JP7213812B2 - プロセス監視設備を伴う付加層製造装置 - Google Patents
プロセス監視設備を伴う付加層製造装置 Download PDFInfo
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Description
11 筐体
11A 側壁、壁
11B 上壁
11C 下壁
12 真空室、室
13 下方領域、領域、室領域
14 テーブル
15 物品、加工品
16 層、粉末層
17 電子ビーム柱、柱
18 電子供給源
19 軸
20 ユニット
21 ビームの作用の帯域、帯域
22 線、軌跡
23A 窓、第1の窓、要素
23B 窓、第2の窓、要素
23C 窓、第3の窓
24A、24B、24C 光学軸、光学要素
25A、25B、25C 撮像または測定の装置
26A 第1の透明な光学要素、要素、透明な光学要素、光学要素
26B 第2の透明な光学要素、透明な光学要素、光学要素
26C 第3の光学要素、光学要素
27A、27B、27C 加熱手段
Claims (16)
- 真空室の境界となり、付加層製造が実行される前記室の領域を監視するための窓を有する筐体と、
電子ビームを発生させ、可溶粉末材料の連続的な層へ作用して、前記粉末材料の連続的な層から物品を作成するために、前記室を通して前記領域へと前記ビームを伝達するための電子ビーム発生および伝達手段と、
前記領域と前記窓との間で光学経路に沿って進む材料の遊離した気相構成成分を妨害するために前記室に配置される光学要素であって、前記室内で前記光学経路上に配置され、前記窓を介した監視の間に、前記領域と前記窓との間での保護の防御体または遮蔽体として機能する、光学要素と、
前記妨害された構成成分の前記光学要素における凝縮を防止する温度まで前記光学要素を加熱するための加熱手段であって、前記光学要素が、前記筐体の壁に隣接して前記室内に配置されるが、前記室内に真空が存在する場合に真空が行き渡る隙間によって前記筐体の壁から熱的に絶縁される、加熱手段と
を備える付加層製造装置。 - 前記窓は、前記室領域における前記ビームの作用の帯域の見通し線において配置され、前記光学要素は、光学的に伝達可能であり、前記窓を前記帯域から遮るために前記光学経路に配置される、請求項1に記載の装置。
- 前記光学要素は赤外線スペクトルにおいて伝達を提供する、請求項2に記載の装置。
- 前記光学要素は窓ガラスまたはレンズである、請求項2または3に記載の装置。
- 前記加熱手段が前記窓ガラスまたは前記レンズの外周に配置される、請求項4に記載の装置。
- 前記窓は、前記室領域における前記ビームの作用の帯域の見通し線の外に配置され、前記光学要素は、光学的に反射可能または屈折可能であり、前記光学経路を定める、請求項1に記載の装置。
- 前記光学要素は赤外線スペクトルにおいて反射または屈折を提供する、請求項6に記載の装置。
- 前記光学要素は鏡またはプリズムである、請求項6または7に記載の装置。
- 前記加熱手段は、前記室領域から離れた前記鏡または前記プリズムの面の上部に配置される、請求項8に記載の装置。
- 前記筐体は複数の前記窓を有し、前記装置は、各々の窓と関連付けられるそれぞれの前記光学要素と、各々の光学要素を加熱するためのそれぞれの前記加熱手段とを備える、請求項1から9のいずれか一項に記載の装置。
- 前記光学要素は、少なくとも700℃の融点を有する材料から成る、請求項1から10のいずれか一項に記載の装置。
- 前記光学要素は、少なくとも700℃まで変化しない光学特性を有する材料から成る、請求項1から11のいずれか一項に記載の装置。
- 前記室において実行される付加層製造のパラメータを監視するための監視手段であって、前記または各々の窓およびそれぞれの関連する光学経路を介して監視するために前記室の外側に配置される、監視手段を備える、請求項1から12のいずれか一項に記載の装置。
- 前記監視手段は、前記室領域内の画像を撮るためのカメラを備える、請求項13に記載の装置。
- 前記監視手段は、前記パラメータを測定するための測定手段を備える、請求項13に記載の装置。
- 前記監視手段はレーザー測定器具を備える、請求項13に記載の装置。
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GB1701088.5 | 2017-01-20 | ||
GB1701088.5A GB2559121B (en) | 2017-01-20 | 2017-01-20 | Additive layer manufacturing apparatus with process monitoring facility |
PCT/GB2018/000003 WO2018134555A1 (en) | 2017-01-20 | 2018-01-05 | Additive layer manufacturing apparatus with process monitoring facility |
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GB201617693D0 (en) * | 2016-10-19 | 2016-11-30 | Reliance Rg Limited | Charged particle beam steering arrangement |
KR102611837B1 (ko) * | 2017-04-04 | 2023-12-07 | 엔라이트 인크. | 검류계 스캐너 보정을 위한 광학 기준 생성 |
US11020763B2 (en) * | 2018-08-21 | 2021-06-01 | General Electric Company | Spacer flow guide for partitioning build chamber of an additive manufacturing system |
DE102018127063A1 (de) * | 2018-10-30 | 2020-04-30 | Bayerische Motoren Werke Aktiengesellschaft | Verfahren zur additiven Herstellung eines Objekts |
EP4003701A4 (en) | 2019-07-26 | 2023-11-08 | Velo3d Inc. | QUALITY ASSURANCE IN THE FORMATION OF THREE-DIMENSIONAL OBJECTS |
FR3102397B1 (fr) | 2019-10-24 | 2022-10-14 | Addup | Machine à faisceau laser comprenant un dispositif d’application d’une couche de gel optique sur une vitre traversée par le faisceau laser. |
CN113020623B (zh) * | 2021-05-27 | 2022-04-08 | 西安赛隆金属材料有限责任公司 | 一种3d打印成形表面自调节的方法及其装置 |
CN114799222B (zh) * | 2021-12-14 | 2024-03-22 | 上海航天设备制造总厂有限公司 | 用于上落粉式slm设备的粉仓内壁即时清洁装置及方法 |
WO2023114091A1 (en) * | 2021-12-17 | 2023-06-22 | Velo3D, Inc. | Optics in additive manufacturing |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008510633A (ja) | 2005-07-21 | 2008-04-10 | イーオーエス ゲゼルシャフト ミット ベシュレンクテル ハフツング イレクトロ オプティカル システムズ | 三次元物体を層状に製造するための装置及び方法 |
US20100255213A1 (en) | 2009-04-02 | 2010-10-07 | Fei Company | Method for Forming Microscopic 3D Structures |
JP2013091316A (ja) | 2011-10-25 | 2013-05-16 | Evonik Industries Ag | レーザー焼結における光学コンポーネントへの沈着を回避するための装置 |
CN105499567A (zh) | 2015-12-15 | 2016-04-20 | 天津清研智束科技有限公司 | 粉床式电子束增材制造中热应力的控制装置及方法 |
WO2016143137A1 (ja) | 2015-03-12 | 2016-09-15 | 株式会社ニコン | 三次元造形物製造装置および構造物の製造方法 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008510633A (ja) | 2005-07-21 | 2008-04-10 | イーオーエス ゲゼルシャフト ミット ベシュレンクテル ハフツング イレクトロ オプティカル システムズ | 三次元物体を層状に製造するための装置及び方法 |
US20100255213A1 (en) | 2009-04-02 | 2010-10-07 | Fei Company | Method for Forming Microscopic 3D Structures |
JP2013091316A (ja) | 2011-10-25 | 2013-05-16 | Evonik Industries Ag | レーザー焼結における光学コンポーネントへの沈着を回避するための装置 |
WO2016143137A1 (ja) | 2015-03-12 | 2016-09-15 | 株式会社ニコン | 三次元造形物製造装置および構造物の製造方法 |
CN105499567A (zh) | 2015-12-15 | 2016-04-20 | 天津清研智束科技有限公司 | 粉床式电子束增材制造中热应力的控制装置及方法 |
Non-Patent Citations (1)
Title |
---|
Dinwiddie, et.al.,Thermographic in-situ process monitoring of the electron-beam melting technology used in additive manufacturing,PROCEEDINGS OF SPIE,2013年05月22日,8705,87050 |
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US20190375010A1 (en) | 2019-12-12 |
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CA3050819A1 (en) | 2018-07-26 |
US11400518B2 (en) | 2022-08-02 |
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