JP7237400B1 - Jig for finishing and jig stand for finishing - Google Patents

Abstract

A finishing jig for finishing a cross section of a plate-shaped sample to form a cross section suitable for observation and a stand for the finishing jig are provided. A finishing jig (11) slides along a guide groove (12) and cuts a protruding portion of a plate-like sample protruding above a working surface (11a) to finish the plate-like sample. , a clamping mechanism 14 for fixing the plate-shaped sample at a clamping position, and a machining allowance setting mechanism 15 for setting a machining allowance made by the projecting portion. A blade movement path surface R1 is provided on the working surface 11a, and the blade unit 13 has a blade 17a that slides on the blade movement path surface R1. The clamping mechanism 14 comprises a fixed side mouthpiece 19 and a movable side mouthpiece 20 which can move toward the fixed side mouthpiece and press the plate-shaped sample in the thickness direction with a constant force by obtaining the elastic force of the spring 22 . have. The blade moving path surface R1 includes the upper surfaces 19b and 20q of both mouthpieces in a fixed state of the plate-shaped sample. [Selection drawing] Fig. 4

Description

Application of Article 30, Paragraph 2 of the Patent Law Website publication date: February 1, 2022 Website address: https://www. nogami-gk. co. jp/products/ Distribution date: November 8-10, 2022 Distribution location: 63rd Battery Symposium 2-1 Sekijo-cho, Hakata-ku, Fukuoka City, Fukuoka Prefecture Fukuoka International Conference Center Distribution date: 11, 2022 16th to 18th of the month Distribution place: [Kansai] Rechargeable battery exhibition 1-5-102 Nankokita, Suminoe-ku, Osaka-shi, Osaka Intex Osaka

TECHNICAL FIELD The present invention relates to a jig for finishing and a stand for a jig for finishing. The present invention relates to a finishing jig and a stand for the finishing jig used when finishing a cross section.

In the material inspection of various objects, cross-sectional observation of a sample is generally used as a method of grasping the properties of the sample. A rough procedure for creating a sample cross section used in such observation is, for example, to cut out the vicinity of a site to be observed (primary processing). Then, secondary processing such as mechanical polishing or ion milling is performed on the cut surface, and the cut surface is attached to an observation sample stage for observation. Among various secondary processes, ion milling polishes the cross section of a sample by irradiating it with an ion beam. It is widely used as a treatment (see Patent Document 1, for example).

JP 2005-91094 A

However, the preprocessing (secondary processing) for observing the cross section of the sample requires a complicated process of repeating processing that requires precision and cross-sectional observation, and besides, workability is affected by the quality of the primary processing. It also has a large impact. Therefore, there is a demand for secondary processing means that can efficiently remove the destruction (cracking, crumbling, delamination, etc.) of the cross section of a sample that has occurred in the primary processing, and can stably obtain a high-quality cross section.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a finishing jig and a finishing jig stand for finishing a cross section of a sample to form a cross section suitable for observation.

In order to achieve the above object, the finishing jig of the present invention slides along a linear guide groove provided on a work surface to cut a projecting portion of a plate-shaped sample that projects above the work surface. a cutting tool unit for finishing the plate-like sample, a clamping mechanism for fixing the plate-like sample at a clamping position, and a machining allowance setting mechanism for setting a machining allowance made by the projecting portion. In the finishing jig, the work surface is provided with a blade movement path surface parallel to the guide groove, the blade unit has a blade that is in sliding contact with the blade movement path surface, and the clamp is The mechanism includes a fixed mouthpiece, and can move toward the fixed mouthpiece in a direction orthogonal to the sliding direction of the blade unit, and presses the plate-shaped sample in the thickness direction with a constant force by obtaining the elastic force of a spring. The machining allowance setting mechanism has an elevating stage for projecting the plate-shaped sample onto the working surface to obtain the projecting portion, and the blade moving path surface has and the plate-shaped sample is fixed, and the upper surfaces of both the fixed side mouthpiece and the movable side mouthpiece are included.

Further, it is preferable that each of the fixed side mouthpiece and the movable side mouthpiece is formed with a right-angled portion in which the top surface of the mouthpiece and the side surface of the mouthpiece that presses the plate-shaped sample form a right angle and are continuous.

Further, the stand for the finishing jig of the present invention is the above-described stand for the finishing jig, comprising: a base on which the finishing jig is placed; and a support arm provided on the base. and a microscope attached to the support arm, wherein the support arm can be raised and lowered between a standing state in which the microscope is placed in the region directly above the working surface and a lying state in which the microscope is placed outside the region directly above the work surface. It is characterized by being composed of

According to the finishing jig of the present invention, the plate-shaped sample is protruded from the working surface by the processing margin setting mechanism, the plate-shaped sample is clamped in the thickness direction by the clamping mechanism, fixed at the clamping position, and the cutting tool By sliding the unit in the direction orthogonal to the thickness direction of the plate-shaped sample, the protruding portion made as a cutting margin of the plate-shaped sample is cut in the longitudinal direction (along the cross section) with a blade. Then, the blade slides on the blade movement path surface with a gap of 0 (zero), and both the fixed side mouthpiece and the movable side mouthpiece are located at the edge of the cross section where the blade enters, that is, the cross section of the sample and the blade. Accurately clamp the boundary with the moving path surface. This makes it possible to minimize deformation of the cross section by minimizing the force applied to the cross section of the plate-shaped sample, and to obtain a good cross section suitable for observation.

In addition, the clamping mechanism obtains the elastic force of the spring and clamps the plate-shaped sample with a clamping pressure controlled by a constant force (constant pressure). It is possible to stably obtain a good cross section suitable for

In addition, since the fixed mouthpiece and the movable mouthpiece clamp the plate-shaped sample between the mouthpiece side faces including the mutually perpendicular parts, the upper end of the mouthpiece side face can be brought into close contact with the plate surface of the plate-shaped sample. The edge of the cross section of the plate-shaped sample can be reliably clamped.

Furthermore, since the finishing jig is used in combination with the stand, it is possible to perform finishing while checking the cross section of the plate-shaped sample with the microscope provided on the support arm of the stand, making it possible to easily check the state of the cross section. can grasp. In particular, since the stand has a support arm that can be raised and lowered, it becomes easy to set the finishing jig, and workability in cross-sectional observation can be improved.

1 is a perspective view showing a state in which a finishing jig according to one embodiment of the present invention is vertically set on a microscope stand, and a supporting arm of the microscope is laid down; FIG. FIG. 4 is a perspective view showing a state in which the finishing jig is set sideways on a microscope stand; It is a perspective view of a jig for finishing. It is a top view of a jig for finishing. It is a side view of the short side side of the jig for finishing. It is a side view of the long side of the jig for finishing. FIG. 4 is an enlarged side view of a main part of the finishing jig; FIG. 8 is a cross-sectional view taken along the line BB of FIG. 7; FIG. 8 is a cross-sectional view taken along line CC of FIG. 7; FIG. 10 is a cross-sectional view taken along line DD of FIG. 9; FIG. 5 is an explanatory diagram of a process of setting a processing allowance for a plate-shaped sample with a processing allowance setting mechanism; FIG. 5 is an explanatory diagram of a process of clamping a plate-shaped sample with a clamping mechanism; FIG. 4 is a plan view of a finishing jig with a plate-shaped sample clamped; FIG. 10 is a plan view of a main part showing a state in which the angle of the blade member is changed; FIG. 4 is a front view showing a state in which the finishing jig is vertically set on the microscope stand and the supporting arm of the microscope is raised. FIG. 4 is a side view showing a state in which the finishing jig is vertically set on the microscope stand and the support arm of the microscope is raised. FIG. 4 is a plan view showing a state in which the finishing jig is vertically set on the microscope stand and the supporting arms of the microscope are raised.

The finishing jig 11 is used by being attached to a microscope stand 31 (stand of the present invention) that also serves as a workbench. ), it is possible to proceed smoothly from the finishing process of the plate-shaped sample to the observation process.

The finishing jig 11 is, for example, a flaky plate sample S1 prepared by cutting a battery component, an electronic component, or the like into a predetermined size in order to observe the structure, charging/discharging state, and the like. The cross section is used as an observation surface, and is used when finishing the cross section suitable for observation of the observation surface. For observation, scanning electron microscope (SEM: Scanning Electron Microscope), transmission electron microscope (TEM: Transmission Electron Microscope), various instruments with high magnification and high resolution, Raman spectroscopy (Raman spectroscopy), electron back Scattering diffraction method (EBSD: Electron Backscatter Diffraction) or the like can be used. Then, as shown in FIG. 1, the plate-shaped sample S1 is clamped while the finishing jig 11 is set vertically on the microscope stand 31. As shown in FIG. The plate-shaped sample S1 is cut while the finishing jig 11 is horizontally set on the scope stand 31 .

As shown in FIG. 3, the finishing jig 11 is made of a rectangular parallelepiped metal block having a working surface 11a. side surfaces 11d and 11e and a bottom surface 11f. On the work surface 11a, a blade unit 13 for finishing the plate-shaped sample S1 by cutting a projecting portion of the plate-shaped sample S1 projected above the work surface 11a while sliding along the guide groove 12; A clamping mechanism 14 for fixing the sample S1 at the clamping position and a processing allowance setting mechanism 15 for setting a cutting allowance made by the projecting portion of the plate-shaped sample S1 are provided.

In the following description, "upper" and "lower" correspond to "upper" and "lower" when the finishing jig 11 is horizontally set with the working surface 11a facing upward. ing.

As shown in FIG. 4, the guide groove 12 is formed linearly from one short side surface 11b to the other short side surface 11c, and as shown in FIG. The cross-sectional trapezoidal shape is formed with the width of the groove gradually increasing from the groove bottom 12b to the bottom 12b.

As shown in FIGS. 4 and 8 , the cutter unit 13 has a cutter holder 16 that moves along the guide groove 12 and a cutter member 17 attached to the cutter holder 16 .

The blade member 17 has a blade 17a and a blade support member 17b that supports the blade 17a. The blade 17a is a tool for concentrating the pressure on the plate-shaped sample S1 on the narrowest possible area (line), and as shown in FIG. It is attached to the blade holder 16 via the blade support member 17b with the sharp blade edge P directed toward the side surface 11c, which is the front in the sliding direction. The blade 17a may be made of hardened steel, stainless steel, cemented carbide, ceramic, hard resin, or the like. It can also be configured by providing a coating film. The shape of the blade 17a is tapered toward the tip, but the specific shape such as the blade edge angle (the angle forming the tip of the blade) is not particularly limited.

The cutting tool support member 17b has a cutting tool 17a attached to one end, a pick piece 17d provided on the other end side, and a slide hole 17e formed in the center in the longitudinal direction (Fig. 4). Further, when the blade 17a is attached to the blade support member 17b, the bottom surface of the blade support member 17b and the bottom portion 17c of the blade 17a are flush with each other.

The blade holder 16 has a slider 16a that is inserted into the guide groove 12 and slides along the guide groove 12, and a body portion 16b that is attached to the top of the slider 16a. The blade support member 17b is arranged.

The slider 16a is formed in the shape of a truncated quadrangular pyramid corresponding to the shape of the guide groove 12 (FIG. 8). The upper surface 16d is formed so as to be flush with the work surface 11a. A slider fixing screw 16e is provided at the end of the slider 16a. By tightening the slider fixing screw 16e, the slider 16a rises slightly, and the inclined surface 16c and the side surface 11c of the guide groove 12 move vertically. , and the movement of the blade holder 16 is restricted.

The body portion 16b is formed in the shape of a rectangular parallelepiped case, and a collar insertion hole 16f is formed in the center of the ceiling portion. 16g and 16g are formed respectively. Further, holding holes 16h, 16h for holding the blade supporting member 17b movably in the direction perpendicular to the guide groove 12 are formed in a pair of side surfaces of the main body 16b parallel to the guide groove 12, respectively. A plate-like safety cover 16i that covers the blade member 17 is attached to one side of the ceiling of the main body 16b.

A hollow cylindrical collar 16j is inserted through the collar insertion hole 16f, and a blade fixing knob 16k is inserted through the collar 16j so as to be rotatable and vertically movable. Further, mounting bolts 16m, 16m are respectively inserted through the pair of bolt insertion holes 16g, 16g. The slider 16a has a first female threaded hole (not shown) into which a male threaded portion formed at the lower end of the blade fixing knob 16k is screwed, and a second female threaded hole (not shown) into which the mounting bolts 16m, 16m are screwed. not shown) are formed respectively.

Furthermore, with the cutting tool holder 16 positioned closest to the side surface 11b of the guide groove 12, the working surface 11a on which the cutting tool 17a is placed is provided with an angle scale 18 that allows visual confirmation of the attachment angle of the cutting tool 17a ( Figure 14).

The blade holder 16 formed in this manner is assembled by placing the blade support member 17b on the upper surface of the slider 16a with the guide groove 12 and the first female screw hole arranged in the slide hole 17e of the blade support member 17b. The blade 17a is arranged facing the side surface 11d while being oriented in the orthogonal direction, then the main body 16b is attached to the slider 16a, and both ends of the blade support member 17b are protruded from the pair of holding holes 16h, 16h.

After the male screw portion of the blade fixing knob 16k inserted through the collar 16j is screwed into the first female screw hole, the knob 17d is operated to move the blade support member 17b in the direction perpendicular to the guide groove 12, thereby moving the blade. After placing the blade 17a at a predetermined position, the blade fixing knob 16k is further screwed in to press the collar 16j downward. Along with this, the collar 16j presses the blade support member 17b against the upper surface 16d of the slider 16a to fix the blade support member 17b at a predetermined position. Further, as a result, the gap between the bottom portion 17c of the blade 17a and the working surface 11a is zero (zero), and when the blade holder 16 is slid along the guide groove 12, the bottom portion 17c is in the state of zero gap. Then, it slides on the cutting tool movement path surface R1 parallel to the guide groove 12 provided in the working surface 11a (the area between the two dotted lines in FIG. 4). Further, a pair of mounting bolts 16m, 16m are inserted through a pair of bolt insertion holes 16g, 16g, respectively, and the mounting bolts 16m, 16m are screwed into the second female screw holes, respectively, to mount the body portion 16b on the upper portion of the slider 16a. .

As shown in the area between the two dotted lines in FIG. 4, the blade movement path surface R1 is a sliding surface on which the blade 17a slides on the working surface 11a. It has a width W corresponding to the length of the blade and a predetermined length.

As shown in FIG. 10 and the like, the clamping mechanism 14 includes a fixed side mouthpiece 19 arranged downward in parallel with the guide groove 12 on the side 11d side of the guide groove 12, and a guide member 19 directed toward the fixed side mouthpiece 19. It has a movable mouthpiece 20 that moves in a direction perpendicular to the groove 12 (a direction perpendicular to the sliding direction of the blade unit 13).

The fixed-side mouthpiece 19 is made of an insulating material such as ceramics, and as shown in FIGS. It has a mounting surface 19a on which the plate-shaped sample S1 is mounted when performing the clamping step S1. An upper surface 19b, which is upward when the finishing jig 11 is set horizontally, is formed flush with the work surface 11a. Further, as shown in FIGS. 3, 11, and 12, the fixed side mouthpiece 19 is formed with a right-angled portion C1 where the placement surface 19a and the upper surface 19b form a right angle and are continuous.

As shown in FIG. 10, the clamping mechanism 14 has a mouthpiece accommodation hole 14a formed in a direction orthogonal to the guide groove 12 from the side face 11d toward the fixed side mouthpiece 19. The movable mouthpiece is inserted into the mouthpiece accommodation hole 14a. A handle 21 is connected to the movable mouthpiece 20 for moving the movable mouthpiece 20 .

The movable side mouthpiece 20 is composed of an outer mouthpiece 20a having a U-shaped cross section that opens toward the fixed side mouthpiece 19, and an inner mouthpiece 20b that is housed inside the outer mouthpiece 20a. formed in the body. 9 and 10, the inner mouthpiece body 20b extends along the guide member 14b extending in the direction perpendicular to the guide groove 12 across the cover member 23 from the mouthpiece housing hole 14a. It is movably housed inside the body 20a.

The outer mouthpiece body 20a is housed in the mouthpiece housing hole 14a with the opening side facing the fixed side mouthpiece 19 and the bottom side facing the side face 11d. The bottom portion has a joint portion insertion hole 20c into which a joint portion 21c provided on the handle 21, which will be described later, is inserted, and a central shaft member mounting hole 20d into which one end of a central shaft member 20k provided on the inner mouthpiece 20b is screwed. , are coaxially formed in communication. The joint insertion hole 20c has a large-diameter hole on the fixed-side mouthpiece 19 side and a small-diameter hole on the non-fixed-side mouthpiece 19 side. An upper surface 20p of the outer mouthpiece 20a is formed flush with the working surface 11a.

The inner mouthpiece 20b includes a spring accommodating portion 20e arranged on the bottom side of the outer mouthpiece 20a, and a plate-like sample clamp screwed to the spring accommodating portion 20e and slightly projecting from the opening of the outer mouthpiece 20a. and a portion 20f (FIG. 10). Two bottomed first spring receiving holes 20g, 20g for receiving one end side of the spring 22 are formed in the spring receiving portion 20e in a direction orthogonal to the guide groove 12. As shown in FIG. Two second spring receiving holes 20h, 20h for receiving the other end side of the spring 22 are formed in the outer mouthpiece 20a coaxially with the first spring receiving holes 20g, 20g. The outer opening of is closed by a screw plug 20i screwed into the outer mouthpiece 20a. Further, the spring accommodating portion 20e has a center shaft member insertion hole 20j penetrating through the center portion thereof, the center shaft member 20k being inserted into the center shaft member insertion hole 20j, and an end portion of the center shaft member of the outer mouthpiece 20a. It is screwed into the mounting hole 20d.

One end of the spring 22 abuts on the bottom of the first spring housing hole 20g and the other end abuts on the screw plug 20i in a state (natural state) before being compressed.

The center shaft member insertion hole 20j has a large diameter hole portion on the fixed side mouthpiece 19 side, and the center shaft member 20k has a large diameter head portion provided at the tip of the shaft portion arranged in the large diameter hole portion. ing. An upper surface 20q of the plate-shaped sample clamping portion 20f is formed flush with the work surface 11a. Further, as shown in FIGS. 3, 11, and 12, the plate-shaped specimen clamping portion 20f is formed with a right-angled portion C2 where the upper surface 20q and the tip end surface 20m form a right angle and are continuous.

As shown in FIG. 10, the handle 21 includes a shaft member 21a having a male thread, and an operating portion 21b provided at the proximal end of the shaft member 21a for rotating the shaft member 21a. A joint portion 21c is formed at the tip portion. The joint portion 21c has a large-diameter portion on the side of the fixed-side mouthpiece 19 and a small-diameter portion on the side opposite to the fixed-side mouthpiece 19, and the tip end surface of the large-diameter portion is formed in a spherical shape. The joint portion 21c has a large diameter portion inserted into the large diameter hole portion of the joint portion insertion hole 20c and a small diameter portion inserted into the small diameter hole portion of the joint portion insertion hole 20c. 1 to 3, the operating portion 21b is fixed in the axial direction of the shaft member 21a by a bolt 21d, and fixed in the rotational direction by a screw plug 21e.

The base end side of the shaft member 21a and the operation portion 21b are arranged to protrude outward from the side surface 11d of the finishing jig 11, and the side surface 11d is provided with a cover member 23 that covers the shaft member 21a that protrudes from the side surface 11d. is installed. Further, the cover member 23 is provided with a female threaded hole 23a, and the male threaded portion of the shaft member 21a is screwed into the male threaded hole 23a (Fig. 10).

In the clamping mechanism 14 formed in this way, in the initial state, the handle 21 has the operation portion 21b and the shaft member 21a projecting outward from the cover member 23, and the joint portion 21c has the joint portion insertion hole 20c. is in contact with the end face on the side of the fixed side mouthpiece 19 and the end portion of the central shaft member 20k. Each spring 22 is held in a natural state within the first spring housing hole 20g and the second spring housing hole 20h, and the plate-like specimen clamping portion 20f of the inner mouthpiece 20b is fixed slightly more than the outer mouthpiece 20a. It is in a state of protruding toward the side mouthpiece 19 (Fig. 4).

When the movable side mouthpiece 20 is operated, the operation portion 21 b is rotated to move the handle 21 toward the fixed side mouthpiece 19 . Accordingly, the joint portion 21c of the handle 21 presses the end face of the joint portion insertion hole 20c on the side of the fixed side mouthpiece 19 and the end portion of the central shaft member 20k, thereby separating the outer mouthpiece body 20a and the inner mouthpiece body 20b. Move it toward the fixed side mouthpiece 19 .

After the tip surface 20m of the plate-like sample clamping portion 20f slightly protruding toward the fixed side mouthpiece 19 from the outer mouthpiece body 20a comes into contact with the plate-like sample S1 placed on the fixed side mouthpiece 19, the inner mouthpiece The body 20b moves further toward the fixed side mouthpiece 19 together with the outer mouthpiece body 20a while compressing the spring 22 . The distance L1 between the tip surface 20n of the outer mouthpiece 20a and the placement surface 19a of the fixed side mouthpiece 19 becomes 0 (the state in which the tip surface 20n and the placement surface 19a are in contact), and the operation portion 21b is rotated. At the time of completion, the spring 22 exerts an elastic force corresponding to the amount of compression, and the plate-like sample clamping portion 20f clamps the plate-like sample S1 with the fixed mouthpiece 19 with a constant force. At this time, both the fixed side mouthpiece 19 and the movable side mouthpiece 20 clamp the plate-shaped sample S1 between the side faces of the mouthpieces including the right-angled portions C1 and C2, and the upper end of the side face of the mouthpiece is clamped to the plate-shaped sample S1. It is brought into close contact with the plate surface, and the edge of the cross section where the blade 17a enters, that is, the boundary between the sample cross section and the blade movement path surface R1 is clamped accurately.

In this way, with the plate-shaped sample S1 clamped, the upper surface 19b of the fixed mouthpiece 19, the upper surface 20p of the outer mouthpiece body 20a, and the upper surface 20q of the plate-shaped sample clamping part 20f are included in the blade movement path surface R1. (Fig. 4).

The machining allowance setting mechanism 15 is provided at the center of the fixed mouthpiece 19 on the back side, and includes an elevating stage 15a that pushes out the plate-shaped sample S1 placed on the fixed mouthpiece 19 toward the work surface 11a, and the elevating stage 15a that moves up and down. and a micrometer 15b for moving in a direction, and projects the plate-like sample S1 upward from the work surface 11a in accordance with the set cutting allowance of the plate-like sample S1.

The micrometer 15b has a well-known structure. By rotating the micrometer 15b, the elevating stage 15a is raised and lowered in increments of 0.01 mm. It is In addition, a scale (not shown) in units of 0.01 mm is provided on the outer peripheral wall of the micrometer 15b.

Furthermore, a box-shaped waste collection box 24 having an opening at the top is provided below the work surface 11a on the side 11c side of the clamping mechanism 14 so that it can be pulled out from the side 11d. In addition, on the work surface 11a located above the opening of the scrap collection box 24, a slit 24a for scrap dropping is formed in a direction perpendicular to the guide groove 12, and chips generated when finishing the plate-shaped sample S1 are formed. Such processing waste is collected in the waste collection box 24 through the waste drop slit 24a.

As shown in FIGS. 1 and 2, the microscope stand 31 includes a base portion 31a on which the finishing jig 11 is placed, a support arm 33 provided on the base portion, and the support arm 33 attached to the support arm 33. A microscope 32 is provided.

The base portion 31a is formed in a substantially rectangular shape, and the support arm 33 is attached to the center of one of the short sides of the base portion 31a via a hinge member 34 so as to be able to rise and fall.

The support arm 33 includes a cylindrical first support arm 33a whose base end is attached to the hinge member 34, and a second support arm 33a which is inserted into the first support arm 33a and protrudes forward from the base portion 31a in an upright state. The microscope 32 is attached to the tip of the second support arm 33b. Further, the second support arm 33b has a first feed handle 33c for adjusting the fixed position to the first support arm 33a and adjusting the height position of the microscope 32, and the second support arm 33b for adjusting the position of the microscope 32 in the front-to-rear direction of the workbench. , and a second feed handle 33d for adjusting the position of the microscope 32 in the front-rear direction of the work table.

The base portion 31a is provided with a support plate 35 and a stretcher 36 for positioning the finishing jig 11, and is detachably provided with a table 37 for setting the plate-like sample S1 on the mounting surface 19a of the fixed mouthpiece 19. It is

The support plate 35 is formed of a rectangular plate material attached to the front of the hinge member 34, and the finishing jig 11 is placed with the side surface 11d facing upward and the side surface 11e thereof placed on the base portion 31a to form a working surface. When the base portion 31a is set on the base portion 31a with the 11a vertically oriented, the bottom surface 11f is brought into contact. The stretch 36 is formed of an L-shaped plate member attached to the other side corner portion of the short side of the base portion 31a, and when the finishing jig 11 is set sideways, the stretch 36 of the finishing jig 11 is stretched. Sides 11 c and 11 e are positioned against stretch 36 .

The table 37 is formed in a substantially rectangular parallelepiped shape such that the upper surface 37a is flush with the mounting surface 19a of the fixed side mouthpiece 19 when the finishing jig 11 is vertically set on the base portion 31a. A scale 37b for measuring the dimensions of the plate-shaped sample S1 is provided on the upper surface 37a.

The table 37 has a protrusion (not shown) on its lower surface, and the finishing jig 11 is set vertically on the base portion 31a. ), one side surface 37c of the body of the table 37 comes into contact with the work surface 11a, and the mounting surface 19a and the upper surface 37a are brought into close contact with each other.

Furthermore, when the table 37 is stored when not in use, the projection is inserted into a mounting hole (not shown) provided on the side of the hinge member 34 of the base portion 31a so as to attach to the side of the hinge member 34. let it be placed.

As shown in FIG. 2, the microscope 32 is arranged in a region directly above the work surface 11a when the finishing jig 11 is horizontally set on the base portion 31a and the support arm 33 is in an upright state. , the first feed handle 33c and the second feed handle 33d are operated to dispose above the fixed mouthpiece 19, and the cross section of the finished plate-shaped sample S1 is photographed. In addition, the captured images can be viewed on an external display via wireless communication.

Next, a procedure for finishing by cutting the plate-like sample S1 using the finishing jig 11 and the microscope stand 31 will be described.

The plate-shaped sample S1 to be finished in this embodiment is obtained by cutting a thin plate used for a battery component into a rectangular shape, and has a horizontal dimension of 27 mm, a vertical dimension of 10 mm, and a plate thickness of 2 mm. The fixed side mouthpiece 19 has a depth dimension of 10 mm.

Also, "front", "rear", "left", "right", "upper", and "lower" described in the following description are the lengths of the base portion 31a regardless of the orientation of the finishing jig 11 set on the base portion 31a. "Front", "back", "left", "right", "upper", and "lower" when one side is the rear and the other short side is the front.

First, as shown in FIG. 1, the support arm 33 of the microscope stand 31 is laid down behind the base portion 31a, the finishing jig 11 is set vertically on the base portion 31a, and the support plate is placed on the base portion 31a. Lean against 35. The table 37 is mounted in front of the work surface 11a, one side surface 37c of the table 37 is brought into contact with the work surface 11a, and the top surface 37a and the mounting surface 19a of the fixed mouthpiece 19 are brought into close contact. As a result, the finishing jig 11 is sandwiched between the support plate 35 and the table 37 and positioned.

At this time, the cutter unit 13 is arranged on the side surface 11b side of the guide groove 12, and the slider fixing screw 16e is tightened to restrict its movement. Furthermore, the movement of the blade member 17 is also restricted by tightening the blade fixing knob 16k.

Then, as shown in FIG. 11, the operation portion 21b of the handle 21 is turned to raise the movable mouthpiece 20. As shown in FIG. Next, the plate-like sample S1 is placed on the upper surface 37a of the table 37, and is slid toward the placing surface 19a. The sample S1 is brought into contact with the lifting stage 15a.

At this time, since the vertical dimension of the plate-shaped sample S1 is 10 mm and the depth dimension of the fixed side mouthpiece 19 is 10 mm, the amount of protrusion of the plate-shaped sample S1 from the working surface 11a is zero. If the size of the plate-like sample S1 is unknown, the dimensions of the plate-like sample S1 can be grasped using the scale 37b of the table 37 as a guide before setting the plate-like sample S1 on the mounting surface 19a. The plate-shaped sample S1 can be finished while calculating the dimensions of the plate-shaped sample after finishing.

After setting the plate-like sample S1, the micrometer 15b is rotated to move the lifting stage 15a forward in units of 0.01 mm, and the initial cutting allowance of the plate-like sample S1 is set in units of 0.01 mm. The size that can be processed is from 2.0mm to 10.0mm. Although the optimum cutting allowance varies depending on the degree of damage to the original plate-shaped sample, it is preferable to perform machining at approximately 0.2 mm or less for the first time.

After setting the cutting allowance for the plate-shaped sample S1, as shown in FIG. 12, the operating portion 21b of the handle 21 is turned to lower the movable mouthpiece 20. As shown in FIG. 13, when the front end surface 20n of the outer mouthpiece 20a and the mounting surface 19a of the fixed mouthpiece 19 come into contact with each other, the plate-shaped sample clamping portion 20f and the fixed mouthpiece 19 are separated from each other as described above. The plate-like sample S1 is clamped with a constant force between them.

Next, the finishing jig 11 is slid to the left or right to remove the finishing jig 11 from the base portion 31a. Table 37 is stored on the side of hinge member 34 .

As shown in FIG. 2, the finishing jig 11 is horizontally set on the base portion 31a, and the side surfaces 11c and 11e are brought into contact with the stretch 36 for positioning.

Then, the support arm 33 is rotated to the upright state, the microscope 32 is arranged in the region directly above the working surface 11a, and the first feed handle 33c and the second feed handle 33d are operated to move the fixed mouthpiece 19. placed above the

The slider fixing screw 16e is loosened so that the blade holder 16 can move along the guide groove 12, and the blade fixing knob 16k is operated so that there is no gap between the base 17c of the blade 17a and the work surface 11a. Check if it is After confirmation, the blade unit 13 is slid forward. As a result, the cutting tool 17a slides on the cutting tool movement path surface R1, and cuts in the longitudinal direction (along the cross section) the projecting portion of the plate-shaped sample S1 that was created as a cutting allowance.

Processing waste generated during cutting falls from a waste dropping slit 24a to a waste collection box 24 to keep the working surface 11a clean. Furthermore, the cutting tool 17a, in particular, the cutting waste adhering to the bottom part 17c serving as the blade surface is cleaned.

Next, the blade fixing knob 16k is loosened, the blade support member 17b is slid to the left, and even if the blade holder 16 is slid, the blade 17a does not come into contact with the plate-like sample S1 (a position away from the blade movement path surface R1). , and tighten the blade fixing knob 16k to fix it. In this state, the blade holder 16 is slid backward to move to the initial position.

The blade supporting member 17b slid to the left is returned to the initial position and fixed by tightening the blade fixing knob 16k. The processed cross section of the plate-shaped sample S1 is photographed by the microscope 32, and it is confirmed whether or not the desired processed cross section is obtained by the photographed image. At this point, if the desired machined cross section has been obtained, the finish machining is completed.

On the other hand, if the desired processed cross section is not obtained, the processing is repeated again. When starting processing again, first, the plate-shaped sample S1 is unclamped. At this time, if the movable side mouthpiece 20 is unclamped too much, the plate-shaped sample S1 may fall down and enter the fixed side mouthpiece 19, so the condition of the plate-shaped sample S1 is checked with the microscope 32. It is preferable to rotate the operating portion 21b while

By operating the micrometer 15b, the second cutting allowance of the plate-shaped sample S1 is projected upward from the working surface 11a. Next, the operation part 21b is rotated to clamp the plate-shaped sample S1, and the blade holder 16 is slid forward to process the cutting allowance of the plate-shaped sample S1. This procedure is repeated until the desired machined cross-section is obtained. Further, when repeating the finishing process, it is preferable to gradually decrease the cutting amount (cutting allowance) of the plate-like sample S1 by operating the micrometer 15b.

Also, when the blade 17a is worn, the blade member 17 is replaced. When replacing the blade member 17, the blade fixing knob 16k is first loosened and removed, and then the collar 16j is removed. The mounting bolts 16m, 16m are removed, and the body portion 16b is removed from the slider 16a. At this time, it is preferable to remove the body portion 16b while holding down the blade 17a with one hand so as not to damage the cutting edge of the blade 17a. The blade member 17 to be replaced is removed from the upper surface of the slider 16a.

A new blade member 17 is placed on the upper surface of the slider 16a with the first female screw hole placed in the slide hole 17e. Next, the body portion 16b is attached to the slider 16a while taking care not to damage the cutting edge of the blade 17a. The collar 16j is placed in its original position, the blade fixing knob 16k is inserted into the collar 16j and tightened, and the mounting bolts 16m, 16m are tightened.

When changing the attachment angle of the blade 17a, the blade fixing knob 16k and the mounting bolts 16m, 16m are loosened. As shown in FIG. 14(b), the main body 16b is tilted with respect to the slider 16a, and the blade member 17 is tilted with respect to the orthogonal line OL perpendicular to the guide groove 12 using the angle scale 18 as a guide. By tightening the blade fixing knob 16k and mounting bolts 16m, 16m, the blade 17a can be fixed at a predetermined mounting angle.

Furthermore, when it is desired to change the clamping pressure for clamping the plate-shaped sample S1, first, the operating portion 21b is rotated to open the movable mouthpiece 20 to the maximum. The bolt 21d is removed from the operation portion 21b, the screw plug 21e is loosened, and the operation portion 21b is removed from the shaft member 21a. Next, the screw plugs 20i blocking the outer openings of the second spring receiving holes 20h are removed. The spring 22 is removed and replaced with a new spring having a different spring force. After installing the new spring, the screw plug 20i closes the outer opening of the second spring receiving hole 20h. The operation portion 21b is fitted on the shaft member 21a and fixed with the bolt 21d and the screw plug 21e. The clamping pressure can be reduced by replacing with a spring with low elastic force, and the clamping force can be increased by replacing with a spring with high elastic force.

When storing the finishing jig 11 and the microscope stand 31 when not in use, as shown in FIGS. While leaning against the support plate 35, the table 37 is mounted in front of the working surface 11a. The support arm 33 of the microscope stand 31 is rotated to an upright state, and the microscope 32 is arranged in front of the table 37 . As a result, the finishing jig 11 and the microscope stand 31 can be stored compactly.

As described above, according to the finishing jig 11 of the present invention, the plate-shaped sample S1 is protruded from the working surface by the processing margin setting mechanism 15, and the plate-shaped sample S1 is clamped in the thickness direction by the clamp mechanism 14. Then, the blade unit 13 is slid in the direction orthogonal to the thickness direction of the plate-shaped sample S1, and the protruding portion produced as a cutting allowance for the plate-shaped sample S1 by the blade 17a is moved in the longitudinal direction. (along the cross section). The blade 17a slides on the blade movement path surface R1 with a gap of 0 (zero). The boundary between the cross section and the blade movement path surface R1 is accurately clamped. This makes it possible to minimize deformation of the cross section by minimizing the force applied to the cross section of the plate-shaped sample S1, and to obtain a good cross section suitable for observation.

Moreover, since the clamping mechanism 14 obtains the elastic force of the springs 22, 22 and clamps the plate-like sample S1 with a clamping pressure controlled by a constant force (constant pressure), the plate-like sample S1 is clamped by excessive pressing. Destruction can be prevented, and a good cross section suitable for observation can be stably obtained.

In addition, since the fixed mouthpiece 19 and the movable mouthpiece 20 clamp the plate-like sample S1 between the side faces of the mouthpieces including the right-angled portions C1 and C2, the upper ends of the side faces of the mouthpieces contact the plate surface of the plate-like sample S1. It becomes possible to bring them into close contact with each other, and both the fixed side mouthpiece 19 and the movable side mouthpiece 20 can reliably clamp the edges of the cross section of the plate-shaped sample S1.

Furthermore, since the finishing jig 11 is used in combination with the microscope stand 31 having the microscope 32, it is possible to perform finishing while checking the cross section of the plate-shaped sample S1 with the microscope 32. The state of the cross section can be easily grasped. In particular, since the microscope stand 31 has a support arm 33 that can be raised and lowered, the finishing jig 11 can be easily set, and workability in cross-sectional observation can be improved.

In this embodiment, the blade 17a, the fixed mouthpiece 19, and the movable mouthpiece 20 are made of an insulator such as ceramic. There is no risk of adversely affecting observations and tests such as.

Furthermore, since the finishing jig 11 has a simple structure and can be formed in a small size, it is also possible to finish the plate-shaped sample S1 in a glove box.

It should be noted that the present invention is not limited to the above embodiments, and the finishing jig can be widely applied to integrated circuits, polymer materials, organic materials, etc., in addition to batteries and electronic components. can. In addition, the configuration and usage of the main parts (cutting tools, etc.) are as described above, but in addition, the material, shape, size, etc. of the jig components, and the specifications of the microscope and stand, etc. are also optional. is. In addition, the size and shape of the plate-shaped sample can be appropriately changed according to the purpose of observation and the like.

DESCRIPTION OF SYMBOLS 11... Jig for finishing, 11a...Work surface, 11b, 11c, 11d, 11e...Side surface, 11f...Bottom surface, 12...Guide groove, 12a...Top opening, 12b...Groove bottom part, 12c...Side surface, 13...Cutter unit 14... Clamping mechanism 14a... Mouthpiece receiving hole 14b... Guide member 15... Machining margin setting mechanism 15a... Elevating stage 15b... Micrometer 16... Blade holder 16a... Slider 16b... Main body 16c... Inclined surface 16d Upper surface 16e Slider fixing screw 16f Collar insertion hole 16g Bolt insertion hole 16h Holding hole 16i Safety cover 16j Collar 16k Tool fixing knob 16m Mounting bolt 17... Cutlery member 17a... Cutlery 17b... Cutlery mounting member 17c... Bottom part 17d... Pinch piece 17e... Slide hole 18... Angle scale 19... Fixed side mouthpiece 19a... Placement surface 19b... Upper surface 20 Movable side mouthpiece 20a Outer mouthpiece 20b Inner mouthpiece 20c Joint part insertion hole 20d Center axis member mounting hole 20e Spring accommodating part 20f Plate-like sample clamping part 20g 1st spring receiving hole 20h 2nd spring receiving hole 20i screw plug 20j central shaft member insertion hole 20k central shaft member 20m, 20n tip surface 20p, 20q upper surface 21 handle , 21a... shaft member, 21b... operating part, 21c... joint part, 21d... bolt, 21e... screw plug, 22... spring, 23... cover member, 23a... female screw hole, 24... waste collection box, 24a... for gas drop Slit 31 Microscope stand 31a Base portion 32 Microscope 33 Support arm 33a First support arm 33b Second support arm 33c First feed handle 31d Second feed handle , 34... hinge member, 35... support plate, 36... stretch, 37... table, 37a... top surface, 37b... scale, 37c... one side surface, S1... plate-like sample, R1... blade moving path surface, C1, C2... right angle Department

Claims (3)

a cutting tool unit that slides along a linear guide groove provided on a working surface and cuts a protruding portion of the plate-shaped sample that protrudes above the working surface to finish machining the plate-shaped sample; A finishing jig comprising a clamping mechanism for fixing a shaped sample at a clamping position, and a cutting allowance setting mechanism for setting a cutting allowance made by the projecting portion,
The work surface is provided with a blade movement path surface parallel to the guide groove,
The blade unit has a blade in sliding contact with the blade movement path surface,
The clamping mechanism has a fixed mouthpiece, and can move toward the fixed mouthpiece in a direction perpendicular to the sliding direction of the blade unit, and obtains the elastic force of a spring to clamp the plate-shaped sample with a constant force in the thickness direction. and a movable side mouthpiece that can be pressed with
The cutting allowance setting mechanism has an elevating stage for projecting the plate-shaped sample onto the work surface to obtain the projecting portion,
A jig for finishing, wherein the moving path surface of the cutting tool includes upper surfaces of both the fixed side mouthpiece and the movable side mouthpiece in a fixed state of the plate-shaped sample. 2. The fixed-side mouthpiece and the movable-side mouthpiece are each formed with a right-angled portion in which the upper surface of the mouthpiece and the side surface of the mouthpiece that presses the plate-shaped sample form a right angle and are continuous. Jig for finish machining. The stand for the finishing jig according to claim 1 or 2,
A base portion on which the finishing jig is placed, a support arm provided on the base portion, and a microscope attached to the support arm,
The support arm is configured to be tiltable between an upright state in which the microscope is arranged in a region directly above the work surface and a collapsed state in which the microscope is arranged outside the region directly above the work surface. Jig stand.

Images