JP7090959B2 - Stirrer and molten metal processing equipment - Google Patents

Description

The present invention relates to a stirrer and a molten metal treatment apparatus used for stirring a liquid substance, for example, a metal such as a molten aluminum alloy or a magnesium alloy, or various aqueous solutions.

Products using aluminum alloys and magnesium alloys may be recovered at the end of the product life, melted in a melting furnace or the like, and reused for other products.

Since aluminum alloys and magnesium alloys are chemically active metals, they are easily oxidized when exposed to the atmosphere in a melting furnace or the like, and a large amount of oxides and inclusions attached to the oxides (hereinafter referred to as "dross"). ) Is formed. In addition to oxides such as Al ₂ O ₃ , MgO, Al ₂ MgO ₄ , SiO ₂ , silicate, Al · Si · O, FeO, Fe ₂ O ₃ , carbides (Al ₄ C ₃ , Al ₄ ) are included in the dross. O ₄ C, graphite carbon), boride (AlB ₂ , AlB ₁₂ , TiB ₂ , VB ₂ ), Al ₃ Ti, Al ₃ Zr, CaSO ₄ , Al N and various halides. When dross is suspended and mixed into the molten aluminum, it eventually becomes a non-metal inclusion and causes deterioration of the quality of products such as wrought products, forged products, and die-cast products. Therefore, it is necessary to separate and remove the dross from the molten metal at each stage of the melting furnace, holding furnace, tribe, etc.

A technique for separating and discharging dross from a molten metal by changing the rotational inclination of the melting furnace and efficiently recovering the dross is disclosed (for example, see Japanese Patent Application Laid-Open No. 10-227567). In this way, the dross can be efficiently recovered in the dissolution step, but since the molten Al contains an impurity gas component such as hydrogen, it is necessary to further degas the solution at the time of re-dissolution.

On the other hand, as a degassing treatment method, a technique of blowing a treatment gas such as argon, nitrogen, or chlorine into a molten metal in a treatment tank to perform gas bubbling is known. For example, a method of injecting flux into the molten metal in gas bubbling (see, for example, Japanese Patent Application Laid-Open No. 63-183136), or a method of stirring the molten metal in gas bubbling with a rotary blade (for example, Japan). Japanese Patent Publication No. 10-306330, Japanese Patent Application Laid-Open No. 62-297422, and Japanese Patent Publication No. 7-68591) are known. Further, there is known a method for treating a molten metal in which a flux is added to the molten metal and stirred with a stirrer to modify oxides mixed in the molten metal to easily separate dross from the molten metal (for example, a Japanese patent). Japanese Patent Application Laid-Open No. 2004-143483).

The above-mentioned agitator and molten metal processing device have the following problems. That is, when stirring with the rotary blades, the bubbles were only mixed, and the diameter of the bubbles could not be sufficiently reduced. For this reason, the surface area per unit volume of the bubble becomes small, and the residence time in the molten metal becomes short, so that the bubble diffuses into the atmosphere in a short time before it sufficiently reacts. Therefore, the supply amount of the processing gas is, for example, about 20 L per minute at 0.3 MPa, and it is necessary to supply about 100 L of the processing gas in a general processing time. For this reason, a large amount of processing gas is used, which causes an increase in processing cost.

Further, when the rotary blades are arranged near the surface of the molten metal in order to efficiently generate bubbles, there is an adverse effect that a large vortex is generated on the surface of the molten metal, entrains the atmosphere, and the amount of oxide increases.

Therefore, the present invention has been made to solve the above-mentioned problems, and by generating microbubbles, the surface area in the molten metal or the aqueous solution is increased, and the surface area is kept in the molten metal or the aqueous solution for a long time. It is an object of the present invention to provide a stirrer capable of capable of using a stirrer and a molten metal treatment apparatus using the stirrer.

The stirrer according to the present embodiment is a stirrer which is attached to a rotary drive shaft and agitates molten metal and supplies a processing gas. The base end side is attached to a drive mechanism that supports the rotary drive shaft and the processing gas. A cylindrical housing to which the The rotary blade is provided with an opening formed on the outer surface of the housing, and the rotary blade is formed of a plurality of blades along the rotation axis, and is formed on the inner peripheral surface of the housing and the said. The width of the gap formed by the outer peripheral surface of the rotary blade is 3 to 10 mm .

The molten metal treatment apparatus according to the present embodiment is a molten metal treatment apparatus that agitates the molten metal and removes unnecessary gas by supplying the processing gas, and is arranged above the processing tank containing the molten metal and the processing tank. It is provided with a gas supply / rotation drive mechanism having a rotation drive shaft protruding downward, and a stirrer provided at the lower end of the gas supply / rotation drive mechanism and detachably provided in the processing tank. The stirrer has a cylindrical housing whose base end side is attached to a drive mechanism that supports the rotation drive shaft and to which the processing gas is supplied, and a cylindrical housing whose base end side is inserted into the housing and whose base end side is attached to the rotation drive shaft. The rotary shaft is provided with a coupled rotary shaft, a rotary blade provided on the tip end side in the housing and attached to the tip end side of the rotary shaft, and an opening formed on the outer surface of the housing, and the rotary blade is provided. The width of the gap formed by a plurality of blades along the rotation axis and formed by the inner peripheral surface of the housing and the outer peripheral surface of the rotary blade is 3 to 10 mm .

The stirrer according to the present embodiment is a stirrer which is attached to a rotary drive shaft and agitates water or an aqueous solution and supplies a processing gas. A cylindrical housing to which gas is supplied, a rotation shaft inserted inside the housing and having a base end side coupled to the rotation drive shaft, and a rotation shaft provided on the tip end side of the housing and the tip of the rotation shaft. The rotary blade is provided with a rotary blade attached to the side and an opening formed on the outer surface of the housing, and the rotary blade is formed from a plurality of blades along the rotation axis and has an inner peripheral surface of the housing. The width of the gap formed by the outer peripheral surface of the rotary blade is 3 to 10 mm .

According to the present invention, by generating microbubbles, it is possible to increase the surface area in the molten metal or the aqueous solution and to keep the microbubbles in the molten metal or the aqueous solution for a long time.

FIG. 1 is an explanatory diagram showing a degassing treatment apparatus according to an embodiment of the present invention. FIG. 2 is a vertical sectional view showing a stirrer and a stirrer incorporated in the degassing treatment device. FIG. 3 is a perspective view showing a rotary blade incorporated in the stirrer. FIG. 4 is an explanatory diagram showing a degassing treatment step by the degassing treatment apparatus. FIG. 5 is an explanatory diagram showing the operation of the stirrer. FIG. 6 is an explanatory diagram showing the operation of the stirrer. FIG. 7 is an explanatory diagram showing a modified example of the stirrer. FIG. 8 is an explanatory diagram showing the operation of the stirrer. FIG. 9 is an explanatory diagram showing a modified example of the stirrer.

1 to 3 are views showing a degassing treatment device (molten metal treatment device) 10 according to an embodiment of the present invention. As shown in FIG. 1, the degassing treatment device 10 is detachably attached to the treatment tank 20, the gas supply / rotation drive mechanism 30 arranged in the vicinity of the treatment tank 20, and the gas supply / rotation drive mechanism 30. The agitator 50 is provided with a flux charging device 100 and a dross removing device 110 arranged in the vicinity of the processing tank 20.

The treatment tank 20 is made of a refractory material and has a treatment capacity capable of degassing up to 1500 kg of molten aluminum per batch.

The flux charging device 100 has a function of charging the flux F into the molten aluminum P in the processing tank 20. The flux charging device 100 has a plurality of hoppers, shooters, and the like accommodating an aluminum scavenger as a flux F, and a predetermined amount of the aluminum scavenger of a predetermined component is blended in a predetermined blending ratio in the treatment tank 20. It has a function to put it in. The flux F may be mixed with the processing gas G described later and supplied from the gas supply / rotation drive mechanism 30.

The dross removing device 110 includes a scraping jig and a suction / discharging device. The scraping jig is made of plate-shaped carbon, refractory material, and ceramic member, and its surface is specially processed so that dross does not adhere. The suction / discharge device has a trumpet-shaped suction port made of a heat-resistant material, and communicates with the recovery pot via a suction pump.

A melting furnace 200 is arranged adjacent to the treatment tank 20, and the molten aluminum is poured into the treatment tank 20 from the melting furnace 200 in a non-oxidizing atmosphere. The melting furnace has a dross separation / removal function, and a large amount of dross is separated from the molten metal and removed in the melting furnace.

The gas supply / rotation drive mechanism 30 includes a gantry 31, a post 32 extending vertically on the gantry 31 and swinging along a vertical axis, and an endless belt arranged along the post 32. 33, a slider 34 attached to the endless belt 33, and a drive motor 35 for driving the endless belt 33 are provided. A gas supply unit 36 for supplying the processing gas G is arranged in the gantry 31 and is connected to a gas supply line 46 described later. An arm 39 is attached to the slider 34 in the horizontal direction, and a stirring device 40 is provided at the tip thereof. Therefore, the arm 39 can be swiveled and lifted by the post 32.

The stirring device 40 includes a gantry 41 attached to the tip of the arm 39, a rotary drive motor 42 provided on the gantry 41, a rotary drive shaft 43 extended in the vertical direction, a rotary drive motor 42, and a rotary drive. It includes a belt 44 spanned over the upper end of the shaft 43, a cylindrical portion 45 that airtly supports the rotary drive shaft 43, and a stirrer 50 detachably attached to the tip of the rotary drive shaft 43. .. The cylindrical portion 45 and the rotary drive shaft 43 are made of a metal material and are not immersed in the molten aluminum P.

A gas supply line 46 is connected to the cylindrical portion 45, and the processing gas G is supplied from the gas supply portion 36 described above. The treatment gas G is a non-oxidizing gas such as an argon gas or a nitrogen gas. Flux gas may be mixed as described above. There is a sufficient space between the cylindrical portion 45 and the rotary drive shaft 43, and the processing gas G is supplied into the housing 51 described later through this space. The supply of the processing gas G has the effect of cooling the heat received from the molten aluminum P and preventing the temperature of each component from rising.

The stirrer 50 has a tubular housing 51 whose base end side is airtightly coupled to the lower end of the cylindrical portion 45, and a rotary shaft 52 which is inserted inside the housing 51 and whose base end side is coupled to the rotation drive shaft 43. I have. The rotary drive shaft 43 and the rotary shaft 52 are connected by a screw structure (upper and lower shaft connecting screws) provided inside. Inside the housing 51, a rotary blade 53 attached to the tip end side of the rotary shaft 52 is arranged. Six oval-shaped openings 54 are formed on the base end side of the position of the rotary blade 53 of the housing 51. The size and number of openings 54 may be appropriately changed depending on the type of molten metal. Since the stirrer 50 is immersed in the molten aluminum P, it is made of a heat-resistant ceramic material or carbon material.

A sufficient space is provided between the housing 51 and the rotary shaft 52, and the processing gas G is supplied to the periphery of the rotary blade 53 through this space.

As shown in FIG. 3, the rotary blade 53 has three blades 53a arranged side by side in the axial direction. The blades 53a are separated from each other in the axial direction of the rotating shaft 52, and a gap S is formed. The outer peripheral surface of each blade 53a is formed close to the inner wall of the housing 51, and its dimensions are set to, for example, about 3 mm to 10 mm. The spiral surface 53b of each blade 53a is formed so as to descend to the right.

Further, the rotary blade 53 is preferably made of a ceramic material so as not to be melted by the heat of the molten aluminum P. Since it is difficult to form a complicated shape of a ceramic material, by arranging the blades 53a in parallel in the axial direction as described above, a complicated blade shape like a metal blade is realized, and microbubbles are formed. Ensure characteristics such as stirring power and feed output. When the blades 53a are arranged side by side, the bubble diameter can be further reduced by arranging the spiral surfaces 53b of the adjacent blades 53a so as to form a continuous surface. In addition, the characteristics of the rotary blade 53 can be adjusted depending on the arrangement, shape, and number of blades.

Next, the degassing treatment method by the degassing treatment apparatus 10 according to the present embodiment will be described with reference to FIGS. 4 to 6. In addition, R in FIGS. 5 and 6 indicates a rotation direction. After melting the aluminum in the melting furnace 200, the molten aluminum P is transferred from the melting furnace to the processing tank 20 together with the dross D (step S1). Next, the flux F having a predetermined component is put into the treatment tank 20, the stirrer 50 is lowered, and the rotary blade 53 is immersed directly under the surface of the molten aluminum P in the treatment tank 20. Then, the rotary blade 53 is rotated to stir the molten aluminum P, the dross D, and the flux F for several minutes. As a result, the dross D is modified and separated from the molten aluminum P (step S2).

Next, the stirrer 50 is further lowered, the tip 51a side of the housing 51 is positioned near the bottom of the processing tank 20, and the rotary blade 53 is rotated at, for example, 1000 rpm. By the action of the rotary blade 53, as shown in FIG. 5, the molten aluminum P in the vicinity of the opening 54 is drawn downward and circulates in the housing 51 while being sent downward from the tip 51a of the housing 51.

Further, the processing gas G supplied from the gas supply unit 36 enters the housing 51 which has a negative pressure due to the action of the rotation of the rotary blade 53, becomes a bubble B1 having a relatively large diameter, and becomes a bubble B1 with a relatively large diameter. It enters the gap in the body 51. At this time, as shown in FIG. 6, the bubble B1 moves in and out of the gap S to repeat compression and expansion. In this process, the bubble B1 is crushed into bubbles B2 and bubbles B3 having a small diameter. In this way, microbubbles (diameter: several μm to 50 μm) are formed by the shearing action of the rotary blade 53. As a result, when the treated gas G is supplied and diffused in the molten aluminum P (gas bubbling), the dross D mixed in the molten aluminum P and the impurity gas components such as hydrogen float on the surface of the molten metal (step S3). The stirring force at this time shall be weak enough not to inhibit the gas bubbling reaction. After continuing the gas bubbling for several minutes, the gas blowing is stopped and the degassing process is completed.

Next, the stirrer 50 is further lowered, the tip 51a of the housing 51 is positioned at the deepest part of the processing tank 20, and the molten aluminum P is stirred. The dross scraping member is lowered, the lower portion thereof is immersed in the molten metal surface, and the dross D is gathered at a specific location in the processing tank 20 (step S4). The collected dross D is sucked and discharged from the processing tank 20 by a suction and discharge device, and collected in a recovery pot (step S5).

As described above, according to the stirrer 50 and the degassing treatment device 10 according to the present embodiment, microbubbles are generated by compressing, expanding, and shearing the processing gas G in the gap between the rotary blade 53 and the housing 51. Can be made to. For this reason, the surface area of the treated gas in the molten metal is increased to facilitate the reaction with the hydrogen gas that is solidly dissolved, and by staying in the molten metal for a long time, the reaction time with the hydrogen gas is extended, which is sufficient. Hydrogen gas can be removed. Further, since an opening 54 for sucking an amount of molten metal corresponding to the negative pressure accompanying the rotation of the rotary blade 53 is formed on the side surface of the housing 51 accommodating the rotary blade 53, a vortex is formed on the surface of the molten metal. It is possible to prevent the formation of oxides and prevent the formation of oxides by entraining the atmosphere. That is, it is possible to release the microbubbled processing gas, suppress excessive stirring of the molten metal, and promote the dispersion of the processing gas. Therefore, degassing can be sufficiently performed, and a high quality aluminum alloy can be obtained.

FIG. 7 is an explanatory diagram showing the configuration of the stirrer 50A according to the modification of the stirrer 50 described above. In FIG. 7, the same functional parts as those in FIG. 5 are designated by the same reference numerals, and detailed description thereof will be omitted. The stirrer 50A has a tubular housing 55 whose base end side is airtightly coupled to the lower end of the cylindrical portion 45, and a rotary shaft 52 which is inserted inside the housing 55 and whose base end side is coupled to the rotation drive shaft 43. I have. The tip 55a of the housing 55 is open. Inside the housing 55, a rotary blade 53 attached to the tip end side of the rotary shaft 52 is arranged. Six oval openings 56 are formed at positions of the housing 55 facing the rotary blades 53. The size and number of openings 56 may be appropriately changed depending on the type of molten metal. Since the stirrer 50A is immersed in the molten aluminum P, it is made of a heat-resistant ceramic material or stainless steel material.

A sufficient space is provided between the housing 55 and the rotary shaft 52, and the processing gas G is supplied to the periphery of the rotary blade 53 through this space.

Even when the stirrer 50A configured as described above is used, it is used in the same manner as the stirrer 50 as described above. At this time, as shown in FIG. 7, the behavior of the molten aluminum P is that the molten aluminum P is sucked in from the tip 55a side and discharged from the opening 56. The processing gas G supplied from the gas supply unit 36 enters the housing 55, which has a negative pressure due to the action of the rotation of the rotary blade 53, and is made into microbubbles. Then, after continuing the gas bubbling for several minutes, the gas blowing is stopped and the degassing process is completed.

FIG. 8 is an explanatory diagram showing a modified example of the connection between the rotary drive shaft 43 and the rotary shaft 52 in the above-mentioned stirrers 50 and 50A. The connection between the rotary drive shaft 43 and the rotary shaft 52 is coupled by a coupling mechanism (rigid coupling) 60 in addition to the internal screw structure described above.

As shown in FIG. 9, the coupling mechanism 60 is arranged at the coupling portion between the rotary drive shaft 43 and the rotary shaft 52, and is arranged on the outer peripheral side of the rotary drive shaft 43 and the rotary shaft 52.

The coupling mechanism 60 includes an inner cylinder portion 61 arranged on the outer periphery of the joint portion between the rotation drive shaft 43 and the rotation shaft 52. A nut 61a is formed in the center of the inner cylinder portion 61, and a pair of deformed portions 61b having a tapered shape and a male screw formed on the outer periphery are provided at both ends. A slit is formed in the deformed portion 61b so that the inner diameter thereof can be adjusted. Nuts 62 and 63 are screwed into the male screw of the deformed portion 61b.

When the coupling mechanism 60 configured in this way is formed, the coupling force between the rotary drive shaft 43 and the rotary shaft 52 becomes firm, and it is possible to suppress the amount of runout at high rotation speed (1000 rpm or more). .. The coupling mechanism 60 can be attached by positioning the connection portion between the rotary drive shaft 43 and the rotary shaft 52 on the inner cylinder portion 61 and tightening the nuts 62 and 63.

Although aluminum alloys have been exemplified as the above-mentioned metals, they can also be applied to molten metal of other metals such as magnesium alloys. Further, in addition to the molten metal, in water, an aqueous solution, etc., the reaction efficiency of the processing gas into the liquid can be improved and the reaction time can be extended by using microbubbles having a diameter of about several μm to 50 μm. It can save the amount of processing gas.

In addition, the rotation direction and rotation speed of the rotation shaft 52, and the positions, numbers, sizes, and shapes of the openings 54 and 56 are not limited to those described above, and may be appropriately changed according to the stirring target and the physical properties of the gas. Is also good.

The present invention is not limited to the above embodiment, and can be variously modified at the implementation stage without departing from the gist thereof. In addition, each embodiment may be carried out in combination as appropriate, in which case the combined effect can be obtained. Further, the above-described embodiment includes various inventions, and various inventions can be extracted by a combination selected from a plurality of disclosed constituent requirements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, if the problem can be solved and the effect is obtained, the configuration in which the constituent elements are deleted can be extracted as an invention. The inventions described in the original claims of the present application are described below.
[1]
In a stirrer attached to a rotary drive shaft that agitates molten metal and supplies processing gas.
A cylindrical housing whose base end side is attached to a drive mechanism that supports the rotary drive shaft and to which the processing gas is supplied.
A rotary shaft inserted inside the housing and having a proximal end side coupled to the rotary drive shaft,
A rotary blade provided on the tip end side of the housing and attached to the tip end side of the rotary shaft, and
A stirrer with an opening formed on the outer surface of the housing.
[2]
The stirrer according to [1], wherein the opening is arranged on the base end side of the housing with respect to the rotary blade.
[3]
The stirrer according to [1], wherein the opening is arranged so as to face the rotary blade.
[4]
The stirrer according to [1], wherein the rotary blade is formed of a plurality of blades along the rotation axis, and the plurality of blades are arranged axially apart from each other.
[5]
The stirrer according to [1], wherein the rotary blade is formed of a plurality of blades along the rotation axis, and the spiral surface of the plurality of blades forms a continuous surface.
[6]
In a molten metal treatment device that agitates molten metal and removes unnecessary gas by supplying treatment gas.
A treatment tank for accommodating the molten metal and
A gas supply / rotation drive mechanism that is arranged above the processing tank and has a rotation drive shaft protruding below.
A stirrer provided at the lower end of the gas supply / rotation drive mechanism and detachably provided in the processing tank is provided.
The stirrer has a cylindrical housing whose base end side is attached to a drive mechanism that supports the rotary drive shaft and to which the processing gas is supplied.
A rotary shaft inserted inside the housing and having a proximal end side coupled to the rotary drive shaft,
A molten metal treatment device provided on the tip end side of the housing and provided with a rotary blade attached to the tip end side of the rotation shaft and an opening formed on the outer surface of the housing.
[7]
The molten metal treatment apparatus according to [6], wherein the rotary blade is formed of a plurality of blades along the rotation axis, and the plurality of blades are arranged axially apart from each other.
[8]
In a stirrer attached to a rotary drive shaft that agitates water or an aqueous solution and supplies a processing gas.
A cylindrical housing whose base end side is attached to a drive mechanism that supports the rotary drive shaft and to which the processing gas is supplied.
A rotary shaft inserted inside the housing and having a proximal end side coupled to the rotary drive shaft,
A rotary blade provided on the tip end side of the housing and attached to the tip end side of the rotary shaft, and
A stirrer with an opening formed on the outer surface of the housing.
[9]
The stirrer according to [8], wherein the rotary blade is formed of a plurality of blades along the rotation axis, and the plurality of blades are arranged axially apart from each other.

Claims (10)

In a stirrer attached to a rotary drive shaft that agitates molten metal and supplies processing gas.
A cylindrical housing whose base end side is attached to a drive mechanism that supports the rotary drive shaft and to which the processing gas is supplied.
A rotary shaft inserted inside the housing and having a proximal end side coupled to the rotary drive shaft,
It is provided with a rotary blade provided on the tip end side in the housing and attached to the tip end side of the rotation shaft, and an opening formed on the outer surface of the housing.
The rotary vane is formed of a plurality of vanes along the axis of rotation.
A stirrer having a width of a gap formed by the inner peripheral surface of the housing and the outer peripheral surface of the rotary blade of 3 to 10 mm. The stirrer according to claim 1 , wherein the processing gas is supplied to the periphery of the rotary blade through a gap between the housing and the rotary shaft. The stirrer according to claim 1 or 2 , wherein the opening is arranged on the base end side of the housing with respect to the rotary blade. The stirrer according to claim 1 or 2 , wherein the opening is arranged so as to face the rotary blade. The stirrer according to any one of claims 1 to 4 , wherein the plurality of blades are arranged apart from each other in the axial direction. In a stirrer attached to a rotary drive shaft that agitates molten metal and supplies processing gas.
A cylindrical housing whose base end side is attached to a drive mechanism that supports the rotary drive shaft and to which the processing gas is supplied.
A rotary shaft inserted inside the housing and having a proximal end side coupled to the rotary drive shaft,
It is provided with a rotary blade provided on the tip end side in the housing and attached to the tip end side of the rotation shaft, and an opening formed on the outer surface of the housing.
A stirrer in which the rotary blades are formed of a plurality of blades along the rotation axis, and the spiral surfaces of the plurality of blades form a continuous surface. In a molten metal treatment device that agitates molten metal and removes unnecessary gas by supplying treatment gas.
A treatment tank for accommodating the molten metal and
A gas supply / rotation drive mechanism that is arranged above the processing tank and has a rotation drive shaft protruding below.
A stirrer provided at the lower end of the gas supply / rotation drive mechanism and detachably provided in the processing tank is provided.
The stirrer has a cylindrical housing whose base end side is attached to a drive mechanism that supports the rotary drive shaft and to which the processing gas is supplied.
A rotary shaft inserted inside the housing and having a proximal end side coupled to the rotary drive shaft,
It is provided with a rotary blade provided on the tip end side in the housing and attached to the tip end side of the rotation shaft, and an opening formed on the outer surface of the housing.
The rotary vane is formed of a plurality of vanes along the axis of rotation.
A molten metal treatment device having a width of a gap formed by an inner peripheral surface of the housing and an outer peripheral surface of the rotary blade of 3 to 10 mm. The molten metal treatment apparatus according to claim 7 , wherein the plurality of blades are arranged apart from each other in the axial direction. In a stirrer attached to a rotary drive shaft that agitates water or an aqueous solution and supplies a processing gas.
A cylindrical housing whose base end side is attached to a drive mechanism that supports the rotary drive shaft and to which the processing gas is supplied.
A rotary shaft inserted inside the housing and having a proximal end side coupled to the rotary drive shaft,
It is provided with a rotary blade provided on the tip end side in the housing and attached to the tip end side of the rotation shaft, and an opening formed on the outer surface of the housing.
The rotary vane is formed of a plurality of vanes along the axis of rotation.
A stirrer having a width of a gap formed by the inner peripheral surface of the housing and the outer peripheral surface of the rotary blade of 3 to 10 mm. The stirrer according to claim 9 , wherein the plurality of blades are arranged apart from each other in the axial direction.

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