JP7174973B2 - COMPOSITE INSULATION BOARD AND METHOD OF MANUFACTURING COMPOSITE INSULATION BOARD - Google Patents

COMPOSITE INSULATION BOARD AND METHOD OF MANUFACTURING COMPOSITE INSULATION BOARD Download PDF

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JP7174973B2
JP7174973B2 JP2021086834A JP2021086834A JP7174973B2 JP 7174973 B2 JP7174973 B2 JP 7174973B2 JP 2021086834 A JP2021086834 A JP 2021086834A JP 2021086834 A JP2021086834 A JP 2021086834A JP 7174973 B2 JP7174973 B2 JP 7174973B2
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義信 村上
雅行 長尾
朋裕 川島
浩行 武藤
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本発明は熱伝導性材料の充填材と樹脂とを含む複合絶縁板およびその製造方法において、良好な熱伝導性と十分な絶縁性を併せ持つ複合絶縁板とその製造方法に関するものである。 The present invention relates to a composite insulating board containing a filler of a thermally conductive material and a resin and a method for manufacturing the same, and more particularly to a composite insulating board having both good thermal conductivity and sufficient insulation and a method for manufacturing the same.

ハイブリッド自動車、電気自動車、燃料電池車などの新型パワートレインでは、蓄電池の直流電源で駆動用モータを動かすためにインバータによって直流を交流に変換する。また、回生エネルギを回収するため、コンバータで交流を直流変換して蓄電している。このような交直変換器には、IGBTなどのパワーモジュールが使われている。パワーモジュールは半導体のオン抵抗による発熱があり、半導体素子のジャンクション温度以下に抑えるために空冷または水冷による冷却が必要となる。ジャンクション温度はシリコン半導体の場合150℃程度であるが、素子の熱劣化を考慮して運転時の素子の温度が通常75~85℃程度に抑えられるような放熱設計が行われている。空冷の場合には金属性の放熱フィンが用いられ、絶縁基板を介してパワーモジュールと接合されている。また、水冷の場合は放熱フィンの代わりに絶縁基板を介して冷却媒体を通す導管を備えた水冷ジャケットがパワーモジュールと接合されている。このため、絶縁基板には厚さ方向への良好な熱伝導性と十分な絶縁性と熱伝導性が要求される。絶縁破壊強度が高いほど、必要となる耐電圧に対して絶縁基板の肉厚を薄くすることができ、伝熱性が向上する。汎用的に用いられている絶縁基板は、簡単に曲がることなく、かつ破損することがない剛直な基板であり、例えば100μmから1mm程度の厚さのものである。この絶縁基板には、現在、比較的高い熱伝導率をもつ窒化ケイ素などのセラミクス板が使用されているが、低コスト化の観点から基板厚さをより薄くすることが求められている。 In new powertrains such as hybrid vehicles, electric vehicles, and fuel cell vehicles, an inverter converts direct current into alternating current in order to drive a drive motor with a direct current power supply from a storage battery. In addition, in order to recover regenerative energy, a converter converts alternating current to direct current and stores it. Power modules such as IGBTs are used in such AC/DC converters. A power module generates heat due to the on-resistance of a semiconductor, and cooling by air cooling or water cooling is required to keep the temperature below the junction temperature of the semiconductor element. Although the junction temperature is about 150° C. in the case of silicon semiconductors, the heat dissipation design is carried out so that the temperature of the device during operation is usually suppressed to about 75 to 85° C. in consideration of thermal deterioration of the device. In the case of air-cooling, metal heat-dissipating fins are used and are joined to the power module via an insulating substrate. In the case of water cooling, a water cooling jacket provided with a conduit through which a cooling medium passes through an insulating substrate is joined to the power module in place of heat radiation fins. Therefore, the insulating substrate is required to have good thermal conductivity in the thickness direction and sufficient insulation and thermal conductivity. The higher the dielectric breakdown strength, the thinner the thickness of the insulating substrate with respect to the required withstand voltage, and the better the heat transfer. A commonly used insulating substrate is a rigid substrate that is neither easily bent nor damaged, and has a thickness of, for example, about 100 μm to 1 mm. Ceramic plates such as silicon nitride, which have relatively high thermal conductivity, are currently used as the insulating substrate, but from the viewpoint of cost reduction, it is desired to further reduce the thickness of the substrate.

ところが、製造の困難性および機械的強度の問題から、セラミックス板の更なる薄肉化には限界がある。そこで、これに代わるものとして高分子絶縁材料と充填材から構成される複合絶縁材料を用いた絶縁基板(複合絶縁板)の研究開発が各所で進められている。 However, there is a limit to the further thinning of the ceramic plate due to manufacturing difficulties and mechanical strength problems. Therefore, research and development of an insulating substrate (composite insulating plate) using a composite insulating material composed of a polymer insulating material and a filler is being promoted in various places as an alternative to this.

開発が進められている複合絶縁材料の多くは熱硬化性樹脂であるエポキシ樹脂等の母材と樹脂に比べ高い熱伝導率を持つアルミナ等の無機充填材とを、機械的に混合して作製される。 Many of the composite insulating materials that are being developed are produced by mechanically mixing a base material such as epoxy resin, which is a thermosetting resin, and an inorganic filler such as alumina, which has higher thermal conductivity than resin. be done.

かかる充填材としては、熱伝導率および熱拡散率が高いことほど良く、電気的特性としては体積固有抵抗率および、絶縁破壊強度が高いほど良い。かかる性質を有し、更に安価であることから、アルミナが一般的に選択されている。 As such a filler, the higher the thermal conductivity and the thermal diffusivity, the better, and the higher the volume specific resistivity and dielectric breakdown strength, the better the electrical properties. Alumina is a common choice due to its properties and low cost.

かかる複合絶縁板では、アルミナ充填材粒子どうしの接触による粒子間の空隙部分が電気絶縁上の弱点であり、アルミナ充填材粒子の偏在により樹脂との誘電率の違いによる電界集中が発生し、絶縁性能を低下させるため、セラミック板に置き換わる性能のものはない。このような問題点を解決するため、充填材粒子の分散性を改善するような研究や、ナノ粒子を用いた研究も行われており、6~12W/m・K程度の熱伝導率をもつ複合絶縁板が開発されている(非特許文献1)。 In such a composite insulating plate, the gaps between the particles due to the contact between the alumina filler particles are weak points in terms of electrical insulation, and the uneven distribution of the alumina filler particles causes electric field concentration due to the difference in dielectric constant from the resin, resulting in insulation. There is no substitute for the performance of the ceramic plate as it degrades performance. In order to solve such problems, research to improve the dispersibility of filler particles and research using nanoparticles are also being conducted, and have a thermal conductivity of about 6 to 12 W / m K. A composite insulating board has been developed (Non-Patent Document 1).

更には、アルミナ以外にも、無機充填材としては、窒化アルミ(AlN)、窒化ケイ素(SiC)、窒化ホウ素(BN)、などが知られており、この中でBNは六方晶系のもので体積抵抗率はアルミナ同等であるが、その熱伝導率はアルミナの15~30W/m・Kに比べ、結晶方向によって異方性はあるものの2~10倍(60~200W/m・K)の高い値を示している。窒化アルミは熱伝導率が150~200W/m・Kで良好な熱伝導性を有しているが、極めて高コストである。このため、熱伝導性に異方性をもっているが、BNを複合絶縁板の充填材として使いこなす研究が各所で行われている(非特許文献2)。 In addition to alumina, inorganic fillers such as aluminum nitride (AlN), silicon nitride (SiC), and boron nitride (BN) are known. Its volume resistivity is equivalent to that of alumina, but its thermal conductivity is 2 to 10 times (60 to 200 W/m K) higher than that of alumina, which is 15 to 30 W/m K, although there is anisotropy depending on the crystal direction. showing high values. Aluminum nitride has good thermal conductivity with a thermal conductivity of 150 to 200 W/m·K, but is extremely expensive. For this reason, although it has anisotropic thermal conductivity, studies are being conducted in various places to make full use of BN as a filler for composite insulating plates (Non-Patent Document 2).

例えば、特許文献1および非特許文献3に開示される技術は、エポキシ樹脂のような熱硬化性樹脂を用いて硬化前の液体状態でBNを混合し、混錬した上で硬化して複合絶縁板を作製するに際し、硬化前の液体状態で、電界によってBNを電気力線に沿って配向させる方法を示している。 For example, the technology disclosed in Patent Document 1 and Non-Patent Document 3 uses a thermosetting resin such as epoxy resin to mix BN in a liquid state before curing, knead, and then cure to form a composite insulation. It shows a method of orienting BN along electric lines of force by an electric field in a liquid state before hardening when fabricating a plate.

また、前掲の非特許文献4では熱可塑性樹脂を絶縁母材として用いて複合絶縁板を作ることも試みられている。 Also, in Non-Patent Document 4 cited above, an attempt is made to produce a composite insulating board using a thermoplastic resin as an insulating base material.

特開2013-159748号公報Japanese Patent Application Laid-Open No. 2013-159748

Wang, et al.:IEEE Trans. on DEI, 18(6),『Development of Epoxy/BN Composites with High Thermal Conductivity and Sufficient Dielectric Breakdown Strength』pp.1963-1972(2011)Wang, et al.: IEEE Trans. on DEI, 18(6), Development of Epoxy/BN Composites with High Thermal Conductivity and Sufficient Dielectric Breakdown Strength, pp.1963-1972 (2011) X.Huang, et al.:IEEJ Trans on FM,133(6),『Boron Nitride Based Poly(phenylene sulfide) Composites with Enhanced Thermal Conductivity and Breakdown Strength”, IEEJ Transactions on Fundamentals and Materials, Vol.133, No.3, pp.66-70(2013)X. Huang, et al.: IEEJ Trans on FM, 133(6), "Boron Nitride Based Poly(phenylene sulfide) Composites with Enhanced Thermal Conductivity and Breakdown Strength", IEEJ Transactions on Fundamentals and Materials, Vol.133, No. 3, pp.66-70 (2013) 小迫、他:第44回電気電子絶縁材料システムシンポジウム予稿集、『交流電界によるフィラー配向エポキシ複合材のフィラー充填率の低減』、pp.47-51(2011)Kosako, et al.: Proceedings of the 44th Electrical and Electronic Insulating Materials System Symposium, "Reduction of Filler Filling Ratio of Filler-Oriented Epoxy Composite by AC Electric Field", pp.47-51 (2011) 今井、他:第44回電気電子絶縁材料システムシンポジウム予稿集、『高周波用途に向けたコンポジット誘電体材料の材料設計』pp.37-40(2011)Imai, et al.: Proceedings of the 44th Electrical and Electronic Insulating Materials System Symposium, "Material Design of Composite Dielectric Materials for High Frequency Applications" pp.37-40 (2011)

しかしながら、前掲の特許文献1および非特許文献3の方法では、エポキシ樹脂の常温動粘度は最低でも10センチストークス程度で粘性が高く電界によってBNをほとんど配向できない。更に、前掲の非特許文献1でもエポキシ樹脂の硬化前の液体状態のものにBNを混ぜ、遠心によって粒子を配向させる方法が開示されているが、液の粘性のため、配向させることができない。 However, in the methods of Patent Document 1 and Non-Patent Document 3 cited above, the kinematic viscosity at room temperature of the epoxy resin is at least about 10 centistokes, which is so high that BN can hardly be oriented by an electric field. Furthermore, Non-Patent Document 1 cited above also discloses a method of mixing BN with epoxy resin in a liquid state before curing and orienting the particles by centrifugation, but due to the viscosity of the liquid, it cannot be oriented.

非特許文献1および2に開示された複合絶縁板では、絶縁破壊強度は市場の要求する100kV/mm超えるものは、熱伝導率が1W/m・K程度以下で市場の要求する10W/m・Kに比べ極めて低い値である。一方、熱伝導率が10W/m・Kを超えるものは、絶縁破壊強度は60kV/mmで市場の要求値に比べ低い値に留まっており、熱伝導率と絶縁破壊強度との両者を満足するものは得られていない。 In the composite insulating plates disclosed in Non-Patent Documents 1 and 2, those having dielectric breakdown strength exceeding 100 kV/mm required by the market have thermal conductivity of about 1 W/m·K or less and 10 W/m·K required by the market. It is a very low value compared to K. On the other hand, those with a thermal conductivity exceeding 10 W/m·K have a dielectric breakdown strength of 60 kV/mm, which is lower than the value required by the market, satisfying both thermal conductivity and dielectric breakdown strength. nothing is obtained.

更に、前掲の非特許文献4では熱可塑性樹脂を絶縁母材として用いて複合絶縁板を作ることも試みられている。熱可塑性樹脂としてポリプロピレンを用い、熱可塑温度以上に加熱した後にBNを溶融混錬して射出成形による方法が示されているが、溶融状態の熱可塑性樹脂では、前述の電界や遠心力による配向が困難な程、粘性が高い上、BNを均一分散する高度な製造技術が必要である。 Furthermore, in Non-Patent Document 4 cited above, an attempt is made to produce a composite insulating board using a thermoplastic resin as an insulating base material. A method is shown in which polypropylene is used as a thermoplastic resin, and BN is melted and kneaded after being heated to a temperature above the thermoplastic temperature, and injection molding is performed. The more difficult it is, the more viscous it is, and the more advanced manufacturing technology is required to uniformly disperse BN.

このような先行技術文献に示されているように、良好な熱伝導性と十分な絶縁性を共に有する複合絶縁板は、未だ提供されていない。 As shown in such prior art documents, a composite insulating board having both good thermal conductivity and sufficient insulating properties has not yet been provided.

本発明は上記問題点に鑑みてなされたものであって、その目的とするところは、母材の絶縁性樹脂の中で熱伝導性充填材の配向度を適性に制御し、更に充填密度を改善することで、良好な熱伝導率と十分な絶縁破壊強度を有する複合絶縁板およびその製造方法を提供するところにある。 The present invention has been made in view of the above problems, and its object is to appropriately control the degree of orientation of the thermally conductive filler in the insulating resin of the base material, and further to increase the packing density. The improvement is to provide a composite insulating board having good thermal conductivity and sufficient dielectric breakdown strength, and a method of manufacturing the same.

この目的を達成するために、複合絶縁板に係る第1の発明は、熱可塑性樹脂とその熱可塑性樹脂よりも熱伝導性の高い板状の熱伝導性充填材粒子とを含む複合絶縁板において、前記複合絶縁板の密度が1.8g/cm以上で、かつ板の厚み方向の熱伝導率が15W/m・K以上で、35W/m・K以下となるように熱伝導性充填材粒子が配向しているものであって、前記厚み方向に対する絶縁破壊強度が95kV/mm以上であるものである。 In order to achieve this object, a first invention relating to a composite insulating board is a composite insulating board containing a thermoplastic resin and plate-shaped thermally conductive filler particles having a higher thermal conductivity than the thermoplastic resin. a thermally conductive filler so that the density of the composite insulating plate is 1.8 g/cm 3 or more and the thermal conductivity in the thickness direction of the plate is 15 W/m·K or more and 35 W/m·K or less; The particles are oriented and the dielectric breakdown strength in the thickness direction is 95 kV/mm or more.

また、第2の発明は、前記構成の複合絶縁板において、前記熱伝導性充填材粒子が六方晶窒化ホウ素粒子であるものである。 A second aspect of the invention is the composite insulating plate having the above structure, wherein the thermally conductive filler particles are hexagonal boron nitride particles.

第3の発明は、前記いずれかの構成の複合絶縁板において、前記熱可塑性樹脂がポリ(メタ)アクリル酸エステル系高分子化合物であるものである。 According to a third invention, in the composite insulating board having any one of the above constructions, the thermoplastic resin is a poly(meth)acrylic acid ester polymer compound.

複合絶縁板の製造方法に係る第1の発明は、熱伝導性充填材粒子を主粒子とし、その主粒子表面に熱可塑性樹脂粒子を吸着させてなる複合粒子が液体中に含まれたものであって、該熱可塑性樹脂の溶融粘度よりも低い粘性のスラリーを作製するスラリー作製工程と、所定の容積を有するキャビティ内に前記スラリー作製工程により作製したスラリーを導入する導入工程と、前記導入工程でキャビティ内に導入したスラリーに対し所定方向へ遠心力を作用させることにより、固液分離により複合粒子を前記液体から分離させつつキャビティの遠心力の作用方向に対して交差する面へ堆積させる遠心分離工程と、前記遠心分離工程によりキャビティに堆積させた前記複合粒子の堆積物に対し、前記遠心力の作用方向と同じ方向へ押圧して成形体を形成する押圧工程と、前記押圧工程により作られた前記成形体をキャビティから取り出し、前記熱可塑性樹脂粒子を構成する樹脂の融点温度以上の環境下にて、前記押圧工程での押圧方向と交差する方向へプレスするホットプレス工程と、を含むものである。 A first invention relating to a method for manufacturing a composite insulating board is a composite insulating plate in which composite particles are contained in a liquid, which are made by using thermally conductive filler particles as main particles and thermoplastic resin particles adsorbed on the surfaces of the main particles. a slurry preparation step of preparing a slurry having a viscosity lower than the melt viscosity of the thermoplastic resin; an introduction step of introducing the slurry prepared by the slurry preparation step into a cavity having a predetermined volume; By applying a centrifugal force to the slurry introduced into the cavity in a predetermined direction, the composite particles are separated from the liquid by solid-liquid separation and deposited on the surface of the cavity intersecting with the direction of action of the centrifugal force. a separation step, a pressing step of pressing the deposit of the composite particles deposited in the cavity by the centrifugal separation step in the same direction as the direction of action of the centrifugal force to form a compact, and a pressing step. and a hot pressing step of taking out the formed article from the cavity and pressing it in a direction intersecting the pressing direction in the pressing step under an environment having a temperature equal to or higher than the melting point temperature of the resin constituting the thermoplastic resin particles. It is a thing.

また、第2の発明は、前記構成の複合絶縁物の製造方法において、前記複合粒子が、板状の熱伝導性充填材粒子に熱可塑性樹脂粒子を吸着させたものであって、熱伝導性充填材粒子の平均粒径に対して熱可塑性樹脂粒子の平均粒径が1/9から1/15であるものである。 In a second aspect of the invention, in the method for manufacturing a composite insulator having the above configuration, the composite particles are obtained by adsorbing thermoplastic resin particles to plate-like thermally conductive filler particles, and the thermally conductive The average particle size of the thermoplastic resin particles is 1/9 to 1/15 of the average particle size of the filler particles.

第3の発明は、前記いずれかの複合絶縁板の製造方法において、前記複合粒子は、液体中で、表面の電荷を正または負に帯電させた熱伝導性充填材粒子と該熱伝導性充填材粒子とは逆の電荷を表面に帯電させた熱可塑性樹脂粒子とを混合し、前記熱伝導性充填材粒子の表面に前記熱可塑性樹脂粒子を吸着させてなるものである。 In a third aspect of the invention, in any one of the above methods for manufacturing a composite insulating board, the composite particles include, in a liquid, thermally conductive filler particles whose surfaces are positively or negatively charged, and the thermally conductive filler particles. The material particles are mixed with thermoplastic resin particles having a surface charged with a charge opposite to that of the material particles, and the thermoplastic resin particles are adsorbed to the surfaces of the thermally conductive filler particles.

本発明の複合絶縁板によれば、その密度が1.8g/cm以上であるため、基板内に密に充填された熱伝導性充填材粒子によって、熱伝導性充填材粒子相互の接点を多く形成することができ、熱伝導性の向上を実現できる。また、複合絶縁板の厚み方向の熱伝導率が15W/m・K以上から35W/m・K以下となるように熱伝導性充填材料粒子が熱の伝達方向に配向している。ここで、配向度の向上は、厚み方向への熱伝導性を向上させることができ、また、その配向度が熱伝導率で35W/m・K以下となる状態とすることで絶縁破壊強度の低下を抑制できる。よって、厚み方向に対する良好な熱伝導性を備えつつ、95kV/mm以上となる絶縁破壊強度を有する複合絶縁板を提供できるという効果がある。 According to the composite insulating plate of the present invention, since the density is 1.8 g/cm 3 or more, the thermally conductive filler particles densely filled in the substrate form contact points between the thermally conductive filler particles. A large number of layers can be formed, and an improvement in thermal conductivity can be realized. In addition, the thermally conductive filler particles are oriented in the heat transfer direction so that the thermal conductivity in the thickness direction of the composite insulating plate is 15 W/m·K or more to 35 W/m·K or less. Here, the improvement of the degree of orientation can improve the thermal conductivity in the thickness direction. Decrease can be suppressed. Therefore, there is an effect that it is possible to provide a composite insulating board having a dielectric breakdown strength of 95 kV/mm or more while having good thermal conductivity in the thickness direction.

本発明の複合絶縁板の製造方法によれば、複合粒子が液体中に含まれたスラリーを所定の容積を有するキャビティ内に導入し、所定の方向に遠心力を作用させることにより、固液分離により複合粒子を前記液体から分離しつつキャビティ内の遠心力の作用方向に対して交差する面に配向した状態で堆積、その後に遠心力の作用方向に押圧することで複合粒子が配向した緻密な成形体を作る効果がある。次に熱可塑性樹脂の融点温度以上の環境温度下で、成形体を遠心力の作用方向と交差する方向にプレスすることで複合絶縁板の厚さ方向に個々の熱伝導性充填材粒子の距離が短縮化されて、粒子の外表面にボイドがなく、かつ熱可塑性樹脂で被覆させ、良好な熱伝導性と十分な絶縁破壊強度とを兼ね備えた複合絶縁板を提供できるという効果がある。 According to the method for producing a composite insulating plate of the present invention, a slurry containing composite particles in a liquid is introduced into a cavity having a predetermined volume, and a centrifugal force is applied in a predetermined direction to separate solid and liquid. By separating the composite particles from the liquid, they are deposited in a state oriented on a plane intersecting the direction of action of the centrifugal force in the cavity, and then pressed in the direction of action of the centrifugal force, so that the composite particles are oriented and dense. It has the effect of making a molded body. Next, under an environmental temperature higher than the melting point temperature of the thermoplastic resin, the compact is pressed in a direction intersecting with the direction of action of the centrifugal force, thereby increasing the distance between the individual thermally conductive filler particles in the thickness direction of the composite insulating board. is shortened, the outer surfaces of the particles are free of voids, and the composite insulating plate is coated with a thermoplastic resin to provide both good thermal conductivity and sufficient dielectric breakdown strength.

複合絶縁板の断面の模式図である。It is a schematic diagram of the cross section of a composite insulating board. 複合絶縁板の作製工程を示した図である。It is the figure which showed the production process of a composite insulating board. 熱可塑性樹脂粒子の粒径を変えたときの複合絶縁板の絶縁破壊強度および熱伝導率の関係を示した図である。FIG. 5 is a diagram showing the relationship between dielectric breakdown strength and thermal conductivity of composite insulating plates when the particle size of thermoplastic resin particles is changed. S5の離型工程で型枠から離型した成形体の模式図である。FIG. 10 is a schematic diagram of a molded body released from the mold in the release step of S5. 各種の複合絶縁板の熱伝導率と絶縁破壊強度の関係を示した図である。FIG. 4 is a diagram showing the relationship between thermal conductivity and dielectric breakdown strength of various composite insulating plates. 複合粒子の電子顕微鏡写真である。1 is an electron micrograph of composite particles. 型枠の斜視図である。It is a perspective view of a formwork. 複合絶縁板の断面の電子顕微鏡写真である。1 is an electron micrograph of a cross section of a composite insulating plate. 成形温度を変えたときの複合絶縁板の絶縁破壊強度および熱伝導率の関係を示した図である。FIG. 4 is a diagram showing the relationship between dielectric breakdown strength and thermal conductivity of composite insulating boards when molding temperature is changed.

以下に本発明の実施形態について詳細に説明する。 Embodiments of the present invention will be described in detail below.

複合絶縁板の一実施形態は、熱可塑性樹脂の母材の中に板状の熱伝導性充填材粒子が分散されたものである。 One embodiment of the composite insulating board is a thermoplastic resin matrix with plate-like thermally conductive filler particles dispersed therein.

複合絶縁板に含まれる熱可塑性樹脂は、絶縁性を有し、その体積固有抵抗は1015Ωcm程度である。具体的にはかかる熱可塑性樹脂としては、たとえば、ポリエチレン(PE)、エチレン酢酸ビニル共重合体(EVA),ポリプロピレン(PP)、ポリスチレン(PS)、ABS樹脂、ポリメタクリル酸メチル(PMMA)、ポリ塩化ビニル(PVC)、ポリエチレンテレフタレート、ポリエチレンナフタレート(PEN)、ポリフェニレンスルファイド(PPS)、ポリアミドイミド(PAI)、ポリテトラフルオロエチレン(PTFE)、ポリエーテルエーテルケトン樹脂(PEEK)などが例示できる。これらの熱可塑性樹脂は、放熱設計の前提となる使用最高温度を勘案して選定される。なお、熱可塑性樹脂として1種類のものを用いても良く、複数種類のものを混合して用いても良い。更には、ホモポリマーであっても良く、共重合体であってもよい。 The thermoplastic resin contained in the composite insulating plate has insulating properties, and its volume resistivity is about 10 15 Ωcm. Specifically, such thermoplastic resins include, for example, polyethylene (PE), ethylene vinyl acetate copolymer (EVA), polypropylene (PP), polystyrene (PS), ABS resin, polymethyl methacrylate (PMMA), poly Examples include vinyl chloride (PVC), polyethylene terephthalate, polyethylene naphthalate (PEN), polyphenylene sulfide (PPS), polyamideimide (PAI), polytetrafluoroethylene (PTFE), polyetheretherketone resin (PEEK), and the like. These thermoplastic resins are selected in consideration of the maximum operating temperature, which is a prerequisite for heat dissipation design. As the thermoplastic resin, one type may be used, or a plurality of types may be mixed and used. Furthermore, it may be a homopolymer or a copolymer.

一般に製造時の成形工程での加熱温度が高い程、冷却に伴い熱可塑性樹脂と充填材との界面に応力が発生した状態となり、界面での剥離を誘発しやすい。一方、ガラス転移点が高いほど耐熱性が優れているため、より高温下での使用に好適に用いることができる。 In general, the higher the heating temperature in the molding process during production, the more stress is generated at the interface between the thermoplastic resin and the filler as it cools, which easily induces separation at the interface. On the other hand, the higher the glass transition point, the better the heat resistance, so that it can be suitably used at higher temperatures.

例えば、自動車用Si系パワーモジュールの最高使用温度100~120℃に近いが、実際のモジュールでは、熱劣化を考慮し、熱設計温度は60~70℃となる。好適には熱可塑性樹脂はポリ(メタ)アクリル酸エステルである。ポリ(メタ)アクリル酸エステルはアクリル酸エステルまたはメタクリル酸エステルの重合体で、絶縁特性として体積固有抵抗率は1016Ωcmで良好な値である。 For example, although the maximum operating temperature is close to 100 to 120.degree. C. for Si-based power modules for automobiles, the thermal design temperature for actual modules is 60 to 70.degree. C. in consideration of thermal deterioration. Preferably the thermoplastic resin is a poly(meth)acrylate. Poly(meth)acrylic acid ester is a polymer of acrylic acid ester or methacrylic acid ester, and has a good volume resistivity of 10 16 Ωcm as an insulating property.

SiC系パワーモジュールでは、運転最高温度が200℃程度で、熱設計温度は100℃を超えることになるため、耐熱温度が200℃を超える熱可塑性樹脂が選択され、好適には耐熱温度が250℃であるPTFEやPAIがその候補である。 In SiC power modules, the maximum operating temperature is about 200°C, and the thermal design temperature exceeds 100°C. PTFE and PAI are candidates for this.

複合絶縁板に含まれる熱伝導性充填材粒子は、熱伝導率および熱拡散率が高いほど好ましく、電気的には体積固有抵抗率および絶縁破壊強度が高いほど良い。 The higher the thermal conductivity and thermal diffusivity of the thermally conductive filler particles contained in the composite insulating plate, the better.

一般には熱伝導性充填材粒子としては、アルミナ(Al2O3)、シリカ(SiO)アルミナ水和物(AlO3・H2O)、酸化チタン(TiO2)、窒化アルミ(AlN)、窒化ホウ素(BN)、窒化ケイ素(SiC)などが例示される。 Thermally conductive filler particles generally include alumina (Al 2 O 3 ), silica (SiO 2 ) alumina hydrate (Al 2 O 3 .H 2 O), titanium oxide (TiO 2 ), aluminum nitride (AlN ), boron nitride (BN), and silicon nitride (SiC).

ここで、本実施形態の熱伝導性充填材粒子は、粒子形状が板状であるものが用いられる。「板状」とは、層状で六方晶の結晶構造を有して粒子が板のような形状であることを言う。また、熱伝導性充填材粒子は、熱伝導性に異方性を有していても良い。「熱伝導の異方性」とは板状の熱伝導性充填材粒子の面内方向と厚さ方向で熱伝導率が異なることを言う。熱伝導性充填材粒子は、その平均粒径が、大きくなるにつれ粒子間に隙間ができ絶縁板内の密度が上がらず、母材の樹脂が多くなり、熱伝導性が上がらない。また、平均粒径が小さくなるにつれて、充填密度は上がるが、母材との界面が多くなり、絶縁性能低下要因になる。よって、熱伝導性充填材粒子の平均粒径が、0.5μm~60μmのものが用いられ、より好適には、平均粒径が20μm~50μmのものが用いられる。 Here, as the thermally conductive filler particles of the present embodiment, those having a plate-like particle shape are used. The term "plate-like" means that the particles have a plate-like shape with a layered hexagonal crystal structure. Also, the thermally conductive filler particles may have an anisotropic thermal conductivity. The term "anisotropic thermal conductivity" means that thermal conductivity differs between the in-plane direction and the thickness direction of plate-like thermally conductive filler particles. As the average particle diameter of the thermally conductive filler particles increases, gaps form between the particles, preventing the density in the insulating plate from increasing, increasing the amount of resin in the base material, and preventing an increase in thermal conductivity. Also, as the average particle diameter becomes smaller, the packing density increases, but the number of interfaces with the base material increases, which causes a decrease in insulation performance. Therefore, thermally conductive filler particles with an average particle size of 0.5 μm to 60 μm are used, and those with an average particle size of 20 μm to 50 μm are more preferably used.

上記した熱伝導性充填材粒子において好適には六方晶系窒化ホウ素(以降BN)が用いられる。BN粒子の結晶は層状結晶であることから結晶面に沿ってヘキカイするため、BN粒子は板状となり、一般的に平均粒径は0.5~60μmで、厚さは0.1~3μm程度である。BNの体積抵抗率は一般的に使用されているアルミナと同等である。BNの熱伝導率はアルミナに比べ厚さ方向で2倍で、面内方向で10倍である。 Hexagonal boron nitride (hereinafter BN) is preferably used in the thermally conductive filler particles described above. Since the crystals of BN particles are layered crystals, they break along the crystal plane, so the BN particles are plate-like, and generally have an average particle size of 0.5 to 60 μm and a thickness of about 0.1 to 3 μm. is. The volume resistivity of BN is equivalent to that of commonly used alumina. The thermal conductivity of BN is twice that of alumina in the thickness direction and ten times in the in-plane direction.

本実施形態では、熱伝導性充填材粒子の粒子径は、レーザー回折散乱法によって測定されたものが用いられる。たとえば、レーザー散乱式粒度測定装置(島津製作所製、SALD-3100)を用いて粒度分布を測定し、累積分布率50重量%での粒度(D50)を「平均粒径」という。 In this embodiment, the particle size of the thermally conductive filler particles is measured by a laser diffraction scattering method. For example, the particle size distribution is measured using a laser scattering particle size analyzer (SALD-3100 manufactured by Shimadzu Corporation), and the particle size (D50) at a cumulative distribution rate of 50% by weight is referred to as "average particle size."

特に限定するものでもないが、本発明のBNの具体例としては、「PT-110(商品名)」(モーメンティブパーフォーマンスマテリアルズジャパン合同会社製、平均粒径45μm)があげられる。これに限らず板状の熱伝導性充填材粒子は粉砕・解砕することで所定の平均粒径の粒子を得ることができる。 Although not particularly limited, a specific example of the BN of the present invention is "PT-110 (trade name)" (manufactured by Momentive Performance Materials Japan LLC, average particle size 45 μm). Not limited to this, the plate-shaped thermally conductive filler particles can be pulverized and crushed to obtain particles having a predetermined average particle size.

複合絶縁板における熱伝導性充填材粒子の配合量は、40~80体積%の範囲である。熱伝導性充填材粒子の配合量が40体積%以下であると、熱伝導性が十分得られず、配合量が80体積%以上であると熱伝導性充填材粒子の外表面の熱可塑性樹脂が不足し、絶縁破壊強度が不十分な複合絶縁板となる。好適には配合量が、55~70体積%の範囲である。 The compounding amount of the thermally conductive filler particles in the composite insulating board is in the range of 40 to 80% by volume. If the amount of the thermally conductive filler particles is 40% by volume or less, sufficient thermal conductivity cannot be obtained. is insufficient, resulting in a composite insulating board with insufficient dielectric breakdown strength. Preferably, the blending amount is in the range of 55 to 70% by volume.

図1は本実施形態の複合絶縁板の断面の模式図である。本複合絶縁板は、上面視矩形上に形成されており、紙面上側が複合絶縁板の表面となるよう表示されている。 FIG. 1 is a schematic cross-sectional view of the composite insulating plate of this embodiment. This composite insulating board is formed in a rectangular shape when viewed from above, and is displayed so that the upper side of the paper surface is the surface of the composite insulating board.

かかる複合絶縁板は、熱伝導性充填材粒子1が熱可塑性樹脂2に分散され、熱伝導性充填材粒子は熱可塑性樹脂が被覆し、相互に接着し熱可塑性樹脂中に存在した状態である。使用状態においてその両面が半導体素子および放熱フィンと接するようにセットされる。使用に際しては、図1中の矢印方向が電界の印加方向となる。本複合絶縁板は、熱を伝播させたい方向(複合絶縁板の厚み方向)に対し、熱伝導性充填材粒子1の面内方向が所定の配向度の範囲で配向している。 In such a composite insulating board, the thermally conductive filler particles 1 are dispersed in the thermoplastic resin 2, the thermally conductive filler particles are coated with the thermoplastic resin, adhere to each other, and exist in the thermoplastic resin. . It is set so that both sides thereof are in contact with the semiconductor element and the radiating fins in use. In use, the direction of the arrow in FIG. 1 is the direction of application of the electric field. In this composite insulating plate, the in-plane direction of the thermally conductive filler particles 1 is oriented within a predetermined degree of orientation with respect to the desired direction of heat propagation (thickness direction of the composite insulating plate).

ここで、本実施形態において、複合絶縁板を構成する熱伝導性充填材粒子の「配向度」とは、複合絶縁板の厚み方向(上下方向)を基準とした場合に、板状の熱伝導性充填材粒子1のそれぞれの面内方向が、厚み方向に対しどの程度傾いているか(整列しているか)を示す指標である。すなわち、熱を伝搬させたい方向への熱伝導性充填材粒子1の整列の度合いであり、複合絶縁板が示す熱伝導率で規定する。熱伝導性充填材粒子の面内方向が複合絶縁板の板面に対してつくる角度は、複合絶縁板内に存在する個々の熱伝導性充填材粒子ごとに一定ではない。複合絶縁板の厚さ方向の単位体積当たりの熱抵抗は、その単位体積内に存在する熱伝導性充填材粒子の熱抵抗と熱伝導性充填材粒子の隙間を埋める熱可塑性樹脂の熱抵抗の直列および並列の合成で計算できる。このため、複合絶縁板の熱伝導率は複合絶縁板内の熱伝導性充填材粒子の全体の配向度と一定の関係がある。従って、複合絶縁板の熱伝導性充填材粒子の配向度は、複合絶縁板の熱伝導率で表すことができる。 Here, in the present embodiment, the “orientation degree” of the thermally conductive filler particles constituting the composite insulating plate means that the plate-like heat conduction It is an index showing how much the in-plane direction of each of the filler particles 1 is inclined (aligned) with respect to the thickness direction. That is, it is the degree of alignment of the thermally conductive filler particles 1 in the desired direction of heat propagation, and is defined by the thermal conductivity of the composite insulating plate. The angle formed by the in-plane direction of the thermally conductive filler particles with respect to the plane of the composite insulating plate is not constant for each individual thermally conductive filler particle present in the composite insulating plate. The thermal resistance per unit volume in the thickness direction of the composite insulating plate is the thermal resistance of the thermally conductive filler particles present in the unit volume and the thermal resistance of the thermoplastic resin that fills the gaps between the thermally conductive filler particles. It can be calculated by combining series and parallel. Therefore, the thermal conductivity of the composite insulating plate has a certain relationship with the overall orientation of the thermally conductive filler particles in the composite insulating plate. Therefore, the degree of orientation of the thermally conductive filler particles of the composite insulating plate can be represented by the thermal conductivity of the composite insulating plate.

本実施形態の複合絶縁板内の熱伝導性充填材粒子の配向度は複合絶縁板の熱伝導率が15W/m・K以上から35W/m・K以下となる配向度である。熱伝導率15W/m・K以下となる配向度では、複合絶縁板としての熱伝導性は不十分である。熱伝導率35W/m・K以上となる配向では、複合絶縁板の絶縁破壊強度が急激に悪化する。 The degree of orientation of the thermally conductive filler particles in the composite insulating plate of this embodiment is such that the thermal conductivity of the composite insulating plate is 15 W/m·K or more to 35 W/m·K or less. If the degree of orientation is such that the thermal conductivity is 15 W/m·K or less, the thermal conductivity of the composite insulating plate is insufficient. In the orientation where the thermal conductivity is 35 W/m·K or more, the dielectric breakdown strength of the composite insulating plate deteriorates rapidly.

本実施形態の複合絶縁板は絶縁破壊強度が95kV/mm以上のものである。好適には絶縁破壊強度の平均値が110kV/mmである。絶縁破壊強度が95kV/mm以下では、複合絶縁板の熱伝導性充填材粒子の配向度が高く、複合絶縁板の厚さ方向に熱伝導性充填材粒子の面内方向がつながり絶縁上の弱点が多くなる。 The composite insulating plate of this embodiment has a dielectric breakdown strength of 95 kV/mm or more. Preferably, the average dielectric breakdown strength is 110 kV/mm. When the dielectric breakdown strength is 95 kV / mm or less, the thermally conductive filler particles of the composite insulating plate have a high degree of orientation, and the in-plane direction of the thermally conductive filler particles is connected to the thickness direction of the composite insulating plate, which is a weak point in insulation. will increase.

本実施形態の複合絶縁板の密度は1.8g/cm以上である。1.8g/cm以下では、複合絶縁板としての熱伝導性は不十分である。 The density of the composite insulating board of this embodiment is 1.8 g/cm 3 or more. If it is 1.8 g/cm 3 or less, the thermal conductivity of the composite insulating board is insufficient.

複合絶縁板の熱伝導性充填材粒子と熱可塑性樹脂は、それぞれ材料本来の絶縁破壊強度を有しているが、両者の誘電率の違いから、その界面では電界の変歪があり、電界が高い部分ができ絶縁的な弱点となる。このため、配向度を上げていくこと、すなわち電界方向に熱伝導性充填材粒子の面内方向が配向するため、粒子の界面が電界方向に連続してしまうため、絶縁性能は低下する。一方、配向度を上げることで、熱伝導率は向上する。このように配向度は両特性に対して背反するため、絶縁破壊強度が十分で、かつ熱伝導性の良い適切な配向度が存在し、本発明の製造方法の条件を適切に制御し、使用目的で要求される絶縁破壊強度と熱伝導率を発現する複合絶縁板を提供できる。 The thermally conductive filler particles and the thermoplastic resin of the composite insulating plate each have their own dielectric breakdown strength, but due to the difference in dielectric constant between the two, there is deformation of the electric field at the interface, and the electric field is reduced. A high part is created and becomes an insulating weak point. Therefore, as the degree of orientation increases, that is, the in-plane direction of the thermally conductive filler particles is oriented in the direction of the electric field, the interface of the particles becomes continuous in the direction of the electric field, and the insulation performance deteriorates. On the other hand, increasing the degree of orientation improves the thermal conductivity. Thus, since the degree of orientation conflicts with both characteristics, there is an appropriate degree of orientation that has sufficient dielectric breakdown strength and good thermal conductivity, and the conditions of the production method of the present invention are appropriately controlled and used. It is possible to provide a composite insulating board that exhibits the dielectric breakdown strength and thermal conductivity required for the purpose.

上記の複合絶縁板の製造方法に関しても本発明の範囲内である。 The method of manufacturing the composite insulating plate described above is also within the scope of the present invention.

図2~図4を参照して、本発明の一実施形態における複合絶縁板の製造方法について説明する。なお、以下の実施形態は本発明を具体化した一例にすぎず、本発明の主旨を変更しない範囲で、実施形態を適宜変更できることは言うまでもない。 A method of manufacturing a composite insulating board according to one embodiment of the present invention will be described with reference to FIGS. It should be noted that the following embodiment is merely an example of implementing the present invention, and it goes without saying that the embodiment can be changed as appropriate without changing the gist of the present invention.

図2は第一実施形態の複合絶縁板の製造方法を示す工程図である。
本製造方法では、熱伝導性充填材粒子の表面に熱可塑性樹脂が吸着して複合化された複合粒子を含むスラリーを作製するスラリー工程(S1)、複合粒子が分散したスラリーを型枠に導入する導入工程(S2)、型枠内で遠心力によって複合粒子を沈降させ固液分離する遠心分離工程(S3)、沈降した堆積物を加圧する押圧工程(S4)、型枠を外して成形体を取出す離型工程(S5)、成形体を加熱しながら加圧するホットプレス工程(S6)を経て製造される。
FIG. 2 is a process drawing showing the method for manufacturing the composite insulating board of the first embodiment.
In this production method, a slurry step (S1) of preparing a slurry containing composite particles in which the thermoplastic resin is adsorbed on the surface of the thermally conductive filler particles to form a composite, and the slurry in which the composite particles are dispersed is introduced into the mold. An introduction step (S2), a centrifugal separation step (S3) in which the composite particles are sedimented by centrifugal force in the mold for solid-liquid separation, a pressing step (S4) in which the sediment is pressurized, and the mold is removed to remove the compact. It is produced through a mold release step (S5) for taking out the molded product, and a hot press step (S6) for pressing while heating the molded product.

なお、本実施形態の製造方法で用いる複合粒子は、予め製作されたものを使うこともできる。なお、本実施形態においては、その製造工程(複合粒子作製工程(S0)を備えて、複合絶縁板の製造方法が構成されている。 Note that the composite particles used in the production method of the present embodiment can also be prefabricated. In addition, in the present embodiment, the method for manufacturing a composite insulating board is constituted by including the manufacturing process (composite particle preparation process (S0)).

本製造工程で使用される複合粒子は、主粒子(粒径が大きい粒子)表面に、主粒子に比べて粒径が小さな吸着粒子が吸着され、全体として1の粒子として一体となった態様を有するものであり、主粒子は、熱伝導性充填材粒子であり、吸着粒子は熱可塑性樹脂粒子である。 Composite particles used in this manufacturing process are composed of main particles (particles with a large particle size), on the surface of which adsorbed particles with a smaller particle size than the main particles are adsorbed, and are integrated as one particle as a whole. The primary particles are thermally conductive filler particles and the adsorbent particles are thermoplastic resin particles.

主粒子は平均粒径0.5μmから60μmの熱伝導性充填材粒子で、その主粒子の平均粒径に対して吸着粒子の平均粒径は1/9~1/15の範囲である。好適には1/10である。 The primary particles are thermally conductive filler particles with an average particle size of 0.5 μm to 60 μm, and the average particle size of the adsorbent particles is in the range of 1/9 to 1/15 of the average particle size of the primary particles. It is preferably 1/10.

複合粒子の主粒子である熱伝導性充填材粒子と、吸着粒子である熱可塑性樹脂粒子のそれぞれの平均粒径の関係は、複合絶縁板の絶縁破壊強度および熱伝導率に大きく影響する。ここで、図3を参照して、この主粒子の平均粒径と吸着粒子の平均粒径との関係が、複合絶縁板の絶縁破壊強度および熱伝導率に及ぼす影響について説明する。 The relationship between the average particle diameters of the thermally conductive filler particles, which are the main particles of the composite particles, and the thermoplastic resin particles, which are the adsorbent particles, greatly affects the dielectric breakdown strength and thermal conductivity of the composite insulating board. Here, with reference to FIG. 3, the effect of the relationship between the average particle size of the main particles and the average particle size of the adsorbent particles on the dielectric breakdown strength and thermal conductivity of the composite insulating board will be described.

図3は一例として、主粒子として平均粒径45μmのBN粒子、吸着粒子としてPMMA粒子を用い、PMMA粒子の平均粒径を1~12μmまで変化させた場合の絶縁破壊強度および熱伝導率の関係を示した図である。 As an example, Fig. 3 shows the relationship between dielectric breakdown strength and thermal conductivity when BN particles with an average particle size of 45 µm are used as the main particles and PMMA particles are used as the adsorbent particles, and the average particle size of the PMMA particles is varied from 1 to 12 µm. It is a figure showing.

図3において、横軸はPMMA粒子の平均粒径、左の縦軸は絶縁破壊強度(kV/mm)、右の縦軸は熱伝導率(W/m・K)である。また、図3中において、破線にて絶縁破壊強度の変化を示し、実線にて熱伝導率の変化を示している。図3からもわかるように、絶縁破壊強度は、PMMA粒子の粒径の増加に伴い向上し、平均粒径4μmの場合の絶縁破壊強度は平均粒径1μmに対して2倍程度に達する。しかし、更に、PMMA粒子の平均粒径を8μm、12μmと粒径を増加しても絶縁破壊強度は比例して増加しない上、ばらつきも増大する。一方、熱伝導率はPMMA粒径が4μm程度までは変わらないが、粒径が大きくなるにつれて低下する傾向を示している。8μmの場合の熱伝導率では1μmに比べ1/2程度である。このことから、BN粒子の平均粒径が45μmの場合には、PMMA粒子4μm以上6μm以下の間が最適である。これは、主粒子を45μmとした例であるが、主粒子の平均粒径が変わっても図3と同様に吸着粒子の粒径は1/9~1/15の範囲とされる。 In FIG. 3, the horizontal axis represents the average particle size of PMMA particles, the left vertical axis represents dielectric breakdown strength (kV/mm), and the right vertical axis represents thermal conductivity (W/m·K). In FIG. 3, the dashed line indicates changes in dielectric breakdown strength, and the solid line indicates changes in thermal conductivity. As can be seen from FIG. 3, the dielectric breakdown strength increases as the particle size of PMMA particles increases, and the dielectric breakdown strength in the case of an average particle size of 4 μm reaches about twice that of the average particle size of 1 μm. However, even if the average particle size of the PMMA particles is further increased to 8 μm and 12 μm, the dielectric breakdown strength does not increase proportionally, and the variation also increases. On the other hand, the thermal conductivity does not change until the PMMA particle size reaches about 4 μm, but it tends to decrease as the particle size increases. The thermal conductivity in the case of 8 μm is about half that of 1 μm. From this, when the average particle size of the BN particles is 45 μm, the optimum PMMA particle size is between 4 μm and 6 μm. This is an example in which the main particles are 45 μm, but even if the average particle size of the main particles is changed, the particle size of the adsorbed particles is in the range of 1/9 to 1/15 as in FIG.

図2に戻って説明する。 Returning to FIG. 2, description will be made.

複合粒子作製工程(S0)は、粒径の大きい方の主粒子(熱伝導性充填材粒子)の表面に、粒径の小さい方の粒子(熱可塑性樹脂粒子)を吸着粒子として吸着させて複合粒子を作製する工程であり、本実施形態においては、吸着粒子の表面電荷と、熱伝導性充填材粒子の表面電荷とが、反対電荷となるようにそれぞれ調整された後、液中において両粒子を混合することで、静電引力により熱伝導性充填材粒子(主粒子)に熱可塑性樹脂粒子(吸着粒子)が吸着されるようになっている。 In the composite particle preparation step (S0), particles with a smaller particle size (thermoplastic resin particles) are adsorbed as adsorption particles onto the surfaces of main particles with a larger particle size (thermally conductive filler particles) to form composites. In this embodiment, the surface charge of the adsorbing particles and the surface charge of the thermally conductive filler particles are adjusted so that they are opposite to each other. By mixing, the thermoplastic resin particles (adsorption particles) are adsorbed to the thermally conductive filler particles (main particles) by electrostatic attraction.

ここでは、吸着粒子の表面電荷を負に調整し、主粒子の表面電荷を正に調整する場合について説明するが、吸着粒子の表面電荷を正に調整し、主粒子の表面電荷を負に調整しても良い。 Here, the case of adjusting the surface charge of the adsorbed particles to be negative and the surface charge of the main particles to be positive will be described. You can

具体的には、親水性を高めると共に負の表面電位を高めさせるため、界面活性剤に吸着粒子を浸漬させた。次に2種類の高分子電解質溶液に順に吸着粒子を浸漬した。これらの濃度は各溶液が吸着粒子表面全体に吸着するために十分な濃度である。なお、各溶液に浸漬する前に吸着粒子はイオン交換水中での洗浄処理を実施した。最終的に吸着粒子の表面電位は負に調整した。一方、同様な方法で熱伝導性充填材粒子の表面電位を最終的に正に調整し、主粒子とした。表面電位を負とした吸着粒子および表面電位を正とした主粒子をイオン交換水中で混合し、静電相互作用により主粒子表面に吸着粒子が吸着した複合粒子を作製した。 Specifically, the adsorption particles were immersed in a surfactant in order to increase the hydrophilicity and the negative surface potential. Next, the adsorbent particles were immersed in two types of polymer electrolyte solutions in order. These concentrations are sufficient for each solution to adsorb to the entire adsorbent particle surface. The adsorbent particles were washed in ion-exchanged water before being immersed in each solution. Finally, the surface potential of the adsorbed particles was adjusted to be negative. On the other hand, the surface potential of the thermally conductive filler particles was finally adjusted to be positive by the same method, and the main particles were obtained. Adsorbed particles with a negative surface potential and main particles with a positive surface potential were mixed in ion-exchanged water to prepare composite particles in which the adsorbed particles were adsorbed on the surfaces of the main particles by electrostatic interaction.

スラリー工程(S1)は、複合粒子を低粘度液体と混ぜてスラリー状にする工程である。本工程で、複合粒子を溶解しない低粘度液体を用いてスラリーにすることで低い遠心力で容易に複合粒子を緻密化させることができる。この時の溶媒としてはイオン物質の極力すくない低粘度液体であることが望ましい。低粘度とは、常温の動粘度として1センチストークス程度以下である。好適にはイオン交換水である。 The slurry step (S1) is a step of mixing the composite particles with a low-viscosity liquid to form a slurry. In this step, by making a slurry using a low-viscosity liquid that does not dissolve the composite particles, the composite particles can be easily densified with a low centrifugal force. The solvent at this time is desirably a low-viscosity liquid containing as few ionic substances as possible. Low viscosity means that the kinematic viscosity at room temperature is about 1 centistoke or less. Ion-exchanged water is preferred.

導入工程(S2)は、S1の工程で作られたスラリーを型枠に入れる工程である。なお、本実施形態において、型枠には、上面を開口する有底の容器であって、好適には、底部が平面状に形成されたものが用いられる。 The introduction step (S2) is a step of putting the slurry prepared in the step of S1 into a mold. In the present embodiment, the formwork is a bottomed container with an open top, preferably with a flat bottom.

遠心分離工程(S3)は、複合粒子を配向させ、かつ固液分離するために遠心力を加える工程である。遠心力は、遠心力=(回転数)×(回転中心から複合粒子までの距離)×(複合粒子の重量)で算出する。キャビティ内に導入したスラリーに対して遠心力を作用させることにより、スラリーの複合粒子を液体から分離させつつ、遠心力の作用方向と交差する面に堆積させる。複合粒子を水のような低粘度液体中に分散させスラリーを作ることで、遠心力で複合粒子を容易に沈降させ、得られる複合粒子の堆積物において、複合粒子の配向性を向上させることができる。 The centrifugal separation step (S3) is a step of applying centrifugal force for orienting the composite particles and performing solid-liquid separation. The centrifugal force is calculated by centrifugal force = (number of rotations) x (distance from center of rotation to composite particles) x (weight of composite particles). By applying a centrifugal force to the slurry introduced into the cavity, the composite particles of the slurry are separated from the liquid and deposited on the surface intersecting the direction of action of the centrifugal force. By dispersing the composite particles in a low-viscosity liquid such as water to form a slurry, the composite particles can be easily sedimented by centrifugal force, and the orientation of the composite particles can be improved in the obtained composite particle deposits. can.

低粘度液体中に分散させずに単純にドライな粉体状態で型に入れて機械的圧力のみを加え、複合粒子の密度を高める方法もあるが、複合粒子同士が動き難く、複合粒子が配向出来ない上、粒子間に隙間が出来やすく緻密な構造にならない。 There is also a method of increasing the density of composite particles by simply putting them in a mold in a dry powder state without dispersing them in a low-viscosity liquid and applying only mechanical pressure. In addition, gaps are likely to form between particles, preventing a dense structure.

一方、本製造方法によれば、遠心分離工程(S3)の工程では型枠に遠心力を付与することで複合粒子の板面が遠心力の作用方向と交差するように沈降し、複合粒子が配向しつつ沈降して堆積物ができる。 On the other hand, according to the present production method, in the centrifugal separation step (S3), by applying centrifugal force to the mold, the plate surface of the composite particles settles so as to intersect the direction of action of the centrifugal force, and the composite particles are Sediments are formed by sedimentation while being oriented.

押圧工程(S4)は、遠心分離工程(S3)の工程で作られた堆積物に遠心力の作用方向と同方向に機械的に面圧を加える工程である。前工程の遠心分離工程(S3)では、複合粒子の重量で決まる遠心力しか複合粒子に力を与えることが出来ない。このため、前記堆積物の密度を更に上げるため、遠心力の作用方向と同方向に機械的に面圧を加える本工程が設けられている。 The pressing step (S4) is a step of mechanically applying surface pressure to the sediment produced in the centrifugal separation step (S3) in the same direction as the centrifugal force acting direction. In the preceding centrifugal separation step (S3), only the centrifugal force determined by the weight of the composite particles can be applied to the composite particles. Therefore, in order to further increase the density of the deposit, this step of mechanically applying surface pressure in the same direction as the centrifugal force is provided.

離型工程(S5)は、押圧工程(S4)でできた成形体を型枠から取り外す工程である。図4は取り出した成形体の模式図である。前記成形体は複合粒子が塊となった状態で、複合粒子を構成する熱伝導性充填材粒子の板面が成形体の底面と整列するように配向した状態である。 The mold release step (S5) is a step of removing the molded body produced in the pressing step (S4) from the mold. FIG. 4 is a schematic diagram of the molded body taken out. The molded article is in a state in which the composite particles are aggregated, and the plate surfaces of the thermally conductive filler particles constituting the composite particles are oriented so as to align with the bottom surface of the molded article.

ホットプレス工程(S6)は、遠心力と交差する方向(図4に図示)つまり複合粒子の面内方向に熱可塑性樹脂の融点温度以上、耐熱温度以下で加熱しながら、プレスする工程である。ホットプレスの継続時間は熱可塑性樹脂の溶融温度で適宜決められた時間である。この工程により、熱可塑性樹脂は融点温度以上になり、溶融して熱伝導性充填材粒子の界面に流動して隙間をなくすように樹脂層を形成する。ホットプレス時の温度は、熱可塑性樹脂の組成で決まる融点温度以上で設定する。ホットプレスの加熱温度は、高いほうが樹脂の流動性が高まり、充填剤粒子間に流れ込み安くなる。このため、熱伝導率を上げるために充填剤粒子の充填密度を上げ、充填粒子間の隙間が小さくなっても、樹脂が流れ込み安くなるため絶縁破壊強度の低下を抑制することができる。加熱温度の上限は樹脂を構成する高分子が劣化し始める温度より低い温度である。ホットプレスの圧力は高くすることで、熱伝導性充填材粒子間の距離を短くすると共に、熱可塑性樹脂内のボイドを追い出すことができ、複合絶縁板の密度が上がる。配向した熱伝導性充填材粒子同士を面内方向に距離を近づけるように力が加わり、熱伝導性充填材粒子の間に存在する空隙が無くなるか、または距離が近くなり、熱抵抗が低下する。さらに、一部の熱伝導性充填材粒子同士の端部(側面)が直接接触した状態になる。これは、複合粒子において、熱可塑性樹脂粒子は熱伝導性充填材粒子の板面に吸着し、板上の熱伝導性充填材粒子の厚さに比べ熱可塑性樹脂粒子の粒径は十分大きいため、熱伝導性充填材粒子の側面には吸着し難いため、ホットプレス時の圧力で熱伝導性充填材粒子どうしが直接接触する。この工程は、真空中で行えば、樹脂中のボイドを更になくすることができ絶縁破壊強度を向上させることができる。 The hot pressing step (S6) is a step of pressing while heating in the direction intersecting with the centrifugal force (shown in FIG. 4), that is, in the in-plane direction of the composite particles, at a temperature higher than the melting point temperature of the thermoplastic resin and lower than the heat resistance temperature. The duration of hot pressing is a time appropriately determined according to the melting temperature of the thermoplastic resin. Through this process, the thermoplastic resin reaches a melting point temperature or higher, melts, and flows to the interfaces of the thermally conductive filler particles to form a resin layer so as to eliminate gaps. The temperature at the time of hot pressing is set above the melting point determined by the composition of the thermoplastic resin. The higher the heating temperature of the hot press, the higher the fluidity of the resin, and the easier it is to flow between the filler particles. Therefore, even if the packing density of the filler particles is increased in order to increase the thermal conductivity and the gaps between the filler particles are reduced, the resin flows more easily, so that the dielectric breakdown strength can be prevented from lowering. The upper limit of the heating temperature is a temperature lower than the temperature at which the polymer constituting the resin begins to deteriorate. By increasing the hot press pressure, the distance between the thermally conductive filler particles can be shortened, voids in the thermoplastic resin can be expelled, and the density of the composite insulating board can be increased. A force is applied to bring the oriented thermally conductive filler particles closer to each other in the in-plane direction, and the gaps existing between the thermally conductive filler particles are eliminated or the distance is shortened, resulting in a decrease in thermal resistance. . Furthermore, the ends (side surfaces) of some of the thermally conductive filler particles are in direct contact with each other. This is because in the composite particles, the thermoplastic resin particles are adsorbed on the plate surface of the thermally conductive filler particles, and the particle size of the thermoplastic resin particles is sufficiently large compared to the thickness of the thermally conductive filler particles on the plate. Since it is difficult to adsorb to the side surfaces of the thermally conductive filler particles, the thermally conductive filler particles come into direct contact with each other under the pressure during hot pressing. If this step is carried out in a vacuum, voids in the resin can be further eliminated and the dielectric breakdown strength can be improved.

なお、本発明の製造方法によって作られた複合絶縁板の絶縁性および熱伝導性は、以下の評価方法によって測定された値が用いられる。なお、複合絶縁板は方向によってその特性が大きく違うため、実使用の方向、すなわち厚さ方向での測定値が用いられる。 For the insulating property and thermal conductivity of the composite insulating plate produced by the manufacturing method of the present invention, values measured by the following evaluation methods are used. In addition, since the characteristics of the composite insulating plate differ greatly depending on the direction, the measured value in the direction of actual use, that is, the thickness direction is used.

絶縁性の評価方法を説明する。本発明の複合絶縁板を研磨紙で厚さ約1mm程度に研磨したものを試料として、マッケオン型電極の1対の電極の間に挟み、試料表面の気中で絶縁破壊することを防止するため、試料および電極のまわりをエポキシ樹脂でモールドした。 室温にて上昇率1 kV/秒の直流ランプ電圧を印加し、絶縁破壊電圧を測定した。絶縁破壊強度(kV/mm)は絶縁破壊電圧をマッケオン電極系作製後の実際の試料厚さで除することにより算出した。試料を変えて複数回、好適には10回以上 試験を行い、その平均値を「絶縁破壊強度」とする。 The insulation evaluation method will be explained. A composite insulating plate of the present invention is polished with abrasive paper to a thickness of about 1 mm as a sample, which is sandwiched between a pair of McKeon type electrodes to prevent dielectric breakdown in the air on the surface of the sample. , the sample and electrodes were molded with epoxy resin. A DC lamp voltage was applied at room temperature with a rate of increase of 1 kV/sec, and the dielectric breakdown voltage was measured. The dielectric breakdown strength (kV/mm) was calculated by dividing the dielectric breakdown voltage by the actual sample thickness after the McKeon electrode system was produced. The test is performed several times, preferably 10 times or more, with different samples, and the average value is taken as the "dielectric breakdown strength".

熱伝導性の評価方法を説明する。本発明の複合絶縁板を直径10mm、 厚さ1mmの円盤状に切り出したものを試料とし、レーザフラッシュ法にて室温下における熱拡散率(m/秒)および比熱容量(J/g・K)とを測定する。熱伝導率(W/m・K)は、この測定値とアルキメデス法にて常温で測定した密度から計算した値を「熱伝導率」とする。 A method for evaluating thermal conductivity will be described. A disc having a diameter of 10 mm and a thickness of 1 mm was cut out from the composite insulating plate of the present invention as a sample, and thermal diffusivity (m 2 /sec) and specific heat capacity (J/g·K ) and As for the thermal conductivity (W/m·K), the value calculated from this measured value and the density measured at room temperature by the Archimedes method is defined as “thermal conductivity”.

以下、本発明の製造方法による効果を検証するための実験例を説明する。図5は本発明の製造方法を用いて製造条件を変えたときの絶縁破壊強度と熱伝導率の関係の図である。図の縦軸は絶縁破壊強度(kV/mm)、横軸は熱伝導率(W/m・K)である。図中×印および+印のプロットは、前掲の非特許文献1および2で開示された結果である。 Experimental examples for verifying the effects of the manufacturing method of the present invention will be described below. FIG. 5 is a diagram showing the relationship between dielectric breakdown strength and thermal conductivity when manufacturing conditions are changed using the manufacturing method of the present invention. In the figure, the vertical axis is dielectric breakdown strength (kV/mm), and the horizontal axis is thermal conductivity (W/m·K). Plots marked with x and + in the figure are the results disclosed in Non-Patent Documents 1 and 2 cited above.

非特許文献1では、熱伝導性充填材粒子としてのBNとエポキシ樹脂とを用い製造条件を変えて複合絶縁板を作製し、絶縁破壊強度と熱伝導率を測定している。その結果によれば、ここで作製した複合絶縁板の絶縁破壊強度は市場の要求する100kV/mm超えるものがあるが、熱伝導率は1W/m・K程度以下で市場の要求する10W/m・Kに比べ極めて低い値である。一方、熱伝導率が10W/m・Kを超えるものは、絶縁破壊強度が60kV/mmで市場の要求値に比べ低い値に留まっており、熱伝導率と絶縁破壊強度との両者を満足するものは得られていない。 In Non-Patent Document 1, composite insulating boards are manufactured using BN as thermally conductive filler particles and an epoxy resin under different manufacturing conditions, and dielectric breakdown strength and thermal conductivity are measured. According to the results, the dielectric breakdown strength of the composite insulating plate manufactured here exceeds the 100 kV/mm required by the market, but the thermal conductivity is about 1 W/m·K or less, which is the 10 W/m required by the market.・It is a very low value compared to K. On the other hand, those with a thermal conductivity exceeding 10 W/m·K have a dielectric breakdown strength of 60 kV/mm, which is lower than the value required by the market, satisfying both thermal conductivity and dielectric breakdown strength. nothing is obtained.

同様に非特許文献2では、同一の構成の複合絶縁板の絶縁破壊強度は60kV/mm以下で熱伝導率は1W/m・K以下と極めて低い値である。 Similarly, in Non-Patent Document 2, the dielectric breakdown strength of the composite insulating plate having the same configuration is 60 kV/mm or less and the thermal conductivity is 1 W/m·K or less, which are extremely low values.

(実験例1)
図5中のAのプロットは次の条件で作製した試料Aの熱伝導率と絶縁破壊強度である。熱伝導率は19±2W/m・Kで、絶縁破壊強度の平均値(X)は110kV/mmであった。この時の絶縁破壊電圧のばらつきの標準偏差(σ)は5%であった。ばらつきを考慮した絶縁破壊強度の下限値は、X(1-2σ)、すなわち95%の発生確率で計算すると、99kV/mmである。
(Experimental example 1)
Plot A in FIG. 5 shows the thermal conductivity and dielectric breakdown strength of sample A produced under the following conditions. The thermal conductivity was 19±2 W/m·K, and the average dielectric breakdown strength (X) was 110 kV/mm. The standard deviation (σ) of the dispersion of dielectric breakdown voltage at this time was 5%. The lower limit of the dielectric breakdown strength considering variations is X(1-2σ), that is, 99 kV/mm when calculated with a probability of occurrence of 95%.

試料Aの熱可塑性樹脂としては、ポリメタクリル酸メチル(PMMA)を用いた。自動車用Si系パワーモジュールの使用最高温度100~120℃で、実際のモジュールの熱設計温度が60~70℃であることから成形性の良いPMMAを選定した。熱伝導性充填材粒子としては前掲の六方晶BN「PT-110(商品名)」(モーメンティブパーフォーマンスマテリアルズジャパン合同会社製)を用いた。BNは黒鉛に似た板状結晶の粒子形状で、面内方向の熱伝導率は200W/m・Kで厚さ方向の熱伝導率60W/m・Kに比べ3倍以上となっている。 As the thermoplastic resin for sample A, polymethyl methacrylate (PMMA) was used. Since the maximum operating temperature of Si-based power modules for automobiles is 100 to 120°C and the thermal design temperature of actual modules is 60 to 70°C, PMMA with good formability was selected. As the thermally conductive filler particles, the hexagonal BN "PT-110 (trade name)" (manufactured by Momentive Performance Materials Japan LLC) was used. BN has a plate-like crystal particle shape similar to graphite, and has a thermal conductivity of 200 W/m·K in the in-plane direction, which is more than three times the thermal conductivity of 60 W/m·K in the thickness direction.

本実施例では熱可塑性樹脂と熱伝導性充填材粒子と用いてS0の工程で複合粒子を作製した。複合粒子は、主粒子(粒径が大きい粒子)として面内方向の平均粒径45μmのBNを用いた。粒径の大きい主粒子の周りの吸着粒子として熱可塑性樹脂PMMAを用いた。主粒子の平均粒径に対し吸着粒子の平均粒径は好適には1/10であるので4μmとした。 In this example, composite particles were produced in step S0 using a thermoplastic resin and thermally conductive filler particles. For the composite particles, BN having an average particle size of 45 μm in the in-plane direction was used as main particles (particles having a large particle size). A thermoplastic resin, PMMA, was used as the adsorbent particles around the large main particles. Since the average particle diameter of the adsorbent particles is preferably 1/10 of the average particle diameter of the main particles, it is set to 4 μm.

次にPMMA粒子表面の親水性を高めると同時に負の表面電位を高めさせるため、濃度5 g/lの界面活性剤であるデオキシコール酸ナトリウム(SDC)にPMMA粒子を浸漬した。次に高分子電解質である濃度50g/l のポリジアリルジメチルアンモニウムクロリド(PDDA),濃度10g/lのポリスチレンスルホン酸ナトリウム(PSS)の順にPMMA粒子を浸漬した。SDC、PDDAおよびPSSの濃度はそれらがPMMA表面全体に吸着するために十分な濃度とした。各溶液に浸漬する前にPMMA粒子はイオン交換水中での洗浄処理を実施した。最終的にPMMA粒子の表面電位は負に調整した。一方、同様な方法でBN粒子の表面電位を最終的に正に調整し、主粒子とした。表面電位を負としたPMMA吸着粒子および表面電位を正としたBN主粒子をイオン交換水中で混合し、静電相互作用によりBN主粒子表面にPMMA吸着粒子が吸着した複合粒子を作製した。図6はBN単粒子の外表面に平均直径4μm程度のPMMA粒子が均一に吸着していることを示した電子顕微鏡写真である。BN単粒子の板面は球形のPMMA粒子で覆われており、板の厚さ方向の端部はPMMA粒子が吸着していない。 Next, the PMMA particles were immersed in sodium deoxycholate (SDC), a surfactant, at a concentration of 5 g/l in order to increase the hydrophilicity of the PMMA particle surface and at the same time increase the negative surface potential. Next, the PMMA particles were immersed in polyelectrolyte polydiallyldimethylammonium chloride (PDDA) with a concentration of 50 g/l and polystyrene sodium sulfonate (PSS) with a concentration of 10 g/l in this order. The concentrations of SDC, PDDA and PSS were sufficient for their adsorption over the entire PMMA surface. The PMMA particles were washed in deionized water before being immersed in each solution. Finally, the surface potential of PMMA particles was adjusted negatively. On the other hand, the BN particles were finally adjusted to have a positive surface potential in the same manner as the main particles. PMMA-adsorbed particles with a negative surface potential and BN main particles with a positive surface potential were mixed in ion-exchanged water to fabricate composite particles in which the PMMA-adsorbed particles were adsorbed on the surface of the BN main particles by electrostatic interactions. FIG. 6 is an electron micrograph showing that PMMA particles with an average diameter of about 4 μm are uniformly adsorbed on the outer surface of BN single particles. The plate surface of the BN single particle is covered with spherical PMMA particles, and no PMMA particles are adsorbed on the edges in the thickness direction of the plate.

S0の工程で作製された複合粒子は、S1の工程で導電率1~10μS/cmのイオン交換水の中に溶かしスラリー状にした。 The composite particles produced in step S0 were dissolved in deionized water having a conductivity of 1 to 10 μS/cm in step S1 to form a slurry.

S2の工程では、S1の工程で作られたスラリーを12mm×40mmで厚さ3mmの板状キャビティを有する型枠(図7)に導入した。 In step S2, the slurry prepared in step S1 was introduced into a mold (FIG. 7) having a plate-like cavity measuring 12 mm×40 mm and 3 mm thick.

S3の工程で、S2の工程でスラリーが入った型枠を図中の矢印の方向に遠心分離機を用いて遠心力を与えた。遠心力は複合粒子1個あたり約5μNで、10分間与え、固液分離すると共に複合粒子を沈降させた。粒子1個当たりの遠心力は、遠心力=(回転数)×(回転中心からの距離)×(複合粒子の重量)で算出した。ここで、回転数:3000rpm、回転中心から複合粒子までの平均距離:1700mm、複合粒子の重量:2.87×10-9g[=(PMMA密度:1.2g/cm3)×(PMMA粒子体積:3.35×10-11cm3)+(BN密度:2.1g/cm3)×(BN体積:1.35×10-9cm3)]であった。型枠の低面(A面)と交差する方向に遠心力を作用することで複合粒子の板状面が型枠の底面に向くように沈降し、スラリーの液体が型枠の隙間から逃げることにより12mm×13mmで厚さ3mmの複合粒子の堆積物ができた。 In step S3, centrifugal force was applied to the formwork containing the slurry in step S2 in the direction of the arrow in the figure using a centrifuge. A centrifugal force of about 5 μN per composite particle was applied for 10 minutes to effect solid-liquid separation and sedimentation of the composite particles. The centrifugal force per particle was calculated by centrifugal force = (number of rotations) x (distance from center of rotation) x (weight of composite particles). Here, the number of revolutions: 3000 rpm, the average distance from the center of rotation to the composite particles: 1700 mm, the weight of the composite particles: 2.87 × 10 -9 g [= (PMMA density: 1.2 g/cm 3 ) × (PMMA particles Volume: 3.35×10 −11 cm 3 )+(BN density: 2.1 g/cm 3 )×(BN volume: 1.35×10 −9 cm 3 )]. By applying centrifugal force in a direction that intersects the lower surface (A surface) of the formwork, the plate-like surface of the composite particles settles toward the bottom surface of the formwork, and the slurry liquid escapes through the gaps in the formwork. yielded a deposit of composite particles 12 mm x 13 mm and 3 mm thick.

S4の工程で遠心力の作用方向と同方向に型枠の開口部3と同一形状の板で機械的圧力を加え12mm×13mmで厚さ3mmの堆積物を12mm×10mmで厚さ3mmまで圧縮し成形体とした。 In step S4, mechanical pressure is applied in the same direction as the centrifugal force acting direction with a plate having the same shape as the opening 3 of the formwork, and the deposit of 12 mm × 13 mm and 3 mm thick is compressed to 12 mm × 10 mm and 3 mm thick. A molded body was obtained.

S5の工程では、S4の工程で作製した成形体を型枠から取り外した。 In step S5, the compact produced in step S4 was removed from the mold.

S6の工程ではS5の工程で作製した成形体の3mmの厚さ方向にPMMAの融点以上の温度160℃でホットプレスを1時間行った。PMMAでは80~100℃で軟化し、160~260℃で溶融し熱成形するため、ここでは160℃でホットプレスした。ホットプレス圧力はφ10mmの面で50MPaの圧力である。 In the step of S6, hot pressing was performed for 1 hour at a temperature of 160° C., which is higher than the melting point of PMMA, in the thickness direction of 3 mm of the compact produced in the step of S5. PMMA softens at 80 to 100°C and melts and thermoforms at 160 to 260°C, so hot pressing was performed at 160°C here. The hot press pressure is 50 MPa on the surface of φ10 mm.

図8は、このような工程で作製した複合絶縁板の断面の電子顕微鏡写真である。複合絶縁板の電界がかかる厚さ方向(写真の上下方向)に板状のBN粒子は面内方向が揃った配向を示している上、BN粒子の外表面はPMMAが被覆した状態であり、一部のBN粒子同士は厚さ方向の面が接触した状態となっている。これは、BN粒子の表面に適正粒径のPMMA粒子が均一に付着した複合粒子が加熱によってそのPMMA粒子が融解してBN粒子の表面を被覆すると同時に複合絶縁板の厚さ方向のプレス圧によってBN粒子端面が接触したためである。 FIG. 8 is an electron micrograph of a cross section of a composite insulating plate produced by such a process. The plate-shaped BN particles are oriented in the direction of the thickness of the composite insulating plate (vertical direction in the photo) where the electric field is applied, and the outer surface of the BN particles is coated with PMMA. Some of the BN particles are in contact with each other in the thickness direction. This is because the composite particles, in which PMMA particles of an appropriate particle size are uniformly attached to the surface of the BN particles, are melted by heating and the PMMA particles cover the surface of the BN particles. This is because the end surfaces of the BN particles are in contact with each other.

本実施例の複合絶縁板の密度は1.84g/cm3、BN粒子の配合量は59体積%であった。ここで用いたBN粒子の密度は2.1g/cm3、PMMA粒子密度は1.2g/cm3であった。 The composite insulating plate of this example had a density of 1.84 g/cm 3 and a blending amount of BN particles of 59% by volume. The BN particles used here had a density of 2.1 g/cm 3 and the PMMA particles had a density of 1.2 g/cm 3 .

(実験例2)
図5中のBのプロットの試料Bは、試料Aの製造方法および条件の内、S4の工程を省略して、S4の押圧工程の効果を検証した試料である。すなわち、S3工程で遠心分離機によって複合粒子を配向させ、固液分離で液分を除去した堆積物を作製した後、S4の工程での遠心力の作用方向の機械的圧力を印加しないでS5の工程で型枠から取り外し、S6の工程でホットプレスした試料である。BはAに比べ絶縁破壊強度は20%程度高いが、熱伝導率は1/2程度であった。また、試料Bの複合絶縁板の密度は1.82g/cm3、BN粒子の配合量は57体積%であった。試料Aの密度は試料Bに比べ0.02g/cm3増大しており、省略したS4の工程は複合粒子の沈降した堆積物の方向と同じ方向に力を加えることで複合絶縁板の密度を高める効果がある。さらに、試料A のBNの配向度はS4の工程により増加する。このため、試料Aの厚さ方向熱流抵抗が面全体として試料Bに比べ低くなったため熱伝導率が大幅に下がった。また、試料AのBNの配向度は試料Bに比べ高く、電界方向にBN粒子の面内方向の界面が多くなるため、放電がBN界面の面内方向に進展しやすくなり絶縁破壊強度が低下した。つまり、遠心力および機械力によって配向の程度および密度を制御して所要の絶縁破壊強度、熱伝導率の複合絶縁板を製作することができる。ここでは、述べていないが、配向度と機械強度は密接な関係にあるため、本発明の工程条件を組み合わせて使用用途に応じた機械強度を有し、良好な熱伝導率で十分な絶縁破壊強度の複合絶縁板を製作することができる。
(Experimental example 2)
Sample B plotted at B in FIG. 5 is a sample for which the effect of the pressing step of S4 was verified by omitting the step of S4 in the manufacturing method and conditions of sample A. That is, in step S3, the composite particles are oriented by a centrifuge, liquid is removed by solid-liquid separation, and a sediment is produced. It is a sample that was removed from the formwork in the step of , and hot-pressed in the step of S6. B had a dielectric breakdown strength about 20% higher than that of A, but its thermal conductivity was about half. The composite insulating plate of Sample B had a density of 1.82 g/cm 3 and a blending amount of BN particles of 57% by volume. The density of sample A increased by 0.02 g/ cm3 compared to sample B, and the omitted step S4 increased the density of the composite insulating plate by applying a force in the same direction as the sedimentation of the composite particles. It has a boosting effect. Furthermore, the degree of orientation of BN in sample A is increased by the step of S4. As a result, the through-thickness heat flow resistance of Sample A was lower than that of Sample B over the entire surface, and the thermal conductivity was greatly reduced. In addition, the degree of orientation of BN in sample A is higher than in sample B, and the number of interfaces in the in-plane direction of the BN particles in the direction of the electric field increases, so the discharge easily progresses in the in-plane direction of the BN interface, and the dielectric breakdown strength decreases. did. That is, by controlling the degree of orientation and density by centrifugal force and mechanical force, it is possible to manufacture a composite insulating plate having required dielectric breakdown strength and thermal conductivity. Although not described here, since the degree of orientation and mechanical strength are closely related, the process conditions of the present invention are combined to have mechanical strength according to the application, good thermal conductivity and sufficient dielectric breakdown. A strong composite insulating board can be fabricated.

(実験例3)
図5中のCのプロットの試料Cは複合絶縁板の密度の影響を見るために、複合粒子におけるBN粒子表面のPMMA粒子の吸着量を約半分程度にし、試料Aと同一方法、同一条件で作製した試料である。この試料の絶縁破壊強度は試料Aに比べ平均値で10%程度低下したが、熱伝導率は逆に平均値で10%程度上昇した。本実施例の複合絶縁板の密度は1.94g/cm3、BN粒子の配合量は68体積%であった。複合絶縁板の密度が0.1g/cm3増大した。これは、複合絶縁板のPMMA粒子数の減少によりBN粒子配合量が試料Aの59体積%から68体積%と9%も増大したため、熱流パスが増加し熱伝導率が増加した。BN粒子の増加は電気的な弱点の増加となり、試料Cの絶縁破壊強度が試料Aのそれに比べ低下したと考えられる。
(Experimental example 3)
In order to see the effect of the density of the composite insulating plate, sample C plotted in FIG. This is the prepared sample. The dielectric breakdown strength of this sample was lowered by about 10% in average value compared to sample A, but the thermal conductivity was increased by about 10% in average value. The composite insulating plate of this example had a density of 1.94 g/cm 3 and a blending amount of BN particles of 68% by volume. The density of the composite insulating board increased by 0.1 g/ cm3 . This is because the amount of BN particles increased from 59% by volume of sample A to 68% by volume due to the decrease in the number of PMMA particles in the composite insulating plate, which increased the heat flow path and thermal conductivity. It is considered that the increase in BN particles increased the number of electrical weak points, and the dielectric breakdown strength of sample C was lower than that of sample A.

(実験例4)
実験例1で説明したS1~S5の工程で作製した成形体をS6の工程で温度を120℃、200℃と変化させて3mmの厚さ方向にホットプレスを1時間行った。ホットプレス圧力はφ10mmの面で50MPaの圧力である。図9において、横軸のホットプレス温度に対して、左側縦軸は絶縁破壊強度、右側縦軸は熱伝導率であり、ホットプレス温度が250℃で作製した試料の絶縁破壊強度は160℃のものに比べ10%程度低下したが、熱伝導率は1.7倍の33.4w/m・Kとなった。
(Experimental example 4)
The compact produced in the steps S1 to S5 described in Experimental Example 1 was hot-pressed in the thickness direction of 3 mm in the step S6 at a temperature of 120° C. and 200° C. for 1 hour. The hot press pressure is 50 MPa on the surface of φ10 mm. In FIG. 9, with respect to the hot pressing temperature on the horizontal axis, the left vertical axis is the dielectric breakdown strength, and the right vertical axis is the thermal conductivity. Although it was about 10% lower than the one, the thermal conductivity was 33.4 w/m·K, which is 1.7 times.

以上のように製造方法にかかる実施形態によって複合絶縁板を製造することができる。本発明は、かかる製造方法によって製造された複合絶縁板を含むものである。 As described above, a composite insulating board can be manufactured according to the embodiment of the manufacturing method. The present invention includes a composite insulating board manufactured by such a manufacturing method.

1 熱伝導性充填材粒子
2 熱可塑性樹脂
3 型枠の開口部(キャビティの開口部)
1 Thermally conductive filler particles 2 Thermoplastic resin 3 Mold opening (cavity opening)

Claims (7)

ポリメタクリル酸メチル(PMMA)による 熱可塑性樹脂と、その熱可塑性樹脂よりも熱伝導性の高い窒化ホウ素(BN)による板状の熱伝導性充填材粒子とを含み、厚み方向の熱伝導率が15W/m・K以上で35W/m・K以下であり、厚み方向に対する絶縁破壊強度が95kV/mm以上である複合絶縁板であって、
平均粒径4μmの 前記熱可塑性樹脂による母材の中に平均粒径を45μmとする前記熱伝導性充填材粒子が分散され、かつ、該熱伝導性充填材粒子の面内方向が所定方向に配向されており、
前記複合絶縁板の密度を1.82~1.94g/cm するものである
ことを特徴とする複合絶縁板。
by polymethyl methacrylate (PMMA) Thermoplastics and their higher thermal conductivity than thermoplasticsby boron nitride (BN)A composite comprising plate-shaped thermally conductive filler particles, a thermal conductivity in the thickness direction of 15 W/m·K or more and 35 W/m·K or less, and a dielectric breakdown strength in the thickness direction of 95 kV/mm or more An insulating plate,
with an average particle size of 4 μm The thermoplastic resinaccording toThe average grain size in the base material45The thermally conductive filler particles of μm are dispersed, and the in-plane direction of the thermally conductive filler particles is oriented in a predetermined direction,
The density of the composite insulating plate is set to 1.8.2 to 1.94g/cm 3 Whenis to
A composite insulating board characterized by:
前記熱伝導性充填材粒子は、前記熱可塑性樹脂によって被覆された状態で相互に接着されている請求項1に記載の複合絶縁板。 2. The composite insulating board according to claim 1, wherein said thermally conductive filler particles are adhered to each other while being coated with said thermoplastic resin. 前記熱伝導性充填材粒子の面内方向は、熱を伝播させるべき方向に配向させるときの熱伝導率で表される配向度に基づき、所望の配向度によって配向されている請求項1または2に記載の複合絶縁板。 3. The in-plane direction of the thermally conductive filler particles is oriented according to a desired degree of orientation based on the degree of orientation represented by the thermal conductivity when oriented in the direction in which heat is to be propagated. The composite insulating plate according to . 熱可塑性樹脂と、その熱可塑性樹脂よりも熱伝導性の高い板状の熱伝導性充填材粒子とを含み、厚み方向の熱伝導率が15W/m・K以上で35W/m・K以下であり、厚み方向に対する絶縁破壊強度が95kV/mm以上である 複合絶縁板を製造するための方法であって、
熱伝導性充填材粒子を主粒子とし、その主粒子表面に熱可塑性樹脂粒子を吸着させてなる複合粒子が液体中に含まれたものであって、該熱可塑性樹脂の溶融粘度よりも低い粘性のスラリーを作製するスラリー作製工程と、
所定の容積を有するキャビティ内に前記スラリー作製工程により作製したスラリーを導入する導入工程と、
前記導入工程でキャビティ内に導入したスラリーに対し所定方向へ遠心力を作用させることにより、固液分離により複合粒子を前記液体から分離させつつキャビティの遠心力の作用方向に対して交差する面へ堆積させる遠心分離工程と、
前記遠心分離工程によりキャビティに堆積させた前記複合粒子の堆積物に対し、前記遠心力の作用方向と同じ方向へ押圧して成形体を形成する押圧工程と、
前記押圧工程により作られた前記成形体をキャビティから取り出し、前記熱可塑性樹脂粒子を構成する樹脂の溶融温度以上、耐熱温度以下の環境下にて、前記押圧工程での押圧方向と交差する方向へプレスするホットプレス工程と、
を含むことを特徴とする複合絶縁板の製造方法。
It contains a thermoplastic resin and plate-shaped thermally conductive filler particles having higher thermal conductivity than the thermoplastic resin, and has a thermal conductivity in the thickness direction of 15 W/m·K or more and 35 W/m·K or less. Yes, and the dielectric breakdown strength in the thickness direction is 95 kV/mm or more A method for manufacturing a composite insulating board, comprising:
Composite particles comprising thermally conductive filler particles as main particles and thermoplastic resin particles adsorbed on the surfaces of the main particles are contained in a liquid, and the viscosity is lower than the melt viscosity of the thermoplastic resin. A slurry preparation step of preparing a slurry of
an introduction step of introducing the slurry prepared in the slurry preparation step into a cavity having a predetermined volume;
By applying a centrifugal force in a predetermined direction to the slurry introduced into the cavity in the introduction step, the composite particles are separated from the liquid by solid-liquid separation, and the composite particles are separated from the liquid on a plane intersecting the direction of action of the centrifugal force of the cavity. a sedimentary centrifugation step;
A pressing step of pressing the deposit of the composite particles deposited in the cavity by the centrifugal separation step in the same direction as the direction of action of the centrifugal force to form a compact;
The molded body produced by the pressing step is taken out from the cavity, and the resin constituting the thermoplastic resin particles is removed.Melting temperature or higher, heat resistant temperature or lowerA hot pressing step of pressing in a direction intersecting the pressing direction in the pressing step under the environment of
A method of manufacturing a composite insulating board, comprising:
前記複合粒子が、板状の熱伝導性充填材粒子に熱可塑性樹脂粒子を吸着させたものであって、熱伝導性充填材粒子の平均粒径に対して熱可塑性樹脂粒子の平均粒径が1/9から1/15であることを特徴とする請求項に記載の複合絶縁板の製造方法。 The composite particles are obtained by adsorbing thermoplastic resin particles to plate-like thermally conductive filler particles, and the average particle size of the thermoplastic resin particles is greater than the average particle size of the thermally conductive filler particles. 5. The method of manufacturing a composite insulating board according to claim 4 , wherein the ratio is 1/9 to 1/15. 前記複合粒子は、液体中で、表面の電荷を正または負に帯電させた熱伝導性充填材粒子と該熱伝導性充填材粒子とは逆の電荷を表面に帯電させた熱可塑性樹脂粒子とを混合し、前記熱伝導性充填材粒子の表面に前記熱可塑性樹脂粒子を吸着させてなることを特徴とする請求項4または5に記載の複合絶縁板の製造方法。 The composite particles are composed of thermally conductive filler particles whose surfaces are positively or negatively charged and thermoplastic resin particles whose surfaces are charged oppositely to the thermally conductive filler particles in a liquid. 6. The method for producing a composite insulating board according to claim 4 , wherein the thermoplastic resin particles are adsorbed on the surfaces of the thermally conductive filler particles. 前記スラリーを構成する液体の動粘土が常温で1センチストークス以下であることを特徴とする請求項4~6のいずれかに記載の複合絶縁板の製造方法。
7. The method for producing a composite insulating board according to claim 4 , wherein the liquid kinematic clay constituting said slurry has a viscosity of 1 centistoke or less at room temperature.
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