JP7183225B2 - Vibration type driving device and imaging device - Google Patents

Vibration type driving device and imaging device Download PDF

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JP7183225B2
JP7183225B2 JP2020145846A JP2020145846A JP7183225B2 JP 7183225 B2 JP7183225 B2 JP 7183225B2 JP 2020145846 A JP2020145846 A JP 2020145846A JP 2020145846 A JP2020145846 A JP 2020145846A JP 7183225 B2 JP7183225 B2 JP 7183225B2
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contacted
vibration
vibration type
driving device
type driving
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JP2022040911A (en
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泰史 山本
歩 根本
かおり 戸村
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Canon Inc
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Canon Inc
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Priority to US17/444,769 priority patent/US11516407B2/en
Priority to DE102021122204.4A priority patent/DE102021122204A1/en
Priority to CN202110992372.7A priority patent/CN114123846A/en
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Description

本発明は、振動と摩擦力とによって回転駆動力を生じさせる振動型駆動装置および撮像装置に関する。 The present invention relates to a vibration-type driving device and an imaging device that generate rotational driving force by vibration and frictional force.

従来、撮像装置等の電子機器において、励起した振動と摩擦力とにより回転駆動を生じさせる振動型駆動装置が採用される。振動型駆動装置として、小型、高出力、静粛性という特徴を併せ持つ回転式の振動型モータが知られている。 2. Description of the Related Art Conventionally, an electronic device such as an imaging device employs a vibration-type driving device that generates rotational driving by excited vibration and frictional force. 2. Description of the Related Art As a vibration type driving device, a rotary vibration type motor is known which has the characteristics of small size, high output, and quietness.

このような回転式の振動型モータには、駆動源である円環形状の振動子が、円環形状の摩擦部材(被接触部材)に対して、円環形状全面で均一に加圧付勢され、加圧付勢により発生する摩擦力を利用して回転方向の駆動力が取り出される構成のものがある。一方、特許文献1、2に示されるように、円環形状の摩擦部材に対し相対的にサイズの小さい振動子が摩擦部材の円周上の特定の位置でのみ加圧付勢するように構成された振動型モータも提案されている。このような振動型モータは振動子のサイズが小さいことにより小型化に有利である。 In such a rotary vibration type motor, an annular vibrator, which is a driving source, uniformly presses and biases an annular friction member (contacted member) over the entire annular surface. There is also a configuration in which the driving force in the rotational direction is obtained by utilizing the frictional force generated by the pressurization. On the other hand, as disclosed in Patent Documents 1 and 2, a vibrator having a relatively small size with respect to an annular friction member is configured to pressurize and energize only a specific position on the circumference of the friction member. A vibrating motor has also been proposed. Such a vibration type motor is advantageous for miniaturization due to the small size of the vibrator.

特開2006-158054号公報JP 2006-158054 A 特開2004-304887号公報Japanese Patent Application Laid-Open No. 2004-304887

しかしながら、円周上の特定位置でしか規制を受けなくなると、規制が少ないことで摩擦部材が不要な共振を発生しやすくなり、振動子の駆動力の阻害要因となって、振動型モータとしての駆動特性が低下するおそれがある。一方で、摩擦部材の不要な共振を抑えるために、摩擦部材をビスなどで固定部材へ固定することで振動を減衰させる方法が考えられる。しかし、摩擦部材を何ら工夫なく固定部材に固定したのでは、不要な共振を生じさせたり、ユニット全体の大型化を招いたりするおそれがある。 However, if the regulation is limited to a specific position on the circumference, the friction member is likely to generate unnecessary resonance due to the lack of regulation. Driving characteristics may deteriorate. On the other hand, in order to suppress unnecessary resonance of the friction member, a method of damping vibration by fixing the friction member to a fixed member with a screw or the like is conceivable. However, if the friction member is fixed to the fixing member without any ingenuity, there is a possibility that unnecessary resonance will occur or the size of the entire unit will be increased.

本発明は、良好な駆動特性を確保すると共に大型化を抑制することを目的とする。 SUMMARY OF THE INVENTION It is an object of the present invention to ensure good driving characteristics and to suppress an increase in size.

上記目的を達成するために本発明は、略円環形状の被接触部材と、前記被接触部材を保持する保持部材と、前記被接触部材に対して加圧接触すると共に、振動を用いて前記被接触部材を回転駆動する駆動部と、前記駆動部を前記被接触部材に対して加圧する加圧手段と、前記駆動部からの加圧力を受ける加圧受け部材と、前記被接触部材と前記加圧受け部材との間に介在するスペーサ部材と、前記被接触部材の径方向において、前記駆動部が前記被接触部材に加圧接触する第1の位置よりも内側の第2の位置で、前記被接触部材前記加圧受け部材及び前記スペーサ部材を一括して前記保持部材に対して固定する固定手段と、前記径方向において前記スペーサ部材と並び前記第1の位置を含む領域に配置され、前記固定手段に固定されず前記被接触部材と前記加圧受け部材とで挟持される減衰部材と、を有することを特徴とする。 In order to achieve the above object, the present invention provides a substantially annular contact member, a holding member that holds the contact member, and a contact member that presses and contacts the contact member and vibrates the contact member. a drive unit that rotationally drives a contact member; a pressurizing unit that presses the drive unit against the contact member; a pressure receiving member that receives pressure from the drive unit ; a spacer member interposed between a pressure receiving member and a second position radially of the contacted member, which is inner than a first position at which the driving portion is in pressure contact with the contacted member, fixing means for collectively fixing the contacted member , the pressure receiving member and the spacer member to the holding member; and a damping member that is not fixed to the fixing means but is sandwiched between the contacted member and the pressure receiving member .

本発明によれば、良好な駆動特性を確保すると共に大型化を抑制することができる。 ADVANTAGE OF THE INVENTION According to this invention, a favorable drive characteristic can be ensured and an increase in size can be suppressed.

電子機器の模式図である。1 is a schematic diagram of an electronic device; FIG. 振動型モータの分解斜視図である。1 is an exploded perspective view of a vibration type motor; FIG. 振動型モータの分解斜視図である。1 is an exploded perspective view of a vibration type motor; FIG. 振動型モータの要部の断面図である。FIG. 3 is a cross-sectional view of a main part of the vibration type motor; 振動子の振動モードの模式図、楕円運動する突起部の模式図である。FIG. 4A is a schematic diagram of a vibration mode of a vibrator, and a schematic diagram of a protrusion that makes an elliptical motion. 被駆動体の分解斜視図である。3 is an exploded perspective view of a driven body; FIG. 被駆動体を詳細に示した振動型モータの要部の断面図である。FIG. 3 is a cross-sectional view of the main part of the vibration type motor showing the driven body in detail;

以下、図面を参照して本発明の実施の形態を説明する。 BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図1は、本発明の一実施の形態に係る振動型駆動装置が適用される電子機器の模式図である。この電子機器として旋回駆動装置1が例示される。旋回駆動装置1は、固定体10と、固定体10に対して回転可能な可動体20とを含む。固定体10は、振動型駆動装置としての振動型モータ100のほか、旋回駆動装置1全体を制御する制御基板(不図示)を含む。振動型モータ100は断面図で示されている。可動体20は、被写体を撮像可能な撮像部である撮像装置21を含む。なお、旋回駆動装置1全体を撮像装置と呼称してもよい。 FIG. 1 is a schematic diagram of an electronic device to which a vibration-type driving device according to an embodiment of the invention is applied. A turning drive device 1 is exemplified as this electronic device. The turning drive device 1 includes a fixed body 10 and a movable body 20 rotatable with respect to the fixed body 10 . The fixed body 10 includes a vibration motor 100 as a vibration drive device and a control board (not shown) that controls the entire swing drive device 1 . Vibrational motor 100 is shown in cross-section. The movable body 20 includes an imaging device 21 that is an imaging unit capable of imaging a subject. Note that the entire turning drive device 1 may be called an imaging device.

振動型モータ100は、振動を用いて被駆動体121を回転駆動する振動子101(後述する)を備える回転式の超音波モータである。可動体20は、振動型モータ100の被駆動体121に連結されている。振動子101が被駆動体121を回転移動させることによって、撮像装置21を含む可動体20は回転中心Pを中心として回転する。 The vibration-type motor 100 is a rotary ultrasonic motor provided with a vibrator 101 (described later) that rotationally drives a driven body 121 using vibration. The movable body 20 is connected to the driven body 121 of the vibration motor 100 . The movable body 20 including the imaging device 21 rotates about the rotation center P by rotating the driven body 121 by the vibrator 101 .

旋回駆動装置1は、可動体20が被駆動体121に連結され、支持体122を固定状態にして用いられる構成である。しかし、これとは逆に、旋回駆動装置1は、可動体20が支持体122に連結され、被駆動体121を固定状態にして用いられる構成であってもよい。 The turning drive device 1 is configured such that the movable body 20 is connected to the driven body 121 and the supporting body 122 is fixed. However, conversely, the swing drive device 1 may be configured such that the movable body 20 is connected to the support body 122 and the driven body 121 is fixed.

図2、図3は、振動型モータ100の分解斜視図である。図4は、振動型モータ100の要部の断面図である。 2 and 3 are exploded perspective views of the vibration type motor 100. FIG. FIG. 4 is a cross-sectional view of the essential parts of the vibration type motor 100. As shown in FIG.

以降、各部の方向を、図2、図3等に示したX、Y、Z座標軸を基準として呼称する。ここでは便宜上、回転中心Pの軸線方向と平行な方向をY方向と定義する。特に、Y方向において、振動子101に対して被駆動体121が位置する側を+Y方向とする。振動子101の長手方向をZ方向と定義する。Y方向とZ方向とに直交する方向をX方向と定義する。 Hereinafter, directions of respective parts will be referred to with reference to the X, Y, and Z coordinate axes shown in FIGS. Here, for convenience, the direction parallel to the axial direction of the rotation center P is defined as the Y direction. In particular, in the Y direction, the side where the driven body 121 is positioned with respect to the vibrator 101 is the +Y direction. A longitudinal direction of the vibrator 101 is defined as a Z direction. A direction orthogonal to the Y direction and the Z direction is defined as the X direction.

振動型モータ100は、主として、支持体122、被駆動体121、シャーシ122dを有する。支持体122は、振動型モータ100全体を保持している。被駆動体121は、全体として略円環形状の部材である。被駆動体121は、軸部121a、転動受け部121b、接触面121sを有する。接触面121sは摩擦面である。支持体122には回転支持穴122aが形成されている。被駆動体121の軸部121aが回転支持穴122aに回転可能に嵌合(軸支)されている。これにより、被駆動体121全体が、回転中心Pを中心として支持体122に対して相対的に回転可能である。従って、振動型モータ100のラジアル方向はすべり軸受構造となっている。 Vibration-type motor 100 mainly includes support body 122, driven body 121, and chassis 122d. The support 122 holds the entire vibrating motor 100 . The driven body 121 is a substantially annular member as a whole. The driven body 121 has a shaft portion 121a, a rolling receiving portion 121b, and a contact surface 121s. 121 s of contact surfaces are friction surfaces. The support 122 is formed with a rotation support hole 122a. A shaft portion 121a of the driven body 121 is rotatably fitted (supported) in the rotation support hole 122a. As a result, the entire driven body 121 is rotatable about the rotation center P relative to the support body 122 . Therefore, the vibration type motor 100 has a slide bearing structure in the radial direction.

振動型モータ100は、ラジアル方向における嵌合関係が回転支持穴122aと軸部121aとによって決定されるシンプルな構成であるので、比較的低コストで且つ容易に嵌合精度を確保可能である。なお、被駆動体121を単一部材で構成してもよいし、接触面121sおよび転動受け部121bを含む円盤状部分と軸部121aとを別部材で構成してもよい。あるいは、軸部121aと回転支持穴122aとの関係を反対にしてもよい。すなわち、被駆動体121に回転支持穴を設け、支持体122に軸部を設け、両者を嵌合することによって、被駆動体121全体が、支持体122に対して相対的に回転可能となるように構成してもよい。 Since the vibration type motor 100 has a simple configuration in which the fitting relationship in the radial direction is determined by the rotation support hole 122a and the shaft portion 121a, fitting accuracy can be easily ensured at a relatively low cost. In addition, the driven body 121 may be composed of a single member, or the disc-shaped portion including the contact surface 121s and the rolling receiving portion 121b and the shaft portion 121a may be composed of separate members. Alternatively, the relationship between the shaft portion 121a and the rotation support hole 122a may be reversed. That is, by providing a rotation support hole in the driven member 121 and providing a shaft portion in the supporting member 122 and fitting them together, the entire driven member 121 can be rotated relative to the supporting member 122. It may be configured as

駆動部としての振動子101は、弾性体102と圧電素子103とを有する。圧電素子103は、弾性体102に振動を励起させる電気-機械エネルギ変換素子である。圧電素子103は、例えばPZT(チタン酸ジルコン酸鉛)で構成される。弾性体102は例えばステンレス等の板金で構成される。 A vibrator 101 as a drive unit has an elastic body 102 and a piezoelectric element 103 . The piezoelectric element 103 is an electro-mechanical energy conversion element that excites the elastic body 102 to vibrate. The piezoelectric element 103 is made of PZT (lead zirconate titanate), for example. The elastic body 102 is made of sheet metal such as stainless steel.

弾性体102は、それぞれ長手方向に並んだ各2つの突起部102aおよび被保持部102bを有する(図2)。弾性体102と圧電素子103とは、接着剤などにより固着されている。両者が固着された状態で、後述する加圧機構により圧電素子103が押圧されることで、突起部102aが、被駆動体121の接触面121sに対して加圧接触する。圧電素子103に高周波交流の駆動電圧が印加されることで発生する超音波領域の周波数の振動(超音波振動)により、弾性体102の突起部102aに楕円運動EM(図5(a)、(b))が起こる。これによって、突起部102aと接触面121sとの間で駆動力が発生する。突起部102aと接触面121sとの接触位置が、後述する駆動力F2(図3)が発生する位置である。 The elastic body 102 has two protruding portions 102a and two held portions 102b arranged in the longitudinal direction (FIG. 2). The elastic body 102 and the piezoelectric element 103 are fixed with an adhesive or the like. With both of them fixed, the piezoelectric element 103 is pressed by a pressure mechanism, which will be described later, so that the projection 102a comes into pressure contact with the contact surface 121s of the driven body 121 . By applying a high-frequency AC drive voltage to the piezoelectric element 103, the vibration of the frequency in the ultrasonic range (ultrasonic vibration) causes the protrusion 102a of the elastic body 102 to move in an elliptical motion EM (Fig. 5(a), ( b)) occurs. As a result, a driving force is generated between the protrusion 102a and the contact surface 121s. A contact position between the projection 102a and the contact surface 121s is a position where a driving force F2 (FIG. 3), which will be described later, is generated.

支持体122には、被駆動体121の転動受け部121bと対向する面である転動受け部122bが形成されている。転動受け部122bと転動受け部121bとの間に複数個(図では6個)の転動ボール108が設けられている。すなわち、振動型モータ100のスラスト方向に関する支持構造は転がり軸受構造であり、被駆動体121と支持体122とは互いに、転動ボール108の転動を介して相対的に円滑に回転可能である。これにより、被駆動体121が、加圧力を受けながら移動する際の摩擦抵抗を極力小さくすることができる。 The support member 122 is formed with a rolling receiving portion 122b that faces the rolling receiving portion 121b of the driven member 121 . A plurality of (six in the drawing) rolling balls 108 are provided between the rolling receiving portion 122b and the rolling receiving portion 121b. That is, the support structure for the thrust direction of the vibration type motor 100 is a rolling bearing structure, and the driven body 121 and the support body 122 can rotate relatively smoothly through the rolling of the rolling balls 108. . As a result, the frictional resistance when the driven body 121 moves while receiving pressure can be minimized.

なお、転動受け部122bは支持体122に一体に設けてもよいが、別部材で構成してもよい。また、転動受け部121bは被駆動体121に一体に設けてもよいが、別部材で構成してもよい。なお、転動ボール108の代わりに、転動受け部122bと転動受け部121bとの間にローラやコロ等の転動部材を設けてもよいし、摺動部材を設けてもよい。 Note that the rolling receiving portion 122b may be provided integrally with the support 122, but may be configured as a separate member. Further, the rolling receiving portion 121b may be provided integrally with the driven body 121, or may be configured as a separate member. Instead of the rolling ball 108, a rolling member such as a roller or a roller may be provided between the rolling receiving portion 122b and the rolling receiving portion 121b, or a sliding member may be provided.

第1保持部材104は、弾性体102の被保持部102bを保持することで弾性体102を固定的に保持する。これにより、振動子101と第1保持部材104とは一体的に動く。シャーシ122dは支持体122に固定されている。枠部材113は、弾性連結部材114を介して第1保持部材104を保持している。枠部材113がシャーシ122dに複数のビス115で固定されることで、第1保持部材104は被駆動体121に対して位置決め固定される。 The first holding member 104 holds the elastic body 102 fixedly by holding the held portion 102 b of the elastic body 102 . Thereby, the vibrator 101 and the first holding member 104 move integrally. Chassis 122 d is fixed to support 122 . The frame member 113 holds the first holding member 104 via the elastic connecting member 114 . By fixing the frame member 113 to the chassis 122 d with a plurality of screws 115 , the first holding member 104 is positioned and fixed to the driven body 121 .

遮断部材105は、振動が他の部品に伝わらないように遮断する機能を有する。遮断部材105により、圧電素子103の超音波振動が後述する小基台106へ伝播することが抑制される一方、圧電素子103の超音波振動は減衰されない。遮断部材105の材料としてはフェルト生地が適している。小基台106は、遮断部材105を介して圧電素子103と面接触し、加圧バネ111による加圧力を圧電素子103に伝える機能を有する。 The blocking member 105 has a function of blocking the transmission of vibration to other components. The blocking member 105 suppresses the ultrasonic vibration of the piezoelectric element 103 from propagating to the small base 106 described later, but does not attenuate the ultrasonic vibration of the piezoelectric element 103 . Felt fabric is suitable as a material for the blocking member 105 . The small base 106 is in surface contact with the piezoelectric element 103 through the blocking member 105 and has a function of transmitting the pressure force of the pressure spring 111 to the piezoelectric element 103 .

加圧機構は、加圧部材110、加圧手段としての加圧バネ111、受け部材112を含む。第2保持部材107はこの加圧機構を保持している。第2保持部材107は、枠部材113と共に、2つのビス115でシャーシ122dに固定される。受け部材112の中央には、丸穴である嵌合穴部112aが形成され、受け部材112の外周面にはネジ部112bが形成されている。ネジ部112bが第2保持部材107のネジ穴107aに螺合されることで、受け部材112は第2保持部材107に固定される。また、嵌合穴部112aは、加圧部材110が有する嵌合軸部110aを嵌合保持する。加圧部材110は、受け部材112の嵌合穴部112aに嵌合されて、被駆動体121の接触面121sに対して概ね垂直な方向にのみ移動可能に保持される。 The pressure mechanism includes a pressure member 110 , a pressure spring 111 as pressure means, and a receiving member 112 . The second holding member 107 holds this pressure mechanism. The second holding member 107 is fixed to the chassis 122 d with two screws 115 together with the frame member 113 . A circular fitting hole portion 112 a is formed in the center of the receiving member 112 , and a screw portion 112 b is formed on the outer peripheral surface of the receiving member 112 . The receiving member 112 is fixed to the second holding member 107 by screwing the screw portion 112 b into the screw hole 107 a of the second holding member 107 . Further, the fitting hole portion 112a fits and holds the fitting shaft portion 110a of the pressure member 110 . The pressurizing member 110 is fitted into the fitting hole 112a of the receiving member 112 and held so as to be movable only in a direction substantially perpendicular to the contact surface 121s of the driven body 121 .

加圧部材110は、加圧バネ111からの加圧力を、小基台106と遮断部材105とを介して振動子101に伝える。これにより、振動子101が被駆動体121に加圧接触する。加圧バネ111は、例えば圧縮コイルバネで構成される。加圧バネ111の一方の端部は受け部材112に固定され、他方の端部は加圧部材110に当接している。このように加圧バネ111は圧縮状態で両端部が固定されることにより加圧力F1を発生させる。発生した加圧力F1は、圧電素子103に伝えられることで、被駆動体121の接触面121sの垂線方向(+Y方向)に働く力となる。その加圧力F1が、振動子101と被駆動体121とを加圧接触させる。従って、+Y方向が加圧バネ111による加圧方向である。転動ボール108は、加圧力F1を被駆動体121と支持体122との間で受け止める摺動部材の一例である。また、加圧力F1を付与する加圧位置は、振動子101の長手方向における弾性体102の2つの突起部102a間の略中心に設定されている。これにより、2つの突起部102aを被駆動体121にバランスよく加圧接触させることができる。 The pressing member 110 transmits the pressing force from the pressing spring 111 to the vibrator 101 via the small base 106 and the blocking member 105 . As a result, the vibrator 101 is brought into pressure contact with the driven body 121 . The pressure spring 111 is composed of, for example, a compression coil spring. One end of the pressure spring 111 is fixed to the receiving member 112 and the other end is in contact with the pressure member 110 . In this manner, the pressure spring 111 generates a pressure force F1 by fixing both ends thereof in a compressed state. The generated pressing force F1 is transmitted to the piezoelectric element 103 and acts in the direction perpendicular to the contact surface 121s of the driven body 121 (+Y direction). The pressure F1 brings the vibrator 101 and the driven body 121 into contact with each other. Therefore, the +Y direction is the pressing direction of the pressing spring 111 . The rolling ball 108 is an example of a sliding member that receives the pressure F1 between the driven body 121 and the support body 122 . The pressurizing position where the pressurizing force F1 is applied is set substantially at the center between the two projections 102a of the elastic body 102 in the longitudinal direction of the vibrator 101. As shown in FIG. As a result, the two protrusions 102a can be pressed into contact with the driven body 121 in a well-balanced manner.

このように、各部材が組込まれてユニット化され、振動型モータ100が構成される。この構成において、振動子101が振動し、突起部102aに楕円運動EM(図5(c))が生じると、突起部102aと被駆動体121の接触面121sとの間に駆動力F2(図3)が生じる。駆動力F2は被駆動体121の回転中心Pを中心とする径方向に垂直であるので、被駆動体121は回転中心P周りに回転駆動される。 In this way, each member is assembled into a unit, and the vibration type motor 100 is configured. In this configuration, when the vibrator 101 vibrates and an elliptical motion EM (FIG. 5(c)) is generated in the projection 102a, the driving force F2 (Fig. 3) occurs. Since the driving force F2 is perpendicular to the radial direction centered on the rotation center P of the driven body 121, the driven body 121 is rotationally driven around the rotation center P. FIG.

次に、振動型モータ100の振動子101の振動モードについて、図5(a)~(c)を用いて説明する。図5(a)、(b)は、振動子101の振動モードを示す模式図である。図5(c)は、楕円運動EMをする突起部102aの模式図である。 Next, vibration modes of the vibrator 101 of the vibration type motor 100 will be described with reference to FIGS. 5(a) to 5(c). 5A and 5B are schematic diagrams showing vibration modes of the vibrator 101. FIG. FIG. 5(c) is a schematic diagram of the protrusion 102a that performs the elliptical motion EM.

振動子101の振動モードは、第1の振動と第2の振動とを含む複合的な振動である。第1の振動は、図5(a)に示すように、振動子101の突起部102aに、矢印で示す往復運動M1を発生させ、主に接触面121sの接線方向に突起部102aを変位させる振動である。第1の振動では節N1が複数生じる。振動子101においては、破線で示された3つの節N1が存在し、振動子101の長手方向の両端側にある節N1が突起部102aの近傍に位置する。 A vibration mode of the vibrator 101 is a composite vibration including a first vibration and a second vibration. In the first vibration, as shown in FIG. 5A, the protruding portion 102a of the vibrator 101 generates a reciprocating motion M1 indicated by an arrow, and displaces the protruding portion 102a mainly in the tangential direction of the contact surface 121s. Vibration. A plurality of nodes N1 are generated in the first vibration. The vibrator 101 has three nodes N1 indicated by dashed lines, and the nodes N1 on both ends in the longitudinal direction of the vibrator 101 are located near the protrusions 102a.

第2の振動は、図5(b)に示すように、突起部102aに、矢印で示す往復運動M2を発生させ、主に接触面121sと接触離間させる方向に突起部102aを変位させる振動である。第2の振動では節N2が複数生じる。振動子101においては、破線で示された2つの節N2が存在する。 As shown in FIG. 5B, the second vibration is a vibration that causes the projection 102a to generate a reciprocating motion M2 indicated by an arrow, and displaces the projection 102a mainly in the direction of contacting and separating from the contact surface 121s. be. A plurality of nodes N2 are generated in the second vibration. Vibrator 101 has two nodes N2 indicated by dashed lines.

第1の振動と第2の振動とを同一の周波数で発生させることで、突起部102aにおける接触面121sとの接触点102c(図4、図5(c))に楕円運動EMを発生させることができる。振動子101においては、上述した駆動力F2をより大きく発生させるために接触点102cを複数(2個)設けているが、複数設けることは必須でない。なお、第1の振動、第2の振動の発生方法などの詳細については、例えば特開2004-304887号公報に記載されるように公知であるため、ここでの詳細な説明は省略する。 By generating the first vibration and the second vibration at the same frequency, an elliptical motion EM is generated at the contact point 102c (FIGS. 4 and 5C) with the contact surface 121s of the protrusion 102a. can be done. In the vibrator 101, a plurality (two) of contact points 102c are provided in order to generate a larger driving force F2, but providing a plurality of contact points is not essential. Details of the method for generating the first vibration and the second vibration are well known, as described in Japanese Patent Application Laid-Open No. 2004-304887, for example, so detailed description thereof will be omitted here.

次に、図6、図7で、被駆動体121の詳細な構成を説明する。図6(a)、(b)は、被駆動体121の分解斜視図である。図7は、被駆動体121を詳細に示した振動型モータ100の要部の断面図である。 Next, a detailed configuration of the driven body 121 will be described with reference to FIGS. 6 and 7. FIG. 6A and 6B are exploded perspective views of the driven body 121. FIG. FIG. 7 is a cross-sectional view of a main part of vibration type motor 100 showing driven body 121 in detail.

図2~図4では、被駆動体121は簡素化して模式的に示されていた。図7に示すように、被駆動体121は、軸部121a、転動受け部121b、摩擦部材201(被接触部材)、スペーサ部材202、減衰部材203および連結部材204を有する。図6、図7では、被駆動体121を構成する要素を個別に示してある。 In FIGS. 2 to 4, the driven body 121 is shown schematically in a simplified manner. As shown in FIG. 7, the driven body 121 has a shaft portion 121a, a rolling receiving portion 121b, a friction member 201 (contacted member), a spacer member 202, a damping member 203 and a connecting member 204. 6 and 7 individually show elements constituting the driven body 121. FIG.

なお、図示されていないが、被駆動体121の転動受け部121bと支持体122の転動受け部122bとの間には、リテーナが介在する。リテーナはリング形状の部材である。リテーナは、支持体122に対して回転可能に嵌合されている。リテーナは、転動ボール108を保持するためのボール保持穴を複数有する。複数のボール保持穴は、円周方向に略等間隔(例えば60°間隔)に配置されている。転動ボール108がボール保持穴に収容されることで、転動ボール108が周方向に略等間隔で保持される。 Although not shown, a retainer is interposed between the rolling receiving portion 121b of the driven body 121 and the rolling receiving portion 122b of the support 122. As shown in FIG. The retainer is a ring-shaped member. The retainer is rotatably fitted to support 122 . The retainer has a plurality of ball retaining holes for retaining rolling balls 108 . The plurality of ball holding holes are arranged at substantially equal intervals (for example, at intervals of 60°) in the circumferential direction. By housing the rolling balls 108 in the ball holding holes, the rolling balls 108 are held at substantially equal intervals in the circumferential direction.

あるいは、複数の転動ボール108は、リテーナではなく環状溝部によって保持されてもよい。例えば、支持体122に、回転中心Pを中心とする環状溝部が形成される。この環状溝部内に複数の転動ボール108が配置される。複数の転動ボール108は、公転半径(転動軌跡)、すなわち径方向における位置が規制された状態で被駆動体121と支持体122とに対して転動可能となる。なお、転動ボール108の数は6個に限定されないが、安定して転動保持をするために転動ボール108は最低3個以上必要である。すなわち、安定駆動のためには、転動ボール108等の摺動部材は、6個に限定されず、回転中心Pを囲むように少なくとも3つ設けられればよい。 Alternatively, multiple rolling balls 108 may be retained by an annular groove rather than a retainer. For example, the support 122 is formed with an annular groove around the rotation center P. As shown in FIG. A plurality of rolling balls 108 are arranged in this annular groove. The plurality of rolling balls 108 can roll with respect to the driven body 121 and the support body 122 while the revolution radius (rolling trajectory), that is, the position in the radial direction is restricted. Although the number of rolling balls 108 is not limited to six, at least three or more rolling balls 108 are required for stable rolling and holding. That is, for stable driving, the number of sliding members such as the rolling balls 108 is not limited to six, and at least three may be provided so as to surround the rotation center P.

摩擦部材201は接触面121sを有する円環形状の部材である。摩擦部材201と軸部121aとの間には、摩擦部材201側から順にスペーサ部材202、転動受け部121bが介在する。さらに、摩擦部材201と転動受け部121bとの間には、スペーサ部材202の外側において、減衰部材203が狭持される。摩擦部材201、スペーサ部材202、転動受け部121bにはそれぞれ、複数(6個)のビス等の連結部材204が貫通する6個の穴が形成されている。摩擦部材201の穴が固定部201aである。径方向Rにおける摩擦部材201の複数の固定部201aの位置は互いに共通である。複数の固定部201aは略等間隔に6個配置されるが、数は問わない。軸部121aには、連結部材204が螺合されるネジ穴が形成されている。 The friction member 201 is an annular member having a contact surface 121s. A spacer member 202 and a rolling receiving portion 121b are interposed in order from the friction member 201 side between the friction member 201 and the shaft portion 121a. Further, a damping member 203 is sandwiched outside the spacer member 202 between the friction member 201 and the rolling receiving portion 121b. The friction member 201, the spacer member 202, and the rolling receiving portion 121b are formed with six holes through which connecting members 204 such as a plurality of (six) screws pass. A hole in the friction member 201 is a fixing portion 201a. The positions of the plurality of fixing portions 201a of the friction member 201 in the radial direction R are common to each other. Six of the plurality of fixing portions 201a are arranged at approximately equal intervals, but the number does not matter. A screw hole into which the connecting member 204 is screwed is formed in the shaft portion 121a.

摩擦部材201は複数の連結部材204により軸部121aに固定される。スペーサ部材202および転動受け部121bも、同一の固定手段である連結部材204により、摩擦部材201と共に軸部121aに一括して(共締め状態で)固定される。このような構成により、保持部材としての軸部121aは摩擦部材201を保持する。また、加圧受け部材としての転動受け部121bは、加圧機構に起因する振動子101からの加圧力F1を摩擦部材201と支持体122の転動受け部122bとの間で受ける。スペーサ部材202は摩擦部材201よりも剛性が高い。 The friction member 201 is fixed to the shaft portion 121 a by a plurality of connecting members 204 . The spacer member 202 and the rolling receiving portion 121b are also collectively fixed (in a jointly tightened state) to the shaft portion 121a together with the friction member 201 by the connecting member 204, which is the same fixing means. With such a configuration, the shaft portion 121 a as a holding member holds the friction member 201 . Further, the rolling receiving portion 121b as a pressure receiving member receives the pressure F1 from the vibrator 101 caused by the pressure mechanism between the friction member 201 and the rolling receiving portion 122b of the support 122. FIG. Spacer member 202 is stiffer than friction member 201 .

図7に示すように、回転中心Pを起点として回転中心Pに直交する方向が径方向Rである。回転中心Pに平行な方向からの投影視において(つまり径方向Rにおいて)、回転中心Pから、振動子101の突起部102aが被駆動体121の接触面121sに加圧接触する位置(第1の位置)までの距離を、駆動半径Rdと称する。第1の位置は、駆動力F2(図1(b))が発生する位置でもある。また、径方向Rにおいて、回転中心Pから、摩擦部材201と転動受け部121bとが一括して軸部121aに対して固定される位置(第2の位置)までの距離を、固定位置半径Rxと称する。径方向Rにおいて、固定位置半径Rxの位置(第2の位置)は、駆動半径Rdの位置(第1の位置)よりも内側である。 As shown in FIG. 7, the radial direction R is a direction perpendicular to the rotation center P starting from the rotation center P. As shown in FIG. In a projection view from a direction parallel to the rotation center P (that is, in the radial direction R), the position (first position) is called a drive radius Rd. The first position is also the position where the driving force F2 (FIG. 1(b)) is generated. In the radial direction R, the distance from the rotation center P to the position (second position) where the friction member 201 and the rolling receiving portion 121b are collectively fixed to the shaft portion 121a is defined as the fixed position radius. Called Rx. In the radial direction R, the position of the fixed position radius Rx (second position) is inside the position of the drive radius Rd (first position).

転動受け部121bは連結部材204により一括して摩擦部材201と共に固定されるため、転動受け部121bと摩擦部材201とを個別に固定する構成に比べて、径方向Rの大型化を避けることができる。ここで、径方向Rの大型化を避けるだけであれば、回転中心Pを中心とする円周方向に沿って、摩擦部材201と転動受け部121bの互いの固定位置を避ける方法が考えられる。例えば各部品を120度毎の3点で固定し、相互の固定位置を60度ずらすこと考えられる。 Since the rolling receiving portion 121b is collectively fixed together with the friction member 201 by the connecting member 204, compared to a configuration in which the rolling receiving portion 121b and the friction member 201 are individually fixed, an increase in size in the radial direction R is avoided. be able to. Here, if it is only possible to avoid an increase in size in the radial direction R, a method of avoiding the fixed positions of the friction member 201 and the rolling receiving portion 121b along the circumferential direction around the rotation center P is conceivable. . For example, it is conceivable that each part is fixed at three points every 120 degrees and the fixed positions are shifted from each other by 60 degrees.

しかし、この方法だと、摩擦部材201の形状が回転中心Pに対して非対称な異形形状となり、不要な共振モードを持ちやすくなってしまう。本実施の形態のように、固定箇所を摩擦部材201の転動受け部121bと共通化することで、摩擦部材201の異形形状化を避けることが可能となり、不要共振を持ちにくい形状にすることができる。また、摩擦部材201と同様に転動受け部121bも異形形状化を避けることができる。摩擦部材201からスペーサ部材202を介して伝搬される振動により転動受け部121bに発生する不要共振も、転動受け部121bの異形形状化を避けることで、同様に発生しにくくすることができる。 However, with this method, the shape of the friction member 201 becomes asymmetrical with respect to the center of rotation P, and tends to have an unnecessary resonance mode. As in the present embodiment, by sharing the fixing portion with the rolling receiving portion 121b of the friction member 201, it is possible to avoid the friction member 201 from being deformed, and to make the shape less likely to cause unnecessary resonance. can be done. Further, like the friction member 201, the rolling receiving portion 121b can also be prevented from being deformed. Unnecessary resonance generated in the rolling contact receiving portion 121b due to vibration propagated from the friction member 201 via the spacer member 202 can also be made less likely to occur by avoiding the deformation of the rolling contact receiving portion 121b. .

固定位置半径Rxの位置と駆動半径Rdの位置とは隣接し、且つ近接している。回転中心Pに平行な方向からの投影視において、摩擦部材201と転動受け部121bとが減衰部材203を狭持する位置は、駆動半径Rdの位置に対して重なっている。言い換えると、摩擦部材201と転動受け部121bとは、径方向Rにおいて、駆動半径Rdの位置を含む領域で減衰部材203を狭持している。 The position of the fixed position radius Rx and the position of the driving radius Rd are adjacent and close to each other. In a projection view from a direction parallel to the center of rotation P, the position where the damping member 203 is sandwiched between the friction member 201 and the rolling receiving portion 121b overlaps the position of the driving radius Rd. In other words, the friction member 201 and the rolling receiving portion 121b sandwich the damping member 203 in a region including the position of the driving radius Rd in the radial direction R.

本実施の形態によれば、径方向Rにおいて、駆動半径Rdの位置(第1の位置)よりも内側の固定位置半径Rxの位置(第2の位置)で、摩擦部材201と転動受け部121bとが軸部121aに対して連結部材204により一括して固定される。まず、摩擦部材201が連結部材204で軸部121aへ固定されることで振動を減衰させることができる。その結果、摩擦部材201の不要な共振が低減され、駆動特性が良好となる。また、固定部201aの位置は、振動子101と摩擦部材201とが摩擦接触する第1の位置の内側であるので、摩擦部材201を被駆動体121の重心に近い位置で保持固定することが可能となり、被駆動体121全体の慣性モーメントを小さく抑えることができる。その結果、駆動特性が良好となる。さらに、転動受け部121bは摩擦部材201と共に一括して軸部121aに固定されるので、転動受け部121bと摩擦部材201とを個別に固定する態様に比べて、径方向Rの大型化を避けることができる。しかも、摩擦部材201の異形形状化を避けることが可能となり、摩擦部材201の不要な共振が低減される。よって、良好な駆動特性を確保すると共に大型化を抑制することができる。 According to the present embodiment, in the radial direction R, the friction member 201 and the rolling receiving portion are located at the position of the fixed position radius Rx (second position) inside the position of the driving radius Rd (first position). 121b are collectively fixed to the shaft portion 121a by a connecting member 204. As shown in FIG. First, by fixing the friction member 201 to the shaft portion 121a with the connecting member 204, vibration can be damped. As a result, unnecessary resonance of the friction member 201 is reduced, and driving characteristics are improved. Further, since the position of the fixing portion 201a is inside the first position where the vibrator 101 and the friction member 201 are in frictional contact, the friction member 201 can be held and fixed at a position close to the center of gravity of the driven body 121. As a result, the moment of inertia of the entire driven body 121 can be kept small. As a result, driving characteristics are improved. Furthermore, since the rolling receiving portion 121b is collectively fixed to the shaft portion 121a together with the friction member 201, compared to a mode in which the rolling receiving portion 121b and the friction member 201 are individually fixed, the size in the radial direction R is increased. can be avoided. In addition, it is possible to prevent the friction member 201 from becoming irregular in shape, thereby reducing unnecessary resonance of the friction member 201 . Therefore, it is possible to ensure good driving characteristics and to suppress an increase in size.

特に、連結部材204は、回転中心Pを中心とする同心の複数箇所で、摩擦部材201と転動受け部121bとを一括固定するので、径方向Rにおける省スペースが図られる。 In particular, since the connecting member 204 collectively fixes the friction member 201 and the rolling receiving portion 121b at a plurality of concentric locations around the rotation center P, the space in the radial direction R can be saved.

また、摩擦部材201と転動受け部121bとは、径方向Rにおいて、駆動半径Rdの位置を含む領域で減衰部材203を狭持する。これにより、摩擦部材201の不要な共振を一層減衰させることができ、しかも、大型化に繋がらない。 In addition, the friction member 201 and the rolling receiving portion 121b sandwich the damping member 203 in a region including the position of the driving radius Rd in the radial direction R. As a result, unnecessary resonance of the friction member 201 can be further damped, and it does not lead to an increase in size.

また、径方向Rにおいて、固定位置半径Rxの位置と駆動半径Rdの位置とは隣接・近接しているので、摩擦部材201を径方向Rに延びる梁と見たときの梁長さを短くすることができる。その結果、摩擦部材201の不要な共振の抑制に寄与する。なお、この観点からは、固定位置半径Rxの位置と駆動半径Rdの位置との距離が、固定位置半径Rxよりも十分に短ければ、共振抑制の効果は得られる。 In addition, since the position of the fixed position radius Rx and the position of the drive radius Rd are adjacent and close in the radial direction R, the beam length when the friction member 201 is viewed as a beam extending in the radial direction R is shortened. be able to. As a result, it contributes to suppression of unnecessary resonance of the friction member 201 . From this point of view, if the distance between the position of the fixed position radius Rx and the position of the drive radius Rd is sufficiently shorter than the fixed position radius Rx, the effect of suppressing resonance can be obtained.

また、摩擦部材201と転動受け部121bとの間に、摩擦部材201よりも剛性が高いスペーサ部材202が介在する。これにより、摩擦部材201を固定することによる振動の減衰効果を高めることができる。 A spacer member 202 having a higher rigidity than the friction member 201 is interposed between the friction member 201 and the rolling receiving portion 121b. As a result, the effect of damping vibration by fixing the friction member 201 can be enhanced.

なお、撮像装置21が振動型モータ100により回転駆動される例を説明したが、振動型モータ100により回転駆動される回転体を有する装置であれば本発明を適用可能である。その場合の回転体としては、例えば、レーザ光などの照射装置やロボットアームのアーム部なども該当する。 Although an example in which the imaging device 21 is rotationally driven by the vibration motor 100 has been described, the present invention is applicable to any device having a rotating body that is rotationally driven by the vibration motor 100 . Examples of the rotating body in this case include an irradiation device such as a laser beam and an arm portion of a robot arm.

なお、各実施の形態において、「略」を付したものは完全を除外する趣旨ではない。例えば、「略等間隔」、「略一致」、「略中心」、「略円環形状」、はそれぞれ、等間隔、一致、中心、円環形状を含む趣旨である。 It should be noted that, in each embodiment, the abbreviation does not mean that completeness is excluded. For example, "substantially equidistant", "substantially coincident", "substantially centered", and "substantially toroidal" are meant to include equidistant, coincident, centered, and toroidal, respectively.

以上、本発明をその好適な実施形態に基づいて詳述してきたが、本発明はこれら特定の実施形態に限られるものではなく、この発明の要旨を逸脱しない範囲の様々な形態も本発明に含まれる。 Although the present invention has been described in detail based on its preferred embodiments, the present invention is not limited to these specific embodiments, and various forms without departing from the gist of the present invention can be applied to the present invention. included.

101 振動子
121 被駆動体
121a 軸部
121b 転動受け部
122 支持体
201 摩擦部材
204 連結部材
P 回転中心
101 Oscillator 121 Driven Body 121a Shaft 121b Rolling Receiving Part 122 Support 201 Friction Member 204 Connection Member P Rotation Center

Claims (7)

略円環形状の被接触部材と、
前記被接触部材を保持する保持部材と、
前記被接触部材に対して加圧接触すると共に、振動を用いて前記被接触部材を回転駆動する駆動部と、
前記駆動部を前記被接触部材に対して加圧する加圧手段と、
前記駆動部からの加圧力を受ける加圧受け部材と、
前記被接触部材と前記加圧受け部材との間に介在するスペーサ部材と、
前記被接触部材の径方向において、前記駆動部が前記被接触部材に加圧接触する第1の位置よりも内側の第2の位置で、前記被接触部材前記加圧受け部材及び前記スペーサ部材を一括して前記保持部材に対して固定する固定手段と、
前記径方向において前記スペーサ部材と並び前記第1の位置を含む領域に配置され、前記固定手段に固定されず前記被接触部材と前記加圧受け部材とで挟持される減衰部材と、を有することを特徴とする振動型駆動装置。
a substantially annular contacted member;
a holding member that holds the contacted member;
a driving unit that pressurizes and contacts the contacted member and rotationally drives the contacted member using vibration;
a pressurizing means for pressurizing the driving portion against the contacted member;
a pressure receiving member that receives pressure from the drive unit;
a spacer member interposed between the contacted member and the pressure receiving member;
In the radial direction of the contacted member, the contacted member, the pressure receiving member , and the spacer member are positioned at a second position inside a first position where the driving portion is in pressure contact with the contacted member. a fixing means for collectively fixing to the holding member;
a damping member arranged in a region including the first position along with the spacer member in the radial direction, and not fixed to the fixing means but sandwiched between the contacted member and the pressure receiving member. A vibration type driving device characterized by:
前記径方向において、前記第2の位置は前記第1の位置に近接していることを特徴とする請求項1に記載の振動型駆動装置。 2. The vibration type driving device according to claim 1 , wherein said second position is close to said first position in said radial direction. 前記固定手段は、前記被接触部材の回転駆動における回転中心を中心とする同心の複数箇所で前記被接触部材前記加圧受け部材及び前記スペーサ部材を一括して前記保持部材に対して固定することを特徴とする請求項1または2に記載の振動型駆動装置。 The fixing means collectively fixes the contacted member , the pressure receiving member , and the spacer member to the holding member at a plurality of concentric points centered on a rotational center of the rotational driving of the contacted member. 3. The vibration type driving device according to claim 1 or 2 , characterized in that: 記スペーサ部材は前記被接触部材よりも剛性が高いことを特徴とする請求項1乃至のいずれか1項に記載の振動型駆動装置。 4. The vibration type driving device according to claim 1 , wherein the spacer member has higher rigidity than the contacted member. 前記保持部材を、回転中心を中心として回転可能に支持する支持体をさらに有し、
前記加圧受け部材は、前記駆動部からの加圧力を前記被接触部材と前記支持体との間で受けることを特徴とする請求項1乃至のいずれか1項に記載の振動型駆動装置。
further comprising a support that supports the holding member so as to be rotatable around the center of rotation;
5. The vibration type driving device according to claim 1 , wherein the pressure receiving member receives pressure from the driving portion between the contacted member and the support. .
前記駆動部は、前記被接触部材に接触する弾性体と、前記弾性体に振動を励起させる素子とを有し、
前記弾性体に励起される振動により前記被接触部材が回転駆動されることを特徴とする請求項1乃至のいずれか1項に記載の振動型駆動装置。
The drive unit has an elastic body that contacts the contacted member and an element that excites vibration of the elastic body,
6. The vibration type driving device according to claim 1, wherein the contact member is rotationally driven by vibrations excited by the elastic body.
請求項1乃至のいずれか1項に記載の振動型駆動装置と、
前記振動型駆動装置によって駆動される撮像部と、を有することを特徴とする撮像装置。
a vibration type driving device according to any one of claims 1 to 6 ;
and an imaging unit driven by the vibration type driving device.
JP2020145846A 2020-08-31 2020-08-31 Vibration type driving device and imaging device Active JP7183225B2 (en)

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JP2020145846A JP7183225B2 (en) 2020-08-31 2020-08-31 Vibration type driving device and imaging device
GB2110930.1A GB2598467B (en) 2020-08-31 2021-07-29 Vibration driving device and image pickup apparatus using this
US17/444,769 US11516407B2 (en) 2020-08-31 2021-08-10 Vibration driving device and image pickup apparatus using this
DE102021122204.4A DE102021122204A1 (en) 2020-08-31 2021-08-27 Vibration drive device and image pickup device using the same
CN202110992372.7A CN114123846A (en) 2020-08-31 2021-08-27 Vibration-type driving device and image pickup apparatus using the same

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