JP7168094B2 - 半導体装置とその製造方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 159
- 238000004519 manufacturing process Methods 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims description 108
- 239000011229 interlayer Substances 0.000 claims description 56
- 230000004888 barrier function Effects 0.000 claims description 37
- 210000000746 body region Anatomy 0.000 claims description 36
- 229910052710 silicon Inorganic materials 0.000 claims description 30
- 239000010703 silicon Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 28
- 230000001154 acute effect Effects 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical group [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 28
- 229910052782 aluminium Inorganic materials 0.000 description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 13
- 239000002344 surface layer Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 229910052698 phosphorus Inorganic materials 0.000 description 6
- 239000011574 phosphorus Substances 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- -1 boron ions Chemical class 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000036413 temperature sense Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Description
Claims (4)
- 半導体装置であって、
半導体基板と、
前記半導体基板の一方の主面に設けられているトレンチゲート部と、
前記半導体基板の前記一方の主面の上方を被覆している表面電極と、
前記トレンチゲート部を前記表面電極から絶縁しており、前記半導体基板の前記一方の主面よりも上方に位置する層間絶縁膜と、を備えており、
前記半導体基板は、
第1導電型のドリフト領域と、
前記ドリフト領域の上方に設けられている第2導電型のボディ領域と、
前記ボディ領域の少なくとも一部の下方に設けられている第1導電型のバリア領域と、
前記半導体基板の前記一方の主面から前記バリア領域まで伸びており、前記表面電極にショットキー接触する第1導電型のピラー領域と、を有しており、
前記表面電極は、シリコンを含む合金であり、
前記層間絶縁膜は、頂面と側面の成す角が鋭角であり、
前記層間絶縁膜の前記頂面と前記側面はいずれも、前記表面電極に接している、半導体装置。 - 前記頂面に隣接する前記側面の一部が凹状の曲面で構成されている、請求項1に記載の半導体装置。
- 前記表面電極が、アルミニウムシリコンである、請求項1又は2に記載の半導体装置。
- 半導体基板と、前記半導体基板の一方の主面に設けられているトレンチゲート部と、前記半導体基板の前記一方の主面の上方を被覆している表面電極と、前記トレンチゲート部を前記表面電極から絶縁している層間絶縁膜と、を備えており、前記半導体基板は、第1導電型のドリフト領域と、前記ドリフト領域の上方に設けられている第2導電型のボディ領域と、前記ボディ領域の少なくとも一部の下方に設けられている第1導電型のバリア領域と、前記半導体基板の前記一方の主面から前記バリア領域まで伸びており、前記表面電極にショットキー接触する第1導電型のピラー領域と、を有しており、前記表面電極が、シリコンを含む合金である、半導体装置の製造方法であって、
前記トレンチゲート部が形成された前記半導体基板の前記一方の主面上に前記層間絶縁膜を成膜する工程と、
前記トレンチゲート部が形成されている位置に対応した前記層間絶縁膜上にマスクをパターニングする工程と、
等方性のエッチング技術を利用して、前記層間絶縁膜の一部をエッチングし、これにより、前記層間絶縁膜の頂面と側面の成す角を鋭角とする、工程と、を備えている、半導体装置の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2019/033386 WO2021038699A1 (ja) | 2019-08-26 | 2019-08-26 | 半導体装置とその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JPWO2021038699A1 JPWO2021038699A1 (ja) | 2021-11-25 |
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JP2003258255A (ja) | 2002-02-28 | 2003-09-12 | Toko Inc | Mosトランジスタとその製造方法 |
JP2010147380A (ja) | 2008-12-22 | 2010-07-01 | Denso Corp | 半導体装置の製造方法 |
US20150221735A1 (en) | 2014-02-06 | 2015-08-06 | Infineon Technologies Austria Ag | Method of Forming a Trench Using Epitaxial Lateral Overgrowth and Deep Vertical Trench Structure |
JP2017028236A (ja) | 2015-07-16 | 2017-02-02 | 富士電機株式会社 | 半導体装置 |
US9786754B1 (en) | 2017-02-06 | 2017-10-10 | Vanguard International Semiconductor Corporation | Method for forming semiconductor device structure |
JP2018125443A (ja) | 2017-02-01 | 2018-08-09 | トヨタ自動車株式会社 | 半導体装置 |
JP2018181949A (ja) | 2017-04-06 | 2018-11-15 | 三菱電機株式会社 | 半導体装置、半導体装置の製造方法、および電力変換装置 |
JP2019003967A (ja) | 2017-06-09 | 2019-01-10 | 国立研究開発法人産業技術総合研究所 | 半導体装置および半導体装置の製造方法 |
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JP2003258255A (ja) | 2002-02-28 | 2003-09-12 | Toko Inc | Mosトランジスタとその製造方法 |
JP2010147380A (ja) | 2008-12-22 | 2010-07-01 | Denso Corp | 半導体装置の製造方法 |
US20150221735A1 (en) | 2014-02-06 | 2015-08-06 | Infineon Technologies Austria Ag | Method of Forming a Trench Using Epitaxial Lateral Overgrowth and Deep Vertical Trench Structure |
JP2017028236A (ja) | 2015-07-16 | 2017-02-02 | 富士電機株式会社 | 半導体装置 |
JP2018125443A (ja) | 2017-02-01 | 2018-08-09 | トヨタ自動車株式会社 | 半導体装置 |
US9786754B1 (en) | 2017-02-06 | 2017-10-10 | Vanguard International Semiconductor Corporation | Method for forming semiconductor device structure |
JP2018181949A (ja) | 2017-04-06 | 2018-11-15 | 三菱電機株式会社 | 半導体装置、半導体装置の製造方法、および電力変換装置 |
JP2019003967A (ja) | 2017-06-09 | 2019-01-10 | 国立研究開発法人産業技術総合研究所 | 半導体装置および半導体装置の製造方法 |
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CN114287053A (zh) | 2022-04-05 |
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