JP7115537B2 - 半導体装置の製造方法及びフィルム状接着剤 - Google Patents
半導体装置の製造方法及びフィルム状接着剤 Download PDFInfo
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Description
本実施形態に係る半導体装置の製造方法について以下に説明する。まず、図1に示すように、基板14上の回路パターン94上に、接着剤41付き第1の半導体素子Waを圧着し、第1のワイヤ88を介して基板14上の回路パターン84と第1の半導体素子Waとを電気的にボンディング接続する(第1のワイヤボンディング工程)。
次に、本実施形態に係る接着剤について、フィルム状接着剤を例に挙げて説明する。フィルム状接着剤は上記半導体装置の製造方法に使用される。図7は、フィルム状接着剤10を模式的に示す断面図である。フィルム状接着剤10は、熱硬化性であり、半硬化(Bステージ)状態を経て、硬化処理後に完全硬化物(Cステージ)状態となり得る接着剤組成物をフィルム状に成形することにより作製できる。
フィルム状接着剤10は、基材フィルム上に上述した接着剤組成物のワニスを塗布して乾燥した接着剤組成物を接着シートとして用いることができる。具体的には、まず、(a)~(c)成分と必要に応じて上記(d)硬化促進剤又は(e)カップリング剤等の他の添加成分を、有機溶媒中で混合、混練してワニスを調製する。
(実施例1~4及び比較例1~3)
表1に示す品名及び組成比(単位:質量部)の(a)熱硬化性樹脂としてのエポキシ樹脂及びフェノール樹脂、(c)フィラーとしての無機フィラーからなる組成物にシクロヘキサノンを加え、撹拌混合した。これに、表1に示す、(b)高分子量成分としてのアクリルゴムを加えて撹拌し、更に表1に同様に示す(e)カップリング剤及び(d)硬化促進剤を加えて各成分が均一になるまで撹拌してワニスを得た。
YDF-8170C:(商品名、東都化成(株)製、ビスフェノールF型エポキシ樹脂、エポキシ当量159、室温で液体)。
VG-3101L:(商品名、(株)プリンテック製、多官能エポキシ樹脂、エポキシ当量210、軟化点39~46℃)。
YDCN-700-10:(商品名、東都化成(株)製、クレゾールノボラック型エポキシ樹脂、エポキシ当量210、軟化点75~85℃)。
HP-7200:(商品名、DIC(株)製、ジシクロペンタジエン含有エポキシ樹脂、エポキシ当量247、軟化点55~65℃)。
PSM-4326:(商品名、群栄化学工業(株)製、水酸基当量105、軟化点118~122℃)。
ミレックスXLC-LL:(商品名、三井化学(株)製、フェノール樹脂、水酸基当量175、軟化点77℃、吸水率1質量%、加熱質量減少率4質量%)。
アクリルゴムHTR-860P-3CSP:(商品名、ナガセケムテックス(株)製、重量平均分子量80万、グリシジル官能基を有する構造単位の比率3%、Tg:-7℃)。
アクリルゴムHTR-860P-30B-CHN:(商品名、ナガセケムテックス(株)製、重量平均分子量23万、グリシジル官能基を有する構造単位の比率8%、Tg:-7℃)。
SC2050-HLG:(商品名、アドマテックス(株)製、シリカフィラー分散液、平均粒径0.50μm)。
アエロジルR972:(商品名、日本アエロジル(株)製、シリカ、平均粒径0.016μm)。
キュアゾール2PZ-CN:(商品名、四国化成工業(株)製、1-シアノエチル-2-フェニルイミダゾール)。
A-1160:(商品名、GE東芝(株)製、γ-ウレイドプロピルトリエトキシシラン)。
A-189:(商品名、GE東芝(株)製、γ-メルカプトプロピルトリメトキシシラン)。
得られた接着シートのフィルム状接着剤について、下記方法に従って、溶融粘度、加圧オーブンによる加熱及び加圧後の埋込性及び半導体素子の位置ずれ、接着強度、並びに、耐リフロー性の評価を行った。
フィルム状接着剤の溶融粘度は、下記の方法によりずり粘度を測定することにより評価した。上記接着シートを複数枚数準備し、これらを60℃にてラミネートして、基材フィルム上に厚さが約300μmとなるようにフィルム状接着剤を積層させた。積層されたフィルム状接着剤から基材フィルムを剥離除去し、これを厚み方向に10mm角に打ち抜くことで、10mm角、厚さ300μmの四角形の積層体を得た。動的粘弾性測定装置ARES(TA Instruments社製)に直径8mmの円形アルミプレート治具をセットし、更にここに打ち抜いたフィルム状接着剤の積層体をセットした。その後、35℃で5%の歪みを与えながら5℃/分の昇温速度で150℃まで昇温させながら測定し、120℃の溶融粘度の値を記録した。測定結果を表2に示す。
フィルム状接着剤の加圧オーブンによる加熱及び加圧後の埋込性を下記の方法により評価した。上記で得られた接着シートのフィルム状接着剤(厚み120μm)を、厚み50μmの半導体ウェハ(8インチ)に70℃で貼り付けた。次に、それらを7.5mm角にダイシングしてフィルム状接着剤付き半導体素子(第2の半導体素子)を得た。また、ダイシング・ダイボンディング一体型フィルム(商品名:HR-9004-10、日立化成(株)製、厚み10μm)を厚み50μmの半導体ウェハ(8インチ)に70℃で貼り付けた。次に、それらを3.0mm角にダイシングしてチップを得た。個片化したHR-9004-10付きのチップ(第1の半導体素子)を、表面凹凸が最大6μmである評価用基板に130℃、0.20MPa、2秒間の条件で圧着し、120℃、2時間加熱し、半硬化させた。
A:ボイドの割合が5%未満である。
B:ボイドの割合が5%以上である。
上記加圧オーブンによる加熱及び加圧後の埋込性評価と同じ評価サンプルを作製するに際し、加圧オーブンによる加熱及び加圧前後のチップ全体の画像を取得し、顕微鏡解析により加圧オーブンによる加熱及び加圧前後の位置ずれを測長した。評価基準は以下の通りである。評価結果を表2に示す。
A:加圧オーブンによる加熱及び加圧後の位置ずれが10μm未満である。
B:加圧オーブンによる加熱及び加圧後の位置ずれが10μm以上である。
フィルム状接着剤のダイシェア強度(接着強度)を下記の方法により測定した。まず、上記で得られた接着シートのフィルム状接着剤(厚み120μm)を厚み400μmの半導体ウェハに70℃で貼り付けた。次に、それらを5.0mm角にダイシングしてフィルム状接着剤付き半導体素子を得た。個片化したフィルム状接着剤付き半導体素子のフィルム状接着剤側を、ソルダーレジストインキ(商品名:AUS308、太陽インキ製造(株)製)を塗布した基板上に120℃、0.1MPa、5秒間の条件で熱圧着してサンプルを得た。その後、得られたサンプルの接着剤を120℃で2時間、170℃で3時間加熱し、硬化させた。更に、接着剤硬化後のサンプルを85℃、60%RH条件の下、168時間放置した。その後、サンプルを25℃、50%RH条件下で30分間放置し、250℃でダイシェア強度を測定し、これを接着強度とした。測定結果を表2に示す。
フィルム状接着剤の耐リフロー性を下記の方法により評価した。上記加圧オーブンによる加熱及び加圧後の埋込性の評価で得た評価サンプルと同様にして評価サンプルを作製した。得られた評価サンプルはモールド用封止材(日立化成(株)製、商品名:CEL-9750ZHF10)を用いて、175℃、6.7MPa、90秒の条件で樹脂封止し、175℃、5時間の条件で封止材を硬化させてパッケージを得た。
A:パッケージの破損若しくは厚みの変化、又はフィルム状接着剤と半導体素子との界面での剥離等が1個も観察されない。
B:パッケージの破損若しくは厚みの変化、又はフィルム状接着剤と半導体素子との界面での剥離等が1個以上観察される。
Claims (8)
- 基板上に第1のワイヤを介して第1の半導体素子を電気的に接続する第1のワイヤボンディング工程と、
熱硬化性を有する接着剤に前記第1の半導体素子が埋め込まれるように、前記接着剤を介して前記基板に第2の半導体素子を圧着する圧着工程と、
前記圧着工程後の接着剤を加圧雰囲気下で加熱することによって前記接着剤を硬化処理する加熱加圧工程と、
を備え、
前記硬化処理前の接着剤の120℃における溶融粘度が1000~3000Pa・sであり、
前記加熱加圧工程を経ることにより、前記第1の半導体素子が硬化処理後の接着剤に埋め込まれる、半導体装置の製造方法。 - 基板上に第1のワイヤを介して第1の半導体素子を電気的に接続する第1のワイヤボンディング工程と、
熱硬化性を有し且つ厚さが100~200μmのフィルム状である接着剤を介して前記基板に第2の半導体素子を圧着する圧着工程と、
前記圧着工程後の接着剤を加圧雰囲気下で加熱することによって前記接着剤を硬化処理する加熱加圧工程と、
を備え、
前記硬化処理前の接着剤の120℃における溶融粘度が1000~3000Pa・sであり、
前記加熱加圧工程を経ることにより、前記第1のワイヤの少なくとも一部及び前記第1の半導体素子の少なくとも一方が硬化処理後の接着剤に埋め込まれる、半導体装置の製造方法。 - 前記加熱加圧工程において、前記接着剤を0.1~1.0MPaの加圧雰囲気下で、60~175℃で、5分間以上加熱する、請求項1又は2に記載の半導体装置の製造方法。
- 前記加熱加圧工程後に、前記第2の半導体素子の上に第3の半導体素子を更に積層する工程を備える、請求項1~3のいずれか一項に記載の半導体装置の製造方法。
- 前記基板と前記第2の半導体素子とを第2のワイヤを介して電気的に接続する第2のワイヤボンディング工程と、
前記第2の半導体素子を樹脂で封止する工程と、
を更に備える、請求項1~4のいずれか一項に記載の半導体装置の製造方法。 - 半導体装置の製造プロセスにおいて使用される接着剤であって、
前記製造プロセスが、前記接着剤を加圧雰囲気下で加熱する硬化処理を経て、基板上の半導体素子が硬化処理後の前記接着剤に埋め込まれた状態とする工程を含み、
120℃における溶融粘度が1000~3000Pa・sである、フィルム状接着剤。 - 半導体装置の製造プロセスにおいて使用される接着剤であって、
前記製造プロセスが、前記接着剤を加圧雰囲気下で加熱する硬化処理を経て、基板上のワイヤの少なくとも一部及び半導体素子の少なくとも一方が硬化処理後の前記接着剤に埋め込まれた状態とする工程を含み、
厚さが100~200μmであり且つ120℃における溶融粘度が1000~3000Pa・sである、フィルム状接着剤。 - )
ソルダーレジストインキを塗布した前記基板との硬化後の接着力が1.0MPa以上である、請求項6又は7に記載のフィルム状接着剤。
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