JP7074795B2 - Synthetic diamond manufacturing equipment and microwave emission module used for it - Google Patents

Description

The present invention relates to a synthetic diamond manufacturing apparatus and a microwave emission module used therein, and more particularly to a synthetic diamond manufacturing apparatus using a microwave plasma chemical vapor phase deposition method and a microwave emission module used therein. be.

When using the synthetic diamond manufacturing equipment of the prior art, the diamond species is first placed in a reaction chamber with a high concentration of methane gas, and then locally in the reaction chamber using 2.45 GHz microwaves. A diamond holder for placing a diamond species is arranged so as to form a strong electric field of a typical standing wave and correspond to this strong electric field region, and the energy of the standing wave of the microwave there causes the diamond species. The surrounding hydrocarbon-based reaction gas (for example, methane gas) is heated to a very high temperature, and plasma balls are generated. The hydrocarbon-based reaction gas causes a chemical reaction by the plasma and is adsorbed and deposited on the diamond species. Now, the diamond species gradually grows into synthetic diamonds.

However, the region where a strong local static wave is generated by microwaves is easily affected by the reaction gas, and it is difficult to stably focus on the target region on the diamond holder on which the diamond species is placed. As a result, it becomes difficult to stably form plasma balls around the diamond species, and there is a problem that more time and energy must be spent in the production of synthetic diamond.

Therefore, there is room for improvement in the synthetic diamond manufacturing apparatus in the prior art.

The present invention has been made in view of the above-mentioned drawbacks of the prior art, and by making it possible to adjust the focusing position of the microwave generated by the microwave emission module, the efficiency is improved in the production of synthetic diamond. It is an object of the present invention to provide a synthetic diamond manufacturing apparatus and a microwave emission module used for the synthetic diamond manufacturing apparatus for reducing energy.

In order to achieve the above object, the present invention is a microwave emitting module used in a synthetic diamond manufacturing apparatus, which is used to emit microwaves to a diamond holder arranged in a reaction chamber of the manufacturing apparatus. The reaction chamber comprises a microwave window, has a focusing region on the side facing the microwave window in the diamond holder, and the microwave emission module is arranged outside the reaction chamber. Together with a microwave generator, a focusing lens and a focusing mechanism, the microwave generator includes a firing port that emits microwaves generated by the microwave generator towards the diamond holder. The focusing lens is arranged between the diamond holder and the firing port to focus the microwave generated by the microwave generator, and the focusing mechanism is connected to the focusing lens and the focusing mechanism. The distance between the lens and the firing port can be adjusted, which is characterized in that the microwave generated by the microwave generator is focused in the focusing region of the diamond holder.

The present invention is an apparatus for producing synthetic diamond, which comprises a reaction chamber, a diamond holder arranged inside the reaction chamber, and a microwave emission module arranged outside the reaction chamber. Includes a microwave window, external microwaves are emitted through the microwave window into the reaction chamber, the diamond holder has a focused region on the side facing the microwave window, and the microwave. The firing module includes a microwave generator, a focusing lens, and a focusing mechanism, wherein the microwave generator emits microwaves generated by the microwave generator toward the diamond holder. The focusing lens is located between the diamond holder and the firing port to focus the microwave generated by the microwave generator, and the focusing mechanism is connected to and connected to the focusing lens. The distance between the focusing lens and the firing port can be adjusted, which is characterized in that the circularly polarized microwaves generated by the microwave generator are focused in the focusing region of the diamond holder. do.

The focusing mechanism includes a motor and a moving means, wherein the moving means includes a rotating member connected to the motor and a displacement member having one end connected to the rotating member and the other end connected to the focusing lens. The displacement member moves linearly with respect to the rotating member as the rotating member rotates.

The rotating member is a sleeve material on which a female screw is formed on the inner surface, one end thereof is connected to the motor, the displacement member is a screw rod, and both opposite ends are connected to the focusing lens. It is a lens connecting end portion and a sleeve connecting end portion connected to the sleeve member, and the sleeve connecting end portion is screwed so as to be inserted into the rotating member.

The microwave emission module further comprises a microwave absorbing shell, which is connected to the microwave generator and the reaction chamber and includes a containment space, an inlet and an outlet, the inlet. The containment space communicates with the launch port of the microwave generator, the outlet communicates with the containment space, and its outer peripheral edge is in close contact with the outer surface of the reaction chamber so as to surround the microwave window. However, the focusing lens is arranged in the accommodation space, the focusing mechanism is arranged outside the microwave absorbing shell, and the moving means of the focusing mechanism can slide the microwave absorbing shell. It is characterized by penetrating into.

The microwave emission module further comprises a support means, the support means having a fixing member and a slide member, the fixing member being fixed at a position corresponding to the installation position of the emission port, and the slide member. It is characterized in that one end thereof is fixed to the focusing lens while being slidably connected to the fixing member, and the supporting means and the moving means are installed at both opposite ends of the focusing lens, respectively. ..

The fixing member is a linear bearing and is fixed on the microwave absorbing shell, the sliding member is a guide rod and is slidably connected to the fixing member, and one end thereof is accommodated in the accommodation space. It is characterized in that it is fixed to the focusing lens so that the other end is exposed to the outside of the microwave absorbing shell.

The microwave generator includes a waveguide, the waveguide having a firing port at one end toward the diamond holder, and at least one long flat plate-shaped dielectric plate arranged in the waveguide. The at least one dielectric plate extends along the traveling direction of the waveguide and is formed so that the thickness of both ends in the longitudinal direction is gradually reduced. By utilizing the at least one dielectric plate, the said The linearly polarized microwave in the waveguide is converted into a polarized microwave, and the focused lens is a dielectric convex lens.

The advantage of the present invention is that the microwave emission module is designed so that the focusing mechanism is further installed, and the focusing mechanism is connected to the focusing lens to be connected to the focusing lens and the firing port. By adjusting the distance between and, the focused microwave can excite the plasma ball more easily and uniformly, and if the microwave focusing position shifts due to interference, the combination thereof. The focusing mechanism can correct the focusing position of the microwave and always focus on the target area on the diamond holder on which the diamond seed is placed, so that a stable formation of plasma balls around the diamond seed can be achieved. By making it possible, there is an advantage that efficiency can be improved and energy can be reduced in the production of synthetic diamond.

It is a perspective view of this invention. It is an exploded perspective view of this invention. It is a partial perspective perspective view of this invention. It is a side view partial cross-sectional schematic diagram of this invention.

Hereinafter, the technical measures taken by the present invention to achieve the predetermined object of the invention will be described in more detail with reference to the drawings and suitable embodiments of the present invention.

As shown in FIGS. 1 to 4, the present invention is a microwave emission module used in a synthetic diamond manufacturing apparatus, wherein the synthetic diamond manufacturing apparatus includes a reaction chamber 10, a reaction gas control module 20, and a reaction gas control module 20. It comprises a diamond holder 30 (see FIG. 4) and a microwave emission module. The microwave emission module is arranged outside the reaction chamber 10 and includes a microwave generator 40, a focusing lens 50, and a focusing mechanism 60. In this embodiment, the microwave emission module further includes a support means 70 and a microwave absorption shell 80.

The reaction chamber 10 has a plasma working space 11 (see FIG. 4) formed therein, and includes a microwave window 12, and the material of the microwave window 12 is preferably quartz, and an external microwave is used. Can enter the plasma working space 11 through the microwave window 12.

The reaction gas control module 20 communicates with the plasma working space 11 of the reaction chamber 10, and specifically, the reaction gas control module 20 includes a hydrocarbon-based reaction gas source 21, a helium gas source 22, and a hydrogen source. 23, and the vacuum pump 24, all of which are directly connected to the plasma working space 11 and control the gas composition in the plasma working space 11 via the reaction gas control module 20.

The diamond holder 30 is installed in the plasma working space 11 of the reaction chamber 10 and has a focusing region 31 (see FIG. 4) on the side of the diamond holder 30 facing the microwave window 12.

The microwave generator 40 is arranged outside the reaction chamber 10 and has a firing port 41 (see FIG. 4), and the microwave generated by the microwave generator 40 is transferred to the firing port 41. Then, it is fired toward the diamond holder 30. In this embodiment, the microwave generator 40 includes a linearly polarized microwave source 44 and a waveguide 42, the emission port 41 opening at the end of the waveguide 42 toward the diamond holder 30. The linearly polarized microwave source 44 is connected to the opposite end of the emission port 41 in the waveguide 42 and emits linearly polarized microwaves toward the emission port 41.
In the waveguide 42, two long flat plate-shaped dielectric plates 43 (see FIG. 3) are arranged so as to face each other, and the respective dielectric plates 43 are arranged in the traveling direction of the microwave. The linearly polarized microwaves extending along the waveguide 42 are converted into circularly polarized waves through these dielectric plates 43, and then from the emission port 41, the circularly polarized micros. A wave is emitted toward the diamond holder 30. By using the circularly polarized microwave, it is possible to improve the manufacturing quality in the production of synthetic diamond, but the present invention is not limited to this, and the microwave generator 40 is not necessarily limited to the circularly polarized microwave. Only need to occur.

The dielectric plate 43 is formed so that the thickness of both ends in the longitudinal direction gradually decreases in a stepped manner, so that the impedance (resistance) when entering the waveguide 42 with respect to microwaves is obtained. ) And the impedance at the time of separation are matched to suppress the reflection phenomenon of microwaves. In another embodiment, the thickness of both ends of the dielectric plate 43 in the longitudinal direction may be gradually reduced in a linear taper shape (converted from a so-called stepped surface to an inclined surface), and may be formed in an arc shape (so-called staircase). It may be gradually thinned (converted from a shape to an arc surface), or it may be gradually thinned like a multi-slope (converted from a so-called stepped surface to a plurality of inclined surfaces).

The focusing lens 50 is arranged between the diamond holder 30 and the emission port 41 of the microwave generator 40, and focuses the circularly polarized microwaves generated by the microwave generator 40. In this embodiment, the firing port 41, the microwave window 12, the focusing lens 50, and the focusing region 31 of the diamond holder 30 are arranged in order along a line, and the focusing lens 50 is dielectric. It is a body-convex lens, and the material is preferably ceramic or high-density polyethylene (HDPE).

The microwave absorbing shell 80 is connected to the microwave generator 40 and the reaction chamber 10 and includes an accommodation space 81, an inlet 82, and an outlet 83 (see FIG. 4), the inlet 82 being the accommodation. The reaction chamber communicates the space 81 with the launch port 41 of the microwave generator 40, the outlet 83 communicates with the accommodation space 81, and its outer peripheral edge surrounds the microwave window 12. It adheres to the outer surface of 10. Since the microwave absorption shell 80 is made of a high dielectric loss (or hysteresis loss) material, it can absorb the electric field component (or magnetic field component) of the microwave, so that the microwave in the microwave absorption shell 80 can be absorbed. Prevents multiple reflections of waves and microwave leakage from the microwave absorbing shell 80 or from seams with other mating components. Therefore, according to the microwave absorption shell 80, the effect of reducing microwave leakage from the microwave emission module according to the present invention is obtained.

The focusing mechanism 60 is connected to the focusing lens 50 to adjust the separation distance D (see FIG. 4) between the focusing lens 50 and the firing port 41, and the microwave generator 40 is generated. The microwave is focused on the focusing region 31 of the diamond holder 30. In this embodiment, the focusing mechanism 60 includes a motor 61 and a moving means 62, and the moving means 62 is connected to a rotating member 621 fixed to the motor 61 and one end thereof to the rotating member 621. The other end has a displacement member 622 connected to the focusing lens 50, and as the motor 61 rotationally drives the rotating member 621, the rotating member 621 drives the displacement member 622 to drive the rotating member. Move linearly relative to 621.

Specifically, the focusing mechanism 60 is arranged outside the microwave absorbing shell 80, and the rotating member 621 is a sleeve material on which a female screw is formed on the inner surface, and one end of the rotating member 61 is the motor 61. The displacement member 622 is a screw rod that slidably penetrates the microwave absorption shell 80, and the opposing ends are respectively connected to the focusing lens 50. And the sleeve connecting end portion 6222 screwed so as to be inserted into the rotating member 621. When the motor 61 rotationally drives the rotating member 621, the displacement member 622, which is the screw rod screwed with the female screw of the rotating member 621, is relative to the rotating member 621 as the rotating member 621 rotates. In a straight line, this adjusts the distance D between the focusing lens 50 and the firing port 41. Further, since the focusing mechanism 60 is arranged outside the microwave absorption shell 80, only the rod-shaped displacement member 622 penetrates the microwave absorption shell 80, so that the displacement member 622 The gap between the microwave absorbing shell 80 and the microwave absorbing shell 80 can be minimized to minimize microwave leakage, while the focusing mechanism 60 is exposed, which facilitates adjustment work and maintenance. Can be done. The specific structure of the focusing mechanism 60 is not limited to this, and conversely, the rotating member 621 may be a screw rod and the displacement member 622 may be a sleeve material. Further, the focusing mechanism 60 may be another type of actuator or a manual adjustment mechanism.

The support means 70 has a fixing member 71 and a slide member 72, the fixing member 71 is fixed on the microwave absorption shell 80, and the slide member 72 is slidably connected to the fixing member 71. At the same time, one end is fixed to the focusing lens 50. The support means 70 and the focusing mechanism 60 are connected to both ends of the focusing lens 50 in order to improve the stability of the focusing lens 50. The fixing member 71 is fixed on the microwave absorbing shell 80, but is not limited to this, and may be fixed at a position corresponding to the installation position of the firing port 41, for example, the fixing. The member 71 may be fixed to the microwave generator 40. In this embodiment, the support means 70 is a linear motion guide bearing, that is, the fixing member 71 is a linear bearing, and the slide member 72 is a guide rod slidably connected to the fixing member 71. , The slide member 72 and the displacement member 622 are parallel to each other.

When using the present invention, the diamond type A is first placed in the focusing region 31 of the diamond holder 30, and then the focusing lens 50 receives circularly polarized microwaves emitted by the microwave generator 40. Synthetic diamonds are produced by focusing on the focusing region 31 of the diamond holder 30. When the focusing position of the circularly polarized microwave is deviated from the focusing region 31, the focusing mechanism 60 adjusts the separation distance D between the focusing lens 50 and the firing port 41 to cause circular deviation. Waves Microwaves are kept in focus with respect to the focused region 31.

As described above, the present invention further installs the focusing mechanism 60 so that the distance between the focusing lens 50 and the firing port 41 can be adjusted, thereby adjusting the focusing position of the microwave. This can be modified, and plasma balls can be stably formed around the diamond type A, thereby improving efficiency and reducing energy in the production of synthetic diamond.

The above description is merely a preferred embodiment of the present invention, and does not limit the present invention in any way. Although the present invention has been disclosed as described above with relatively suitable embodiments, the present invention is not limited to the present invention, and the art of the present invention is to the extent that all those skilled in the art do not deviate from the technical concept of the present invention. Any simple modifications, modifications and modifications made to the above embodiments based on the essence of the present invention are still within the scope of the present invention.

10 Reaction chamber 11 Plasma working space 12 Microwave window 20 Reaction gas control module 21 Hydrocarbon reaction gas source 22 Helium gas source 23 Hydrogen source 24 Vacuum pump 30 Diamond holder 31 Focusing area 40 Microwave generator 41 Emission port 42 Dielectric Tube 43 Dielectric plate 44 Linearly polarized microwave source 50 Focusing lens 60 Focusing mechanism 61 Motor 62 Moving means 621 Rotating member 622 Displacement member 6221 Lens connecting end 6222 Sleeve connecting end 70 Supporting means 71 Fixing member 72 Slide member 80 Micro Wave absorption shell 81 Containment space 82 Entrance 83 Exit A Diamond type D Separation distance

Claims (9)

A microwave emitting module used in a synthetic diamond manufacturing apparatus, which is used to emit microwaves to a diamond holder located in a reaction chamber of the manufacturing apparatus, the reaction chamber including a microwave window. The diamond holder has a focusing region on the side facing the microwave window, and the microwave emitting module is arranged outside the reaction chamber, and the microwave generator and the focusing lens are arranged. , Equipped with a focusing mechanism,
The microwave generator includes a firing port that emits microwaves generated by the microwave generator toward the diamond holder.
The focusing lens is arranged between the diamond holder and the firing port to focus the microwave generated by the microwave generator.
The focusing mechanism is connected to the focusing lens to adjust the separation distance between the focusing lens and the firing port, and the microwave generated by the microwave generator is focused on the diamond holder. Focus on the area ,
Further, the focusing mechanism includes a motor and a moving means, and the moving means includes a rotating member connected to the motor, and a displacement in which one end is connected to the rotating member and the other end is fixed to the focusing lens. A microwave emission module having a member and characterized in that the displacement member moves linearly relative to the rotating member as the rotating member rotates . The rotating member is a sleeve on which a female screw is formed on the inner surface, and one end thereof is connected to the motor.
The displacement member is a screw rod, and both ends facing each other are a lens connecting end portion fixed to the focusing lens and a sleeve connecting end portion connected to the sleeve, and the sleeve connecting end portion is the sleeve connecting end portion. The microwave emission module according to claim 1 , wherein the microwave emission module is screwed so as to be inserted into a rotating member. The microwave emission module further comprises a microwave absorbing shell, which is coupled to the microwave generator and the reaction chamber and includes a containment space, an inlet and an outlet, the inlet. The containment space communicates with the launch port of the microwave generator, the outlet communicates with the containment space, and its outer peripheral edge surrounds the microwave window and adheres to the outer surface of the reaction chamber. ,
The focusing lens is arranged in the accommodation space, the focusing mechanism is arranged outside the microwave absorbing shell, and the moving means of the focusing mechanism slidably penetrates the microwave absorbing shell. The microwave emission module according to claim 2 . The microwave emission module further comprises a support means, the support means having a fixing member and a slide member, the fixing member being fixed at a position corresponding to the installation position of the emission port, and the slide member. , Slidably connected to the fixing member and fixed to the focusing lens,
The microwave emission module according to claim 3 , wherein the supporting means and the focusing mechanism are installed at both ends of the focusing lens, respectively. The fixing member is a linear bearing and is fixed on the microwave absorbing shell.
The slide member is a guide rod that slidably penetrates the fixing member and the microwave absorbing shell, one end of which is fixed to the focusing lens so as to be accommodated in the accommodation space, and the other end of which is fixed to the focusing lens. The microwave emitting module according to claim 4 , wherein the microwave is exposed to the outside of the microwave absorbing shell. The microwave generator includes a waveguide, one end of the waveguide toward the diamond holder is the firing port, and at least one long flat plate-shaped dielectric plate is formed in the waveguide. The first aspect of the invention is that the at least one dielectric plate is arranged so as to extend along the traveling direction of the waveguide and the thickness of both ends in the longitudinal direction is gradually reduced. The waveguide according to any one of claims 3 . The number of the at least one long flat plate-shaped dielectric plate is two, and the two dielectric plates are installed so as to face each other.
The microwave generator further comprises a linearly polarized microwave source, which is connected to the opposite end of the emission port in the waveguide and into the waveguide. Emit a linearly polarized microwave toward
The two dielectric plates convert the linearly polarized microwaves in the waveguide into circularly polarized microwaves, and the emission port emits the converted circularly polarized microwaves toward the diamond holder. The microwave emission module according to claim 6 , wherein the microwave emission module is characterized in that. The microwave emission module according to any one of claims 1 to 3 , wherein the focusing lens is a dielectric convex lens. It is a synthetic diamond manufacturing apparatus and includes a reaction chamber, a diamond holder arranged inside the reaction chamber, and a microwave emission module arranged outside the reaction chamber.
The reaction chamber includes a microwave window, and microwaves from the outside are emitted into the reaction chamber through the microwave window.
The diamond holder has a focusing region on the side facing the microwave window.
The microwave emission module includes a microwave generator, a focusing lens, and a focusing mechanism.
The microwave generator includes a firing port that emits microwaves generated by the microwave generator toward the diamond holder.
The focusing lens is located between the diamond holder and the firing port to focus the microwave generated by the microwave generator.
The focusing mechanism is coupled to the focusing lens to adjust the distance between the focusing lens and the firing port, whereby the circularly polarized microwaves generated by the microwave generator are transferred to the diamond. Focus on the focus area of the holder and
Further, the focusing mechanism includes a motor and a moving means, and the moving means includes a rotating member connected to the motor, and a displacement in which one end is connected to the rotating member and the other end is fixed to the focusing lens. An apparatus for producing synthetic diamond, which comprises a member, and the displacement member moves linearly relative to the rotating member as the rotating member rotates.

Images