, and the welding space 134 below it. The welding area 138 is irradiated through the workpiece upper plate 11 and the workpiece lower plate 12 are welded at the welding area. Since the welding space 134 is surrounded by the transparent plate material 21, the protection wall 131, and the workpiece upper plate, the welding spaces 134 and 141 are filled with shielding gas (Ar, He, N2), and pressure is applied if necessary. The quality of the joint can also be improved by pouring it over. If sufficient airtightness cannot be maintained by the contact between the protection wall 131 and the work upper plate 11, the end surface (lower surface) of the protection wall 131 may be provided with a flexible member (for example, heat-resistant plastic, heat-resistant rubber, flexible metal, or the like). alloy), even if the work upper plate 11 has irregularities, the adhesion between the lower surface (end face) of the protective wall 131 and the work upper plate 11 is enhanced, and the airtightness of the welding space 134 can be maintained. Therefore, shielding gas will not leak out of the welding space 134 . Since the volume of the welding space 134 as a whole is not so large, even if the shielding gas is pressurized, the amount to be used is small, and the running cost can be reduced. It should be noted that since the entire welding space 134 is all connectable, the shielding gas is introduced from one location in the welding space 134 and the shielding gas is released from another location to create a shielding gas flow. can be made Also, if the inlet and outlet are connected on the outside and a circulation pump is inserted between them, the shield gas can be circulated, so that the consumption of the shield gas can be further reduced. Incidentally, the workpiece holding jig (lower side) 140 can also be manufactured in the same manner, and the shield gas can also flow. again. The welding space is surrounded by a heat-resistant and high-strength protective material 131, which also serves as protection against generated heat and spatter (scattered matter, particles).

FIG. 16 is a diagram showing a state in which the shielding gas is caused to flow into the welding space. Since FIG. 1 is used, the same parts as in FIG. 1 are given the same reference numerals. As described above, the welded portions 14 (14-1, 2, 3, 4) form a closed curve (one-stroke curve) surrounding the convex portion 13 (13-1, 2, 3, 4). there is A weld space 156 (156-1, 2, 3, 4) surrounds the weld site . Adjacent welding spaces 156 are connected to each other through connection spaces 155 . The weld space 156 is surrounded by side walls (side walls), ie inner side walls 151 (151-1, 2, 3, 4) and outer side walls 152 (152-1, 2, 3, 4). The inner side wall 151 (151-1, 2, 3, 4) has a closed curve similar to the welding part 14 (14-1, 2, 3, 4), but the outer side wall 152 (152-1, 2, 3, 4) has a closed curve. 4) is connected to the connection space 155 . In any case, the welding space 156 and the connection space 155 are closed spaces. Part of the welding space 156 is connected to an inlet 153 and an outlet 154 , and the shielding gas is introduced from the inlet 153 to fill the welding space 156 and the connection space 155 and exit from the outlet 154 to the outside. The inlet 153 is connected to, for example, a gas cylinder containing a shielding gas, and the shielding gas is introduced through the inlet while adjusting the pressure and flow rate. The outlet 154 side may be discharged to the outside as it is, but it is also possible to control the discharge amount (flow rate) while adjusting with a valve or a flow meter. Alternatively, a vacuum pump or the like may be connected to forcibly evacuate, and in some cases, the welding space or the like may be made to have a low pressure (1 atm or less). By setting the welding space to a low pressure (less than 1 atm to vacuum), the transparent plate member 21 is pushed from above (at atmospheric pressure, etc.), so the inner side wall 151 and the outer side wall 152 are also pushed to press the workpiece upper plate 11. If the lower side also has the same or similar structure, or if it is a stand or the like, the work lower plate 12 is also pressed from below. Therefore, the work piece 150 can be reliably brought into contact with the welding portion 14, thereby improving the welding quality. In particular, shape defects such as wrinkles may occur when the welded portion melts and solidifies, but this phenomenon can be reduced by lowering the pressure in the welding space. By keeping the welding space at a low pressure, it is also possible to prevent oxidation and the like at and around the welded portion 14 .

Alternatively, the outlet 154 may be connected to the inlet 153, and a pump or the like may be interposed to circulate. Further, a filter or the like may be inserted between them to remove the scattered matter and scattered particles of the shielding gas. By circulating the shielding gas, the amount of shielding gas used can be reduced, and the running cost can also be reduced. Alternatively, the shielding gas can be confined within the weld space 156 or the like. When the pressure entering the welding space 156 is increased (to 1 atmospheric pressure or more), the speed at which spatters (particles, gas) generated during welding reach the side walls 151 and 152 of the welding space 156 is reduced, and the heat transfer speed is also reduced. Since it can be lowered, the impact and heat exerted on the side walls 151 and 152 of the welding space 156 can be mitigated, and the side walls 151 and 152 can be protected. Furthermore, if the flow rate of the shielding gas flowing through the welding space is increased, the movement of spattered materials (particles, gas) and heat generated during welding can be changed in the flow direction. It can absorb impact and heat and protect the side walls 151 and 152 . Therefore, the temperature, pressure, flow velocity, flow rate, etc. of the shielding gas can be adjusted according to the laser welding conditions (irradiation area, generated heat, irradiation time, etc.) to minimize the effect on the side wall. In addition, when a space such as the welding space 156 is set to a high pressure by introducing a shielding gas, the work plate is pressed against the welded portion by the pressure, so that the contact of the welded portion is ensured, and the welding quality of the welded portion can be further improved. . Furthermore, a cooling mechanism may be provided to cool the shielding gas and lower the temperature of the welding space 156, forcing the heat transferred to the side walls 151 and 152 of the welding space 156 to cool down the side walls 151 and 152 of the welding space 156. can also be protected from heat. 1 and 16 are closed curves with four welded portions 14, but if there are more welded portions, the number of inlets and outlets may be increased as appropriate. Also, in the figure, the welded portion is a circular closed curve, but it is of course possible to use any closed curve, or it does not have to be a closed curve. If the curve is not a closed curve, the shielding gas will enter the entire area. Alternatively, a closed space surrounding the welding site may be created, and the present invention is applicable to all welding.

FIG. 17 is a diagram showing an embodiment (tenth embodiment) in which a transparent plate member provided with a welding space is used as a workpiece retainer. The transparent plate member provided with the welding space has already been described with reference to FIGS. 9, 10, etc., but FIG. Since the work holding jig (lower side) uses the one shown in FIG. 4, the same reference numerals are given. A plate member 163 is attached to a transparent plate member 162 at a boundary line 164. If the plate member 163 is made of the same material as the transparent plate member 162 (for example, quartz glass, etc.), it can be considered as an integrated object (one transparent plate member). good. If different materials are used, the case is the same as the case shown in FIG. The work lower plate 12 has a convex portion 13 as in the case shown in FIG. Since the work upper plate 161 is flat, the work holding jig shown in FIGS. 9 and 10 can be used. That is, a welding space 165 (which may be called a groove as described above) is created around the welding portion 14 , and a portion of the welding space 165 through which the laser beam 167 passes becomes a transparent plate material 162 . The laser beam 167 is transmitted through the transparent plate member 162 and radiated to the welding portion 14 through the welding space 165 to weld the workpiece upper plate 161 and the workpiece lower plate 12 . If the work upper plate 161 has a projecting portion 168, if a space 165A is created so that the projecting portion 168 can be accommodated in the projecting portion 168, the work holding jig (upper side) can hold the work. has no effect at all. Since the space 165A can be produced at the same time as the welding space 165 is produced, the number of processes is not increased. These work holding jigs can be manufactured by the method described with reference to FIGS. The method of holding the work holding jig against the work may be appropriately selected. For example, the work holding jig (upper side) and the work holding jig (lower side) may be clamped using portions not irradiated with laser. In the case of this embodiment, the total cost of laser welding can be greatly reduced because of the fewer types of materials and fewer manufacturing processes, and the ability to appropriately select heat-resistant materials and materials with high strength and the like. Moreover, if necessary, a protective wall having desired properties such as heat resistance and high strength can be formed on the side of the welding space 165 . The manufacturing method is as described above. For example, after forming the welding space, a protective film is formed on the welding space side by a method such as a sputtering method, and anisotropic etching is performed to form a protective wall only on the side of the welding space. can be made.

By setting the welding space on the laser irradiation side to a low pressure and the welding space on the opposite side to a high pressure, the work is securely fixed, the contact of the welding part of the work is also secured, and the welding quality is improved. Description will be made based on FIG. When the welding space 102 on the laser irradiation side is evacuated to a low pressure (less than 1 atm), the workpiece upper plate 11 is brought into close contact with the workpiece holding jig (upper side) 107 . When a shielding gas is introduced into the welding space 103 on the opposite side to a pressure exceeding 1 atm, the part of the workpiece lower plate 12 facing the welding space 103 is pushed from below, so that the workpiece upper plate 11 and the workpiece lower plate are pressed in the welding space. The adhesion of 12 is increased, and the quality of laser welding is improved. In addition, it is necessary to hold or push the work holding jig (lower side) from below so that the work holding jig (lower side) and the work lower plate 12 do not separate when the welding space 103 becomes high pressure. Alternatively, the work holding jig (lower side) may be placed on a pedestal or the like, and the work holding jig (upper side) may be pushed from above. The role of the shield gas here is to increase the pressure and prevent oxidation during welding, so Ar, He, and nitrogen (N2) described above can also be used. Air or oxygen (O2) can also be used in the case of a member that is difficult to oxidize or a member that does not pose a problem even if oxidized. When the pressure is to be increased, a gas pressure exceeding 1 atm is used on the gas supply side (for example, a high-pressure gas cylinder, liquid gas). Alternatively, the pressure may be increased using a compressor or the like. A regulator or the like can also be used for pressure regulation. So far, laser irradiation has been described as irradiation from one side (upper side), but the present invention can be applied even when laser irradiation is performed from both sides (upper side, lower side). In this case, the lower plate material may be a transparent member through which laser light is transmitted.

As described in detail above, the work jig holding jig for laser welding of the present invention irradiates a laser beam to a work welding portion through a transparent plate material, and reliably holds (fixes) the periphery of the welding portion and the welding space. Equipped with a protective material inside to protect against flying objects during welding. Therefore, even if it is used repeatedly, deterioration is small, so that it can be used for a long time and the running cost can be reduced. In this specification, it is needless to say that the contents described and explained in a certain part of the specification can be applied to other parts without contradiction, and the contents can be applied to the other parts. In addition, it is a matter of course that the contents of the examples, embodiments, etc. described in this application document can be used in combination with the contents of other examples, embodiments, etc. Further, the above-described embodiment is merely an example, and can be implemented with various modifications within the scope of the invention, and the scope of rights of the present invention is not limited to the above-described embodiment.

Since the workpiece holding jig for laser welding of the present invention can be applied to various shapes of workpieces, it can be applied to small products such as semiconductors and large products such as automobiles and ships.

DESCRIPTION OF SYMBOLS 10... Work, 11... Work upper plate, 12... Work lower plate, 13... Convex part,
14... Welded portion, 15... Hollow space, 21... Transparent plate material, 22... Plate material,
101... mold (material), 102... welding space, 103... welding space,
104... protective material (protective wall), 105... mold (material), 106... welding part,
107 Work holding jig (upper side), 108 Work holding jig (lower side),
109... laser light, 21... transparent plate material, 22... plate material,
107 Work holding jig, 108 Work holding jig,

Claims (24)

A laser that has a laser welding workpiece holding jig on the side irradiated with laser light (upper welding workpiece holding jig) and a laser welding workpiece holding jig on the opposite side of the laser beam irradiation side (lower welding workpiece holding jig) A work holding jig for welding,
The upper welding work holding jig has a transparent plate, and laser welding is performed by irradiating the welding part of the work with a laser beam through the transparent plate,
A space (first welding space) is formed in a region from the welding portion to the transparent plate, and the laser beam passes through the first welding space and is irradiated to the welding portion,
The lower welding work holding jig has a welding space (second welding space) on the side opposite to the first welding space,
A work holding jig for laser welding, wherein the upper welding work holding jig is a jig for holding the upper work, and the lower welding work holding jig is a jig for holding the lower work.
2. The workpiece for laser welding according to claim 1, wherein in the lower welding workpiece holding jig, the plate material facing the lower workpiece plate forming the second welding space is made of a material that does not transmit laser light. holding jig.
3. A work holding jig for laser welding according to claim 1, further comprising a mechanism for flowing a shielding gas into said second welding space.
The work holding jig for laser welding according to any one of claims 1 to 3, further comprising a mechanism for reducing the pressure of the second welding space to a pressure of less than 1 atm.
4. The work holding jig for laser welding according to any one of claims 1 to 3, further comprising a mechanism for increasing the pressure of said second welding space to a pressure exceeding 1 atm.
6. The work holding jig for laser welding according to claim 1, wherein said transparent plate is a quartz plate or a quartz glass plate.
7. The work holding jig for laser welding according to claim 1, wherein a part of the transparent plate holds a part of the work.
8. The work holding jig for laser welding according to claim 7, wherein a work holding member is attached to said transparent plate at a portion of said transparent plate for holding said work.
9. A work holding jig for laser welding according to claim 8, wherein said holding member is a flexible member.
10. The method according to any one of claims 1 to 9, wherein the transparent plate has a groove in a region facing the welding site, and the laser beam passes through the groove of the transparent plate to irradiate the welding site. Work holding jig for laser welding described.
11. A workpiece holding jig for laser welding according to claim 10, wherein said groove is the first welding space.
A plate material is attached to the transparent plate, and a through groove is formed by removing the plate material in a portion irradiated with the laser beam, and the through groove becomes the first welding space. Item 12. A workpiece holding jig for laser welding according to any one of Items 1 to 11.
13. The work holding jig for laser welding according to claim 12, wherein the plate material is metal, alloy, plastic, or ceramics.
The transparent plate has a mold conforming to the shape of the work other than the portion of the first welding space, and the work is held by the mold during laser welding. 14. A workpiece holding jig for laser welding according to any one of items 1 to 13.
A work holding jig for laser welding according to any one of claims 1 to 14, wherein said molding material is plastic, metal or ceramics.
16. A work holding jig for laser welding according to claim 14 or 15, wherein a flexible member or a metal member is arranged on the lower surface of said mold.
The work retainer for laser welding according to any one of claims 1 to 16, characterized in that a protective material is arranged on the side surface of the first welding space to protect the side surface of the first welding space. Jig.
18. The work holding jig for laser welding according to claim 17, wherein the protective material is a heat-resistant material and/or a high-strength material.
19. A work holding jig for laser welding according to claim 17 or 18, wherein said protective material is a metal or an alloy.
A part of the welding portion is a closed curve, the periphery of the welding portion of the closed curve is surrounded by a first welding space, and the laser beam can weld the entire welding portion of the closed curve by continuous irradiation. Item 21. A workpiece holding jig for laser welding according to any one of Items 1 to 20.
The work holding jig for laser welding according to any one of claims 1 to 20, further comprising a mechanism for flowing shielding gas into said first welding space.
The work holding jig for laser welding according to any one of claims 1 to 21, characterized by comprising a mechanism for reducing the pressure of said first welding space to a pressure of less than 1 atm.
A workpiece holding jig for laser welding according to any one of claims 1 to 21, characterized by comprising a mechanism for increasing the welding space to a pressure exceeding 1 atm.
Using the work holding jig for laser welding according to claim 5, during laser irradiation, the welding space on the laser irradiation side (first welding space) is set to a low pressure and the welding space on the opposite side (second welding space) A laser irradiation method, characterized in that the laser irradiation is performed by setting the to a high pressure.

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