JP7123433B1 - FILM FORMING DEVICE AND ROLLING ELEMENT MANUFACTURING METHOD - Google Patents

Abstract

A film forming apparatus capable of suppressing the accumulation of fine particles that have not become part of the film around a work. A film forming apparatus (10) includes a generating section (20) for generating an aerosol in which fine particles are dispersed in a gas, an injection section (30) for injecting the aerosol onto a work (W), and an opening on the side where the injection section (30) is arranged. and a container 41 capable of accommodating the workpiece W. The container 41 is formed with a hole having a size through which the fine particles can pass without the work W passing through. In such a film forming apparatus 10, it is possible to suppress the accumulation of fine particles that have not become part of the film around the workpiece W. As shown in FIG. [Selection diagram] Fig. 1

Description

TECHNICAL FIELD The present invention relates to a film forming apparatus and a method for manufacturing rolling elements.

An aerosol deposition method is known as a technique for forming a film using fine particles. In this method, a film is formed on the work surface by accelerating an aerosol in which fine particles are dispersed in gas and jetting the aerosol onto the work.

Patent Literature 1 discloses a film forming apparatus in which an aerosol is injected from an aerosol generating part into a sealed container in which a workpiece is placed while the container is being vibrated. In such a coating film forming apparatus, the coating is formed on the surface of the workpiece while the fine particles in a coarse aggregated state are crushed and pulverized by the collision between the workpieces or between the workpieces and the wall of the closed container.

JP 2007-270234 A

In the film forming apparatus disclosed in Patent Document 1, the particles contained in the aerosol that cannot join around the work and become part of the film accumulate in the closed container. When the closed container is vibrated while the fine particles are accumulated, the accumulated fine particles are scattered inside the closed container. As a result, the scattered fine particles may prevent the aerosol ejected from the aerosol generating portion from reaching the vicinity of the workpiece while maintaining the accelerated state, thereby reducing the efficiency of film formation. In addition, there is also the problem that the operation of the film forming apparatus is complicated to remove the fine particles from the closed container each time the fine particles that have not become part of the coating accumulate.

Therefore, the present invention has been made in view of the above problems, and its main purpose is to prevent fine particles that have not become a part of the coating from accumulating around the workpiece when forming the coating using an aerosol. It is an object of the present invention to provide a coating film forming apparatus capable of suppressing this. A further object of the present invention is to provide a method of manufacturing rolling elements using the film forming apparatus.

In order to solve the above problems, the film forming apparatus of the present invention includes:
a generator that generates an aerosol in which fine particles are dispersed in a gas;
an injection unit that injects the aerosol onto a workpiece;
a container that opens to the side where the injection part is arranged and can accommodate the work;
with
The container is formed with a hole having a size through which the fine particles can pass without the work passing through.

According to the film forming apparatus of the present invention, when the film is formed on the surface of the work, some of the fine particles contained in the aerosol sprayed toward the work housed in the container cannot be bonded to the periphery of the work and part of the film is formed. Particulates that have failed to adhere are expelled from the container through holes in the container. Therefore, it is possible to suppress accumulation of fine particles that have not become a part of the film around the workpiece. In addition, since the labor for removing the fine particles from the container can be saved, it is possible to prevent the operation of the film forming apparatus from becoming complicated.

The figure which shows a film formation apparatus. A perspective view of a container. The figure which shows the container which expanded the mesh|network part. Sectional drawing in F4 line of FIG. The figure which shows the movement area|region of the workpiece|work in the inner surface of a container. FIG. 10 is a view showing a rotating container without protrusions; 4 is a flow chart showing a procedure for manufacturing a rolling element having a film formed on its surface.

(Coating device)
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a film forming apparatus according to the present invention will be described below with reference to the drawings.

The film forming apparatus 10 shown in FIG. 1 uses an aerosol deposition method on the surface of the work by injecting an aerosol in which fine particles are dispersed in gas from the injection unit 30 onto the work accommodated in the container 41. It is an apparatus for forming a coating on a substrate.

The generator 20 generates an aerosol. The generation unit 20 includes a filling container (not shown) filled with fine particles and a gas supply device (not shown) for supplying an inert gas to the filling container. In the generation unit 20, in a state where the filled container is mechanically vibrated and the fine particles are agitated, an inert gas is sent from the gas supply device to the filled container to disperse the fine particles in the gas. An aerosol is produced.

The film forming apparatus 10 includes a vacuum chamber 80 in which the injection section 30 is arranged. The injection unit 30 injects the aerosol generated by the generation unit 20 onto the work. The injection unit 30 is arranged above the container 41 in the direction of gravity, and injects the aerosol downward in the direction of gravity. When the injection unit 30 injects, the inside of the vacuum chamber 80 is evacuated by a vacuum pump (not shown), so the aerosol is injected onto the workpiece in an accelerated state compared to the atmospheric pressure state. In addition, the position of the injection part 30 can be adjusted in the horizontal direction and the direction of gravity.

Next, the storage unit 40 including the container 41 will be described. The containment unit 40 is arranged in a vacuum chamber 80 . As shown in FIGS. 1 and 2, the container 41 is a container that can accommodate a plurality of workpieces W by opening upward in the weight direction, which is the side where the injection unit 30 is arranged. The container 41 can accommodate a plurality of rolling elements as the work W. As shown in FIG. The container 41 is formed into a hemispherical cylindrical shape with a downwardly convex bottom surface, and an opening is formed on the opposite side of the bottom surface.

The support member 42 of the storage unit 40 is a member that supports the container 41 . The support member 42 is formed in a ring shape, and a frame-shaped portion 41 a is provided on the periphery of the opening of the container 41 . The container 41 is supported by the support member 42 by fixing the frame-shaped portion 41a to the lower surface of the support member 42 with screws 42a.

A base 43 of the accommodation unit 40 is formed in a circular shape. The spacing member 44 of the housing unit 40 is a member that holds the support member 42 and the base 43 with a predetermined spacing therebetween. The spacing member 44 is formed in a bar shape, and its lower end is fixed at four positions on the base 43 at regular intervals. The upper end is fixed at four equally spaced positions on the support member 42 . The predetermined distance here means the distance between the base 43 and the support member 42 so that the bottom of the container 41 does not come into contact with the base 43 when the support member 42 supports the container 41 . Therefore, the bottom of the container 41 is separated upward from the base 43 when the container 41 , the support member 42 , the base 43 and the spacing member 44 are assembled and integrated.

An adjustment unit 50 is attached to the accommodation unit 40 . The conditioning unit 50 is also arranged in the vacuum chamber 80 together with the containing unit 40 . The adjustment unit 50 is a unit that controls the rotation of the accommodation unit 40 and adjusts the inclination of the accommodation unit 40 with respect to the horizontal direction. The adjustment unit 50 includes a motor 51 and a speed reducer 52 , and power generated by the rotation of the motor 51 is transmitted to the rotary shaft 53 via the speed reducer 52 . The rotary shaft 53 protrudes upward from the speed reducer 52 , and the tip of the rotary shaft 53 is attached to the center of the base 43 . An axis AX is an imaginary line extending the rotating shaft 53 in the axial direction and passes through the center of the container 41 . When the motor 51 operates, the storage unit 40 rotates about the rotation shaft 53 (axis AX). In this embodiment, the motor 51 and the speed reducer 52 correspond to the drive section.

A pedestal portion 54 to which the speed reducer 52 is fixed in the adjustment unit 50 is provided so as to be able to adjust the inclination with respect to the horizontal direction. The inclination of the rotating shaft 53 with respect to the direction of gravity is adjusted by adjusting the inclination of the pedestal 54 with respect to the horizontal direction. When the coating is formed by the coating forming apparatus 10, the rotating shaft 53 is tilted with respect to the direction of gravity. In this embodiment, when the film is formed with the six workpieces W housed in the container 41, the inclination of the rotating shaft 53 with respect to the direction of gravity is set to 15 degrees, and the rotating speed of the rotating shaft 53 is set to 60 rpm. set. The inclination of the rotating shaft 53 and the number of rotations of the rotating shaft 53 are adjusted according to the number of works W accommodated in the container 41 .

The film forming apparatus 10 includes a storage/recovery section 60 . The storage/recovery unit 60 stores the workpieces W in the container 41 and recovers the workpieces W from the container 41 . In this embodiment, the storage/recovery section 60 includes a work transfer device (not shown) that transfers the work W to the container 41 and an inclination adjusting device (not shown) that adjusts the inclination of the pedestal portion 54 . The storage/recovery unit 60 realizes storage of the works W in the container 41 by transporting the works W from the work transport device to the container 41 . In addition, the storage/recovery unit 60 moves the inclination of the pedestal 54 closer to the vertical direction using the inclination adjusting device, and drops the work W from the container 41 into a recovery container (located near the film forming apparatus 10) (not shown). , the collection of the workpiece W from the container 41 is realized.

The film forming apparatus 10 includes a control section 70 . The control unit 70 operates the vacuum pump for evacuating the inside of the vacuum chamber 80, drives the motor 51 for rotating the container 41, injects the aerosol by the injection unit 30, and operates the generation unit 20 and the storage/collection unit 60. to control. Rotation control of the motor 51 by the controller 70 allows the container 41 to rotate at a constant speed.

FIG. 2 shows an example of positions where the workpieces W gather while the container 41 is rotating. 2, the support member 42, the base 43, the spacing member 44, and the rotating shaft 53 are omitted for ease of understanding, but the container 41 rotates about the rotating shaft 53 (axis AX). is in a state of At least a portion of the container 41 is net-like. In this embodiment, the portion of the container 41 other than the frame-like portion 41a defining the opening is net-like.

In FIG. 2, the container 41 contains six works W. As shown in FIG. The workpiece W is spherical. When the centrifugal force acting on the workpiece W is relatively smaller than the gravity, the workpiece W accommodated in the rotating container 41 tends to move downward in the direction of gravity. FIG. 2 shows a state in which six workpieces W are gathered at a lower position in the direction of gravity in the rotating container 41 while being inclined with respect to the direction of gravity. 2, the rotation speed of the container 41 is increased and the centrifugal force applied to each work W is increased. Change to the side position. The number of workpieces W contained in the container 41 is such that the total volume of the plurality of workpieces W is 30% of the volume of the container 41 so that each workpiece W can be sufficiently moved within the rotating container 41. It is preferable to:

FIG. 3 shows the container 41 with the mesh portion enlarged. In this embodiment, the net-like portion is formed by plain weaving the wire 41b having a wire diameter of 0.15 mm. Further, since the mesh portion is 40 meshes, the opening L is 0.485 mm. The porosity calculated using such opening L is 58.3%. As described above, the holes H are meshes in the mesh portion and are formed in a square shape. The size of the hole H is large enough to allow fine particles to pass through without the workpiece W passing therethrough. It is preferable that the opening L is shorter than the length of the radius).

FIG. 4 shows a cross section obtained by cutting the wire 41b along a plane perpendicular to the length direction of the wire 41b. FIG. 4 corresponds to a cross section at line IV in FIG. A cross section orthogonal to the length direction of the wire 41b is circular. The container 41 further includes a projecting portion 41c. The protrusion 41 c protrudes inward from the mesh portion of the container 41 . In this embodiment, the projecting portion 41c includes a pair of linear projecting portions projecting inward from the mesh portion of the container 41 and a line connecting the pair of linear projecting portions at a position away from the mesh portion of the container 41. and a connecting portion. The projecting portion 41c is arranged in the movement area Ma inside the container 41, as shown in FIG.

The movement area Ma will be described with reference to FIG. FIG. 5 is a view of the container 41 viewed from the open side. A portion of the container 41 occupied by the moving area Ma is indicated by dots. The movement area Ma is an area where it is estimated that the rolling element, which is the workpiece W, can move on the inner surface of the container 41 when the container 41 is rotating.

Identification of the movement area Ma will be described with reference to FIG. FIG. 6 is a view of the rotating container 41P viewed from the open side of the container 41P. The container 41P has the same configuration as the container 41 of the present embodiment except that it does not have the projecting portion 41c. It is assumed that the container 41P shown in FIG. 6 is mounted on the film forming apparatus 10 of the present embodiment instead of the container 41 and rotates. The container 41P rotates while holding six works W therein. In this way, the movement area Ma is specified by associating the area through which the work W has passed on the inner surface of the rotating container 41P with the container 41 having the same shape as the container 41P. Therefore, the conditions (the number of works W accommodated in the container 41 at one time, the inclination and the rotation speed of the rotating shaft 53) when actually forming the coating on the work W using the film forming apparatus 10 to which the container 41 is attached Applying the same condition to the film forming apparatus 10 to which the container 41P is attached, the moving area Ma is specified.

In FIG. 6, a work Wa is a work W surrounded by other five works W out of six works W. As shown in FIG. The two-dot chain lines shown in FIG. 5 correspond to the trajectory along which the workpieces Wa pass when the container 41P rotates while containing six workpieces W, with the container 41 having the same shape as the container 41P. . In the present embodiment, the protruding portions 41c are arranged at four equally spaced positions on the two-dot chain line in the movement area Ma. Moreover, the projecting portion 41 c is arranged in a direction substantially orthogonal to the rotation direction of the container 41 . By arranging them in this way, it is possible to facilitate contact between the work W and the projecting portion 41c in the rotating container 41 .

As shown in FIG. 6, when the container 41P is rotated with a plurality of works W accommodated therein, the relative positional relationship between the plurality of works W may remain maintained. For example, if the relative positional relationship between the works W is maintained in the state shown in FIG. It tends to be in the area of Further, even if the container 41P continues to rotate, a region of the surface of each workpiece W that is different from the predetermined region is less likely to be exposed to the side on which the injection unit 30 is arranged. In addition, among such works W, the work Wa in particular is surrounded by other works W and is hindered from moving. It is easy to become an area.

However, unlike the container 41P, the container 41 in the film forming apparatus 10 of the present embodiment has the protruding portion 41c arranged in the movement area Ma. Therefore, when any one of the plurality of works W whose relative positional relationship is maintained contacts the projecting portion 41c, the trajectory of the work W changes and the surrounding works W also come into contact with each other. As a result, the trajectory of the surrounding work W can also be changed. Therefore, compared to the container 41P in which the projecting portion 41c is not arranged, it is possible to make it difficult to maintain the relative positional relationship between the plurality of works W. In such a film forming apparatus 10, since the positional relationship between the plurality of works W is likely to change, it is easy to change the exposed area of each work W on the side where the injection part 30 is arranged. Therefore, it is possible to improve the accuracy of film formation on the surface of the work W.

(Manufacturing method of rolling element)
FIG. 7 is a flow chart showing a procedure for manufacturing a rolling element having a coating formed on its surface using the coating forming apparatus 10 described in the above embodiment. When the procedure is started, in step S<b>10 , the control unit 70 executes the accommodation step of accommodating the rolling elements, which are the workpieces W, in the container 41 . Specifically, the control unit 70 controls the storage/recovery unit 60 to transport the workpiece W to the container 41 . Next, in step S11, the control unit 70 controls the generation unit 20 to generate an aerosol as a generation process.

Next, in step S12, the control unit 70 controls the injection unit 30 so that the aerosol is injected onto the rolling element, which is the work W accommodated in the container 41, to the surface of the work W, as a film forming step. Form a coating. In step S<b>12 , the controller 70 operates the vacuum pump to create a vacuum state in the vacuum chamber 80 and drives the motor 51 before the jetting section 30 starts jetting.

After the film is formed on the surface of the work W, in step S13, the control unit 70 tilts the pedestal 54 so that the work W falls from the container 41 into a collection container (located near the film forming apparatus 10). It controls the storage and recovery section 60 . After executing step S13, the control unit 70 terminates the procedure shown in FIG. Note that step S11 may be performed before step S10.

According to the film forming apparatus 10 of this embodiment, the following effects can be obtained.

(1) The container 41 is formed with a hole H having a size through which the fine particles can pass without the work W passing through. When forming a film on the work W using the film forming apparatus 10 , the aerosol is injected from the injection part 30 onto the work W accommodated in the container 41 through the opening of the container 41 . Of the fine particles contained in the jetted aerosol, the fine particles that have been bonded to the periphery of the workpiece W become part of the coating. On the other hand, fine particles that cannot be bonded to the periphery of the work W and become part of the film are discharged from the container through the holes H of the container. Therefore, it is possible to suppress the accumulation of fine particles that have not become a part of the film around the workpiece W. In addition, since the labor for removing the fine particles from the container can be saved, it is possible to prevent the operation of the film forming apparatus from becoming complicated.

(2) At least part of the container 41 is mesh-like, and the holes H formed in the container 41 are meshes of the mesh. Since the holes H are arranged as meshes in the container 41, the holes H are dense and regularly distributed compared to a container in which a small number of holes are scattered. Therefore, it is possible to increase the possibility that fine particles that have not become part of the coating reach the hole H and are discharged from the container 41 .

(3) The net-like portion of the container 41 is formed by weaving wire rods 41b, and the wire rods 41b have a circular cross section perpendicular to the longitudinal direction. According to such a configuration, fine particles that have not become a part of the film are less likely to deposit on the wire 41b, compared to a container in which a wire having a rectangular cross section is woven to form a net-like portion. , the accumulation of fine particles in the container 41 can be suppressed.

(4) The container 41 rotates around the rotating shaft 53 tilted with respect to the direction of gravity. When the container 41 rotates around the rotation axis along the direction of gravity, the workpiece W tends to stay near the center of the bottom surface of the container 41, so the relative positional change of the workpiece W with respect to the container 41 tends to decrease. It is in. On the other hand, when the container 41 rotates about the rotating shaft 53 tilted with respect to the direction of gravity, the workpiece W tends to follow a trajectory away from the center of the bottom surface of the container 41. positional change tends to increase. The greater the change in relative position, the more likely it is that the exposed area of the surface of the workpiece W on the side where the injection unit 30 is arranged will change. can be done.

(5) The protruding portion 41c that protrudes toward the inside of the container 41 is positioned in a movement area in which the rolling element, which is the workpiece W, is assumed to be movable on the inner surface of the container 41 when the container 41 is rotating. are placed. When the workpiece W is stored in a container that does not have the projecting portion 41c or the projecting portion 41c is not arranged in the movement area and the container is rotating, the trajectory of the workpiece W tends to be constant. On the other hand, when the projecting portion 41c is arranged in the movement area, the trajectory of the work W is changed by the contact between the work W and the projecting portion 41c. When the trajectory changes in this way, compared to the case where the trajectory is constant, the area exposed to the side of the surface of the work W on which the injection unit 30 is arranged is more likely to change. It can contribute to the improvement of forming accuracy.

Moreover, the projecting portion 41c is composed of a pair of linear projecting portions and a linear connecting portion. Due to such a shape, compared with the rectangular parallelepiped protrusion projecting inward from the mesh portion of the container 41, the entire protrusion 41c is linear, so the amount of fine particles adhering to the surface of the protrusion 41c can be reduced. can be less. Therefore, it is possible to prevent fine particles that have not been used to form the film on the workpiece W from adhering to the projecting portion 41 c and accumulating in the container 41 . Even if the protruding portion 41c has a rectangular parallelepiped shape, if the protruding portion 41c has a shape closer to a plate than a cubic shape, the amount of fine particles adhering to the surface of the protruding portion 41c can be reduced compared to the case where the protruding portion 41c has a cubic shape. In addition, since the projecting portion 41c has a linear connection portion, the width of the projecting portion 41c itself can be increased compared to a projecting portion consisting only of a linear projecting portion projecting inward from the mesh portion of the container 41. can be done. Therefore, in the rotating container 41, it is easy to bring the workpiece W into contact with the projecting portion 41c, and the trajectory of the workpiece W can be changed with high probability.

(6) The base 43 can be tilted with respect to the horizontal direction according to the tilt adjustment of the pedestal portion 54 . Therefore, when the base 43 is arranged tilted with respect to the horizontal direction, fine particles that have passed through the holes H and reached the base 43 tend to drop from the surface of the base 43 . Therefore, since it becomes difficult to deposit on the surface of the base 43, the work of removing fine particles from the surface of the base 43 can be saved.

(7) The spacing member 44 is formed in a bar shape and is fixed at four positions spaced equally between the support member 42 and the base 43 . For this reason, it is difficult for the fine particles that have passed through the hole H to move away from the container 41 . Therefore, it is possible to suppress accumulation of fine particles around the container 41 .

(8) The bottom of the container 41 is separated upward from the base 43 when the container 41, the support member 42, the base 43, and the spacing member 44 are assembled and integrated. When the bottom of the container 41 is in contact with the base 43 , the base 43 makes it difficult for fine particles to pass through the hole H near the contact portion. On the other hand, if the bottom of the container 41 is separated from the base 43, the base 43 does not prevent the fine particles from passing through the hole H. Therefore, it is possible to suppress accumulation of fine particles around the bottom of the container 41 .

(9) The ring-shaped support member 42 supports the container 41 while being arranged so as to cover the opening of the container 41 . Therefore, while supporting the container 41 from the periphery of the container 41 , the spraying to the inside of the container 41 by the spray part 30 is not hindered. Further, since the support member 42 does not cover the mesh portion of the container 41 , the passage of fine particles through the holes H is not prevented.

(10) The container 41 opens upward in the weight direction, which is the side on which the injection unit 30 is arranged. That is, the injection unit 30 is arranged above the container 41 in the direction of gravity, and injects the aerosol downward in the direction of gravity. Therefore, among the fine particles contained in the aerosol injected toward the container 41, the fine particles that cannot join around the work W and become part of the film can be collected under the container 41 by gravity. . Then, fine particles can be discharged from the hole H formed on the lower side of the container 41 .

(Other embodiments)
Note that the above embodiment may be modified as follows.

- In the above-described embodiment, the holes H are meshes in the mesh portion. Alternatively, the holes may be holes formed by penetrating a portion of the plate-like member instead of mesh. Further, the plate-like member may be formed with one hole or a plurality of holes penetrating the plate-like member. When a plurality of holes are formed, the distribution of the holes may be staggered or parallel.
Moreover, it is preferable that the direction in which the holes extend is straight. That is, it is preferable that the ratio of the length of the hole penetrating through the plate-like member to the thickness of the plate-like member (curvature ratio) is a value within the range of 1.0 to 1.5. In the case of the above embodiment, since the linearity of the wire corresponds to the thickness, the length of the hole with respect to the linearity corresponds to the tortuosity, which is approximately one. Thus, the hole is preferably a hole that penetrates through the inside of the plate-like member without winding. Such holes are less likely to be clogged with fine particles and are suitable for discharging fine particles.

- In the said embodiment, the hole is formed in square shape. Alternatively, the holes may be quadrangular, such as rectangular, rhombus, parallelogram, etc., or may have shapes other than quadrilateral. In addition, when it has a corner regardless of its shape, the corner is preferably 30 degrees or more from the viewpoint of suppressing clogging of fine particles in the corner. If the hole has a round shape, since there is no corner, it is possible to prevent the edge of the hole from being clogged with fine particles.

- In the above embodiment, the porosity is 58.3%. Alternatively, the porosity may be any value within the range of 25% to 75%. As described above, the aperture ratio should be adjusted according to the size and shape of the work W so that the work W does not get stuck in the hole H and cannot move.

- In the above embodiment, the inclination of the rotating shaft 53 can be adjusted by adjusting the inclination of the base portion 54 with respect to the horizontal direction. Alternatively, the film forming apparatus 10 may not include the pedestal portion 54 and may be configured so that the inclination of the rotating shaft 53 itself can be adjusted directly.

- In the above embodiment, the inclination of the rotating shaft 53 is set to 15 degrees, but it may be within the range of 10 degrees to 45 degrees. Although the rotational speed of the rotating shaft 53 is set to 60 rpm, it may be within the range of 1 rpm to 150 rpm.

- In the above-described embodiment, the rolling element as the work W accommodated in the container 41 is spherical. Alternatively, the rolling elements housed in the container 41 may be cylindrical rollers or conical rollers. A ball bearing is obtained by forming a coating on a spherical rolling element, and a needle bearing is obtained by forming a coating on a cylindrical or conical roller.

- In the above-described embodiment, the storage/recovery unit 60 includes the work conveying device and the tilt adjusting device. Alternatively, the film forming apparatus 10 may not include the storage/recovery section 60 . In such a case, an operator using the film forming apparatus 10 performs the accommodation of the work W in the container 41 and the recovery of the work W from the container 41 .

- In the above-described embodiment, the protruding portion 41c is arranged on the two-dot chain line indicating the trajectory along which the work Wa surrounded by other works W passes. Instead of this, or in addition to this, the projecting portion 41c may be arranged at a position different from that on the chain double-dashed line in the movement area Ma. Further, in the above embodiment, the protruding portion 41c is composed of a pair of linear protruding portions and a linear connecting portion. Alternatively, the protruding portion 41c may be a part of the inner surface of the container 41 that protrudes. In such a case, the workpiece W passes over the projecting portion 41c and is bounced to change its trajectory. That is, the protruding portion 41c may have any shape as long as it can change the trajectory of the work W accommodated in the container 41 .

- In the above embodiment, the container 41 rotates around the rotating shaft 53 that is inclined with respect to the direction of gravity. Alternatively, container 41 may not rotate. In such a case, the shape of the container 41 may not be a shape considering rotation, and may be dish-shaped, for example. Even in a dish-shaped container, as long as a hole is formed that is large enough to allow fine particles to pass through without allowing the work W to pass through, fine particles that cannot be bonded to the periphery of the work W and have not become part of the coating will remain. If it does occur, it can be drained from the container through the holes in the container. Therefore, accumulation of fine particles around the workpiece W can be suppressed.

- In the above embodiment, the container 41 can accommodate a plurality of rolling elements. Alternatively, container 41 may accommodate only one rolling element. It should be noted that, even with such a container 41, it is preferable that the protruding portion 41c is arranged in the movement area.

- In the above-described embodiment, the container 41 is formed in a hemispherical cylindrical shape with a downwardly convex bottom surface, and an opening is formed on the opposite side of the bottom surface. Alternatively, the container 41 may be formed by spirally winding the wire rod 41b, and may have a shape formed by reducing the diameter of the spiral on the bottom side. Here, the spiral diameter is the length obtained by doubling the distance between the center of the spiral and the center of the axis of the wire 41b. Further, the container 41 may be formed by spirally winding the wire rod 41b on the side surface thereof, and may be a plate-like member on the bottom surface thereof. In the container 41 having the shape mentioned here, the hole is the gap between the spirally wound wire rods 41b. That is, in the film forming apparatus according to the present invention, the hole means a space penetrating from one side to the other side.

- In the above embodiment, the container 41 can be rotated at a constant speed by controlling the rotation of the motor 51 by the controller 70 . In addition to this, the control unit 70 may rotate the container 41 forward and backward by controlling the rotation of the motor 51 . If the container 41 can be rotated forward and backward, it is possible to further suppress the relative positional relationship between the works W and the area of the surface of the work W exposed to the side on which the injection unit 30 is arranged from becoming constant. .

DESCRIPTION OF SYMBOLS 10... Film formation apparatus, 20... Generation part, 30... Injection part, 40... Storage unit, 41... Container, 42... Support member, 43... Base, 44... Spacing member, 50... Adjustment unit, 51... Motor, 52 ...Reducer 53...Rotating shaft 54...Pedestal part 60...Accommodating/collecting part 70...Control part 80...Vacuum chamber

Claims (5)

a generator that generates an aerosol in which fine particles are dispersed in a gas;
an injection unit that injects the aerosol onto a workpiece;
a container that opens to the side where the injection part is arranged and that can accommodate a rolling element as the work;
a drive unit that rotates the container about a rotation axis that is tilted with respect to the direction of gravity;
a protruding portion arranged in a movement area where the rolling element is assumed to be movable on the inner surface of the container when the container is rotating and protruding toward the inside of the container;
with
The container is formed with a hole having a size that allows the fine particles to pass through without the work passing through ,
The projecting portion is made of a wire,
Coating device. The container can accommodate a plurality of the rolling elements,
The film forming apparatus according to claim 1 . at least a portion of the container is mesh-like;
In the mesh portion of the container, meshes of a size that allow the fine particles to pass through without the work being passed are formed.
3. The film forming apparatus according to claim 1 or 2 . The net-like portion of the container is formed by weaving a wire having a circular cross section ,
The film forming apparatus according to claim 3. In a manufacturing method for manufacturing a rolling element having a coating formed on its surface using the coating forming apparatus according to any one of claims 1 to 4 ,
a generation step of generating an aerosol in which the fine particles are dispersed in a gas by the generation unit;
a housing step of housing the rolling elements, which are the workpieces, in the container;
a film forming step of forming a film on the surface of the rolling element by injecting the aerosol onto the rolling element from the injection unit;
A method for manufacturing a rolling element.

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