JP2923464B2 - Method and apparatus for separating and classifying foreign matter in abrasive material - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for separating and classifying foreign substances mixed in a cleaning material, and more particularly to a method for cleaning with a stream of air generated by a stream of air such as a compressed air supply source, a blower, and an exhaust fan. The material is fed to the spray nozzle, and is sprayed from the spray nozzle toward the workpiece, and foreign matter and dust separated from the workpiece due to the collision of the abrasive material, and reusable abrasive material, etc. are cyclone or the like. The present invention relates to a method and an apparatus for separating and classifying foreign substances mixed in an abrasive material in a blasting device for feeding to a classifying means.

[0002]

2. Description of the Related Art Conventionally, in general, in a blasting apparatus, a blasting material in a blasting material tank is put in an airflow by compressed air and fed to an injection nozzle through a blasting material supply pipe. When blasting is performed toward the surface of the workpiece, fragments generated by the collision force of the polishing material from which the surface of the workpiece is peeled off are generated. In addition, the abrasive material itself can be reused, and an abrasive material that cannot be reused due to crushing or deformation at the time of collision with the workpiece. In addition, dust generated during cutting of the workpiece prior to the blasting, dust attached to the workpiece, and dirt inside the blasting apparatus are mixed into the abrasive. These reusable blasting materials, non-reusable blasting materials, debris, dust and the like are supplied to a classifying means such as a cyclone on the airflow generated in the blast device. This cyclone is a classification means for separating the reusable abrasive material and the dust discharged from the upper part of the cyclone by the rising airflow generated in the cyclone. The dust classified by the cyclone is sucked through the communication pipe by the exhaust of the dust collector and fed to the dust collector from the upper part of the cyclone.The dust is accumulated in the dust collector, and clean air is discharged from the exhaust to the outside. Is discharged to On the other hand, the reusable abrasive material stays at the bottom of the cyclone, falls into the abrasive material tank provided below the cyclone and is stored, and the abrasive material in the abrasive material tank is again returned as described above. The compressed air is fed to the injection nozzle through the abrasive supply pipe and injected. However, among the pieces separated from the surface of the workpiece, pieces that are heavier than the abrasive material or objects such as the abrasive material deformed at the time of collision can be reused in the cyclone without being classified from the abrasive material. The material stays and mixes with the material (the object that remains in the reusable abrasive material without being classified by a classification means such as a cyclone is hereinafter referred to as “foreign matter”). Therefore, the foreign matter is sprayed onto the workpiece from the spray nozzle together with the abrasive material, which is a factor of deteriorating the quality of the blasted surface.

Conventionally, as a method of separating and classifying the foreign matter, a method of so-called "sieve" classification, which is a mesh formed of a mesh through which the abrasive material can pass, is performed by removing the abrasive material from the abrasive material tank. In addition, foreign substances mixed in the abrasive material were separated and classified. As an example of a classifier of the “sieve”, as shown in FIG. 5, a frame 81 whose vertical cross section in the width direction has an upward U-shape is provided on the entire upper surface of the bottom surface 82 with a predetermined interval from the bottom surface 82. A net 83 is provided. The mesh member 83 is formed of a mesh through which the abrasive 21 can pass and foreign matter 22 cannot pass. The frame body 81 forms an inclination angle in the longitudinal direction thereof, and one end of a duct 87 for supplying the abrasive 21 to the upper end side of the mesh body 83 of the frame body 81 faces. A duct 86 for recovering the abrasive 21 is communicated with a lower end of the bottom surface 82, and a duct 85 for discharging the foreign matter 22 is communicated with a lower end of the mesh 83 of the frame 81. A vibration generating means 84 for vibrating the frame 81 is provided substantially at the center of the bottom wall of the frame 81 in the longitudinal direction. When the abrasive material 21 containing the foreign matter 22 is supplied to the upper end side of the mesh member 83, the abrasive member 21 passes through the mesh member 83 and falls to the lower bottom surface 82 as it descends along the mesh member 83. Then, it is collected through the duct 86 at the lower end along the bottom surface 82.
On the other hand, the foreign matter 22 descends along the net 83 without passing through the net 83 and the duct 8
Exhausted through 5. Note that the frame body 81 is
When the vibrating member 4 vibrates, the abrasive material 21 is more reticulated.
3 easily.

[0004]

However, the conventional classifier of "sieving" has a problem that the mesh 83 is frequently clogged as the particle size of the abrasive 21 becomes smaller. there were.

[0005] Recently, a blasting method has been developed in which a surface of a workpiece is masked and a polishing material 21 is sprayed from the masking side to form a pattern having an uneven shape with a very narrow gap. In order to form such a blasted surface, the particle size of the abrasive 21 inevitably becomes extremely small. For example, a plasma display panel (hereinafter, referred to as "PDP") is preliminarily coated with a low-melting glass paste to a predetermined thickness on the entire surface of a glass substrate, and a sandblasting resist film is formed on the surface of the low-melting glass paste layer. After the pattern is formed, grinding and removal of portions of the low melting point glass paste other than the low melting point glass paste protected by the resist film by blasting are performed. The resist film is formed by applying a solution of a mixture of synthetic resins and drying to form a pattern.

[0006] At present, demands for longer life, higher brightness, larger size, and higher definition of PDPs are increasing, and PDPs are being developed to narrow the rib width and increase the uniformity of the PDPs and enlarge the phosphor application area. is there. Incidentally, PDP has a rib width of about 50 μ as an example, a rib height of 150 to 200 μ, a gap between the ribs of about 100 μ, and a particle size of the abrasive 21 used in the blast processing as an example. It is as small as 20 μ. Note that the PDP has a total size of 2
One-inch PDPs are being produced, and PDPs having a size of about 40 to 50 inches are being developed in the future.

[0007] The plasma display is a combination of a PDP composed of two glass substrates having a large number of vertical electrodes and a large number of horizontal electrodes on the inside with a discharge gas space of about 0.1 mm therebetween. A discharge gas composed of neon / xenon gas is sealed between the glass substrates. By applying a voltage between the electrodes, the intersections of a number of vertical and horizontal electrodes are each selected electrically, and light is emitted by the discharge generated at those points to display characters and figures. More specifically, for example, one of the two glass substrates is a front glass substrate forming a discharge part of the plasma display, and the other is a rear glass substrate forming a light emitting part of the plasma display. The front glass substrate has a large number of vertical electrodes on the inner surface, and a dielectric layer is formed on the surface on which the vertical electrodes are provided, and a protective layer is formed on the surface of the dielectric layer. On the other hand, the rear glass substrate has a large number of horizontal electrodes on its inner surface, and ribs are provided between the horizontal electrodes. The ribs form a parallel (striped) or grid-shaped pattern (picture or pattern) on the surface of the glass substrate. When a voltage is applied between the vertical electrode and the horizontal electrode, surface discharge occurs on the surface of the dielectric layer and the protective layer of the discharge part, and ultraviolet rays are generated. The ultraviolet light excites the fluorescent material in the light emitting section to emit light, and a color display is performed by separately applying the fluorescent material.

[0008] As described above, PDP is formed by blast processing.
When forming a pattern having an uneven shape with a very narrow gap such as a high-definition rib, if the foreign matter 22 is contained in the polishing material 21 sprayed from the spray nozzle, the sprayed foreign matter 22 There is a problem that the contaminants are clogged in the recesses, and the foreign matter 22 becomes an obstacle, so that a pattern having a concavo-convex shape cannot be formed on the subsequent polishing material 21.
Therefore, when forming a pattern having a concavo-convex shape with a very narrow gap such as a high-definition rib of a PDP by blasting, the particle size of the polishing material 21 used is small. When the foreign matter 22 is to be separated and classified by a conventional "sieve" classifier, the mesh material 83 of the classifier frequently causes clogging as described above. There is a problem that it is discharged together with. In order to solve this problem, the operator must frequently remove the clogging of the mesh body 83, which is troublesome, and there is a problem that the working efficiency is reduced.

The conventional "sieving" classifier is a pipeline for circulating the blasting material 21 of the blasting device, for example, a blasting material 21.
Even if it is provided in the middle of a supply pipe or a conduit, it is very difficult to separate by the "sieve" because the abrasive material 21 itself gets on the airflow. For this reason, in a conventional classifier using a “sieve”, all of the abrasive material is extracted from the blast device, sieved, and foreign matter 22 (and dust 23) mixed in the abrasive material.
And a "batch process" of recovering the abrasive 21 must be performed. In the batch processing using the sieve, there is a problem that the efficiency is low because all the abrasives are extracted from the blast device and sieved. Moreover,
The amount of foreign matter in the blasting device gradually increases until the next batch processing is performed, taking into account the situation where foreign matter is mixed in the abrasive material, and the foreign matter mixed in the abrasive material is sprayed onto the workpiece. Therefore, in order to avoid a situation in which a foreign material is ejected to a workpiece, a batch process must be performed frequently, particularly for a workpiece on which a pattern having a concavo-convex shape with a narrow gap is formed. There has been a problem that efficiency is reduced and troublesome. Therefore, the conventional “sieving” classifier has not been an appropriate means for solving the problem that the foreign matter 22 must be reliably and efficiently separated and classified from the abrasive 21.

SUMMARY OF THE INVENTION The present invention has been developed to solve the above-mentioned problems. It is an object of the present invention to supply an abrasive material mixed with foreign matters to an airflow and feed the abrasive material through the airflow. It is an object of the present invention to provide a method and apparatus for easily and surely separating and classifying foreign matters while feeding the material forward in the direction of the direction, and in particular, to eliminate the clogging of the reticulated body and feed the abrasive in a constantly stable state. Another object of the present invention is to provide a method and an apparatus for easily and surely separating and classifying foreign matter in the abrasive material.

[0011]

In order to achieve the above object, the present invention provides a method for separating and classifying foreign matter in an abrasive material according to the present invention.
Is supplied into the main body 11 by an airflow, and an ascending airflow is generated in the main body 11 to raise both the abrasive 21 and the foreign matter 22, and the ascending airflow passes through the abrasive 21 in the main body 11. By passing through a possible mesh 16, the mesh 16 prevents and separates the foreign matter 22 from passing therethrough.
The cleaning material 21 is passed through the mesh 16 together with the upward airflow and classified.

The foreign matter 22 that has fallen below the mesh 16 can stay at the bottom 24 of the main body 11 and be discharged.

In addition, the flow of air into the main body from the supply port on the lower side wall of the main body 11 does not cause any problem in generating an ascending air flow in the main body.
4 is desirable.

Further, by generating an auxiliary updraft from the bottom 24 of the main body 11, the abrasive material 21 in the main body 11 can be more easily raised and passed through the mesh body 16.

Further, it is desirable that by vibrating the main body 11 or the reticulated body 16, the foreign matter 22 that has been prevented from passing by the reticulated body 16 is easily dropped, and the passage of the abrasive material is promoted.

The apparatus for separating and classifying foreign matter in an abrasive material according to the present invention includes a main body 11 passing through an air flow.
A supply port 12 into which the polishing material 21 flows is provided at a lower portion of the main body 11, while a discharge port 13 for discharging the polishing material 21 is provided at an upper portion of the main body 11.
The air flow generating means 47 for generating an upward air flow to the supply port 1
2 and at least one of the discharge ports 13, and blocks foreign substances 22 in the abrasive material 21 supplied by riding on an ascending airflow passing through the main body 11 between the supply port 12 and the discharge port 13. In addition, a mesh 16 made of a mesh through which the abrasive 21 can pass is provided.

The mesh 16 can be provided at the outlet 13, but is preferably provided in the main body 11 between the supply port 12 and the outlet 13.

Further, an air storage chamber 18 communicating with a compressed air supply source can be provided at the bottom 24 of the main body 11 via a porous body 17 having air permeability. Alternatively, the air storage chamber 18 is not provided, and the material of the bottom wall of the bottom portion 24 of the main body 11 is simply formed of the porous body 17, and the inside of the main body 11 becomes negative pressure due to the generation of an upward airflow in the main body 11, By this negative pressure, outside air can be sucked into the main body 11 through the porous body 17.

The supply port 12 is provided with an abrasive supply pipe 49a.
The discharge port 13 can communicate with the spray nozzle 44 via another abrasive supply pipe 49b.

Alternatively, a conduit 5 for feeding the abrasive 21 sprayed in the blasting device main body 11 and the foreign matter 22 and dust 23 generated by the collision of the abrasive 21 into the supply port 12.
1, the discharge port 13 can be connected to a classifying means 54 such as a cyclone for classifying the abrasive 21 and the dust 23.

Further, it is effective to mount a vibration generating means 39 for vibrating the main body 11 or the reticulated body 16 on the main body 11.

The main body 11 includes an upper main body 14 above the mesh body 16 and a lower main body 15 below the mesh body 16. A lower end face of the upper main body 14 and an upper end face of the lower main body 15 are provided. Are provided so as to be freely contactable and separable via the mesh body 16,
When the mesh 16 is configured to be detachable, even if the mesh 16 is clogged with foreign matter, the net state 16 can be easily taken out of the main body 11 and air blown to blow off the foreign matter of the mesh 16. It is effective.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the method for separating and classifying foreign matter in an abrasive according to the present invention will be described below with reference to the drawings.
The main body 11 passes through an airflow having a substantially cylindrical shape, for example. The main body 11 is provided with a supply port 12 through which a cleaning material 21 flows in a lower portion of the main body 11, while the polishing body 21 is provided in an upper portion of the main body 11. By providing the discharge port 13 for discharging the material 21, the supply port 12 communicates with a compressed air supply source such as a compressor or an airflow generating means such as a blower, or
When an airflow is generated in the main body 11 by, for example, communicating an airflow generating means such as an air blower 47 with the airflow 3, an ascending airflow is generated in the main body 11. The abrasive material 21 and the foreign matter 22 mixed in the abrasive material 21 are put in the airflow and the main body 11 is moved from the supply port 12.
When the cleaning material 21 and the foreign matter 22 are fed into the
Rises with the ascending airflow within.

The main body 11 between the supply port 12 and the discharge port 13
Inside, a mesh 1 made of a mesh through which the abrasive 21 can pass
By separating the upper body and the lower body from each other at 6, the rising airflow passes through the mesh body 16 and is discharged from the discharge port 13. At this time, the foreign matter 22 rising on the ascending airflow is blocked from passing by the net-like body 16, so that the buoyancy of the foreign matter 16 due to the ascending airflow is reduced, and the foreign matter 22 no longer rises in the following ascending airflow and falls under its own weight. On the other hand, abrasive material 2
1 passes through the mesh body 16 together with the rising airflow (if the dust 23 is mixed, the dust 23 is also discharged) from the outlet 13. Since the updraft always passes through the mesh 16, the mesh 16 is not clogged with the abrasive or dust. In addition, the foreign matter 22 cannot pass through the mesh 16 but falls under its own weight, so that the foreign matter does not clog the mesh 16. Therefore, there is no need to frequently clean the mesh as in a conventional "sieving" classifier.

The size of the foreign matter 22 to be separated and classified can be changed by changing the mesh of the mesh 16 in accordance with the size of the abrasive 21.

In the main body 11, a bottom portion 24 for retaining the foreign matter 22 dropped below the mesh body 16 is provided, and a supply port 12 is provided on a lower side wall of the main body 11, so that the air flow can be reduced. 12 flows into the main body 11, the foreign matter 22 stays at the bottom 24 without causing any trouble in generating an ascending airflow in the main body, and the foreign matter 2
2 is discharged when appropriate.

The abrasive material 2 once stopped at the mesh 16
Although the buoyancy 1 is reduced due to the rising airflow, the buoyant 21 itself is light, and therefore rises due to the subsequent rising airflow, and the net-like body 16 is raised.
Pass through. For this reason, by providing the air storage chamber 18 communicating with the compressed air supply source through the porous body having air permeability at the bottom portion 24 of the main body 11, an auxiliary upward airflow is applied to the inside of the main body 11. That is, the auxiliary updraft is generated by the abrasive material 21 once stopped by the mesh 16.
It is a great help to restore buoyancy and increase easily.

The foreign matter separating / classifying apparatus of the present invention can be provided alone, but can be mounted on another apparatus such as a blast apparatus. Or the abrasive material 21 injected into the blasting apparatus main body 11 in the middle of an abrasive material supply pipe 49 for feeding the abrasive material to the spray nozzle 44.
It is widely used, for example, by interposing a foreign substance 22, dust 23, etc., in a conduit 51 for feeding to a classification means such as a cyclone. Therefore, when blasting is performed on a workpiece using the blasting apparatus provided with the apparatus for separating and classifying foreign matter in the abrasive material of the present invention, the workpiece is not hindered in the abrasive material sprayed from the injection nozzle. As a result, since the foreign matter 22 that causes the turbulence is not present, a high-quality blasted surface is formed on the workpiece, and the blasting is efficiently performed because batch processing is unnecessary. The blasting apparatus provided with the apparatus for separating and classifying foreign matter in the abrasive material of the present invention is applicable to a workpiece which is formed by blasting a pattern having an uneven shape with a very narrow gap such as a high-definition rib of a PDP. Especially effective.

Further, the main body 11 is provided with vibration generating means 39 for vibrating the main body 11 or the reticulated body 16 and vibrating the reticulated body 16 so that the foreign matter 22 blocked by the reticulated body 16 can be easily removed. On the other hand, even if the abrasive 21 stops once in the mesh of the mesh 16, it immediately separates from the mesh by the vibration and rises with the ascending airflow.
To facilitate the passage of

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method and an apparatus for separating and classifying foreign matter in an abrasive material according to the present invention will be described below with reference to a foreign matter separating and classifying apparatus 10 mounted on an air blast apparatus 40 as shown in FIG. -The classification device 30 will be described as an example with reference to the drawings.

In FIG. 1, a foreign matter separating / classifying apparatus 10
Is a conduit 51 for feeding foreign matter, dust and the like generated when the abrasive material and the abrasive material collide with the workpiece in the main body 41 of the blast device 40, and a cyclone for classifying the abrasive material and dust. The foreign matter separating / classifying device 30 is provided between the abrasive material supply pipe 49 and the abrasive material supply pipe 49 for feeding the abrasive material in the abrasive material tank 55 to the spray nozzle 44. It was established.

First, the foreign matter separating / classifying apparatus 10 of the present embodiment
Blasting device 4 equipped with a foreign matter separation / classification device 30
0 will be described with reference to FIG. In FIG. 1, reference numeral 41 denotes a main body of the blasting apparatus.
A number of transport rollers 42 for transporting from right to left on the paper surface are provided, and a hopper (not shown) is provided at a lower portion. The lowermost end of the hopper communicates with a lower portion of the foreign matter separation / classification device 10 via a conduit 51. I have.

An airtight blasting chamber 43 is provided on the main body 41. In the blasting chamber 43, a polishing material is jetted toward the workpiece conveyed by the conveying rollers 42 and the workpiece is blasted. There are provided six injection nozzles 44 that reciprocate in a direction perpendicular to the transport direction of the nozzle. Each injection nozzle 44 is a diffusion type injection nozzle, and the injection shape of the abrasive is set to a normal 2.5.
Even if the blasting speed is increased by a combination of the transport speed of the workpiece and the moving speed of each injection nozzle 44, the blasting uniformity can be maintained.

The blasting chamber 43 is moved in the conveying direction of the workpiece.
Before and after, a static eliminator 45 is provided, and an air blow chamber 46 for a so-called after-blow for removing the abrasive material attached to the workpiece by blowing air on the upstream side in the transport direction of the workpiece. Is provided.

Numeral 56 denotes a polishing material injection amount control mechanism which digitizes the injection amount of the polishing material, and allows a desired polishing material injection amount to be freely set digitally.

In this embodiment, carborundum, # 600
(The average diameter of the largest particles is 61 μ, the average of the average diameters is 31.0 to
26.0 μ, preferably 28 μ), is used, and the abrasive is charged into the abrasive tank 55.

When compressed air is supplied to each of the injection nozzles 44, the inside of the abrasive material supply pipe 49 communicating with each of the injection nozzles 44 and the abrasive material tank 55 has a negative pressure. Is sent to the foreign matter separation / classification device 30 through the abrasive material injection amount control mechanism 56 and the abrasive material automatic supply device 57 communicating with the lower end of the abrasive material tank 55, and from the 42 μm in the foreign matter separation / classification device 30. Large foreign matter is separated and classified, and the abrasive is supplied to the injection nozzle 44. A polishing material amount detection sensor 59 is provided between the foreign matter separation / classification device 30 and the injection nozzle 44, and the polishing material amount detection sensor 59 detects the amount of the polishing material passing therethrough, and ejects the polishing material. The amount is displayed.

The workpiece is placed on the transport roller 42 of the transport device on the main body 41, transported from right to left on the paper surface of FIG. 1, and static electricity of the workpiece is removed by the static eliminator 45, and blasting is performed. It is transported into the chamber 43. This blasting room 4
In the nozzle 3, the abrasive material from which foreign matter has been removed is sprayed by the injection nozzle 4.
4 is directed toward the workpiece. Therefore, PD
When forming a pattern having an uneven shape with a very narrow gap such as a high-definition rib of P, there is no obstacle that blast processing cannot be performed because foreign matter is clogged in a concave portion of a workpiece.

The abrasive material sprayed from the spray nozzle 44 onto the workpiece falls to the lower hopper, and the pipe 5 from the lower end of the hopper.
Foreign matter separation / classification device 10 riding on the air current generated in 1
In the foreign matter separating / classifying apparatus 10, foreign matter larger than 52μ mixed in the abrasive material, that is, foreign matter such as debris separated from the surface of the workpiece is separated and classified and removed. The carborundum # 600 and dust etc. of the abrasive material pass through the foreign matter separation / classification device 10 and are sent to the cyclone 54 via the communication pipe 53.

The air flow in the blast device 40 is generated by the suction of air by a blower 47 (air flow generating means) in the dust collecting device 62. That is, the airflow is in the order of hopper and conduit 5
1. Flow to the foreign matter separation / classification device 10, the communication pipe 53, the cyclone 54, the duct 61, and the dust collection device 62. The abrasive material that can be reused by the cyclone 54 and the dust composed of the crushed abrasive material and the fragments ground from the workpiece are classified. The reusable abrasive material stays in the lower part of the cyclone 54, while the dust rises in the center of the cyclone 54 by airflow and is sent to the dust collector 62 through a duct 61 communicating with the upper center. Then, the dust is collected by the dust collecting device 62 and the clean air is discharged from the blower 47 to the atmosphere.

The abrasive material remaining in the lower portion of the cyclone 54 is supplied to the abrasive material tank 5 connected to the lower end of the cyclone 54.
5 falls into. The abrasive material in the abrasive material tank 55 is supplied again to the injection nozzle 44 and injected as described above. The abrasive material is sprayed onto the workpiece from the spray nozzle 44 by repeating the above steps.

[Regarding Foreign Material Separating / Classifying Apparatus 10] The foreign matter separating / classifying apparatus 10 mounted on the blast device 40 described above.
Will be described in detail with reference to FIG. The foreign matter separating / classifying apparatus 10 is provided between the conduit 51 and the cyclone 54 (classifying means). Reference numeral 11 denotes a main body of the foreign matter separating / classifying apparatus 10. The main body 11 has a lower main body 15 having a cylindrical shape having a substantially circular cross section and a bottom surface, and an upper portion having a substantially conical shape having an upper portion narrowing upward. And a main body 14. A supply port 12 is formed in a lower side wall of the lower main body 15, and the above-described conduit 51 communicates with the supply port 12. On the other hand, a discharge port 13 is opened in the upper part of the upper body 14, and a communication pipe 53 communicating with the cyclone 54 is connected to the discharge port 13. Therefore, the airflow of the conduit 51 flows into the lower main body 15 from the supply port 12, becomes an ascending airflow in the main body 11, and flows from the outlet 13 of the upper main body 14 to the communication pipe 53.

The lower body 15 and the upper body 14 of the main body 11 are separated by a net 16. The mesh 16 is formed of a mesh through which the abrasive can pass, and in this embodiment, in response to the fact that the abrasive is a carborundum of # 600,
A mesh 16 made of a mesh of # 200 (having a hole diameter of about 52 μ) is provided. Note that the installation state of the mesh body 16 in the main body 11 is not limited to the present embodiment, but in this embodiment, the abrasive material that rises in the updraft easily passes through the mesh body 16. In consideration of the above, the surface of the net 16
1 is provided so as to be substantially orthogonal to the flow direction of the rising airflow.

The bottom 24 of the lower body 15 is formed at a predetermined distance from the bottom surface of the porous body 17 made of a gas-permeable material.
An air storage chamber 18 is formed between the porous body 17 and the bottom surface of the lower main body 15, and an air supply pipe 19 communicating with the air storage chamber 18 is provided on the bottom surface of the lower main body 15. The upper surface of the porous body 17 is located below the lower end of the supply port 12 described above. The porous body 17 includes a porous metal such as a sintered metal, a ceramic, a grindstone, a brick, a resin, and the like. In particular, the sintered metal is superior in strength as compared with the ceramic, the resin, and the like. This is also preferable in that a mechanism of density and size can be easily formed with a substantially uniform distribution.
Sintered metals and grindstones are particularly preferred in that they can generate an ascending airflow with a substantially uniform flow velocity. When compressed air of, for example, 1 kg / cm ² or more, in this embodiment, 1 kg / cm ² , is supplied into the air storage chamber 18 through the air supply pipe 19 from a compressed air supply source such as a compressor, the air in the air storage chamber 18 is The compressed air is blown up from the porous body 17 into the main body 11 in a uniform state as a rising airflow at a constant speed. The flow rate and the flow rate of the rising air flow rise the polishing material 21 by controlling the flow rate of the compressed air supplied into the air storage chamber 18 with a flow rate adjusting device such as a needle valve.
It is adjusted so that the foreign substance 22 falling from the 6 does not rise. In addition, it is necessary to select an appropriate porous body 17 according to the state of the pores of the porous body 17, that is, the processing conditions. As described above, the ascending airflow at a constant speed is generated from the bottom 24 of the main body 11 in a uniform state.

As an alternative, the material of the bottom wall of the bottom portion 24 of the main body 11 may be simply made of the porous body 17 without providing the air storage chamber 18. In this case, a negative pressure is generated in the main body 11 due to the generation of an upward airflow in the main body 11, and outside air is sucked into the main body 11 through the porous body 17 due to the negative pressure.

A large number of foreign substances 22 and dusts 23 are mixed in the cleaning material 21 carried by the airflow through the conduit 51. When these abrasives, foreign matter, dust and the like flow into the main body 11, they rise on the upward airflow and reach the net 16. Since the abrasive 21 and the dust 23 are smaller than # 200 of the mesh body 16, they pass through the mesh body 16 and flow into the upper body 14, from the upper outlet 14 of the upper body 14 through the communication pipe 53 and the cyclone 54 ( 1). However, foreign matter 22 larger than the mesh of the mesh 16 cannot pass through the mesh 16 and is prevented from rising by the mesh 16. Then, the buoyancy caused by the ascending airflow generated in the foreign matter 22 is reduced, and the foreign matter 22 does not generate buoyancy enough to rise again by the subsequent ascending airflow. To stay in.

It should be noted that some of the abrasives 21 and dust 23 may temporarily stop after colliding with the mesh 16.
Since 1 and dust 23 are light, they are carried by the following upward airflow. The air storage chamber 1 provided on the bottom surface of the lower body 15 described above.
The ascending airflow from 8 is effective in recovering the buoyancy of the abrasive material 21 and the dust 23 which have stopped once by colliding with the mesh body 16 and raising the same. However, the rising airflow from the air storage chamber 18 is adjusted so as not to generate buoyancy enough to cause the falling foreign substance 22 to rise again.

Therefore, since the updraft is constantly passing through the mesh 16, the abrasive 21 and the dust 23 are removed from the mesh 1.
6 is not clogged, while the dust 23 naturally falls due to gravity, so that the mesh 16 is not clogged and is always in a good mesh state.

The foreign matter 22 that has fallen on the upper surface of the porous body 17 is discharged at an appropriate time, such as after blasting. It is desirable to provide a discharge door for discharging foreign matter 22 on the side wall of the lower body 15 near the porous body 17.

[Regarding Foreign Material Separating / Classifying Apparatus 30] Next, the foreign matter separating / classifying apparatus 3 attached to the blasting apparatus 40
0 will be described in detail with reference to FIG. However, the same reference numerals are given to components having the same configuration as that of the foreign matter separating / classifying apparatus 10 described in FIG. 2 in the embodiment, and the description thereof will be simplified. The foreign matter separation / classification device 30 is used for the abrasive material tank 5
5 is provided in the middle of an abrasive supply pipe 49 for feeding the abrasive in the spray nozzle 44.

In this embodiment, the blast processing chamber 43 has 6
There are provided four injection nozzles 44, and each of the injection nozzles 4
The number of the abrasive supply pipes 49 communicating with 4 is a total of six. Therefore, a total of six foreign matter separating / classifying devices 30 are provided in the middle of each of the abrasive supply pipes 49.

In FIG. 3, a disk-shaped fixed frame 27 is fixed to the upper surface of the gantry 25 via four columns 26, and an insertion hole 38 is formed in the center of the fixed frame 27. The shaft 33 is inserted through a bearing 34 fixed to the lower surface of the fixed frame 27 so that the distal end of the shaft 33 projects above the fixed frame 27 so that the axial direction of the shaft 33 is substantially vertical. I'm bearing. The rear end of the shaft 33 is connected to a rotation shaft of a motor 28 fixed to the gantry 25 by a reduction gear 29.
Are connected so as to rotate.

In the fixed frame 27, six foreign matter separating / classifying devices 30 (only one is shown in FIG. 3) are arranged at substantially the same distance from the axis of the shaft 33 so as to surround the shaft 33. It is located at a distance. The structure of the foreign matter separation / classification device 30 is substantially the same as that of the foreign matter separation / classification device 10 (FIG. 2), except that the main body 11 is divided into a lower body 15 and an upper body 14. The lower body 15 is fixed to the fixed frame 27 via a flange. The upper body 14 is provided on the upper end surface of the lower body 15 with a mesh 31 therebetween. The reticulated body 31 is made of a mesh through which the abrasive can pass, and in this embodiment, the abrasive is # 600.
Corresponding to the above-mentioned carborundum, a mesh body 31 made of a mesh of # 250 (having a hole diameter of about 42 μ) is provided.
A supply port 12 provided at a lower portion of the lower body 15 is provided with an abrasive supply pipe 49a for supplying the abrasive in the abrasive tank 55 through an abrasive injection amount control mechanism 56 and an automatic abrasive supply device 57. An air storage chamber 18 is provided at the bottom 24 of the lower main body 15 via a porous body 17 at the bottom 24 of the lower main body 15 as in the foreign matter separation / classification apparatus 10 of FIG. Outlet 13 at the top of upper body 14
The abrasive supply pipe 4 for supplying the abrasive to the injection nozzle 44
9b.

In this embodiment, the net 31 and the upper body 14 are configured as follows. First, the support plate 32 is flat and forms a circular shape having substantially the same size as the fixed frame 27. The support plate 32 is fixed to the upper surface of a disk-shaped mounting plate 35 integrally mounted on the tip of the shaft 33 with screws. Have been. An insertion hole is provided in the support plate 32 at a position facing the upper end surface of the lower body 15, and a mesh 31 is stretched in the insertion hole, and the mesh 31 is in contact with the upper end surface of the lower body 15. Further, the upper and lower surfaces of the support plate 32 are sandwiched by four buffer members 37a and 37b arranged at predetermined intervals around the entire outer peripheral edge thereof, and the lower end surface of the buffer member 37a is fixed to the fixed frame 2.
7, a disk-shaped movable frame 36 is fixed to the upper end surface of the cushioning material 37b. The upper body 14 is fixed to the movable frame 36 at a position where the lower end surface of the upper body 14 corresponds to the upper end surface of each lower body 15. The movable frame 36 is vertically movable by a hydraulic cylinder (not shown), and the lower end surface of the upper body 14
The lower body 15 is configured to be able to contact and separate from the upper end surface.

An air nozzle 65 is provided with one air nozzle 65 on the fixed frame 27 at a position substantially the same distance as the distance from the axis of the shaft 33 to the center of each mesh member 31. The air nozzle 65 is provided so that air is jetted upward. The movable frame 36
Is provided with an insertion hole at a position facing the air nozzle 65, and the air injected from the air nozzle 65 passes through the insertion hole.

After the blasting for a predetermined time of about 1 to 2 hours is completed using the blasting device 40 equipped with the above foreign matter separating / classifying device 30, the movable frame 36 is lifted up by a hydraulic cylinder (not shown). The lower end surface of the upper main body 14 is separated from the upper end surfaces of the mesh body 31 and the lower main body 15. When the air is injected upward from the air nozzle 65, the motor 28 is started to rotate and the rotational force of the motor 28 is transmitted through the speed reducer 29 to rotate the shaft 33 once. The plate 32 makes one rotation,
When each of the six nets 31 of the support plate 32 passes through the air nozzle 65, foreign matter clogged in the net 31 is blown off by the air of the air nozzle 65 and removed. Thereafter, each net 31 is returned to the original position, the movable frame 36 is lowered via the hydraulic cylinder, and the lower end surface of each upper main body 14 is brought into contact with a predetermined position, that is, the upper end surfaces of the net 31 and the lower main body 15. Contact

In FIG. 3, as an alternative to the above-described embodiment, each component can be connected to vibration generating means 39 configured as follows. That is, the above-mentioned support plate 32 is attached to the upper surface of a disk-shaped vibrating plate 35a mounted so as to be able to vibrate in the lateral direction by the tip of the shaft 33. The tip of the shaft 33 is formed as an eccentric shaft,
The vibration plate 35a rotatably supports the eccentric shaft,
With the rotation of the eccentric shaft with the rotation of the shaft 33, the vibration plate 35a
Vibrates laterally. (The above configuration is the vibration generating means 3
9). Therefore, the rotation of the motor 28 is started and the motor 2 is started.
When the shaft 33 is rotated by transmitting the torque of FIG. 8 via the speed reducer 29, the vibration plate 35a vibrates in the lateral direction. A support plate 32 fixed to the upper surface of the vibration plate 35a;
The movable frame 36 fixed to the upper surface of the base 7 via the cushioning members 37a and 37b vibrates together with the vibrating plate 35a. As a result, the upper main body 14 and the mesh body 31 vibrate simultaneously.

Even if the foreign matter 22 is mixed in the abrasive material 21 carried by the airflow in the abrasive material supply pipe 49b, it is larger than # 250 (having a hole diameter of about 42 μ) of the net 31. The foreign substance 22 is blocked by the net 31 and cannot be
Fall under its own weight of 2. On the other hand, since the abrasive 21 is smaller than # 250 of the mesh 31, it flows into the upper body 14 through the mesh 31, and is injected from the outlet 13 on the upper of the upper body 14 through the abrasive supply pipe 49 b. It is fed to the nozzle 44 (FIG. 1). Moreover, in the present embodiment, since the reticulated body 31 is vibrating as described above, the foreign matter 22 is effectively removed from the reticulated body 31.
As a result, the abrasive material 21 which is temporarily stopped in the mesh body 31 and hardly passes through the mesh body 31 is easily separated from the mesh of the mesh body 31 by the vibration and rises in the rising airflow, and the grinding material 21 rises. It facilitates the sweep material 21 to pass through the net 31 more smoothly.

[Working Example of Workpiece] A working example of a high-definition rib of a PDP blasted by using the above-described blasting apparatus 40 will be described below. A workpiece (FIG. 5) having a low-melting glass layer 72 and a resist layer 73 formed on the surface of a glass substrate 71 is placed on a transport roller 42 of a transport device on a main body 41, and the workpiece is placed on the paper surface of FIG. The wafer is conveyed from the upper right to the left, and in the blasting chamber 43, the abrasive is sprayed from the surface of the low-melting glass layer 72 and the resist layer 73 of the workpiece from the spray nozzle 44. As shown in FIG. 5, the workpiece of the PDP is such that the pattern of the resist layer 73 is a parallel stripe having a width of 50 μm and an interval of 100 μm. Diameter 28μ)
The blast processing which requires advanced technology is performed because the abrasive material is sprayed.
Since a foreign substance larger than 42 μ is separated and classified by 0 to remove the foreign substance, it is possible to solve the problem that the foreign substance is caught between the ribs and cannot be blasted as in the related art. The low-melting glass layer 72 under the resist layer 73 is protected by the resist layer 73 and is not ground or sculpted with a polishing material, but the low-melting glass layer 72 other than the low-melting glass layer 72 under the resist layer 73. Are all ground and removed. As a result, according to the pattern of the resist layer 73, the plurality of ribs 7 having a width of 50 μm and a height of 200 μm are formed.
4 are formed in parallel stripes at an interval of 100 μ between the ribs 74 (FIG. 5).

The above blasting conditions are as shown in the table below.

[0061]

[Table 1]

[0062]

Since the present invention is configured as described above, it has the following effects.

The main body communicates with the airflow generating means and passes through the airflow. The main body is provided with a supply port through which the polishing material flows, and the main body has a supply port through which the polishing material is discharged. By providing a discharge port, a rising air current is generated in the main body, and the abrasive material and the foreign matter mixed together are fed into the air flow from the supply port, and the abrasive material and the foreign matter are together with the rising air flow in the main body. Rise. By passing this ascending airflow through a mesh made of a mesh through which the abrasive can pass,
The abrasive material passes through the mesh with the rising airflow and is discharged from the discharge port, but foreign matter is prevented from passing by the mesh and falls under its own weight, thus easily and reliably separating foreign matter from the abrasive material. A classifying method and apparatus can be provided.

Since the updraft always passes through the net, the net does not become clogged with abrasives or dust.
In addition, the foreign matter cannot pass through the mesh, but falls by its own weight, so that the foreign matter does not clog the mesh, so that the abrasive material can be supplied in a stable state at all times. Could be easily and reliably separated and classified.

By providing a bottom portion in the main body for retaining foreign matter that has fallen below the mesh body and providing a supply port in a lower side wall of the main body, the airflow can be increased in the main body. The foreign matter staying at the bottom could be easily discharged at an appropriate time without causing any trouble.

Since an air reservoir communicating with the compressed air supply source is provided at the bottom of the main body through a porous body having air permeability, an auxiliary upward airflow is applied to the inside of the main body. However, even the abrasive material having a reduced buoyancy due to a temporary stop at the mesh body could easily be lifted and passed through the mesh body.

The foreign matter separation / classification device of the present invention can be provided alone, but the abrasive material supply for feeding the abrasive material in the abrasive material tank of the blast device to the injection nozzle. Interposed in the middle of a pipe, or in the middle of a conduit that feeds abrasives and foreign matter, dust, etc., sprayed in the blasting device main body to a classification means such as a cyclone,
A device that can be mounted on other devices and that can be widely applied can be provided. Therefore, it is not necessary to perform the batter treatment as in the case of the conventional “sieve”, so that the work efficiency can be improved.

Further, by attaching vibration generating means for vibrating the main body or the net to the main body, and vibrating the net, foreign substances blocked by the net can be easily dropped. . On the other hand, even if the abrasive material was once stopped in the mesh of the mesh, it could easily be separated from the mesh immediately by the vibration and promoted the passage of the mesh with the ascending air current.

The main body includes an upper main body above the mesh body and a lower main body below the mesh body, and a lower end face of the upper main body and an upper end face of the lower main body are connected via the mesh body. By being provided detachably and configured to attach and detach the mesh, even if the mesh is clogged with foreign matter, the mesh can be easily taken out from the main body. It could be easily blown off.

[Brief description of the drawings]

FIG. 1 is a front view of a blast device equipped with a foreign matter separation / classification device according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a foreign matter separating / classifying apparatus showing an embodiment of the present invention.

FIG. 3 is a sectional view of a main part of a foreign matter separating / classifying apparatus showing another embodiment of the present invention.

FIG. 4 is an explanatory view of a high-definition rib of a PDP showing a processing example of blast processing using a blast apparatus equipped with a foreign matter separation / classification apparatus according to an embodiment of the present invention. FIG. 4A is a diagram showing a cross section of a main part of a high-definition rib of a PDP after blast processing, and FIG.

FIG. 5A is a front view showing a cross section of a main part of a classifier for “sieving” showing a conventional example. FIG.
FIG. 5A is a sectional view taken along line VV of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Foreign substance separation / classification apparatus 11 Main body (of the foreign substance separation / classification apparatus 10) 12 Supply port 13 Drain port 14 Upper body 15 Lower body 16 Net-like body 17 Porous body 18 Air storage chamber 19 Air supply pipe 21 Scavenging material 22 Foreign matter 23 Dust 24 Bottom (of main body 11) 25 Mount 26 Support 27 Fixed frame 28 Motor 29 Reducer 30 Foreign matter separating / classifying device 31 Reticulated body 32 Support plate 33 Shaft 34 Bearing 35 Mounting plate 35a Vibrating plate 36 Movable frame 37a, 37b Buffer material 38 Insertion hole 39 Vibration generating means (of the present invention) 40 Blasting device 41 Main body (of blasting device 40) 42 Conveying roller 43 Blasting chamber 44 Injection nozzle 45 Static eliminator 46 Air blow chamber 47 Air blower (Airflow generating means) 49 , 49a, 49b Abrasive supply pipe 51 Conduit 53 Communication pipe 54 Clone 55 Abrasive material tank 56 Abrasive material injection amount control mechanism 57 Abrasive material automatic supply device 59 Abrasive material amount detection sensor 61 Duct 62 Dust collector 65 Air nozzle 71 Glass substrate 72 Low melting glass layer 73 Resist layer 74 Rib 81 Frame 82 Bottom surface 83 Reticulated body 84 Vibration generating means (conventional example) 85 Duct (discharge of foreign substances) 86 Duct (collection of abrasive material) 87 Duct (supply of abrasive material)

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-6-297336 (JP, A) JP-A-6-63867 (JP, A) JP-A-2-1311872 (JP, A) JP-A-2- 284868 (JP, A) JP-A-8-25223 (JP, A) JP-B-56-41806 (JP, Y2) (58) Fields investigated (Int. Cl. ⁶ , DB name) B24C 9/00

Claims (12)

(57) [Claims] 1. A cleaning material and a foreign substance mixed in the polishing material are fed into the main body by an air current, and an ascending air flow is generated in the main body to raise both the cleaning material and the foreign substance. By passing the ascending airflow through a mesh capable of passing the abrasive material within the main body, the mesh prevents the foreign matter from passing therethrough and separates it. A method for separating and classifying foreign matter in an abrasive material characterized by passing through and classifying. 2. The method for separating and classifying foreign matter in an abrasive according to claim 1, wherein the foreign matter that has fallen below the mesh body is retained at a bottom of the main body to discharge the foreign matter. 3. The method of claim 1, wherein an auxiliary updraft is generated from the bottom of the main body to raise the blasting material in the main body and pass through the mesh. Classification method. 4. The foreign matter in the abrasive material according to claim 1, wherein the foreign body, which has been prevented from passing by the mesh body, is dropped by vibrating the main body or the mesh material, and the passage of the abrasive material is promoted. Separation / classification method. 5. The method for separating and classifying foreign matter in an abrasive material according to claim 2, wherein an airflow flows from a supply port in a lower side wall of the main body. 6. A main body passing through an air flow, a supply port through which an abrasive is introduced is provided at a lower portion of the main body, and an outlet through which the abrasive is discharged is provided at an upper portion of the main body. Airflow generating means for generating an upward airflow from the supply port to the discharge port is communicated with at least one of the supply port and the discharge port,
A mesh-like body is provided that prevents foreign matter in the abrasive material supplied by riding on an ascending airflow that passes through the main body between the supply port and the discharge port, and that is made of a mesh through which the abrasive material can pass. Characteristic device for separating and classifying foreign matter in abrasive material. 7. The apparatus for separating and classifying foreign matter in an abrasive according to claim 6, wherein the bottom of the main body is a bottom wall made of a porous body having air permeability, and the bottom wall is configured to communicate with the outside air. . 8. The apparatus for separating and classifying foreign matter in a cleaning material according to claim 6, wherein an air storage chamber communicating with a compressed air supply source is provided at a bottom portion of the main body via a porous body having air permeability. 9. The supply port communicates with an abrasive material tank of a blasting device via an abrasive supply pipe, while the discharge port communicates with an injection nozzle via another abrasive supply pipe. 9. The apparatus for separating and classifying foreign matter in an abrasive material according to claim 6, 7, or 8. 10. An abrasive material sprayed in the blasting apparatus main body and a foreign matter generated by collision of the abrasive material with the supply port,
A conduit for feeding dust and the like is connected, and the outlet is connected to a classifying means for classifying the abrasive and the dust.
Or the apparatus for separating and classifying foreign matter in an abrasive as described in 8 above. 11. The apparatus for separating and classifying foreign matter in an abrasive material according to claim 6, wherein the main body is provided with vibration generating means for vibrating the main body or the net-like body. 12. The main body includes an upper main body above the mesh body and a lower main body below the mesh body, and a lower end face of the upper main body and an upper end face of the lower main body are connected via the mesh body. The apparatus for separating and classifying foreign matter in an abrasive material according to any one of claims 6 to 9, wherein the apparatus is provided so as to be detachable, and is configured to attach and detach the mesh body.