JP7119931B2 - liquid ejecting head, liquid ejecting apparatus - Google Patents

Description

The present invention relates to a liquid ejecting head and a liquid ejecting apparatus.

2. Description of the Related Art A liquid ejecting head is provided with a plurality of parallel liquid flow paths, nozzles, and a pressure generating section for generating pressure in a part of the flow path for each flow path, and ejects a liquid such as ink from the plurality of nozzles. known (for example, Patent Document 1).

JP 2016-163965 A

In such a liquid jet head, when pressure is generated by the pressure generating section, pressure vibration having the natural vibration period Tc is generated in the ink in the flow path. set. It is known that the natural vibration period Tc is affected by, for example, the difference in the size of the flow path including the pressure chamber.

In a liquid ejecting head having a plurality of nozzles, ejection of ink is controlled for each nozzle. The inventors have found that when pressure is generated in pressure chambers corresponding to a plurality of nozzles, the inertance increases at the inlets to each flow path including the pressure chambers from the common flow path because each pressure chamber scrambles for ink. A new problem was found that the natural vibration period Tc of the ink fluctuates depending on the ejection situation. If the natural vibration period Tc fluctuates, the timing at which pressure is generated in the pressure chamber is shifted by the amount corresponding to the fluctuation of the natural vibration period Tc. As a result, there arises a problem that the ink ejection amount and ejection speed fluctuate (hereinafter also referred to as "crosstalk").

According to one aspect of the present invention, a liquid jet head that jets liquid to the outside is provided. The liquid ejecting head includes a plurality of nozzles for ejecting the liquid, and a plurality of pressure generating units individually arranged in each of the plurality of pressure chambers for ejecting the liquid from the nozzles by changing the pressure of the pressure chambers. each of the plurality of nozzles is individually arranged in a plurality of flow paths including a plurality of communication passages communicating with each of the plurality of pressure chambers; and the plurality of communication passages and the plurality of pressure chambers. a common flow path for at least one of supplying and discharging liquid. The plurality of communication paths are arranged via adjacent communication paths and partition walls, the plurality of pressure chambers are arranged via adjacent pressure chambers and partition walls, and the compliance of the partition walls of the communication paths is controlled by the pressure chambers. greater than the bulkhead compliance.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory diagram schematically showing the configuration of a liquid ejecting apparatus according to a first embodiment; FIG. 2 is an explanatory diagram showing an exploded view of main head constituent members of the liquid jet head. FIG. 3 is a cross-sectional view of the liquid jet head at the III-III position in FIG. 2; FIG. 4 is an explanatory diagram schematically showing ink paths in a plan view of the liquid jet head; FIG. 5 is an enlarged plan view of range Ar in FIG. 4 ;

A. First embodiment:
FIG. 1 is an explanatory diagram schematically showing the configuration of a liquid ejecting apparatus 100 according to an embodiment of the invention.
The liquid ejecting apparatus 100 is an inkjet printing apparatus that ejects ink, which is an example of liquid, onto the medium 12 . The liquid ejecting apparatus 100 performs printing on various media 12, such as printing paper, resin film, cloth, or any other desired material. The X direction shown in FIG. 1 and subsequent drawings is the conveying direction (main scanning direction) of the liquid jet head 26, which will be described later, and the Y direction is the medium feeding direction (sub-scanning direction) orthogonal to the main scanning direction. , the Z direction is the ink ejection direction perpendicular to the XY plane. When specifying the direction, the positive direction is indicated by "+" and the negative direction is indicated by "-", and both positive and negative signs are used for direction notation.

The liquid ejecting apparatus 100 includes a liquid container 14 , a transport mechanism 22 that delivers the medium 12 , a control unit 20 , a head moving mechanism 24 and a liquid ejecting head 26 . The liquid container 14 individually stores a plurality of types of ink ejected from the liquid ejecting head 26 . As the liquid container 14, a bag-like ink pack made of a flexible film, an ink tank capable of replenishing ink, or the like can be used. The control unit 20 includes processing circuits such as a CPU (Central Processing Unit) and FPGA (Field Programmable Gate Array) and storage circuits such as semiconductor memory, and controls the transport mechanism 22, the head moving mechanism 24, the liquid jet head 26, and the like. Control. The transport mechanism 22 operates under the control of the control unit 20 and feeds the medium 12 in the +Y direction.

The head moving mechanism 24 includes a transport belt 23 stretched over the printing range of the medium 12 in the X direction, and a carriage 25 that accommodates the liquid jet head 26 and is fixed to the transport belt 23 . The head moving mechanism 24 operates under the control of the control unit 20, and reciprocates the carriage 25 by moving the liquid jet head 26 in the main scanning direction (X direction). During reciprocation of the carriage 25, the carriage 25 is guided by a guide rail (not shown). A head configuration in which a plurality of liquid jet heads 26 are mounted on the carriage 25 or a head configuration in which the liquid container 14 is mounted on the carriage 25 together with the liquid jet heads 26 may be employed.

The liquid jet head 26 jets the ink supplied from the liquid container 14 toward the medium 12 from the plurality of nozzles Nz under the control of the control unit 20 . A desired image or the like is printed on the medium 12 by ejecting ink from the nozzles Nz during the reciprocating movement of the liquid ejecting head 26 . As shown in FIG. 1, the liquid jet head 26 has a nozzle row in which a plurality of nozzles Nz are arranged along the sub-scanning direction. have columns. These two rows of nozzles are shown as a first nozzle row L1 and a second nozzle row L2 in the figure, and the nozzles Nz of the first nozzle row L1 and the nozzles Nz of the second nozzle row L2 are scanned in the main scanning direction. Prepare to line up in the direction. In the following description, the central axis is the center of the first nozzle row L1 and the second nozzle row L2, and the YZ plane extending in the Y direction including this central axis is referred to as the central plane AX for convenience of explanation. The arrangement of the nozzles Nz in the first nozzle row L1 and the second nozzle row L2 may be staggered in the medium feeding direction (Y direction). Also, the first nozzle row L1 and the second nozzle row L2 are provided in accordance with the plurality of types of ink provided in the liquid container 14, but the illustration of the other nozzle rows is omitted.

FIG. 2 is an explanatory diagram showing the main components of the liquid jet head 26 in an exploded view. The liquid jet head 26 having the first nozzle row L1 and the second nozzle row L2 is a layered body in which head constituent materials are layered. In FIG. 2, for the convenience of understanding, a part of the first flow path substrate 31, which is a constituent material, is broken and shown. 3 is a sectional view taken along line III-III in FIG. Further, in order to facilitate understanding of the fracture position in FIG. 3, FIG. 4 described later also shows the III-III fracture plane. The structure of the liquid jet head 26 will be described below with appropriate reference to both figures. 2 and 3, the thickness of each constituent member illustrated does not indicate the actual thickness of the constituent member.

As shown in FIGS. 2 and 3, the liquid jet head 26 includes a housing portion 48, a second flow path substrate 32, a first communication plate 311, and a second communication plate 312 that constitute the flow path forming member 30. −The layers are stacked in this order from the upper side in the Z direction. The first communication plate 311 and the second communication plate 312 are connected to each other by an adhesive to form the first flow path substrate 31, which is a single plate body. FIG. 2 shows the -Z direction side surface of the first communication plate 311, which is a part of the first flow path substrate 31 (hereinafter also referred to as "upper surface Fa of the first flow path substrate 31"), and the first flow path substrate 31. The surface of the second communication plate 312, which is a part of the circuit board 31, on the -Z direction side (hereinafter also referred to as "the lower surface Fb of the first channel board 31") is shown.

The nozzle plate 50 and the vibration absorber 54 are attached to the lower surface Fb of the first flow path substrate 31 at positions that do not overlap each other. The housing part 48 is a member that covers the outer surfaces of the first flow path substrate 31 and a protective member 46 to be described later, and is formed by injection molding of a resin material. The housing portion 48 and protective member 46 are not shown in FIG. 2 to facilitate understanding of the technology.

The liquid ejecting head 26 has a configuration related to the nozzles Nz of the first nozzle row L1, a configuration related to the nozzles Nz of the second nozzle row L2, and each flow path connected to each nozzle Nz on the center plane AX Prepared so as to be symmetrical across the That is, the first portion P1 on the +X direction side and the second portion P2 on the −X direction side of the liquid jet head 26 have the same configuration. The nozzles Nz of the first nozzle row L1 belong to the first portion P1, the nozzles Nz of the second nozzle row L2 belong to the second portion P2, and the central plane AX serves as the interface between the first portion P1 and the second portion P2. .

The flow path forming member 30 is configured by stacking two second flow path substrates 32 arranged in parallel in the X direction on the upper surface Fa side of the first flow path substrate 31 . The second channel substrate 32 is a plate body elongated in the Y direction.

As will be described below, the liquid flow path is defined by openings and grooves provided in the first communication plate 311 and the second communication plate 312 constituting the first flow path substrate 31 and the second flow path substrate 32. It is formed by combining. In addition, the grooves provided on the lower surface Fb of the first flow path substrate 31 are formed by attaching the nozzle plate 50 and the vibration absorbers 54 to the bottom surface Fb of the first flow path substrate 31 . Form a flow path between

In the first channel substrate 31, the first communication plate 311 and the second communication plate 312 are connected to form a second inflow chamber 59, a liquid supply chamber 60, an individual supply channel 61, and a communication channel 63. , a first individual channel 71 and a first inlet chamber 65 are provided. The first inflow chamber 65 is an opening whose longitudinal direction is the Y direction, and is provided at the center of the first channel substrate 31 in the X direction so as to extend in the Y direction. On the other hand, the second inflow chambers 59 are openings whose longitudinal direction is the Y direction, and are provided on both sides of the first channel substrate 31 in the X direction so as to extend in the Y direction. On both sides of the first inflow chamber 65 on the lower surface Fb of the first flow path substrate 31 , grooves are formed as the first individual flow paths 71 to reach the communication paths 63 .

The first communication plate 311 is a silicon substrate and includes a part of the communication path 63 and a second inflow chamber 59 that is part of the second common flow path 52 . The second communication plate 312 is a glass substrate and includes a part of the communication path 63 and the supply liquid chamber 60 that is a part of the second common flow path 52 . The first communication plate 311 and the second communication plate 312 are stacked in this order from the upper side in the -Z direction, thereby connecting a part of the communication path 63 and a part of the second common flow path 52 to each other. .

In addition, by connecting the first communication plate 311 and the second communication plate 312 , a flow continuing from the second inflow chamber 59 to the center side of the first flow path substrate 31 is provided on the lower surface Fb of the first flow path substrate 31 . A channel is formed as a feed chamber 60 . In the following explanation of the configuration of each part, the first flow path substrate 31 in which the first communication plate 311 and the second communication plate 312 are connected will be treated. The second inflow chamber 59 and the supply liquid chamber 60 constitute the second common flow path 52 together with other constituent members provided in the housing portion 48 . The first inflow chamber 65 constitutes the first common flow path 51 together with other constituent members similarly provided in the housing portion 48 . The configuration of the first common channel 51 and the second common channel 52 will be described in detail later.

A number of communication paths 63 and individual supply paths 61 corresponding to the number of nozzles Nz are provided at positions sandwiched between the first inflow chamber 65 and the second inflow chamber 59 . These communication paths 63 and individual supply paths 61 are rectangular openings provided in the first flow path substrate 31 . The communicating path 63 and the individual supply path 61 form a second individual channel 72 together with the pressure chamber 62 provided in the second channel substrate 32 . The individual supply path 61 is formed only in the first communication plate 311 of the first flow path substrate 31, is connected to the pressure chamber 62 on the -Z direction side, and is connected to the supply liquid chamber 60 of the second communication plate 312 on the Z direction side. is connected with The detailed configuration and function of the second individual channel 72 will be described later in detail together with the first individual channel 71 .

The two second flow path substrates 32 are fixed to the upper surface Fa on the -Z direction side of the first flow path substrate 31 using an adhesive. The two second flow path substrates 32 are installed on the first portion P1 and the second portion P2 of the upper surface Fa of the first flow path substrate 31, respectively. A plurality of rectangular grooves are formed on the lower surface side of the second channel substrate 32 . When the second flow path substrate 32 is adhered to the first portion P1 and the second portion P2 of the first flow path substrate 31, the groove forms the pressure chamber 62 together with the upper surface Fa of the first flow path substrate 31. do. The contours of the pressure chambers 62 of the second channel substrate 32 on the +Z direction side include the contours of the individual supply channels 61 and the communication channels 63 of the first channel substrate 31 on the −Z direction side. Thereby, the pressure chamber 62 is connected to the individual supply channel 61 and the communication channel 63 to form the second individual channel 72 .

FIG. 3 shows the length D1 of the individual supply path 61 in the individual supply path 61 in the direction along the ink distribution direction, and the length D1 of the communication path 63 in the direction along the ink distribution direction in the communication path 63. D2 is shown. In this specification, the direction along the direction of ink flow in the channel means the macroscopic direction of ink flow in the central portion of the channel. In this embodiment, the length D1 of the individual supply path 61 is smaller than the length D2 of the communication path 63. As shown in FIG.

Piezoelectric elements 44 are attached to respective portions corresponding to the pressure chambers 62 on the upper surface (the surface on the −Z direction side) of the second flow path substrate 32 , and constitute a vibrating portion 42 . The depth of the grooves forming the pressure chambers 62 is slightly shorter than the thickness of the second channel substrate 32 . In other words, the second channel substrate 32 is made thin in the portion of the pressure chamber 62 , and the wall surface is deformable according to the strain of the piezoelectric element 44 .

The nozzle plate 50 attached to the lower surface Fb of the first flow path substrate 31 is a planar member having a plurality of nozzles Nz. The nozzle plate 50 is formed of a silicon (Si) single crystal substrate, and nozzles Nz are formed by a semiconductor manufacturing technique, for example, a processing technique such as dry etching or wet etching.

The nozzle Nz is a through hole for ejecting ink to the outside. In the present embodiment, the ink ejection direction of the nozzles Nz is the Z direction. A plurality of nozzles Nz are linearly arranged as a first nozzle row L1 and a second nozzle row L2.

The −Z-direction side wall surface of the nozzle plate 50 is attached to the lower surface Fb of the first flow path substrate 31 so that each nozzle Nz is positioned directly below each communicating path 63 (Z-direction side). At this time, the −Z direction wall surface of the nozzle plate 50 other than the nozzles Nz is the first inflow chamber 65 of the first flow path substrate 31, the communication passage 63, and the groove between the first inflow chamber 65 and the communication passage 63. It covers the first individual channel 71 provided as. Therefore, the nozzle plate 50 forms the inner walls of the flow passages at the first inflow chambers 65 , the first individual flow passages 71 , and the communication passages 63 of the first flow passage substrate 31 .

As shown, the two vibration absorbers 54 arranged on both sides of the nozzle plate 50 in the X direction have flexible membranes. The vibration absorber 54 is formed of, for example, a compliance substrate. The −Z direction side surface of each vibration absorber 54 is adhered to the first portion P1 and the second portion P2 of the lower surface Fb of the first channel substrate 31 using an adhesive. At this time, the vibration absorber 54 is arranged so as to cover the supply liquid chamber 60 and the second inflow chamber 59 of the first channel substrate 31 . As a result, the surface of the vibration absorber 54 on the -Z direction side becomes the inner wall of each channel in the portions of the supply liquid chamber 60 and the second inflow chamber 59 .

As shown in FIG. 3, the housing portion 48 is fixed to the upper surface Fa of the flow path forming member 30 on the −Z direction side with an adhesive. A second liquid chamber 58, which is a groove having the same shape as the second inflow chamber 59, is provided in the housing portion 48 at a position corresponding to the second inflow chamber 59 provided in the first channel substrate 31. . This second inflow chamber 59 is provided with a second circulation port 57 at the center in the Y direction. The second liquid chamber 58 and the second circulation port 57 form the second common flow path 52 together with the supply liquid chamber 60 and the second inflow chamber 59 already described. Thus, the second liquid chamber 58 forms one space by being connected to the second inflow chamber 59, and functions as an ink storage chamber (reservoir Rs2). As a result, the second common flow path 52 that is a common flow path for at least one of supplying and discharging ink in common to the plurality of communication paths 63 and the pressure chambers 62 is formed. In addition, as described above, the first flow path substrate 31 in the liquid jet head 26 of the present embodiment is formed by laminating the first communication plate 311 and the second communication plate 312 so as to form part of the second common flow path 52. are connected to each other. As a result, the volume of the second common channel 52 connected to the second individual channel 72 can be increased, making it easier to supply ink to the second individual channel 72 .

A first liquid chamber 66, which is a groove having the same shape as the first inflow chamber 65, is provided at a position corresponding to the first inflow chamber 65 in the center of the housing portion 48 in the X direction. A first circulation port 67, which is a through hole, is provided at both ends. The first liquid chamber 66 and the first circulation port 67 form the first common flow path 51 together with the already-described first inflow chamber 65 . The first liquid chamber 66 and the first inflow chamber 65 form an ink storage chamber (reservoir Rs1). As a result, the plurality of communication paths 63 and the pressure chambers 62 form the first common flow path 51 that is a common flow path for at least one of supplying and discharging ink in common.

Further, in the housing part 48, a groove part having the same shape as the second flow path substrate 32 is also formed at a position corresponding to the second flow path substrate 32. A protective member 46 for protecting the attached piezoelectric element 44 is accommodated.

The structure of the liquid jet head 26 described above is organized as follows. A first common flow path 51 is formed along the Y direction at the center of the liquid jet head 26 in the X direction. On the other hand, second common flow paths 52 are formed along the Y direction on both sides of the liquid jet head 26 in the X direction. Looking mainly at the communicating passage 63 in which the nozzle Nz exists, the first individual flow passage 71 exists between the first common flow passage 51 and the second common flow passage 52 between the second common flow passage 52 and the second common flow passage 52 . Individual channels 72 are present. Therefore, if the first common channel 51 to the second common channel 52 are filled with liquid, when the fluid flows in from the first circulation port 67 of the first common channel 51, the fluid flows in the common channel. From a certain first common channel 51, it passes through a plurality of first individual channels 71 to reach an individual communication channel 63, and from here through a plurality of second individual channels 72, the common flow It gathers again in the second common channel 52 which is a channel. When the fluid flows in from the second circulation port 57 of the second common channel 52, the fluid flow is reversed. Thus, the liquid jet head 26 of the present embodiment has a symmetrical structure on both sides of the central plane AX shown in FIG. The channels from the first common channel 51 to the second common channel 52 are collectively referred to as circulation channels 90 . It is preferable that the fluid in the circulation flow path 90 circulates at least when the liquid is ejected from the nozzles Nz. Thereby, the occurrence of crosstalk can be suppressed. Moreover, it is more preferable that the fluid in the circulation flow path 90 circulates even when the injection is not performed. This can promote the prevention of drying of the nozzles Nz and the removal of air bubbles and foreign matter in the circulation flow path 90 .

In the liquid jet head 26 of the present embodiment, a plurality of individual channels 70 and one second common channel 52 are provided on the first portion P1 side for one first common channel 51. A plurality of individual channels 70 and one second common channel 52 are provided on the P2 side. A plurality of individual channels 70 in one circulation channel 90 are also referred to as "individual channel group 17". The liquid jet head 26 includes individual flow path groups 17 in each of the first portion P1 and the second portion P2. That is, in the liquid jet head 26 of the present embodiment, one first common channel 51 and two second common channels 52 are connected by two individual channel groups 17 to form two circulation channels 90 . configure. As described above, the liquid ejecting head 26 of the present embodiment includes a plurality of circulation channels 90, thereby increasing the number of nozzles Nz provided in one liquid ejecting head 26. FIG.

The piezoelectric element 44 is a so-called piezo element, which is an active element that deforms upon receiving a drive signal from the control unit 20 . The piezoelectric element 44 generates vibration by this deformation. Vibration by the piezoelectric element 44 is transmitted to the vibrating portion 42 and causes the pressure of the ink inside the pressure chamber 62 to change. Thus, the vibrating section 42 having the piezoelectric element 44 functions as a pressure generating section that changes the pressure of the liquid in the pressure chamber 62 for each nozzle Nz of the first nozzle row L1 and the second nozzle row L2. This pressure change reaches the nozzle Nz through the communication path 63, and ejects ink from the nozzle Nz.

In the liquid jet head 26 of the present embodiment, when the ink flows inside the flow path, the flow path resistance in the first individual flow path 71 on the upstream side of the communication path 63 corresponds to that on the downstream side of the communication path 63. It is set larger than the flow path resistance of each of the pressure chamber 62 and the individual supply path 61 . Therefore, it is possible to suppress the occurrence of crosstalk accompanying the supply of ink to the first individual flow paths 71 during liquid ejection.

When the flow path resistance in the first individual flow path 71 on the upstream side of the communication path 63 is set to be greater than the flow path resistance in each of the pressure chamber 62 and the individual supply path 61 on the downstream side of the communication path 63 As in the liquid jet head 26 of the present embodiment, it is preferable that the vibration absorber 54 is provided at a position on the inner wall of the second common channel 52 on the downstream side of the channel. In particular, it is most preferable to provide the vibration absorber 54 in the supply liquid chamber 60 closest to the individual supply path 61 in the second common flow path 52 . At the time of liquid ejection, the pressure generated in the pressure chamber 62 supplies ink to the communication path 63 from the second common flow path 52 on the side with the lower flow path resistance, in addition to the ink in the first individual flow path 71 . be. Therefore, by providing the vibration absorber 54 in the second common flow path 52, the inertance of the second common flow path 52 can be increased, and the occurrence of crosstalk can be suppressed.

FIG. 4 is an explanatory diagram schematically showing ink paths in plan view from the upper surface side of the liquid jet head 26 . In order to facilitate understanding of the technology, FIG. 4 also shows members that cannot be visually recognized by the members positioned on the front side of the drawing.

The liquid jet head 26 of the present embodiment is configured by the first common channel 51, the second common channel 52, the first individual channel 71, and the second individual channel 72, as described above. Two circulation channels 90 are provided on both sides of the central plane AX. The liquid jet head 26 further includes a liquid container 14 , a pump 15 , a supply pipe 16 and a circulation mechanism 75 .

The liquid container 14 is a tank that stores ink. Liquid container 14 is connected to pump 15 . The supply pipe 16 is a pipe for supplying ink supplied from the liquid container 14 to the circulation flow path 90 . In this embodiment, four supply pipes 16 are provided and connected to two first circulation ports 67 and two second circulation ports 57, respectively.

Ink stored in the liquid container 14 is pressure-fed through the supply pipe 16 by the pump 15 . The pressure-fed ink is selectively supplied to the second circulation port 57 or the first circulation port 67 according to the ink circulation direction of the circulation channel 90 . In this embodiment, the ink stored in the liquid container 14 is supplied to the first circulation port 67 .

The circulation mechanism 75 is a flow mechanism that moves the ink supplied to the second circulation port 57 or the first circulation port 67 through the circulation channel 90 . In the present embodiment, the circulation mechanism 75 is connected to the side of the liquid jet head 26 opposite to the side where the nozzles Nz are provided (that is, the upper surface side). The circulation mechanism 75 includes an ink storage tank 76 and a pressure adjustment section 77 . The pressure adjustment unit 77 adjusts the pressure of the ink inside the ink storage tank 76 to be lower than the pumping pressure of the pump 15 . Circulation of ink in the circulation flow path 90 is realized by adjusting the pressure by the pump 15 and the pressure adjustment section 77 .

The arrows shown in FIG. 4 schematically represent the direction of ink flow in this embodiment. The ink stored in the liquid container 14 and the ink stored in the ink storage tank 76 are pumped to the first circulation port 67 of the first common flow path 51 . Ink supplied from the first circulation port 67 passes through the first liquid chamber 66 and reaches the first inflow chamber 65 . The ink that reaches the first inflow chamber 65 contacts the inner wall of the nozzle plate 50 and flows along the surface direction of the nozzle plate 50 . At this time, the ink spreads along the Y direction and is distributed to the first individual channels 71 of the individual channel groups 17 of the first portion P1 and the second portion P2.

The ink that has flowed into the first individual flow path 71 flows along the surface direction of the nozzle plate 50 and is supplied to the communication path 63 of the second individual flow path 72 . Ink flowing into the communication path 63 is guided to the pressure chamber 62 connected to the communication path 63 . At this time, when the vibration of the piezoelectric element 44 is transmitted to the ink, the ink in the communication path 63 is ejected outward from the nozzle Nz.

Ink that has flowed into the pressure chamber 62 is guided to the individual supply path 61 . The inks discharged from the individual supply channels 61 of the individual channel group 17 join in the supply liquid chamber 60 of the second common channel 52 . The ink in the supply liquid chamber 60 is guided to the second inflow chamber 59 along the wall surface of the vibration absorber 54 . The ink that has flowed into the second inflow chamber 59 flows into the second liquid chamber 58 and is discharged from the second circulation port 57 into an ink storage tank 76, which will be described later.

As described above, in the liquid jet head 26 of the present embodiment, the ink supplied to the first common flow path 51 passes through the first individual flow path 71 and the second individual flow path 72 to reach the second common flow path. 52. That is, the first common flow path 51 is upstream of the ink flow path in this embodiment, and the second common flow path 52 is downstream of the ink flow path. The ink that has passed through the second common flow path 52 is sent to the circulation mechanism 75 and supplied to the first common flow path 51 again. As described above, the liquid jet head 26 of the present embodiment circulates the ink by the two circulation channels 90 and the circulation mechanism 75 . Note that the internal pressure of the flow path on the downstream side becomes lower than the internal pressure of the flow path on the upstream side due to attenuation of the pressure applied to the pressure-fed ink.

FIG. 5 is a plan view enlarging the range Ar in FIG. FIG. 5 shows the first common channel 51 and the second common channel 52 of the circulation channel 90, as well as the three individual channels 70 on the +Y direction end side. Hereinafter, these three individual channels 70 are an individual channel 70D located at the end on the +Y direction side, an individual channel 70a adjacent to the individual channel 70D, and an individual channel 70b adjacent to the individual channel 70a. represented as

The individual channel 70D is a so-called dummy channel. In the present embodiment, the channel configuration of the individual channel 70D is the same as the channel configuration of the other individual channels 70, and the ink also flows through the individual channel 70D. However, the piezoelectric element 44 of the individual channel 70</b>D is not driven, and ink is not ejected from the nozzle Nz of the individual channel 70 . It should be noted that the nozzle Nz of the individual channel 70D may not be provided. Similarly, piezoelectric element 44 may not be provided. In such a mode, any mode may be used as long as the ink is not ejected from the individual flow path 70D.

In the liquid jet head 26 of the present embodiment, the individual flow path 70D positioned at the end is provided with the individual flow path 70a on the -Y direction side, but has a wall surface made of a member on the +Y direction side. That is, the compliance of the wall surface on the +Y direction side is substantially zero. Therefore, each circulation flow path 90 is provided with individual flow paths 70D as dummy flow paths on both end sides arranged along the Y direction. As a result, the individual channel 70a adjacent to the dummy channel can also obtain the compliance of the partition wall of the individual channel 70D, which is the dummy channel.

The configuration of the compliance of the liquid jet head 26 according to the present embodiment will be described below with reference to FIGS. 5 and 3. FIG. In the liquid jet head 26 of the present embodiment, the communication passage 63 of the individual flow channel 70a is arranged with the communication passage 63 of the individual flow channel 70b, which is adjacent to the -Y direction side, via the partition wall W5, and is adjacent to the +Y direction side. The communication path 63 of the individual flow path 70D is arranged via the partition wall W1. The thickness of the partition wall W1 is the thickness T1. The pressure chambers 62 of the individual channel 70a are arranged with the pressure chambers 62 of the individual channel 70b via a partition wall W6, and the pressure chambers 62 of the individual channel 70D are arranged with a partition wall W2 interposed therebetween. Similarly, the individual supply channel 61 and the first individual channel 71 of the individual channel 70a are arranged with the individual channel 70b via the partition wall W7 and the partition wall W8, respectively, and are arranged with the individual channel 70D via the partition wall W3 and the partition wall W3, respectively. Arranged through W4. FIG. 5 shows respective thicknesses T1, T2, T5 and T6 of the partition walls W1, W2, W5 and W6.

In the liquid jet head 26 of the present embodiment, the total value of the compliances C1 and C5 of the partition walls W1 and W5 adjacent to the communication path 63 is equal to the compliance C2 and C6 of the partition walls W2 and W6 on both sides of the pressure chamber 62 and the first individual It is larger than the total value of the compliances C4 and C8 of the partition walls W4 and W8 on both sides of the channel 71 and the compliances C3 and C7 of the partition walls W3 and W7 of the individual supply channel 61 . That is, it is represented by the following formula (1).
(C1+C5)>(C2+C3+C4+C6+C7+C8) (1)

In the individual flow path 70a, the pressure generating portion of the individual flow path 70a causes the pressure vibration of the natural vibration period Tc due to the fluctuation of the volume of the pressure chamber. More specifically, when the pressure generator causes pressure fluctuations in the ink in the pressure chamber 62 to eject the ink from the nozzle Nz, the ink in the pressure chamber 62 is affected by the pressure fluctuation. A pressure vibration (natural vibration of ink) is excited that behaves as if the inside is an acoustic tube. This natural vibration period Tc can be expressed by the following equation (2).
Tc=2Π√(M×C) (2)
M: Inertance of individual channel 70a C: Compliance of individual channel 70a

For example, when a plurality of pressure generating portions of the individual flow paths 70 are driven simultaneously, the ink inside the first inflow chamber 65 is supplied to the plurality of first individual flow paths 71 . As a result, adjacent first individual flow paths 71 behave as if they are competing for ink. As a result, the partition walls between the channels are pseudo-extended, and the inertance of the first individual channel 71 may increase. Therefore, the inertance M2 when the pressure generating units of the plurality of individual flow paths 70 are simultaneously driven can be expressed by the following equation (3).
M2=M1+ΔM (3)
M1: Inertance ΔM of the channel when the pressure generating part of one individual channel 70 is driven: The partition wall between the first individual channels 71 adjacent to one individual channel 70 is pseudo-extended to increase Estimated Inertance Therefore, the inertance of natural vibration period Tc2 increases by ΔM with respect to natural vibration period Tc1, and the value of the period increases.

Assuming that the natural vibration period Tc when the pressure generating portion of one individual channel 70 is driven is the natural vibration period Tc1, the following equation (4) can be used.
Tc1=2π√(M1×C1) (4)
M1: total value of inertance of the individual channels 70 through which ink flows C1: total value of compliance when the pressure generating section of one individual channel 70 is driven At this time, the compliance C1 is expressed by the following equation (5). can be represented by
C1=Ci1+Cd1+Cw1 (5)
Ci1: Compliance of the ink in the individual flow path 70 when the pressure generating section of one individual flow path 70 is driven Cd1: Vibration of the vibrating section 42 when the pressure generating section of one individual flow path 70 is driven Plate compliance Cw1: compliance of the partition wall of the individual channel 70 when the pressure generating part of one individual channel 70 is driven

Assuming that the natural vibration period Tc when the pressure generating portions of the plurality of individual flow paths 70 are simultaneously driven is the natural vibration period Tc2, the following equation (6) can be used.
Tc2=2Π√(M2×C2) (6)
C2: Total value of compliance when a plurality of pressure generating units are driven simultaneously As described above, the natural vibration period Tc2 is longer than the natural vibration period Tc1.

Also, when the pressure generators of the plurality of individual flow paths 70 are driven simultaneously, substantially the same pressure is generated in each pressure chamber 62 . Therefore, the partitions between the pressure chambers 62 are not deformed by substantially the same pressure facing each other (balancing), and the compliance Cw2 of the partitions of the individual channels 70 becomes substantially zero. Therefore, compliance C2 can be expressed by the following equation (7).
C2=Ci2+Cd2 (7)
Ci2: Compliance of the ink in the individual flow paths 70 when the pressure generating sections of the plurality of individual flow paths 70 are driven Cd2: Vibration of the vibrating section 42 when the pressure generating sections of the plurality of individual flow paths 70 are driven Plate Compliance Here, the compliance Ci of the ink in the individual channels 70 is defined by the physical properties of the ink and the volume of the channels. Therefore, the magnitude of the ink compliance Ci does not change between when the pressure generating portion of one individual channel 70 is driven and when the pressure generating portions of a plurality of individual channels 70 are driven. Therefore, it can be considered that Ci1=Ci2. Similarly, the direction in which the diaphragm deforms is perpendicular to the direction in which the plurality of individual channels 70 are arranged. Therefore, the compliance Cd of the vibrating plate of the vibrating portion 42 is not affected by each other in the plurality of individual flow paths 70 . Therefore, it can be considered that Cd1=Cd2.
Therefore, the compliance C1 when the pressure generating portion of one individual channel 70 is driven is higher than the compliance C2 when the pressure generating portions of the plurality of individual channels 70 are driven. It is larger by the compliance Cw1. To summarize the above, the relationship in the breakdown of the natural vibration periods Tc1 and Tc2 represented by the above equations (4) and (6) is M1<M2, C1>C2, and C1 is more than C2 by Cw1. big. Therefore, by increasing the compliance Cw1 of the partition walls of the individual flow paths 70, the difference between the natural vibration period Tc1 and the natural vibration period Tc2 can be reduced.

In the liquid jet head 26 of the present embodiment, the total value of the compliances C1 and C5 of the partition walls W1 and W5 adjacent to the communication path 63 is equal to the compliance C2 and C6 of the partition walls W2 and W6 on both sides of the pressure chamber 62 and the first individual It is larger than the total value of the compliances C4 and C8 of the partition walls W4 and W8 on both sides of the channel 71 and the compliances C3 and C7 of the partition walls W3 and W7 of the individual supply channel 61 . Therefore, the compliance Cw1 of the partition wall of the channel can be increased. Therefore, the difference between the natural vibration periods Tc1 and Tc2 can be reduced. As a result, the change in the natural vibration period Tc between the case of driving one pressure generating portion and the case of driving the plurality of pressure generating portions among the plurality of adjacent individual flow paths 70 is reduced, and crosstalk occurs. can be suppressed.

Further, in the liquid jet head 26 of the present embodiment, the thickness T5 of the partition wall W5 of the communication passage 63 is smaller than the thickness T6 of the partition wall W6 of the pressure chamber 62, and the thickness T1 of the partition wall W1 of the communication passage 63 is smaller than the thickness T1 of the pressure chamber 62. It is smaller than the thickness T2 of the partition wall W2. Here, the compliance Cw can be represented by the following formula (8).
Cw=(1−p ² )×W ⁵ ×L/(60×E×T ³ ) (8)
p: Poisson's ratio of the partition wall W: length of the partition wall in the lateral direction L: length of the partition wall in the longitudinal direction E: Young's modulus of the partition wall T: thickness of the partition wall The thickness of the partition wall W2 is smaller than the thickness of the partition wall W6 of the pressure chamber 62, and the thickness of the partition wall W1 of the communication passage 63 is smaller than the thickness of the partition wall W2 of the pressure chamber 62. Therefore, it is possible to increase the compliance of the communication path 63, which is the flow path near the nozzle Nz.

As shown in FIG. 3, the liquid jet head 26 of the present embodiment connects a first communication plate 311 and a second communication plate 312, which are two communication plates, and connects a part of the communication path 63 to each other. ing. As a result, the area of the partition of the communication path 63 is increased, and the compliance of the partition of the communication path 63 is increased. The number of communicating plates is not limited to two, and may be three or more. This makes it possible to increase the compliance of the partition wall of the communication path according to the amount of lamination of the communication plates.

As shown in FIG. 3 , in the liquid jet head 26 of this embodiment, the length D1 of the individual supply passages 61 is smaller than the length D2 of the communication passages 63 . Therefore, the inertance of the individual supply path 61 is reduced, the natural vibration period Tc can be shortened, and the ejection period of the liquid from the nozzles Nz can be shortened.

The individual supply paths 61 are formed only on the first communication plate 311 of the first flow path substrate 31 . The length of the communication passage 63 and the flow path of the supply liquid chamber 60 is extended. As a result, while maintaining the length of the individual supply channel 61, the compliance of the partition wall of the communication channel 63 is increased, and the volume of the supply liquid chamber 60 is increased. Therefore, by expanding the reservoir Rs<b>2 while maintaining the inertance of the individual supply channel 61 , ink can be more easily supplied to the second individual channel 72 .

The first flow path substrate 31 is composed of a plurality of communication plates, of which the second communication plate 312 is composed of a glass substrate. Borosilicate glass is used for the glass substrate of this embodiment. As a result, the partition walls of the channels of the first channel substrate 31 have a Young's modulus lower than that of the silicon substrate. As a result, the channel can be provided with partition walls having a higher compliance as shown in the above formula (8).

For the glass substrate, it is preferable to use a material having a coefficient of linear expansion similar to that of silicon (Si) (the coefficient of linear expansion of silicon is approximately 42×10 ⁻⁷ /° C.). As borosilicate glass, Pyrex (registered trademark) of Corning (USA) and Tempax Float (registered trademark) of Schott (Germany) both have coefficients of linear expansion of about 32×10 ^-7 /°C. Since it has a coefficient of linear expansion close to that of silicon, it is suitable for application to glass substrates.

The first communication plate 311 of the first channel substrate 31 is made of a silicon substrate. Fine processing is easier with silicon than with borosilicate glass. Therefore, for the individual supply paths 61, for example, fine flow paths can be formed by applying semiconductor technology. Silicon is preferably used for the nozzle plate 50 having fine flow paths such as the nozzles Nz.

As described above, in the liquid jet head 26 of the present embodiment, the compliance of the partition walls of the flow paths is increased. Therefore, for example, a mode without the vibration absorber 54 is possible. As a result, the liquid jet head 26 can be miniaturized.

B. Other embodiments:
(B1) In the liquid jet head 26 of the above embodiment, the total value of the compliances C1 and C5 of the partition walls W1 and W5 adjacent to the communication path 63 is the compliance C2 and C6 of the partition walls W2 and W6 on both sides of the pressure chamber 62, It is larger than the sum of the compliances C4 and C8 of the partition walls W4 and W8 on both sides of the first individual channel 71 and the compliances C3 and C7 of the partition walls W3 and W7 of the individual supply channel 61 . On the other hand, the compliance of the partition wall of the communication path may be greater than the compliance of the partition wall of the pressure chamber. The compliance C1 of the partition wall of the communicating path may be greater than the compliance C2 of the partition wall of one of the adjacent pressure chambers, and the compliance of the partition walls on both sides of the communication path (C1 + C5) is equal to the compliance of the partition walls on both sides of the adjacent pressure chamber (C2 + C6). ). Even in such a mode, it is possible to increase the compliance of the partition wall of the communication path, which is the flow path in the vicinity of the nozzle.

(B2) In the liquid jet head 26 of the above embodiment, the thickness T5 of the partition wall W5 of the communication passage 63 is smaller than the thickness T6 of the partition wall W6 of the pressure chamber 62, and the thickness T1 of the partition wall W1 of the communication passage 63 is smaller than the thickness T1 of the partition wall W1 of the pressure chamber 62 is smaller than the thickness T2 of the partition wall W2. On the other hand, the thickness of the partition wall of the communication path may be larger than the thickness of the pressure chamber. In such an embodiment, it is preferable to increase the compliance of the partition wall of the communication path, for example, by increasing the length of the flow path of the communication path.
Even in such a mode, it is possible to increase the compliance of the partition wall of the communicating path, which is the flow path in the vicinity of the nozzle.

(B3) In the liquid jet head 26 of the above-described embodiment, the individual channels 70</b>D, which are dummy channels, are provided on the endmost side of the arranged individual channels 70 . On the other hand, a mode in which no dummy flow path is provided may be adopted. Even in such a mode, by increasing the compliance of the partition wall of the communication path, it is possible to reduce the change in the natural vibration period Tc when driving the plurality of pressure generating portions.

(B4) In the liquid jet head 26 of the above embodiment, the length D1 of the individual supply passages 61 is smaller than the length D2 of the communication passages 63 . On the other hand, the length D1 of the individual supply path may be longer than the length D2 of the communication path. Even in such a mode, by increasing the compliance of the partition wall of the communication path, it is possible to reduce the change in the natural vibration period Tc when driving the plurality of pressure generating portions.

(B5) In the liquid jet head 26 of the above embodiment, the first channel substrate 31 includes a first communication plate 311 and a second communication plate 312 . On the other hand, the first channel substrate can also be configured by one communication plate. In such a mode, it is preferable to work so that the length of the communication path is longer than the length of the individual supply path in the interior of one communication plate. Even in such a mode, the same effect as the above embodiment can be obtained.

(B6) In the liquid jet head 26 of the above embodiment, the individual supply paths 61 are formed only in the first communication plate 311 of the first channel substrate 31 . On the other hand, the individual supply path may be formed over a plurality of communication plates. In such an aspect, it is preferable that the channel length of the communication channel is longer than the channel length of the individual supply channel.

(B7) In the liquid jet head 26 of the above embodiment, the second communication plate 312 is made of a glass substrate. On the other hand, the second communication plate may be composed of various substrates other than the silicon substrate, such as a glass substrate, a ceramic substrate, and a single crystal substrate. Even in such a mode, by increasing the compliance of the partition wall of the communication path, it is possible to reduce the change in the natural vibration period Tc when driving the plurality of pressure generating portions.

(B8) In the liquid jet head 26 of the above embodiment, the first communication plate 311 of the first channel substrate 31 is made of a silicon substrate. On the other hand, the first communication plate may be composed of various substrates other than the silicon substrate, such as a glass substrate, a ceramic substrate, and a single crystal substrate. Even in such a mode, by increasing the compliance of the partition wall of the communication path, it is possible to reduce the change in the natural vibration period Tc when driving the plurality of pressure generating portions.

(B9) In the above embodiment, the liquid jet head 26 has one first common flow path 51 and two second common flow paths 52 connected by two individual flow path groups 17 to form two circulating flow paths. Construct a path 90 . On the other hand, the number of the second common channels may be one, or may be three or more. In such an aspect, it is more preferable to provide the same number of individual channel groups as the second common channel.

(B10) In the liquid jet head 26 of the above-described embodiment, when the ink flows inside the flow path, the flow path resistance in the flow path on the upstream side of the communication path 63 is It is set larger than the road resistance. On the other hand, the flow path resistance in the flow path on the upstream side of the communicating path 63 may be set smaller than the flow path resistance on the downstream side of the communicating path. Even in such a mode, by increasing the compliance of the partition wall of the communication path, it is possible to reduce the change in the natural vibration period Tc when driving the plurality of pressure generating portions. When the channel resistance in the upstream channel of the communicating channel 63 is set to be smaller than the channel resistance in the downstream side of the communicating channel, it is preferable to provide the vibration absorber 54 in the common channel on the upstream side. In this case, ink is supplied from the second circulation port 57 in FIG.

(B11) In the liquid jet head 26 of the above-described embodiment, ink is jetted using piezoelectric elements. On the other hand, it is possible to use various elements other than the piezo element as the ejection driving element. For example, the present invention can be applied to a printer equipped with an ejection driving element that ejects ink by means of bubbles generated in the ink passage by energizing a heater arranged in the ink passage.

(B12) In the liquid jet head 26 of the above embodiment, the circulation mechanism 75 is connected to the upper surface side of the liquid jet head 26 . Alternatively, the liquid ejecting head may not include the circulation mechanism, and the liquid ejecting apparatus may include the circulation mechanism. In such an aspect, the circulation mechanism is preferably connected to the first common channel and the second common channel so as to at least either supply or discharge ink.

C. Other forms:
The present invention is not limited to the embodiments described above, and can be implemented in various forms without departing from the scope of the invention. For example, the present invention can also be implemented by the following aspects. The technical features in the above embodiments corresponding to the technical features in each form described below are used to solve some or all of the problems of the present invention, or In order to achieve the above, it is possible to appropriately replace or combine them. Also, if the technical features are not described as essential in this specification, they can be deleted as appropriate.

(1) According to one aspect of the present invention, a liquid jet head that jets liquid to the outside is provided. The liquid ejecting head includes a plurality of nozzles for ejecting the liquid, and a plurality of pressure generating units individually arranged in each of the plurality of pressure chambers for ejecting the liquid from the nozzles by changing the pressure of the pressure chambers. each of the plurality of nozzles is individually arranged in a plurality of flow paths including a plurality of communication passages communicating with each of the plurality of pressure chambers; and the plurality of communication passages and the plurality of pressure chambers. a common flow path for at least one of supplying and discharging liquid. The plurality of communication paths are arranged via adjacent communication paths and partition walls, the plurality of pressure chambers are arranged via adjacent pressure chambers and partition walls, and the compliance of the partition walls of the communication paths is controlled by the pressure chambers. greater than the bulkhead compliance. According to the liquid ejecting head of this form, the compliance of the partition wall of the communicating path is greater than the compliance of the pressure chamber. Therefore, it is possible to increase the compliance of the partition wall of the communication path, which is the flow path in the vicinity of the nozzle. Therefore, the difference between the natural vibration periods Tc1 and Tc2 can be reduced. As a result, the change in the natural vibration period Tc between the case of driving one pressure generating section and the case of driving a plurality of pressure generating sections among a plurality of adjacent individual flow paths is reduced, and the occurrence of crosstalk is reduced. can be suppressed.

(2) In the liquid jet head of the above aspect, the common flow path includes a first common flow path through which the liquid is supplied to the pressure chamber, and a second common flow path through which the liquid that has passed through the communication path and the pressure chamber is received. and two common flow paths. The communication path and the pressure chamber constitute part of a plurality of individual flow paths connecting the first common flow path and the second common flow path. The plurality of individual flow paths are a plurality of first individual flow paths connecting the communication path and the first common flow path, and flow paths connecting the pressure chamber and the second common flow path. and a separate supply path for The plurality of first individual channels are arranged through adjacent first individual channels and partition walls, the plurality of individual supply channels are arranged through adjacent individual supply channels and partition walls, and the communication channel The compliance of the partition is made larger than the sum of the compliance of the partition of the pressure chamber, the compliance of the partition of the first individual channel, and the compliance of the partition of the individual supply channel. According to the liquid jet head of this aspect, the compliance of the partition wall between the adjacent communicating passages is the compliance of the partition wall between the pressure chambers, the compliance of the partition wall between the first individual flow passages, and the compliance between the second individual flow passages. is greater than the sum of Therefore, the compliance of the partition wall of the communication path, which is the flow path in the vicinity of the nozzle, becomes greater. Therefore, the change in the natural vibration period Tc between the case of driving one pressure generating unit and the case of driving a plurality of pressure generating units among a plurality of adjacent individual flow paths is reduced, and the occurrence of crosstalk is suppressed. can do.

(3) In the liquid ejecting head of the above aspect, even if dummy channels that do not eject the liquid to the outside are adjacent to the individual channels provided on both end sides of the array among the plurality of individual channels. good. According to the liquid jet head of this aspect, the individual channels serving as dummy channels are provided on both end sides of the plurality of individual channels. As a result, the individual channels adjacent to the dummy channel can also obtain the compliance due to the partition wall of the individual channel that is the dummy channel.

(4) In the liquid jet head of the above aspect, the length of the individual supply passages in the direction along the liquid flow direction in the individual supply passages may be smaller than the length of the communication passages. According to the liquid jet head of this aspect, the channel of the individual supply channel can be made shorter than the communication channel. Therefore, the inertance of the individual supply passages is reduced, the natural vibration period Tc can be shortened, and the ejection period of the liquid from the nozzles can be shortened.

(5) In the liquid jet head of the above aspect, a plurality of plate-like communication plates including a portion of the communication path and a portion of the second common flow path, and the plurality of communication plates are laminated to form the communication and a channel substrate connecting a portion of the passage and a portion of the second common channel to each other. According to the liquid jet head of this aspect, the area of the partition wall of the communication path can be increased. Therefore, the compliance of the communication path can be increased according to the amount of lamination of the communication plates. Also, the volume of the second common flow path connected to the second individual flow path can be increased, making it easier to supply ink to the second individual flow path.

(6) In the liquid jet head of the above aspect, the individual supply path may be included only in the communication plate connected to the pressure chamber in the flow path substrate. According to the liquid jet head of this aspect, it is possible to increase the volume of the communication path and the second common channel while maintaining the channel length of the individual supply channel. Therefore, while maintaining the inertance of the individual supply channel, the compliance of the communication channel can be increased, and the ink can be more easily supplied to the second individual channel.

(7) In the liquid jet head of the above aspect, the communication plate including the individual supply paths may be a silicon substrate. According to the liquid ejecting head of this aspect, the communication plate having the second individual flow path is made of the silicon substrate, and the communication plate including the glass substrate forms the partition wall of the flow path. A fine channel can be formed by applying semiconductor technology to the second individual channel, and the channel can be provided with partition walls having greater compliance.

(8) In the liquid jet head of the above aspect, at least one of the plurality of communication plates may be a glass substrate. According to the liquid jet head of this aspect, the glass substrate constitutes the partition wall of the channel. Therefore, it is possible to configure the partition wall of the flow channel having a lower Young's modulus than the mode in which the partition wall of the flow channel is configured only by the silicon substrate. As a result, the channel can be provided with partition walls having a higher compliance as shown in the above formula (7).

(9) In the liquid jet head of the above aspect, the thickness of the partition wall of the communication path may be smaller than the thickness of the partition wall of the pressure chamber. According to the liquid jet head of this aspect, the thickness T of the partition wall of the communication path is smaller than the thickness of the partition wall of the pressure chamber. Therefore, it is possible to increase the compliance of the communication path, which is the flow path in the vicinity of the nozzle.

(10) In the liquid jet head of the above aspect, when the liquid flows inside the flow path, the flow path resistance of the flow path having a higher internal pressure than the internal pressure of the communication path may be greater than the flow path resistance of the flow path on the side having the internal pressure lower than the internal pressure of the . According to the liquid jet head of this aspect, when the liquid is flowing in the flow path, the flow path is provided on the upstream side of the communication path and has a higher flow path resistance than on the downstream side. Therefore, it is possible to suppress the occurrence of crosstalk accompanying the supply of ink to the flow path.

(11) The liquid jet head of the above aspect may include a planar vibration absorber that absorbs changes in pressure in the common flow path. The flow path on the side having the low internal pressure includes a part of the common flow path, and the vibration absorber constitutes the inner wall of the common flow path on the side having the low internal pressure. According to the liquid jet head of this aspect, the vibration absorber is provided at a position that becomes the inner wall of the common flow path on the downstream side of the flow path with low flow path resistance. As a result, the inertance in the common channel can be increased, and the occurrence of crosstalk can be suppressed.

(12) The liquid jet head of the above aspect may further include a flow mechanism for moving the liquid by passing it through the flow path. According to the liquid ejecting head of this aspect, the flow mechanism is provided in the liquid ejecting head of the liquid ejecting apparatus. Therefore, it is possible to realize a liquid jet head having a flow mechanism without increasing the size of the device.

(13) According to another aspect of the invention, there is provided a liquid ejecting apparatus. This liquid ejecting apparatus includes the liquid ejecting head of each of the above embodiments, and a flow mechanism that causes the liquid to pass through the flow path via the common flow path. According to this aspect of the liquid ejecting apparatus, the liquid ejecting apparatus is provided with a flow mechanism that causes the liquid to flow through the flow path in the liquid ejecting head. Therefore, it is possible to circulate the liquid in the flow path of the liquid ejecting head by the circulating mechanism having a higher output.

The present invention is applicable not only to liquid ejecting apparatuses that eject ink, but also to any liquid ejecting apparatus that ejects liquids other than ink. For example, the present invention can be applied to various liquid ejecting apparatuses as follows. Image recording devices such as facsimile devices, coloring material injection devices used for manufacturing color filters for image display devices such as liquid crystal displays, organic EL (Electro Luminescence) displays, surface emitting displays (Field Emission Display, FED), etc. an electrode material injection device used for electrode formation, a liquid injection device for injecting a liquid containing a bioorganic substance used for biochip production,
Sample injection device as a precision pipette, lubricating oil injection device, resin liquid injection device, liquid injection device for pinpoint injection of lubricating oil to precision machinery such as clocks and cameras, micro hemispherical lenses used for optical communication devices, etc. A liquid injection device that injects a transparent resin liquid such as an ultraviolet curable resin liquid onto a substrate to form (optical lenses), etc., a liquid injection device that injects an acidic or alkaline etching liquid to etch the substrate, etc. can be realized in the form of a liquid ejecting apparatus or the like including a liquid ejecting head that ejects an arbitrary minute amount of liquid droplets.

DESCRIPTION OF SYMBOLS 12... Medium, 14... Liquid container, 15... Pump, 16... Supply pipe, 17... Individual channel group, 20... Control unit, 22... Conveying mechanism, 23... Conveying belt, 24... Head moving mechanism, 25... Carriage, Reference numeral 26: Liquid jet head 30: Flow path forming member 31: First flow path substrate 32: Second flow path substrate 42: Vibration part 44: Piezoelectric element 46: Protection member 48: Housing part 50 Nozzle plate 51 First common channel 52 Second common channel 54 Vibration absorber 57 Second circulation port 58 Second liquid chamber 59 Second inflow chamber 60 Supply Liquid chamber 61 Individual supply channel 62 Pressure chamber 63 Communication channel 65 First inflow chamber 66 First liquid chamber 67 First circulation port 70 Individual channel 70D Individual channel , 70a individual channel, 70b individual channel, 71 first individual channel, 72 second individual channel, 75 circulation mechanism, 76 ink storage tank, 77 pressure adjustment unit, 90 circulation flow Path 100 Liquid injection device 311 First communication plate 312 Second communication plate AX Central plane Fa Upper surface Fb Lower surface L1 First nozzle row L2 Second nozzle row Nz ... Nozzle, P1 ... First part, P2 ... Second part, Rs1 ... Reservoir, Rs2 ... Reservoir

Claims (13)

A liquid jet head that jets a liquid to the outside,
a plurality of nozzles for injecting the liquid;
a plurality of pressure generating units that are individually arranged in each of the plurality of pressure chambers and that change the pressure of the pressure chambers to eject the liquid from the nozzle;
a plurality of communication passages in which each of the plurality of nozzles is individually arranged and which communicates with each of the plurality of pressure chambers;
a common flow path for at least one of supplying or discharging the liquid to a plurality of flow paths including the plurality of communication paths and the plurality of pressure chambers;
The plurality of communication paths are arranged via adjacent communication paths and partition walls,
The plurality of pressure chambers are arranged via adjacent pressure chambers and partition walls,
compliance of the partition wall of the communication path is larger than compliance of the partition wall of the pressure chamber;
liquid jet head. The liquid jet head according to claim 1, comprising:
The common flow path is
a first common channel through which the liquid is supplied to the pressure chamber;
a second common flow path for receiving the liquid that has passed through the communication path and the pressure chamber;
with
the communication path and the pressure chamber constitute part of a plurality of individual flow paths connecting the first common flow path and the second common flow path,
The plurality of individual channels are
a plurality of first individual channels connecting the communication channel and the first common channel;
a plurality of individual supply channels that are channels connecting the pressure chamber and the second common channel,
The plurality of first individual channels are arranged via adjacent first individual channels and partition walls,
The plurality of individual supply paths are arranged via adjacent individual supply paths and partition walls,
The liquid jet head, wherein the compliance of the partition wall of the communication path is larger than the total value of the compliance of the partition wall of the pressure chamber, the compliance of the partition wall of the first individual channel, and the compliance of the partition wall of the individual supply channel. . 3. The liquid jet head according to claim 2,
A liquid jet head according to claim 1, wherein among the plurality of individual channels, the individual channels provided on both end sides of the arrangement are adjacent to dummy channels that do not eject the liquid to the outside. 4. The liquid jet head according to claim 2, wherein
A liquid ejecting head, wherein the length of the individual supply passages in the individual supply passages along the liquid circulation direction is shorter than the length of the communication passages. 5. The liquid jet head according to claim 4,
a plurality of plate-like communicating plates including a portion of the communicating path and a portion of the second common channel;
a flow path substrate in which the plurality of communication plates are stacked, and a portion of the communication path and a portion of the second common flow path are connected to each other. 6. The liquid jet head according to claim 5,
The liquid ejecting head, wherein the individual supply path is included only in the communication plate connected to the pressure chamber in the flow path substrate. 7. The liquid jet head according to claim 6,
The liquid ejecting head, wherein the communication plate including the individual supply paths is a silicon substrate. The liquid jet head according to any one of claims 5 to 7,
A liquid jet head, wherein at least one of the plurality of communication plates is a glass substrate. The liquid jet head according to any one of claims 1 to 8,
A liquid jet head, wherein the thickness of the partition wall of the communication path is smaller than the thickness of the partition wall of the pressure chamber. The liquid jet head according to any one of claims 1 to 9,
When the liquid flows through the channel, the flow channel resistance of the channel having the internal pressure higher than the internal pressure of the communication channel is defined as the flow channel resistance of the channel having the internal pressure lower than the internal pressure of the communication channel. A liquid jet head made larger than the flow path resistance of the path. 11. The liquid jet head according to claim 10,
A planar vibration absorber that absorbs changes in pressure in the common flow path,
the flow path on the side having the low internal pressure includes a part of the common flow path,
The liquid ejecting head, wherein the vibration absorber constitutes an inner wall of the common flow path on the side having the lower internal pressure. The liquid jet head according to any one of claims 1 to 11,
A liquid jet head comprising a flow mechanism that moves the liquid by passing it through the flow path. A liquid ejecting apparatus equipped with the liquid ejecting head according to any one of claims 1 to 11,
A liquid ejecting apparatus comprising a flow mechanism that moves the liquid by passing it through the flow path through the common flow path.

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