JP7210067B2 - 光センサー、センサーユニット及び光センサーを利用した物体検出装置 - Google Patents

光センサー、センサーユニット及び光センサーを利用した物体検出装置 Download PDF

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JP7210067B2
JP7210067B2 JP2021537272A JP2021537272A JP7210067B2 JP 7210067 B2 JP7210067 B2 JP 7210067B2 JP 2021537272 A JP2021537272 A JP 2021537272A JP 2021537272 A JP2021537272 A JP 2021537272A JP 7210067 B2 JP7210067 B2 JP 7210067B2
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wavelength
absorber
optical sensor
light
sensor
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JPWO2021024909A1 (https=
JPWO2021024909A5 (https=
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忠昭 長尾
デュイ タン ダオ
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National Institute for Materials Science
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National Institute for Materials Science
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
    • H10N15/15—Thermoelectric active materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
    • G02B1/005—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials made of photonic crystals or photonic band gap materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/008—Surface plasmon devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N19/00—Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J2005/103—Absorbing heated plate or film and temperature detector

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP2021537272A 2019-08-02 2020-07-30 光センサー、センサーユニット及び光センサーを利用した物体検出装置 Active JP7210067B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019142927 2019-08-02
JP2019142927 2019-08-02
PCT/JP2020/029266 WO2021024909A1 (ja) 2019-08-02 2020-07-30 光センサー、センサーユニット及び光センサーを利用した物体検出装置

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JPWO2021024909A1 JPWO2021024909A1 (https=) 2021-02-11
JPWO2021024909A5 JPWO2021024909A5 (https=) 2022-04-19
JP7210067B2 true JP7210067B2 (ja) 2023-01-23

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US (1) US12295266B2 (https=)
EP (1) EP4009015B1 (https=)
JP (1) JP7210067B2 (https=)
WO (1) WO2021024909A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7593626B2 (ja) * 2021-02-24 2024-12-03 国立研究開発法人物質・材料研究機構 光熱変換基板、その製造方法、それを用いた赤外線センサおよび反応性基板
WO2024130287A1 (en) 2022-12-22 2024-06-27 Invisible-Light Labs Gmbh Optomechanical thermal infrared detector element
KR102938214B1 (ko) 2025-04-14 2026-03-12 한국원자력연구원 능동형 온도조절장치

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005338882A (ja) 1999-03-22 2005-12-08 Mems Optical Inc 回折選択偏光ビームスプリッタおよびそれにより製造されたビームルーチングプリズム
JP2007501391A (ja) 2003-08-06 2007-01-25 ユニバーシティー オブ ピッツバーグ 表面プラズモンを増強するナノ光学素子及びこの製造方法
JP2011128133A (ja) 2009-11-19 2011-06-30 Seiko Epson Corp センサーチップ、センサーカートリッジ及び分析装置
JP2011232186A (ja) 2010-04-28 2011-11-17 Seiko Epson Corp 光デバイス、分析装置及び分光方法
WO2013164910A1 (ja) 2012-05-01 2013-11-07 セイコーエプソン株式会社 光学デバイス及び検出装置
JP2014119262A (ja) 2012-12-13 2014-06-30 Seiko Epson Corp 光学デバイス、検出装置、及び電子機器
JP2014134553A (ja) 2014-04-21 2014-07-24 Seiko Epson Corp 分析装置
JP2015055482A (ja) 2013-09-10 2015-03-23 セイコーエプソン株式会社 分析装置、分析方法、これらに用いる光学素子及び電子機器
JP2015212674A (ja) 2014-05-07 2015-11-26 セイコーエプソン株式会社 分析装置及び電子機器
WO2019039551A1 (ja) 2017-08-23 2019-02-28 国立大学法人東北大学 メタマテリアル構造体および屈折率センサ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6269008B2 (ja) * 2013-12-12 2018-01-31 株式会社豊田中央研究所 電磁波−表面ポラリトン変換素子。
US10168221B2 (en) * 2016-03-18 2019-01-01 Board Of Trustees Of The University Of Illinois Uncooled, high sensitivity spectral selective infrared detector

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005338882A (ja) 1999-03-22 2005-12-08 Mems Optical Inc 回折選択偏光ビームスプリッタおよびそれにより製造されたビームルーチングプリズム
JP2007501391A (ja) 2003-08-06 2007-01-25 ユニバーシティー オブ ピッツバーグ 表面プラズモンを増強するナノ光学素子及びこの製造方法
JP2011128133A (ja) 2009-11-19 2011-06-30 Seiko Epson Corp センサーチップ、センサーカートリッジ及び分析装置
JP2011232186A (ja) 2010-04-28 2011-11-17 Seiko Epson Corp 光デバイス、分析装置及び分光方法
WO2013164910A1 (ja) 2012-05-01 2013-11-07 セイコーエプソン株式会社 光学デバイス及び検出装置
JP2014119262A (ja) 2012-12-13 2014-06-30 Seiko Epson Corp 光学デバイス、検出装置、及び電子機器
JP2015055482A (ja) 2013-09-10 2015-03-23 セイコーエプソン株式会社 分析装置、分析方法、これらに用いる光学素子及び電子機器
JP2014134553A (ja) 2014-04-21 2014-07-24 Seiko Epson Corp 分析装置
JP2015212674A (ja) 2014-05-07 2015-11-26 セイコーエプソン株式会社 分析装置及び電子機器
WO2019039551A1 (ja) 2017-08-23 2019-02-28 国立大学法人東北大学 メタマテリアル構造体および屈折率センサ

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US20220271211A1 (en) 2022-08-25
EP4009015A4 (en) 2023-12-27
EP4009015B1 (en) 2025-11-26
EP4009015A1 (en) 2022-06-08
JPWO2021024909A1 (https=) 2021-02-11
WO2021024909A1 (ja) 2021-02-11
US12295266B2 (en) 2025-05-06

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