JP7229523B2 - laser gas analyzer - Google Patents

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JP7229523B2
JP7229523B2 JP2019071772A JP2019071772A JP7229523B2 JP 7229523 B2 JP7229523 B2 JP 7229523B2 JP 2019071772 A JP2019071772 A JP 2019071772A JP 2019071772 A JP2019071772 A JP 2019071772A JP 7229523 B2 JP7229523 B2 JP 7229523B2
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昌明 石倉
伸治 川島
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Kyoto Electronics Manufacturing Co Ltd
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本発明は、レーザー式ガス分析装置に関し、特に、取付フランジ内部の塵埃の堆積を防止したレーザー式ガス分析装置に関するものである。 TECHNICAL FIELD The present invention relates to a laser type gas analyzer, and more particularly to a laser type gas analyzer that prevents dust from accumulating inside a mounting flange.

図5は、煙道(測定対象空間)に対してレーザーガス分析装置を適用した例を示し、図6はその発光側を立体図として示したものであり、例えばUS特許第9244003号公報の内容をより模式化して表したものである。 FIG. 5 shows an example in which the laser gas analyzer is applied to the flue (space to be measured), and FIG. 6 shows the light emission side as a three-dimensional view. is more schematically represented.

発光部100から出射されたレーザー光は、発光窓110を介して測定対象空間である煙道30に出射され、煙道30を通過したレーザー光は受光窓210を介して受光部200に受光される。ここで、発光部100、受光部200と前記測定対象空間である煙道30は前記発光窓110、受光窓210で仕切られている。 Laser light emitted from the light emitting unit 100 is emitted to the flue 30, which is the space to be measured, through the light emitting window 110, and the laser light that has passed through the flue 30 is received by the light receiving unit 200 through the light receiving window 210. be. Here, the light emitting portion 100, the light receiving portion 200, and the flue 30, which is the space to be measured, are separated by the light emitting window 110 and the light receiving window 210, respectively.

前記発光部100の発光窓110の煙道30側に取付フランジ41aが設けられ、当該取付フランジ41aと発光窓110の間に、後述するパージガスの接続口131が設けられる。他方、煙道30からは所定の高さの立上げ管42が連通しており、当該立上げ管42の先端に前記取付フランジ41aに対応する固定フランジ41bが設けられて設置台40を構成している。当該固定フランジ41bに対して前記取付フランジ41aが固定され、これによって、前記発光部100が煙道30の設置台40に固定されることになる。 A mounting flange 41 a is provided on the flue 30 side of the light emitting window 110 of the light emitting section 100 , and a purge gas connection port 131 to be described later is provided between the mounting flange 41 a and the light emitting window 110 . On the other hand, a riser pipe 42 having a predetermined height communicates with the flue 30, and a fixed flange 41b corresponding to the mounting flange 41a is provided at the tip of the riser pipe 42 to constitute the installation table 40. ing. The mounting flange 41a is fixed to the fixing flange 41b, whereby the light emitting part 100 is fixed to the mounting base 40 of the flue 30. As shown in FIG.

上記のように煙道30に発光部100が取り付けられた状態で、パージガスの接続口131に別途用意されたパージガスのタンクを接続し、前記立上げ管42に常時50~100L/min程度のパージガスを流して、前記発光部100の窓110を清浄に保つようにしている。この構成は、受光部200の窓210の測定対象空間側にも設けられ、受光部200の窓210も清浄に保つようになっている。 With the light emitting unit 100 attached to the flue 30 as described above, a separately prepared purge gas tank is connected to the purge gas connection port 131, and the riser pipe 42 is supplied with a purge gas of about 50 to 100 L/min at all times. to keep the window 110 of the light emitting section 100 clean. This structure is also provided on the measurement target space side of the window 210 of the light receiving unit 200, and the window 210 of the light receiving unit 200 is also kept clean.

US特許第9244003号公報US Patent No. 9244003

前記のように、発光窓110の測定対象空間側、受光窓210の測定対象空間側に常時50~100L/min程度のパージガスを流すことで、前記発光窓110、受光窓210に対する粉塵の付着を低減し、受光強度の低下を抑制している。 As described above, by constantly flowing a purge gas of about 50 to 100 L/min to the measurement object space side of the light emitting window 110 and the measurement object space side of the light receiving window 210, adhesion of dust to the light emitting window 110 and the light receiving window 210 is prevented. This reduces the intensity of the received light.

しかしながら、都市ゴミ焼却施設のように種々の種類の焼却物がある場合、煙道には測定対象ガスの他に吸着性の高い共存ガスや水分、塵埃等も含まれる。このため、煙道内の流速によっては、光路となる前記設置台40の前記立上げ管42の内部に粉塵が堆積し、光路管が閉塞していくことにより受光部200で受光されるレーザー光の強度が低下して測定値にS/N比の低下を引起すことになる。 However, when there are various types of incinerated materials, such as municipal waste incineration facilities, the flue contains highly adsorbable coexisting gases, moisture, dust, etc., in addition to the gas to be measured. For this reason, depending on the flow velocity in the flue, dust accumulates inside the riser pipe 42 of the installation table 40, which serves as the optical path, and the optical path pipe is blocked. A decrease in intensity will cause a decrease in the signal-to-noise ratio in the measurements.

上記パージガスを流す方法は短時間のプロセスの運用については有効であるが、長時間の運用では前記立上げ管42付近の内部に塵埃が堆積して閉塞する現象が見られ、十分とはいえないのが現状である。 The method of flowing purge gas is effective for short-time operation of the process, but it is not sufficient for long-time operation because dust accumulates in the vicinity of the riser pipe 42 and clogs it. is the current situation.

本発明は、上記従来の事情に鑑みて提案されたものであって、長時間の運用であっても光路が確保できるレーザー式ガス分析装置を提供するものである。 SUMMARY OF THE INVENTION The present invention has been proposed in view of the above-mentioned conventional circumstances, and provides a laser type gas analyzer that can secure an optical path even if it is used for a long time.

本発明は、発光窓を介して測定空間に照射するレーザーを出射する発光部と、前記測定対象空間を通過したレーザーを受光窓を介して受光する受光部とを備えるレーザー式ガス分析装置において、以下の高圧タンク、光路管、ブラスト管、電磁弁、開閉制御ユニットより構成される。 The present invention relates to a laser type gas analyzer comprising a light emitting part that emits a laser that irradiates a measurement space through a light emitting window, and a light receiving part that receives the laser that has passed through the measurement target space through a light receiving window, It consists of the following high-pressure tank, optical path tube, blast tube, solenoid valve, and open/close control unit.

前記高圧タンクにはブラストガスが充填され、光路管が前記発光窓または受光窓と測定対象空間の間に挿入される。更に、ブラスト管の先端(測定対象空間側)が前記光路管に連通し、当該ブラスト管の後端に前記高圧タンクを着脱可能な接続口を設ける。前記接続口とブラスト管の間には電磁弁が設けられ、更に前記電磁弁を開閉制御する開閉制御ユニットが設けられる。 The high-pressure tank is filled with blast gas, and an optical path tube is inserted between the light-emitting window or the light-receiving window and the space to be measured. Further, the tip of the blast tube (on the side of the space to be measured) communicates with the optical path tube, and the rear end of the blast tube is provided with a connection port through which the high-pressure tank can be attached and detached. A solenoid valve is provided between the connection port and the blast pipe, and an opening/closing control unit for controlling opening/closing of the solenoid valve is further provided.

前記開閉制御ユニットとしては、前記電磁弁を所定間隔毎に所定時間開くタイマーと、発光部から受光部へのレーザーの透過率を演算する演算部を設けて、開閉制御ユニットが前記タイマーによる制御とともに、前記透過率に応じて所定時間開く構成とする。 The opening/closing control unit is provided with a timer that opens the electromagnetic valve for a predetermined period of time at predetermined intervals, and a calculation unit that calculates the transmittance of the laser from the light emitting unit to the light receiving unit. , open for a predetermined time according to the transmittance.

上記構成によって、必要に応じてブラストガスを設置台の立上げ管の内部に噴出することができるので、付着した粉塵を効率よく吹き飛ばすことができ、長期の使用にも耐えることになる。特に、光路管の透過率に基づく電磁弁の制御と、タイマーに基づく電磁弁の制御を併用するのが効果的である。 With the above configuration, the blast gas can be jetted into the riser pipe of the installation table as needed, so that the adhering dust can be efficiently blown off, and the apparatus can be used for a long period of time. In particular, it is effective to use both control of the electromagnetic valve based on the transmittance of the optical path tube and control of the electromagnetic valve based on the timer.

本発明全体の斜視図である。1 is a perspective view of the entire invention; FIG. 本発明の分解斜視図である。1 is an exploded perspective view of the present invention; FIG. 本発明の制御ユニットを示すブロック図である。Fig. 3 is a block diagram showing a control unit of the present invention; 本発明によるブラスト制御を説明する図である。It is a figure explaining the blast control by this invention. 従来のレーザー式ガス分析装置の概念図である。It is a conceptual diagram of a conventional laser type gas analyzer. 図5の発光側を示す立体図である。FIG. 6 is a three-dimensional view showing the light emitting side of FIG. 5;

図1は本発明全体の斜視図であり、図2はその分解斜視図である。尚、発光側と受光側は対称構造であるので、図1、図2では発光側についての構造のみを示している。 FIG. 1 is a perspective view of the entire invention, and FIG. 2 is an exploded perspective view thereof. Since the light-emitting side and the light-receiving side have symmetrical structures, FIGS. 1 and 2 show only the structure on the light-emitting side.

前記したように、発光部100の発光窓110の煙道30側に前記取付フランジ41aが設けられ、煙道30の立上げ管42の後端には、当該取付フランジ41aに符合した固定フランジ41bが設けられている。 As described above, the mounting flange 41a is provided on the flue 30 side of the light emitting window 110 of the light emitting part 100, and the rear end of the riser pipe 42 of the flue 30 is provided with a fixing flange 41b corresponding to the mounting flange 41a. is provided.

一方、ブラスターユニット300は以下の構成となっている。 On the other hand, the blaster unit 300 has the following configuration.

所定長さの光路管50の後端(発光部側、受光部側)には前記取付フランジ41aに符合するフランジ51aが、また、先端(煙道側)には前記固定フランジ41bに符合するフランジ51bが設けられる。前記光路管50に連通してブラスト管52の先端が、前記光路管50の軸方向に対して鋭角に、かつ前記フランジ51b側に連通され、当該ブラスト管52の後端には、電磁弁54を介して圧縮タンク60の接続口55が設けられた構成となっている。 A flange 51a matching the mounting flange 41a is provided at the rear end (light emitting section side, light receiving section side) of the optical path tube 50 having a predetermined length, and a flange matching the fixing flange 41b is provided at the tip (flue side). 51b is provided. The tip of a blast tube 52 communicating with the optical path tube 50 forms an acute angle with respect to the axial direction of the optical path tube 50 and communicates with the flange 51b side. The connection port 55 of the compression tank 60 is provided through the .

上記のように構成されたブラスターユニット300を前記取付フランジ41aと設置台40の固定フランジ41bの間に挿入し、取付フランジ41aとフランジ51a、固定フランジ41bとフランジ51bを固定する。これによって、発光部100(受光部200)と煙道30の設置台40との間にブラスターユニット300が固定されたことになり、更に、前記接続口55に窒素ガスあるいは計装空気の圧縮タンク60を接続する。 The blaster unit 300 configured as described above is inserted between the mounting flange 41a and the fixed flange 41b of the installation base 40, and the mounting flange 41a and the flange 51a, and the fixed flange 41b and the flange 51b are fixed. As a result, the blaster unit 300 is fixed between the light emitting unit 100 (light receiving unit 200) and the installation base 40 of the flue 30. Further, the connection port 55 is provided with a compression tank of nitrogen gas or instrument air. 60 is connected.

上記構成により、前記電磁弁54を開けることによって、前記光路管50の前記煙道30への開口部付近に堆積した塵埃を吹き飛ばすことができることになる。 With the above configuration, by opening the electromagnetic valve 54, dust accumulated in the vicinity of the opening of the optical path tube 50 to the flue 30 can be blown off.

図3は、前記電磁弁54の開閉を制御するための制御回路を示すブロック図である。 FIG. 3 is a block diagram showing a control circuit for controlling the opening and closing of the electromagnetic valve 54. As shown in FIG.

発光部100の発光制御部141より数十~数百Hz程度の鋸波に数十~百kHz程度の正弦波を重畳した駆動電流が発光モジュール142に印加され前記発光窓110より波長可変レーザーが発光される。当該レーザーは測定対象空間(煙道30)を透過後受光部200の受光モジュール242で受光され、光電変換されて演算部241に入力される。演算部241では、主として前記測定対象空間での測定対象ガスの濃度が演算されるが、本発明では前記濃度の演算に加えて、透過率、すなわち、発光モジュール142から発光した光の強度に対して受光モジュール242で受光された光の強度(受光強度/発光強度)がどの位になっているかも演算する。 A driving current obtained by superimposing a sawtooth wave of several tens to several hundred Hz with a sine wave of several tens to hundreds of kHz is applied to the light emitting module 142 from the light emission control unit 141 of the light emitting unit 100, and the wavelength variable laser is emitted from the light emitting window 110. Illuminated. After passing through the measurement target space (the flue 30 ), the laser is received by the light receiving module 242 of the light receiving unit 200 , photoelectrically converted, and input to the calculation unit 241 . The calculation unit 241 mainly calculates the concentration of the gas to be measured in the space to be measured. Then, the intensity of the light received by the light receiving module 242 (light receiving intensity/light emitting intensity) is also calculated.

このようにして得られた発光強度に対する受光強度の割合はブラスト制御部243に入力され、ここで前記受光強度/発光強度が所定の閾値(例えば10%)以下である場合には、当該ブラスト制御部243が、発光側および受光側の電磁弁54を所定時間開くようになっている。これによって、前記透過率に応じた電磁弁54の開閉制御が可能となる。 The ratio of the received light intensity to the emitted light intensity obtained in this way is input to the blast control unit 243. Here, when the received light intensity/light emitted intensity is equal to or less than a predetermined threshold value (for example, 10%), the blast control The part 243 opens the electromagnetic valves 54 on the light emitting side and the light receiving side for a predetermined time. As a result, the opening/closing control of the electromagnetic valve 54 can be performed according to the transmittance.

また、本発明ではタイマー245の出力をブラスト制御部243に入力して、所定時間間隔ごとに電磁弁54の開閉をすることもできる構成となっている。当該タイマー245による制御は単独で用いてもよいが、後述するように、前期透過率に基づく制御と併用するのが好ましい。 Further, in the present invention, the output of the timer 245 is input to the blast control section 243 so that the electromagnetic valve 54 can be opened and closed at predetermined time intervals. Although the control by the timer 245 may be used alone, it is preferable to use it together with the control based on the previous transmittance as described later.

図4は、上記の上記制御の様子を示すものである。図4(a)は同図(b)に示すようにタイマー245を用いて60分おきに前記ブラスターユニットの電磁弁54を開いた場合のレーザー光の透過率を示すものである。60分おきのブラストでは煤等が光路に堆積することでかなりの透過率の低い部分が生じている。この状態でガス濃度の測定を継続すると、S/N比の低下を引き起こし、極端に高い、あるいは低い濃度をノイズとして提示する測定結果が現れるおそれがあることになる。 FIG. 4 shows the state of the above control. FIG. 4(a) shows the laser beam transmittance when the solenoid valve 54 of the blaster unit is opened every 60 minutes using the timer 245 as shown in FIG. 4(b). In blasting every 60 minutes, soot and the like are deposited in the optical path, resulting in portions with considerably low transmittance. Continuing the measurement of the gas concentration in this state will cause a decrease in the S/N ratio, and there is a risk that measurement results will appear in which extremely high or low concentrations are presented as noise.

図4(a)の急激に透過率が下がる間隔を考慮して前記同様、タイマーで等時間間隔でのブラストをしようとすると、例えば図4(c)に示すように、10分おき程度になるが、これではあまりにブラストガスの無駄が多くなる。 Taking into consideration the intervals at which the transmittance drops rapidly in FIG. 4(a), blasting at equal time intervals with a timer as described above would take about 10 minutes, for example, as shown in FIG. 4(c). However, this would waste too much blast gas.

図4(d)は、60分に一度は前記電磁弁54を開くが、それに加えて前記演算部241で得られた透過率が10%を下回ったときに前記電磁弁電磁弁54を開けるようにした場合を示すものである。 FIG. 4(d) shows that the electromagnetic valve 54 is opened once every 60 minutes, and in addition, the electromagnetic valve 54 is opened when the transmittance obtained by the calculation unit 241 is less than 10%. It shows the case where

これによって、効率的な堆積物の除去をすることが期待できることになる。 As a result, efficient removal of deposits can be expected.

以上説明したように、付着した粉塵を効率よく吹き飛ばすことができ、長期の使用にも耐えることになる。 As described above, it is possible to efficiently blow away the adhering dust and endure long-term use.

30 煙道
40 設置台
41a 取付フランジ
41b 固定フランジ
42 立上げ管
50 光路管
51a、51b フランジ
52 ブラスト管
54 電磁弁
55 接続口
60 圧縮タンク
100 発光部
110 発光窓
131 接続口
141 発光制御部
142 発光モジュール
200 受光部
210 受光窓
300 ブラスターユニット
241 演算部
242 受光モジュール
243 ブラスト制御部
245 タイマー
30 Flue 40 Installation table 41a Mounting flange 41b Fixed flange 42 Rising pipe 50 Optical path pipe 51a, 51b Flange 52 Blast pipe 54 Solenoid valve 55 Connection port 60 Compression tank 100 Light emission part 110 Light emission window 131 Connection port 141 Light emission control part 142 Light emission Module 200 Light receiving section 210 Light receiving window 300 Blaster unit 241 Calculation section 242 Light receiving module 243 Blast control section 245 Timer

Claims (1)

発光窓を介して測定対象空間に照射するレーザーを出射する発光部と、前記測定対象空間を通過したレーザーを受光窓を介して受光する受光部とを備えるレーザー式ガス分析装置において、
ブラストガスが充填された高圧タンクと、
前記発光窓または受光窓と前記測定対象空間の間に挿入された光路管と、
先端が前記光路管の前記測定対象空間側に連通し、後端に前記高圧タンクを着脱可能な接続口を設けたブラスト管と、
前記ブラスト管と接続口との間に設けられた電磁弁と、
前記電磁弁の開閉制御をする開閉制御ユニットと
を備え、
前記開閉制御ユニットが、
前記発光部から前記受光部へのレーザーの透過率を演算する演算部と、
前記演算部が所定の閾値以下の透過率を示したときに前記電磁弁を所定時間開く制御部と、
前記電磁弁を所定間隔毎に所定時間開くタイマーと
を備えたことを特徴とするレーザー式ガス分析装置。
A laser type gas analyzer comprising a light emitting unit that emits a laser that irradiates a space to be measured through a light emitting window, and a light receiving unit that receives the laser that has passed through the space to be measured through a light receiving window,
a high-pressure tank filled with blast gas;
an optical path tube inserted between the light-emitting window or the light-receiving window and the space to be measured;
a blast tube having a front end communicating with the measurement target space side of the optical path tube and a rear end provided with a connection port to which the high-pressure tank can be attached and detached;
a solenoid valve provided between the blast pipe and the connection port;
An opening/closing control unit that controls opening/closing of the solenoid valve,
The opening/closing control unit
a computing unit that computes the transmittance of the laser from the light-emitting unit to the light-receiving unit;
a control unit that opens the electromagnetic valve for a predetermined time when the calculation unit indicates a transmittance equal to or lower than a predetermined threshold;
a timer that opens the solenoid valve for a predetermined period of time at predetermined intervals;
A laser type gas analyzer, comprising:
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US20120236323A1 (en) 2009-12-04 2012-09-20 Siemens Aktiengesellschaft Method for Determining the Optical Measurement Path Length in a Duct Gas Monitoring System

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