JP7106146B2 - Vacuum suction arm and collet holder - Google Patents

Description

The present invention relates to a vacuum suction arm used in a precision processing apparatus for handling minute members such as electronic parts and a collet holder constituting this vacuum suction arm. It relates to a collet holder and a nozzle collet suitable for exchange systems.

As a conventional vacuum suction type precision processing apparatus having a nozzle head, pressure from a ring-shaped elastic body provided on the nozzle head side is transmitted to a pin roller embedded in a hole in the nozzle head, and the pin roller is attached to the pipe side of the apparatus main body. A mechanism has been proposed in which it is fixed to a holding groove provided in the body (see Patent Document 1). A mechanism has also been proposed in which the pressure of an elastic body provided on the pipe side of the device body is transmitted to a sphere installed in the hole of the pipe, and the sphere fits into a recess provided on the side of the nozzle head ( See Patent Document 2.). The inventions described in Patent Documents 1 and 2 have in common that a component provided on one member that is pressed by an elastic body is fitted into a groove of the other member and fixed. can be attached and detached with one touch by applying a force larger than the pressing force of the elastic body.

In addition, in the inventions described in Patent Documents 1 and 2, when there is a horizontal misalignment when fixing the nozzle head to the device main body, a person visually checks the degree of the misalignment and manually corrects the position. Therefore, it is not suitable for use in a high-precision, high-speed automatic exchange system for nozzle heads. Alternatively, a device for recognizing positional deviation with a camera or a sensor and automatically adjusting must be prepared separately. In the case of manual operation, it takes time and effort, and in the case of cameras and sensors, there arises a problem that the introduction of the device is costly.

There is also provided a nozzle rotation prevention mechanism that prevents the rotation of the nozzle with an asymmetrical structure so that the mounting position of the nozzle does not shift as the shaft rotates (see Patent Document 3). In the invention described in Patent Document 3, two hard balls are provided asymmetrically so that the intervals between them are uneven along the circumferential direction of the groove of the nozzle, and the two hard balls are placed in the groove of the nozzle groove. The fit prevents rotation of the nozzle. In a structure in which two hard balls are asymmetrically arranged as described in FIG. 1(b) of Patent Document 3, rotation of the nozzle can be prevented in a static state.

However, in the invention described in Patent Document 3, the force from the two asymmetrically arranged hard balls is applied only in one direction. Vertical blurring occurs when the nozzle is replaced, and the position of the nozzle is not stable. Therefore, in the invention described in Patent Document 3, the vertical vibration has an adverse effect on the high-speed adsorption and desorption of the nozzle, and the accuracy of the adsorption and desorption of the nozzle in the high-speed vertical movement used in the high-precision high-speed automatic exchange system is reduced. cannot be kept high. Furthermore, in the asymmetric arrangement of the two hard balls described in Patent Document 3, the wear of the nozzle is uneven, so the life of the nozzle is shortened in the case of high-speed up-and-down motions such as those used in high-precision, high-speed automatic change systems. shortened and inappropriate.

Japanese Patent No. 3087540 Japanese Patent No. 3064368 JP-A-2003-243892

The present invention has been made in view of the above-mentioned problems, and is applicable to a high-precision, high-speed automatic exchange system for nozzle collets, and maintains high precision in adsorption and detachment of nozzle collets without vertical shake even in high-speed up-and-down motion. It is an object of the present invention to provide a vacuum suction arm capable of holding a vacuum, a high-precision collet holder with high holding force constituting the vacuum suction arm, and a nozzle collet inserted into the tip of the collet holder.

In order to achieve the above object, a first aspect of the present invention provides: (a) a first tubular shape having a vacuum suction hole continuing upward from a collet insertion hole at the lower end on the central axis side; First and second guide holes are provided that penetrate from the outer circumference of the cylindrical member 1 to the vacuum suction hole, are in a mirror image relationship with respect to a mirror image plane passing through the central axis, and are perpendicular to the mirror image plane and face each other on the center line passing through the central axis. (b) a sliding inner peripheral surface in contact with the outer peripheral surface of the collet shaft; (c) a cylindrical ball retainer that is slidable in the direction of the central axis and has a protective inner peripheral surface that continues downward from the pressing inner peripheral surface; It has first and second pressing balls that can be pressed in symmetrical directions, and (d) a through hole that continues upward in the central axis direction from a nozzle tip insertion hole provided in the lower end. The vacuum suction arm is provided with a nozzle collet having a second cylindrical shape whose outer diameter shape matches the inner diameter shape of the collet insertion hole, and a ring-shaped holding groove is provided on the outer peripheral surface of the second cylindrical shape. This is the gist of it. In the vacuum suction arm according to the first aspect, when the upper portion of the nozzle collet is inserted into the collet insertion hole, the first and second pressing balls fitted in the holding groove are pressed symmetrically toward the holding groove. do.

In a second aspect of the present invention, (a) a first cylindrical shape having a vacuum suction hole continuing upward from a collet insertion hole at the lower end is formed on the central axis side, and a vacuum is applied from the outer periphery of the first cylindrical shape. (b) a collet shaft provided with first and second guide holes penetrating to the suction hole and facing each other on a center line perpendicular to the mirror image plane and passing through the central axis; A sliding inner peripheral surface in contact with the outer peripheral surface of the collet shaft, a tapered pressing inner peripheral surface extending downward from the sliding inner peripheral surface and in the centrifugal direction from the central axis, and a protective inner peripheral continuous downward from the pressing inner peripheral surface (c) a cylindrical ball retainer that has a surface and is slidable in the direction of the central axis; The gist of the invention is a collet holder with possible first and second press balls. In the collet holder according to the second aspect, the nozzle tip insertion hole provided at the lower end has a through hole that continues upward in the central axis direction, and the outer diameter shape of the upper part corresponds to the inner diameter shape of the collet insertion hole. When the upper part of the nozzle collet, which has a second cylindrical shape and has a ring-shaped holding groove on the outer peripheral surface of the second cylindrical shape, is inserted into the collet insertion hole, it fits into the holding groove. The first and second pressing balls are pressed toward the retaining grooves in symmetrical directions.

A third aspect of the present invention has a through-hole that continues upward in the central axis direction from a nozzle tip insertion hole provided at the lower end, and the outer diameter shape of the upper part is the collet insertion hole at the lower end of the collet holder. It relates to a nozzle collet having a second cylindrical shape matching the inner diameter shape of the nozzle collet and having a ring-shaped holding groove provided on the outer peripheral surface of the second cylindrical shape. In the nozzle collet according to the third aspect, the collet holder has a first cylindrical shape having a vacuum suction hole continuing upward from the collet insertion hole on the central axis side, and vacuum suction is performed from the outer periphery of the first cylindrical shape. a collet shaft having first and second guide holes penetrating to the hole and having a mirror image relationship with respect to a mirror image plane passing through the central axis, perpendicular to the mirror image plane and opposed to each other on a center line passing through the central axis; an outer periphery of the collet shaft; It has a sliding inner peripheral surface in contact with the surface, a tapered pressing inner peripheral surface extending downward from the sliding inner peripheral surface and in the centrifugal direction from the central axis, and a protective inner peripheral surface continuing downward from the pressing inner peripheral surface. Cylindrical ball pressers that are slidable in the direction of the central axis, and first and second presses that are arranged in the first and second guide holes, respectively, and can be pressed in symmetrical directions from the inner peripheral surface of the press. a sphere; In the nozzle collet according to the third aspect, when the upper part of the nozzle collet is inserted into the collet insertion hole, the first and second pressing balls fitted in the holding groove are symmetrically directed toward the holding groove. press.

According to the present invention, a vacuum suction arm that can be used in a high-precision, high-speed automatic exchange system for a nozzle collet, and that can maintain a high degree of precision in sucking and detaching the nozzle collet without vertical movement even in high-speed up-and-down motion. It is possible to provide a high-precision collet holder with a high holding force and a nozzle collet to be inserted into the tip of this collet holder.

FIG. 1(a) is a front view of a vacuum suction arm according to an embodiment of the present invention, FIG. 1(b) is a cross-sectional view of FIG. ) is an enlarged view of part A in FIG. 1(b). FIG. 2(a) is a front view when a nozzle tip is inserted into a vacuum suction arm according to an embodiment of the present invention, and FIG. 2(b) is a cross-sectional view seen from the AA direction of FIG. 2(a). is. 3(a) is a cross-sectional perspective view of the nozzle tip of FIG. 2(b), and FIG. 3(b) is a perspective view of the nozzle tip viewed from below. FIG. 2B is a cross-sectional view of the nozzle collet and the nozzle tip removed from the collet holder of the vacuum suction arm according to the embodiment of the present invention from the state of FIG. 2B; FIG. 5(a) is a front view when the ball pressing portion slides upward from the state of FIG. 1(a), and FIG. 5(b) is a cross section seen from the AA direction of FIG. 5(a). 5(c) is an enlarged view of part A in FIG. 5(b). 6(a), 6(b) and 6(c) are views corresponding to enlarged views of part A in FIG. 1(b), and FIG. 6(a) is a view before removal of the nozzle collet. 6(b) is a transition diagram during removal of the nozzle collet, and FIG. 6(c) is a diagram after removal of the nozzle collet. FIG. 7(a) is an enlarged cross-sectional view seen from the BB direction of FIG. 1(a), and FIG. 7(b) is a view corresponding to FIG. 7(a) when there are four pressing balls. . FIG. 8(a) is a front view of the entire precision processing apparatus provided with the vacuum suction arm according to the embodiment of the present invention, and FIG. 8(b) shows the nozzle collet and the nozzle tip from the state of FIG. It is sectional drawing of the withdrawn state. It is a perspective view of Fig.8 (a). 8 is an enlarged cross-sectional view of a vacuum suction arm according to a comparative example, corresponding to FIG. 7, in which FIG. It is a diagram.

Embodiments of the present invention will be described below with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic, and the relationship between thickness and planar dimensions, the ratio of sizes of each member, and the like are different from the actual ones. Therefore, specific thicknesses, dimensions, sizes, etc. should be determined in a more diverse manner by taking into consideration the gist of the technical ideas that can be understood from the following description. In addition, it is a matter of course that there are portions with different dimensional relationships and ratios between the drawings.

Further, the embodiments of the present invention shown below are examples of apparatuses for embodying the technical idea of the present invention. It does not specify arrangement etc. to the following. The technical idea of the present invention is not limited to the contents described in the embodiments of the present invention, and various modifications can be made within the technical scope defined by the claims. .

(Structure of vacuum suction arm)
A vacuum suction arm according to an embodiment of the present invention constitutes a part of a vacuum suction type precision processing apparatus for assembling and mounting electronic components as objects to be manipulated, as shown in FIGS. As shown in FIG. 1, the vacuum suction arm according to the embodiment includes a cylindrical collet shaft 11, a spring holding portion 13 fixed to the collet shaft 11, and an upper end portion contacting the spring holding portion 13, and the collet shaft 11. a spring 15 that can expand and contract in the axial direction of the collet shaft 11, a cylindrical ball pressing portion 17 that is in contact with the collet shaft 11 and can slide in the axial direction of the collet shaft 11 while expanding and contracting the spring 15, and a guide for the collet shaft 11. A collet holder (11, 13, 15, 17, 21a, 21b) is configured with a first pressing ball 21a and a second pressing ball 21b arranged in the hole. As shown in the cross-sectional views of FIGS. 1B and 7A, in the vacuum suction arm according to the embodiment, the first pressing ball 21a and the second pressing ball 21b move the cylindrical axis of the collet shaft 11. They are arranged to face each other on a line passing through the cylindrical axis of the collet shaft 11 so as to have a mirror image relationship with respect to the mirror image plane through which they pass. As will be described later, in order to achieve a mirror image relationship with respect to a plane passing through the cylindrical axis (central axis) of the collet shaft 11, an even number of pressing balls is desirable. In the arrangement shown in FIG. 7( a ), the first pressing ball 21 a and the second pressing ball 21 b are arranged on the center line perpendicular to the mirror image plane passing through the cylindrical axis of the collet shaft 11 .

Furthermore, as shown in FIG. 4, inside the collet holder (11, 13, 15, 17, 21a, 21b) of the vacuum suction arm according to the embodiment on the lower end side of the collet shaft 11, the upper part of the collet shaft 11 is provided. Nozzle head unit (23, 25 , 51) are inserted.

That is, as shown in FIGS. 2 and 8, at the lower end of the collet holder (11, 13, 15, 17, 21a, 21b) according to the embodiment, the nozzle head unit (23, 25, 51) has a conical shape. is insertable. 1, 2, 4, etc., the collet holders (11, 13, 15, 17, 21a, 21b) of the vacuum suction arm according to the embodiment are arranged such that the vertical direction is the longitudinal direction. is equipped with a collet shaft 11. As shown in FIG. 4, the collet shaft 11 has a first tubular shape that defines a first outer peripheral surface, a collet insertion hole 35 at the lower end in the longitudinal direction, and a first tubular shaft extending from the collet insertion hole 35 . It has a vacuum suction hole 31 continuous upward in a direction (first direction).

As shown in FIG. 8, the upper end of the vacuum suction hole 31 is connected to a vacuum piping joint (adapter) 71 . With the nozzle head unit (23, 25, 51) inserted into the lower end of the collet shaft 11, air is sucked by the vacuum pump through the vacuum piping joint (adapter) 71 shown in FIGS. Thus, a vacuum suction chuck is constructed in which the cavity inside the collet shaft 11, the nozzle collet 23, and the nozzle tip 51 becomes negative pressure, and the object to be operated is vacuum-sucked (depressurized suction) at the tip of the nozzle tip 51. . When the cavity inside the collet shaft 11, the nozzle collet 23, and the nozzle tip 51 is set to a positive pressure while the object to be operated is vacuum-sucked, the vacuum-sucked object to be operated is at the tip of the nozzle tip 51. detach from

As shown in the enlarged views of FIGS. 1(c), 5(c), 6(a), etc., a notch-shaped anti-rotation groove 45 is provided on the outer edge of the lower end of the collet shaft 11 to prevent rotation. Above the retaining groove 45, a guide hole (first guide hole) 43a is provided that penetrates from the first outer peripheral surface of the collet shaft 11 in the centripetal direction. The “first outer peripheral surface” refers to the entire first cylindrical outer side surface of the collet shaft 11 . The collet insertion hole 35 and the vacuum suction hole 31 are continuous along the first longitudinal direction, and penetrate substantially the entire collet shaft 11 along the first direction. In FIG. 1(b), the diameter of the collet insertion hole 35 is larger than the diameter of the vacuum suction hole 31. However, if the upper part of the nozzle collet 23 can be inserted and removed, the diameter of the collet insertion hole 35 is equal to the diameter of the vacuum suction hole 31. It can be smaller. As shown in FIG. 4, the upper portion of the nozzle collet 23 has a stepped portion, and the enveloping surface connecting the corners of the stepped portion has a generally conical outer diameter surface. At the boundary between the collet insertion hole 35 and the vacuum suction hole 31 shown in FIG. 1(b), an elastic body such as an O-ring is provided to prevent air leakage or to absorb impact when the nozzle collet 23 is inserted. It may or may not be provided.

Furthermore, as shown in FIGS. 1(a) and 1(b), the collet holder (11, 13, 15, 17, 21a, 21b) according to the embodiment includes a spring fixed to the first outer peripheral surface of the collet shaft 11. A pressing portion 13 is provided. The method of fixing the spring retainer 13 to the collet shaft 11 may be metal joining such as welding or brazing, joining utilizing pressure deformation such as shrink fitting or caulking, press fitting, or mechanical joining using screws or the like. , or chemical bonding using an adhesive or the like. Since the spring retainer 13 is in contact with the upper end of the spring 15 and is a member that does not move when pressed by the spring 15, any fixing method that can withstand the pressure of the spring 15 may be used. In FIG. 1B, the spring retainer 13 is a separate member from the collet shaft 11, but the spring retainer 13 may be integrated with the collet shaft 11. FIG. Further, in FIG. 1(b), the spring retainer 13 has a stepped shape having a cylindrically protruding sheath portion on the lower side so that the cross-sectional shape is L-shaped. The sheath portion of the spring pressing portion 13 is cylindrically sandwiched between the spring 15 and the collet shaft 11 to prevent the spring 15 from directly contacting the collet shaft 11 . By reducing the contact area of the spring 15 with the collet shaft 11, the sheath of the spring retainer 13 is a preferable structure because it has the effect of reducing friction and preventing deterioration of the member. However, the spring 15 is located between the spring pressing portion 13 and the ball pressing portion 17, and it is only required to play a role of sliding the ball pressing portion 17 which is slidable in the first direction. The side protruding sheath may or may not be present.

The spring 15 may be any one having a function as a spring, such as a coil spring or a ring spring whose central axis coincides with the central axis of the vacuum suction hole 31, or a collection of coil springs whose side portions are in contact with the spring retainer 13. can be used. The upper end of the spring 15 is in contact with the spring retainer 13, but the upper end may be fixed to the spring retainer 13 as long as the function of the spring 15 as a spring is not lost.

Furthermore, as shown in FIG. 1, the collet holder (11, 13, 15, 17, 21a, 21b) according to the embodiment has a cylindrical ball retainer 17 in contact with the lower end of the spring 15, which is attached to the collet shaft 11. It is provided on the first outer peripheral surface side. The ball pressing portion 17 has, as inner peripheral surfaces, a sliding inner peripheral surface in contact with a first outer peripheral surface between the spring pressing portion 13 and the first guide hole 43 a and a sliding inner peripheral surface below the sliding inner peripheral surface and above the vacuum suction hole 31 . It has a tapered pressing inner peripheral surface 19 that continues in the centrifugal direction from the central axis, and a protective inner peripheral surface that continues downward from the pressing inner peripheral surface 19 . Although the sliding inner peripheral surface is in contact with the first outer peripheral surface, it is not fixed and can rotate and slide. The pressing inner peripheral surface 19 is a conical inner peripheral surface that continues downward from the sliding inner peripheral surface in a widening shape. The protective inner peripheral surface is provided as a cylindrical surface that is continuous with the pressing inner peripheral surface 19 and whose generatrix direction is parallel to the first direction. The diameter of the cylindrical space enclosed by the protective inner peripheral surface is larger than the diameter of the cylindrical space enclosed by the sliding inner peripheral surface.

Further, the ball pressing portion 17 has a sliding inner peripheral surface as a common surface, and a stepped portion from the central thick flange to the outer peripheral surface side so that the cross-sectional shape of the upper part in the longitudinal direction is approximately L-shaped. It has a cylindrical shape. The ball pressing portion 17 has a cylindrical sheath extending upward in the longitudinal direction from the central flange, and the outer peripheral surface of this sheath contacts the inner peripheral side of the lower end of the spring. This sheath prevents the spring 15 from coming into direct contact with the collet shaft 11 as in the case of the spring retainer 13 . By reducing the contact area of the spring 15 with the collet shaft 11, this structure is preferable because it has effects such as reducing friction and preventing deterioration of members. However, the spring 15 is located between the spring holding portion 13 and the ball holding portion 17, and it is sufficient that the ball holding portion 17, which is slidable in the first direction, slides. It doesn't have to be. As in the case of the spring holding portion 13, the lower end portion of the spring 15 may be fixed to the ball holding portion 17 as long as the spring function of the spring 15 is not lost. In FIG. 1(b), a gap 33 exists between the spring holding portion 13 and the ball holding portion 17, and the gap 33 is an area in which the ball holding portion 17 can slide upward. The gap 33 also has the effect of reducing the contact area of the spring 15 and reducing the friction when the spring 15 expands and contracts. The ball retainer 17 can slide on the first outer peripheral surface of the collet shaft 11 in the first direction as the spring 15 expands and contracts.

Furthermore, as shown in FIGS. 1(b) and 1(c), the collet holder (11, 13, 15, 17, 21a, 21b) according to the embodiment is arranged in the first guide hole 43a, It has a pressing ball (first pressing ball) 21a that can move in a direction substantially perpendicular to the first direction by being pressed by the spring 15 via the surface 19 . The first pressing ball 21a is not directly fixed to the first guide hole 43a. The second pressing ball 21b in FIG. 1B is similar to the first pressing ball 21a, and the second pressing ball 21b is a mirror image of the first pressing ball 21a and the plane passing through the cylindrical axis (central axis) of the collet shaft 11. arranged in a relationship. The second pressing ball 21b is arranged in a second guide hole provided in the collet shaft 11, and is pressurized by the spring 15 via the pressurizing inner peripheral surface 19, and can move in a direction substantially perpendicular to the first direction. can.

Furthermore, as shown in FIGS. 1(b), 2(b), and 4, the vacuum suction arm according to the embodiment has a collet insertion hole 35 of the collet holder (11, 13, 15, 17, 21a, 21b). It has a nozzle collet 23 that can be inserted into and removed from. The tip of the nozzle collet 23 has a generally conical shape with a small upper base, and has an outer diameter that matches the inner diameter of the collet insertion hole 35 . When the upper portion of the nozzle collet 23 is inserted into the collet insertion hole 35, the tip portion of the nozzle collet 23 is pressed in the symmetrical direction by the spring 15 via the first pressing ball 21a and the second pressing ball 21b. 11 in the direction of the cylinder axis (central axis).

As shown in FIG. 1B, the lower portion of the nozzle collet 23 has a collet shape (cylindrical clamp shape) with a nozzle tip insertion hole 39 provided at the lower end. A through hole 37 is provided continuously upward in the first direction from the nozzle tip insertion hole 39, and has a second cylindrical shape defined by the second outer peripheral surface so that the tip portion has a truncated cone shape. The size and shape of the nozzle tip insertion hole 39 are not limited as long as the nozzle tip can be inserted and clamped. Since the nozzle tip has a different shape depending on the object to be operated, the nozzle tip insertion hole 39 must match the shape of the nozzle tip.

The “second outer peripheral surface” of the nozzle collet 23 refers to the entire outer side surface of the second cylindrical shape, and as shown in FIGS. It is a shaped surface. The nozzle collet 23 is provided with a ring-shaped holding groove 41 on the second outer peripheral surface. 21a is fitted into the holding groove 41, the holding groove 41 receives the pressing force of the spring 15. As shown in FIG. Regarding the first pressing ball 21a and the second pressing ball 21b arranged so as to have a mirror image relationship with respect to the plane passing through the cylindrical axis (central axis) of the collet shaft 11, the movement of the second pressing ball 21b and the movement of the second pressing ball 21b is fitted into the holding groove 41, the holding groove 41 receives the pressing force of the spring 15 in a symmetrical direction that is a mirror image of the first pressing ball 21a. The holding groove 41 is a ring-shaped groove surrounding the upper portion of the second outer peripheral surface, and may be positioned so as to be accommodated in the collet insertion hole 35 when the nozzle collet 23 is inserted into the collet insertion hole 35 . The shape of the holding groove 41 is V-shaped in the cross-sectional views of FIGS. 1B and 1C, but is not limited to the V-shaped cross-section. The cross-sectional shape of the holding groove 41 cut in the longitudinal direction along the first direction is such that when the nozzle collet 23 is inserted into the collet insertion hole 35, the pressure of the spring 15 pushes the pressure inner peripheral surface 19 through the first cylinder. As long as the first pressing ball 21a and the second pressing ball 21b pushed in the centripetal direction of the shape can be fitted, either a U-shape or a U-shape may be used.

Furthermore, as shown in FIGS. 1(b), (c) and 4, a detent pin 25 is fixed to the second outer peripheral surface of the nozzle collet 23 according to the embodiment. The anti-rotation pin 25 fits into the anti-rotation groove 45 of the vacuum suction arm when the upper portion of the nozzle collet 23 is inserted into the collet insertion hole 35 . The detent pin 25 is a pin fixed so as to protrude in the centrifugal direction from the central axis of the through hole 37 of the nozzle collet 23 from the second outer peripheral surface. When the nozzle collet 23 is inserted into the collet insertion hole 35 , the position (rotation angle) of the nozzle tip in the rotation direction with respect to the central axis of the through hole 37 and the insertion position are adjusted by fitting the notch-shaped anti-rotation groove 45 . It has the function of determining the depth. The anti-rotation pin 25 may be integrated with the nozzle collet 23 as long as it has the same function. 1(b) and 1(c), the anti-rotation groove 45 is positioned below the first guide hole 43a. The position of the anti-rotation groove 45 is arbitrary as long as it has the function of determining.

As shown in FIG. 3, the nozzle tip 51 to be inserted into the nozzle collet 23 used in the vacuum suction arm according to the embodiment has a lower end portion having a suction window 49 with a side length of, for example, about 0.1 mm. 0.05 mm or less. The orientation of each side of this rectangular portion is important for vacuum suction of an object to be manipulated having minute dimensions such as about 0.1 mm or less, or about 0.05 mm or less. If the position of the nozzle tip 51 in the rotational direction with respect to the nozzle collet 23 is properly adjusted in the state shown in FIG. 4, when the state shown in FIG. The orientation of the rectangular portion that is the tip of the nozzle tip 51 can be arranged at the correct position (angle) with respect to the central axis of the through hole 37 .

(One-touch operation)
1 and 5, the effect of one-touch pressing using the spring 15 in a state where the nozzle collet 23 is inserted into the collet insertion hole 35 of the collet holder (11, 13, 15, 17, 21a, 21b). will be described in detail.

In FIGS. 1(a) and 1(b), the symmetrical pressure by the elastic spring 15 is applied in the direction of sliding the ball retainer 17, which is slidable in the first direction, downward. In FIG. 1C, the pressure applied to the ball pressing portion 17 is transmitted to the first pressure ball 21a and the second pressure ball 21b that are in contact with the pressure inner peripheral surface 19. As shown in FIG. Since the first pressing ball 21a is arranged without being fixed in the first guide hole 43a, the pressing force is transmitted in the direction perpendicular to the first direction (centripetal direction). Although not shown, the second pressing ball 21b is also fixed in a second guide hole arranged to have a mirror image relationship with the first guide hole 43a with respect to a plane passing through the cylindrical axis (central axis) of the collet shaft 11. The first pressing ball 21a and the first pressing ball 21a are arranged in a direction orthogonal to the first direction (centripetal direction), and the pressing force is transmitted in a direction that is a mirror image of the first pressing ball 21a. In the state where the nozzle collet 23 is inserted into the collet insertion hole 35 as shown in FIG. Called 41. The downward pressure of the spring 15 is converted into a symmetrical pressure in a direction close to the horizontal direction (centripetal direction toward the center of the first cylindrical shape) due to the interposition of the pressure inner peripheral surface 19, and the nozzle collet 23 is temporarily held (fixed) on the collet shaft 11 .

In order to fix the nozzle collet 23 to the collet shaft 11 by symmetrical pressing that forms the above-mentioned mirror image relationship, the shape of the first guide hole 43a should be directed from the first outer peripheral surface toward the center of the first cylindrical shape. A shape that narrows toward the centripetal direction is preferred. The lower surface of the first guide hole 43a may be horizontal and the upper surface may be tapered. Both upper and lower surfaces of the first guide hole 43a may be horizontal, and both side surfaces of the first guide hole 43a may be tapered when viewed in cross section from above as shown in FIG. In any case, as shown in FIG. I wish I had. Although the first guide hole 43a and the pressing inner peripheral surface 19 are linear in the cross-sectional view of FIG. 1(c), they may be curved when viewed in the cross-sectional view. Although illustration is omitted, the second guide hole and the pressing inner peripheral surface 19 of the second pressing ball 21b, which has a mirror image relationship with the first pressing ball 21a, also have a curved shape when viewed in cross section. However, it is required to be symmetrical so as to have a mirror image relationship with the first guide hole 43a.

5 shows a state in which the ball pressing portion 17 in FIG. 1 is slid upward and the sheath of the ball pressing portion 17 is in contact with the sheath of the spring pressing portion 13, that is, the state in which the gap 33 in FIG. 1 disappears. . In the state of FIG. 5, the pressing inner peripheral surface 19 does not contact the first pressing ball 21a and the second pressing ball 21b, so the pressure of the spring 15 is not transmitted to the first pressing ball 21a and the second pressing ball 21b. If the lower surface of the first guide hole 43a is tapered as shown in FIG. 5(c), the first pressing ball 21a and the second pressing ball 21b move in the centrifugal direction from the center of the first cylindrical shape. . Even if the first pressing ball 21a and the second pressing ball 21b protrude greatly from the first outer peripheral surface and move, they are pressed by the protective inner peripheral surface so that they do not come off from the vacuum suction arm according to the embodiment. It's becoming As the first pressing ball 21 a and the second pressing ball 21 b move, they are disengaged from the holding groove 41 , the nozzle collet 23 is not pressed, and the nozzle collet 23 is removed from the collet shaft 11 . Even if the lower surface of the first guide hole 43a is not tapered, the first pressing ball 21a and the second pressing ball 21b do not press the holding groove 41, and the nozzle collet 23 is not fixed to the collet shaft 11. Become.

With reference to FIG. 6, how the nozzle collet 23 is removed from the collet holders (11, 13, 15, 17, 21a, 21b) will be described in detail. FIG. 6(a) shows the collet holders (11, 13, 15, 17, 21a, 21b) in a locked state before the nozzle collet 23 is removed. The ball pressing portion 17 transmits pressure to the first pressing ball 21a via the pressing inner peripheral surface 19, and the first pressing ball 21a is fitted into the holding groove 41, whereby the nozzle collet 23 is fixed. be. Although not shown, the ball pressing portion 17 presses the second pressing ball 21 in a mirror image relationship with the second pressing ball 21b through the inner peripheral surface 19 of pressing. , and the nozzle collet 23 is fixed by fitting the second pressing ball 21 into the holding groove 41 . When attempting to move the nozzle collet 23 downward from the state shown in FIG. On the upper surface, a component force is generated that pushes back the first pressing ball 21a and the second pressing ball 21 from the center of the first cylindrical shape in the centrifugal direction in a mirror image relationship.

Next, the first pressing ball 21a and the second pressing ball 21, to which a component of force pushing back in the centrifugal direction is applied, slides the ball pressing portion 17 upward and pushes back the contacting spring 15 upward in a mirror image relationship. As a result, the nozzle collet 23 can move downward with respect to the collet holders (11, 13, 15, 17, 21a, 21b), and the upper part of the second outer peripheral surface is symmetrical with the first pressing ball 21a and the second pressing ball 21. 6(b), and the locked state is released. When the locked state is released into the unlocked state, the nozzle collet 23 can be easily moved downward from the state shown in FIG. 21a, 21b) are completely removed from the collet shaft 11, and finally the state shown in FIG. 6(c) is obtained. Although the first pressing ball 21a and the second pressing ball 21 are released from the component force from the second outer peripheral surface of the nozzle collet 23, they are pressed by the spring 15 via the pressing inner peripheral surface 19 and move toward the first cylinder. move in a centripetal direction toward the center of the shape. When moving in the centripetal direction, the first pressing ball 21 a does not fall into the collet insertion hole 35 , and is pushed inside the first guide hole 43 a or at the outer edge of the first guide hole 43 a on the inner peripheral surface of the collet shaft 11 . The size and shape of the first guide hole 43a must be set so that the movement of the first pressing ball 21a is stopped. Although not shown in the drawings, the second pressing ball 21b, which has a mirror image relationship with the first pressing ball 21a, does not fall into the collet insertion hole 35 and does not fall into the second guide hole or the collet shaft. The size and the like of the second guide hole must be set so that the movement of the second pressing ball 21b stops at the outer edge of the second guide hole on the inner peripheral surface of 11 .

The removal of the nozzle collet 23 from the collet holders (11, 13, 15, 17, 21a, 21b) has been described with reference to FIG. As a result, an unlocked state is obtained, and the operation of moving the nozzle collet 23 below the collet holders (11, 13, 15, 17, 21a, 21b) can be completed with a single touch. Insertion of the nozzle collet 23 into the collet holders (11, 13, 15, 17, 21a, 21b) can be performed in a one-touch manner in the reverse manner of removal.

In FIG. 1, as the pressing balls for fixing the nozzle collet 23, two pressing balls, a first pressing ball 21a and a second pressing ball 21b, are opposed to each other in a mirror image relationship. As shown in the cross-sectional view of FIG. 7(a), the first pressing ball 21a and the second pressing ball 21b are in a mirror image relationship with respect to a mirror image plane passing through the central axis of the first cylindrical shape, and are perpendicular to the mirror image plane and the central axis thereof. It is an arrangement facing each other on the center line passing through. FIG. 7B shows the arrangement of the four pressing balls, ie, the first pressing ball 21a, the second pressing ball 21b, the third pressing ball 21c, and the fourth pressing ball 21d. If the number of pressing balls is even, it is possible to realize an arrangement in which they are in a mirror image relationship with respect to a mirror image plane passing through the central axis of the first cylindrical shape and face each other on a center line perpendicular to the mirror image plane and passing through the central axis. In the arrangement shown in FIG. 7B, the first pressing ball 21a and the third pressing ball 21c are aligned on the first center line perpendicular to the first mirror image plane passing through the cylinder axis of the collet shaft 11, and the second pressing ball 21b and the fourth pressing ball 21d are aligned on the second center line perpendicular to the second mirror image plane passing through the cylindrical axis of the collet shaft 11. As shown in FIG. The names of the first pressing ball 21a, the second pressing ball 21b, the third pressing ball 21c, and the fourth pressing ball 21d are for convenience, and the third pressing ball 21c in FIG. 7(b) is called the "second pressing ball". , the second pressing ball 21b may be called a "fourth pressing ball". In any case, the number of pressing balls may be an even number, and since FIGS. 7A and 7B are examples, it is also possible to provide six or more pressing balls. By adopting a symmetrically arranged structure based on a mirror image relationship as shown in FIGS. Therefore, even when the nozzle collet 23 moves up and down at high speed, the occurrence of vertical shaking can be suppressed, and the position of the fixed nozzle collet 23 can be stabilized. Automatic exchange is possible.

FIG. 10 is an enlarged cross-sectional view of the vacuum suction arm according to the comparative example in comparison with FIG. Can not do it. In particular, as shown in FIG. 10(b), when the pressure ball is one of the first pressure balls 21a, the pressure of the spring 15 is transmitted to the holding groove 41 of the nozzle collet 23 by the first pressure ball 21a. Since the air is applied from only one direction, the position of the fixed nozzle collet 23 is not stabilized, causing vertical shake or the like, which affects the adsorption and desorption of the object to be operated. Also, the asymmetrical arrangement increases the possibility of uneven wear of the members, and is not compatible with the high-speed up-and-down motion used in high-precision, high-speed automatic change systems. As shown in FIG. 10(a), even when there are three pressing balls as the first pressing ball 21a, the second pressing ball 21b, and the third pressing ball 21c, a delta functional impact force is generated with high-speed up-and-down motion. When applied, the force is not pushed back by the counter-pressing ball having a mirror image relationship, so the position of the fixed nozzle collet 23 is not stable, affecting the adsorption and desorption of the object to be operated, and the wear of the member. more likely to cause bias. As shown in FIGS. 7(a) and 7(b), by arranging the opposing pressing balls with an even number of pressing balls, a delta-function impact force is applied along with the high-speed up-and-down motion. However, the position of the fixed nozzle collet 23 can be stabilized. Therefore, by realizing a mirror image relationship with an even number of pressing balls, it is possible to reduce the possibility of adversely affecting the adsorption and desorption of the object to be operated and uneven wear of the members, and the nozzle collet 23 can be highly accurate. Can be used for high speed automatic exchange system.

It is assumed that the material of the members constituting the vacuum suction arm according to the embodiment is mainly metal, and for example, a spline shaft can be used for the nozzle collet 23 . However, the members constituting the vacuum suction arm may be made of other materials as long as they have the strength and workability to withstand use as a part of the precision processing device. For example, a fiber reinforced plastic (FRP) to which glass fiber or carbon fiber is added, or a composite material having a metal material inside and injection-molded plastic around it may be used.

According to the collet holder (11, 13, 15, 17, 21a, 21b) of the vacuum suction arm according to the embodiment shown in FIG. Since it is used as a force in a symmetrical direction that acts as a pressing force for locking, the fixing force in the locked state is not attenuated as compared with the case where an elastic body such as rubber is used for pressing. In addition, even in the high-speed up-and-down movement of the object to be manipulated during the adsorption/desorption operation, the force of the downward pressing by the spring 15 forms a mirror-image relationship. It is possible to maintain high accuracy of adsorption and desorption of the object to be operated by the nozzle tip inserted into the nozzle collet 23 without causing any deviation in direction.

Furthermore, by adopting a mechanism that allows the nozzle tip 51 to be freely separated from the nozzle head unit (23, 25, 51), it is possible to replace only the nozzle tip 51 as the main replacement part, making the precision processing device more inexpensive. can do. Moreover, it becomes easy to change the specifications of the nozzle tip 51 . In particular, since the nozzle collet 23 has a structure in which the anti-rotation pin 25 is fitted into the anti-rotation groove 45 of the vacuum suction arm, it is easy to accurately determine the position and orientation of the minute rectangular shape at the tip of the nozzle tip 51. This makes it easy to apply to a vacuum suction type precision machining device equipped with a high-precision, high-speed automatic exchange system.

When the nozzle collet 23 is inserted into the collet insertion hole 35 from the state shown in FIG. 4, the state shown in FIG. 2 is obtained. If there is a horizontal misalignment with each other during insertion, the conical surface 27 will come into contact with the lower end of the collet shaft 11 if the width of the misalignment falls within the lateral width of the conical surface 27 at the tip of the nozzle collet 23 . After that, the collet shaft 11 or the nozzle collet 23 moves horizontally while the lower end of the collet shaft 11 slides on the conical surface 27, and the nozzle collet 23 can be accommodated in the collet insertion hole 35 at an appropriate horizontal position.

As shown in FIG. 4, according to the nozzle collet 23 according to the embodiment of the present invention, the tip of the nozzle collet 23 is formed into a shape having a conical surface 27 so that the collet insertion hole 35 on the side of the vacuum suction arm can be connected. Misalignment can be eliminated during insertion. The positional deviation can be eliminated by a cheaper and simpler method without the need for the positional deviation adjustment by human visual observation and without preparing other devices.

Although the present invention has been described by the above embodiments, the discussion and drawings forming part of this disclosure should not be construed as limiting the invention. Various alternative embodiments, implementations and operational techniques will become apparent to those skilled in the art from this disclosure.

Moreover, it is also possible to appropriately combine part of the individual technical ideas described in the above embodiments with each other. Thus, the present invention naturally includes various embodiments and the like not described here. Therefore, the technical scope of the present invention is defined only by the matters specifying the invention according to the scope of claims, which can be interpreted appropriately from the above description.

REFERENCE SIGNS LIST 11: Collet shaft 13: Spring pressing portion 15: Spring 17: Ball pressing portion 19: Pressing inner peripheral surface 21a: First pressing ball 21b: Second pressing ball 21c: Third pressing ball 21d: Fourth pressing ball 23: Nozzle Collet 25 Detent pin 27 Conical surface 31 Vacuum suction hole 33 Gap 35 Collet insertion hole 37 Through hole 39 Nozzle tip insertion hole 41 Holding groove 43a First guide hole 43b Second guide hole 43c Third guide hole 43d Fourth guide hole 45 Detent groove 47 Nozzle inner space 49 Adsorption window 51 Nozzle tip 71 Vacuum piping joint (adapter)

Claims (3)

A first cylindrical shape having a vacuum suction hole continuing upward from the collet insertion hole at the lower end on the central axis side, and passing through the central axis from the outer periphery of the first cylindrical shape to the vacuum suction hole. a collet shaft provided with first and second guide holes that are in a mirror image relationship with respect to a mirror image plane and face each other on a center line perpendicular to the mirror image plane and passing through the central axis;
In a cross section along the central axis, the center in the direction along the central axis protrudes outward and has a thick flange, and the upper side of the flange becomes a thin sheath. , the upper side of the cross-sectional shape is an L-shaped stepped shape, and a sliding inner peripheral surface located on the inner peripheral side of the L-shaped stepped shape and in contact with the outer peripheral surface of the collet shaft; and the sliding inner peripheral surface. A taper-shaped pressing inner peripheral surface that widens in the centrifugal direction from the central axis at a position away from the sheath portion below, and a protective inner peripheral surface that continues downward from the pressing inner peripheral surface, and extends in the central axis direction. a slidable cylindrical ball retainer;
first and second pressing balls arranged in the first and second guide holes, respectively, and capable of being pressed in symmetrical directions from the pressing inner peripheral surface;
A second cylindrical shape having a through hole that continues upward in the central axis direction from a nozzle tip insertion hole provided at the lower end, and having an upper outer diameter shape that matches the inner diameter shape of the collet insertion hole. None, a nozzle collet provided with a ring-shaped holding groove on the outer peripheral surface of the second cylindrical shape;
A spring retainer having a thin cylindrical sheath on the lower side and fixed to a part of the outer peripheral surface of the collet shaft so that the cross-sectional shape along the central axis has an L-shaped stepped shape. Department and
a spring that contacts the outer circumference of the sheath of the spring retainer with the inner circumference of the upper end thereof, contacts the inner circumference of the lower end with the outer circumference of the sheath of the ball retainer, and is capable of expanding and contracting in the direction of the central axis. , when the upper portion of the nozzle collet is inserted into the collet insertion hole, the first and second pressing balls fitted in the holding groove are pressed toward the holding groove in symmetrical directions. and vacuum suction arm. further comprising a detent pin fixed to the second cylindrical outer peripheral surface and below the holding groove;
When the upper portion is inserted into the collet insertion hole, the anti-rotation pin is fitted into an anti-rotation groove provided in a cutout shape on the outer edge of the lower end portion of the collet shaft and below the first guide hole. 2. The vacuum suction arm according to claim 1, wherein the vacuum suction arm is mated. A first cylindrical shape having a vacuum suction hole continuing upward from the collet insertion hole at the lower end on the central axis side, and passing through the central axis from the outer periphery of the first cylindrical shape to the vacuum suction hole. a collet shaft provided with first and second guide holes that are in a mirror image relationship with respect to a mirror image plane and face each other on a center line perpendicular to the mirror image plane and passing through the central axis;
In a cross section along the central axis, the center in the direction along the central axis protrudes outward and has a thick flange, and the upper side of the flange becomes a thin sheath. , the upper side of the cross-sectional shape is an L-shaped stepped shape, and a sliding inner peripheral surface located on the inner peripheral side of the L-shaped stepped shape and in contact with the outer peripheral surface of the collet shaft; and the sliding inner peripheral surface. A taper-shaped pressing inner peripheral surface that widens in the centrifugal direction from the central axis at a position away from the sheath portion below, and a protective inner peripheral surface that continues downward from the pressing inner peripheral surface, and extends in the central axis direction. a slidable cylindrical ball retainer;
first and second pressing balls arranged in the first and second guide holes, respectively, and capable of being pressed in symmetrical directions from the pressing inner peripheral surface;
It has a stepped shape with a thin cylindrical sheath portion on the lower side so that the cross-sectional shape along the central axis has an L-shaped stepped shape, and is fixed to a part of the outer peripheral surface of the collet shaft. and a spring holding portion
a spring that contacts the outer circumference of the sheath of the spring retainer with the inner circumference of the upper end thereof, contacts the inner circumference of the lower end with the outer circumference of the sheath of the ball retainer, and is capable of expanding and contracting in the direction of the central axis. a second tubular shape having a through-hole extending upward in the direction of the central axis from a nozzle tip insertion hole provided at the lower end thereof, and having an upper outer diameter shape that matches the inner diameter shape of the collet insertion hole; and when the upper part of the nozzle collet having a ring-shaped holding groove provided on the outer peripheral surface of the second cylindrical shape is inserted into the collet insertion hole, the first and A collet holder characterized by pressing the second pressing balls toward the holding groove in symmetrical directions.

Images