JP7187385B2 - 磁気駆動装置、着磁方法及び磁気駆動装置の製造方法 - Google Patents
磁気駆動装置、着磁方法及び磁気駆動装置の製造方法 Download PDFInfo
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Description
前記磁気駆動装置内であって、移動により前記磁石を着磁可能な待機位置に配置された着磁ヨークと、
前記磁気駆動機構が停止しているときに、前記磁石を着磁する着磁位置に前記着磁ヨークを保持する着磁ヨーク保持手段と、を有する。
1 成膜装置
11 真空容器
2 回転テーブル
3 載置台
35 ヒータ
4 従動ギア
5 駆動ギア
55 駆動ギア用昇降機構
61 原料ガスノズル
63 酸化ガスノズル
80 駆動ギア用着磁ヨーク
81 従動ギア用着磁ヨーク
90、91 磁気検出器
120、121 着磁ヨーク保持部材
Claims (16)
- 磁石を用いて駆動する磁気駆動機構を有する磁気駆動装置であって、
前記磁気駆動装置内であって、移動により前記磁石を着磁可能な待機位置に配置された着磁ヨークと、
前記磁気駆動機構が停止しているときに、前記磁石を着磁する着磁位置に前記着磁ヨークを保持する着磁ヨーク保持手段と、を有する磁気駆動装置。 - 前記着磁位置は、前記磁石と対向又は重なる位置である請求項1に記載の磁気駆動装置。
- 前記待機位置と前記着磁位置との間で前記着磁ヨークを移動させる移動手段を更に有する請求項1又は2に記載の磁気駆動装置。
- 前記磁石の磁力を検出する磁力検出器を更に有する請求項3に記載の磁気駆動装置。
- 前記磁力検出器により検出された前記磁石の磁力が閾値よりも低く、かつ前記磁気駆動機構が停止しているときに、前記着磁ヨークを前記着磁位置に移動させて前記磁石を着磁させる処理を行う制御手段を更に有する請求項4に記載の磁気駆動装置。
- 処理室と、
前記処理室内に設けられた回転テーブルと、を更に有し、
前記回転テーブルの回転機構の少なくとも一部に前記磁気駆動機構が設けられた請求項3乃至5のいずれか一項に記載の磁気駆動装置。 - 前記回転テーブルは基板を載置する基板載置台として機能し、
基板処理装置として構成された請求項6に記載の磁気駆動装置。 - 前記回転テーブル上には、周方向に沿って配置された複数の基板載置領域が設けられ、
前記磁気駆動機構は、前記複数の基板載置領域の各々を自転させる機構である請求項7に記載の磁気駆動装置。 - 前記磁気駆動機構は、前記複数の基板載置領域の各々の底面から下方に延びる部材に設けられた第1の磁石と、
前記第1の磁石と対向して磁力により非接触で磁気結合し、前記第1の磁石を自転させる磁力を発生させる第2の磁石を有する駆動ギアと、を有する請求項8に記載の磁気駆動装置。 - 前記移動手段は、前記回転テーブルより外側及び下方から、前記着磁ヨークを前記第1の磁石と前記第2の磁石との間に挿入させる機構である請求項9に記載の磁気駆動装置。
- 前記回転テーブル上に処理ガスを供給するノズルを更に有し、
成膜装置として構成された請求項6乃至10のいずれか一項に記載の磁気駆動装置。 - 磁石を用いて駆動する磁気駆動機構を有する磁気駆動装置を磁気駆動させる工程と、
前記磁気駆動装置を磁気駆動させる工程の後、前記磁気駆動機構が停止しているときに、前記磁石と着磁ヨークとを相対移動させる工程と、
前記相対移動により前記磁石に前記着磁ヨークを対向させた状態で前記磁石を着磁する工程と、を有する着磁方法。 - 前記着磁ヨークは、前記磁気駆動機構を磁気駆動させているときには前記磁気駆動機構の周囲の待機位置に配置され、
前記磁石と前記着磁ヨークとを相対移動させる工程では、前記待機位置から前記磁石に対向した着磁位置まで前記着磁ヨークを移動させる請求項12に記載の着磁方法。 - 前記磁石の磁力を検出する工程を更に有し、
前記磁石の磁力が閾値より低いと判断したときに前記磁石を着磁する工程を実施する請求項12又は13に記載の着磁方法。 - 前記磁気駆動装置は、処理室内に回転テーブルを有する基板処理装置であり、前記磁気駆動機構を磁気駆動させることにより、前記回転テーブル上に周方向に沿って配置された複数の基板を自転させて基板処理を行い、
前記磁石を着磁する工程は、前記基板が前記処理室内に設けられていないときに行われる請求項12乃至14のいずれか一項に記載の着磁方法。 - 磁気結合を用いた磁気ギアを含む磁気駆動装置の製造方法であって、
第1の磁性体を有する第1の部品と、第2の磁性体を有する第2の部品とを、着磁させていない状態で前記磁気駆動装置に組み付ける工程と、
前記磁気駆動装置の動作下に、前記第1の部品と前記第2の部品の間に着磁ヨークを配置する工程と、
配置した前記着磁ヨークにより、前記第1の磁性体及び前記第2の磁性体を着磁させ、前記第1の磁性体と前記第2の磁性体との磁気結合を発生させ、前記第1の部品と前記第2の部品との間に磁気ギアを介在させる工程と、を有する磁気駆動装置の製造方法。
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