JP7162977B2 - カセットホルダ - Google Patents
カセットホルダ Download PDFInfo
- Publication number
- JP7162977B2 JP7162977B2 JP2018139484A JP2018139484A JP7162977B2 JP 7162977 B2 JP7162977 B2 JP 7162977B2 JP 2018139484 A JP2018139484 A JP 2018139484A JP 2018139484 A JP2018139484 A JP 2018139484A JP 7162977 B2 JP7162977 B2 JP 7162977B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- pair
- cassette holder
- side walls
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67326—Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Buffer Packaging (AREA)
- Laminated Bodies (AREA)
Description
1a フレームユニット
3 テープ
5 フレーム
7 デバイス
9 カセット
9a,9b 側壁
9c,9d 壁
11 搬出入口
13a,13b ガイドレール
15 オペレータ
2 カセットホルダ
4 カセット収容部
4a 後壁
6 底面部
6a,6b 端部
8a,8b 突き当て側壁
10 移動吸収支持部
10a 壁部
10b 固定部
12 支持板
12a,12b 端部
14a,14b 側壁
16a,16b,16c 弾性部材
18 記録ユニット
20 カメラ
22 加速度センサ
24 情報送信部
26 記憶部
28 搬送台車
28a 支柱
28b 車輪
28c 網棚
30 収容棚
30a 側壁
30b 棚板
Claims (6)
- ウェーハを収容するカセットを支持するカセットホルダであって、
該カセットが載置される長方形状の底面部と、長方形状の該底面部の一端部及び該一端部に対向する他端部からそれぞれ立設し該カセットの一対の側面にそれぞれ対面する一対の突き当て側壁と、該底面部の該一端部及び該他端部を接続する後端部から立設する後壁と、を備えるカセット収容部と、
該カセット収容部が該カセット収容部の該底面部に沿った方向へ所定量移動または所定量傾斜するのを許容しつつ該カセット収容部を支持する移動吸収支持部と、
該カセットホルダを移動させるオペレータを撮影するカメラと、
該カメラで撮影した画像データを記録する画像データ記録部と、を備えることを特徴とするカセットホルダ。 - 該移動吸収支持部は、
該カセット収容部の該底面部よりも大きく、該カセット収容部を摺動可能に支持する長方形状の支持板と、
該支持板の一端部及び該一端部に対向する他端部からそれぞれ立設し、該カセット収容部の該一対の突き当て側壁にそれぞれ対面する一対の側壁と、
該支持板の該一端部及び該他端部を接続する後端部から立設し、該カセット収容部の該後壁に対面する壁部と、
該一対の側壁の一方、該一対の側壁の他方、及び、該壁部のいずれかと、該支持板に支持された該カセット収容部と、に接続された弾性部材と、
を有することを特徴とする請求項1記載のカセットホルダ。 - 加速度センサと、
該加速度センサで検出された振動データを記録する振動データ記録部と、
をさらに備えることを特徴とする請求項1又は請求項2に記載のカセットホルダ。 - 該振動データ記録部で記録した該振動データを送信する情報送信部をさらに備えることを特徴とする請求項3記載のカセットホルダ。
- 該画像データ記録部で記録した画像データを送信する情報送信部をさらに備えることを特徴とする請求項1記載のカセットホルダ。
- 該カセットを搬送する搬送台車に固定されることを特徴とする請求項1乃至5のいずれか1項に記載のカセットホルダ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018139484A JP7162977B2 (ja) | 2018-07-25 | 2018-07-25 | カセットホルダ |
CN201910665011.4A CN110783241B (zh) | 2018-07-25 | 2019-07-23 | 盒保持器 |
TW108126100A TWI811405B (zh) | 2018-07-25 | 2019-07-24 | 晶匣固持具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018139484A JP7162977B2 (ja) | 2018-07-25 | 2018-07-25 | カセットホルダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020017625A JP2020017625A (ja) | 2020-01-30 |
JP7162977B2 true JP7162977B2 (ja) | 2022-10-31 |
Family
ID=69383856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018139484A Active JP7162977B2 (ja) | 2018-07-25 | 2018-07-25 | カセットホルダ |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7162977B2 (ja) |
CN (1) | CN110783241B (ja) |
TW (1) | TWI811405B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111516977B (zh) * | 2020-05-13 | 2021-12-24 | 贵州云上鲲鹏科技有限公司 | 一种基于计算机硬件运输可降低磕碰的包装装置 |
CN213355191U (zh) * | 2021-03-19 | 2021-06-04 | 台湾积体电路制造股份有限公司 | 晶圆载具的存储装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005053705A (ja) | 2004-11-12 | 2005-03-03 | Sharp Corp | ガラス基板の搬送方法および搬送システム |
JP2007153355A (ja) | 2005-12-01 | 2007-06-21 | Nitto Denko Corp | 板状物品移送用台車 |
JP2014078656A (ja) | 2012-10-12 | 2014-05-01 | Disco Abrasive Syst Ltd | 収容カセット |
JP2015074547A (ja) | 2013-10-10 | 2015-04-20 | 株式会社ダイフク | 天井搬送車 |
JP2017212322A (ja) | 2016-05-25 | 2017-11-30 | 信越ポリマー株式会社 | 基板収納容器及びその管理システム並びに基板収納容器の管理方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06329206A (ja) * | 1993-05-18 | 1994-11-29 | Toshiba Corp | ウエハカセット、ウエハカセット搬送用ハンド、及び、ウエハカセット形状検出装置 |
JP2013001521A (ja) * | 2011-06-17 | 2013-01-07 | Hitachi Ltd | 物品搬送管理装置、物品搬送管理方法およびプログラム |
JP5687575B2 (ja) * | 2011-07-11 | 2015-03-18 | 株式会社東芝 | ウェハ搬送容器保護ケース |
-
2018
- 2018-07-25 JP JP2018139484A patent/JP7162977B2/ja active Active
-
2019
- 2019-07-23 CN CN201910665011.4A patent/CN110783241B/zh active Active
- 2019-07-24 TW TW108126100A patent/TWI811405B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005053705A (ja) | 2004-11-12 | 2005-03-03 | Sharp Corp | ガラス基板の搬送方法および搬送システム |
JP2007153355A (ja) | 2005-12-01 | 2007-06-21 | Nitto Denko Corp | 板状物品移送用台車 |
JP2014078656A (ja) | 2012-10-12 | 2014-05-01 | Disco Abrasive Syst Ltd | 収容カセット |
JP2015074547A (ja) | 2013-10-10 | 2015-04-20 | 株式会社ダイフク | 天井搬送車 |
JP2017212322A (ja) | 2016-05-25 | 2017-11-30 | 信越ポリマー株式会社 | 基板収納容器及びその管理システム並びに基板収納容器の管理方法 |
Also Published As
Publication number | Publication date |
---|---|
CN110783241A (zh) | 2020-02-11 |
TWI811405B (zh) | 2023-08-11 |
CN110783241B (zh) | 2024-02-23 |
TW202007611A (zh) | 2020-02-16 |
JP2020017625A (ja) | 2020-01-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7162977B2 (ja) | カセットホルダ | |
TWI449116B (zh) | Container exchange system, container exchange method and substrate processing system | |
CN107804641B (zh) | 物品输送装置 | |
TWI816833B (zh) | 搬送系統 | |
US11001442B2 (en) | Stocking system | |
CN107731708B (zh) | 判定装置 | |
US20090022575A1 (en) | Article storing apparatus | |
KR20170027304A (ko) | 기판 처리 장치 및 기판 반송 방법 그리고 기판 반송 프로그램을 기억한 컴퓨터 판독 가능한 기억 매체 | |
KR101511731B1 (ko) | 웨이퍼 운반장치 | |
KR100956807B1 (ko) | 기판 반송 장치 및 그를 사용한 기판 반송 방법 | |
KR102020227B1 (ko) | 캐리어 이송 장치 및 방법 | |
KR20070090840A (ko) | 스토커 | |
TWI383930B (zh) | Panel box | |
JP2010241547A (ja) | 走行車システム | |
WO2011141966A1 (ja) | 移載装置 | |
KR100689629B1 (ko) | 프로브 카드 보관 케이스 | |
CN115410966A (zh) | 便携式机器人半导体吊舱装载机及其执行方法 | |
JP2006245486A (ja) | ストッカーの棚フレーム構造 | |
JP2014078656A (ja) | 収容カセット | |
KR20150021390A (ko) | 기판수납용 매거진 및 이를 구비한 기판수납용 매거진 시스템 | |
KR101333422B1 (ko) | 전자 부품 핸들링 장치 및 시스템 | |
CN219958942U (zh) | 一种晶圆载盒的上料转换装置及其形成的载盒存储库 | |
KR20200123182A (ko) | 실장 장치 | |
CN210709456U (zh) | 运载装置 | |
TW202230567A (zh) | 晶粒儲料器、儲存晶粒載體的方法以及半導體晶粒製造系統 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210518 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220428 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220510 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220622 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20221018 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221018 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7162977 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |