JP7217440B2 - Film structure manufacturing method and manufacturing apparatus - Google Patents

Description

The present disclosure relates to a film structure manufacturing method and manufacturing apparatus using imprint technology.

2. Description of the Related Art In recent years, in optical components used in products such as displays and lighting, it has been desired to realize devices having unprecedented new functions in which reflection and diffraction of light are controlled. The device is realized, for example, by forming a fine pattern on the order of nanometers (nm) to microns (μm) that exhibits special optical properties. Further, in semiconductors such as system LSIs, miniaturization of wiring is desired along with high integration. As a method for forming such a fine structure, in addition to photolithography technology and electron beam lithography technology, imprint technology has been attracting attention in recent years.

Imprint technology is a technique for forming a cured film with a fine shape transferred by pressing a mold with a fine shape pre-processed on the surface against a resin applied to the substrate surface.

Examples of imprinting methods include thermal imprinting and UV imprinting.

The thermal imprint method is a method of obtaining a cured film having a fine pattern transferred thereto by pressing a mold heated to a glass transition temperature or higher against a thermoplastic resin applied to the substrate surface. The UV imprint method is a method of obtaining a cured film having a fine pattern transferred thereto by irradiating UV light while pressing a room-temperature mold against an ultraviolet curable resin applied to the surface of a base material.

When the target substrate is a film such as PET, it is common to use a roll-shaped mold with a fine pattern formed on the surface and transfer the fine pattern onto the film at the same time as the film is fed. be. The method is known for its high throughput and is called a roll-to-roll imprint method.

A general construction method for forming a fine shape by a roll-to-roll imprinting method based on a UV imprinting method is disclosed in Patent Document 1, for example.

As a roll-to-roll imprint method (roll-to-roll UV imprint method) based on a general UV imprint method, a transfer material is applied by extrusion from an application portion onto a continuously running film (film substrate). Next, the film passes between a transfer roll having a transfer shape (fine shape) formed on its surface and a pressure roll pressed against the transfer roll with a predetermined pressure. As a result, the transfer material is filled in the transfer shape (fine irregularities) on the surface of the transfer roll.

Next, by irradiating the transfer roll with UV light from a UV light source, the transfer material is cured while filling the transfer shape. Finally, the film passes between a release roll and a transfer roll and runs along the release roll. As a result, the film is separated from the transfer roll, and a cured film having the transferred shape is formed on the film.

In this method, a cured film is formed on one side of the film substrate, and when it is necessary to form a cured film on both sides of the film substrate, the same process is performed on the other side of the film substrate. There is a need.

Japanese Patent No. 4976868

However, when the cured films are formed on both sides of the film, it is required to improve the relative position accuracy between the cured films on both sides of the film.

In the apparatus configuration, in order to cope with the positional deviation of the cured films on both sides of the film, the positional deviation is recognized after transfer and fed back, resulting in yield.

Accordingly, an object of the present disclosure is to provide a method and apparatus for manufacturing a film structure that improves the yield while ensuring the relative positional accuracy of the cured films on both sides of the film.

In order to achieve the above object, a method for producing a film structure of the present disclosure is a method for producing a film structure in which a transfer material is transferred to both surfaces of a continuously running film and cured. A coating step of applying a transfer material containing an ultraviolet curable resin, and while pressing the surface of the film against the transfer roll with a pressure roll, the transfer material applied to the surface of the film is cured with ultraviolet rays to form a first cured film. A first curing step, a temporary fixing step of sucking and temporarily fixing the surface of the film on which the first cured film is formed, and a dancer roll upstream of the suction portion in the temporary fixing step in the conveying direction. Positional deviation between the feeding and holding step for holding the feeding of the film, the first cured film formed by the first curing step, and the mold filled with the transfer material on the back side of the film temporarily fixed by the temporary fixing step a positional deviation amount detection step of detecting the amount of positional deviation, a correction step of correcting the position of the film or the position of the mold by a correction mechanism so as to reduce the positional deviation amount detected by the positional deviation amount detection step, and the correction step. and a second curing step of curing the transfer material filled in the mold on the rear surface of the film to form a second cured film.

The apparatus for manufacturing a film structure of the present disclosure is an apparatus for manufacturing a film structure in which a transfer material is transferred onto both surfaces of a continuously running film and cured, and a transfer material containing an ultraviolet curable resin is applied to the surface of the film. A coating part for coating, a transfer roll having a transfer shape on the surface, a pressure roll for pressing the transfer material applied on the surface of the film to the transfer roll, and the transfer material pressed by the pressure roll on the surface of the film. Including a first curing means for forming a first cured film by curing above, a temporary fixing mechanism for temporarily fixing by adsorbing the surface of the film on which the first cured film is formed, and a dancer roll, by the temporary fixing mechanism A feeding and holding mechanism that holds the feeding of the running film on the upstream side in the conveying direction of the suction portion, a mold having a transfer shape on the surface, and a transfer material filled in the mold that hardens on the back surface of the film to form a second film. 2. A second curing means for forming a cured film, a positional deviation amount detection mechanism for detecting the amount of positional deviation between the first cured film formed on the surface of the film and the mold, and a position detected by the positional deviation amount detection mechanism. a correction mechanism for correcting the amount of misalignment; a control unit for controlling the correction mechanism so as to reduce the amount of misalignment detected by the misalignment amount detection mechanism before forming the second cured film by the second curing means; Prepare.

According to the film structure manufacturing method and manufacturing apparatus according to the present disclosure, it is possible to improve the yield while ensuring the relative positional accuracy of the cured films on both sides of the film.

Schematic diagram of a manufacturing apparatus for a film structure according to Embodiment 1 of the present invention. Schematic diagram of a manufacturing apparatus for a film structure according to Embodiment 1 of the present invention. Schematic diagram of a manufacturing apparatus for a film structure according to Embodiment 1 of the present invention. Schematic diagram of a manufacturing apparatus for a film structure according to Embodiment 1 of the present invention. Schematic diagram of a manufacturing apparatus for a film structure according to Embodiment 1 of the present invention. FIG. 2 is a schematic diagram showing recognition of positional deviation amount in the first embodiment of the present invention; Flowchart showing a method for manufacturing a film structure according to Embodiment 1 of the present invention Schematic schematic diagrams showing a film correction operation in Embodiment 1 of the present invention. Schematic schematic diagram showing a film before correction operation in Embodiment 1 of the present invention. Schematic schematic diagram showing a film after correction operation in Embodiment 1 of the present invention. Schematic schematic diagram of a manufacturing apparatus for a film structure according to Embodiment 2 of the present invention. FIG. 11 is a schematic diagram showing the correcting operation of the mold according to the second embodiment of the present invention; Schematic diagram showing a film before correction operation in Embodiment 2 of the present invention. Schematic schematic diagram showing a film after correction operation in Embodiment 2 of the present invention.

According to the first aspect of the present invention, there is provided a method for manufacturing a film structure in which a transfer material is transferred onto both surfaces of a continuously running film and cured, wherein the transfer material containing an ultraviolet curable resin is applied to the surface of the film. a first curing step of forming a first cured film by curing the transfer material applied to the surface of the film with ultraviolet rays while pressing the surface of the film against the transfer roll with a pressure roll; A temporary fixing step of sucking and temporarily fixing the surface of the film on which the cured film is formed; and a positional displacement amount detection step of detecting a positional displacement amount between the first cured film formed in the first curing step and the mold filled with the transfer material on the back side of the film temporarily fixed in the temporary fixing step. and a correction step of correcting the position of the film or the position of the mold by a correction mechanism so as to reduce the positional deviation detected by the positional deviation amount detection step, and the transfer material filled in the mold after the correction step. on the back surface of the film to form a second cured film.

According to the second aspect of the present invention, in the positional deviation amount detection step, the cured film alignment mark formed on the first cured film and the mold alignment mark formed on the mold are detected, and in the correction step, the cured film A method for manufacturing a film structure according to the first aspect is provided, wherein the alignment mark and the mold alignment mark are corrected to be closer together.

According to the third aspect of the present invention, in the correction step, the film is sandwiched between the pair of correction rolls of the correction mechanism, and the film is moved in the conveying direction along with the rotation of the pair of correction rolls, or the pair of correction rolls is rotated. is moved together with the film to reduce the amount of positional deviation.

According to the fourth aspect of the present invention, the film structure according to any one of the first aspect to the third aspect, wherein in the correcting step, the positional deviation amount is reduced by moving the mold with the correcting mechanism. to provide a method of manufacturing

According to the fifth aspect of the present invention, in the temporarily fixing step, the film is temporarily fixed at a straight portion where the film travels linearly in the film traveling path, and in the positional deviation amount detection step, the film is not misaligned at the straight portion. A method of manufacturing a film structure according to any one of the first to fourth aspects is provided, wherein the quantity is detected.

According to the sixth aspect of the present invention, the film structure according to any one of the first aspect to the fifth aspect, wherein in the temporary fixing step, the surface of the film is sucked and temporarily fixed at a position facing the mold. to provide a method of manufacturing

According to the seventh aspect of the present invention, there is provided an apparatus for manufacturing a film structure in which a transfer material is transferred onto both surfaces of a continuously running film and cured, wherein the transfer material containing an ultraviolet curable resin is applied to the surface of the film. a transfer roll having a transfer shape on its surface; a pressure roll that presses the transfer material applied on the surface of the film to the transfer roll; and a transfer material pressed by the pressure roll onto the surface of the film. A first curing means for curing to form a first cured film, a temporary fixing mechanism for sucking and temporarily fixing the surface of the film on which the first cured film is formed, and a dancer roll, and suction by the temporary fixing mechanism A feeding and holding mechanism that holds the feeding of the running film on the upstream side in the conveying direction of the portion, a mold having a transfer shape on the surface, and a transfer material filled in the mold to harden on the back surface of the film to form a second film. A second curing means for forming a cured film, a positional deviation amount detection mechanism for detecting a positional deviation amount between the first cured film formed on the surface of the film and the mold, and a positional deviation detected by the positional deviation amount detection mechanism. a correction mechanism for correcting the amount, and a control unit for controlling the correction mechanism so as to reduce the positional deviation amount detected by the positional deviation amount detection mechanism before forming the second cured film by the second curing means. An apparatus for manufacturing a film structure, comprising:

According to the eighth aspect of the present invention, the transfer roll has an alignment mark for forming a cured film alignment mark on the first cured film, the mold has a mold alignment mark, and the positional deviation amount detection mechanism includes the 1. Provided is the apparatus for manufacturing a film structure according to the seventh aspect, which detects the amount of positional deviation between the cured film alignment mark formed on the cured film and the mold alignment mark of the mold.

According to the ninth aspect of the present invention, the correction mechanism has a pair of correction rolls arranged to sandwich the film and corrects the position of the film, and rotates the pair of correction rolls or rotates the pair of correction rolls. There is provided a manufacturing apparatus for a film structure according to the seventh aspect or the eighth aspect, which corrects the amount of positional deviation by moving the .

According to the tenth aspect of the present invention, the seventh aspect to the ninth aspect, wherein the correcting mechanism has a mold position correcting mechanism for correcting the position of the mold based on the positional deviation detected by the positional deviation detecting mechanism. 2. A manufacturing apparatus for a film structure according to any one of .

According to the eleventh aspect of the present invention, the temporary fixing mechanism temporarily fixes the film at the straight portion where the film travels linearly on the film traveling path, and the positional deviation detection mechanism detects positional deviation at the straight portion of the film. Provided is an apparatus for manufacturing a film structure according to any one of the seventh to tenth aspects, wherein the amount is detected.

According to the twelfth aspect of the present invention, the temporary fixing mechanism according to any one of the seventh aspect to the eleventh aspect, wherein the temporary fixing mechanism has a suction hole that sucks and temporarily fixes the surface of the film at a position facing the mold An apparatus for manufacturing the described film structure is provided.

(Embodiment 1)
Embodiment 1 according to the present disclosure will be described below with reference to the drawings. The present disclosure is not limited to Embodiment 1 below.

First, the configuration of the film structure manufacturing apparatus D1 of Embodiment 1 will be described with reference to FIGS. 1A to 1E. 1A to 1E are schematic diagrams for each process of the film structure manufacturing apparatus D1. In the following figures, the X-axis direction is the width direction of the film 1, the Y-axis direction is the horizontal direction perpendicular to the X-axis direction, and the Z-axis direction is the vertical direction perpendicular to the X and Y axes.

The manufacturing apparatus D1 is an apparatus for manufacturing a film structure by transferring transfer materials 121a and 121b onto both surfaces of the continuously running film 1 and curing them. Cured films 141 a and 141 b ( FIG. 1E ) are formed on both sides of the film 1 . The transfer materials 121a and 121b are raw materials for the cured films 141a and 141b. In Embodiment 1, the transfer materials 121a and 121b are materials containing an ultraviolet curing resin. The transfer materials 121a and 121b are, for example, materials that are fluid before curing and solidify after curing. The first cured film 141a on the surface of the film 1 is formed while the film 1 is running (in continuous running), and the second cured film 141b on the back side of the film 1 is formed (intermittently) while the film 1 is stopped running. be.

The manufacturing apparatus D<b>1 includes a first application section 21 , a pressure roll 31 , a transfer roll 41 , a first curing means 51 and a release roll 61 . Further, the manufacturing apparatus D1 includes feeding and holding mechanisms 71a and 71b, a conveying stage 81, a second coating section 22, a mold 101, a transfer material filling mechanism 32 (FIG. 1B), and a second curing means 52 (FIG. 1C). ). Further, the manufacturing apparatus D1 includes positional deviation detection mechanisms 91 and 92, a correction mechanism 111, and a controller C1.

The film 1 is sent out in the transport direction (A1 direction) from the upstream side of the device. The conveying speed of the film 1 is, for example, 0.1 m or more and 5 m or less per minute. The thickness of the film 1 is, for example, 20 μm or more and 300 μm or less. The width of the film 1 is, for example, 100 mm or more and 1 m or less. 1A to 1E, the lower side (−Z direction) is the front side and the upper side (+Z direction) is the back side for convenience.

The coating units 21 and 22 are units for coating the film 1 with transfer materials 121a and 121b, respectively. The first application unit 21 applies the transfer material 121 a to the surface of the film 1 , and the second application unit 22 applies the transfer material 121 b to the back surface of the film 1 .

The second application section 22 is a unit capable of intermittent application. The second applicator 22 applies the transfer material 121b only to desired locations on the back surface of the film 1 . Specifically, the second application unit 22 applies the transfer material 121b to the portion of the back surface of the film 1 that faces the first cured film 141a on the surface of the film 1 . The intermittent operation of the second application unit 22 intermittently applies the transfer material 121b in synchronization with, for example, the driving of the feeding and holding mechanisms 71a and 71b, which will be described later. Although the method of applying the transfer materials 121a and 121b is not limited, for example, a die coater is used.

The pressure roll 31 is a roller that presses the film 1 coated with the transfer material 121 a against the transfer roll 41 . Specifically, the pressure roll 31 contacts the back surface of the film 1 and presses the front surface of the film 1 against the transfer roll 41 . The pressure roll 31 is provided so that the outer peripheral surface faces the transfer roll 41 . In this embodiment, the pressure roll 31 is arranged horizontally with respect to the transfer roll 41 . The diameter of the pressure roll 31 is, for example, 100 mm or more and 300 mm or less.

The transfer roll 41 is a roller (roll type) having a transfer shape (fine shape) 131a formed on its surface (cylindrical outer peripheral surface). The transfer shape 131 a according to the first embodiment is formed on a part of the outer peripheral surface of the transfer roll 41 . The transfer roll 41 transfers the transfer shape 131a onto the transfer material 121a. The diameter of the transfer roll 41 is, for example, 100 mm or more and 300 mm or less.

The first curing means 51 is means for curing the transfer material 121a. The first curing means 51 cures the transfer material 121a pressed by the pressure roll 31 with ultraviolet rays to form a first cured film 141a. In Embodiment 1, the first curing means 51 is an ultraviolet irradiation section (ultraviolet light source) that irradiates the transfer material 121a with ultraviolet rays. Also, the film thickness of the first cured film 141a is, for example, 0.5 μm or more and 10 μm or less.

The release roll 61 is a roller that separates the first cured film 141 a from the transfer roll 41 .

The feeding and holding mechanisms 71a and 71b are mechanisms for absorbing the slack of the film 1 that occurs when the second cured film 141b is intermittently formed (when the portion of the film 1 for forming the second cured film 141b is stopped). . That is, the feeding and holding mechanisms 71a and 71b are mechanisms for continuing the transport of the film 1 on the upstream side in the transport direction by absorbing slack in the film 1 running on the upstream side in the transport direction. The feed and hold mechanisms 71a and 71b are, for example, a pair of rolls, at least one of which is a dancer roll. In Embodiment 1, the feeding and holding mechanism 71b is a dancer roll. The feeding and holding mechanisms 71a and 71b are provided on the front side and the back side of the film 1, respectively.

The transport stage 81 is a stage that holds the film 1 . The conveying stage 81 holds the film 1 during application of the transfer material 121b by the second application unit 22, filling of the transfer material 121b into the mold 101, which will be described later, and formation of the second cured film 141b. The conveying stage 81 has a temporary fixing mechanism 151 for temporarily fixing the film 1 by sucking and holding the surface of the film 1 .

The temporary fixing mechanism 151 is provided at a position facing the mold 101 . The temporary fixing mechanism 151 of Embodiment 1 has a suction hole 151a. The temporary fixing mechanism 151 temporarily fixes the film 1 by sucking the film 1 through the suction holes 151a. A surface of the temporary fixing mechanism 151 on which the suction holes 151a are provided is formed flat. The temporary fixing mechanism 151 temporarily fixes the film 1 at the straight portion 1a along which the film 1 travels linearly.

The mold 101 is a mold having a transfer shape 131b formed on its surface (position facing the back surface of the film 1). The mold 101 is, for example, sheet-shaped. The mold 101 transfers the transfer shape 131b to the transfer material 121b applied to the back surface of the film 1. As shown in FIG. In Embodiment 1, the mold 101 is a transparent mold. By using a transparent mold as the mold 101, the position of the mold 101 with respect to the first cured film 141a can be detected more easily from above the film 1 (back side). A non-permeable mold may also be used.

The transfer material filling mechanism 32 ( FIG. 1B ) is a unit that fills the transfer shape 131 b of the mold 101 with the transfer material 121 b applied to the back surface of the film 1 . Any method may be used to fill the transfer shape 131b with the transfer material 121b. In this embodiment, for example, pressure is applied by a roller.

The second curing means 52 (FIG. 1C) is means for curing the transfer material 121b. The second curing means 52 cures the transfer material 121b filled in the transfer shape 131b of the mold 101 with ultraviolet rays to form the second cured film 141b. In the present embodiment, the second curing means 52 is an ultraviolet irradiation section (ultraviolet light source) that irradiates the transfer material 121b with ultraviolet rays. Also, the film thickness of the second cured film 141b is, for example, 0.5 μm or more and 10 μm or less.

The positional displacement amount detection mechanisms 91 and 92 (FIG. 1A) detect the amount of positional displacement between the first cured film 141a formed on the surface of the film 1 and the mold 101 (the second cured film 141b formed on the back surface of the film 1). ΔX, ΔX', ΔY, ΔY' (FIG. 2) are detected. The positional deviation amount detection mechanisms 91 and 92 are cameras, for example. The positional deviation amount detection mechanisms 91 and 92 are provided on the upstream side in the transport direction and the downstream side in the transport direction so as to be shifted in the width direction from each other.

The correction mechanism 111 is a mechanism that corrects the positional deviation amounts (ΔX, ΔX′, ΔY, ΔY′) detected by the positional deviation amount detection mechanisms 91 and 92 . In Embodiment 1, the correction mechanism 111 has a mechanism for correcting the position of the film 1 based on the positional deviation amounts (ΔX, ΔX', ΔY, ΔY'). The correction mechanism 111 has, for example, a pair of correction rolls 111a.

A pair of correction rolls 111a are arranged so as to sandwich the film 1 therebetween. The pair of correction rolls 111a are provided so that the position of the first cured film 141a, that is, the position of the film 1 can be adjusted in order to reduce the amount of positional deviation (.DELTA.X, .DELTA.X', .DELTA.Y, .DELTA.Y'). The pair of correction rolls 111a are rotatably provided with the film 1 therebetween so that the position of the film 1 can be adjusted in the transport direction (A1 direction). The pair of correction rolls 111a is provided movably in the axial direction so that the position of the film 1 can be adjusted in the width direction (X direction).

The control unit C1 is a member that controls the operation of each component of the manufacturing apparatus D1. The control unit C1 is, for example, a microcomputer or the like. The control unit C1 controls the manufacturing apparatus D1 so as to reduce the positional deviation amounts detected by the positional deviation amount detection mechanisms 91 and 92 . Specifically, the control unit C1 performs control of the temporary fixing mechanism 151 of the carrier stage 81, control of correcting the position or rotation angle of the correction mechanism 111, and the like.

Next, a method for manufacturing a film structure will be described in detail with reference to FIGS. 1A to 1E, 2, and 3. FIG. FIG. 2 is a schematic diagram showing recognition of the amount of positional deviation. FIG. 3 is a flow chart showing a method of manufacturing a film structure.

First, the first coating step ST10 in FIG. 3 is performed. Specifically, the first application unit 21 shown in FIG. 1A applies the transfer material 121a to the surface of the continuously running film 1 .

Next, the first transfer step ST20 in FIG. 3 is performed. Specifically, the pressure roll 31 shown in FIG. 1A presses the transfer roll 41 against the transfer material 121a applied to the surface of the film 1, thereby filling the transfer shape 131a with the transfer material 121a.

Next, the first curing step ST30 in FIG. 3 is performed. Specifically, the first curing unit 51 shown in FIG. 1A cures the transfer material 121 a applied to the surface of the film 1 while the pressure roll 31 presses the transfer roll 41 . In other words, the first curing means 51 bonds the transfer material 121a filled in the transfer shape 131a of the transfer roll 41 to the film 1 while curing. As a result, the transfer material 121a becomes a first cured film 141a cured with the transfer shape 131a transferred. Note that the first transfer step ST20 and the first curing step ST30 may be performed substantially simultaneously.

Next, the first mold release step ST40 in FIG. 3 is performed. Specifically, the release roll 61 separates the film 1 with the cured first cured film 141 a from the transfer roll 41 .

Next, the second coating step ST50 in FIG. 3 is performed. Specifically, the second applicator 22 shown in FIG. 1A applies the transfer material 121b to the back surface of the film 1 .

Next, the temporary fixing step ST60 in FIG. 3 is performed. Specifically, the film 1 that has undergone the above steps is transported to a position facing the mold 101 by the transport stage 81 shown in FIG. Here, the feeding amount of the film 1 until it is sucked and held by the temporary fixing mechanism 151 is controlled by the control section C1 according to the required transfer shape and the like. That is, the temporary fixing mechanism 151 holds the film 1 according to the relative position between the first cured film 141a formed on the surface of the film 1 and the mold 101 (the second cured film 141b formed on the back surface of the film 1). Adsorption hold. As a result, the portion where the second cured film 141b is to be formed can be easily temporarily fixed at a desired position, and the amount of positional deviation detected in the positional deviation amount detection step ST80, which will be described later, can be reduced.

Next, the feed holding step ST70 in FIG. 3 is performed. While the film 1 is sucked and held by the temporary fixing mechanism 151 shown in FIG. The film transport system on the upstream side in the transport direction from the holding mechanisms 71a and 71b is continuously running. By absorbing the slack of the film 1 that occurs at this time, the transport and forming of the film 1 on the upstream side in the transport direction are stabilized. Specifically, as shown in FIG. 1A, the feed and hold mechanism 71b moves downward (-Z direction) in the drawing, thereby absorbing slack in the film 1. As shown in FIG. The feed holding step ST70 may be performed by moving the feed holding mechanism 71a upward (+Z direction) in the drawing. The holding step ST70 may be performed by moving the feed holding mechanism 71a upward in the figure and moving the feed holding mechanism 71b downward in the figure.

Further, while the feed holding step ST70 in FIG. 3 is being performed, the positional deviation amount detection step ST80 is performed. Specifically, as shown in FIG. 1A, the first cured film 141a formed on the surface of the film 1 and the mold 101 (the first cured film 141a formed on the back surface of the film 1) are detected using the positional displacement amount detection mechanisms 91 and 92. 2 Detect the amount of positional deviation from the cured film 141b).

Here, the positional deviation amount detection step ST80 will be described with reference to FIG. On the transfer roll 41, for example, two on-roll alignment marks (not shown) are provided at diagonally shifted positions in the circumferential direction and the width direction. At this time, the number of marks in the circumferential direction does not matter. As a result, cured film alignment marks 161a and 162a are formed on the first cured film 141a on the surface of the film 1, as shown in FIG. On the other hand, on the mold 101, for example, two mold alignment marks 161b and 162b are provided diagonally while being shifted in the transport direction and the width direction. The X- and Y-direction lengths between the two on-roll alignment marks are equal to the X- and Y-direction lengths between the two mold alignment marks 161b and 162b.

Cured film alignment marks 161a and 162a and mold alignment marks 161b and 162b formed on the surface of the film 1 are used to recognize the amount of positional deviation. The positions of the mold alignment marks 161b and 162b are recognized by the positional deviation amount detection mechanisms 91 and 92 using the cured film alignment marks 161a and 162a as references. By providing the roll alignment marks and the mold alignment marks 161b and 162b at two diagonal points, the relative position accuracy of the cured films 141a and 141b on both sides of the film 1 can be further improved.

In the positional deviation amount detection step ST80, the respective centers of the cured film alignment marks 161a and 162a and the mold alignment marks 161b and 162b are recognized, and .DELTA.X, .DELTA.Y, .DELTA.X' and .DELTA.Y' are detected as relative positional deviation amounts. That is, ΔX in the X direction and ΔY in the Y direction are detected with respect to the amount of relative positional deviation of the center of the mold alignment mark 161b with respect to the center of the cured film alignment mark 161a. ΔX′ in the X direction and ΔY′ in the Y direction are detected with respect to the amount of relative positional deviation of the center of the mold alignment mark 162b with respect to the center of the cured film alignment mark 162a. Note that ΔX>0 when positioned in the +X direction, and ΔX<0 when positioned in the −X direction. Also, ΔY>0 when positioned in the +Y direction, and ΔY<0 when positioned in the −Y direction.

In the positional deviation amount detection step ST80 of Embodiment 1, the positional deviation amounts (.DELTA.X, .DELTA.Y, .DELTA.X', .DELTA.Y') are detected at the rectilinear portion 1a of the film 1. FIG. As a result, the amount of positional deviation (ΔX, ΔY, ΔX', ΔY') can be detected more accurately than in the curved portion. Temporary fixing of the film 1 is performed, for example, at a position facing the mold 101 . As a result, the portion of the film 1 where the second cured film 141b is to be formed can be easily temporarily fixed at a desired position.

While the feed holding step ST70 in FIG. 3 is performed, the correction step ST90 is performed after the positional deviation amount detection step ST80. In the correction step ST90 of Embodiment 1, the correction mechanism 111 shown in FIG. Correct the position of 1. Specifically, the controller C1 controls the position of the first cured film 141a, i. The position or rotation angle of the correction mechanism 111 is controlled to adjust the position.

Here, the correction step ST90 will be described in detail with reference to FIG. FIG. 4A is a schematic diagram showing the correcting operation of the film 1, FIG. 4B shows positional displacement recognition before the correcting operation, and FIG. 4C shows positional displacement recognition after the correcting operation.

As shown in FIG. 4A, the amount of positional deviation (.DELTA.X, .DELTA.X') in the width direction of the film 1 is corrected by moving the rotating shaft 111b of the correction mechanism 111 in the width direction. Specifically, by moving the pair of correction rolls 111a in the +X direction, the cured film alignment marks 161a and 162a move in the +X direction along with the movement of the correction roll 111a. By moving the pair of correction rolls 111a in the -X direction, the cured film alignment marks 161a and 162a move in the -X direction together with the movement of the correction roll 111a.

The amount of positional deviation (ΔY, ΔY′) in the feed direction of the film 1 is corrected by moving the rotation angle (θ) of the correction mechanism 111 . Specifically, the film 1 is sandwiched between a pair of correction rolls 111a, and the correction rolls 111a are rotated to correct and control the film 1 in the feeding direction. Regarding the rotation operation, when the correction roll 111a is rotated downstream in the transport direction (+Y direction) together with the film 1, the cured film alignment marks 161a and 162a move downstream in the film 1 transport direction. When the correction roll 111a is rotated along with the film 1 to the upstream side in the transport direction (-Y direction), the cured film alignment marks 161a and 162a move to the upstream side in the film 1 transport direction.

The position of the film 1 is adjusted by the correcting operation, and, for example, the cured film alignment marks 161a and 162a and the mold alignment marks 161b and 162b are corrected from the state shown in FIG. decrease in volume. In the correction operation, for example, the position of the film 1 is corrected by the correction mechanism 111 so that the force applied to the film 1 is greater than the adsorption force of the film 1 by the temporary fixing mechanism 151 .

While the feeding and holding step ST70 in FIG. 3 is performed, the second transfer step ST100 is performed after the correction step ST90. Specifically, as shown in FIG. 1B, the transfer material filling mechanism 32 fills the transfer shape 131b of the mold 101 with the transfer material 121b. Also at this time, the slack occurring in the film 1 is absorbed by further moving the feed and hold mechanism 71b downward (-Z direction) according to the feed.

While the feeding and holding step ST70 in FIG. 3 is performed, the second curing step ST110 is performed after the second transfer step ST100. Specifically, as shown in FIG. 1C , the second curing unit 52 cures the transfer material 121 b applied to the back surface of the film 1 while pressing the transfer material filling mechanism 32 against the mold 101 . In other words, the second curing means 52 bonds the transfer material 121b filled in the transfer shape 131b of the mold 101 to the film 1 while curing. As a result, the transfer material 121b becomes a second cured film 141b that is cured with the transfer shape 131b transferred. Also at this time, the slack occurring in the film 1 is absorbed by the feed holding mechanism 71b moving further downward in the drawing in accordance with the feeding.

While the feeding and holding step ST70 in FIG. 3 is performed, the second mold release step ST120 is performed after the second curing step ST110. Specifically, as shown in FIG. 1D, the mold 101 is separated from the film 1 on which the second cured film 141b has been cured. Although any peeling means may be used, in Embodiment 1, the mold 101 is moved obliquely upward or vertically upward with respect to the film 1 to perform the second mold releasing step ST120. Also at this time, the slack occurring in the film 1 is absorbed by the feed holding mechanism 71b moving further downward in the drawing in accordance with the feeding.

Next, after the second mold release step ST120, the feeding and holding step ST70 in FIG. 3 is ended, and the downstream feeding step ST130 is performed. Specifically, as shown in FIG. 1E, the suction on the transport stage 81 is released, and the film 1 is transported downstream in the transport direction. At this time, the feeding and holding mechanism 71b moves upward (+Z direction) as the film 1 is fed downstream in the transport direction.

When the feed and hold mechanism 71b returns to its original position, that is, the transport timing (transport speed) between the film transport system on the downstream side of the feed and hold mechanisms 71a and 71b and the film transport system on the upstream side of the feed and hold mechanisms 71a and 71b. ) match, the downstream sending step ST130 ends.

A film structure is manufactured by performing the above steps. Roll-to-roll production of the film structure can be realized by continuously performing the above-described method for producing the film structure.

According to the film structure manufacturing method and the manufacturing apparatus D1 according to the first embodiment, the following effects can be obtained.

In the film structure manufacturing method and manufacturing apparatus D1 according to the first embodiment, the positional deviation amount detection step ST80, the correction step ST90, and the second curing step ST110 for forming the second cured film 141b after the correction step ST90. including. In the positional deviation amount detection step ST80, the positional deviation amounts (.DELTA.X, .DELTA.Y, .DELTA.X', .DELTA.Y') are detected. In the correction step ST90, the position of the film 1 or the position of the mold 101 is corrected by the correction mechanism 111 so as to reduce the positional deviation amounts (.DELTA.X, .DELTA.Y, .DELTA.X', .DELTA.Y').

As a result, the amount of positional deviation (ΔX, ΔY, ΔX′, ΔY′) between the first cured film 141a and the mold 101 can be reduced by the correction step ST90. Therefore, the relative position accuracy of the cured films 141a and 141b on both sides of the film 1 can be improved. Furthermore, by performing the second curing step ST110 after the correction step ST90, the second cured film 141b can be formed with the amount of positional deviation (ΔX, ΔY, ΔX', ΔY') reduced. Therefore, it is possible to prevent the second cured film 141b from being formed in a state where the amount of positional deviation (ΔX, ΔY, ΔX', ΔY') is large, and the yield can be improved.

In the film structure manufacturing method and manufacturing apparatus D1 according to the first embodiment, the cured film alignment marks 161a and 162a and the mold alignment marks 161b and 162b are detected in the positional deviation detection step ST80. In the correction step ST90, the cured film alignment marks 161a and 162a and the mold alignment marks 161b and 162b are corrected to be closer to each other.

This makes it possible to easily reduce the amount of positional deviation between the first cured film 141a and the mold 101 by means of the alignment marks.

In addition, in the film structure manufacturing method and manufacturing apparatus D1 according to the first embodiment, the film 1 is moved in the transport direction as the pair of correction rolls 111a rotate. Alternatively, the pair of correction rolls 111 a are moved together with the film 1 .

By correcting the position of the film 1 with the correction roll 111a, the amount of positional deviation between the first cured film 141a and the mold 101 can be easily reduced.

In addition, in the film structure manufacturing method and manufacturing apparatus D1 according to the first embodiment, the film 1 is temporarily fixed at the straight portion 1a along which the film 1 travels linearly in the temporary fixing step ST60. The positional deviation amount detection step ST80 detects the positional deviation amounts (.DELTA.X, .DELTA.Y, .DELTA.X', .DELTA.Y') in the straight portion 1a of the film 1. FIG.

By temporarily fixing the film 1 at the straight portion 1a and detecting the amount of positional deviation (ΔX, ΔY, ΔX', ΔY'), the adsorption of the film 1 and the detection of the amount of positional deviation are compared with the case of performing at the curved portion. can be performed with high accuracy.

In the method and apparatus D1 for manufacturing a film structure according to the first embodiment, the surface of the film 1 is sucked and temporarily fixed at a position facing the mold 101 in the temporary fixing step ST60.

By sucking and temporarily fixing the surface of the film 1 at a position facing the mold 101, the portion of the film 1 where the second cured film 141b is to be formed can be easily temporarily fixed at a desired position. Therefore, the amount of positional deviation (ΔX, ΔY, ΔX', ΔY') between the first cured film 141a and the mold 101 can be easily reduced.

It should be noted that the present invention is not limited to the first embodiment, and can be implemented in various other modes. In the first embodiment, the temporary fixing mechanism 151 temporarily fixes the film 1 at the straight portion 1a along which the film 1 travels linearly in the traveling path of the film 1, but the present invention is not limited to this. The temporary fixing mechanism 151 may temporarily fix the film 1, for example, at a curved portion where the film 1 travels while curved.

Also, the method (configuration) for reducing the positional deviation amounts (ΔX, ΔY, ΔX', ΔY') by the pair of correction rolls 111a has been described. It is not limited to the correction roll 111a as long as it can be made. Other methods (structures) may be used as long as the position of the film 1 or the position of the mold 101 can be corrected.

Also, in the correction step ST90, the cured film alignment marks 161a and 162a and the mold alignment marks 161b and 162b are corrected to be closer to each other, but the present invention is not limited to this. That is, in the correction step ST90, correction may be performed without using alignment marks.

(Embodiment 2)
Next, Embodiment 2 according to the present disclosure will be described below with reference to the drawings. In the following description, differences from the first embodiment will be mainly described, and descriptions of common points will be omitted or simplified as appropriate.

The configuration of the film structure manufacturing apparatus D2 according to the second embodiment will be described with reference to FIG. FIG. 5 is a schematic perspective view of the manufacturing apparatus D2.

The correcting mechanism 113 according to the second embodiment has a mold position correcting mechanism 113 a that adjusts the position of the mold 101 . The mold position correction mechanism 113a is a mechanism that is controlled by the control unit C1 and adjusts the mold 101 based on the amount of positional deviation detected by the positional deviation amount detection mechanisms 91 and 92. FIG. The mold position correction mechanism 113a adjusts the position of the mold 101 (the second cured film 141b formed on the back surface of the film 1) to reduce the amount of positional deviation between the first cured film 141a formed on the surface of the film 1 and the mold 101. The position of 101 is provided so as to be adjustable. The correction mechanism 113 is, for example, a motor that can adjust the position of the mold 101 .

Here, the correction step ST90 in Embodiment 2 will be described with reference to FIGS. 6A to 6C (FIG. 6). FIG. 6A is a schematic diagram showing the correction operation of the mold 101, FIG. 6B shows positional displacement recognition before the correcting operation, and FIG. 6C shows positional displacement recognition after the correcting operation.

Based on the positional deviation amounts (ΔX, ΔY, ΔX', ΔY') detected in the positional deviation amount detection step ST80, the position of the mold 101 is changed in the width direction (X), feed (Y) direction, and rotation (θ ) direction. Specifically, in order to reduce the relative positional deviation between the first cured film 141a formed on the surface of the film 1 and the second cured film 141b formed on the back surface of the film 1, the second cured film 141b is formed. The position of the mold 101 is adjusted.

As shown in FIG. 6A, the amount of positional deviation (.DELTA.X, .DELTA.X') in the width direction with respect to the film 1 is corrected by moving the mold 101 in the width direction. Specifically, when ΔX (ΔX′)>0, the mold 101 is moved in the −X direction with respect to the film 1 for correction, and when ΔX (ΔX′)<0, the mold 101 is moved with respect to the film 1. Correct by moving in the +X direction.

The amount of positional deviation ([Delta]Y, [Delta]Y') in the feed direction with respect to the film 1 is corrected by moving the mold 101 in the Y direction. Specifically, when ΔY (ΔY′)>0, the mold 101 is moved in the −Y direction with respect to the film 1 for correction. Correct by moving in the +Y direction.

If the positional deviation amounts (ΔX, ΔX′) are different from each other, they are corrected by moving the mold 101 in the rotation (θ) direction. Specifically, when ΔX>ΔX′, that is, when the positional deviation amount ΔX on the upstream side in the transport direction is larger than the positional deviation amount ΔX′ on the downstream side in the transport direction, the downstream side in the transport direction of the mold 101 is directed in the +X direction. to rotate the mold 101. When ΔX<ΔX', that is, when the amount of positional deviation ΔX on the upstream side in the conveying direction is smaller than the amount of misalignment ΔX' on the downstream side in the conveying direction, the mold 101 is moved with the downstream side in the conveying direction facing the −X direction. rotate.

The position of the mold 101 is adjusted by the correcting operation, and for example, the amount of positional deviation is reduced from the state shown in FIG. 6B as shown in FIG. 6C.

According to the film structure manufacturing method and manufacturing apparatus D2 according to the second embodiment, the following effects can be obtained.

In the method and apparatus D2 for manufacturing a film structure according to the second embodiment, in the correction step ST90, the mold 101 is moved by the correction mechanism 113 (mold position correction mechanism 113a) so that the positional deviation amount (ΔX, ΔY, ΔX', ΔY').

By moving the mold 101 with the correction mechanism 113, the amount of positional deviation between the first cured film 141a and the mold 101 can be easily reduced.

Although the present disclosure has been fully described in connection with preferred embodiments and with reference to the accompanying drawings, various variations and modifications will become apparent to those skilled in the art. Such variations and modifications are to be included therein insofar as they do not depart from the scope of the invention as set forth in the appended claims. Also, combinations and order changes of elements in the embodiments can be implemented without departing from the scope and spirit of the present invention. Further, by appropriately combining any of the above-described various embodiments, the respective effects can be obtained.

INDUSTRIAL APPLICABILITY The method and apparatus for manufacturing a film structure according to the present disclosure can form fine shapes on both sides of the film with high precision, and are therefore useful in the fields of optical components, semiconductor components, and the like.

D1 manufacturing apparatus 1 film 1a straight advance section 21 first application section 22 second application section 31 pressure roll 32 transfer material filling mechanism 41 transfer roll 51 first curing means 52 second curing means 61 release rolls 71a, 71b feeding and holding mechanism 81 carrier stage 91, 92 positional deviation amount detection mechanism 101 mold 111, 113 correction mechanism 111a correction roll 111b rotary shaft 113a mold position correction mechanism 121a, 121b transfer material 131a, 131b transfer shape 141a first cured film 141b second cured film 151 Temporary fixing mechanism 151a Suction hole 161a, 162a Cured film alignment mark 161b, 162b Mold alignment mark C1 Control unit ST10 First coating step ST20 First transfer step ST30 First curing step ST40 First release step ST50 Second coating step ST60 Temporary Stopping process ST70 Feeding and holding process ST80 Positional deviation amount detection process ST90 Correction process ST100 Second transfer process ST110 Second hardening process ST120 Second release process ST130 Downstream feeding process

Claims (12)

A method for producing a film structure in which a transfer material is transferred to both surfaces of a continuously running film and cured,
A coating step of coating a transfer material containing an ultraviolet curable resin on the surface of the film;
A first curing step of forming a first cured film by curing the transfer material applied to the surface of the film with ultraviolet rays while pressing the surface of the film against the transfer roll with a pressure roll;
A temporary fixing step of sucking and temporarily fixing the surface of the film on which the first cured film is formed;
A feeding and holding step of holding the feeding of the film during running by a dancer roll on the upstream side in the conveying direction of the sucked portion in the temporary fixing step;
A positional deviation amount for detecting a positional deviation amount between the first cured film formed in the first curing step and the mold filled with the transfer material on the back side of the film temporarily fixed in the temporary fixing step. a detection step;
a correction step of correcting the position of the film or the position of the mold by a correction mechanism so as to reduce the positional deviation amount detected by the positional deviation amount detection step;
After the correction step, a second curing step of curing the transfer material filled in the mold on the back surface of the film to form a second cured film;
A method of making a film structure, comprising: In the positional deviation amount detection step, a cured film alignment mark formed on the first cured film and a mold alignment mark formed on the mold are detected,
2. The method of manufacturing a film structure according to claim 1, wherein in said correcting step, said cured film alignment mark and said mold alignment mark are corrected to be closer to each other. In the correction step, the film is sandwiched between a pair of correction rolls included in the correction mechanism, and the film is moved in the conveying direction as the pair of correction rolls rotate, or the pair of correction rolls is rotated to move the film. 3. The method of manufacturing a film structure according to claim 1, wherein the amount of positional deviation is reduced by moving together. The manufacturing method of the film structure according to any one of claims 1 to 3, wherein in the correcting step, the positional deviation amount is reduced by moving the mold with the correcting mechanism. In the temporary fixing step, the film is temporarily fixed at a straight portion along which the film travels linearly in a traveling path of the film;
The method for manufacturing a film structure according to any one of claims 1 to 4, wherein in the positional deviation amount detecting step, the positional deviation amount is detected in the straight portion of the film. The method for manufacturing a film structure according to any one of claims 1 to 5, wherein in the temporary fixing step, the surface of the film is temporarily fixed by sucking at a position facing the mold. A device for manufacturing a film structure in which a transfer material is transferred to both surfaces of a continuously running film and cured,
an application unit that applies a transfer material containing an ultraviolet curable resin to the surface of the film;
a transfer roll having a transfer shape on its surface;
a pressure roll that presses the transfer material applied to the surface of the film against the transfer roll;
a first curing means for curing the transfer material pressed by the pressure roll on the surface of the film to form a first cured film;
a temporary fixing mechanism that sucks and temporarily fixes the surface of the film on which the first cured film is formed;
A feeding and holding mechanism that includes a dancer roll and holds the feeding of the running film on the upstream side in the feeding direction of the sucked portion by the temporary fixing mechanism;
a mold having a transfer shape on its surface;
a second curing means for curing the transfer material filled in the mold on the back surface of the film to form a second cured film;
a positional deviation amount detection mechanism for detecting a positional deviation amount between the first cured film formed on the surface of the film and the mold;
a correction mechanism for correcting the positional deviation detected by the positional deviation detection mechanism;
a control unit that controls the correction mechanism so as to reduce the positional deviation amount detected by the positional deviation amount detection mechanism before forming the second cured film by the second curing means;
An apparatus for manufacturing a film structure. The transfer roll has an alignment mark for forming a cured film alignment mark on the first cured film,
The mold has a mold alignment mark,
8. The production of a film structure according to claim 7, wherein said positional deviation amount detection mechanism detects a positional deviation amount between said cured film alignment mark formed on said first cured film and said mold alignment mark of said mold. Device. The correction mechanism has a pair of correction rolls arranged to sandwich the film and corrects the position of the film, and rotates the pair of correction rolls or moves the pair of correction rolls. 9. The apparatus for manufacturing a film structure according to claim 7, wherein the amount of positional deviation is corrected. 10. The correction mechanism according to any one of claims 7 to 9, wherein the correction mechanism has a mold position correction mechanism that corrects the position of the mold based on the positional deviation amount detected by the positional deviation amount detection mechanism. Film structure manufacturing equipment. The temporary fixing mechanism temporarily fixes the film at a straight portion along which the film travels linearly on a traveling path of the film,
The apparatus for manufacturing a film structure according to any one of claims 7 to 10, wherein the positional deviation amount detection mechanism detects the positional deviation amount at the straight portion of the film. The apparatus for manufacturing a film structure according to any one of claims 7 to 11, wherein the temporary fixing mechanism has suction holes for temporarily fixing by sucking the surface of the film at a position facing the mold.

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