JP7146245B2 - Fluid supply and recovery device - Google Patents

Description

The present invention relates to a fluid supply/recovery device capable of switching between supply and recovery of fluid.

This type of fluid supply and recovery device is used in various fields. For example, Patent Literature 1 discloses a system capable of filling a bulk storage tank with gas in a tank and recovering the gas in the bulk storage tank into the tank. In this system, by using one piston pump and one four-way switching valve for circulating gas, it is possible to switch between supply and recovery of gas while achieving compactness.

JP 2013-199982 A

In the system of Patent Literature 1, the entire flow path (pipe portion) used for gas supply is also used for gas recovery. However, such channel configurations may not be desired depending on the fluids to be supplied and collected.

For example, while it is strongly desired to suppress contamination of foreign matter in the fluid to be supplied to the outside, in the case where foreign matter may be mixed in the fluid to be recovered, the flow path configuration according to Patent Document 1 may prevent foreign matter from entering the fluid at the time of recovery. If the foreign matter can adhere to a wide area of the flow path shared by the supply and recovery, there is a risk that the fluid that is subsequently supplied will be contaminated by the foreign matter adhering to the flow path. In the case where it is strongly desired to suppress contamination of the fluid to be supplied in this way, the flow path configuration according to Patent Document 1 is not desirable. It is desirable to minimize the overlap between the channel and the channel used for recovery.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and is intended to suppress foreign matter mixed in the fluid at the time of collection from being mixed into the fluid to be supplied after the fluid is supplied after the fluid has been collected. It is an object of the present invention to provide a fluid supply and recovery device capable of

A fluid supply/recovery device according to the present invention includes a connection port connected to a tank that stores a fluid, and a fluid stored in the tank that is discharged to supply the fluid to the outside or recovers the fluid in the tank. a main flow passage having a supply/discharge port for receiving fluid from the outside; and a first on-off valve provided at a first position set in the main flow passage and opening and closing the main flow passage at the first position. a pump provided closer to the supply/discharge port than the first on-off valve in the main flow path and generating a driving force for causing fluid to flow from the connection port side to the supply/discharge port side; a second opening/closing valve provided at a second position set closer to the supply/discharge port than the pump in the flow path and opening/closing the main flow path at the second position; and the second opening/closing in the main flow path. A first recovery channel having an inlet connected to a portion between the valve and the supply/discharge port and an outlet connected to a portion of the main channel between the first on-off valve and the pump. and a third on-off valve provided in the first recovery channel for opening and closing the first recovery channel, and a portion between the pump and the second on-off valve in the main channel. and a second recovery channel having an inlet connected to the tank and an outlet connected to the tank; and a fourth on-off valve provided in the second recovery channel for opening and closing the second recovery channel. Prepare.

In the fluid supply and recovery device according to the present invention, the first on-off valve and the second on-off valve are set in the open state, the third on-off valve and the fourth on-off valve are set in the closed state, and the pump is driven. , the fluid stored in the tank can be supplied to the outside through the main channel. On the other hand, the first on-off valve and the second on-off valve are set to the closed state, the third on-off valve and the fourth on-off valve are set to the open state, and the pump is driven to supply and discharge the main flow path. A fluid is received from the port, and the fluid is transferred to the portion from the supply/discharge port in the main flow path to the connection position of the inflow port of the first recovery flow path, the first recovery flow path, and the first recovery flow path in the main flow path. It can be recovered into the tank via the second recovery channel and the portion between the connection position of the outlet of the channel and the connection position of the inlet of the second recovery channel. Here, the overlapping portion between the channel used for supply and the channel used for recovery is the portion from the supply/discharge port in the main channel to the connecting position of the inlet of the first recovery channel, and It is only the portion between the connecting position of the outflow port of the first recovery channel and the connecting position of the inflow port of the second recovery channel in the main channel. Therefore, the overlap between the flow path used for supply and the flow path used for recovery is suppressed, and as a result, foreign matter mixed in the fluid during recovery spreads over a wide range in the flow path used for fluid supply. Suppresses sticking situations. As a result, when the fluid is supplied after the fluid is recovered, it is possible to prevent the foreign matter mixed in the fluid at the time of recovery from being mixed into the fluid to be supplied thereafter.

Further, the fluid supply and recovery device according to the present invention is provided in a portion between the inflow port and the third on-off valve in the first recovery channel, and is a recovery device that captures foreign matter mixed in the fluid. A side filter may also be provided.

In this case, the fluid that has flowed into the first recovery channel during recovery of the fluid is filtered by the recovery-side filter, so that the fluid flowing out of the first recovery channel and flowing into the main channel flows through the main channel. Contamination is suppressed. As a result, it is possible to more effectively prevent the foreign matter mixed in the fluid at the time of collection from being mixed in the fluid to be supplied thereafter.

Further, the fluid supply and recovery device according to the present invention is provided at a portion between the second on-off valve in the main flow path and the connection position of the inflow port of the first recovery flow path, and the fluid is mixed in the fluid. You may further provide the supply side filter which catches the foreign material which carries out.

In this case, since the fluid from the tank is filtered by the supply-side filter when the fluid is supplied, it is possible to more effectively prevent the fluid from being supplied with foreign matter mixed therein.
In addition, since the collected fluid basically does not pass through the supply-side filter, the supply-side filter is prevented from being contaminated by the collected fluid. Suppressed. Also, the life of the supply side filter can be lengthened.

Further, in the fluid supply and recovery device according to the present invention, the portion between the pump and the connecting position of the inflow port of the second recovery channel in the main channel, and a bypass channel that connects a portion between the outflow port and the fourth on-off valve; and a bypass channel provided in the bypass channel from the main channel side to the second recovery channel side in the bypass channel It may further include a relief valve that opens when the pressure of the flowing fluid reaches or exceeds a threshold value to allow the fluid to flow from the main flow path into the second recovery flow path.

In this case, even if the second on-off valve and the fourth on-off valve are closed at the same time due to an operational error when supplying or recovering the fluid, the brine is returned to the tank through the bypass flow path. As a result, it is possible to prevent the pressure of the fluid from increasing due to the blocking of the second and fourth opening and closing valves, thereby avoiding damage to the flow path.

Further, the fluid supply and recovery device according to the present invention comprises: a flow meter provided in the main flow path for detecting the flow rate of the fluid that has passed through the pump from the start of driving of the pump; A control device that stops driving the pump when the detected flow rate of the fluid reaches or exceeds a pre-recorded threshold value.

In this case, by recording the desired amount of fluid to be supplied as a threshold in advance, the desired amount of fluid to be supplied can be accurately supplied.

Further, in the fluid supply and recovery device according to the present invention, the first on-off valve, the second on-off valve, the third on-off valve, and the fourth on-off valve are electromagnetic valves, and the controller controls the first on-off valve. By detecting the open/closed states of the valve, the second on-off valve, the third on-off valve, and the fourth on-off valve, it is determined whether or not the fluid is to be recovered, and when the fluid is to be recovered, the pump is operated. The driving of the pump may be stopped when the time from the start of driving exceeds a predetermined time.

When the device to which the fluid is supplied is, for example, a device with a complicated circuit configuration, such as a chiller device that controls the temperature with brine, when trying to recover the liquid from such a device, the recovered liquid contains many bubbles. If a flow meter attempts to measure a liquid containing many bubbles, the flow rate may not be detected accurately or the flow meter may be damaged. On the other hand, when collecting a desired amount of fluid based on a predetermined time, by properly setting the predetermined time, it is possible to more accurately and suppress undesirable equipment damage than when using a flow meter. The desired amount of fluid can be recovered while

It should be noted that the predetermined time is preferably derived in advance experimentally as a specific time determined according to the device to which the fluid is supplied.
Derivation of the predetermined time in this case and subsequent use of the predetermined time may be performed, for example, by the following procedure.
First, after driving the pump to supply a predetermined amount of fluid, particularly liquid, to the supply destination device, each on-off valve is switched to drive the pump again, and the predetermined amount of liquid is supplied from the supply destination device. and measuring a reference recovery time from the start of driving of the pump to the recovery of the predetermined amount of fluid.
Next, a step of recording the reference collection time in the control device as a predetermined time that serves as a reference for stopping the pump when the fluid is collected.
Thereafter, when recovering the fluid from the supply destination device, when the time from the start of driving of the pump exceeds the predetermined time, the step of stopping the driving of the pump is performed.

According to the present invention, when the fluid is supplied after the fluid has been recovered, it is possible to prevent foreign matter mixed in the fluid at the time of recovery from being mixed into the fluid to be supplied thereafter.

1 is a schematic diagram of a fluid supply and recovery device according to a first embodiment of the present invention; FIG. FIG. 4 is a diagram for explaining the state of the fluid supply/recovery device according to the first embodiment when fluid is supplied; FIG. 4 is a diagram for explaining a state of the fluid supply/recovery device according to the first embodiment at the time of fluid recovery; FIG. 5 is a schematic diagram of a fluid supply and recovery device according to a second embodiment of the present invention;

Each embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

<First embodiment>
FIG. 1 is a schematic diagram of a fluid supply/recovery device 1 according to a first embodiment of the invention. A fluid supply and recovery device 1 according to the present embodiment shown in FIG. , a pump 5, a second on-off valve 6, a supply-side filter 7, a first recovery channel 8 branched from the main channel 3 and connected to the main channel 3 again, and the first recovery channel 8 A third on-off valve 9 and a recovery-side filter 10 provided, a second recovery channel 11 connecting the main channel 3 and the tank 2, and a fourth on-off valve 12 provided in the second recovery channel 11. , is equipped with In addition, in FIG. 1, the range occupied by the main flow path 3 is schematically indicated by a chain double-dashed line.

In the fluid supply and recovery device 1 according to the present embodiment, as an example, the tank 2 stores the brine used in the chiller device, and is used to supply the brine to the chiller device. 2 is used for recovery. However, the fluid supplied and recovered by the fluid supply and recovery device 1 is not limited to brine, and may be gas or liquid other than brine. The constituent elements of the fluid supply/recovery device 1 will be described in detail below.

The main flow path 3 includes a connection port 3A connected to the tank 2, and the fluid stored in the tank 2 is discharged to the outside (chiller device in this example) or the fluid is supplied to the tank 2. It has a supply/discharge port 3B for receiving the fluid to be collected from the outside. The connection port 3A is detachable from the tank 2, and the supply/discharge port 3B is detachable from the chiller device in this example.

The first on-off valve 4 is provided at a first position P1 set in the main flow path 3 and configured to open and close the main flow path 3 at the first position P1. Although the first on-off valve 4 in the present embodiment is a manual on-off valve, it is not particularly limited, and may be an electromagnetic valve, an air operated valve, or the like. Also, the first position P1 is set to a position near the tank 2 when the main flow path 3 is connected to the tank 2, but such a position is not particularly limited.

The pump 5 is provided closer to the supply/discharge port 3B than the first on-off valve 4 in the main flow path 3, and is used to flow the fluid from the connection port 3A side to the supply/discharge port 3B side in the main flow path 3. It is designed to generate a driving force. The pump 5 in the present embodiment is, for example, a centrifugal pump that rotates in one direction, and the inverter 50 controls the number of revolutions, thereby controlling the flow rate of the fluid to be discharged. The pump 5 may not be a centrifugal pump, but may be another non-displacement pump or a positive displacement pump such as a piston pump.

The second on-off valve 6 is provided at a second position P2 set closer to the supply/discharge port 3B than the pump 5 in the main flow path 3, and is configured to open and close the main flow path 3 at the second position P2. there is The second on-off valve 6 in the present embodiment is also a manually operated on-off valve like the first on-off valve 4, but is not particularly limited, and may be an electromagnetic valve, an air operated valve, or the like. In addition, in the illustrated example, the second position P2 is set closer to the supply/discharge port 3B than the center of the main flow path 3, but such a position is not particularly limited.

The supply-side filter 7 is provided in a portion between the second on-off valve 6 and the supply/discharge port 3B in the main flow path 3, and more specifically, between the second on-off valve 6 and the first recovery flow It is provided in a portion between the path 8 and a connection position of an inflow port 8A, which will be described later. The supply-side filter 7 is provided to catch foreign matter mixed in the fluid. The supply-side filter 7 in the present embodiment is, for example, a metal filter excellent in heat resistance and chemical resistance, but is not particularly limited.

Subsequently, the first recovery channel 8 includes the above-described inflow port 8A connected to the portion between the second on-off valve 6 and the supply/discharge port 3B in the main channel 3, and the first opening/closing in the main channel 3. It has an outlet port 8B connected to a portion between the valve 4 and the pump 5. FIG.

A third on-off valve 9 provided in the first recovery channel 8 is configured to open and close the first recovery channel 8 . Although the third on-off valve 9 in the present embodiment is a manual on-off valve, it is not particularly limited, and may be an electromagnetic valve, an air operated valve, or the like.

The recovery-side filter 10 is provided at a portion between the inlet 8A and the third on-off valve 9 in the first recovery channel 8, and traps foreign matter mixed in the fluid. The recovery side filter 10 in the present embodiment is, for example, a metal filter excellent in heat resistance and chemical resistance, but is not particularly limited.

Subsequently, the second recovery channel 11 has an inlet 11A connected to a portion of the main channel 3 between the pump 5 and the second on-off valve 6, and an outlet 11B connected to the tank 2. Of these, the outflow port 11B is detachable from the tank 2. As shown in FIG.

The fourth on-off valve 12 provided in the second recovery channel 11 is configured to open and close the second recovery channel 11 . Although the fourth on-off valve 12 in the present embodiment is also a manual on-off valve, it is not particularly limited, and may be an electromagnetic valve, an air-operated valve, or the like.

Further, the fluid supply/recovery device 1 according to the present embodiment further includes a bypass channel 14 and a relief valve 15 provided in the bypass channel 14 . The bypass flow path 14 includes a portion of the main flow path 3 between the pump 5 and the connection position of the inlet 11A of the second recovery flow path 11, and the outflow port 11B and the fourth recovery flow path 11 of the second recovery flow path 11. A portion between the on-off valve 12 is connected. The relief valve 15 is opened when the pressure of the brine flowing from the main flow path 3 side to the second recovery flow path 11 side in the bypass flow path 14 reaches or exceeds a threshold value, thereby displacing the main flow path 3 from the second recovery flow path 11 . It is configured to allow fluid to flow into the flow path 11 .

Next, the operation of the fluid supply/recovery device 1 according to this embodiment will be described with reference to FIGS. 2 and 3. FIG.

First, when brine, which is a fluid, is supplied from the fluid supply and recovery device 1 to the outside, in this example, the chiller device, the first on-off valve 4 and the second on-off valve 6 are set to the open state, and the third on-off valve 9 is opened. and the fourth on-off valve 12 is closed, and the pump 5 is driven. As a result, the brine stored in the tank 2 can be supplied to the chiller device via the main flow path 3, as highlighted by the thick line in FIG.

On the other hand, when recovering the brine supplied to the chiller device, the first on-off valve 4 and the second on-off valve 6 are set to the closed state, and the third on-off valve 9 and the fourth on-off valve 12 are set to the open state. is set and the pump 5 is driven. As a result, the brine can be received from the supply/discharge port 3B of the main flow path 3 and collected in the tank 2, as shown emphasized by the thick line in FIG. The brine recovered at this time is the portion from the supply/discharge port 3B in the main channel 3 to the connection position of the inlet 8A of the first recovery channel 8, the first recovery channel 8, and the first recovery channel 8 in the main channel 3. Flow into the tank 2 via the second recovery channel 11 and the portion between the connection position of the outlet 8B of the first recovery channel 8 and the connection position of the inlet 11A of the second recovery channel 11 do.

Here, in the present embodiment, the overlapping portion between the flow path used for supply and the flow path used for recovery extends from the supply/discharge port 3B in the main flow path 3 to the inlet of the first recovery flow path 8. Only the portion up to the connection position of 8A and the portion between the connection position of the outlet port 8B of the first recovery channel 8 and the connection position of the inlet port 11A of the second recovery channel 11 in the main channel 3 becomes. As a result, the overlapping portion between the flow path used for supply and the flow path used for recovery is suppressed, and as a result, the foreign matter mixed in the brine at the time of recovery is spread over a wide area in the flow path used for brine supply. Situation that adheres over is suppressed.

As a result, according to the present embodiment, when the brine is supplied after the brine is collected, it is possible to prevent the foreign substances mixed in the brine at the time of collection from being mixed into the brine to be supplied thereafter.

In addition, in the present embodiment, a recovery side filter 10 is provided in a portion between the inlet 8A and the third on-off valve 9 in the first recovery channel 8. As shown in FIG. As a result, the brine that has flowed into the first recovery channel 8 during brine recovery is filtered by the recovery filter 10, so that the brine that flows out of the first recovery channel 8 and flows into the main channel 3 is filtered. Contamination of the main flow path 3 is suppressed. As a result, it is possible to more effectively prevent the foreign substances mixed in the brine during collection from being mixed into the brine to be supplied later from the wall surface of the main flow passage 3 or the like.

In addition, in the present embodiment, a supply side filter 7 is provided in the portion between the second on-off valve 6 in the main flow path 3 and the connecting position of the inlet 8A of the first recovery flow path 8 . As a result, since the brine from the tank 2 is filtered by the supply-side filter 7 when the brine is supplied, it is possible to more effectively suppress the supply of brine mixed with foreign matter. In addition, since the collected brine basically does not pass through the supply-side filter 7, the supply-side filter 7 is prevented from being contaminated by the collected brine, and a large pressure loss occurs in the supply-side filter 7 when the brine is supplied. becoming suppressed. Also, the life of the supply side filter 7 can be lengthened.

In addition, in the present embodiment, the portion between the pump 5 and the connection position of the inlet 11A of the second recovery channel 11 in the main channel 3, and the outlet 11B in the second recovery channel 11 A bypass flow path 14 is provided to connect the portion between the fourth on-off valve 12 , and a relief valve 15 is provided in the bypass flow path 14 . As a result, even if the second on-off valve 6 and the fourth on-off valve 12 are closed due to an operational error, the brine can be returned to the tank 2 via the bypass flow path 14. It is possible to prevent the pressure of the brine from increasing by blocking the second on-off valve 6 and the fourth on-off valve 12, thereby avoiding damage to the flow path.

<Second Embodiment>
Next, a fluid supply/recovery device 1' according to a second embodiment will be described with reference to FIG. Components of the second embodiment that are the same as those of the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

In this embodiment, the first on-off valve 4, the second on-off valve 6, the third on-off valve 9 and the fourth on-off valve 12 are electromagnetic valves. Each on-off valve is electrically connected to the control device 60 and controlled to open and close by the control device 60 . The control device 60 is a computer having a CPU, ROM, RAM and the like. In FIG. 4, electrical connections between devices are indicated by dashed lines. Further, the control device 60 may have operation members such as a keyboard and a touch panel. The drive start and stop of the pump 5 may be controlled via the inverter 50 .

Further, in the present embodiment, a pressure sensor 70 (PS ) is provided. Here, the bypass flow path 14 and relief valve 15 described in the first embodiment are not provided. In addition, a flow meter 80 (FS) for detecting the flow rate of the brine passing through itself is provided between the supply side filter 7 and the connecting position of the inlet 8A of the first recovery channel 8 in the main channel 3. is provided.

Control device 60 is also electrically connected to pressure sensor 70 , flow meter 80 and inverter 50 . The controller 60 in the present embodiment first stops the pump 5 via the inverter 50 when the pressure of the brine detected by the pressure sensor 70 reaches or exceeds the threshold value. A pressure threshold for determining whether or not to stop the pump 5 is determined in order to avoid damage to the flow path due to an increase in brine pressure, and is recorded in the control device 60 in advance.

Further, the control device 60 detects the opening/closing states of the first opening/closing valve 4, the second opening/closing valve 6, the third opening/closing valve 9, and the fourth opening/closing valve 12, thereby determining whether the current status is the brine supply state or the brine supply state. It is possible to determine whether it is in a state to collect. Specifically, when the first on-off valve 4 and the second on-off valve 6 are in the open state and the third on-off valve 9 and the fourth on-off valve 12 are in the closed state, the control device 60 determines that the brine is being supplied. If the first and second on-off valves 4 and 6 are closed and the third and fourth on-off valves 9 and 12 are open, it is determined that the brine is being collected.

When the brine is supplied, the control device 60 in the present embodiment instructs the flowmeter 80 to start detecting the passing flow rate of the brine at the same time when the pump 5 starts to be driven. As a result, the flow meter 80 can detect the flow rate of the brine that has passed through it since the pump 5 was started. The flow rate detected by the flow meter 80 is output to the control device 60, and the control device 60 stops driving the pump 5 when the flow rate of the brine detected by the flow meter 80 exceeds a pre-recorded threshold value. It's like

The control device 60 has an internal timer. When recovering brine, the timer measures the time from the start of driving of the pump 5, and when the time from the start of driving exceeds a predetermined time, the pump 5 stop driving. The predetermined time is recorded in advance in the control device 60 as a time during which the desired amount of brine can be recovered.

The predetermined time for recovering the desired amount of brine is derived experimentally in this embodiment. Specifically, in the present embodiment, when deriving the predetermined time, first, the pump 5 is driven to supply a predetermined amount of brine to the supply destination device (chiller device), and then each on-off valve is switched. The pump 5 was driven again to recover the predetermined amount of brine from the chiller, and a reference recovery time from the start of driving of the pump 5 to the recovery of the predetermined amount of brine was measured. Subsequently, the reference collection time was recorded in the control device 60 as the predetermined time. Note that the time obtained by adding the surplus time to the reference recovery time may be recorded as the predetermined time.

In the second embodiment described above, when brine is supplied, the controller 60 drives the pump 5 when the flow rate of brine detected by the flow meter 80 exceeds a pre-recorded threshold value. Stop. Accordingly, by recording the desired supply amount of brine in advance as a threshold value, the desired supply amount of brine can be accurately supplied.

Further, the control device 60 stops the driving of the pump 5 when the time from the start of driving of the pump 5 exceeds a predetermined time when recovering the brine. When the device to which the fluid is supplied is a device with a complicated circuit configuration, such as a chiller device that controls the temperature with brine as in the present embodiment, when attempting to recover the liquid from such a device, recovery There are cases where many bubbles are contained in the liquid to be measured, and if a flow meter is used to measure a liquid containing many bubbles, there is a risk that the flow rate cannot be accurately detected or that the flow meter is damaged. On the other hand, in the case of recovering a desired amount of brine based on a predetermined time as in the present embodiment, by properly setting the predetermined time, it is possible to collect the brine more accurately and imperfectly than when using a flow meter. The desired amount of brine can be recovered with the desired reduction in equipment damage.

The present invention is not limited to the above-described embodiments, and various modifications can be made to the above-described embodiments. For example, the installation position of the flowmeter 80 described in the second embodiment is not particularly limited, and the flowmeter 80 may be provided at any position on the main flow path 3 .

REFERENCE SIGNS LIST 1, 1′ Fluid supply and recovery device 2 Tank 3 Main channel 3A Connection port 3B Supply/discharge port 4 First on-off valve 5 Pump 6 Second on-off valve 7 Supply-side filter 8 First recovery channel 8A Inflow port 8B Outflow port 9 Third on-off valve 10 Recovery-side filter 11 Second recovery channel 11A Inflow port , 11B... Outflow port, 12... Fourth on-off valve, 14... Bypass flow path, 15... Relief valve, 50... Inverter, 60... Control device, 70... Pressure sensor, 80... Flow meter

Claims (4)

A connection port connected to a tank that stores fluid, and a supply/discharge port for discharging fluid to supply the fluid stored in the tank to the outside or receiving fluid from the outside to collect the fluid in the tank a main channel having a mouth;
a first on-off valve provided at a first position set in the main flow path and opening and closing the main flow path at the first position;
a pump that is provided closer to the supply/discharge port than the first on-off valve in the main flow path and generates a driving force for causing fluid to flow from the connection port side to the supply/discharge port side;
a second on-off valve provided at a second position set closer to the supply/discharge port than the pump in the main flow path, and opening and closing the main flow path at the second position;
An inflow port connected to a portion of the main flow path between the second on-off valve and the supply/discharge port and a flow connected to a portion of the main flow path between the first on-off valve and the pump. a first recovery channel having an outlet;
a third on-off valve provided in the first recovery channel for opening and closing the first recovery channel;
a second recovery channel having an inlet connected to a portion of the main channel between the pump and the second on-off valve and an outlet connected to the tank;
a fourth on-off valve provided in the second recovery channel for opening and closing the second recovery channel;
a flow meter provided in the main flow path for detecting the flow rate of the fluid that has passed through the pump from the start of driving of the pump;
a control device that stops driving the pump when the flow rate of the fluid detected by the flow meter reaches or exceeds a pre-recorded threshold when supplying the fluid;
the first on-off valve, the second on-off valve, the third on-off valve, and the fourth on-off valve are electromagnetic valves;
The control device determines whether or not the fluid is in a state of recovering by detecting the opening/closing states of the first opening/closing valve, the second opening/closing valve, the third opening/closing valve, and the fourth opening/closing valve. 1. A fluid supply and recovery device, wherein when a fluid is recovered, the pump is stopped when a predetermined time has elapsed since the pump was started. A connection port connected to a tank that stores fluid, and a supply/discharge port for discharging fluid to supply the fluid stored in the tank to the outside or receiving fluid from the outside to collect the fluid in the tank a main channel having a mouth;
a first on-off valve provided at a first position set in the main flow path and opening and closing the main flow path at the first position;
a pump that is provided closer to the supply/discharge port than the first on-off valve in the main flow path and generates a driving force for causing fluid to flow from the connection port side to the supply/discharge port side;
a second on-off valve provided at a second position set closer to the supply/discharge port than the pump in the main flow path, and opening and closing the main flow path at the second position;
An inflow port connected to a portion of the main flow path between the second on-off valve and the supply/discharge port and a flow connected to a portion of the main flow path between the first on-off valve and the pump. a first recovery channel having an outlet;
a third on-off valve provided in the first recovery channel for opening and closing the first recovery channel;
a second recovery channel having an inlet connected to a portion of the main channel between the pump and the second on-off valve and an outlet connected to the tank;
a fourth on-off valve provided in the second recovery channel for opening and closing the second recovery channel;
a controller;
the first on-off valve, the second on-off valve, the third on-off valve, and the fourth on-off valve are electromagnetic valves;
The control device determines whether or not the fluid is in a state of recovering by detecting the opening/closing states of the first opening/closing valve, the second opening/closing valve, the third opening/closing valve, and the fourth opening/closing valve. 1. A fluid supply and recovery device, wherein when a fluid is recovered, the pump is stopped when a predetermined time has elapsed since the pump was started. It further comprises a recovery side filter that is provided in a portion between the inflow port and the third on-off valve in the first recovery channel and captures foreign matter mixed in the fluid. Item 3. The fluid supply and recovery device according to item 1 or 2 . Further comprising a supply-side filter that is provided in a portion between the second on-off valve in the main flow path and a connection position of the inflow port of the first recovery flow path and that traps foreign matter mixed in the fluid. 4. The fluid supply and recovery device according to any one of claims 1 to 3 , characterized by:

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