JP7081941B2 - 3D shape measuring device and 3D shape measuring method - Google Patents

Description

The present invention relates to a three-dimensional shape measuring device and a three-dimensional shape measuring method.

The turbine blades used in the turbines of hydroelectric power plants may wear locally with long-term operation. Therefore, the degree of wear of the turbine blades is measured regularly to manage the wear status.
As one of the methods for managing the wear condition of the turbine blades, there is a method using a depth gauge. That is, the maximum depth of the worn portion is measured using a depth gauge, and the vertical and horizontal lengths of the worn portion are measured to use it as a control index for the size of the worn portion. As a method of measuring the degree of wear more accurately, for example, a method of filling a wear part with resin, taking a replica of the wear part, and evaluating the state of wear from the shape of the replica has been proposed.

However, depending on the shape of the turbine blades, the space around the turbine blades is narrow and there is a distance from the position where people approach, so it is difficult to reach the part you want to observe, so you should measure with a gauge, collect replicas, and visually check. May not be possible.
Further, for example, three-dimensional measurement aimed at downsizing the measuring device by expanding the slit length of the slit light and lengthening the optical path length from the slit light generating means to the object to be measured without using a lens having a strong optical power. A device (for example, refer to Patent Document 1), and a roller provided at the bottom of the measuring device, and the measurement is performed with the roller in contact with the measuring object to reduce the distance between the measuring device and the measuring object. A tread depth measuring device (for example, see Patent Document 2) for measuring the groove depth of a tire, which is kept constant and has improved measurement accuracy, has also been proposed.

Japanese Unexamined Patent Publication No. 2008-175625 Japanese Unexamined Patent Publication No. 2006-242674

However, in the above-mentioned conventional method, for example, the small three-dimensional measuring device described in Patent Document 1 measures the cross-sectional shape of the portion hit by the optical cutting line, and therefore evaluates the entire worn portion. Is difficult to do. Further, since it is a handy type shape measuring device, it is difficult to maintain a constant distance between the shape measuring device and the object to be measured due to camera shake or the like. Therefore, it is not possible to stably obtain distance information between the shape measuring device and the object to be measured, and as a result, there is a problem that it is difficult to accurately construct a three-dimensional shape of the object to be measured.

Further, in the measuring device in which the distance between the measuring device and the object to be measured is kept constant by providing a roller under the measuring device described in Patent Document 2, the surface on which the groove of the tire is formed is formed. When the measurement site is present on a curved surface or a plane having a constant curvature, the distance between the optical cutting line projection unit and the measurement object is substantially constant. However, when the measurement surface has a curved surface such as a water wheel blade and the measurement site exists on a curved surface having a complicated shape in which the inclination of the measurement surface differs depending on the position, the roller of the measuring device is brought into contact with the measurement surface. Even so, the inclination of the measuring device with respect to the measuring surface may change depending on the shape of the measuring surface at the point where each roller contacts, and it is difficult to keep the distance between the measuring device and the measuring surface constant. .. Therefore, it is difficult to measure locally on a curved surface or to measure a minute shape on a curved surface. In particular, since the turbine blade contains a curved surface, it is difficult to measure the change in unevenness with respect to the reference surface composed of the curved surface. Therefore, it is not possible to evaluate the wear condition of the turbine blades with high accuracy.

Not only is it difficult to accurately measure the shape of the object to be measured, but it may also be out of the measurement range of the measuring device.
Further, although the above-mentioned device is equipped with an image pickup device, it does not have a function of displaying an external image.
The present invention has been made by paying attention to the above-mentioned unsolved problem, and it is possible to observe the appearance of the measurement site and to measure the local wear shape with high accuracy without depending on the target shape. It is an object of the present invention to provide a three-dimensional shape measuring device and a three-dimensional shape measuring method.

According to one aspect of the present invention, there is a slit light source that irradiates a measurement object with slit light, an image pickup device, an illumination light source , a mirror for the image pickup device, and a light source that bends the irradiation light and the slit light of the illumination light source. A head portion having a mirror, and a pair of legs fixed to the head portion and spaced apart from each other in a direction orthogonal to the scanning direction of the head portion, the head portion includes a pair of legs at the time of scanning. The image pickup device has a lens on the image pickup surface side, and the mirror for the image pickup device is designed to move on the measurement target object while maintaining the distance from the measurement target object only through the legs. , The mirror for the light source was provided to face the lens and was bent by the mirror for the imager when the legs were in contact with the plane and the optical axis of the imager was kept parallel to the plane. The optical axis of the image pickup device and the slit light bent by the mirror for the light source are arranged so as to be parallel to the straight line connecting the contact points between the legs and the plane, and the illumination light source irradiates the slit light. Only the area on the measurement object excluding the light cut line on the measurement object obtained by the An original shape measuring device, is provided.
According to another aspect of the present invention, a slit light source that irradiates a measurement object with slit light, an image pickup device, an illumination light source , a mirror for the image pickup device, and a light source that bends the irradiation light and the slit light of the illumination light source. A head unit having a The head unit moves on the measurement object while maintaining a distance from the measurement object via only a pair of legs during the scanning, and the image pickup apparatus is an imaging surface. It has a lens on the side and the mirror for the image pickup device is provided so as to face the lens, and the mirror for the light source abuts the legs on the plane and keeps the optical axis of the image pickup device parallel to the plane. In this case, the optical axis of the image pickup device bent by the mirror for the image pickup device and the slit light bent by the mirror for the light source should be parallel to the straight line connecting the contact points between the legs and the flat surface. Arranged, the illumination light source illuminates the area on the measurement object including the light cut line on the measurement object obtained by irradiating the slit light, and the image pickup device illuminates the illumination light of the illumination light source including the light cut line. The illumination light source irradiates the light cut line on the measurement object obtained by irradiating the slit light with the illumination light recognizable on the screen displayed on the display device. An original shape measuring device, is provided.

According to another aspect of the present invention, a slit light source that irradiates a measurement object with slit light, an image pickup device, an illumination light source , a mirror for the image pickup device, and a light source that bends the irradiation light and the slit light of the illumination light source. A head portion having a light source, a pair of legs fixed to the head portion and spaced apart in a direction orthogonal to the scanning direction of the head portion, a display device for displaying an image captured by an image pickup device, The head unit moves on the measurement object while maintaining a distance from the measurement object via only a pair of legs during the scanning, and the image pickup apparatus is an imaging surface. It has a lens on the side and the mirror for the image pickup device is provided so as to face the lens, and the mirror for the light source abuts the legs on the plane and keeps the optical axis of the image pickup device parallel to the plane. In this case, the optical axis of the image pickup device bent by the mirror for the image pickup device and the slit light bent by the mirror for the light source should be parallel to the straight line connecting the contact points between the legs and the flat surface. Arranged, the illumination light source illuminates the area on the measurement object including the light cut line on the measurement object obtained by irradiating the slit light, and the image pickup device illuminates the illumination light of the illumination light source including the light cut line. The illumination light source is provided with a three-dimensional shape measuring device that intermittently irradiates the illumination light.
According to another aspect of the present invention, a head portion having a slit light source that irradiates a measurement object with slit light , an image pickup device, a mirror for the image pickup device, and a mirror for a light source that bends the slit light . It is provided with a pair of legs fixed to the head portion and provided at intervals in a direction orthogonal to the scanning direction of the head portion, and the image pickup device has a lens on the image pickup surface side and is used for the image pickup device. The mirror is provided so as to face the lens, and the mirror for the light source is bent by the mirror for the image pickup device when the legs are in contact with the plane and the optical axis of the image pickup device is maintained to be parallel to the plane. The optical axis of the image pickup device and the slit light bent by the mirror for the light source are arranged so as to be parallel to the straight line connecting the contact points between the leg and the plane, and the head portion is arranged at the time of scanning. Provided is a three-dimensional shape measuring device that moves on a measurement object while maintaining a distance from the measurement object only through a pair of legs.

According to another aspect of the present invention, it is a three-dimensional shape measuring method using a three-dimensional shape measuring device, in a state where an operator directly grips the head portion or indirectly grips the head portion via a jig. , The tip of the leg is brought into contact with the surface of the object to be measured, and the head is moved in the scanning direction along the surface of the object to be measured while maintaining the contact, and the object to be measured is photographed by the image pickup device. , The three-dimensional shape of the measurement object is calculated based on the optical cut line on the measurement object obtained by irradiating the slit light included in the image captured by the image pickup device obtained by scanning the head portion. A three-dimensional shape measuring method is provided.

According to another aspect of the present invention, it is a three-dimensional shape measuring method using a three-dimensional shape measuring device, in which an operator directly grips the head portion or indirectly grips the head portion via a jig. Then, the tip of the leg portion is brought into contact with the surface of the object to be measured, and the head portion is moved in the scanning direction along the surface of the object to be measured while maintaining the contact with the surface of the object to be measured. A three-dimensional shape measuring method for photographing an object to be measured is provided.

According to one aspect of the present invention, it is possible to easily measure a three-dimensional shape and acquire an image of a surface shape, and it is possible to accurately construct a three-dimensional shape of an object to be measured.

It is a block diagram which shows an example of the 3D shape measuring apparatus in one Embodiment of this invention. It is a block diagram which shows an example of the 3D shape measuring apparatus in one Embodiment of this invention. It is explanatory drawing for demonstrating the use method of the 3D shape measuring apparatus in one Embodiment of this invention. It is a schematic diagram which shows an example of the captured image. It is explanatory drawing for demonstrating the irradiation method of the LED irradiation area. It is explanatory drawing for demonstrating the method of synthesizing the optical cut line and the position information of a head part. It is a flowchart which shows an example of the processing procedure at the time of measurement. It is a flowchart which shows an example of the processing procedure at the time of analysis. This is an example of a schematic diagram of a captured image for explaining a method of displaying ruled lines. It is explanatory drawing which shows the other example of the 3D shape measuring apparatus in this invention. It is explanatory drawing which shows the other example of the 3D shape measuring apparatus in this invention. It is explanatory drawing which shows the other example of the 3D shape measuring apparatus in this invention. It is explanatory drawing which shows the other example of the 3D shape measuring apparatus in this invention. It is a schematic diagram which shows the other example of the captured image. It is explanatory drawing which shows the other example of the 3D shape measuring apparatus in this invention. It is a flowchart which shows an example of the processing procedure at the time of the unevenness amount calculation.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
It should be noted that the following detailed description describes many specific specific configurations to provide a complete understanding of the embodiments of the present invention. However, it is clear that other embodiments can be implemented without being limited to such a particular specific configuration. Further, the following embodiments do not limit the invention according to the claims. Also, not all combinations of features described in the embodiments are essential to the means of solving the invention.

FIG. 1 is a schematic configuration diagram showing an example of a three-dimensional shape measuring device 1 according to an embodiment of the present invention, and the head portion is shown in a side view. Further, FIG. 2 is a view of the head portion as viewed from the front, that is, from the scanning direction of the head portion.
The three-dimensional shape measuring device 1 includes a head unit 2 that measures an object to be measured, and an analysis processing unit 3 that analyzes the data obtained by the head unit 2.
The head unit 2 includes an image pickup device 11, a mirror 12 for the image pickup device 11, a laser slit light source 13, a mirror 14 for the laser slit light source 13, and a white LED light source 15. Further, the head portion 2 includes a gantry 5 and a pair of leg portions 6a and 6b whose one end is fixed to the gantry 5.

The gantry 5 has a substantially rectangular plate shape. Here, the longitudinal direction of the gantry 5 is the Y-axis direction, the lateral direction is the X-axis direction, the upper surface of the gantry 5 is the XY plane, and the direction perpendicular to the XY plane is the Z-axis direction. The lower surface of the gantry 5 is a plane parallel to the XY plane. The gantry 5 is not limited to a plate shape, and may be a housing or the like capable of supporting the components of the head portion 2, and the shape thereof is not limited.

The legs 6a and 6b are provided at positions near one end in the longitudinal direction of the gantry 5, and are fixed to both ends in the lateral direction perpendicular to the XY plane. Wheels 7a and 7b are provided at the ends of the legs 6a and 6b on the opposite side of the gantry 5.
Further, the legs 6a and 6b are fixed in a direction perpendicular to the XY plane, and the lengths from the gantry 5 to the lower ends of the wheels 7a and 7b are set to be equal. If the lengths of the legs 6a and 6b in the vertical direction from the gantry 5 to the lower ends of the wheels 7a and 7b are equal, the tips of the legs 6a and 6b, that is, the lower ends are outward when viewed from the front. It may be spread a little.

The distance between the wheels 7a and 7b is set as follows. That is, when the wheels 7a and 7b are in contact with the region where the unevenness of the surface of the object to be measured is formed, for example, the wheel 7a is in contact with the convex portion and the wheel 7b is in contact with the flat portion. The head portion 2 is tilted to the left and right around the Y axis. Therefore, it may not be possible to keep the distance between the object to be measured and the head portion 2 constant, which may cause a measurement error of the three-dimensional shape. Therefore, by setting the distance between the wheels 7a and 7b to a distance that straddles the region where the unevenness that is expected to occur on the surface of the object to be measured is formed, the measurement error can be suppressed.

The image pickup apparatus 11 and the mirror 12 are fixed to the upper surface of the gantry 5, and the laser slit light source 13, the mirror 14, and the white LED light source 15 are fixed to the lower surface of the gantry 5. At least the image pickup apparatus 11 and the mirror 12 are covered with a cover 10 as shown in FIG. Then, as shown in FIG. 3A, the head portion 2 is directly gripped, or as shown in FIG. 3B, a rod-shaped jig 28 extending rearward in the scanning direction of the head portion 2 is attached to the head portion 2. Measurement is performed by attaching the wheel 7 and moving the wheel 7 along the surface of the object to be measured while the wheel 7 is in contact with the surface of the object to be measured while the head portion 2 is indirectly gripped through the jig 28. It has become like.

The image pickup apparatus 11 includes a small television camera to which the lens 11a is attached. The image pickup device 11 is fixed to the gantry 5 so that the optical axis of the image pickup device 11 is parallel to the XY plane in a side view. The image pickup apparatus 11 is connected to the analysis processing unit 3 via the USB cable 11b.
The mirror 12 is fixed to the upper surface of the gantry 5 so as to face the lens 11a, and is arranged so that the optical axis of the image pickup apparatus 11 is bent in the direction perpendicular to the XY plane.
The laser slit light source 13 is arranged so that the laser slit light is output in parallel with the XY plane. The laser slit light source 13 is connected to the analysis processing unit 3 by the power cable 13a, and receives power from the analysis processing unit 3.

The mirror 14 is fixed so as to face the output side of the laser slit light source 13, and bends the laser slit light toward the surface side with which the wheel 7 abuts.
The laser slit light source 13 and the mirror 14 are used when the wheel 7 is brought into contact with a plane and the head portion 2 is maintained so that the optical axis of the image pickup device 11 is parallel to the plane with which the wheel 7 is abutted. The optical axis of the image pickup apparatus 11 bent by the mirror 12 and the laser slit light bent by the mirror 14 are arranged so as to overlap with a straight line connecting the contact points between the wheels 7a and 7b and the plane.
In this way, the laser slit light is projected onto the plane on which the wheels 7 are in contact at a predetermined angle with respect to the optical axis of the image pickup device 11, so that the surface of the object to be measured has irregularities. When the wheel 7 is brought into contact with the wheel 7, a light cutting line is formed, the size of the unevenness on the surface of the object to be measured can be visualized, and the size of the unevenness can be read.

When the white LED light source 15 is arranged in the vicinity of the laser slit light source 13 and the wheels 7 are brought into contact with a plane, the optical axis of the image pickup apparatus 11 is maintained so as to be parallel to the plane with which the wheels 7 are abutted. As shown in FIG. 4, of the irradiation light of the white LED light source 15, a region on a plane (hereinafter, also referred to as an LED irradiation region) a1 irradiated by the irradiation light bent by the mirror 14 is formed by the laser slit light. It is arranged so as to be located in a region on a plane to be irradiated, that is, a region different from the light cutting line a2.
Further, the white LED light source 15 is in a state where the wheel 7 is brought into contact with the plane and the head portion 2 is maintained so that the optical axis of the image pickup apparatus 11 is parallel to the plane with which the wheel 7 is abutted. It is arranged at a position including the LED irradiation region a1 and the optical cut line a2 in the captured image obtained when the plane in which the wheels 7 are in contact with the image pickup device 11 is photographed.

Further, the amount of light of the white LED light source 15 is an image processing calculation and work in which the brightness of the LED irradiation region a1 included in the image captured by the imaging device 11 extracts the light cutting line a2 included in the captured image described later and converts the shape. The brightness is set so as not to affect the shape observation by the operator, and the brightness of the LED irradiation area a1 included in the captured image is set to the brightness that does not interfere with the shape observation of the object to be measured by the operator. .. The white LED light source 15 is a laser in a plane in which the mirror 14 bends only the irradiation light portion near the relatively bright optical axis of the irradiation light of the white LED light source 15, and the bent irradiation light abuts the wheels 7. It is arranged so as to irradiate a position avoiding the irradiation area by the slit light.

That is, as shown in FIG. 5, the irradiation light of the white LED light source 15 does not have the same amount of light as the whole irradiation light, but the amount of light becomes smaller and darker as it approaches the peripheral edge of the irradiation light. Therefore, when the target area is directly irradiated with the white LED light source 15, not only the target area but also the surrounding area becomes vaguely bright. Therefore, only the relatively bright portion of the irradiation light of the white LED light source 15, that is, the irradiation light near the optical axis is reflected by the mirror 14, and the irradiation light of the relatively dark peripheral portion is not reflected. As a result, it is possible to locally brighten only a specific region irradiated by the irradiation light reflected by the mirror 14. Since the surroundings of the specific area are not irradiated and are darker than the specific area, even if the light cutting line a2 and the LED irradiation area a1 are arranged relatively close to each other so as to be within the field of view of the image pickup apparatus 11. , It is possible to suppress that the irradiation light of the white LED light source 15 affects the image processing calculation and the observation of the optical cut line a2. By displaying the light cutting line a2 and the LED irradiation area a1 in one captured image, when the wheel 7 is brought into contact with the measurement object, the light cutting line a2 by the image processing calculation is performed in one captured image. The measurement of the object to be measured and the observation of the object to be measured in the LED irradiation area a1 can be performed at the same time.

Further, when the wheel 7 is brought into contact with a plane and the head portion 2 is maintained so that the optical axis of the image pickup device 11 is parallel to the plane with which the wheel 7 is abutted, the image is bent by the mirror 12. The optical axis of the device 11 and the laser slit light bent by the mirror 14 are arranged so as to overlap each other on a straight line connecting the contact points between the wheels 7a and 7b and the plane. Therefore, as shown in FIG. 4, the captured image obtained by the imaging device 11 has a high-intensity optical cutting line a2 extending to the left and right at substantially the center of the captured image in the vertical direction, and the optical cutting line a2 of the captured image. The image is an image in which the wheels 7a and 7b are located in the vicinity of the left and right extension lines, and the LED irradiation region a1 is further arranged below the light cutting line a2. When the object to be measured is a flat surface, the optical cut line a2 is a high-intensity substantially straight line.

The focal point of the image pickup device 11 and the laser slit light is such that the wheel 7 is brought into contact with a plane and the head portion 2 is maintained so that the optical axis of the image pickup device 11 is parallel to the plane to which the wheel 7 is abutted. , The wheel 7 is adjusted so as to be in focus on the plane in contact with the wheel 7.
By providing the mirror 14 in this way, the light cutting line a2 that originally uses a filter or the like to avoid the entry of ambient light as much as possible, and the LED irradiation area a1 for observing the object to be measured with bright illumination are provided. , Can coexist in the field of view of the image pickup apparatus 11 without using a filter.

By scanning the head portion 2, the portion where the pattern of the optical cut line a2 was previously photographed moves to the LED irradiation region a1 at the next timing as the head portion 2 moves. The appearance of the portion where the pattern of a2 is observed can be observed by the LED irradiation area a1 at the following timing. That is, the uneven shape and appearance of the measurement portion can be visually confirmed within the same visual field.

Returning to FIGS. 1 and 2, the wheel 7 is made of a member having a property of attracting a magnetic material such as a magnet, and is attracted to a measurement object such as a water wheel blade made of a magnetic material such as steel. ing.
Further, a rotary encoder 8 is attached to one leg portion 6 such as 6a, and a rotary member 8a such as a pulley or a pulley that rotates integrally with the wheel 7a provided on the leg portion 6a and the rotary encoder 8 form a timing belt 8b. It is connected by. The rotation angle information of the wheel 7 is transmitted to the rotary encoder 8 via the timing belt 8b, and the rotary encoder 8 outputs a pulse signal according to the rotation speed of the wheel 7. The pulse signal output from the rotary encoder 8 is input to the analysis processing unit 3 via the signal cable 8c.

As shown in FIG. 1, the analysis processing unit 3 includes a tablet-type personal computer (hereinafter, also referred to as a tablet PC) 21, a connected device such as a USB hub 22, a counter unit 23 including a counter board, and a battery unit. 24 and.
The USB hub 22 is connected to the image pickup device 11 via the USB cable 11b, and outputs the image pickup information by the image pickup device 11 to the tablet PC 21. Further, the USB hub 22 outputs the count number in the counter unit 23 to the tablet PC 21.

The counter unit 23 counts the pulse signal input from the rotary encoder 8 according to the rotation speed of the wheel 7. The count number counted by the counter unit 23 is output to the tablet PC 21 via the USB hub 22.
The battery unit 24 supplies electric power to the tablet PC 21 and also supplies electric power to the laser slit light source 13 via the power cable 13a. Further, power is supplied to the white LED light source 15 via the power cable 15a.

The tablet PC 21 includes an input device, a display device, an arithmetic processing unit, a storage unit such as a memory, and the like, and controls the entire three-dimensional shape measuring device 1 according to an input operation of an operator. Further, as shown in FIG. 4, for example, the tablet PC 21 displays the captured image on the display screen of the tablet PC 21 based on the captured information from the imaging device 11. That is, as the head portion 2 moves, the captured images of the measurement object taken by the image pickup device 11 at each position on the measurement object are sequentially input to the tablet PC 21, and the image is captured at each position on the display screen of the tablet PC 21. Images are displayed in sequence. By looking at the display screen, the operator can observe the state of the surface of the measurement object at each position on the measurement object.

Since the image pickup information input to the image pickup apparatus 11 is inverted by the mirror 12, if the image pickup image is displayed using this image pickup information as it is, the image pickup image inverted upside down will be displayed. Therefore, the tablet PC 21 executes an inversion process of flipping the image pickup information upside down, and displays the captured image on the display screen based on the image pickup information after the inversion process. As a result, it is possible to display an image captured as if the mirror 12 does not exist and the surface of the object to be measured is directly photographed by the image pickup device 11. Therefore, the operator can observe the surface to be measured as if he / she is directly visually observing it without any discomfort.

Further, the tablet PC 21 sequentially stores the image pickup information of the image pickup apparatus 11 in a predetermined storage unit in association with the count number. Then, after the scanning of the head unit 2 is completed, the tablet PC 21 places the image pickup information at any position on the measurement object based on the image pickup information of the image pickup device 11 stored in the storage area and the count number by the counter unit 23. It detects whether it is the image pickup information taken when the head portion 2 is positioned, analyzes the three-dimensional shape of the object to be measured based on this, and displays the three-dimensional shape image.
In the tablet PC 21, for example, the head portion 2 is scanned along the plane while the wheels 7 are brought into contact with the plane and the optical axis of the image pickup apparatus 11 is maintained so as to be parallel to the plane with which the wheels 7 are abutted. The amount of movement per pulse signal input from the rotary encoder 8 is detected in advance from the amount of movement of the head unit 2 and the number of counts in the counter unit 23 when the head unit 2 is moved in the direction. Then, in the tablet PC 21, the movement amount of the head portion 2 on the measurement object is calculated by multiplying the movement amount per pulse by the count number at the time of measurement.

Further, in the tablet PC 21, the three-dimensional shape of the object to be measured is calculated by using the optical cutting method. For example, it is calculated by the following procedure.
First, the optical cut line a2 is extracted from the laser slit light pattern for each image captured by the image pickup device 11, and the positions of the points where the light cut line a2 is extracted on the orthogonal coordinate system are calculated. Let (x, y, z) be the position of each point on the optical cut line a2 extracted here on the Cartesian coordinate system. This Cartesian coordinate system is a coordinate system set for the captured image captured by the image pickup device 11, and as shown in FIG. 4, the orthogonal coordinate system is the Y axis which is the direction in which the optical axis of the image pickup device 11 extends in the captured image. The parallel direction, that is, the vertical direction of the captured image is the y-axis, the direction orthogonal to the y-axis is the x-axis, that is, the left-right direction of the captured image is the x-axis, and the direction orthogonal to the x-axis and the y-axis in the captured image is It is the z-axis.

Assuming that the position of each point on the extracted optical cutting line a2 on the Cartesian coordinate system is (x, y, z), the position of the head portion 2 in the Y-axis direction is Y0 as shown in FIG. From the image of the optical cutting line a2 taken at a certain timing, the coordinate values (x, y, z) of each point on the xyz Cartesian coordinate system obtained by the optical cutting line a2 alone are set to the measurement target of the head portion 2. The data (x, Y0 + y, z) obtained by adding the position Y0 on the object is obtained as three-dimensional data. Similarly, the position of each point on the optical cut line a2 when the position of the head portion 2 is moved to the Y-axis direction mirror 12 side and measured at the nth position Yn is obtained as (x, Yn + y, z). Therefore, the position information of the optical cutting line a2 is detected from the image of each optical cutting line a2 measured while moving the head unit 2, the position information of the head unit 2 is integrated, and this is synthesized for all the measured captured images. Then, it is possible to obtain a three-dimensional shape of the object to be measured in the entire measured area. Since FIG. 6 is a schematic representation for explaining the calculation method of the three-dimensional shape, the pitch of the optical cutting line extraction is roughened, but in reality, the measurement is performed at a dense pitch. There is.

7 and 8 are flowcharts showing an example of the processing procedure of the image processing operation in the tablet PC 21.
Here, when measuring the three-dimensional shape, the operator grips the head portion 2 as shown in FIG. 3A, brings the wheel 7 into contact with the surface of the object to be measured, and causes the image pickup apparatus 11. While maintaining the head portion 2 so that the optical axis of the object is parallel to the surface of the object to be measured, the head portion 2 is moved along the surface of the object to be measured in the Y-axis direction.
As shown in FIG. 7, at the time of measurement, the tablet PC 21 causes the image pickup device 11 to take a picture of the object to be measured at a preset timing.

Then, the image pickup information is read from the image pickup apparatus 11, and the count number is read from the counter unit 23 (step S1). The counter unit 23 resets the count number to zero at the start of measurement.
Then, the captured image is displayed on the display device of the tablet PC 21 based on the captured information, and the captured image read in step S1 and the count number are associated and stored in the storage unit (step S2).
When the processes of steps S1 and S2 are repeated and a predetermined number of data are read (step S3), the measurement is terminated. For example, when the number of data is read according to the storage capacity of the storage unit in the tablet PC 21 set in advance, or when the tablet PC 21 is operated by the operator to instruct the end of measurement. End the measurement.

As a result, the area illuminated by the laser slit light source 13 and the white LED light source 15 of the measurement object photographed by the image pickup device 11 is sequentially updated as the head portion 2 moves, and is displayed on the display device of the tablet PC 21. Is displayed.
When the tablet PC 21 performs analysis using the image pickup information measured in this way, first, as shown in FIG. 8, the tablet PC 21 first reads the image pickup information associated with the count number from the storage unit (step S11).
The optical cut line a2 is extracted from the captured image based on the captured information (step S12), and the optical cut line a2 is converted into shape data on xyz Cartesian coordinates in the captured image (step S13).

Subsequently, the count number is multiplied by the moving distance per pulse of the preset pulse signal, and converted into the position information Yn of the head unit 2. This Yn represents the moving distance from the position of the head portion 2 at the start of measurement (step S14).
By synthesizing the shape data in the xyz orthogonal coordinate system on the captured image obtained in step S13 and the position of the head portion 2 obtained in step S14, the object to be measured from Y0 to Yn. Three-dimensional data is constructed at the portion corresponding to the optical cut line a2 of (step S15).

Then, if the processing of steps S11 to S15 is repeated until the three-dimensional data is generated for all the predetermined captured images and the three-dimensional data is created for all the predetermined captured images (step S16), the image is taken from the start of shooting. The three-dimensional shape corresponding to the region on the surface of the object to be measured scanned until the end time is displayed on, for example, the display device of the tablet PC 21. In addition, analysis is performed based on the obtained three-dimensional shape, and the analysis result is displayed on the display device. Then, the process is terminated (step S17).
In the analysis based on the three-dimensional shape, for example, the maximum depth, the area of the wear portion, and the like are calculated for the unevenness and the like predicted to be the wear region obtained from the three-dimensional shape of the object to be measured.

Next, the operation of the above embodiment will be described.
As shown in FIG. 3, the operator directly grips the head portion 2 or attaches a rod-shaped jig 28 to the head portion 2 and indirectly grips the head portion 2 via the jig 28. The head portion 2 is placed on the object to be measured while the wheel 7 is brought into contact with the surface of the object to be measured and the head portion 2 is maintained so that the optical axis of the image pickup apparatus 11 is parallel to the surface of the object to be measured. Move along the surface.
As the head unit 2 moves, an image is taken by the image pickup device 11, and an image captured image corresponding to the current position of the head unit 2 on the measurement object is displayed on the display device of the tablet PC 21. Specifically, as shown in FIG. 4, the light cut line a2 and the LED irradiation area a1 of the measurement target are displayed.

By observing the captured image with the tablet PC 21 while moving the head portion 2, the operator can recognize the occurrence state of the unevenness of the measurement object from the pattern of the optical cut line a2, and display the LED irradiation area a1. By observing the image, it is possible to recognize the appearance of the vicinity of the portion where the unevenness of the measurement object is generated. That is, the shape of the object to be measured can be recognized from the light cutting line a2 and the LED irradiation area a1 as if the object to be measured is visually observed.
Further, as the head unit 2 moves, the imaging information at each time point on the surface of the object to be measured is associated with the count number in the counter unit 23 and stored in the storage unit of the tablet PC 21.

After the measurement is completed, when the operator performs an operation instructing the start of the analysis process, for example, on the tablet PC 21, the analysis process is performed on the image pickup information stored in the storage unit, and the three-dimensional shape of the object to be measured is formed. It is displayed on the display device, and the maximum depth of the unevenness existing in the object to be measured, the area of the portion where the unevenness is generated, and the like are displayed.
By looking at this display, the operator can recognize the state of occurrence of unevenness of the object to be measured, the area where the unevenness is generated, the depth, and the like.

In this way, by moving the head portion 2 along the surface of the measurement object with the wheel 7 in contact with the surface of the measurement object, the state of the surface of the measurement object can be changed to the light cutting line a2 and the light cutting line a2. It is displayed on the display device as an captured image of the LED irradiation area a1. Therefore, the operator can easily recognize the three-dimensional shape of the surface of the measurement object by looking at the captured image without actually visually observing the measurement object. Further, when the acquisition of the optical cut line a2 and the acquisition of the captured image of the surface of the measurement target are individually performed, in order to obtain the captured image of the surface of the measurement target corresponding to the optical cut line a2. In order to obtain the optical cut line a2, it is necessary to scan the scanned portion again, and if the scanned portion is displaced, the captured image of the surface corresponding to the optical cut line a2 cannot be obtained. .. In the case of the three-dimensional shape measuring device 1 shown in FIG. 1, the optical cut line a2 and the captured image of the surface corresponding to the optical cut line a2 can be obtained by one scanning, the usability can be improved, and the light can be improved. An image of the surface corresponding to the cutting line a2 can be easily obtained.

Further, as shown in FIG. 1, the head portion 2 is formed by arranging an image pickup device 11 and a laser slit light source 13 which are long in the Y-axis direction in FIG. 1 along the Y-axis direction and providing a mirror 12 and a mirror 14. , The optical path length in the Z-axis direction, that is, in the height direction is shortened. Therefore, the Z-axis direction of the head portion 2 and the leg portion 6 is compared with the case where the optical axis of the image pickup apparatus 11 and the irradiation direction of the laser slit light source 13 are arranged so as to be perpendicular to the surface of the object to be measured. The length of the head portion 2 can be made shorter, and the head portion 2 can be made thinner and smaller accordingly.

Therefore, even when measuring the shape of the turbine blades of a hydropower plant, or when measuring an object to be measured that exists in a narrow space around the object to be measured, the wheels 7a and 7b are to be measured. It can be moved while in contact with an object. Then, although the operator cannot visually check the state of the object to be measured at the current position of the head portion 2, the tablet PC 21 displays the status of the measurement target at the current position of the head portion 2, so that the operator moves the head portion 2 while looking at the captured image. Therefore, it is possible to easily grasp the unevenness of the portion that cannot be visually observed. In other words, since the actual wear status of the turbine blades, which cannot be visually observed, can be grasped, the timing of repairing the turbine blades can be accurately determined, and as a result, the cycle of inspection and repair of the turbine blades can be extended. Can be done.

When measuring the shape of a large member such as a water turbine blade of a hydroelectric power plant, the tablet PC 21 and the head portion 2 are carried, and the measurement is performed while scanning the head portion 2 and referring to the captured image displayed on the tablet PC 21. You just have to do.
Further, the measurement can be performed by a simple operation of moving the head portion 2 along the surface of the measurement target in a state where the wheel 7 is in contact with the surface of the measurement target, and the measurement can be performed with the head portion 2. Since it can be realized at low cost with a simple configuration of the processing unit 3, usability can be improved and a highly versatile three-dimensional shape measuring device can be realized.

Further, the two legs 6a and 6b arranged in the X-axis direction orthogonal to the Y-axis direction which is the scanning direction of the head portion 2 are fixed to the gantry 5, and the wheels 7a and 7b provided on the legs 6a and 6b are provided. The head portion 2 is maintained so that the optical axis of the image pickup apparatus 11 is parallel to the surface of the object to be measured in a state of being in contact with the surface of the object to be measured. Here, when the object to be measured has a complicated shape such as a combination of a flat surface and a curved surface having a different curvature, when the head portion 2 is supported by four wheels, the shape is formed at the portion where each wheel contacts. When different irregularities occur, the gantry 5 can be supported by four wheels, but the head portion 2 can be held so that the optical axis of the image pickup apparatus 11 is parallel to the surface of the object to be measured. It will be difficult. Therefore, the object to be measured and the head portion 2 cannot be kept at a constant distance, and the obtained optical cut line a2 has not only the vibration caused by the unevenness generated in the object to be measured but also the shape of the object to be measured itself. The resulting vibration may also be included.

On the other hand, in the head portion 2 shown in FIG. 1, the optical axis of the image pickup apparatus 11 is parallel to the surface of the measurement object in a state where the two wheels 7a and 7b are in contact with the surface of the measurement object. The head portion 2 is maintained, and the distance between the object to be measured and the head portion 2 is maintained only through the legs 6a and 6b. Therefore, the distance between the object to be measured and the head portion 2 can be kept more constant as compared with the case where the head portion 2 is supported by four wheels, and the measurement object due to the shape of the object to be measured itself can be maintained. It is possible to suppress the fluctuation of the distance between the object and the head portion 2. As a result, since the measurement object can be measured under the condition that the image pickup device 11 and the laser slit light are in focus, it is possible to more accurately detect the minute uneven shape of the surface of the measurement object. .. Further, it is possible to reduce the size of the three-dimensional shape measuring device 1 by providing two wheels as compared with the case where four wheels are provided.

Further, the optical axis of the image pickup apparatus 11 bent at a right angle by the mirror 12 and the laser slit light emitted from the laser slit light source 13 bent by the mirror 14 are brought into contact with the wheels 7a and 7b. By overlapping on a straight line connecting the contacts with the flat surface, the irradiation light of the laser slit light source 13 bent by the mirror 14 illuminates the straight line connecting the contacts between the wheels 7a and 7b and the object to be measured. I try to do it. Therefore, while the operator holds the head portion 2 so that the optical axis of the image pickup apparatus 11 is parallel to the surface of the object to be measured, the head portion 2 tilts back and forth in the scanning direction of the head portion 2 due to camera shake or the like. Even so, the change in the irradiation position of the laser slit light due to the change in the posture of the head portion 2 is such that the irradiation light of the laser slit light source 13 bent by the mirror 14 causes the contact between the wheels 7a and 7b and the object to be measured. It is smaller than the case of irradiating a position farther in the Y-axis direction than the connecting straight line.

For this reason, an error occurs in the optical cut line a2 due to the fact that the posture of the head portion 2 cannot be kept constant due to camera shake or the like and the distance between the object to be measured and the head portion 2 cannot be kept constant. As a result, it is possible to suppress a decrease in the measurement accuracy of the three-dimensional shape.
Further, the optical axis of the image pickup device 11 bent at a right angle by the mirror 12 and the laser slit light bent by the mirror 14 are a straight line connecting the contact points between the wheels 7a and 7b and the plane on which the wheels 7 abut. By overlapping on the above, the image pickup device 11 takes an image of a region including a straight line connecting the contact points with the straight line connecting the contact points between the wheels 7 and the plane on which the wheels 7 are in contact. There is. Therefore, in the captured image, the optical cut line a2 is displayed located at the center in the vertical direction, and in the captured image, the center in the vertical direction serves as a reference for the optical cut line a2, so that the amplitude direction of the optical cut line a2 is visually easy. As a result, it is possible to easily recognize whether the object to be measured is concave or convex.

Further, in the wear measurement of the turbine blades, the purpose is not to measure the curved surface shape of the entire turbine blades themselves, but to measure the local wear shape of the curved surface shapes of the entire turbine blades. .. In the present embodiment, as described above, the wheel 7 is brought into contact with the surface of the object to be measured, and the head portion 2 is maintained so that the optical axis of the image pickup apparatus 11 is parallel to the surface of the object to be measured. By moving along the surface of the object, the distance between the object to be measured and the head portion 2 can be made constant, so that the change in the curved shape of the entire turbine blade is not detected. Only local wear shapes can be measured.

Further, since the wheel 7 is composed of a magnet or the like, when the object to be measured is made of iron or a material made of steel such as stainless steel having magnetism, the wheel 7 is always attracted to the object to be measured and the wheel 7 is generated. Rotates without slipping. Therefore, the pulse signal output from the rotary encoder 8 becomes a signal that reflects the rotation speed of the wheel 7 with high accuracy, and the position of the head portion 2 on the measurement object can be detected with high accuracy.
Further, since the wheel 7 is always attracted to the object to be measured by the magnet, the shape of the surface of the object to be measured can always be measured with reference to the contact point of the wheel 7 with the object to be measured.

Further, since the wheel 7 is attracted to the object to be measured, the scanning direction of the head portion 2 is restricted by the direction of the wheel 7. Therefore, since slip in the left-right direction is not suppressed, the head portion 2 can be stably moved in the front-rear direction, and measurement can be performed even in a place other than a horizontal surface such as a vertical surface or a ceiling. Can be done.
Further, since the wheel 7 is attracted to the object to be measured, the wheel 7 is always the object to be measured even when the jig 28 is attached to the head portion 2 to scan the object to be measured as shown in FIG. 3 (b). It can be moved while in contact with the surface, and stable measurement can be performed.

Further, the current position of the head portion 2 on the object to be measured is measured by using the rotary encoder 8. Therefore, when the head portion 2 is manually moved by the operator, the current position of the head portion 2 on the object to be measured can be detected with high accuracy even if the moving speed of the head portion 2 is not constant. Therefore, it is possible to construct the three-dimensional shape of the measurement object detected based on the current position of the head portion 2 with higher accuracy.
Further, by using the three-dimensional shape measuring device 1 in the present embodiment, the appearance of the object to be measured can be observed on the captured image. It is possible to easily observe the wear condition of the damaged part. Further, since the appearance of the portion where the occurrence of wear is recognized from the light cutting line can be observed in the LED irradiation region a1, the visually detected and shape measurement of the worn portion can be easily performed.

In the above embodiment, the three-dimensional shape of the measurement object is calculated based on the captured images for the number of acquired predetermined data, and the depth of the unevenness of the measurement object is detected based on the three-dimensional shape. I explained, but it is not limited to this. For example, as shown in FIG. 9, a ruled line L1 for visually determining the amount of unevenness of the measurement target from the fluctuation state of the optical cut line may be superimposed and displayed on the captured image.
That is, the wheel 7 is brought into contact with the plane, and the head portion 2 is maintained so that the optical axis of the image pickup device 11 is parallel to the plane with which the wheel 7 is abutted. In the captured image of the image, the optical cut line a2 is always displayed at a position overlapping the straight line passing between the wheels 7. Therefore, the reference line L2 corresponding to this straight line and a plurality of ruled lines L1 parallel to the reference line L2 and corresponding to a predetermined amount of unevenness are superimposed and displayed.

As a result, the amount of unevenness can be quickly recognized in the captured image from the relationship between the obtained optical cut line a2 and the ruled line L1. For example, if the pitch of the ruled line L1 is set to correspond to the unevenness of 1 mm of the object to be measured, it is possible to easily recognize from the captured image how many mm of the unevenness is formed.
In particular, when evaluating the worn portion of the turbine blade, the degree of wear may be evaluated based on the maximum depth of the worn portion. In that case, the head portion 2 is scanned so as to include the area including the worn portion, and the amplitude state of the optical cutting line a2 is observed from the captured image to find the position where the amplitude of the optical cutting line a2 is maximized. The approximate maximum depth can be easily recognized without performing three-dimensional shape calculation.

Further, since the captured image includes the light cut line a2 and the LED irradiation area a1, the LED irradiation area a1 is a photograph of a region in the vicinity of the portion corresponding to the light cut line a2 of the measurement target, and therefore the LED. By referring to the irradiation region a1, the appearance shape in the vicinity of the portion corresponding to the light cutting line a2 can be observed. That is, since the appearance of the vicinity of the portion whose maximum depth is determined by the light cutting line a2 can be observed in the LED irradiation region a1, it can be observed in the same manner as when the object to be measured is visually observed.

Further, at this time, since only the LED irradiation area a1 is locally irradiated, even if the irradiation for the LED irradiation area a1 and the irradiation for the light cutting line a2 are performed at the same time, the LED irradiation area a1 The light cut line a2 does not become difficult to see due to the brightness of the LED irradiation region a1 and the light cut line a2 can be included in the captured image at the same time. Therefore, for example, it is not necessary to separately provide an image pickup device for shooting the LED irradiation area a1 and an image pickup device for shooting the light cut line a2, and the LED irradiation area a1 and the light cut line a2 are both provided by one image pickup device 11. You can shoot. That is, since the number of components of the three-dimensional shape measuring device 1 can be reduced, the size of the head portion 2 can be reduced accordingly. Further, since the mirror 14 for bending the laser slit light is used to reflect the irradiation light of the white LED light source 15, it is not necessary to separately provide a mirror for reflecting the irradiation light of the white LED light source 15. Therefore, the size of the head portion 2 can be reduced.

Further, in the above embodiment, the optical axis of the image pickup apparatus 11 bent by the mirror 12 and the irradiation light of the laser slit light source 13 bent by the mirror 14 are brought into contact with the wheels 7a and 7b. By overlapping on a straight line connecting the contact points with the plane, the optical cut line a2 is located at the center of the image captured by the image pickup device 11 in the vertical direction. Therefore, even if the head portion 2 is tilted from the measurement target surface, the fulcrum of the tilt becomes the tire central axis, so that the deviation of the optical cutting line position due to the tilt of the head portion 2 is small at the reference height (tire contact patch). There is little height error due to shape calculation.
Further, since the three-dimensional shape can be constructed by scanning the head portion 2 along the measurement object, if the head portion 2 can be scanned, the measurement object is not limited to the water turbine blade and has a free shape. Three-dimensional measurement can be performed.

<Modification 1>
In the above embodiment, the optical axis of the image pickup device 11 bent by the mirror 12 and the irradiation light of the laser slit light source 13 bent by the mirror 14 are the points of contact between the wheels 7a and 7b and the plane on which the wheels 7 abut. The case where they overlap on a straight line connecting the spaces has been described, but the present invention is not limited to this. With the wheel 7 in contact with a flat surface and adjusted so that the raster direction of the camera optical axis and the laser slit light are parallel to each other, the straight line connecting the contact points between the wheels 7a and 7b and the flat surface corresponds to the wheel 7. It may be back and forth parallel to the Y-axis direction on the tangent plane. That is, for example, as shown in FIG. 10A, the positional relationship between the optical axis of the image pickup apparatus 11 bent by the mirror 12 and the center of the laser slit light bent by the mirror 14 remains the same, and only the leg portion 6 is used. May be provided at the tip of the head portion 2 on the mirror 12 side, or conversely, as shown in FIG. 10B, only the leg portion 6 may be provided in the vicinity of the laser slit light source 13. In this way, even if the leg portion 6 is moved, if the head portion 2 is parallel to the surface of the object to be measured, the measurement accuracy is the same, but the optical axis and the leg portion position are different, so that the head portion The larger the inclination of 2, the larger the height measurement error. Therefore, it is preferable that the head portion 2 is scanned so as to be parallel to the surface of the object to be measured.

Although the three-dimensional shape measuring device 1 is simplified in FIGS. 10A and 10B, it has the same configuration as the three-dimensional shape measuring device 1 shown in FIG. 1, although the arrangement position is different.
Similarly, the optical axis of the image pickup device 11 bent by the mirror 12 is measured at a position distant from the straight line connecting the contact points between the wheels 7a and 7b and the object to be measured in the Y-axis direction, that is, the wheels 7a and 7b. It may intersect with the object to be measured within a preset area including a straight line connecting the points of contact with the object. In this case, since the display position of the optical cut line in the captured image shifts in the vertical direction of the captured image, the optical axis of the image pickup device 11 intersects with the image pickup object in consideration of the display position of the optical cut line in the captured image. The position, that is, the image pickup center of the image pickup apparatus 11 may be set.

<Modification 2>
In the above embodiment, the case where the wheel 7 made of a magnet or the like is used has been described, but the present invention is not limited to the wheel, and can be applied to any rotating body such as a roller or a ball caster that can rotate in the scanning direction. can. From the viewpoint of scanning the head portion 2 in one direction with respect to the object to be measured, if a rotating body such as a wheel or a roller whose rotation direction is restricted to one direction is used, camera shake or the like during scanning can be reduced.

Further, the wheel 7 is not limited to a magnet, but is formed by forming a rotating body with a material having a property of sticking to an object to be measured, for example, by arranging an attractive member such as a suction cup sheet on the surface of the wheel 7. May be kept stuck to the object to be measured.
Further, for example, the legs 6 may be brought into direct contact with the surface of the object to be measured without providing the wheels 7. When the wheel 7 is not provided, the head portion 2 tilts with the contact point of the leg portion 6 with the object to be measured as a fulcrum. When the wheel 7 is provided, the head portion 2 is tilted with the rotation center of the wheel 7 as a fulcrum. Therefore, when the wheel 7 is not provided, the error of the optical cutting line caused by the tilting of the head portion 2 is reduced. be able to.

<Modification 3>
In the above embodiment, the case where the current position of the head portion 2 on the measurement object is detected by the rotary encoder 8 has been described, but the present invention is not limited to this. For example, a linear encoder is used as a movement amount detection unit for detecting the movement amount of the head unit 2, a fixed point is provided on a part of the surface of the measurement object, and a sensor unit of the linear encoder is provided on the head unit 2 to provide the measurement object. The movement distance from the fixed point is measured by providing a scale part of the linear encoder with the fixed point as a reference, or by providing a distance sensor in the head part and detecting the movement distance from the fixed point with the distance sensor. You may do it. When the wheels 7 are not provided, the position of the head portion 2 may be detected by such a distance sensor.

Further, for example, in order to easily detect the amount of movement of the head portion 2, the captured images may be captured at equal time intervals. In this case, if the moving distance of the head portion 2 is determined in advance and the head portion 2 moves at a constant speed within the range of the determined moving distance, the moving amount can be easily detected.

<Modification example 4>
In the above embodiment, only two legs 6a and 6b are fixed to the head portion 2, and the wheels 7a and 7b provided on the legs 6a and 6b are brought into contact with the surface of the object to be measured for measurement. The case where the distance between the object and the head portion 2 is kept constant has been described, but the present invention is not limited to this. For example, when the surface of the object to be measured is a relatively gentle curved surface or a flat surface, the position in the Y-axis direction is different from that of the legs 6a and 6b, apart from the legs 6a and 6b. , 6b is newly provided with legs having the same length, and all these legs are brought into contact with the surface of the object to be measured. As a result, the head portion 2 may be maintained so that the optical axis of the image pickup apparatus 11 is parallel to the surface of the object to be measured. In this case, the newly provided legs are configured to be removable, and when the surface of the object to be measured has a relatively gentle curved surface or a flat surface, the removable legs are attached so that the surface of the object to be measured is smooth. It may be configured to be switchable between a three-dimensional shape measuring device for cases and a three-dimensional shape measuring device for cases where the surface of the object to be measured has a relatively complicated uneven shape.

Further, a leg portion having a length slightly shorter than the leg portions 6a and 6b is newly provided at a position different from the leg portions 6a and 6b in the Y-axis direction, and the leg portion 6a and 6b are used when measuring the object to be measured. When only 6b is brought into contact with the surface of the object to be measured and the movement of the head portion 2 is temporarily stopped during the measurement, the legs 6a and 6b and the newly provided shorter legs are provided. The head portion 2 may be configured to be self-supporting when the measurement is not in progress by bringing it into contact with the surface of the object to be measured.

<Modification 5>
In the above embodiment, the case where the image pickup information is constantly output from the image pickup apparatus 11 has been described, but the present invention is not limited to this. For example, a trigger signal is generated from the counter unit 23 for each predetermined movement distance and output to the image pickup device 11, and the image pickup information is transmitted to the tablet PC 21 at the timing when the image pickup device 11 receives the trigger signal. As a result, the image information may be output to the tablet PC 21 each time the head portion 2 moves a certain distance.

<Modification 6>
In the above embodiment, the image of the LED irradiation area a1 is also obtained by providing the white LED light source 15, but it is not always necessary to acquire the image of the LED irradiation area a1. For example, if it is only necessary to be able to construct a three-dimensional shape such as an ornament crafted on a curved surface and the state of the surface can be visually observed, the image pickup device 11 collects light cut lines by laser slit light. Then, a three-dimensional shape can be constructed. In this case, it is not always necessary to display the captured image on the display device. In this case, as in FIG. 9, if a ruled line for visually determining the amount of unevenness of the object to be measured is superimposed and displayed from the fluctuation state of the optical cut line a2, the unevenness of the object to be measured is displayed on the display screen. The degree of can be easily recognized.

<Modification 7>
In the above embodiment, the case where the head portion 2 is scanned in the Y-axis direction, that is, on the mirror 12 side has been described, but the present invention is not limited to this, and the head portion 2 may be scanned on the opposite side to the mirror 12. good. When scanning the head portion 2 on both the mirror 12 side and the opposite side, for example, in the tablet PC 21, the scanning direction may be input, and the three-dimensional shape may be constructed in consideration of the set scanning direction.

<Modification 8>
As shown in FIG. 1, a head portion 2 including an image pickup device 11 and a mirror 12 arranged on the upper side of the gantry 5, a laser slit light source 13 arranged on the lower side of the gantry 5, a mirror 14, and a white LED light source 15. The laser slit light source 13, the mirror 14, and the white LED light source 15 are arranged on the upper side of the pedestal 5, for example, as shown in FIG. The image pickup device 11 and the mirror 12 may be arranged.
Further, in FIG. 11, the image pickup device 11 and the laser slit light source 13 may be interchanged.

In FIG. 11, a USB camera such as a video camera or a WEB camera is used as the image pickup device 11.
As shown in FIG. 11, by arranging the image pickup apparatus 11 on the lower side of the gantry 5 and arranging the laser slit light source 13 on the upper side of the gantry 5, the light cut line due to the slit light of the laser slit light source 13 is obtained by this light. The laser slit light source 13, the mirror 14, and the image pickup device 11 and the mirror 12 can be arranged so as to take an image from the inside of the cutting line. That is, the optical cutting line due to the laser slit light can be arranged at a position closer to the tip in the scanning direction of the head portion 2.

Here, for example, in the case of the head portion 2 shown in FIG. 1, since the formed optical cutting line is formed inside the tip of the head portion 2 in the scanning direction, for example, the head portion 2 is scanned to the end. Even so, measurement can be performed only from the tip in the scanning direction of the head portion 2 to the inner position by the distance corresponding to the distance between the tip in the scanning direction of the head portion 2 and the optical cutting line formed by the laser slit light. On the other hand, in the case of the head portion 2 shown in FIG. 11, an optical cutting line can be formed at a position closer to the tip of the head portion 2 in the scanning direction. Therefore, the measurable range can be further expanded, and for example, when the head portion 2 is scanned until it hits the wall, the measurement object can be measured to a position closer to the wall.

<Modification 9>
In the above embodiment, the mirrors 12 and 14 bend the optical axis and the laser slit light of the image pickup device 11 so that the optical axis and the laser slit light of the image pickup device 11 are brought into contact with the wheel 7 on a plane. Although the case of overlapping is described, it is also possible to configure the mirrors 12 and 14 without providing them.

For example, as shown in FIG. 12, a USB camera such as a board camera is used as the image pickup device 11, the lens 11a of the image pickup device 11 is directed downward, and the optical axis of the image pickup device 11 is perpendicular to the XY plane. The image pickup apparatus 11 is arranged on the gantry 5. Further, the laser slit light source 13 is tilted and arranged on the gantry 5 so that the laser slit light overlaps with the optical axis of the image pickup device 11 on the plane on which the wheels 7 are in contact. Further, the white LED light source 15 is arranged on the gantry 5 so that the irradiation side faces downward and the irradiation position does not overlap with the irradiation position of the laser slit light. Then, the leg portion 6 is provided at a position where the head portion 2 overlaps with the lens 11a of the image pickup device 11.
As a result, when viewed from the side surface, the optical axis of the image pickup device 11, the laser slit light, and the leg portion 6 overlap on the surface of the object to be measured, and the region that does not overlap with the irradiation position of the laser slit light is formed by the white LED light source 15. It will be irradiated, and in this case as well, the same effect as in FIG. 1 can be obtained.

Further, in the case of FIG. 12, since the lens 11a of the image pickup apparatus 11 faces the surface of the measurement object, the obtained captured image is the same as when the operator sees the measurement object. Therefore, unlike the case where the mirror 12 is provided, it is not necessary to perform processing such as adjusting the orientation of the captured image, and the processing load can be reduced accordingly.
In the case of FIG. 12, since it is not necessary to provide the mirrors 12 and 14, the optical axis can be easily adjusted and the number of parts can be reduced accordingly. Further, it is not necessary to consider the dirt and the like adhering to the mirrors 12 and 14, and the usability can be improved.

<Modification 10>
In the above embodiment, a case where the light cutting line a2 of the object to be measured formed by the laser slit light and the LED irradiation area a1 which is a region different from the region irradiated with the laser slit light are displayed side by side has been described. However, for example, the area including the irradiation area of the laser slit light is irradiated with the LED light source, and the light cutting line a2 formed by the laser slit light and the captured image of the irradiation area of the laser slit light are superimposed and displayed. May be good.

That is, for example, as shown in FIG. 13, in the three-dimensional shape measuring device shown in FIG. 12, a laser slit light source 16 that irradiates a red laser beam composed of a red semiconductor laser or the like is used instead of the laser slit light source 13. The laser slit light source 16 is tilted and arranged on the gantry 5 so that the laser slit light overlaps with the optical axis of the image pickup device 11 on the plane on which the wheels 7 abut. Further, instead of the white LED light source 15, for example, a blue LED light source 17 that emits blue light is used. The blue LED light source 17 is arranged on the gantry 5 so as to irradiate an area including an irradiation area of the laser slit light. At this time, when the irradiation area by the blue LED light source 17 is the LED irradiation area a11, each device is arranged so that the LED irradiation area a11 is included in the field of view of the image pickup device 11. Further, a single-panel color camera is used as the image pickup apparatus 11. By using the single-panel color camera in this way, it is possible to reduce the size as compared with the case of using the three-panel color camera.

As shown in FIG. 14, the analysis processing unit 3 displays the captured image of the LED irradiation region a11. In this case, the analysis processing unit 3 extracts a red image corresponding to the laser slit light from the image pickup information of the image pickup device 11, and based on this red image, that is, an image representing the optical cut line a2. , Analyze the three-dimensional shape of the object to be measured.
As shown in FIG. 14, by displaying the LED irradiation area a11 including the area irradiated with the laser slit light on the screen, the operator can see the condition of the surface of the object to be measured and the light formed on the surface. Since the cutting line a2 can be recognized on the screen and the situation of the optical cutting line a2 actually formed on the measurement object can be recognized, the measurement target cannot be directly visually recognized. Even if there is, it is possible to recognize on the screen the same image as when directly visually recognizing it, and it is possible to improve usability.

Further, since the image of the laser slit light can be separated from the captured image of the LED irradiation region a11, for example, a mode of displaying only the laser slit light, that is, the light cutting line a2 and the captured image of the LED irradiation region a11 are displayed. It may be configured so that the mode to be used can be switched.
Although the case where the laser slit light source 16 that irradiates the red laser light and the blue LED light source 17 that emits the blue light are used is described here, the present invention is not limited to this. It is sufficient that the wavelength of the laser slit light emitted by the laser slit light source 16 and the wavelength of the LED illumination light emitted by the LED light source are different. In short, the light cutting line a2 is extracted from the captured image of the LED irradiation region a11. Any combination can be used as long as it can be used, and it is preferable that the wavelengths are separated. For example, the laser slit light may be green and the LED illumination light may be red or blue.

Further, when the object to be measured is a metal, the reflected light is less likely to diffuse on the metal surface when the wavelength of the light is short, so that a relatively clear captured image can be obtained. Therefore, the wavelength of the laser slit light and the wavelength of the LED irradiation light may be selected according to the material of the object to be measured.
Further, the wavelength of the laser slit light and the wavelength of the LED illumination light are not limited to different wavelengths. For example, by making the intensity of the laser slit light and the intensity of the LED illumination light different, the laser is used. The light cutting line formed by the slit light may be configured to be extracted from the captured image of the LED illumination light.

Further, the laser slit light may be constantly irradiated, and the LED illumination light may be intermittently irradiated so that the light cutting line formed by the laser slit light is extracted from the captured image of the LED illumination light. For example, the laser slit light is constantly irradiated, and the LED illumination light is turned on and off at the timing of switching the frame, for example, to acquire an image of the LED irradiation region a11 when the LED illumination light is off. The captured image may be configured to measure the three-dimensional shape as an image corresponding to the laser slit light.
Here, in the three-dimensional shape measuring device shown in FIG. 12, the case where the light cutting line a2 formed by the laser slit light and the captured image of the irradiation region of the laser slit light are superimposed and displayed has been described. In the three-dimensional shape measuring device shown in FIG. 1, the optical cutting line a2 formed by the laser slit light and the captured image of the irradiation region of the laser slit light may be superimposed and displayed. It is possible.

<Modification 11>
When the LED irradiation area a11 including the area irradiated with the laser slit light is displayed on the screen as shown in FIG. 14, further, as in FIG. 9, the captured image is measured from the fluctuation state of the light cut line a2. A ruled line for visually determining the amount of unevenness of the object may be superimposed and displayed.
In this way, although it is not possible to detect the exact amount of unevenness by superimposing and displaying the ruled lines for determining the amount of unevenness of the object to be measured, the actual surface shape of the object to be measured and the laser on this surface shape. Since the light cutting line a2 formed by irradiating the slit light and the ruled line are displayed at the same time, the operator can easily recognize the approximate value of the unevenness amount at the same time as measuring the object to be measured. It can be done and the usability can be further improved.

Further, in the case of superimposing and displaying the ruled line for visually determining the unevenness amount of the measurement object in this way, an approximate value of the unevenness amount of the measurement object can be obtained. Therefore, for example, up to the calculation of the three-dimensional shape. The actual surface shape of the object to be measured at the time of measurement and the optical cutting line a2 formed by irradiating this surface shape with laser slit light without performing the calculation of the three-dimensional shape And, by displaying the ruled line, it is possible to switch between a simple measurement mode in which the operator visually recognizes the approximate value of the unevenness amount, and the operator can select either mode at the time of measurement. It may be configured.
Further, a three-dimensional shape measuring device having only a function of executing only a simple measurement mode may be configured. In the case of a three-dimensional shape measuring device having only a function of executing only a simple measurement mode, it is not necessary to provide a rotary encoder 8 or a counter unit 23, so that the size of the three-dimensional shape measuring device can be reduced and the cost can be reduced. be able to.

<Modification 12>
In the above embodiment, as shown in FIG. 15, the amount of unevenness of the measurement target is simply calculated and displayed on the screen based on the image pickup information stored in the storage unit of the tablet PC 21 in association with the count number. It may be configured so that it can be done.
For example, by operating the tablet PC 21, the operator indicates, for example, a reproduction mode, and as shown in FIG. 15, the image pickup information obtained by photographing the LED irradiation area a11 is sequentially read out from the storage unit, and the image pickup information is displayed. Further, similarly to FIG. 9, a plurality of ruled lines L1 and a reference line L2, which enable visual measurement of the amount of unevenness, are superimposed and displayed.

Then, the display device of the tablet PC 21 is configured to be a display device equipped with a touch panel, and when the operator touches the display screen of the tablet PC 21 with a finger, the amount of unevenness at that portion is calculated and displayed on the screen. do. For example, a rectangular measurement mark M is displayed at a place touched by the operator. The measurement mark M is composed of a box portion formed of a vertically long rectangle and a vertical reference line passing through the center of the box portion in the width direction. The analysis processing unit 3 calculates the height of the position on the measurement object corresponding to the intersection position of the vertical reference line and the optical cutting line a2 detected in the box unit with the position of the reference line L2 as a reference. , Display on the screen. The operator drags the measurement mark M with a finger and aligns the vertical reference line of the measurement mark M with the position where the uneven amount of the optical cutting line a2 is to be detected, so that the measurement target corresponding to the position of the optical cutting line a2 The amount of unevenness at the position on the object can be displayed on the screen.

FIG. 16 is a flowchart showing an example of a processing procedure in the calculation processing unit of the tablet PC 21 at the time of unevenness calculation.
When the tablet PC 21 detects that a touch input has been made on the display screen, it detects the touch position (step S21) and displays the measurement mark M in the vicinity of the touch position (step S22). Then, when the operator determines that the measurement mark M is positioned by dragging the measurement mark M or the like and the measurement position is confirmed (step S23), the process proceeds to step S24.

In step S24, the height of the position on the measurement object corresponding to the intersection position of the vertical reference line and the optical cut line detected in the box is calculated. That is, the coordinate values (x, y, z) of each point on the optical cutting line a2 are calculated by the same procedure as when calculating the three-dimensional data, and the coordinate values and the reference point, that is, the distance from the reference line L2 are obtained. ..
Then, the obtained distance is displayed in the vicinity of the measurement mark M (step S25). As a result, as shown in FIG. 15, the distance, that is, the height at the point on the optical cut line a2 designated by the measurement mark M is displayed.

Here, a case where the height of the light cut line a2 is displayed with respect to the image pickup information obtained by photographing the LED irradiation area a11 including the light cut line a2 has been described. For example, the three-dimensional shape measurement shown in FIG. 1 has been described. The device may be configured to display the height of the optical cut line a2.
Further, when the height of the optical cutting line a2 is automatically calculated and displayed, the ruled line L1 used for visually measuring the unevenness amount does not necessarily have to be displayed.

<Modification 13>
Further, in the above embodiment, it is also possible to apply a mobile phone, a smart phone, or the like as the image pickup device 11.
Here, in the above embodiment, the laser slit light source 13 corresponds to the slit light source described in the scope of the patent claim, the white LED light source 15 corresponds to the illumination light source, and the rotary encoder 8, the counter unit 23, and the step S14 process. The wheel 7 corresponds to the rotating body, the rotary encoder 8 corresponds to the rotation number detecting unit, and the tablet-type personal computer 21 corresponds to the analysis processing unit.

It should be noted that the scope of the present invention is not limited to the exemplary embodiments illustrated and described, but also includes all embodiments that bring about an effect equal to that of the object of the present invention. Moreover, the scope of the invention can be defined by any desired combination of specific features of all disclosed features.

1 Three-dimensional shape measuring device 2 Head part 3 Analysis processing part 5 Stand 6, 6a, 6b Legs 7, 7a, 7b Wheels 8 Rotary encoder 11 Imaging device 12 Mirror 13 Laser slit light source 14 Mirror 15 White LED light source 16 Laser slit light source 17 Blue LED light source 21 Tablet-type personal computer (tablet PC)

Claims (18)

A head having a slit light source for irradiating a measurement object with slit light, an image pickup device, an illumination light source , a mirror for the image pickup device, an irradiation light of the illumination light source, and a mirror for a light source that bends the slit light. Department and
A pair of legs fixed to the head portion and spaced apart from each other in a direction orthogonal to the scanning direction of the head portion .
At the time of scanning, the head portion moves on the measurement object while maintaining a distance from the measurement object via only the pair of legs.
The image pickup device has a lens on the image pickup surface side and has a lens.
The mirror for the image pickup device is provided so as to face the lens.
The mirror for the light source of the image pickup device is bent by the mirror for the image pickup device when the leg portion is in contact with the plane and the optical axis of the image pickup device is maintained so as to be parallel to the plane. The optical axis and the slit light bent by the mirror for the light source are arranged so as to be parallel to a straight line connecting the contact points between the legs and the plane.
The illumination light source irradiates only the region on the measurement object excluding the optical cut line on the measurement object obtained by irradiating the slit light.
The image pickup device is a three-dimensional shape measuring device, characterized in that the light cutting line and the irradiation region of the illumination light source of the illumination light source are simultaneously included in the visual field. A head having a slit light source for irradiating a measurement object with slit light, an image pickup device, an illumination light source , a mirror for the image pickup device, an irradiation light of the illumination light source, and a mirror for a light source that bends the slit light. Department and
A display device that displays an image captured by the image pickup device, and
A pair of legs fixed to the head portion and spaced apart from each other in a direction orthogonal to the scanning direction of the head portion .
At the time of scanning, the head portion moves on the measurement object while maintaining a distance from the measurement object via only the pair of legs.
The image pickup device has a lens on the image pickup surface side and has a lens.
The mirror for the image pickup device is provided so as to face the lens.
The mirror for the light source of the image pickup device is bent by the mirror for the image pickup device when the leg portion is in contact with the plane and the optical axis of the image pickup device is maintained so as to be parallel to the plane. The optical axis and the slit light bent by the mirror for the light source are arranged so as to be parallel to a straight line connecting the contact points between the legs and the plane.
The illumination light source irradiates a region on the measurement object including a light cut line on the measurement object obtained by irradiating the slit light.
The image pickup apparatus includes an irradiation region of the illumination light source including the optical cut line by the illumination light in the field of view.
The illumination light source is characterized in that the optical cut line on the measurement object obtained by irradiating the slit light is irradiated with the illumination light that can be recognized on the screen displayed on the display device. Three-dimensional shape measuring device. The three-dimensional shape measuring device according to claim 2, wherein the illumination light source irradiates the illumination light having a wavelength or intensity different from that of the slit light. A head having a slit light source for irradiating a measurement object with slit light, an image pickup device, an illumination light source , a mirror for the image pickup device, an irradiation light of the illumination light source, and a mirror for a light source that bends the slit light. Department and
A pair of legs fixed to the head portion and spaced apart from each other in a direction orthogonal to the scanning direction of the head portion.
A display device for displaying an image captured by the image pickup device is provided.
At the time of scanning, the head portion moves on the measurement object while maintaining a distance from the measurement object via only the pair of legs.
The image pickup device has a lens on the image pickup surface side and has a lens.
The mirror for the image pickup device is provided so as to face the lens.
The mirror for the light source of the image pickup device is bent by the mirror for the image pickup device when the leg portion is in contact with the plane and the optical axis of the image pickup device is maintained so as to be parallel to the plane. The optical axis and the slit light bent by the mirror for the light source are arranged so as to be parallel to a straight line connecting the contact points between the legs and the plane.
The illumination light source irradiates a region on the measurement object including a light cut line on the measurement object obtained by irradiating the slit light.
The image pickup apparatus includes an irradiation region of the illumination light source including the optical cut line by the illumination light in the field of view.
The illumination light source is a three-dimensional shape measuring device characterized by intermittently irradiating the illumination light. A head portion having a slit light source that irradiates a measurement object with slit light , an image pickup device, a mirror for the image pickup device, and a mirror for a light source that bends the slit light .
It is provided with a pair of legs fixed to the head portion and provided at intervals in a direction orthogonal to the scanning direction of the head portion .
The image pickup device has a lens on the image pickup surface side and has a lens.
The mirror for the image pickup device is provided so as to face the lens.
The mirror for the light source of the image pickup device is bent by the mirror for the image pickup device when the leg portion is in contact with the plane and the optical axis of the image pickup device is maintained so as to be parallel to the plane. The optical axis and the slit light bent by the mirror for the light source are arranged so as to be parallel to a straight line connecting the contact points between the legs and the plane.
A three-dimensional shape measuring device, characterized in that, at the time of scanning, the head portion moves on the measurement target while maintaining a distance from the measurement target via only the pair of legs. The slit light source illuminates a preset area extending in a direction orthogonal to the scanning direction of the head portion.
The three-dimensional shape measuring device according to claim 5 , wherein the image pickup device includes an optical cut line on the measurement object obtained by irradiating the slit light in the field of view. One of claims 1 to 6 , wherein the leg portion is provided with a rotating body that rotates about an axis orthogonal to the scanning direction of the head portion at an end portion opposite to the head portion. The three-dimensional shape measuring device according to item 1. The three-dimensional shape measuring device according to claim 7 , wherein the rotating body has a property of sticking to the object to be measured. A rotation speed detection unit provided on the head unit to detect the rotation speed of the rotating body, and a rotation speed detection unit.
A position detection unit that detects the position information of the head unit on the measurement object, and a position detection unit.
Equipped with
The three - dimensional shape measuring device according to claim 7 , wherein the position detecting unit detects the position information of the head unit based on the detection value of the rotation speed detecting unit. A movement amount detection unit that detects the movement amount of the head unit with reference to a fixed point provided on the measurement object, and a movement amount detection unit.
A position detection unit that detects the position information of the head unit on the measurement object, and a position detection unit.
Equipped with
The three-dimensional shape measuring device according to any one of claims 1 to 8 , wherein the position detecting unit detects the position information of the head unit based on the detected amount of the moving amount detecting unit. .. The three-dimensional shape measuring device according to claim 1 or 5 , further comprising a display device for displaying an image captured by the image pickup device. The second aspect of the present invention is characterized in that the display device superimposes and displays a ruled line representing the amount of unevenness of the measurement object represented by the optical cutting line included in the captured image and the optical cutting line. 4. The three-dimensional shape measuring device according to any one of claims 11 . It is characterized by including an analysis processing unit that extracts a light cut line from an image captured by the image pickup device and calculates a three-dimensional shape of the measurement object based on the light cut line and the position information detected by the position detection unit. The three-dimensional shape measuring device according to claim 9 or 10 . It has a display device provided with a touch panel for displaying an image captured by the image pickup device.
The analysis processing unit is characterized in that, among the optical cutting lines included in the captured image, the amount of unevenness at a position designated by operating the touch panel is calculated, and the calculation result is displayed on the display device. 13. The three-dimensional shape measuring device according to claim 13 . The three-dimensional object according to claim 13 or 14 , wherein the measurement object is a blade of a fluid machine including a water turbine, a turbine, or the like, and the wear shape of the blade is measured from the three-dimensional shape. Shape measuring device. A three-dimensional shape measuring method using the three-dimensional shape measuring device according to any one of claims 1 to 9 .
While the operator directly grips the head portion or indirectly grips the head portion via a jig, the tip of the leg portion is brought into contact with the surface of the object to be measured, and the measurement is performed while maintaining the contact. While moving the head portion in the scanning direction along the surface of the object, the image pickup device captures the object to be measured.
The tertiary of the measurement object is based on the optical cut line on the measurement object obtained by irradiating the slit light included in the image captured by the image pickup device obtained by scanning the head portion. A three-dimensional shape measurement method characterized by calculating the original shape. A three-dimensional shape measuring method using the three-dimensional shape measuring device according to any one of claims 1 to 4 .
While the operator directly grips the head portion or indirectly grips the head portion via a jig, the tip of the leg portion is brought into contact with the surface of the object to be measured, and the measurement is performed while maintaining the contact. A three-dimensional shape measuring method characterized in that an image pickup device captures an image of a measurement object while moving the head portion in a scanning direction along the surface of the object. The object to be measured is a blade of a fluid machine including a water turbine, a turbine, or the like.
The image pickup device is provided so that its optical axis is parallel to the scanning direction of the head portion.
The three-dimensional shape measuring method according to claim 16 or 17, wherein the three-dimensional shape measuring device is used at the installation site of the fluid machine.

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