JP7105521B1 - Waveguide device, microwave irradiation device, and microwave transmission method - Google Patents

Abstract

A waveguide device capable of easily adjusting an electromagnetic field distribution in a cavity for irradiating an object with microwaves is provided. A waveguide device (1) is a first microwave guide fixed to a wall of a cavity in which an object is irradiated with microwaves so that at least a part of the waveguide is located outside the wall. A wave tube 10 and a second waveguide 20 for guiding microwaves from the first waveguide 10 into the cavity. is connected to the first waveguide 10 so as to change the . [Selection drawing] Fig. 1

Description

The present invention relates to a waveguide device for transmitting microwaves, a microwave irradiation device having the waveguide device, and a microwave transmission method.

2. Description of the Related Art Conventionally, by irradiating an object with microwaves inside a cavity, the object is reacted or dried. In the irradiation of microwaves in such a cavity, the irradiation direction of microwaves was fixed.

In the design of the cavity for irradiating the target with microwaves, an electromagnetic field analysis simulation is performed, and according to the simulation results, the shape of the cavity, the microwave irradiation position, The direction of irradiation was determined. However, even if the cavity is designed based on the simulation results, there are factors that cannot be reproduced in the simulation, such as droplets adhering to the walls of the reactor, reaction systems in which the liquid level changes over time, and changes in the liquid level after design. When the internal structure of the reactor is changed, the electromagnetic field distribution inside the reactor changes, and optimal microwave irradiation may not necessarily be achieved. In such a situation, it becomes necessary to adjust the electromagnetic field distribution in the cavity so that the microwave irradiation is optimal, and work such as opening the reactor and adding a structure to adjust the electromagnetic field distribution , resulting in an increase in man-hours.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and an object of the present invention is to provide a waveguide device, a microwave oven, and a microwave oven, which can easily adjust the electromagnetic field distribution in a cavity for irradiating microwaves to an object. An object of the present invention is to provide a wave irradiation device and a microwave transmission method.

To achieve the above object, a waveguide device according to one aspect of the present invention is fixed to a wall of a cavity in which an object is irradiated with microwaves so that at least a portion thereof is positioned outside the wall. , a first waveguide for microwaves, and a second waveguide for guiding and outputting microwaves from the first waveguide into the cavity, wherein the second waveguide is , connected to the first waveguide so as to change the output direction of microwaves in the cavity.

Further, in the waveguide device according to one aspect of the present invention, the first waveguide has an input side waveguide into which microwaves generated by the microwave generator are input, and a first central axis. a first joint portion, a partially cylindrical hollow portion provided with a first opening connected to the input-side waveguide and a second opening connected to the first opening; and the second waveguide has a second central axis, the second joint portion having a second central axis, the second joint portion through which microwaves from the first opening are guided. 3 and a fourth opening connected to the third opening, and has a partially cylindrical shape, so that it can rotate in the hollow part about the second central axis. and an output waveguide connected to the fourth opening for outputting microwaves into the cavity.

Further, in the waveguide device according to one aspect of the present invention, the first central axis and the second central axis may be coaxial.

Further, in the waveguide device according to the aspect of the present invention, the first opening and the second opening are provided so that the opening surfaces are parallel to the first central axis, and the third The opening and the fourth opening may be provided such that the opening surface is parallel to the second central axis.

Further, in the waveguide device according to one aspect of the present invention, the first waveguide includes an input-side waveguide to which microwaves generated by the microwave generator are input, and is connected to the input-side waveguide. a cylindrical first hollow portion provided on the peripheral surface with a first opening, and a second opening connected to the first opening provided on one end side in the central axis direction; the second waveguide has a third opening through which the microwave from the first hollow is guided at one end in the central axis direction; A fourth opening connected to the opening has a cylindrical second hollow portion provided on the peripheral surface, and the center axis of the second hollow portion is the center, with respect to the first joint portion. a second joint portion connected to the first joint portion so as to be rotatable through the second joint portion; and an output side waveguide connected to the fourth opening portion and outputting microwaves into the cavity. It's okay.

Further, in the waveguide device according to one aspect of the present invention, the first and second hollow portions may be coaxially connected.

Moreover, in the waveguide device according to the aspect of the present invention, the second joint part may be connected to the first joint part so as to be movable in the central axis direction of the second hollow part.

Further, in the waveguide device according to one aspect of the present invention, an annular spacer may be provided in the gap between the first and second joint portions.

Further, in the waveguide device according to one aspect of the present invention, when the first waveguide is fixed to the wall of the cavity, the second joint section can be rotated from outside the cavity. You may further provide the operation part connected to the joint part of.

Further, a microwave irradiation device according to an aspect of the present invention includes a microwave generator that generates microwaves, a cavity that irradiates an object with microwaves, and a microwave that is fixed to the cavity and generated by the microwave generator. and a waveguide device for introducing the generated microwaves into the interior of the cavity.

Further, a microwave transmission method according to an aspect of the present invention is a microwave transmission for transmitting microwaves from the outside of a cavity in which an object is irradiated with microwaves to the inside using a waveguide device. The method, wherein the waveguide device includes a microwave first waveguide secured to a wall of the cavity such that at least a portion is located outside the wall; and a second waveguide for guiding the microwave of and outputting it into the cavity, the second waveguide being capable of changing the output direction of the microwave within the cavity. with the step of redirecting the microwave output within the cavity of the second waveguide.

Further, the microwave transmission method according to an aspect of the present invention further includes the step of sensing the electromagnetic field distribution in the cavity or the state of the object, and the step of changing the output direction of the microwave uses the sensing result. , the microwave output direction of the second waveguide may be changed so that the electromagnetic field distribution or the object is in a desired state.

According to the waveguide device, the microwave irradiation device, and the microwave transmission method according to one aspect of the present invention, since the output direction of the microwave within the cavity can be changed, the electromagnetic field distribution within the cavity can be easily adjusted. be able to

1 is a perspective view of a waveguide device according to Embodiment 1 of the present invention; FIG. The front view of the waveguide device by the embodiment The side view of the waveguide device by the embodiment Sectional drawing of the waveguide apparatus by the same embodiment The perspective view of the 2nd waveguide in the same embodiment. Schematic cross-sectional view of the microwave irradiation device in the same embodiment FIG. 2 is a perspective view of a waveguide device according to Embodiment 2 of the present invention; The front view of the waveguide device by the embodiment 2 is a plan view of the waveguide device according to the embodiment; FIG. Sectional drawing of the waveguide apparatus by the same embodiment 2 is a partially enlarged cross-sectional view of the waveguide device according to the embodiment; FIG. Schematic cross-sectional view of the microwave irradiation device in the same embodiment Schematic cross-sectional view of the microwave irradiation device in the same embodiment Schematic cross-sectional view of the microwave irradiation device in the same embodiment FIG. 3 is a front view of a waveguide device according to Embodiment 3 of the present invention; The side view of the waveguide device by the embodiment Sectional drawing of the waveguide apparatus in the same embodiment Sectional drawing of the waveguide apparatus in the same embodiment

Hereinafter, a waveguide device, a microwave irradiation device, and a microwave transmission method according to one aspect of the present invention will be described using embodiments. It should be noted that in the following embodiments, components denoted by the same reference numerals are the same or correspond to each other, and repetitive description may be omitted.

(Embodiment 1)
A waveguide device, a microwave irradiation device, and a microwave transmission method according to Embodiment 1 of the present invention will be described with reference to the drawings. The waveguide device according to the present embodiment includes a first joint portion having a partially cylindrical hollow portion, and a second joint portion having a partially cylindrical shape rotatably arranged in the hollow portion. connects the first and second waveguides.

1 is a perspective view of the waveguide device 1 according to the present embodiment, FIG. 2 is a front view of the waveguide device 1, FIG. 3 is a side view of the waveguide device 1, 4 is a sectional view taken along line IV-IV in FIG. 2, and FIG. 5 is a perspective view of the second waveguide 20. As shown in FIG. FIG. 6 is a schematic cross-sectional view of a microwave irradiation device 100 having a cavity 3 and a waveguide device 1 attached to the cavity 3. As shown in FIG.

The waveguide device 1 according to the present embodiment, as shown in FIG. 6, is fixed to the cavity 3 in which microwaves are applied to the object 4, and the microwaves are introduced from the outside to the inside of the cavity 3. used for A microwave irradiation device 100 includes a waveguide device 1 , a cavity 3 , and a microwave generator 70 . The waveguide device 1 includes a first waveguide 10 fixed to the wall of the cavity 3 and a second waveguide for guiding microwaves from the first waveguide 10 and outputting them into the cavity 3. The wave tube 20 may be provided, and an operation portion 51 for rotating the second waveguide 20 may be provided. A second waveguide 20 is connected to the first waveguide 10 so as to change the output direction of the microwave within the cavity 3 . When the first waveguide 10 is fixed to the wall of the cavity 3, at least part of the first waveguide 10, for example, the microwave input side end of the first waveguide 10 It is fixed so that it is located outside the wall.

The first waveguide 10 has an input side waveguide 11 to which the microwave generated by the microwave generator 70 is input, and a first joint portion 12 fixed to the wall of the cavity 3. ing.
The first joint portion 12 has a partially cylindrical first hollow portion 13 connected to the input-side waveguide 11 .

The second waveguide 20 includes a second joint portion 21 having a partially cylindrical shape, which is arranged so as to be rotatable in the first hollow portion 13, and a second joint portion 21. and an output side waveguide 22 for outputting the microwave from 21 into the cavity 3 .

Since the first and second waveguides 10 and 20 each transmit microwaves, they are preferably made of a material that does not transmit microwaves. A material impermeable to microwaves may be, for example, a microwave reflective material. A microwave reflective material may be, for example, a metal. The metal is not particularly limited, and may be, for example, stainless steel, carbon steel, aluminum, aluminum alloy, nickel, nickel alloy, copper, copper alloy, or the like.

In the cavity 3, the object 4 may be irradiated with microwaves, for example by heating, baking, chemical reaction, drying, freeze-drying, waste disposal or sterilization. Cavity 3 may be, for example, a heating vessel, a reactor, a drying vessel, a waste treatment vessel, a sterilization vessel, or a kiln. The cavity 3 preferably has walls impermeable to microwaves in order to prevent microwaves from leaking from the internal space. As such, the walls of the cavity 3 may consist of a microwave reflective material. A microwave reflective material may be, for example, a metal. Examples of metals are given above. The object 4 to be irradiated with microwaves may be, for example, a solid such as a solid, a granular solid, or a powder, or may be a liquid, a gas, or a mixture thereof. may be Agitation of the object 4 may or may not take place within the cavity 3 . The microwave irradiation device 100 may be, for example, a continuous device or a batch device. Moreover, in the case of the continuous type, the object 4 may move continuously, or may repeat moving and stopping, for example.

Waveguide device 1 transmits microwaves generated by microwave generator 70 into cavity 3 . The microwave generator 70 that generates microwaves may generate microwaves using, for example, a magnetron, a klystron, a gyrotron, or a semiconductor device. Generating microwaves using a semiconductor element may mean, for example, oscillating microwaves using a semiconductor element or amplifying microwaves using a semiconductor element. The microwave frequency band may be, for example, around 915 MHz, 2.45 GHz, 5.8 GHz, 24 GHz, or another frequency band within the range of 300 MHz to 300 GHz. It is preferable that the size of the microwave waveguide in the waveguide device 1 corresponds to the frequency of the microwave to be transmitted.

The input side waveguide 11 in the first waveguide 10 may be, for example, a rectangular waveguide or a circular waveguide. Also, the input-side waveguide 11 may be, for example, a straight waveguide, a corner waveguide in which the waveguide is bent at a right angle or another angle, and the outer circumference of the corner portion is chamfered. Alternatively, the waveguide may be a bend waveguide curved in an arc shape. Also, the input-side waveguide 11 may be, for example, a hollow waveguide. The same is true for the output side waveguide 22 in the second waveguide 20 . In this embodiment, the case where the input side waveguide 11 and the output side waveguide 22 are hollow straight rectangular waveguides will be mainly described. The end of the input-side waveguide 11 on the microwave generator 70 side may or may not be provided with a flange 11a as shown in FIG. For example, the microwave generator 70 may be connected to the end of the input-side waveguide 11 on the microwave generator 70 side, or a waveguide connected to the microwave generator 70 may be connected. may

A first joint portion 12 in the first waveguide 10 has a first hollow portion 13 having a partially cylindrical shape. In this embodiment, the first joint portion 12 is integrally formed with the input-side waveguide 11 by a surface having a constant thickness, and the outer shape of the first joint portion 12 is also the same as that of the first joint portion 12. The case where the first joint portion 12 has a partially cylindrical shape like the hollow portion 13 of , that is, the case where the first joint portion 12 has a partially cylindrical shape with both ends in the axial direction closed will be mainly described. good. When the outer shape of the first joint portion 12 is not a partial cylindrical shape, for example, the outer shape of the first joint portion 12 is a rectangular parallelepiped shape, and the first partial cylindrical shape is placed inside the rectangular parallelepiped shape. A hollow portion 13 may be configured.

A first opening 14 and a second opening 15 are provided in the first hollow portion 13 . Therefore, the first and second openings 14 and 15 are connected via the first hollow portion 13 . The first opening 14 is connected to the input waveguide 11 . A portion of the second waveguide 20 is inserted into the first hollow portion 13 from the second opening 15 side. Both the first and second openings 14 and 15 are provided so that the opening surfaces are parallel to the central axis of the first hollow portion 13 . The first hollow portion 13 has a partially cylindrical shape by providing such first and second openings 14 and 15 on the peripheral surface side of the cylindrical hollow portion. is. Therefore, the central axis of the first hollow portion 13 is the central axis of the inner peripheral surface of the first hollow portion 13 other than the first and second openings 14 and 15 . Note that the peripheral surface of the columnar shape is a cylindrical surface parallel to the axial direction of the columnar shape. The pair of bottom surfaces 12c of the first joint portion 12, which has a pair of opposing bottom surfaces 12c and has a partially cylindrical shape, is provided with a through hole into which the rotation shaft 21a of the second joint portion 21 is inserted. there is The through hole is positioned on the central axis of the first hollow portion 13 .

In this embodiment, the opening surfaces of the first and second openings 14 and 15 are parallel, and both opening surfaces face each other with the central axis of the first hollow portion 13 interposed therebetween. but it doesn't have to be. The opening surfaces of the first and second openings 14 and 15 may not be parallel.

The cylindrical shape may be a cylindrical shape, that is, a shape in which the cross section perpendicular to the central axis is a perfect circle, or a shape in which the cross section is slightly deviated from a perfect circle, such as an elliptical shape or a regular polygonal shape. It may be of some shape. It is called a solid cylinder-like shape, including cases where the cross section perpendicular to the axial direction is a perfect circle and cases where the shape is slightly deviated from a perfect circle. A cylindrical shape is usually solid. When the cylindrical shape is a cylindrical shape, the peripheral surface is a circular peripheral surface. A cylindrical shape having a cylindrical hollow portion inside is called a hollow cylinder-like shape, although the outer shape is cylindrical.

When the first joint part 12 is fixed to the wall of the cavity 3, it is preferable that the central axis of the first hollow part 13 and the surface direction of the wall are parallel or nearly parallel. is. This is because it is preferable that the second opening 15 faces the inside of the cavity 3 when the first joint portion 12 is fixed to the cavity 3 . In this embodiment, the case where the first joint part 12 is entirely positioned outside the wall of the cavity 3 when the first joint part 12 is fixed to the wall of the cavity 3 will be mainly described. As shown in FIG. 1 , a mounting plate 12 a may be fixed to the first joint portion 12 . Then, as shown in FIG. 6, the first joint part 12 may be fixed to the cavity 3 by fixing the mounting plate 12a to the wall of the cavity 3 with bolts 5. As shown in FIG. The mounting plate 12a is provided with an opening having the same size and the same shape as the second opening 15. When viewed from the normal direction of the mounting plate 12a, the opening and the first opening 15 The two may be connected by welding or the like so as to match. If the first joint portion 12 is not provided with the mounting plate 12a, the first joint portion 12 may be fixed to the wall of the cavity 3 by welding, for example.

The second joint part 21 in the second waveguide 20 has a partially cylindrical shape, and is provided with third and fourth openings 24 and 25 connected to the second hollow part 23 inside. ing. Therefore, the third and fourth openings 24 and 25 are connected via the second hollow portion 23 . Microwaves from the first opening 14 of the first joint portion 12 are guided to the third opening 24 via the first hollow portion 13 . Both the third and fourth openings 24 and 25 are provided so that the opening surfaces are parallel to the central axis of the partially cylindrical shape of the second joint portion 21 . The central axis of the partially cylindrical shape of the second joint portion 21 is the central axis of the peripheral surface of the second joint portion 21 other than the third and fourth openings 24 and 25 . A pair of opposed bottom surfaces 21c of the second joint portion 21, which has a partially cylindrical shape, is provided with a rotation shaft 21a. The rotating shaft 21a may be fixed to the bottom surface 21c by welding, screws, or the like, for example. The rotation shaft 21 a is positioned on the central axis of the second joint portion 21 . Note that FIG. 5 shows the case where the rotation shaft 21a is not present in the second hollow portion 23, but this need not be the case. A rotation shaft 21 a may be present in the second hollow portion 23 . In this case, the rotating shaft 21a may be provided so as to pass through the bottom surface 21c. Further, when the rotating shaft 21a is present in the second hollow portion 23, at least the portion of the rotating shaft 21a that is present in the second hollow portion 23 is made of a material that does not reflect microwaves. is preferred. A microwave-transmissive material is suitable as a material that does not reflect microwaves. The microwave transmissive material is a material with a small relative dielectric loss, and is not particularly limited, but may be, for example, a fluororesin such as polytetrafluoroethylene, quartz, glass, or the like. The relative dielectric loss of the microwave transparent material is preferably less than 1, more preferably less than 0.1, for example, at the microwave frequency and temperature during operation of the microwave processing apparatus 100. , is less than 0.01. From the viewpoint of reducing the reflection or absorption of microwaves in the second hollow portion 23, it is preferable that the second hollow portion 23 does not have the rotating shaft 21a. One end of the rotating shaft 21a is connected to an operating portion 51 extending in one direction, as shown in FIG. 1 and the like. Note that the rotating shaft 21a and the operating portion 51 may be configured as an integral unit.

When the third opening portion 24 side of the second joint portion 21 of the second waveguide 20 cannot be put into the first hollow portion 13 from the second opening portion 15, or when the rotation When the shaft 21a is attached to the bottom surface 21c by welding or the like, the first waveguide 10 may be assembled by connecting the surfaces around the second joint portion 21 by welding or the like. On the other hand, in the case where the rotating shaft 21a can be attached to the bottom surface 21c with a screw or the like, the third opening 24 side of the second joint portion 21 of the second waveguide 20 is connected to the second opening. If it is possible to enter the first hollow portion 13 from the portion 15, after the second waveguide 20 is put into the first hollow portion 13 of the first waveguide 10, the first The rotating shaft 21 a may be attached to the second joint portion 21 through a through hole in the bottom surface 12 c of the joint portion 12 .

In addition, in the present embodiment, the second joint portion 21 is integrally formed with the output-side waveguide 22 by a surface having a constant thickness, and the second joint portion 21 inside the second joint portion 21 has a constant thickness. The case where the hollow portion 23 also has a partially cylindrical shape similar to the outer shape of the second joint portion 21, that is, the case where the second joint portion 21 has a partially cylindrical shape with both ends in the axial direction closed will be mainly described. I'll explain, but it doesn't have to be. When the second hollow portion 23 does not have a partially cylindrical shape, the second hollow portion 23 may have, for example, a rectangular parallelepiped shape.

In this embodiment, the opening surfaces of the third and fourth openings 24 and 25 are parallel, and both opening surfaces face each other across the central axis of the partially cylindrical shape of the second joint portion 21. Although shown as the case, it need not be. The opening surfaces of the third and fourth openings 24, 25 may not be parallel.

The second joint part 21 has a central axis of the partially cylindrical shape of the second joint part 21 that is coaxial with the central axis of the first hollow part 13, and the center of the partially cylindrical shape of the second joint part 21. It is arranged so as to be rotatable within the first hollow portion 13 about the axis. More specifically, the rotation shaft 21a passes through the through-hole of the bottom surface 12c of the first joint portion 12, so that the second joint portion 21 moves into the first hollow portion of the first joint portion 12. 13 may be rotatable. In order to prevent the microwave from leaking from the gap between the through hole and the rotating shaft 21a, for example, as shown in FIG. may be The microwave leakage prevention unit 6 may be provided with a microwave leakage prevention mechanism such as a choke structure.

It is preferable that the gap between the inner peripheral side of the peripheral surface 12b of the first joint portion 12 and the outer peripheral side of the peripheral surface 21b of the second joint portion 21 is small. Also, it is preferable that the amount of microwaves passing through the gap is less than the amount of microwaves output from the output-side waveguide 22 . The microwave passing through the gap is transmitted from the second opening 14 into the cavity 3 and does not leak outside the cavity 3, so that there is no particular problem.

The output waveguide 22 is connected to the fourth opening 24 . Then, the output-side waveguide 22 outputs the microwave from the second joint section 21 into the cavity 3 as indicated by an arrow A11 in FIG. As described above, the second joint portion 21 is rotatable in the first hollow portion 13 . Therefore, for example, as the second joint portion 21 rotates as indicated by the double arrow A12 in FIG. 3, the direction of the microwave output from the output-side waveguide 22 also changes. . In this case, the second waveguide 20 can rotate within the range of the second opening 14 of the first joint part 12 .

The operating portion 51 is connected to the second joint portion 21 . In the present embodiment, as described above, the operating portion 51 is coaxially connected to the rotation shaft 21a of the second joint portion 21 . The operating portion 51 may be a rod-shaped member as shown in FIG. 1 and the like. By using this operation part 51 , when the first waveguide 10 is fixed to the wall of the cavity 3 , the second joint part 21 can be rotated from the outside of the cavity 3 . The rotation of the second joint portion 21 by the operation portion 51 may be performed, for example, when the microwave is not irradiated, or may be performed when the microwave is irradiated. In the latter case, it is possible to change the emitting direction of the microwave within the cavity 3 while irradiating the microwave.

The microwave generated by the microwave generator 70 is input, for example, through a waveguide from the end of the input waveguide 11 on the flange 11a side, and is supplied to the input waveguide 11 and the first joint section. The light is output into the cavity 3 via at least part of the twelve first hollow portions 13 , the second hollow portion 23 of the second joint portion 21 , and the output-side waveguide 22 . That is, the first and second waveguides 10 and 20 extend from the flange 11a side end of the input side waveguide 11 to the microwave output side end of the output side waveguide 22. They are connected so that they can transmit microwaves. After the waveguide device 1 is fixed to the cavity 3, when microwaves are introduced from the end of the input-side waveguide 11, the microwaves are emitted from the waveguide device 1 to the outside of the cavity 3. It is preferred that it is leaktight. Therefore, if there is a gap or the like through which microwaves can pass, it is preferable to provide a microwave leakage prevention mechanism such as a choke structure as appropriate. The electromagnetic field distribution within the cavity 3 changes as the direction of microwaves introduced into the cavity 3 changes. Therefore, by introducing microwaves into the cavity 3 using the waveguide device 1 according to the present embodiment and changing the output direction of the microwaves by operating the operation part 51, the electromagnetic field distribution in the cavity 3 is can be adjusted so that, for example, the object 4 can be optimally irradiated with microwaves. Whether or not the electromagnetic field distribution in the cavity 3 is in a desired state may be confirmed using, for example, a sensor that senses microwaves. You can check. Further, whether or not the object 4 is in a desired state may be confirmed by sensing the temperature of the object 4, for example. Then, the output direction of the microwave may be changed so that the electromagnetic field distribution in the cavity 3 is in a desired state or the object 4 is in a desired state.

As described above, according to the waveguide device 1, the microwave irradiation device 100, and the microwave transmission method according to the present embodiment, when transmitting microwaves from the outside to the inside of the cavity 3, can change the output direction of the microwave from the second waveguide 20 at , and the electromagnetic field distribution in the cavity 3 can be changed according to the change. Therefore, for example, the electromagnetic field distribution within the cavity 3 can be easily adjusted so that the optimum microwave irradiation is performed within the cavity 3 . Further, the first waveguide 10 has an input-side waveguide 11 and a first joint portion 12, and the second waveguide 20 has a second joint portion 21 and an output-side waveguide 22. With a simple configuration, the angle formed by the microwave transmission direction of the input waveguide 11 and the microwave transmission direction of the output waveguide 22 can be easily changed. become able to. Further, when the first waveguide 10 is fixed to the cavity 3, even if the angle of the second waveguide 20 is changed, the microwave generator 70 connected to the first waveguide 10 There is no need to change the placement of . Therefore, the irradiation angle of the microwave can be changed while the position of the microwave generator 70 is fixed.

In this embodiment, the output-side waveguide 22 may be a waveguide whose length in the longitudinal direction can be changed, such as a slide waveguide. A sliding waveguide is a waveguide having a sliding mechanism for expanding and contracting the longitudinal length of the waveguide. The sliding mechanism of the sliding waveguide may be, for example, a telescopic mechanism of a tube or tube similar to zoom lenses, telescopes, and the like. See, for example, Japanese Patent Application Laid-Open No. 8-288710 for the slide type waveguide. Thus, by making the output side waveguide 22 a slide type waveguide, it is possible to change the output position of the microwave, and the electromagnetic field distribution in the cavity 3 can be adjusted according to the change. can also

(Embodiment 2)
A waveguide device, a microwave irradiation device, and a microwave transmission method according to Embodiment 2 of the present invention will be described with reference to the drawings. The waveguide device according to the present embodiment includes a first joint portion having a cylindrical hollow portion and a second joint portion having a cylindrical hollow portion connected to the hollow portion. The second joint part is configured to be rotatable about the central axis of the hollow part with respect to the first joint part.

FIG. 7 is a perspective view of the waveguide device 2 according to this embodiment, and FIG. 8 is a waveguide device 2 in which the input-side waveguide 31 and the output-side waveguide 42 are located on the same side. 9 is a plan view of the waveguide device 2, FIG. 10 is a cross-sectional view along line XX in FIG. 8, and FIG. 11 is a cross-sectional view along line XX in FIG. 1 is a partially enlarged cross-sectional view of a connecting portion between a joint portion 32 and a second joint portion 41. FIG. 12A-12C are schematic cross-sectional views of a microwave irradiation device 100 having a cavity 3 and a waveguide device 2 attached to the cavity 3. FIG.

Similar to the waveguide device 1 of the first embodiment, the waveguide device 2 according to the present embodiment also has a cavity 3 in which the object 4 is irradiated with microwaves, as shown in FIG. 12A and the like. Used to introduce microwaves from the outside to the inside. A microwave irradiation device 100 includes a waveguide device 2 , a cavity 3 and a microwave generator 70 . The waveguide device 2 includes a first waveguide 30 fixed to the wall of the cavity 3 and a second waveguide for guiding microwaves from the first waveguide 30 and outputting them into the cavity 3. A wave tube 40 may be provided, and an operation portion 52 for rotating the second waveguide 40 and a spacer 60 may be provided. When the first waveguide 30 is fixed to the wall of the cavity 3, at least part of the first waveguide 30, for example, the microwave input side end of the first waveguide 30, is It is fixed so that it is located outside the wall. A second waveguide 40 is connected to the first waveguide 30 so as to change the output direction of the microwave within the cavity 3 .

The first waveguide 30 has an input side waveguide 31 to which the microwave generated by the microwave generator 70 is input, and a first joint portion 32 fixed to the wall of the cavity 3. ing. The first joint portion 32 has a cylindrical first hollow portion 33 connected to the input waveguide 31 .

The second waveguide 40 has a cylindrical second hollow portion 43 connected to the first hollow portion 33 , and is rotatably connected to the first joint portion 32 . 2 joint portion 41 and an output side waveguide 42 for outputting the microwave from the second joint portion 41 into the cavity 3 .

The processing performed by microwave irradiation, the microwave generator 70, the frequency of the microwave, and the like are the same as those in the first embodiment, and detailed description thereof will be omitted. Also, the input-side waveguide 31 and the output-side waveguide 42 are similar to the input-side waveguide 11 and the output-side waveguide 22 of Embodiment 1, and detailed description thereof will be omitted. However, in this embodiment, as an example, a case where the output-side waveguide 42 is a corner waveguide that changes the traveling direction of microwaves by 45 degrees will be described. Also, the first and second waveguides 30, 40 are preferably made of a material that does not transmit microwaves. Materials that do not transmit microwaves are the same as those in the first embodiment.

A first joint portion 32 in the first waveguide 30 has a first hollow portion 33 having a cylindrical shape. In the present embodiment, the first joint portion 32 is configured by a surface having a constant thickness, and the outer shape of the first joint portion 32 is also cylindrical like the first hollow portion 33. However, as will be described later, this need not be the case.

First and second openings 34 and 35 are provided in the first hollow portion 33 . Therefore, the first and second openings 34 and 35 are connected via the first hollow portion 33 . The first opening 34 is provided on the peripheral surface 32 a of the first joint portion 32 and connected to the input waveguide 31 . In this embodiment, the input-side waveguide 31 is connected to the first joint portion 32 so that the central axis direction of the first hollow portion 33 and the longitudinal direction of the input-side waveguide 31 are orthogonal. The description is mainly for the case, but it does not have to be. Both may be connected at other angles. The input-side waveguide 31 and the first joint portion 32 may be connected by, for example, welding. The second opening 35 is provided on one end side of the first hollow portion 33 in the central axis direction. The second opening 35 may have the same size and shape as the first hollow portion 33 on a plane perpendicular to the central axis of the first hollow portion 33 . That is, the entire surface of the first joint portion 32 on the one end side in the central axis direction may be open. The central axis of the first hollow portion 33 is the central axis of the peripheral surface of the first hollow portion 33 . The first joint portion 32 has a cylindrical shape with one axial end closed by a bottom surface 32b, the other end open, and a first opening 34 provided on the peripheral surface. can also A bottom surface 32b, which is the end surface of the first joint portion 32 opposite to the second opening portion 35, is provided with a through hole 32c through which the operation portion 52 passes, which has a columnar cross section perpendicular to the longitudinal direction. . In order to prevent microwaves from leaking from the gap between the through hole 32c and the operation portion 52, a microwave leakage prevention mechanism such as a choke structure may be provided.

When the first joint part 32 is fixed to the wall of the cavity 3, as shown in FIG. It may be fixed so that Therefore, a part of the first joint part 32 may be positioned inside the wall of the cavity 3 as shown in FIG. 12A and the like. For example, as shown in FIG. 12A , the first joint part 32 is arranged so that the end on the side of the second opening 35 is positioned inside the cavity 3 , and the peripheral surface of the first joint part 32 It may be fixed to the cavity 3 by welding the opening 3a of the cavity 3, which has the same size and shape as 32a, and the peripheral surface 32a of the first joint portion 32. FIG. As in the first embodiment, an attachment plate may be provided on the outer peripheral side of the first joint portion 32 and the first joint portion 32 may be fixed to the cavity 3 by the attachment plate.

A second joint portion 41 in the second waveguide 40 has a second hollow portion 43 having a cylindrical shape. In the present embodiment, the second joint portion 41 is configured by a surface having a constant thickness, and the outer shape of the second joint portion 41 is also cylindrical like the second hollow portion 43. However, as will be described later, this need not be the case.

Third and fourth openings 44 and 45 are provided in the second hollow portion 43 . Therefore, the third and fourth openings 44 and 45 are connected via the second hollow portion 43 . The third opening 44 is provided on one end side of the second hollow portion 43 in the central axis direction. The third opening 44 may have the same size and shape as the second hollow portion 43 on the plane perpendicular to the central axis of the second hollow portion 43 . That is, the entire surface of the second joint portion 41 on the one end side in the central axis direction may be open. The central axis of the second hollow portion 43 is the central axis of the peripheral surface of the second hollow portion 43 . Microwaves from the first hollow portion 33 are guided to the third opening 44 . One end of the operating portion 52 may be fixed to the inner surface side of the bottom surface 41 b that is the end surface of the second joint portion 41 opposite to the third opening portion 44 . This fixing may be done, for example, by screwing, welding or gluing. The fourth opening 45 is provided on the peripheral surface 41 a of the second joint portion 41 and connected to the output waveguide 42 . In this embodiment, the output-side waveguide 42 is connected to the second joint portion 41 so that the central axis direction of the second hollow portion 43 and the longitudinal direction of the output-side waveguide 42 are orthogonal. The description is mainly for the case, but it does not have to be. Both may be connected at other angles. The second joint part 41 and the output-side waveguide 42 may be connected by welding, for example. The second joint portion 41 has a cylindrical shape with one axial end closed by a bottom surface 41b, the other end open, and a fourth opening 45 provided on the peripheral surface. can also

The first and second joint portions 32 and 41 are connected so that the first and second hollow portions 33 and 43 are coaxially connected. Further, the first and second joint portions 32 and 41 are arranged so that the second joint portion 41 can rotate with respect to the first joint portion 32 about the central axis of the second hollow portion 43 . It is connected to the. Therefore, as shown in FIG. 7, the second joint portion 41 is rotatable with respect to the first joint portion 32 as indicated by a double arrow A22. The first and second joint portions 32 and 41 may be connected by inserting the first joint portion 32 inside the second joint portion 41 so that the bottom surfaces 32b and 41b face each other, The connection may be made by inserting the second joint portion 41 inside the first joint portion 32 . In this embodiment, as shown in FIG. 10 and the like, the former case will be mainly described. In the former case, that is, when the second joint portion 41 is on the outside, the outer shape of the second joint portion 41 may not be a cylindrical shape, and may be, for example, a rectangular parallelepiped shape. . In the latter case, that is, when the first joint portion 32 is on the outside, the outer shape of the first joint portion 32 may not be cylindrical, and may be, for example, a rectangular parallelepiped shape.

The second joint portion 41 may be connected to the first joint portion 32 so as to be movable in the central axis direction of the second hollow portion 43 . That is, as shown in FIG. 7, the second joint portion 41 may be movable in the direction of the double arrow A23 with respect to the first joint portion 32. As shown in FIG.

An annular spacer 60 may be provided in the gap between the first and second joint portions 32 and 41, as shown in FIG. The number of spacers 60 may be one, or two or more. The spacer 60 may be made of, for example, an electrically insulating material. The electrically insulating material may be, for example, resin, ceramic, or the like. Alternatively, the spacer 60 may be made of a fluororesin such as polytetrafluoroethylene, or a microwave transparent material such as ceramic. In FIG. 11, for example, the upper spacer 60 in the drawing is fixed to the inner peripheral surface of the second joint portion 41, and the lower spacer 60 is fixed to the outer peripheral surface of the first joint portion 32. may be In this case, the two spacers 60 also function as stoppers, so that the second joint portion 41 can be prevented from coming off from the outer peripheral side of the first joint portion 32 .

In addition, in FIG. 11, since the first joint portion 32 is inserted inside the second joint portion 41, there is a gap between the outer peripheral surface of the first joint portion 32 and the inner peripheral surface of the second joint portion 41. When the spacer 60 is arranged in the opposite direction, that is, when the second joint portion 41 is inserted inside the first joint portion 32, the outer peripheral surface of the second joint portion 41 and the first The spacer 60 is arranged between the inner peripheral surface of the joint portion 32 of the .

It is preferable that the amount of microwaves passing through the gap between the first and second joint portions 32 and 41 is less than the amount of microwaves output from the output-side waveguide 42 . The microwave passing through the gap is transmitted into the cavity 3 from the second opening 35 and does not leak outside the cavity 3, so that there is no particular problem.

The output waveguide 42 is connected to the fourth opening 45 . Then, the output-side waveguide 42 outputs the microwave from the second joint portion 41 into the cavity 3 as indicated by an arrow A25 in FIG. As described above, the second joint portion 41 is rotatable around the central axis. Therefore, for example, as the second joint portion 41 rotates as indicated by a double arrow A26 in FIG. 9, the direction of the microwave output from the output-side waveguide 42 also changes. .

The operating portion 52 is connected to the second joint portion 41 . In the present embodiment, as described above, the operation portion 52 is connected to the inside of the bottom surface 41b of the second joint portion 41 so as to be coaxial with the normal line passing through the circular center of the bottom surface 41b. It is assumed that there is By using this operating portion 52 , the second joint portion 41 can be rotated from outside the cavity 3 when the first waveguide 30 is fixed to the wall of the cavity 3 . For example, in FIGS. 7 and 9, by rotating the operating portion 52 in the directions of double arrows A21 and A24, the second joint portion 41 can be rotated in the directions of double arrows A22 and A26. Further, for example, by moving the operating portion 52 in the axial direction of the central axis, the second joint portion 41 can be moved in the direction of the double arrow A23 in FIG. The rotation or axial movement of the second joint portion 41 by the operation portion 52 may be performed, for example, when the microwave is not irradiated, or may be performed when the microwave is irradiated. good too. In the latter case, it is possible to change the emitting direction or the emitting position of the microwave within the cavity 3 while irradiating the microwave. The operating portion 52 may be constructed of, for example, a microwave reflective or microwave transparent material. When the operating portion 52 is made of a microwave-transmissive material, the through-hole 32c may be provided to attenuate the microwave, for example, in order to prevent leakage of the microwave from the through-hole 32c. , the electromagnetic field distribution may be controlled so as to prevent leakage of microwaves from the through hole 32c.

The microwave generated by the microwave generator 70 is input from the end of the input-side waveguide 31 via a waveguide, for example, and is supplied to the input-side waveguide 31 and the first joint portion 32 . , the second hollow portion 43 of the second joint portion 41 , and the output-side waveguide 42 into the cavity 3 . That is, the first and second waveguides 30 and 40 transmit microwaves from the end of the input waveguide 31 to the microwave output end of the output waveguide 42. connected as possible. After the waveguide device 2 is fixed to the cavity 3, when microwaves are introduced from the end of the input-side waveguide 31, the microwaves are emitted from the waveguide device 2 to the outside of the cavity 3. It is preferred that it is leaktight. Therefore, if there is a gap or the like through which microwaves can pass, it is preferable to provide a microwave leakage prevention mechanism such as a choke structure as appropriate. The electromagnetic field distribution within the cavity 3 changes as the direction of microwaves introduced into the cavity 3 changes. For example, when the direction of microwaves introduced into the cavity 3 changes from the situation shown in FIG. 12A to the situation shown in FIG. 12B, the electromagnetic field distribution inside the cavity 3 changes. Also, the electromagnetic field distribution in the cavity 3 changes as the output position of the microwave introduced into the cavity 3 changes. For example, when the output position of the microwave introduced into the cavity 3 changes from the situation shown in FIG. 12A to the situation shown in FIG. 12C, the electromagnetic field distribution inside the cavity 3 changes. Therefore, by introducing microwaves into the cavity 3 using the waveguide device 2 according to the present embodiment, and changing the output direction and output position of the microwaves by operating the operation section 52, The electromagnetic field distribution can be adjusted so that, for example, an optimal microwave irradiation of the object 4 can be achieved.

As described above, according to the waveguide device 2, the microwave irradiation device 100, and the microwave transmission method according to the present embodiment, when transmitting microwaves from the outside to the inside of the cavity 3, , the output direction of the microwaves from the second waveguide 20 can be changed, and the electromagnetic field distribution in the cavity 3 can be changed according to the change. Therefore, for example, the electromagnetic field distribution within the cavity 3 can be easily adjusted so that the optimum microwave irradiation is performed within the cavity 3 . Further, the first waveguide 30 has an input-side waveguide 31 and a first joint portion 32, and the second waveguide 40 has a second joint portion 41 and an output-side waveguide 42. By having a simple configuration, when viewed from the axial direction of the first and second hollow portions 33 and 43, the transmission direction of the microwave of the input side waveguide 31 and the output side guide The angle between the wave tube 42 and the microwave transmission direction can be easily changed, and the output side of the output side waveguide 42 in the central axis direction of the first and second joint portions 32 and 41 The positions of the ends can also be easily changed. Further, by arranging the spacer 60 in the gap between the first and second joint parts 32, 41, the gap between the two can be kept constant, and the possibility of spark generation between the two can be reduced. can. Further, since the first waveguide 30 is fixed to the cavity 3, even if the angle of the second waveguide 40 is changed, the microwave generator connected to the first waveguide 30 There is no need to change the placement of 70, etc. Therefore, while the position of the microwave generator 70 is fixed, the irradiation angle or irradiation position of the microwave can be changed.

In this embodiment, the case where the spacer 60 is provided in the gap between the first and second joint portions 32 and 41 has been mainly described, but this need not be the case. For example, if there is no problem even if a spark is generated in the cavity 3, the spacer 60 may not be provided in the gap between the first and second joint portions 32 and 41. FIG.

Further, in the present embodiment, when the second joint portion 41 is movable in the central axis direction with respect to the first joint portion 32, that is, when the first and second joint portions 32 and 41 are slidable. Although the case where it is a waveguide has been mainly described, it does not have to be. The second joint portion 41 does not have to be movable in the central axis direction with respect to the first joint portion 32 .

(Embodiment 3)
A waveguide device according to Embodiment 3 of the present invention will be described with reference to the drawings. In the waveguide device according to the present embodiment, as in the waveguide device according to the second embodiment, a first joint portion having a cylindrical hollow portion and a cylindrical hollow portion connected to the hollow portion are provided. is connected so that the central axis of each hollow portion is coaxial, and a micro similar to the waveguide device of the first embodiment is provided on the tip side of the second joint portion A mechanism is provided that can change the output direction of the wave.

FIG. 13 is a front view of waveguide device 102 according to this embodiment, and FIG. 14 is a left side view of waveguide device 102 . 15 is a schematic cross-sectional view along line XV-XV in FIG. 13, and FIG. 16 is a schematic cross-sectional view along line XVI-XVI in FIG. 15 mainly shows the state of connection between the outer operating portion 153 and the rod-shaped member 147, and FIG. 16 mainly shows the state of connection between the inner operating portion 154 and the rod-shaped member 126. The configuration of is omitted as appropriate. The waveguide device 102 according to the present embodiment is also mounted in the cavity 3 in the same manner as the waveguide devices 1 and 2 according to the first and second embodiments, and the microwave generated by the microwave generator 70 is used to introduce into

The waveguide device 102 according to this embodiment includes a first waveguide 130 fixed to the wall of the cavity 3 , and a microwave guided from the first waveguide 130 and output into the cavity 3 . and a second waveguide 140 and an operation portion 152 . The operating portion 152 has a cylindrical outer operating portion 153 and an inner operating portion 154 . The inner operating portion 154 has a main body portion 154a penetrating through the outer operating portion 153 and a distal end portion 154b connected to the main body portion 154a at an angle. The body portion 154a and the tip portion 154b are rod-shaped members extending in one direction, and may be cylindrical, for example. In order to prevent microwaves from leaking from the gap between the outer operating portion 153 and the inner operating portion 154, a microwave leakage prevention mechanism such as a choke structure may be provided. When the first waveguide 130 is fixed to the wall of the cavity 3, at least part of the first waveguide 130, for example, the microwave input side end of the first waveguide 130, is It is fixed so that it is located outside the wall. A second waveguide 140 is connected to the first waveguide 130 so as to change the output direction of the microwave within the cavity 3 .

The first waveguide 130 has an input-side waveguide 131 to which the microwave generated by the microwave generator 70 is input through an opening 131c, and a first cylindrical hollow portion. , and a first joint portion 132 fixed to the wall of the cavity 3 . The first joint part 132 has openings at both ends in the central axis direction of the first hollow part, and the microwaves from the input-side waveguide 131 connected to one end of the openings are guided to the second waveguide. guided to wave tube 140 .

The input side waveguide 131 has a waveguide bent at right angles, and is connected to a corner waveguide 131a having a chamfered outer peripheral side of the corner portion and to the corner waveguide 131a. It has a conversion waveguide 131b for connecting with a wave tube. Since the cross section of the corner waveguide 131a is rectangular and the cross section of the first joint portion 132 is circular, they are connected by the conversion waveguide 131b. The corner waveguide 131a and the conversion waveguide 131b may be connected by, for example, flanges or welding. The conversion waveguide 131b and the input-side end of the first joint portion 132 may also be connected by, for example, a flange or welding. Further, the corner waveguide 131a is provided with a through hole through which the operating portion 152 passes. In order to prevent microwaves from leaking from the gap between the through hole and the operation part 152, a microwave leakage prevention mechanism such as a choke structure may be provided. Also, the external operation part 153 and the internal operation part 154 may be made of, for example, microwave reflective or microwave transmissive material. When the external operation part 153 and the internal operation part 154 are made of a microwave permeable material, in order to prevent microwaves from leaking from the through holes of the corner waveguide 131a, for example, the microwaves are attenuated. Through-holes may be provided as in the above, and the electromagnetic field distribution may be controlled so as to prevent microwaves from leaking through the through-holes. The input-side waveguide 131 may have a bend waveguide instead of the corner waveguide 131a.

The second waveguide 140 has a cylindrical second hollow portion connected to the first hollow portion, and the second waveguide 140 is rotatably connected to the first joint portion 132 . It has a joint portion 141 and an output side waveguide 142 for outputting microwaves from the second joint portion 141 into the cavity 3 . The second joint part 141 has openings at both ends in the central axis direction of the second hollow part, and is introduced from the other end side into the output-side waveguide 142 connected to one end side thereof. It guides microwaves.

The first joint portion 132 and the second joint portion 141 are different in connection position of the input side waveguide 131 with respect to the first joint portion 132, and the output side waveguide 131 with respect to the second joint portion 141 is different. They are the same as the first joint portion 32 and the second joint portion 41 of Embodiment 2, respectively, except that the connection position of 142 is different, and detailed description thereof will be omitted.

The output-side waveguide 142 is connected to a conversion waveguide 146 for connecting the circular waveguide and the rectangular waveguide, and to the conversion waveguide 146 to change the microwave output direction. and a direction changing mechanism 101 capable of It is assumed that the end of the direction changing mechanism 101 on the microwave input side is a rectangular waveguide. On the other hand, since the second joint portion 141 has a circular cross section, the direction changing mechanism 101 and the second joint portion 141 are connected by the conversion waveguide 146 . The second joint part 141 and the conversion waveguide 146 may be connected by, for example, a flange or welding. The conversion waveguide 146b and the input-side end of the direction changing mechanism 101 may also be connected by, for example, a flange or welding. Further, when the input side end of the direction changing mechanism 101 is not a rectangular waveguide but a circular waveguide, the output side waveguide 142 does not have the conversion waveguide 146. good. In this case, the input-side end of the direction changing mechanism 101 may be directly connected to the output-side end of the second joint portion 141 .

The direction changing mechanism 101 includes a third waveguide 110 for microwaves connected to the conversion waveguide 146 and a fourth waveguide 110 for guiding the microwaves from the third waveguide 110 and outputting them to the cavity 3 . and a waveguide 120 of . A fourth waveguide 120 is connected to the third waveguide 110 so as to change the output direction of the microwave within the cavity 3 . The third waveguide 110 has an input side waveguide 111 into which microwaves are input and a third joint portion 112 . The fourth waveguide 120 has a fourth joint portion 121 and an output side waveguide 122 that outputs microwaves from the fourth joint portion 121 into the cavity 3 . The third waveguide 110, the fourth waveguide 120, the input side waveguide 111, the third joint portion 112, the fourth joint portion 121, and the output side waveguide 122 are connected to the operation portion 51. The first waveguide 10, the second waveguide 20, and the input side waveguide in Embodiment 1, respectively, except that the fourth waveguide 120 is rotated by the inner operation portion 154 instead of 11, the first joint portion 12, the second joint portion 21, and the output-side waveguide 22, and detailed description thereof will be omitted.

The operation part 152 can rotate the second joint part 141 and the fourth joint part 121 from the outside of the cavity 3 when the waveguide device 102 is fixed to the wall of the cavity 3 . The second joint portion 141 is operated by an external operation portion 153 of the operation portion 152 , and the fourth joint portion 121 is operated by an internal operation portion 154 of the operation portion 152 .

The external operation portion 153 is fixed to the inner peripheral surface of the second joint portion 141 and can rotate the second joint portion 141 . Note that the external operation portion 153 may be fixed to the inner peripheral surface of the second joint portion 141 via another member. Specifically, as shown in FIG. 15 , the outer operating portion 153 may be fixed to the inner peripheral surface of the second joint portion 141 by four rod-shaped members 147 . Although FIG. 15 shows a case where the number of rod-shaped members 147 is four, the number of rod-shaped members 147 used to fix the outer operating portion 153 to the second joint portion 141 does not matter. The number of rod-shaped members 147 may be, for example, two, three, or five or more. It should be noted that the plurality of rod-like members 147 are preferably arranged at even angles around the central axis of the second hollow portion. Since the outer operating portion 153 is fixed to the second joint portion 141 , the second joint portion 141 can be rotated by rotating the operating portion 152 . Note that the outer operating portion 153 may be fixed to the second joint portion 141 by means other than the rod-shaped member 147 . 13 and 14 show the case where the external operation portion 153 is fixed to the input-side end portion of the second joint portion 141, but this need not be the case. The external operation portion 153 may be fixed to the second joint portion 141 at any other position.

The internal operation part 154 is connected to the eccentric position of the fourth joint part 121 and can rotate the fourth joint part 121 . Note that the internal operation portion 154 may be connected to the eccentric position of the fourth joint portion 121 via another member. Specifically, a rod-like member 126 may be fixed to the hollow portion inside the fourth joint portion 121 . The rod-shaped member 126 has a longitudinal direction perpendicular to the central axis of the partial cylindrical shape of the fourth joint section 121 and an opening on the opposite side of the output-side waveguide 122 of the fourth joint section 141 . may be provided so as to be parallel to the opening surface of the Further, as shown in FIG. 16, the tip of the tip portion 154b of the inner operation portion 154 may be rotatably connected to the rod-shaped member 147 by a shaft member 154c. Since the connection position is not the center of the longitudinal direction of the rod-shaped member 147, the inner operation part 154 is connected to the eccentric position of the fourth joint part 121, and the outer operation part 153 is fixed to the inner side. The fourth waveguide 120 can be rotated with respect to the third waveguide 110 by moving the operating portion 154 in the vertical direction in FIGS. 13 and 14 .

It should be noted that the rod-shaped members 126 and 147 are preferably made of a material that does not reflect microwaves. A microwave-transmissive material is suitable as a material that does not reflect microwaves. Also, an annular spacer may be provided in the gap between the first and second joint portions 132 and 141 . Moreover, in the present embodiment, the first joint portion 132 may be inserted inside the second joint portion 141 . In this case, the outer operating portion 153 may be fixed to the output-side end of the second joint portion 141 .

As described above, according to the waveguide device 102 according to the present embodiment, the position of the output-side end of the output-side waveguide 142 can be changed by moving the operating portion 152 in the longitudinal direction. can. Furthermore, by rotating the operating portion 152 or by moving the inner operating portion 154 in the longitudinal direction with respect to the outer operating portion 153, the output direction of the microwave can be changed. The axial direction of the rotation center axis of the second waveguide 140 according to the rotation of the operation portion 152 and the fourth waveguide according to the longitudinal movement of the inner operation portion 154 with respect to the outer operation portion 153. It is perpendicular to the axial direction of the central axis of rotation of the tube 120 . Therefore, in the waveguide device 102 according to the present embodiment, microwaves can be output in various directions within the cavity 3 .

Further, in Embodiments 1 to 3, the operation portions 51, 52, and 152 are rod-shaped members, but the operation portions 51, 52, and 152 include the second joint portions 21, 41, 141, and the like. Other shapes are possible as long as they can be properly manipulated.

Further, in Embodiments 1 to 3, when the waveguide devices 1, 2, and 102 are attached to the cavity 3, the operating portions 51, 52, Although the case where 152 is used has been described, this need not be the case. The waveguide devices 1 , 2 , 102 do not have to be provided with the operation sections 51 , 52 , 152 . In this case, for example, by opening the cavity 3 and changing the orientation of the output-side waveguides 22, 42, 142, etc., when microwave irradiation is not performed, the microwave output in the cavity 3 You can adjust the direction.

In addition, in Embodiments 1 to 3, the case where the first joint portions 12, 32, 132 are fixed to the wall of the cavity 3 has been described, but this need not be the case. Any point of the first waveguide 10 , 30 , 130 may be fixed to the wall of the cavity 3 . For example, the input waveguides 11 , 31 , 131 may be fixed to the walls of the cavity 3 . When any part of the first waveguide 10, 30, 130 is fixed to the wall of the cavity 3, at least a part thereof, for example, the end on the input side of the microwave, is fixed to the wall of the cavity 3. It is preferably fixed so as to be located on the outside.

Further, in Embodiments 1 to 3, a microwave first waveguide fixed to the wall of the cavity in which the object is irradiated with microwaves, and the microwave from the first waveguide into the cavity, the second waveguide being connected to the first waveguide so as to change the output direction of the microwave within the cavity; Although an example of the wave tube device has been described, the waveguide device may have a configuration other than those of the first to third embodiments. For example, one end of the first waveguide and one end of the second waveguide may be connected by a mechanism similar to a panker louver. That is, the first waveguide includes an input-side waveguide into which microwaves generated by the microwave generator are input, a first opening connected to the input-side waveguide, and a first A first joint portion having a partially spherical hollow portion provided such that the opening surfaces face each other and a second opening portion connected to the opening portion may be included. In addition, the second waveguide is configured such that the opening surfaces of the third opening through which the microwave from the first opening is guided and the fourth opening connected to the third opening face each other. The center of the partially spherical shape coincides with the center of the hollow portion of the first joint portion, and the first joint portion is centered around the center of the partially spherical shape. and a second joint portion arranged so as to be rotatable in the hollow portion of, and an output side waveguide connected to the fourth opening portion and outputting microwaves into the cavity. good. Here, the center of the partially spherical shape is the center of the peripheral surface other than the opening. Further, the hollow portion connecting the third and fourth openings may also have a partially spherical shape. Further, the hollow part of the first joint part has a partially spherical shape by providing an opening in a spherical shape. The spherical shape may be a spherical shape, that is, a shape whose cross section is a perfect circle, or a shape whose cross section is slightly deviated from a perfect circle, such as an elliptical shape.

Further, in Embodiments 1 to 3, the waveguide device capable of changing the output direction of the microwave within the cavity 3 has been mainly described, but this need not be the case. As described above, the electromagnetic field distribution within the cavity 3 can also be changed by changing the output position of the microwave within the cavity 3 . Therefore, the waveguide device may be capable of changing the microwave output position within the cavity 3 . In this case, the waveguide device comprises a first microwave waveguide and a microwave from the first waveguide fixed to the wall of the cavity in which the object is irradiated with microwaves. a second waveguide for guiding the wave into the cavity, the second waveguide determining the output position of the microwave within the cavity, i.e. the position of the output end of the second waveguide; It may be mutably connected to the first waveguide. The change in output position may be a change in position in a linear direction. In this case, for example, a sliding waveguide may be configured by the first and second waveguides.

Moreover, it goes without saying that the present invention is not limited to the above-described embodiments, and that various modifications are possible and are also included within the scope of the present invention.

Reference Signs List 1, 2, 102 waveguide device 3 cavity 10, 30, 130 first waveguide 20, 40, 140 second waveguide 11, 31, 111, 131 input side waveguide 12, 32, 132 1st joint part 21, 41, 141 2nd joint part 22, 42, 122, 142 output side waveguide 51, 52, 152 operation part 60 spacer 70 microwave generator 100 microwave irradiation device 110 third Waveguide 120 Fourth waveguide 112 Third joint part 121 Fourth joint part 153 Outside operation part 154 Inside operation part

Claims (8)

a first microwave waveguide fixed to the wall of the cavity in which the object is irradiated with microwaves so that at least a portion of the waveguide lies outside the wall;
a second waveguide that guides the microwave from the first waveguide and outputs it into the cavity;
The second waveguide is connected to the first waveguide so as to be able to change the output direction of microwaves in the cavity,
A waveguide device, further comprising an operation unit that rotates the second waveguide from outside the cavity. The first waveguide is
an input-side waveguide into which microwaves generated by a microwave generator are input;
A first joint portion having a first central axis, the first opening connected to the input waveguide, and a second opening connected to the first opening. a first joint portion having a hollow portion;
The second waveguide is
A second joint portion having a second central axis, the third opening through which microwaves from the first opening are guided, and a fourth opening connected to the third opening is provided, and a second joint portion arranged so as to be rotatable in the hollow portion about the second central axis;
2. The waveguide device according to claim 1, further comprising an output side waveguide connected to said fourth opening for outputting microwaves into said cavity. 3. The waveguide device according to claim 2, wherein said first central axis and said second central axis are coaxial. The first waveguide is
an input-side waveguide into which microwaves generated by a microwave generator are input;
A first hollow having a peripheral surface provided with a first opening connected to the input-side waveguide, and a second opening connected to the first opening provided at one end in the central axis direction. a first joint portion having a portion;
The second waveguide is
A third opening through which microwaves from the first hollow are guided is provided on one end side in the central axis direction, and a fourth opening connected to the third opening is provided on the peripheral surface. 2 hollow portions, and is connected to the first joint portion so as to be rotatable about the central axis of the second hollow portion with respect to the first joint portion. 2 joints;
2. The waveguide device according to claim 1, further comprising an output side waveguide connected to said fourth opening for outputting microwaves into said cavity. 5. The waveguide device according to claim 4, wherein said first and second hollow portions are coaxially connected. a microwave generator for generating microwaves;
a cavity in which the object is irradiated with microwaves;
and a microwave irradiation device according to any one of claims 1 to 5, which is fixed to said cavity and introduces microwaves generated by said microwave generator into said cavity. A microwave transmission method for transmitting microwaves from the outside of a cavity in which an object is irradiated with microwaves to the inside using a waveguide device,
The waveguide device is
a first microwave waveguide fixed to a wall of the cavity such that at least a portion of the waveguide lies outside the wall;
a second waveguide that guides the microwave from the first waveguide and outputs it into the cavity;
The second waveguide is connected to the first waveguide so as to change the output direction of microwaves in the cavity,
A step of changing the output direction of microwaves in the cavity of the second waveguide by rotating the second waveguide by operating an operation part provided outside the cavity. A microwave transmission method with further comprising sensing the electromagnetic field distribution in the cavity or the state of the object;
In the step of changing the output direction of the microwave, the sensing result is used to change the output direction of the microwave from the second waveguide so that the electromagnetic field distribution or the object is in a desired state. 8. The microwave transmission method according to claim 7.

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