JP7209054B2 - 真空ポンプを運転する方法 - Google Patents

真空ポンプを運転する方法 Download PDF

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Publication number
JP7209054B2
JP7209054B2 JP2021127232A JP2021127232A JP7209054B2 JP 7209054 B2 JP7209054 B2 JP 7209054B2 JP 2021127232 A JP2021127232 A JP 2021127232A JP 2021127232 A JP2021127232 A JP 2021127232A JP 7209054 B2 JP7209054 B2 JP 7209054B2
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Prior art keywords
rotor
wear
bearing
vacuum pump
safety
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JP2021127232A
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Japanese (ja)
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JP2022075494A (ja
Inventor
ヘルベルト・シュタムラー
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プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2021127232A 2020-11-05 2021-08-03 真空ポンプを運転する方法 Active JP7209054B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP20205911.9A EP3832141B1 (de) 2020-11-05 2020-11-05 Verfahren zum betreiben einer vakuumpumpe
EP20205911 2020-11-05

Publications (2)

Publication Number Publication Date
JP2022075494A JP2022075494A (ja) 2022-05-18
JP7209054B2 true JP7209054B2 (ja) 2023-01-19

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ID=73138687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021127232A Active JP7209054B2 (ja) 2020-11-05 2021-08-03 真空ポンプを運転する方法

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EP (1) EP3832141B1 (de)
JP (1) JP7209054B2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4137699A1 (de) * 2022-12-15 2023-02-22 Pfeiffer Vacuum Technology AG Vakuumgerät und verfahren zum betreiben eines solchen
EP4328468A3 (de) * 2023-12-15 2024-06-26 Pfeiffer Vacuum Technology AG Flutventil sowie mit solch einem flutventil ausgerüstete vakuumpumpe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002295398A (ja) 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法
US20110210631A1 (en) 2008-07-18 2011-09-01 Siemens Aktiengesellschaft Bearing arrangement and bearing block having a magnetic radial bearing and a safety bearing for a rotating machine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4022523A1 (de) * 1990-07-16 1992-01-23 Pfeiffer Vakuumtechnik Einrichtung zum fluten von schnell rotierenden vakuumpumpen
US5575630A (en) * 1995-08-08 1996-11-19 Kyocera Corporation Blood pump having magnetic attraction
EP2457076A1 (de) * 2009-07-22 2012-05-30 Johnson Controls Technology Company Vorrichtung und verfahren zur bestimmung des spiels mechanischer sicherungslager einer turbomaschine mit elektromagnetischen lagern
EP3473858B1 (de) * 2017-10-17 2020-07-01 Pfeiffer Vacuum Gmbh Verfahren zur lebensdaueroptimierung von wälzlagern einer vakuumpumpe
EP3653885B1 (de) * 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh Verfahren zum ermitteln einer zustandsinformation in einem vakuumgerät

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002295398A (ja) 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法
US20110210631A1 (en) 2008-07-18 2011-09-01 Siemens Aktiengesellschaft Bearing arrangement and bearing block having a magnetic radial bearing and a safety bearing for a rotating machine

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Publication number Publication date
JP2022075494A (ja) 2022-05-18
EP3832141A1 (de) 2021-06-09
EP3832141B1 (de) 2023-01-04

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