JP7081092B2 - Optical scanning equipment and measuring instruments - Google Patents

Description

The present invention relates to an optical scanning device and a measuring instrument.

Conventionally, it is known that the displacement of the rotating portion provided in the micromirror is detected by the voltage corresponding to the change in the capacitance between the comb tooth portions provided in the micromirror (see, for example, Patent Document 1). .. Further, in the optical scanning device having the first capacitive element and the second capacitive element provided with the support beam interposed therebetween, the displacement amount of the movable portion that maximizes the capacitance of the first capacitive element and the second. It is known that the displacement amount of the movable part that maximizes the capacitance of the capacitive element is different. However, in this case, it is necessary to provide a stepped portion in the thickness direction of the movable portion (see, for example, Patent Document 2).
[Prior Art Document]
[Patent Document]
[Patent Document 1] Japanese Unexamined Patent Publication No. 2005-208251 [Patent Document 2] Japanese Unexamined Patent Publication No. 2004-245890

It is desirable to specify the positive or negative (whether it is + θ degree or −θ degree) of the scanning angle in the optical scanner without providing a step portion in the thickness direction of the movable portion.

In the first aspect of the present invention, an optical scanning device is provided. The optical scanning device may include a light source unit, an optical scanning unit, a light detecting unit, and a state detecting unit. The light source unit may emit the first light and the second light. The first light may illuminate the object to be scanned. The optical scanning unit may reflect the first light and the second light. The photodetector may receive the second light. The state detecting unit may detect the state of the reflecting unit based on the change in capacitance and the output of the photodetecting unit in response to the second light. The capacitance may be formed by a predetermined region of the reflecting portion in the optical scanning portion and the detecting portion. The capacitance may change according to the tilt angle of the reflecting portion of the optical scanning portion. The optical scanning device may include a driving unit provided for swinging the optical scanning unit. The detection unit that forms the capacitance may be provided separately from the drive unit.

The photodetector may have a photoelectric conversion element. The photoelectric conversion element may be provided at least a part of the scanning length in which the optical scanning unit scans the second light in the photodetecting unit.

The photoelectric conversion element may be a linear photoelectric conversion element having a light receiving surface having a length equal to or longer than the scanning length. Instead of this, the photoelectric conversion element may be a photoelectric conversion element having a point-shaped light receiving surface. The photoelectric conversion element having a point-shaped light receiving surface may be provided at a position separated from the center position of the scanning length by a predetermined distance.

The state detection unit may correct the scanning angle based on the output of the light detection unit. The scanning angle may be an angle formed by a reflecting surface in the reflecting portion and a predetermined plane.

The optical scanning device may further include a capacitive voltage converter. The capacitance voltage converter may convert the capacitance into a voltage signal. The capacitance voltage conversion unit may make corrections so as to increase the voltage signal output by the capacitance voltage conversion unit based on the output of the photodetection unit.

The state detection unit may correct the positive or negative of the scanning angle based on the output of the light detection unit. The scanning angle may be an angle formed by a reflecting surface in the reflecting portion and a predetermined plane.

The first light and the second light may be incident on different positions of the reflecting portion.

The optical scanning device may further include an optical coupling unit. The optical coupling unit may superimpose the first light and the second light on the optical path before incident on the optical scanning unit. The second light may have a wavelength different from that of the first light.

The optical scanning device may further include an optical separator. The light separation unit may separate the first light and the second light so that the first light is incident on the object to be scanned and the second light is incident on the photodetection unit.

The optical scanning device may further include a first optical member and an additional optical scanning unit. The first optical member may reflect the first light and the second light among the light reflected from the light scanning unit. The additional optical scanning unit may reflect the first light and the second light reflected from the first optical member, respectively. The light separation unit may have the first light of the light reflected from the additional light scanning unit incident on the object to be scanned and the second light incident on the photodetection unit.

Instead of further comprising a first optical member and an additional optical scanning unit, the optical scanning device includes a second optical member, an additional optical scanning unit, an additional photodetecting unit, and a third optical unit. Further members may be provided. The second optical member may transmit a part of the second light among the light reflected from the optical scanning unit and reflect the part other than the part of the second light and the first light. .. The additional optical scanning unit may reflect the first light and the second light reflected from the second optical member, respectively. The third optical member may make the first light of the light reflected from the additional light scanning unit incident on the object to be scanned and the second light incident on the additional photodetection unit. A part of the second light transmitted through the second optical member may be incident on the photodetector.

The light source unit may continue to emit the second light while emitting the first light.

The optical scanning unit and the photodetecting unit may be provided on the same substrate.

The intensity of the second light emitted from the light source unit may be increased according to the length of use of the optical scanning unit.

In the second aspect of the present invention, a measuring instrument having an optical scanning device is provided.

The outline of the above invention does not list all the necessary features of the present invention. A subcombination of these feature groups can also be an invention.

It is a figure which shows the outline of the optical scanning apparatus 200 in 1st Embodiment. It is a figure which shows the optical scanner 30 and the CV conversion part 70. (A) shows an example of the state of the reflection unit 32, (b) shows the relationship between the inclination angle _θ and the capacitance CM, (c) shows the time change of the inclination angle θ, and (d) shows the time change. The time change of the _capacitance CM is shown. (A) is a top view of the one-dimensional PSD61, and (b) is a cross-sectional view of the one-dimensional PSD61. (A) shows the time change of the inclination angle θ, (b) shows the time change of the position of the center of gravity _gZ of the light amount in the photodetector 60, and (c) shows the time change of the output voltage in the CV conversion unit 70. .. It is a figure which shows the optical scanning apparatus 210 which is the 1st modification of 1st Embodiment. It is a figure which shows the optical scanning apparatus 220 which is the 2nd modification of 1st Embodiment. It is a figure which shows the photoelectric conversion element 68 which the light receiving surface 62 is a point shape which is the modification of the light detection part 60. (A) shows the time change of the inclination angle θ, (b) shows the output current of the light detection unit 60 when the reflecting surface 33 vibrates at the scanning angle ± θ _A , and (c) shows the scanning angle ± θ _B. The output current of the light detection unit 60 when the reflection surface 33 vibrates is shown. It is a figure which shows the outline of the optical scanning apparatus 230 in 2nd Embodiment. It is a figure which shows the outline of the optical scanning apparatus 240 in 3rd Embodiment. It is a figure which shows the optical scanning apparatus 250 which is a modification of 3rd Embodiment. It is a figure which shows the outline of the optical scanning apparatus 260 in 4th Embodiment. It is a figure which shows the optical scanning apparatus 270 which is a modification of 4th Embodiment. It is a figure which shows the 5th Embodiment in which a laser beam spreads in the XZ plane direction in an optical scanner 130. It is a figure which shows the scanning range of the 1st light 13 in a screen 300. It is a figure which shows the optical scanning apparatus 280 which is 6th Embodiment. It is a figure which shows the optical scanning apparatus 290 which is 7th Embodiment. It is a figure which shows the confocal microscope system 500 in 8th Embodiment.

Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the invention within the scope of the claims. Also, not all combinations of features described in the embodiments are essential to the means of solving the invention.

FIG. 1 is a diagram showing an outline of the optical scanning apparatus 200 according to the first embodiment. The Z-axis of this example is an axis orthogonal to the X-axis and the Y-axis. The X, Y, and Z axes of this example constitute a right-handed system. The X, Y and Z axes are used to indicate the relative orientation of the optical scanning device 200 and the like. The Y-axis direction does not necessarily have to be parallel to the gravity direction. In the present specification, "up" and "down" are used as expressions indicating a direction parallel to the Y-axis direction, but these terms are also not limited to the vertical direction in the direction of gravity.

The optical scanning device 200 may have a function of irradiating the object to be scanned with the first light 13 from the window portion 98 and scanning the object to be scanned with the first light 13. The object to be scanned in this example is the screen 300. The optical scanning device 200 of this example includes a light source unit 10, an optical coupling unit 20, an optical scanner 30, a dichroic mirror 50, an optical detection unit 60, a CV conversion unit 70, a wiring board 79, and a scanning angle output. A unit 80, a control unit 90, an AC power supply unit 92, and a DC power supply unit 94 are included.

The light source unit 10 of this example includes a first light source 11 that emits the first light 13, and a second light source 12 that emits the second light 14. The first light 13 and the second light 14 of this example are laser light having different wavelengths from each other. For example, the first light 13 is light having a wavelength band of 450 nm or more and 495 nm or less, and the second light 14 is light having a wavelength band of 750 nm or more and 1400 nm or less. However, this is an example, and the wavelength bands of the first light 13 and the second light 14 are not limited to this range.

The combiner 22 and the combiner 24 of this example are examples of the optical coupling portion. In this example, the first light 13 is reflected by the combiner 22 and is incident on the combiner 24. The combiner 22 may be a mirror that reflects the first light 13. In this example, the combiner 24 reflects the second light 14 and transmits the first light 13. As a result, the first light 13 and the second light 14 are superposed on the optical path before they are incident on the optical scanner 30. In this example, since the first light 13 and the second light 14 can be applied to one point (one spot) on the surface of the reflecting unit 32, the first light 13 and the second light 14 are reflected. The design and assembly of the optical system is relatively easy as compared to the case where the surface of the portion 32 is applied to different positions.

In this example, both the first light 13 and the second light 14 are reflected by the optical scanner 30 and then separated by the dichroic mirror 50. The dichroic mirror 50 of this example is an example of an optical separation unit. The dichroic mirror 50 of this example separates the first light 13 and the second light 14 reflected from the optical scanner 30, respectively. In the dichroic mirror 50 of this example, the first light 13 is incident on the screen 300, and the second light 14 is incident on the photodetector 60.

Although the details will be described later, the photodetector 60 and the second light 14 may be used to correct the scanning angle of the optical scanner 30. The photodetector unit 60 may output a current signal corresponding to the intensity of the second light 14 to the scanning angle output unit 80 by receiving the second light 14 and performing photoelectric conversion.

In this example, since the first light 13 and the second light 14 are used, the intensity of the first light 13 for scanning the screen 300 and the second light 14 for correcting the scanning angle are used. It is advantageous that the strength of the light can be adjusted individually. Thereby, for example, the screen 300 can be scanned with the first light 13 having a higher intensity, and the intensity of the second light 14 incident on the photodetector 60 can be made constant. For example, when displaying an image or a moving image on the screen 300, the intensity of the first light 13 is adjusted, but the intensity of the second light 14 is kept constant.

In another example in which light of only one wavelength band is split by a beam splitter so that a part of the light is incident on the screen 300 and the rest is incident on the photodetector 60, the light emitted to the object to be scanned is irradiated. When the intensity of the light is reduced, the intensity of the light incident on the photodetector 60 is also reduced. In this case, there is a problem that the intensity of the light incident on the photodetector 60 is out of the measurable range in the photodetector 60, but this problem can be solved in this example.

The optical scanner 30 of this example is an example of an optical scanning unit. The optical scanner 30 of this example is an example of MEMS (MicroElectro Mechanical Systems). The optical scanner 30 is also called a micromirror, a microscanner, or the like because of its small size. The optical scanner 30 may include a reflecting unit 32, a driving unit 34 that drives the reflecting unit 32 so as to swing, and a base unit 36 that supports the driving unit 34.

The reflecting unit 32 of this example has a reflecting surface 33 on its outermost surface, which reflects the first light 13 and the second light 14. Further, the reflective portion 32 of this example has a thickness of about 100 nm, which is formed on the main body portion, a shaft portion 42 that supports the main body portion so as to be swingable in the X-axis direction, and functions as a reflective surface 33. It has an aluminum (Al) film. The reflecting portion 32 swings (that is, vibrates) at a high speed with a relatively small swing angle about the shaft portion 42. The shaft portion 42 of this example is a so-called torsion bar that is twisted by the swing of the reflective portion 32.

The drive unit 34 may be connected to the AC power supply unit 92 having a voltage value _VA , and the reflection unit 32 may be connected to the DC power supply unit 94 having a voltage value _VA . The AC power supply unit 92 may be a variable AC power supply. The drive unit 34 and the reflection unit 32 are electrically isolated via a minute gap, and a Coulomb force (also referred to as electrostatic force or electrostatic attraction force) according to the electric charge supplied by each power supply unit is provided between the drive unit 34 and the reflection unit 32. May occur. The drive unit 34 of this example is fixed to the wiring board 79 via the base unit 36 and the like, and the reflection unit 32 swings relative to the drive unit 34.

The reflecting portion 32 and the reflecting surface 33 of this example swing so as to be tilted by a maximum of | ± θ _M | degree with respect to a plane parallel to the XZ plane. Further, in this example, the angle formed by the reflecting portion 32 or the reflecting surface 33 and the plane parallel to the XZ plane at an arbitrary time is expressed as an inclination angle θ. On the other hand, the maximum value of the inclination angle θ in the reflecting portion 32 or the reflecting surface 33 is expressed as θ _M. That is, −θ _M ≦ tilt angle θ ≦ θ _M. Further, in this example, the inclination angle θ _M of the reflection portion 32 or the reflection surface 33 is referred to as a scanning angle. The scanning angle is also the magnitude of the scanning angle. In this example, the inclination angle θ of the reflection portion 32 is equal to the inclination angle θ of the reflection surface 33. Therefore, although the two are not distinguished in this example, the inclination angle θ may mean the inclination angle θ of the reflecting surface 33.

The optical scanner 30 can be formed, for example, by etching an SOI (Silicon on Insulator) substrate. For example, an SOI substrate having a first single crystal silicon layer, a silicon dioxide (SiO ₂ ) layer, and a second single crystal silicon layer is microprocessed by reactive ion etching (RIE) to obtain light. The scanner 30 can be formed. In one example, the reflective portion 32, the driving portion 34, and the shaft portion 42 may be formed by processing a first single crystal silicon layer. The substrate portion 36 may be formed by processing a second single crystal silicon layer. At least the silicon dioxide layer and the second single crystal silicon layer located immediately below the reflective portion 32 may all be removed. A silicon dioxide layer may remain between the drive unit 34 and the base unit 36.

The CV conversion unit 70 of this example is an example of the capacitance voltage conversion unit. The CV conversion unit 70 of this example is a charge amplifier circuit. The CV conversion unit 70 may have a function of converting the capacitance _CM into a voltage signal. As will be described later, the capacitance _CM may be formed by a predetermined region 37 in the reflection unit 32 and the detection unit 38. The capacitance CM may change depending on the inclination angle _θ of the reflecting portion 32. The CV conversion unit 70 of this example receives a change in the tilt angle θ as a current signal from the optical scanner 30, converts it into a voltage signal, and outputs it to the scanning angle output unit 80.

The optical scanner 30 and the CV conversion unit 70 are provided close to each other on the same wiring board 79. For example, the optical scanner 30 and the CV conversion unit 70 are provided close to each other within a few mm. As a result, the possibility that noise is added to the current signal output from the optical scanner 30 can be reduced as compared with the case where the optical scanner 30 and the CV conversion unit 70 are provided separately on another substrate. The detection accuracy of the angle θ can be improved.

The scanning angle output unit 80 of this example is an example of a state detection unit. The scanning angle output unit 80 may detect the state of the reflection unit 32 based on the current signal from the photodetection unit 60 and the voltage signal from the CV conversion unit 70 corresponding to the change in the _capacitance CM. .. The inclination angle θ of the reflecting portion 32 is an example of the state of the reflecting portion 32. That is, the scanning angle output unit 80 may detect the tilt angle θ (including the scanning angle θ _M ) of the reflecting unit 32 at an arbitrary time.

Further, the scanning angle output unit 80 of this example can also detect the inclination angle θ (including the scanning angle θ _M ) based only on the current signal from the light detection unit 60. Further, the scanning angle output unit 80 of this example has an inclination angle in which the reflection unit 32 advances "counterclockwise" with respect to a plane parallel to the XX plane based only on the current signal from the light detection unit 60. It is also possible to detect whether it has + θ or has a tilt angle −θ advanced “clockwise”. The positive / negative of the tilt angle (that is, the tilt direction) is also an example of the state of the reflecting portion 32.

The control unit 90 controls at least one of the outputs of the first light source 11 and the second light source 12 and the voltage value _VA of the AC power supply unit 92 based on the information from the scanning angle output unit 80. good. The control unit 90 may increase or decrease the magnitude of the voltage value _VA in order to keep the scanning angle θ _M constant. Further, the control unit 90 may increase or decrease the output of the laser light of the first light source 11 in order to scan the screen 300 with an appropriate light intensity.

Further, the control unit 90 may increase or decrease the intensity of the second light 14 so that the amount of charge photoelectrically converted with respect to the intensity of the light in the photodetection unit 60 has linearity. More preferably, the control unit 90 makes the peak of the Gaussian intensity distribution in the second light 14 the median value of the upper limit value and the lower limit value of the range of the light intensity that realizes the above-mentioned linearity. The intensity of the light 14 of 2 may be adjusted.

Further, the control unit 90 may increase the intensity of the second light 14 emitted from the light source unit 10 according to the length of use of the optical scanner 30. In this example in which the light source unit 10 emits laser light, the light intensity is, for example, energy [W / cm ² ] per unit area and unit time. For example, if it is used for one year or more, the aluminum film which is the reflecting surface 33 may be partially peeled off, which may weaken the intensity of the laser beam emitted from the optical scanner 30. By increasing the intensity of the laser light according to the usage time of the optical scanner 30, the intensity of the light incident on the light detection unit 60 can be kept constant as compared with the case where the intensity of the laser light is not controlled.

FIG. 2 is a diagram showing an optical scanner 30 and a CV conversion unit 70. The optical scanner 30 and the CV conversion unit 70 are shown surrounded by a broken line frame. For the purpose of facilitating understanding, a top view is shown for the optical scanner 30 together with the X, Y and Z axes, and a circuit diagram is shown for the CV conversion unit 70.

In this example, the main body portion and the reflecting surface 33 of the reflecting portion 32 have a rectangular shape in a top view. The reflective portion 32 of this example includes a plurality of comb teeth 31-1 and 31-2 provided at both ends of the main body portion in the Z-axis direction and separated from each other in the X-axis direction. Further, in this example, the reflective portion 32 and the fixed portion 40-1 are connected via the shaft portion 42-1 in the X-axis direction, and the reflective portion 32 and the fixed portion 40-2 are connected to the shaft portion 42-2 in the X-axis direction. Connected via.

The optical scanner 30 of this example has a pair of drive units 34-1 and 34-2, a pair of detection units 38-1 and a detection unit 38-3, and a pair of detection units at positions line-symmetrical with respect to the shaft unit 42. It has a unit 38-2 and a detection unit 38-4. In this example, the drive unit 34-1, the detection unit 38-1, and the detection unit 38-2 face each other in the + Z direction of the reflection unit 32. Further, the drive unit 34-2, the detection unit 38-3, and the detection unit 38-4 face each other in the −Z direction of the reflection unit 32. In the X-axis direction, the detection unit 38-1 and the detection unit 38-2 sandwich the drive unit 34-1, and the detection unit 38-3 and the detection unit 38-4 sandwich the drive unit 34-2.

Each of the drive unit 34-1 and the drive unit 34-2 in this example has comb teeth 35-1 and 35-2 protruding in the Z-axis direction. Further, each of the detection units 38-1 to 38-4 in this example also has comb teeth 39-1 to 39-4 protruding in the Z-axis direction. The comb teeth 35 and the comb teeth 39 may be arranged so as to mesh with the comb teeth 31 of the reflective portion 32. In this example, each of the comb teeth 35 and the comb teeth 39 is separated from the rectangular end of the reflective portion 32 and the comb teeth 31 of the reflective portion 32 so as to form a minute gap space.

Further, in this example, the voltage value V _B is applied to the comb teeth 31 of the reflective portion 32 and the main body portion. Further, a voltage value _VA is applied to the comb teeth 35 and the main body of the drive unit 34 of this example. In this way, the capacitance CM is formed by the predetermined regions 37-1 to _37-4 of the reflection unit 32 and the detection units 38-1 to 38-4. The capacitance CM may change according to the _fluctuation of the reflecting portion 32.

In this example, all the detection units 38 are electrically connected to each other and electrically connected to the inverting input terminal (-) of the amplifier 72 of the CV conversion unit 70. In this example, the capacitance C ₁ (formed by the region 37-1 and the detection unit 38-1) to the capacitance C ₄ (formed by the region 37-4 and the detection unit 38-4) is , It changes in the same manner according to the swing of the reflecting portion 32. Further, in this example, the capacitance CM is the _sum of the capacitances C ₁ to C ₄ ( _CM = C ₁ + C ₂ + C ₃ + C ₄ ), and the CV conversion unit 70 is from each capacitance C ₁ . The sum of the changes in C ₄ can be detected as _ΔCM . As a result, noise immunity can be improved as compared with the case where a change in only one capacitance C ₁ is detected, for example.

The potential difference between the reflection unit 32 and the detection unit 38 may be a predetermined value, and in this example, the potential difference is _VM . On the other hand, the capacitance _CM changes as the reflecting portion 32 swings. In this example, the amount of change in the capacitance _CM is expressed as _ΔCM . The amount of charge Q _M stored in the capacitance _CM changes in accordance with the change in the capacitance _CM . In this example, the change in the amount of charge Q _M is expressed as ΔQ _M. The change in the tilt angle θ of the reflecting unit 32 is converted into ΔQ _M , and ΔQ _M per unit time is input to the inverting input terminal (−) of the amplifier 72 as a current signal I _IN .

The CV conversion unit 70 of this example is a charge amplifier circuit that converts a current signal I _IN into a voltage signal V _OUT . The CV conversion unit 70 of this example has an amplifier 72, and a capacitor 76 and a resistor 74 connected in parallel to the amplifier 72, respectively. The amplifier 72 has a non-inverting input terminal (+), an inverting input terminal (−), and an output terminal 78. The non-inverting input terminal (+) may be electrically grounded.

In this example, one end of the resistor 74 is electrically connected to the inverting input terminal (−) and the other end is electrically connected to the output terminal 78. The resistor 74 may have a high resistance value of about MΩ to GΩ. The resistor 74 of this example has a resistance value of 1 GΩ. The resistor 74 can function as a negative feedback path of the amplifier 72 without passing the DC component of the current signal I _IN . Since the inverting input terminal (-) and the non-inverting input terminal (+) are virtually grounded, the detection unit 38 may be regarded as having a ground potential.

In this example, one end of the capacitor 76 is electrically connected to the inverting input terminal (−), and the other end is electrically connected to the output terminal 78. In this example, the capacitance C _f of the capacitor 76 does not change and is constant. Therefore, when the electric charge is charged / discharged by the current signal I _IN , the electric charge Q _f of the capacitor 76 changes. In this example, the change in the amount of charge Q _f is expressed as Δ Q _f . The voltage V _f in the capacitor 76 changes according to ΔQ _f . In this example, the change in voltage V _f is expressed as ΔV _f . As a result, the current signal I _IN is converted into the voltage signal V _OUT . However, the explanation is a qualitative explanation about V _OUT .

The voltage signal V _OUT output from the output terminal 78 of the amplifier 72 is the R _f of the resistor 74 in the amplifier 72, the capacitance C _f of the capacitor ₇₆ , the capacitance CM, and the voltage value V _B of the DC power supply unit 94. Quantitatively, it is represented by [Equation 1]. However, j is an imaginary unit, and _ω is the frequency of the capacitance CM that changes periodically.
[Number 1]
V _OUT = ( _{-jωR f} VBC _M ) / (1 + jωC _f R _f )

The gain G in the amplifier 72 is represented by [Equation 2] by transforming [Equation 1].
[Number 2]
G = | V _OUT / CM | = _{ωR f} | V _B | / {1+ (ωC _f R _f ) ² } ^1/2

Here, when ω is sufficiently high and ωC _f R _f is sufficiently larger than 1, the gain G can be approximated to [Equation 3]. In addition, in [Equation 3], "≈" means that it is an approximation. Since C _f is constant, if V _B is constant, the gain G is constant.
[Number 3]
G ≒ | V _B | / C _f

FIG. 3A shows an example of the state of the reflective unit 32. The left side of FIG. 3A shows a state of an inclination angle θ = −θ _M in which the reflecting surface 33 advances “clockwise” with respect to a plane parallel to the XZ plane. In the state of θ = _−θM , the lower part of the comb tooth 31-1 in the reflecting portion 32 and the upper part of the comb tooth 39-1 in the detecting portion 38-1 may partially overlap in the X-axis direction, and the comb tooth 31 may overlap. The upper part of -2 and the lower part of the comb teeth 39-3 may partially overlap in the X-axis direction. In the state of θ = −θ _M , the capacitance _CM becomes the minimum.

Further, the right side of FIG. 3A shows a state of an inclination angle θ = + θ _M in which the reflecting surface 33 advances “counterclockwise” with respect to a plane parallel to the XZ plane. In the state of θ = + θ _M , the upper part of the comb tooth 31-1 in the reflecting portion 32 and the lower part of the comb tooth 39-1 in the detecting portion 38-1 may partially overlap in the X-axis direction, and the comb tooth 31- The lower part of 2 and the upper part of the comb teeth 39-3 may partially overlap in the X-axis direction. Even in the state of θ = + θ _M , the capacitance _CM becomes the minimum.

Further, the center of FIG. 3A shows a state where the reflection surface 33 is parallel to the XX plane and the inclination angle θ = 0. When θ = 0, the overlapping area of the comb teeth 31 and the comb teeth 39 in the X- _axis direction becomes maximum, so that the capacitance CM becomes maximum.

FIG. 3B shows the relationship between the tilt angle _θ and the capacitance CM. The horizontal axis shows the inclination angle θ, and the vertical _axis shows the capacitance CM. Each of P ₁ to P ₅ indicates a tilt angle _θ and a capacitance CM corresponding to times t ₁ to t ₅ . P1 to _P5 correspond to t1 to _t5 in ₍ c) and (d) of FIG. ₃ , respectively. As described above, the capacitance _CM is maximum when θ = 0 (P ₁ , P ₃ and P ₅ ), and the capacitance _{CM is when θ = ± θ M (} P ₂ and P ₄ ). Is the minimum.

FIG. 3 (c) shows the time change of the inclination angle θ. The horizontal axis is the tilt angle θ, and the vertical axis is the time t. The tilt angle θ in this example is θ = 0 (time t ₁ ) → θ = + θ _M (time t ₂ ) → θ = 0 (time t ₃ ) → θ = −θ _M (time t ₄ ) → θ = 0. It changes with (time t ₅ ).

FIG. 3D shows the time change of the _capacitance CM. The horizontal axis is time _t , and the vertical axis is capacitance CM. The capacitance CM of this example changes in the order of maximum (time _{t 1} ) → minimum (time t ₂ ) → maximum (time t ₃ ) → minimum (time t ₄ ) → maximum (time t ₅ ). However, in this example, since the period of the capacitance _CM is half the period of the inclination angle θ, is the inclination angle θ + θ _M just by monitoring the _magnitude of the capacitance _CM ? It cannot be specified whether it is. This is because the reflective portion 32 of this example does not have a structure like the stepped portion described in Patent Document 2, and the capacitance _CM is the same at the scanning angle ± θ _M. However, the positive / negative of the tilt angle (that is, the tilt direction) is important for accurately scanning the object to be scanned with the first light 13. Therefore, in this example, the positive / negative of the tilt angle is specified by using the photodetector 60.

FIG. 4A is a top view of a one-dimensional PSD (Position Sensitive Detector) 61. The photodetector 60 may have a photoelectric conversion element provided in at least a part of the scanning length in which the photodetector 30 scans the second light 14 in the photodetector 60. The photodetector 60 of this example is a one-dimensional PSD 61 in which the light receiving surface 62 has a length L in the Z-axis direction. The one-dimensional PSD 61 is an example of a linear photoelectric conversion element.

In this example, the second light 14 reciprocates on the light receiving surface 62. In this reciprocating scan, the spot S1 of the _second light 14 located at the end in the −Z direction is indicated by _a broken line, and the light amount center of gravity g1 of the spot S1 is indicated by _a black circle. Further, in this example, the spot S ₂ of the second light 14 located at the end in the + Z direction in the reciprocating scan is indicated by a broken line, and the light amount center of gravity g ₂ of the spot S ₂ is indicated by a black circle. In this example, the length of the reciprocating scan of the second light 14, that is, the length from the end of the _spot S1 in the −Z direction to the end of the spot S2 in the ₊ Z direction is _LP . On the other hand, the length L in the Z-axis direction of the light receiving surface 62 of this example is a length equal to or greater than the scanning length LP (that is, _LP ≦ _L ).

The one-dimensional PSD61 of this example has a rectangular shape having a short side in the X-axis direction and a long side in the Z-axis direction. The one-dimensional PSD 61 has anode electrodes 63-1 and 63-2 at both ends in the Z-axis direction. The distance between the anode electrodes 63-1 and 63-2, also called the resistance length, is equal to the length L of the light receiving surface 62 in the Z-axis direction. In this example, the midpoint of length L is the reference position (zero point). In this example, the case where the light quantity center of gravity g _Z of the spot S _Z is located at the position z away from the zero point in the + Z direction is shown.

FIG. 4B is a cross-sectional view of the one-dimensional PSD 61. The one-dimensional PSD 61 of this example has a P-type layer 65, an I-type layer 66, and an N-type layer 67 in the order of proximity to the incident side of the second light 14. The P-type layer 65 and the N-type layer 67 form a PN junction with the I-type layer 66 interposed therebetween. Of the surface of the P-type layer 65, the portion not covered by the anode electrode 63 is the light receiving surface 62. The P-type layer 65 is also a resistance layer for the photoelectrically converted current. When light is incident on the light receiving surface 62, a current I _Z1 flows from the light quantity center g _Z to the anode electrode 63-1 on the P-type layer 65, and a current flows from the light quantity center g _Z to the anode electrode 63-2 on the P-type layer 65. I _Z2 flows. A cathode electrode 64 is provided under the N-type layer 67.

In this case, for example, the ratio of the current I _Z1 to the current I _Z2 is expressed as [Equation 4] using the length L and the position z.
[Number 4]
I _Z1 / I _Z2 = (L-2z) / (L + 2z)

Since I _Z1 and I _Z2 are obtained from the measurement and the length L is known, the position z can be calculated. Since the position z and the current ratio I _Z1 / I _Z2 have a one-to-one correspondence, the position of the light quantity center of gravity g _A can be specified from [Equation 4]. Thereby, by using the one-dimensional PSD 61, the position of the light quantity center of gravity g _Z at an arbitrary time can be specified. In this example, the scanning angle θ is positive when the position of the light quantity center of gravity g _Z is located in the + Z direction from the zero point, and the position of the light quantity center of gravity g _A is located in the −Z direction from the zero point. The scanning angle θ is negative. As described above, in this example, the positive / negative of the tilt angle can be specified by using the photodetector 60.

FIG. 5A shows the time change of the inclination angle θ. FIG. 5A corresponds to FIG. 3C. The horizontal axis is time t, and the vertical axis is the tilt angle θ. However, in this example, time t ₁ to time t ₉ are shown. The behavior of the tilt angle θ from the time _t5 to the time _t9 is the _same as that from the time _t1 to the time t5.

FIG. 5B shows the time change of the position of the light amount center of gravity _gZ in the photodetector unit 60. The horizontal axis is time t, and the vertical axis is the position of the center of gravity g _Z of light quantity. The center of gravity g _Z of the light quantity of this example changes in the range of −L _P / 2 ≦ z ≦ L _P / 2. Since the cycle of the change in the position of the center of gravity g _Z and the cycle of the tilt angle θ coincide with each other, the information of the scanning angle _{θ M} can be converted into the information of the scanning length LP.

FIG. 5C shows the time change of the output voltage in the CV conversion unit 70. The horizontal axis is time t, and the vertical axis is the voltage signal V _OUT [V] of the CV conversion unit 70. As is clear from the examples of FIGS. 3 ( _c ) and 3 (d), the period of the capacitance CM is half the period of the inclination angle θ. Similarly, the period of the voltage signal V _OUT in this example is half the period of the inclination angle θ.

By using the above-mentioned [Equation 2] and [Equation 3], when the voltage value V _B is constant, the _capacitance CM can be calculated by measuring V _OUT . In (c) of FIG. 5, V _OUT when the voltage value V _B is constant is shown by a solid line. The scanning angle output unit 80 of this example calculates the inclination angle θ of the reflecting surface 33 by V _OUT , and the positive / negative of the scanning angle θ _M is supplementarily corrected by the output of the light detection unit 60. As a result, the tilt angle θ can be obtained from the V _OUT from the V OUT at an arbitrary time with higher accuracy than that of the photodetector 60, and the correct scanning angle θ _M can also be obtained by using the photodetector 60.

However, when the magnitude of the voltage value V _B fluctuates due to electrical disturbance, the gain G changes as is clear from the above-mentioned [Equation 2] and [Equation 3]. When the gain G changes, the peak peak value (peak-to-peak value) of V _OUT changes even if the scanning angle θ _M is constant before and after the change in the gain G. In this case, the correct scanning angle θ _M cannot be calculated by measuring V _OUT . In (c) of FIG. 5, V _OUT in the example in which the voltage value V _B is decreased is shown by a broken line.

Therefore, the scanning angle output unit 80 may correct the scanning angle θ _M based on the output of the light detection unit 60. That is, the scanning angle output unit 80 may correct the peak peak value of the voltage signal V _OUT corresponding to the magnitude of the scanning angle θ _M based on the output of the light detection unit 60. More specifically, since the peak peak value of the light amount center of gravity _gZ in the photodetection unit 60 does not change even if the gain G changes, the scanning angle output unit 80 has the peak peak value of the light amount center of gravity _gZ (in this example). , ± L _P / 2) can be used as a reference to sequentially correct the peak value of the voltage signal V _OUT .

The scanning angle output unit 80 of this example corrects the magnitude of the voltage signal V _OUT from the peak peak value of 2N to a larger value of 2M based on the output current of the photodetection unit 60. As described above, in this example, the positive / negative of the scanning angle θ _M and the magnitude of the scanning angle θ _M at a specific time are corrected. The correction between the positive and negative of the scanning angle θ _M and the magnitude of the scanning angle θ _M may correspond to the above-mentioned correction of the scanning angle.

The capacitance _CM may change depending on the temperature of the optical scanner 30. If a table showing the relationship between the output of the photodetector 60 and the voltage signal V _OUT at an arbitrary temperature is prepared in advance, the voltage signal V _OUT from the output of the photodetector 60 can be scanned by the scanning angle output unit 80 based on the table. Can also be corrected. The scanning angle output unit 80 may correct the voltage signal V _OUT based on both the temperature change table and the output of the photodetection unit 60.

The light source unit 10 may continue to emit the second light 14 while the first light 13 is emitted. That is, the second light 14 for the photodetector 60 used for correcting the peak value and the positive / negative of the scanning angle θ _M may always be emitted while the screen 300 is scanned by the first light 13. As a result, the first light 13 can always be corrected while the screen 300 is scanned by the first light 13.

FIG. 6 is a diagram showing an optical scanning device 210 which is a first modification of the first embodiment. In this example, the first light 13 and the second light 14 are not overlapped on the optical path and are incident on different positions of the reflecting portion 32. However, in this example, the first light 13 and the second light 14 are incident on the reflecting portion 32 in parallel with each other. For example, the first light 13 and the second light 14 are incident on the substantially center of the reflecting surface 33 with the light amount center of gravity g _Z deviated from each other by a small distance Δz. Thereby, the optical scanning device 210 having the same function as that of the first embodiment can be realized without using the combiners 22 and 24. This example is advantageous in that the number of parts can be reduced as compared with the first embodiment.

FIG. 7 is a diagram showing an optical scanning device 220 which is a second modification of the first embodiment. In this example, the first light 13 and the second light 14 are not overlapped on the optical path and are incident on the same position of the reflecting portion 32 at different angles. In this example, the vertical straight line 44 and the first light 13 form an angle α with respect to the reflecting surface 33 having an inclination angle θ = 0, and the vertical straight line 44 and the second light 14 form an angle β larger than the angle α. Form. Thereby, while scanning the first light 13 and the second light 14 with the optical scanner 30, the emission destinations of the first light 13 and the second light 14 can be separated. The angles α and β may be appropriately determined according to the distance from the reflection unit 32 to the window unit 98 and the distance from the reflection unit 32 to the reflection unit 52.

In this example, the first light 13 is emitted from the window portion 98 to the screen 300, and the second light 14 is reflected by the reflecting portion 52 and incident on the photodetected portion 60. However, since both the first light 13 and the second light 14 are scanned by the optical scanner 30 at the same scanning angle _θM , the optical scanning device 210 having the same function as that of the first embodiment can be realized. Since the dichroic mirror 50 and the like are not required in this example, the point that the number of parts can be reduced is advantageous as compared with the first embodiment. Further, in this example, the photodetector unit 60 and the optical scanner 30 are provided on the wiring board 79. This has the advantage of facilitating optical assembly.

FIG. 8 is a diagram showing a photoelectric conversion element 68 having a point-shaped light receiving surface 62, which is a modification of the photodetector 60. The photoelectric conversion element 68 may be provided at a position separated from the center position of the scanning length _LP by a predetermined distance _lZ . In this example, the center position of the scanning length _LP corresponds to the reference position (zero point) of FIG. 4A. The photoelectric conversion element 68 may perform photoelectric conversion at the timing when the light quantity center of gravity g _Z arrives at a position separated by a distance l _Z in the + Z direction from the zero point.

The photoelectric conversion element 68 may be expressed as a dot-shaped photoelectric conversion element. Instead of connecting a plurality of electrically independent anode electrodes to the P-type layer as in the examples of FIGS. 4A and 4B, the photoelectric conversion element 68 connects one anode electrode to the P-type layer. It suffices to have a structure in which one cathode electrode is connected to the N-type layer.

FIG. 9A shows the time change of the inclination angle θ. The horizontal axis shows time, and the vertical axis shows the tilt angle θ. In this example, an example in which the scanning angle is θ _A is shown by a solid line, and an example in which the scanning angle is θ _B , which is smaller than θ _A , is shown by a broken line.

FIG. 9B shows the output current of the light detection unit 60 when the reflecting surface 33 vibrates at the scanning angle ± θ _A , and FIG. 9C shows the reflecting surface 33 vibrates at the scanning angle ± θ _B. The output current of the light detection unit 60 in the case is shown. The horizontal axis is the same time as (a) in FIG. 9, and the vertical axis is the output current [A] of the photoelectric conversion element 68.

The photoelectric conversion element 68 of this example generates a current at the timing when the second light 14 is incident. In this example, since the peak peak value at the position of the center of gravity g _Z of the light amount is not detected, the peak peak value of the voltage signal V _OUT is not corrected. However, also in this example, the positive or negative of the scanning angle θ _M can be specified by using the output of the photoelectric conversion element 68. The photoelectric conversion element 68 of this example generates a current when the inclination angle θ of the reflection surface 33 is positive. Therefore, even in this example, the positive / negative of the scanning angle can be corrected. Further, in this example, since the one-dimensional PSD 61 and the CV conversion unit 70 are not used, the optical scanning apparatus 200 can be manufactured at a lower cost than the example using these.

In another example, the peak value of the voltage signal V _OUT may be corrected. In this case, the scanning angle output unit 80 may have a table corresponding to the current output timing interval from the photoelectric conversion element 68 and the scanning angle θ _M in advance. For example, by referring to the table, the scanning angle output unit 80 V _OUT so as to correspond to the scanning angle θ _A when the current output timing interval obtained from the photoelectric conversion element 68 is Δt _A. May be corrected. Similarly, the scanning angle output unit 80 may correct V _OUT so as to correspond to the scanning angle θ _B when the current output timing interval is Δt _B.

FIG. 10 is a diagram showing an outline of the optical scanning device 230 according to the second embodiment. The dichroic mirror 54 of this example transmits the first light 13 and reflects the second light 14. Therefore, in this example, the window portion 98 is provided above the dichroic mirror 54, and the photodetection portion 60 is provided below the dichroic mirror 54. Although this example differs from the first embodiment in this respect, the same advantageous effects as those of the first embodiment can be obtained. Further, this example and each of the above-mentioned modifications may be combined.

FIG. 11 is a diagram showing an outline of the optical scanning device 240 according to the third embodiment. The optical scanning device 240 of this example has an optical scanner 130 and a CV conversion unit 170 on a wiring board 79, and a reflection unit that reflects the first light 13 and the second light 14 among the light reflected from the optical scanner 30. 52 and further. The optical scanner 130 of this example is an example of an additional optical scanning unit. Further, the reflective portion 52 of this example is an example of the first optical member.

The shaft portion 42 of the optical scanner 30 is stretched in the X-axis direction, whereas the shaft portion of the optical scanner 130 is stretched in the Z-axis direction. The optical scanner 130 may have a structure in which the optical scanner 30 is rotated about 90 degrees around the Y axis. The optical scanner 130 of this example reflects the first light 13 and the second light 14 reflected from the reflecting unit 52 to the dichroic mirror 50. The first light 13 is reflected by the dichroic mirror 50, and the second light 14 passes through the dichroic mirror 50. In the optical scanning device 240 of this example, the optical scanner 30 can scan the screen 300 in the first direction, and the optical scanner 130 can scan the screen 300 in the second direction orthogonal to the first direction.

Similar to the CV conversion unit 70, the CV conversion unit 170 is a voltage signal V _OUT corresponding to the capacitance _CM formed by the predetermined region in the reflection unit of the optical scanner 130 and the detection unit of the optical scanner 130. May be output to the scanning angle output unit 80. Further, the photodetector unit 60 may be a two-dimensional PSD. The two-dimensional PSD may have a function of individually detecting the scanning direction of the optical scanner 30 and the scanning direction of the optical scanner 130, and may be a double-sided split type PSD or a surface split type PSD. good. Also in this example, the scanning angle output unit 80 can correct the peak peak value of the voltage signal V _OUT corresponding to the magnitude of the scanning angle θ _M based on the output of the photodetection unit 60, and the scanning angle θ It is also possible to correct the positive or negative of _M.

FIG. 12 is a diagram showing an optical scanning device 250 which is a modification of the third embodiment. The optical scanning device 250 of this example has a dichroic mirror 150-1 instead of the reflection unit 52, a dichroic mirror 150-2 instead of the dichroic mirror 50, and additionally has a light detection unit 160. .. The dichroic mirror 150-1 of this example is an example of a second optical member, and the dichroic mirror 150-2 of this example is an example of a third optical member. Further, the photodetector 160 of this example is an example of an additional photodetector.

The dichroic mirror 150-1 transmits a part of the second light 14 among the light reflected from the optical scanner 30, and reflects the part other than the part of the second light 14 and the first light 13. You can do it. Then, a part of the second light 14 transmitted through the dichroic mirror 150-1 may be incident on the photodetector 60. For example, 50% of the second light 14 passes through the dichroic mirror 150-1. The scanning angle output unit 80 of this example can correct the peak value of the voltage signal V _OUT and the positive / negative of the scanning angle θ _M in the optical scanner 30 based on the output of the optical detection unit 60.

Further, the optical scanner 130 may reflect the first light 13 and the second light 14 reflected from the dichroic mirror 150-1, respectively. The dichroic mirror 150-2 may have the first light 13 of the light reflected from the optical scanner 130 incident on the screen 300 and the second light 14 incident on the light detection unit 160. In this example, the first light 13 is reflected by the dichroic mirror 150-2, and the remaining 50% of the second light 14 passes through the dichroic mirror 150-2. The scanning angle output unit 80 of this example can also correct the peak value of the voltage signal V _OUT and the positive / negative of the scanning angle θ _M in the optical scanner 130 based on the output of the optical detection unit 160.

FIG. 13 is a diagram showing an outline of the optical scanning apparatus 260 according to the fourth embodiment. The dichroic mirror 54 of this example transmits the first light 13 and reflects the second light 14. Therefore, in this example, the window portion 98 is provided above the dichroic mirror 54, and the photodetection portion 60 is provided below the dichroic mirror 54. Although this example differs from the third embodiment in this respect, the same advantageous effects as those of the third embodiment can be obtained. In this example, the photodetector unit 60 and the optical scanners 30 and 130 are provided on the wiring board 79. This has the advantage of facilitating optical assembly.

FIG. 14 is a diagram showing an optical scanning device 270 which is a modification of the fourth embodiment. This example is the same as the fourth embodiment in that the window portion 98 is provided above the dichroic mirror 54 and the light detection portion 60 is provided below the dichroic mirror 54, and has two dichroic mirrors. It is the same as the modification of the third embodiment. However, the dichroic mirror 150-2 of the third embodiment transmits the second light 14 and reflects the first light 13, whereas the dichroic mirror 154 of this example transmits the first light 13. It transmits and reflects the second light 14. In this respect, it differs from the modified example of the third embodiment. The dichroic mirror 154 of this example is an example of a third optical member. Also in this example, the same advantageous effect as that of the third embodiment can be obtained.

In this example, the photodetector 160 and the optical scanners 30 and 130 are provided on the wiring board 79. This is advantageous in that optical assembly becomes easier as compared with the case where both the photodetectors 60 and 160 are not provided on the wiring board 79. By the way, in the third and fourth embodiments, an example of scanning laser light in two orthogonal directions by individual optical scanners 30 and 130 is shown. However, instead of the two optical scanners 30 and 130, one two-axis optical scanner that scans the laser beam two-dimensionally may be used.

FIG. 15A is a diagram showing a fifth embodiment in which the laser beam spreads in the XX plane direction in the optical scanner 130. In this example, the first light 13 and the second light 14 are superposed on the optical path. However, in this example, the light is incident in dots in the optical scanner 30 in the previous stage, whereas the laser light is spread in the process of being reflected from the optical scanner 30 to the optical scanner 130. The range of the laser beam on the reflecting surface of the optical scanner 130 is shown by a broken line. The area of the broken line is larger than the area of the dotted light in the optical scanner 30 in the previous stage. The configuration of the optical scanning device of this example may be the same as that of the optical scanning device 240 of the third embodiment, for example.

FIG. 15B is a diagram showing a scanning range of the first light 13 on the screen 300. In this example, the first light 13 is scanned in a curved line in the second direction on the screen 300. On the other hand, the first light 13 is linearly scanned on the screen 300 in the first direction orthogonal to the second direction.

By the way, for example, due to a temperature change of the optical scanner 130, the scanning angle θ _M may be small even if the voltage value _VA of the AC power supply unit 92 is constant. When the scanning angle θ _M of the optical scanner 130 becomes smaller, the range in which the first light 13 is scanned on the screen 300 is reduced from the scanning range A to the scanning range B. Along with this, the scanning length in the first direction is reduced from the scanning length _LA to the scanning length _LB. The decrease in scanning length in the first direction is similarly reflected in the photodetector 60.

Therefore, in this example, the voltage value _VA of the AC power supply unit 92-2 may be increased so as to increase the scanning angle θ _M based on the output of the light detection unit 60 (for example, two-dimensional PSD). In one example, if the scanning length L of the photodetector 60 corresponding to the predetermined scanning angle θ _M is recorded, the voltage value is obtained so that the recorded scanning length L can be obtained by the photodetector 60. _VA may be adjusted.

FIG. 16 is a diagram showing an optical scanning apparatus 280 according to a sixth embodiment. In the optical scanning apparatus 280, a laser beam emitted from one light source may be used. In the sixth embodiment, the first light 13 and the second light 14 may be light having the same wavelength. Therefore, either the first light source 11 or the second light source 12 may be used. The light source unit 10 of this example does not have the second light source 12, but has the first light source 11. Further, the optical scanning device 280 of this example has a beam splitter 56 instead of the dichroic mirror 50. This point is different from the first embodiment.

In this example, a part of the first light 13 reflected by the optical scanner 30 is reflected by the beam splitter 56. The first light 13 reflected by the beam splitter 56 is incident on the screen 300. As a result, the screen 300 can be scanned by the first light 13. Further, the rest of the first light 13 reflected by the optical scanner 30 passes through the beam splitter 56. The first light 13 transmitted through the beam splitter 56 is incident on the photodetector 60. As a result, the photodetection unit 60 can output a current signal corresponding to the intensity of the first light 13 to the scanning angle output unit 80. Also in this example, as in the first embodiment, advantages such as specifying the positive and negative of the inclination angle can be obtained. A second light source 12 may be used instead of the first light source 11. Further, this example may be modified as in the second embodiment (FIG. 10).

FIG. 17 is a diagram showing an optical scanning device 290 according to a seventh embodiment. In the optical scanning device 290, a laser beam emitted from one light source may be used. Also in the seventh embodiment, the first light 13 and the second light 14 may be light having the same wavelength. Therefore, either the first light source 11 or the second light source 12 may be used. The light source unit 10 of this example does not have the second light source 12, but has the first light source 11. Further, the optical scanning device 290 of this example has a beam splitter 56 instead of the dichroic mirror 50. This point is different from the third embodiment (FIG. 11).

Also in this example, the screen 300 can be scanned by the first light 13 reflected by the beam splitter 56. Further, the first light 13 transmitted through the beam splitter 56 is incident on the photodetector 60. As a result, the photodetection unit 60 can output a current signal corresponding to the intensity of the first light 13 to the scanning angle output unit 80. Also in this example, as in the third embodiment, advantages such as specifying the positive and negative of the inclination angle can be obtained. A second light source 12 may be used instead of the first light source 11. Further, this example may be modified as in the modified example of the third embodiment (FIG. 12), the fourth embodiment (FIG. 13), or the modified example of the fourth embodiment (FIG. 14).

FIG. 18 is a diagram showing a confocal microscope system 500 according to an eighth embodiment. The confocal microscope system 500 of this example is an example of a measuring instrument. The confocal microscope system 500 of this example has a function of visualizing the uneven shape of the surface or the inside of the object to be scanned 600.

The confocal microscope system 500 of this example includes a light source unit 10, an optical coupling unit 20, a scanning angle output unit 80, a control unit 90, an optical fiber 400, a tip portion 510, a dichroic mirror 520, a light detection unit 530, and an AD conversion unit 540. , Has an image processing unit 550 and a display unit 560. The tip 510 may have the same configuration as any of the optical scanning devices 240, 250, 260 and 270 described above. However, due to the limitation of the housing size of the tip portion 510, the scanning angle output unit 80 and the control unit 90 may be provided outside the tip portion 510. Further, it is needless to say that the optical coupling portion 20 may be omitted and the configuration of the tip portion 510 may be changed depending on the embodiment of the optical scanning device to be applied.

The tip portion 510 may include a scanning portion 515, an objective lens 512, and a collimating lens 514. The scanning unit 515 may include optical scanners 30 and 130, a dichroic mirror 50, photodetectors 60 and 160, CV conversion units 70 and 170, a wiring board 79, and the like. Although the AC power supply unit 92 and the DC power supply unit 94 are not shown, the AC power supply unit 92 and the DC power supply unit 94 may be electrically connected to the scanning unit 515. In this example, the cofocal optical system is formed by arranging the end portion of the optical fiber 400 behind the collimating lens 514 and at a position conjugate with the focal position of the objective lens 512. The tip 510 of this example may be applied to an endoscope.

The object to be scanned 600 may be a human or animal cell placed on a cell culture device. The object to be scanned 600 may absorb the first light 13 emitted from the tip portion 510 and emit fluorescence. The object to be scanned 600 of this example may have a fluorescent material inside. The fluorescent material may absorb the first light 13 and emit fluorescence in a wavelength band different from that of the first light 13 and the second light 14. The fluorescence emitted from the object to be scanned 600 may be incident on the photodetector 530 via the dichroic mirror 520. The dichroic mirror 520 of this example has a function of reflecting the first light 13 and the second light 14 and transmitting the fluorescence.

The photodetector 530 may have a photoelectric conversion element such as a photodiode. The photodetector 530 may generate an electric charge depending on the intensity of fluorescence. The AD conversion unit 540 may have an analog-digital converter that converts an amount of charge, which is analog information, into a digital signal. The AD conversion unit 540 outputs a digital signal to the image processing unit 550, and the image processing unit 550 generates an image based on the digital signal. The image processing unit 550 of this example generates a resage scan image from a digital signal, and the display unit 560 displays the resage scan image. The user can visually recognize the object to be scanned 600 by the resage scan image.

The optical scanning devices 200 to 270 of each of the above-described embodiments may be applied not only to the confocal microscope system 500 but also to industrial measuring instruments. The industrial measuring instrument may be used for observing unevenness on the surface of an object, inspecting foreign matter on the surface of an object, and the like. In the industrial measuring instrument, it is not necessary to consider the limitation of the housing size of the tip portion 510.

Although the present invention has been described above using the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various changes or improvements can be made to the above embodiments. It is clear from the description of the claims that the form with such changes or improvements may be included in the technical scope of the present invention.

The order of execution of each process such as operation, procedure, step, and step in the apparatus, system, program, and method shown in the claims, specification, and drawings is particularly "before" and "prior to". It should be noted that it can be realized in any order unless the output of the previous process is used in the subsequent process. Even if the scope of claims, the specification, and the operation flow in the drawings are described using "first", "next", etc. for convenience, it means that it is essential to carry out in this order. It's not a thing.
[Item 1]
A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
A drive unit provided for swinging the optical scanning unit and
Capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and of the capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. A state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
Equipped with
The detection unit that forms the capacitance is an optical scanning device that is provided separately from the drive unit.
[Item 2]
A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
Capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and of the capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. A state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
Equipped with
The photodetector has a photoelectric conversion element provided in at least a part of the scanning length in which the photodetector scans the second light in the photodetector.
The photoelectric conversion element is an optical scanning device provided at a position separated from the center position of the scanning length by a predetermined distance, and the light receiving surface is a point-shaped photoelectric conversion element.
[Item 3]
A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
Capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and of the capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. A state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
It is an optical scanning device equipped with
The photodetector has a photoelectric conversion element provided in at least a part of the scanning length in which the photodetector scans the second light in the photodetector.
The photoelectric conversion element is a linear photoelectric conversion element having a light receiving surface having a length equal to or longer than the scanning length.
The state detection unit corrects the scanning angle formed by the reflection surface and the predetermined plane in the reflection unit based on the output of the light detection unit.
The optical scanning device further includes a capacitance voltage converter that converts the capacitance into a voltage signal.
The capacitance voltage conversion unit is an optical scanning device that corrects the voltage signal output by the capacitance voltage conversion unit to be large based on the output of the photodetection unit.
[Item 4]
A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
Capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and of the capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. A state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
A light separation unit that separates the first light and the second light, causes the first light to enter the object to be scanned, and causes the second light to enter the photodetector.
An optical scanning device.
[Item 5]
A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
Capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and of the capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. A state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
A second optical beam that transmits a part of the second light among the light reflected from the light scanning unit and reflects a part other than the part of the second light and the first light. Members and
An additional optical scanning unit that reflects the first light and the second light reflected from the second optical member, respectively.
With an additional photodetector,
Of the light reflected from the additional light scanning unit, a third optical member that causes the first light to be incident on the object to be scanned and the second light to be incident on the additional photodetecting unit.
Equipped with
The part of the second light transmitted through the second optical member is incident on the photodetector.
Optical scanning device.
[Item 6]
A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
Capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and of the capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. A state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
Equipped with
The optical scanning unit and the photodetecting unit are provided on the same substrate.
Optical scanning device.
[Item 7]
A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
Capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and of the capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. A state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
Equipped with
The intensity of the second light emitted from the light source unit is increased according to the length of use of the optical scanning unit.
Optical scanning device.
[Item 8]
The optical detection unit includes photoelectric conversion elements provided in at least a part of the scanning length in which the optical scanning unit scans the second light in the optical scanning unit, items 1, 4, 5, and 6. Or the optical scanning apparatus according to any one of 7.
[Item 9]
The optical scanning device according to item 2 or 8, wherein the photoelectric conversion element is a linear photoelectric conversion element having a light receiving surface having a length equal to or longer than the scanning length.
[Item 10]
Item 3. The optical scanning device according to item 3 or 8, wherein the photoelectric conversion element is provided at a position separated from the center position of the scanning length by a predetermined distance, and the light receiving surface is a point-shaped photoelectric conversion element.
[Item 11]
Item 9. The optical scanning apparatus according to item 9 or 10, wherein the state detecting unit corrects a scanning angle formed by a reflecting surface and a predetermined plane in the reflecting unit based on the output of the light detecting unit.
[Item 12]
The item according to any one of items 1 to 11, wherein the state detection unit corrects the positive / negative of the scanning angle formed by the reflection surface and the predetermined plane in the reflection unit based on the output of the light detection unit. Optical scanning device.
[Item 13]
The optical scanning apparatus according to any one of items 1 to 12, wherein the first light and the second light are incident on different positions of the reflecting portion.
[Item 14]
An item further comprising an optical coupling unit that superimposes the first light and the second light having a wavelength different from the wavelength of the first light on the optical path before incident on the optical scanning unit. The optical scanning apparatus according to any one of 1 to 12.
[Item 15]
Further provided is a light separation unit that separates the first light and the second light, causes the first light to be incident on the object to be scanned, and causes the second light to be incident on the photodetection unit. The optical scanning apparatus according to any one of items 1, 2, 3, 5, 6, or 7.
[Item 16]
Of the light reflected from the optical scanning unit, the first optical member that reflects the first light and the second light, and the first optical member.
An additional optical scanning unit that reflects the first light and the second light reflected from the first optical member, respectively.
Further prepare
The light separation unit causes the first light of the light reflected from the additional light scanning unit to be incident on the object to be scanned and the second light to be incident on the photodetection unit.
The optical scanning apparatus according to item 15.
[Item 17]
A second optical beam that transmits a part of the second light among the light reflected from the light scanning unit and reflects a part other than the part of the second light and the first light. Members and
An additional optical scanning unit that reflects the first light and the second light reflected from the second optical member, respectively.
With an additional photodetector,
Of the light reflected from the additional light scanning unit, a third optical member that causes the first light to be incident on the object to be scanned and the second light to be incident on the additional photodetecting unit.
Further prepare
The part of the second light transmitted through the second optical member is incident on the photodetector.
The optical scanning apparatus according to any one of items 1, 2, 3, 6, or 7.
[Item 18]
The optical scanning device according to any one of items 1 to 17, wherein the light source unit continues to emit the second light while emitting the first light.
[Item 19]
Item 6. The optical scanning apparatus according to any one of items 1 to 5, wherein the optical scanning unit and the optical detection unit are provided on the same substrate.
[Item 20]
The optical scanning apparatus according to any one of items 1 to 6, wherein the intensity of the second light emitted from the light source unit is increased according to the length of use of the optical scanning unit.
[Item 21]
A measuring instrument having the optical scanning apparatus according to any one of items 1 to 20.

10 ... light source unit, 11 ... first light source, 12 ... second light source, 13 ... first light, 14 ... second light, 20 ... optical coupling part, 22 ... combiner, 24 ... combiner, 30 ... optical scanner, 31 ... comb tooth, 32 ... reflective part, 33 ... reflective surface, 34 ... drive unit, 35 ... comb tooth, 36 ... base part, 37 ... Area, 38 ... detection part, 39 ... comb tooth, 40 ... fixed part, 42 ... shaft part, 44 ... vertical line, 50 ... dichroic mirror, 52 ... reflective part, 54 ... dichroic mirror, 56 ... beam splitter, 60 ... light detector, 61 ... 1-dimensional PSD, 62 ... light receiving surface, 63 ... anode electrode, 64 ... cathode electrode, 65 ... P-type layer, 66 ... type I Layer, 67 ... N-type layer, 68 ... photoelectric conversion element, 70 ... CV converter, 72 ... Amplifier, 74 ... Resistor, 76 ... Condenser, 78 ... Output terminal, 79 ... Wiring board , 80 ... Scanning angle output unit, 90 ... Control unit, 92 ... AC power supply unit, 94 ... DC power supply unit, 98 ... Window unit, 130 ... Optical scanner, 150, 154 ... Dycroic mirror, 160・ ・ Optical detection unit, 170 ・ ・ CV conversion unit, 200, 210, 220, 230, 240, 250, 260, 270, 280, 290 ・ ・ Optical scanning device, 300 ・ ・ Screen, 400 ・ ・ Optical fiber, 500・ ・ Cofocal microscope system, 510 ・ ・ Tip part, 512 ・ ・ Objective lens, 514 ・ ・ Collimating lens, 515 ・ ・ Scanning unit, 520 ・ ・ Dicroic mirror, 530 ・ ・ Light detection unit, 540 ・ ・ AD conversion unit 550 ... Image processing unit, 560 ... Display unit, 600 ... Scanned target

Claims (20)

A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
The capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and the electrostatic capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. It includes a state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
The photodetector has a photoelectric conversion element provided in at least a part of the scanning length in which the photodetector scans the second light in the photodetector.
The photoelectric conversion element is an optical scanning device provided at a position separated from the center position of the scanning length by a predetermined distance, and the light receiving surface is a point-shaped photoelectric conversion element. A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
The capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and the electrostatic capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. An optical scanning device including a state detection unit that detects the state of the reflection unit based on a change and an output of the light detection unit in response to the second light.
The photodetector has a photoelectric conversion element provided in at least a part of the scanning length in which the photodetector scans the second light in the photodetector.
The photoelectric conversion element is a linear photoelectric conversion element having a light receiving surface having a length equal to or longer than the scanning length.
The state detection unit corrects the scanning angle formed by the reflection surface and the predetermined plane in the reflection unit based on the output of the light detection unit.
The optical scanning device further includes a capacitance voltage converter that converts the capacitance into a voltage signal.
The capacitance voltage conversion unit is an optical scanning device that corrects the voltage signal output by the capacitance voltage conversion unit to be large based on the output of the photodetection unit. A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
The electrostatic capacity formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and the electrostatic capacitance that changes according to the inclination angle of the reflective unit of the optical scanning unit. The state detection unit that detects the state of the reflection unit, the first light, and the second light are separated based on the change and the output of the light detection unit in response to the second light. A light separation unit that causes the first light to enter the object to be scanned and the second light to enter the light detection unit.
Of the light reflected from the optical scanning unit, the first optical member that reflects the first light and the second light, and the first optical member.
An additional optical scanning unit that reflects the first light and the second light reflected from the first optical member, respectively.
Equipped with
The light separation unit causes the first light of the light reflected from the additional light scanning unit to be incident on the scanned object and the second light to be incident on the photodetection unit .
Optical scanning device. A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
Capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and the capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. A state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
A second optical beam that transmits a part of the second light among the light reflected from the light scanning unit and reflects a part of the second light other than the part and the first light. Members and
An additional optical scanning unit that reflects the first light and the second light reflected from the second optical member, respectively.
With an additional photodetector,
Of the light reflected from the additional light scanning unit, a third optical member that causes the first light to be incident on the scanned object and the second light to be incident on the additional photodetecting unit. Prepare,
An optical scanning device in which a part of the second light transmitted through the second optical member is incident on the photodetector. A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
The capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and the electrostatic capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. It includes a state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
The optical scanning unit and the photodetecting unit are provided on the same substrate.
Optical scanning device. A light source unit that emits the first light and the second light that are applied to the object to be scanned, and the light source unit.
An optical scanning unit that reflects the first light and the second light,
A photodetector that receives the second light,
The capacitance formed by a predetermined region of the reflective portion of the optical scanning unit and the detection unit, and the electrostatic capacitance that changes according to the inclination angle of the reflective portion of the optical scanning unit. It includes a state detection unit that detects the state of the reflection unit based on the change and the output of the light detection unit in response to the second light.
An optical scanning device that increases the intensity of the second light emitted from the light source unit according to the length of use of the optical scanning unit. 3 . The optical scanning device according to. The optical scanning device according to claim 1 or 7 , wherein the photoelectric conversion element is a linear photoelectric conversion element having a light receiving surface having a length equal to or longer than the scanning length. The optical scanning device according to claim 2 or 7 , wherein the photoelectric conversion element is provided at a position separated from the center position of the scanning length by a predetermined distance, and the light receiving surface is a point-shaped photoelectric conversion element. The optical scanning apparatus according to claim 8 or 9 , wherein the state detecting unit corrects a scanning angle formed by a reflecting surface in the reflecting unit and a predetermined plane based on the output of the light detecting unit. 6 . Optical scanning device. The optical scanning apparatus according to any one of claims 1 to 11 , wherein the first light and the second light are incident on different positions of the reflecting portion. A claim further comprising an optical coupling portion for superimposing the first light and the second light having a wavelength different from that of the first light on an optical path before incident on the optical scanning portion. The optical scanning apparatus according to any one of 1 to 11 . Further provided is a light separation unit that separates the first light and the second light, causes the first light to be incident on the object to be scanned, and causes the second light to be incident on the photodetection unit. The optical scanning apparatus according to any one of claims 1, 2, 4 to 6 . Of the light reflected from the optical scanning unit, the first optical member that reflects the first light and the second light, and the first optical member.
Further comprising the first light reflected from the first optical member and an additional light scanning unit for reflecting the second light.
The light separation unit makes the first light of the light reflected from the additional light scanning unit incident on the scanned object and the second light incident on the light detection unit. The optical scanning device according to. A second optical beam that transmits a part of the second light among the light reflected from the light scanning unit and reflects a part of the second light other than the part and the first light. Members and
An additional optical scanning unit that reflects the first light and the second light reflected from the second optical member, respectively.
With an additional photodetector,
Of the light reflected from the additional light scanning unit, a third optical member that causes the first light to be incident on the scanned object and the second light to be incident on the additional photodetecting unit. Further prepare
The optical scanning apparatus according to any one of claims 1, 2, 5 and 6 , wherein the part of the second light transmitted through the second optical member is incident on the photodetector. The optical scanning device according to any one of claims 1 to 16 , wherein the light source unit continues to emit the second light while emitting the first light. The optical scanning apparatus according to any one of claims 1 to 4 , wherein the optical scanning unit and the optical detection unit are provided on the same substrate. The optical scanning apparatus according to any one of claims 1 to 5 , wherein the intensity of the second light emitted from the light source unit is increased according to the length of use of the optical scanning unit. A measuring instrument having the optical scanning apparatus according to any one of claims 1 to 19 .

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