JP7118519B2 - 固体ドーパント材料のための挿入可能なターゲットホルダ - Google Patents

固体ドーパント材料のための挿入可能なターゲットホルダ Download PDF

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Publication number
JP7118519B2
JP7118519B2 JP2021514568A JP2021514568A JP7118519B2 JP 7118519 B2 JP7118519 B2 JP 7118519B2 JP 2021514568 A JP2021514568 A JP 2021514568A JP 2021514568 A JP2021514568 A JP 2021514568A JP 7118519 B2 JP7118519 B2 JP 7118519B2
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Prior art keywords
target holder
arc chamber
pocket
ion source
indirectly heated
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Japanese (ja)
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JP2022500830A (ja
Inventor
シュレイヤンシュ パテル，
グラハム ライト，
ダニエル アルバラド，
クラウス ベッカー，
ダニエル アール． ティーガー，
ステファン クラウス，
Original Assignee
バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32614—Consumable cathodes for arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3432—Target-material dispenser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/081—Sputtering sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0815—Methods of ionisation
    • H01J2237/082—Electron beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0822—Multiple sources
    • H01J2237/0827—Multiple sources for producing different ions sequentially

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2021514568A 2018-09-19 2019-08-05 固体ドーパント材料のための挿入可能なターゲットホルダ Active JP7118519B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862733353P 2018-09-19 2018-09-19
US62/733,353 2018-09-19
US16/269,120 2019-02-06
US16/269,120 US11404254B2 (en) 2018-09-19 2019-02-06 Insertable target holder for solid dopant materials
PCT/US2019/045052 WO2020060681A1 (en) 2018-09-19 2019-08-05 Insertable target holder for solid dopant materials

Publications (2)

Publication Number Publication Date
JP2022500830A JP2022500830A (ja) 2022-01-04
JP7118519B2 true JP7118519B2 (ja) 2022-08-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021514568A Active JP7118519B2 (ja) 2018-09-19 2019-08-05 固体ドーパント材料のための挿入可能なターゲットホルダ

Country Status (6)

Country Link
US (1) US11404254B2 (ko)
JP (1) JP7118519B2 (ko)
KR (1) KR102531500B1 (ko)
CN (1) CN112703574B (ko)
TW (1) TWI723506B (ko)
WO (1) WO2020060681A1 (ko)

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US11170973B2 (en) 2019-10-09 2021-11-09 Applied Materials, Inc. Temperature control for insertable target holder for solid dopant materials
US10957509B1 (en) 2019-11-07 2021-03-23 Applied Materials, Inc. Insertable target holder for improved stability and performance for solid dopant materials
US11854760B2 (en) 2021-06-21 2023-12-26 Applied Materials, Inc. Crucible design for liquid metal in an ion source
US11728140B1 (en) 2022-01-31 2023-08-15 Axcelis Technologies, Inc. Hydraulic feed system for an ion source
US20230369008A1 (en) * 2022-05-10 2023-11-16 Applied Materials, Inc. Hybrid ion source for aluminum ion generation using a target holder and a solid target
US20230369006A1 (en) * 2022-05-10 2023-11-16 Applied Materials, Inc. Hybrid ion source for aluminum ion generation using a target holder and organoaluminium compounds
US20230369007A1 (en) * 2022-05-10 2023-11-16 Applied Materials, Inc. Hybrid ion source for aluminum ion generation using organoaluminium compounds and a solid target
US20230402247A1 (en) * 2022-06-08 2023-12-14 Applied Materials, Inc. Molten liquid transport for tunable vaporization in ion sources

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Also Published As

Publication number Publication date
TW202016968A (zh) 2020-05-01
KR20210049174A (ko) 2021-05-04
US20200090916A1 (en) 2020-03-19
KR102531500B1 (ko) 2023-05-11
US11404254B2 (en) 2022-08-02
JP2022500830A (ja) 2022-01-04
WO2020060681A1 (en) 2020-03-26
CN112703574A (zh) 2021-04-23
CN112703574B (zh) 2023-06-30
TWI723506B (zh) 2021-04-01

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